JP4522352B2 - Circuit inspection method and circuit inspection system - Google Patents

Description

  The present invention relates to a circuit inspection method and circuit capable of improving inspection quality and shortening inspection time when inspecting a circuit to be inspected such as an integrated circuit (IC, LSI) mounted with a plurality of functional blocks. It relates to the inspection system.

  Along with the recent high integration of integrated circuits, a one-chip IC in which a plurality of functional blocks are mounted on one chip has been put into practical use. In addition, research on DRAM-embedded microcomputers that incorporate DRAMs in microcomputers and devices that incorporate power supply circuits is also underway. With one chip, the assembly process, which is a subsequent process, can be greatly shortened and downsizing becomes extremely easy, and it is estimated that the technology trend of one chip will be accelerated in the future.

  By the way, when inspecting circuits to be inspected (hereinafter referred to as DUTs) equipped with a plurality of functional blocks in parallel, if the inspection time differs for each DUT, the inspection time of the DUT having the longest inspection time among the plurality of DUTs. This limits the inspection throughput of the entire chip.

  Thus, a technique for performing asynchronous parallel inspection on a plurality of DUTs using a plurality of inspection apparatuses has been proposed (see, for example, Patent Document 1). FIG. 11 is a block diagram showing a configuration of a conventional circuit inspection system. The conventional circuit inspection system includes a control unit 101, and the control unit 101 controls the inspection devices 131, 132, and 133 through the interface control unit 102 connected to the control unit 101. The inspection devices 131, 132, and 133 include microprocessors 151, 152, and 153, interfaces 171, 172, and 173, and inspection circuits 161, 162, and 163, respectively.

The interfaces 171, 172, and 173 communicate with the interface control unit 102, and the microprocessors 151, 152, and 153 are connected to the inspection circuits 161, 162, and 162 based on instruction signals instructed by the control unit 101. An instruction to execute inspection is issued to H.163. The inspection circuits 161, 162, and 163 are connected to the DUTs 141, 142, and 143, and perform inspections on the respective DUTs asynchronously and in parallel.
Japanese Utility Model Publication No. 64-47148

  However, when a circuit to be inspected such as a multi-chip module, which is the mainstream in recent years, is an inspection target and each inspection device individually inspects each functional block in the multi-chip module, the technique disclosed in Patent Document 1 Since each inspection device 131, 132, 133 performs inspection asynchronously and in parallel, there has been a problem that it is not possible to accurately perform an inter-pin leakage current inspection between functional blocks.

  For example, in order to measure the pin-to-pin leakage current between functional blocks, it is necessary to perform an inspection with all the pins connected to each functional block applied with a high-side voltage or low-side voltage. In the circuit inspection system, since each inspection device performs inspection asynchronously, a high-side voltage is applied to one functional block pin and a low-side voltage is applied to the other functional block pin. There was a risk of measuring the leakage current between pins.

  That is, despite the same inspection, there is a possibility that the inspection is performed in a state where the inspection conditions are different, which causes a decrease in inspection quality. Therefore, there is a possibility that the defect is judged even though the inspection standard is actually satisfied, or conversely, the good judgment is made even though the inspection standard is not satisfied, and the reliability for the inspection may be lost. there were.

  The present invention has been made in view of such circumstances, and when each inspection apparatus inspects each functional block of a circuit to be inspected on which a plurality of functional blocks are mounted, the inspection is performed by another inspection apparatus. If the inspection of other inspection devices affects the inspection of each inspection device by judging whether or not the inspection can be performed depending on whether the inspection of each inspection device is affected or not, the inspection is appropriately performed. The inspection is stopped until the influence of the inspection is resolved. Conversely, if the inspection of other inspection devices does not affect the inspection of each inspection device, the inspection can be executed. An object of the present invention is to provide a circuit inspection method and a circuit inspection system that can improve inspection efficiency by appropriately determining the inspection and executing the inspection.

  Further, the present invention allows each functional block corresponding to each inspection device to be independently inspected by performing the inspection of each inspection device asynchronously when the inspection of each inspection device is not affected by the inspection of other inspection devices. An object of the present invention is to provide a circuit inspection method and a circuit inspection system capable of improving the inspection throughput.

  Furthermore, in the case where the inspection of each inspection apparatus is affected by the inspection of other inspection apparatuses, the execution of the inspection of the affected inspection apparatus is stopped and synchronization is established with the other inspection apparatuses. By inspecting each inspection device, the inspection of each inspection device is performed after the influence on the inspection of each inspection device by the inspection of other inspection devices is eliminated, so the inspection accuracy is improved. An object of the present invention is to provide a circuit inspection method and a circuit inspection system that can be performed.

Furthermore, the present invention can determine the state of each inspection device by grasping the inspection state of the other inspection device by determining its inspection state according to the inspection state of the other inspection device. It is an object of the present invention to provide a circuit inspection method and a circuit inspection system in which each inspection apparatus determines whether it is suitable, and the inspection efficiency can be improved.

Furthermore, the present invention is a state in which the inspection state is a pass / fail judgment state of the circuit to be inspected by the inspection of another inspection apparatus, and the inspection target circuit is a state in which the inspection apparatus has been determined to be no (defective) by each inspection apparatus. Even if the inspection is being continued by the inspection device, even if the circuit under test is determined to be defective by one inspection, even if the inspection is determined to be good by ending the ongoing inspection. It is an object of the present invention to provide a circuit inspection method and a circuit inspection system that can improve the throughput of inspection by preventing the execution of unnecessary inspection by stopping the inspection in each inspection apparatus because it is defective.

  Furthermore, according to the present invention, when the inspection of each inspection apparatus is affected by the inspection of another inspection apparatus, the inspection accuracy is low and there is a possibility that it does not make sense as an inspection. An object of the present invention is to provide a circuit inspection system that should not be executed but can stop the execution of unnecessary inspections and improve inspection efficiency.

  Furthermore, in the present invention, when the inspection of each inspection apparatus is affected by the inspection of another inspection apparatus, the synchronization establishment means provided in each inspection apparatus establishes synchronization with the other inspection apparatus, An object of the present invention is to provide a circuit inspection system that can eliminate the influence of the inspection of each inspection apparatus on the inspection of each inspection apparatus.

  Furthermore, in the present invention, when the inspection of each inspection apparatus is no longer affected by the inspection of another inspection apparatus, the control means provided in each inspection apparatus releases the synchronization established with the other inspection apparatus, An object of the present invention is to provide a circuit inspection system capable of improving the inspection throughput by independently inspecting each functional block corresponding to each inspection apparatus by performing inspection of each inspection apparatus asynchronously.

  Furthermore, in the case where the inspection of each inspection device is affected by the inspection of other inspection devices, the present invention is arranged so that the inspection by each inspection device is not affected at the end of inspection or at the time of inspection of other inspection devices. An object of the present invention is to provide a circuit inspection system capable of improving inspection quality by setting inspection conditions for inspection blocks, and improving inspection accuracy in inspection of each inspection apparatus as compared to before setting inspection conditions.

  Furthermore, the present invention further comprises a control device for comprehensively controlling the operation of each inspection device, thereby instructing the inspection of the circuit under test by each inspection device comprehensively by the control device. In addition, it is possible to manage the inspection program that defines the inspection flow in each inspection device with the control device, and it is also possible to centrally manage the inspection results of each inspection device with the control device The purpose is to provide a circuit inspection system.

A circuit inspection method according to the present invention is a circuit inspection method in a circuit inspection system including a plurality of inspection apparatuses capable of inspecting each functional block of a circuit to be inspected on which a plurality of functional blocks are mounted. When an apparatus performs its own inspection, it determines whether the inspection of another inspection apparatus has an effect on the inspection of itself, and if it determines that there is no influence, the apparatus does not synchronize itself with the inspection of another inspection apparatus. When the inspection is performed and it is determined that there is an influence, the self-inspection is performed after establishing synchronization with the other inspection apparatus .

In the present invention, when each inspection device constituting the circuit inspection system inspects each functional block of the circuit to be inspected on which a plurality of functional blocks are mounted, each inspection device is inspected by inspection of another inspection device. Whether or not the inspection can be executed is determined according to whether or not the inspection of the inspection apparatus is affected. As a result, when the inspection of each inspection device is affected by the inspection of another inspection device, the execution of the inspection is stopped as appropriate until the influence of the inspection is resolved, and conversely, by the inspection of the other inspection device. If there is no effect on the inspection of each inspection apparatus, the inspection can be executed. When the inspection of each inspection apparatus is affected, the inspection accuracy is low and there is a possibility that it does not make sense as an inspection. Therefore, the inspection should not be executed in such a case. Therefore, it is possible to prevent unnecessary inspections from being performed and improve inspection efficiency.
Further, when the inspection of each inspection apparatus is not affected by the inspection of another inspection apparatus, the inspection of each inspection apparatus is performed asynchronously. Accordingly, each functional block corresponding to each inspection apparatus is independently inspected, so that the inspection throughput is improved.
Further, when the inspection of each inspection apparatus is affected by the inspection of another inspection apparatus, the execution of the inspection of the affected inspection apparatus is stopped. Then, by establishing synchronization with other inspection apparatuses, the influence of the inspection of the other inspection apparatuses on the inspection of each inspection apparatus is eliminated. Then, the inspection is executed after eliminating the influence on the inspection of each inspection device by the inspection of other inspection devices.

In the circuit inspection method according to the present invention, each of the inspection devices determines a pass / fail judgment state of the circuit to be inspected by inspection of the other inspection device, and the circuit to be inspected is determined to be NO by the other inspection device. When it is determined that the state is in a state, the self-inspection is terminated .

In the present invention, each inspection device determines its own inspection state according to the inspection state of the other inspection devices. Thereby, by grasping the inspection state of the other inspection devices, each inspection device determines what state it is suitable for itself, and it is possible to improve the inspection efficiency.
In addition, when the inspection state described above is a pass / fail judgment state of the circuit to be inspected by the inspection of another inspection apparatus, and the inspection target circuit is a state determined to be no (defective) by another inspection apparatus, each inspection Since it is not necessary to inspect with an apparatus, even if an inspection is continuing in each inspection apparatus, the ongoing inspection is terminated. If a circuit to be inspected is determined to be defective in one inspection, it is defective even if it is determined to be good in other inspections. It is possible to improve the inspection throughput.

In the circuit inspection method according to the present invention, each inspection performed by the inspection apparatus is provided with an identifier for identifying the inspection contents. Each inspection apparatus assigns an identifier of an inspection being performed by another inspection apparatus to the other Depending on whether or not the combination of the received identifier of the inspection and the identifier of the own inspection exists in the database storing the combination of the inspecting inspection identifier, It is determined whether or not there is an influence on the inspection by the inspection .

Circuit inspection system according to the present invention, there is provided a circuit inspection system comprising a plurality of inspecting devices enable the inspection for each functional block of the circuit under test having a plurality of functional blocks are mounted, each test device, itself When performing the inspection, the determination means for determining whether or not the inspection of the other inspection apparatus has an influence on the own inspection, and when the determination means determines that there is an influence, If the determination means determines that there is an influence, synchronization execution means for establishing synchronization between them, the execution of its own inspection is stopped, and synchronization is established between the other inspection devices by the synchronization establishment means. And the control means for executing the self-inspection asynchronously with the inspection of other inspection devices when the determination means determines that there is no influence, while executing the self-inspection after being established. To do.

In the present invention, when each inspection device constituting the circuit inspection system inspects each functional block of the circuit to be inspected on which a plurality of functional blocks are mounted, each inspection device is inspected by inspection of another inspection device. Depending on whether or not the inspection of the inspection apparatus is affected, the control means provided in each inspection apparatus controls whether or not to execute the inspection. Thereby, when the control means provided in each inspection apparatus affects the inspection of each inspection apparatus due to the inspection of other inspection apparatuses, the execution of the inspection is appropriately stopped until the influence of the inspection is resolved, On the contrary, when the inspection of each inspection apparatus does not affect the inspection of other inspection apparatuses, the inspection can be executed. When the inspection of each inspection apparatus is affected, the inspection accuracy is low and there is a possibility that it does not make sense as an inspection. Therefore, the inspection should not be executed in such a case. Therefore, it is possible to prevent unnecessary inspections from being performed and improve inspection efficiency.
In addition, when the inspection of each inspection device is affected by the inspection of another inspection device, the synchronization establishing means provided in each inspection device establishes synchronization with the other inspection device, so that Eliminate the impact of inspection on the inspection of each inspection device.
Further, when the inspection of each inspection apparatus is affected by the inspection of another inspection apparatus, the control means provided in each inspection apparatus stops the execution of the affected inspection. Then, the synchronization establishing means provided in each inspection device establishes synchronization with other inspection devices, thereby eliminating the influence of the inspection of other inspection devices on the inspection of each inspection device. Then, the inspection is executed after eliminating the influence on the inspection of each inspection device by the inspection of other inspection devices.

The circuit inspection system according to the present invention further includes means for each of the inspection devices to determine a pass / fail judgment state of the circuit to be inspected by the inspection of the other inspection device, and the control means includes the circuit to be inspected described above. When it is determined that the state is determined to be negative by another inspection apparatus, the self-inspection is terminated .

In the present invention, each inspection device determines its own inspection state according to the inspection state of the other inspection devices. Thereby, by grasping the inspection state of the other inspection devices, each inspection device determines what state it is suitable for itself, and it is possible to improve the inspection efficiency.
In addition, when the inspection state described above is a pass / fail judgment state of the circuit to be inspected by the inspection of another inspection apparatus, and the inspection target circuit is a state determined to be no (defective) by another inspection apparatus, each inspection Since it is not necessary to inspect with an apparatus, even if an inspection is continuing in each inspection apparatus, the ongoing inspection is terminated. If a circuit to be inspected is determined to be defective in one inspection, it is defective even if it is determined to be good in other inspections. It is possible to improve the inspection throughput.

In the circuit inspection system according to the present invention, each inspection performed by the inspection device is provided with an identifier for identifying the inspection content, and each inspection device uses the identifier of the inspection being performed by another inspection device as the other Receiving means for receiving from the inspection apparatus, and a database storing a combination of the identifiers of the influential examinations, and the judging means includes the identifier of the examination received by the receiving means and the identifier of its own examination. According to whether or not a combination exists in the database, it is determined whether or not there is an influence on the inspection by the inspection of another inspection apparatus .

  The circuit inspection system according to the present invention releases the synchronization established with the other inspection device when the synchronization establishment means has no effect on the inspection of each inspection device by the inspection of the other inspection device. It is made to do so.

  In the present invention, when the inspection of each inspection device is no longer affected by the inspection of another inspection device, the control means provided in each inspection device releases the synchronization established with the other inspection device. The inspection devices are inspected asynchronously. Accordingly, each functional block corresponding to each inspection apparatus is independently inspected, so that the inspection throughput is improved.

  In the circuit inspection system according to the present invention, when each inspection apparatus has an influence on the inspection of each inspection apparatus by the inspection of the other inspection apparatus, The apparatus further includes means for setting inspection conditions for each inspection block so as not to affect the inspection by the inspection apparatus.

  In the present invention, when the inspection of each inspection apparatus is affected by the inspection of another inspection apparatus, at the end of the inspection of the other inspection apparatus or at the time of inspection, the inspection by each inspection apparatus is not affected. Set inspection conditions for each inspection block. Thereby, the inspection accuracy in the inspection of each inspection apparatus is improved as compared with before the inspection conditions are set, and the inspection quality is improved.

  The circuit inspection system according to the present invention further includes a control device for comprehensively controlling the operation of each of the inspection devices.

  In the present invention, by further including a control device for comprehensively controlling the operation of each inspection device, the control device can instruct comprehensively the inspection of the circuit under test by each inspection device. . Further, for example, an inspection program that defines an inspection flow in each inspection apparatus can be managed by the control apparatus, and updating and addition of the inspection program need not be managed by each inspection measure. Furthermore, the inspection results of each inspection apparatus can be centrally managed by the control apparatus, and the control apparatus can be utilized for grasping inspection lots.

  According to the present invention, when each inspection device constituting the circuit inspection system inspects each functional block of a circuit to be inspected on which a plurality of functional blocks are mounted, each inspection is performed by inspection of another inspection device. If the inspection of other inspection devices affects the inspection of each inspection device by judging whether or not the inspection can be performed depending on whether the inspection of the device is affected or not, the influence of the inspection is appropriate. The inspection is stopped until the problem is resolved. Conversely, when the inspection of each inspection apparatus does not affect the inspection of the other inspection apparatuses, the inspection can be executed. When the inspection of each inspection apparatus is affected, the inspection accuracy is low and there is a possibility that it does not make sense as an inspection. Therefore, the inspection should not be executed in such a case. Therefore, it is possible to prevent unnecessary inspections from being performed and improve inspection efficiency.

  According to the present invention, when the inspection of each inspection apparatus is not affected by the inspection of another inspection apparatus, the inspection of each inspection apparatus is performed asynchronously, thereby independently inspecting each functional block corresponding to each inspection apparatus. Thus, the inspection throughput is improved.

  According to the present invention, when the inspection of each inspection device is affected by the inspection of another inspection device, the execution of the inspection of the affected inspection device is stopped and the synchronization with the other inspection device is established. By inspecting each inspection device, the inspection of each inspection device is performed after the influence on the inspection of each inspection device by the inspection of other inspection devices is eliminated. Can be improved.

  According to the present invention, each inspection device determines its own inspection state in accordance with the inspection state of the other inspection device, and thereby grasps the inspection state of the other inspection device, so that Then, each inspection apparatus determines whether it is suitable, and the inspection efficiency can be improved.

  According to the present invention, when the inspection state is a pass / fail judgment state of the circuit to be inspected by the inspection of each inspection apparatus, and the inspection target circuit is a state determined to be bad (defective) by another inspection apparatus, Even if the inspection is ongoing in the device, if the circuit under test is determined to be defective in one inspection, it is defective even if it is determined good in other inspections. Therefore, by canceling the inspection in each inspection apparatus, it is possible to prevent unnecessary inspections from being performed and improve inspection throughput.

  According to the present invention, when the inspection of each inspection apparatus is affected by the inspection of another inspection apparatus, the inspection accuracy is low and there is a possibility that it does not make sense as an inspection. It should not be executed, and the control means provided in each inspection apparatus can stop executing unnecessary inspections and improve inspection efficiency.

  According to the present invention, when the inspection of each inspection apparatus is affected by the inspection of another inspection apparatus, the synchronization establishment means provided in each inspection apparatus establishes synchronization with the other inspection apparatus, The influence on the inspection of each inspection device by the inspection of the inspection device can be eliminated.

  According to the present invention, when the inspection of each inspection apparatus is no longer affected by the inspection of another inspection apparatus, the control means provided in each inspection apparatus releases the synchronization established with the other inspection apparatus, By performing the inspection of each inspection apparatus asynchronously, each functional block corresponding to each inspection apparatus is independently inspected, so that the inspection throughput can be improved.

  According to the present invention, when the inspection of each inspection apparatus is affected by the inspection of another inspection apparatus, each inspection apparatus is not affected at the end or inspection of the other inspection apparatus. By setting the inspection condition of the inspection block, the inspection accuracy in the inspection of each inspection apparatus is improved as compared with before the inspection condition is set, and the inspection quality can be improved.

  According to the present invention, by further comprising a control device for comprehensively controlling the operation of each inspection device, the control device comprehensively instructs the inspection of the circuit under test by each inspection device. Can do. Further, for example, an inspection program that defines an inspection flow in each inspection apparatus can be managed by the control apparatus, and updating and addition of the inspection program need not be managed by each inspection measure. Furthermore, the inspection results of each inspection device can be centrally managed by the control device, and the control device can be utilized for grasping the inspection lot and the like, and thus excellent effects can be obtained.

  Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments thereof.

FIG. 1 is a block diagram showing a configuration of a circuit inspection system according to the present invention.
The circuit inspection system according to the present invention includes a host computer device 1 and a plurality of inspection devices 2, 2,..., Which supply signals to the DUT 5 and signals such as inspection patterns through a handler (not shown). Application is performed to check whether the DUT 5 operates normally.

  The host computer device 1 includes a control unit 10, an operation unit 11, a display unit 12, an inspection program database (inspection program DB) 13, and a communication unit 14. Specifically, the control unit 10 is configured by a CPU, and is connected to each of the above-described hardware units via a bus. The control unit 10 controls the various units according to a control program stored in a built-in ROM. Fulfills the function.

  The inspection program DB 13 stores a program describing an inspection flow for one or a plurality of DUTs. The inspection program DB 13 can be updated as appropriate, and when there is a defect in the inspection program or when a new variety is added, the inspection program in the inspection program DB 13 is modified or an inspection program corresponding to the new variety Can be added.

  The operation unit 11 is for comprehensively operating the inspection devices 2, 2,..., And the inspection operator operates the operation unit 11 to instruct the inspection of the DUT 5 by the inspection devices 2, 2,. To do. For example, when the inspection operator inputs the product name of the DUT 5 using the operation unit 11, the control unit 10 causes the inspection corresponding to the input DUT 5 from the inspection programs stored in the inspection program DB 13. Select a program.

  The communication unit 14 communicates with the inspection device 2 (communication unit 22), and the control unit 10 transmits the inspection program selected according to the type of the DUT 5 to the inspection device 2 through the communication unit 14. FIG. 1 shows a state in which a first inspection program 13a, a second inspection program 13b, and a third inspection program 13c for DUT 5 are stored in the inspection program DB 13. As will be described in detail later, the first inspection program 13a is for the first functional block 51 that constitutes the DUT 5, the second inspection program 13b is for the second functional block 52 that constitutes the DUT 5, and the third inspection program 13c constitutes the DUT 5. This is an inspection program for the third function block 53.

  The display unit 12 is a display device such as a liquid crystal display or a CRT display, and performs an instruction to start an inspection of the circuit inspection system, an operation state, and an inspection result.

  As described above, the inspection devices 2, 2,... Perform inspection of the DUT 5 according to instructions from the host computer device 1. The inspection device 2 includes a control unit 20, a storage unit 21, a communication unit 22, and an inspection execution unit. 23. In the present invention, the control unit 20 of each inspection apparatus 2 determines whether or not the inspection can be performed according to the influence of the inspection of the other inspection apparatus on its own inspection, and whether or not to execute the inspection in the inspection apparatus. It functions as a control means for controlling the above. The control unit 20 of each inspection device 2 establishes synchronization with the other inspection devices in cooperation with the communication unit 22 when the inspection of each inspection device 2 is affected by the inspection of the other inspection devices. It also functions as a means.

  The communication unit 22 communicates with the host computer device 1 and other inspection devices, and the host computer device 1 and the inspection devices 2, 2,... Share information related to the inspection. At the start of actual inspection, the inspection program transmitted from the host computer device 1 is accepted. In addition, each inspection device 2 can grasp information related to the inspection such as the inspection conditions and the contents being inspected by other inspection devices by sharing the information.

  Specifically, the inspection is managed by an inspection number that uniquely identifies the inspection conditions and contents, and the communication unit 22 of each inspection device 2 displays the inspection number being inspected, the inspection number for which the inspection has been completed, the inspection result, and the like. , Output as a notification signal to the host computer device 1 and other inspection devices. In this way, the host computer device 1 and each inspection device 2 grasp the inspection number being inspected by another inspection device, the inspection number for which the inspection has been completed, the inspection result, and the like.

  The storage unit 21 is for storing an inspection program transmitted from the host computer device 1, and the control unit 20 performs an inspection in the inspection execution unit 23 according to the inspection program stored in the storage unit 21.

  The inspection execution unit 23 supplies power to the DUT 5 on which a plurality of functional blocks (here, the first functional block 51, the second functional block 52, and the third functional block 53) are mounted, and generates a predetermined inspection pattern. Applying and receiving the response output from the functional block and evaluating the functional block by comparing the response output with the expected value.

FIG. 2 is a diagram illustrating a state in which each inspection device inspects the functional blocks constituting the DUT.
The inspection devices 2a, 2b, and 2c send the inspection programs (the first inspection program 13a, the second inspection program 13b, and the third inspection program 13c) transmitted from the host computer device 1 through the respective communication units 22a, 22b, and 22c. Received and stored in the respective storage units 21a, 21b, 21c. The control units 20a, 20b, and 20c of the inspection devices 2a, 2b, and 2c read and read the first inspection program 13a, the second inspection program 13b, and the third inspection program 13c stored in the storage units 21a, 21b, and 21c. The inspection execution units 23a, 23b, and 23c are controlled according to the inspection program.

  The inspection execution units 23a, 23b, and 23c are connected to the first function block pin 51a, the second function block pin 52a, and the third function block pin 53a, so that the first function block 51 and the second function block 52 are connected. In addition to supplying power to the third function block 53 and applying a predetermined inspection pattern, response outputs from the first function block 51, the second function block 52, and the third function block 53 are received, and the response outputs and expected values are received. Are compared to evaluate the first functional block 51, the second functional block 52, and the third functional block 53.

  The inspection device 2a determines whether or not the inspection can be performed according to the influence of the inspection of the other inspection devices 2b and 2c on the inspection of itself. The control unit 20a identifies the inspection being executed by the other inspection apparatuses 2b and 2c by the inspection number, and determines whether or not the inspection corresponding to the inspection number affects its own inspection. For example, an inspection database (inspection DB) including information on a combination of inspection numbers different from the original inspection conditions is stored in the storage unit 21a in advance, for example, inspection accuracy decreases due to other inspections. The inspection apparatus 2a sets an inspection number (inspection number A) to be inspected from now on and the inspection number (inspection number B) under inspection in the other inspection apparatuses 2b and 2c as keywords. Whether or not the set keyword combination exists in the inspection DB is searched (the same applies to the inspection apparatuses 2b and 2c).

  When a combination of the inspection numbers (inspection number A and inspection number B) specified as two keywords exists in the inspection DB, the inspection (inspection) of the inspection device 2a is performed by the inspection (inspection number B) of the other inspection devices 2b and 2c. It can be determined that the inspection accuracy of number A) decreases. In such a case, the inspection apparatus 2a stops the execution of the inspection because the inspection accuracy decreases if the inspection is executed. Then, the inspection device 2a establishes synchronization with the other inspection devices 2b and 2c that affect the inspection accuracy, and the second function block 52 and the third function block 53 so as not to affect the inspection of the inspection device 2a. The setting voltage applied to the pins 52a and 53a is instructed to the other inspection devices 2b and 2c.

  On the other hand, when the combination of the inspection number A and the inspection number B does not exist in the inspection DB, the inspection accuracy of the inspection (inspection number A) of the inspection device 2a decreases due to the inspection (inspection number B) of the other inspection devices 2b and 2c. Since it can be determined that there is no risk of the inspection, the inspections by the inspection apparatuses 2a, 2b, and 2c are performed asynchronously in a predetermined inspection order.

  FIG. 3 is a time chart for explaining the inspection time by each inspection apparatus according to the present invention, and the vertical axis in FIG. 3 indicates the elapsed time of the inspection. Based on the first inspection program 13 a, the inspection apparatus 2 a executes a first inspection 31, a second inspection 32, and a third inspection 33 related to the first functional block 51. When the inspection device 2a performs the above-described three inspections asynchronously with respect to the other inspection devices (inspection devices 2b and 2c), the inspection time becomes T3-T0.

  Further, the inspection apparatus 2b executes the fourth inspection 34 and the fifth inspection 35 related to the second functional block 52 based on the second inspection program 13b. When the inspection device 2b performs the above-described two inspections asynchronously with respect to the other inspection devices (inspection devices 2c and 2a), the inspection time becomes T2-T0.

  Further, based on the third inspection program 13 c, the inspection apparatus 2 c executes a sixth inspection 36, a seventh inspection 37, an eighth inspection 38, and a ninth inspection 39 related to the third functional block 51. When the inspection device 2c performs the above-described four inspections asynchronously with respect to the other inspection devices (inspection devices 2a and 2b), the inspection time becomes T4-T0.

  When the inspection by the inspection devices 2a, 2b, and 2c is completed (T4), the DUT replacement 40 is performed by the handler, and the same inspection is performed on the next DUT from T5.

  As described above, since the inspection of the first functional block 51, the second functional block 52, and the third functional block 53 constituting the DUT 5 is performed asynchronously by the inspection apparatuses 2a, 2b, and 2c, respectively, the inspection throughput is increased. improves.

  By the way, depending on the inspection, the inspection of one functional block may be influenced by the voltage applied to the other functional block pins. For example, since the inter-pin leakage current inspection is for inspecting the leakage current between wirings laid out in the DUT 5, even if the functional blocks are different, the inspection result depends on the voltage applied to other functional blocks depending on the layout. Is affected.

  Therefore, when the inspection apparatus (for example, 2a) determines that the inspection is affected by the inspection of the other inspection apparatuses (for example, 2b and 2c), synchronization is established with the other inspection apparatuses (2b and 2c). . For example, when the inter-pin leakage current inspection of the first functional block 51 is performed by the inspection device 2a, synchronization is established with the other inspection devices 2b and 2c before performing the inspection. The other inspection devices 2b and 2c apply voltages applied to the second function block pin 52a and the third function block pin 53a at the end of the inspection of the second function block 52 and the third function block 53 or at the time of the inspection. Set to high side voltage. On the other hand, the inspection device 2a sets the applied voltage to the first functional block pin 51a to the high side voltage, and then applies the low side voltage to the inspection target pin to flow the current flowing through the inspection target pin, that is, between the low side pins. Measure the leakage current. Thus, in the low-side pin-to-pin leakage current, the high-side voltage is applied not only to the functional block in which the test target pin is provided but also to the pins related to other functional blocks. The current measurement accuracy is increased and the inspection quality is improved.

  Similarly, when inspecting the leakage current between the high-side pins, the other inspection devices 2b and 2c set the applied voltage to the second function block pin 52a and the third function block pin 53a to the low side voltage, and the inspection device 2a. After setting the voltage applied to the first functional block pin 51a to the low-side voltage, the high-side voltage is applied to the inspection target pin, and the current flowing through the inspection target pin, that is, the leakage current between the high-side pins is measured. Therefore, even in the high-side pin leakage current, the low-side voltage is applied not only to the functional block in which the test target pin is provided, but also to the pins related to other functional blocks. Measurement accuracy increases and inspection quality improves.

  FIG. 4 is a flowchart showing an outline of the inspection processing of the circuit inspection system according to the present invention. In the following description, for simplification of description, when there are two inspection apparatuses, that is, the first inspection program 13a is executed by the inspection apparatus 2a, and the second inspection program 13b is executed by the inspection apparatus 2b. The case will be described.

  First, the inspection device 2a transmits to the inspection device 2b a notification request signal for requesting notification of an inspection number for identifying an inspection being performed by the inspection device 2b (step S1). The inspection device 2b receives the notification request signal transmitted from the inspection device 2a (step S2), and transmits the inspection number under inspection to the inspection device 2a according to the notification request signal (step S3).

  The inspection device 2a receives the inspection number transmitted from the inspection device 2b (step S4), and a combination of the inspection number for identifying the inspection that the inspection device 2a will perform the inspection and the received inspection number exists in the inspection DB. It is determined whether or not to perform (step S5).

  In S5, when it is determined that the combination of the inspection number for identifying the inspection to be performed by the inspection apparatus 2a and the received inspection number does not exist in the inspection DB (S5: NO), the inspection apparatus 2a and the inspection apparatus 2b Since each inspection is independent and it can be determined that the inspections of the inspection device 2a and the inspection device 2b are not affected by each other, the inspection device 2a executes the inspection processing asynchronously (step S6).

  On the other hand, if it is determined in S5 that the inspection apparatus 2a has a combination of the inspection number for identifying the inspection to be performed and the received inspection number in the inspection DB (S5: YES), the inspection apparatus 2b performs the inspection. Since it can be determined that the inspection of the inspection apparatus 2a is affected, the inspection apparatus 2a performs synchronization processing in order to establish the synchronization between the inspection apparatus 2a and the inspection apparatus 2b and perform the inspection of the inspection apparatus 2a. Is sent to the inspection device 2b (step S7).

  The inspection device 2b receives the synchronization request signal transmitted from the inspection device 2a (step S8), and in response to the synchronization request signal, sends a response signal permitting transition to the synchronous mode to the inspection device 2a upon completion of inspection or upon inspection. Transmit (step S9). And the inspection apparatus 2a receives the response signal transmitted from the inspection apparatus 2b, and shifts to the synchronous mode (step S10). Thereby, synchronization is established between the inspection apparatus 2a and the inspection apparatus 2b, and the inspection processes of the inspection apparatus 2a and the inspection apparatus 2b are synchronized.

  Then, the inspection apparatus 2a executes the inspection process in the synchronous mode established with the inspection apparatus 2b (synchronous inspection process: step S11), and when the synchronous inspection process ends, the inspection apparatus 2a shifts to the asynchronous mode (step S12). . Note that the above-described inspection process is executed in each inspection of the inspection apparatuses 2a and 2b.

  Next, the synchronization check process (S11) according to the present invention will be described. FIG. 5 is a flowchart showing an outline of the synchronization check processing according to the present invention.

  In the synchronous inspection process (S11), first, the inspection device 2a transmits setting information related to the set voltage of the second functional block pin 52a to the inspection device 2b (step S21). This setting information relates to the setting voltage of the second function block pin 52a suitable for the inspection that the inspection apparatus 2a is to perform the inspection. Then, the inspection device 2b receives the setting information transmitted from the inspection device 2a (step S22), applies a setting voltage to the second functional block pin 52a based on the setting information (step S23), A notification signal indicating that the set voltage has been applied to the functional block pin 52a is transmitted to the inspection device 2a (step S24).

  The inspection device 2a receives the notification signal transmitted from the inspection device 2b (step S25), and grasps that the set voltage is applied to the second function block pin 52a. Accordingly, it is determined that the accuracy of the inspection that the inspection device 2a is to perform the inspection does not decrease, and the inspection device 2a applies the set voltage to the first function block pin 51a (step S26). An inspection voltage is applied to the inspection target pin to measure (inspect) the current flowing through the inspection target pin (step S27).

  As described above, in the synchronous inspection process, the processes of the inspection apparatus 2a and the inspection apparatus 2b are synchronized, the inspection of the second functional block 52 by the inspection apparatus 2b is stopped, and the voltage condition applied to the second functional block 52 is inspected. The inspection apparatus 2a is inspected under conditions suitable for the inspection of the apparatus 2a.

  Next, the operation flow of the circuit inspection system according to the present invention will be specifically described. 6, 7 and 8 are flowcharts showing an example of the operation flow of the circuit inspection system according to the present invention.

  First, the inspection device 2a and the inspection device 2b start executing inspection in an asynchronous state. The inspection device 2a performs a short check on the first function block pin 51a (step S31), and then performs an open check on the first function block pin 51a (step S32). On the other hand, the inspection device 2b performs a short check of the second function block pin 52a (step S33), and then performs an open check of the second function block pin 52a (step S34). In the short check and the open check, the voltage condition applied to each pin is the same, and the expected value of the current flowing through the measured pin to be inspected is different. Therefore, it may be possible to make a pass / fail judgment by one measurement without measuring the current flowing through the inspection target pin twice by the short check and the open check.

  Then, synchronization processing is performed to establish synchronization between the inspection device 2a and the inspection device 2b (synchronization processing: step S35). Here, the synchronization process (S35) is the process of S7, S8, S9 and S10 shown in FIG.

  Then, prior to the low-side pin leakage current inspection of the first functional block 51 by the inspection device 2a, the inspection device 2b receives the setting information transmitted from the inspection device 2a (see FIG. 5: S22), A high-side voltage is applied to the second function block pin 52a so as not to affect the low-side pin leakage current test of the first function block 51 (step S36). That is, the setting information here includes instruction information indicating that the high-side voltage is applied to the second functional block pin 52a. When the application of the high-side voltage to the second function block pin 52a is completed, the inspection device 2b transmits a notification signal indicating that the high-side voltage has been applied to the second function block pin 52a to the inspection device 2a. (Step S37).

  The inspection device 2a receives the notification signal transmitted from the inspection device 2b (step S38), grasps that there is no effect on the low-side pin-to-pin leakage current inspection of the first function block 51, and receives the first function block. A high-side voltage is applied to the working pin 51a (step S39). Then, the inspection apparatus 2a applies a low-side voltage to the inspection target pin, and measures a current flowing through the inspection target pin, that is, a leakage current between the low-side pins of the first functional block 51 (step S40). When the synchronous inspection process by the inspection devices 2a and 2b is completed, the synchronization established between the inspection device 2a and the inspection device 2b is released.

  Next, synchronization processing is performed again to establish synchronization between the inspection device 2a and the inspection device 2b (step S41), and the inspection device 2a and the inspection device 2b cooperate to generate a high-side pin of the first function block 51. Inspect leakage current flow.

  First, prior to the inspection of the high-side pin-to-pin leakage current of the first function block 51 by the inspection device 2a, the inspection device 2b receives the setting information transmitted from the inspection device 2a, thereby A low-side voltage is applied to the second functional block pin 52a so as not to affect the side-pin leakage current test (step S42). When the application of the low-side voltage to the second function block pin 52a is completed, the inspection device 2b transmits a notification signal indicating that the low-side voltage has been applied to the second function block pin 52a to the inspection device 2a. (Step S43).

  The inspection device 2a receives the notification signal transmitted from the inspection device 2b (step S44), grasps that there is no effect on the high-side pin-to-pin leakage current inspection of the first function block 51, and receives the first function block. A low-side voltage is applied to the working pin 51a (step S45). Then, the inspection device 2a applies a high-side voltage to the inspection target pin, and measures the current flowing through the inspection target pin, that is, the high-side pin leakage current of the first functional block 51 (step S46). When the synchronous inspection process by the inspection devices 2a and 2b is completed, the synchronization established between the inspection device 2a and the inspection device 2b is released as described above.

  Next, a low-side pin-to-pin leakage current inspection process flow of the second functional block 52 is performed. Similarly, in this inspection processing flow, synchronization processing is performed to establish synchronization between the inspection device 2a and the inspection device 2b (step S47), and the inspection device 2a and the inspection device 2b cooperate to form the first functional block. The voltage applied to the first pin 51a and the second functional block pin 52a is appropriately set.

  First, prior to the low-side pin-to-pin leakage current inspection of the second functional block 52 by the inspection device 2b, the inspection device 2a receives the setting information transmitted from the inspection device 2b, thereby A high-side voltage is applied to the first functional block pin 51a so as not to affect the side-pin leakage current test (step S48). When the application of the high-side voltage to the first function block pin 51a is completed, the inspection device 2a transmits a notification signal indicating that the high-side voltage has been applied to the first function block pin 51a to the inspection device 2b. (Step S49).

  The inspection device 2b receives the notification signal transmitted from the inspection device 2a (step S50), grasps that there is no effect on the low-side pin-to-pin leakage current inspection of the second function block 52, and receives the second function block. A high-side voltage is applied to the working pin 52a (step S51). Then, the inspection device 2b applies a low-side voltage to the inspection target pin, and measures a current flowing through the inspection target pin, that is, a leakage current between the low-side pins of the second functional block 52 (step S52). When the synchronous inspection process by the inspection devices 2a and 2b is completed, the synchronization established between the inspection device 2a and the inspection device 2b is released as described above.

  Next, the inspection process flow for the high-side pin-to-pin leakage current of the second functional block 52 is performed. Similarly, in this inspection processing flow, synchronization processing is performed to establish synchronization between the inspection device 2a and the inspection device 2b (step S53), and the inspection device 2a and the inspection device 2b cooperate to form the first functional block. The voltage applied to the first pin 51a and the second functional block pin 52a is appropriately set.

  First, prior to the inspection of the high-side pin-to-pin leakage current of the second functional block 52 by the inspection device 2b, the inspection device 2a receives the setting information transmitted from the inspection device 2b, thereby A low-side voltage is applied to the first functional block pin 51a so as not to affect the side-pin leakage current test (step S54). When the application of the low-side voltage to the first functional block pin 51a is completed, the inspection device 2a transmits a notification signal indicating that the low-side voltage has been applied to the first functional block pin 51a to the inspection device 2b. (Step S55).

  The inspection device 2b receives the notification signal transmitted from the inspection device 2a (step S56), grasps that the high-side pin-to-pin leakage current inspection of the second function block 52 is not affected, and receives the second function block. A low-side voltage is applied to the working pin 52a (step S57). Then, the inspection device 2b applies a high-side voltage to the inspection target pin, and measures the current flowing through the inspection target pin, that is, the high-side pin leakage current of the second functional block 52 (step S58).

  When the synchronous inspection process by the inspection devices 2a and 2b is completed, the synchronization established between the inspection device 2a and the inspection device 2b is released as described above (step S59). Thereby, the consumption current check and the function check of each functional block in which each inspection is independent can be performed asynchronously in the inspection device 2a and the inspection device 2b.

  In this example, the inspection apparatus 2a performs a quiescent current check of the first function block 51 (step S60), then performs an operation current check of the first function block 51 (step S61), and further the first function block 51. A function check is performed (step S62). On the other hand, the inspection apparatus 2b checks the quiescent current of the second function block 52 (step S63), then checks the operating current of the second function block 52 (step S64), and further functions of the second function block 52. A check is made (step S65).

  In this example, when the synchronous inspection process by the inspection apparatuses 2a and 2b is completed, the synchronization established between the inspection apparatus 2a and the inspection apparatus 2b is released, and the next inspection is the same synchronous inspection process. Sometimes, the synchronization is established again between the inspection apparatus 2a and the inspection apparatus 2b. For example, when the inspection of the leakage current between the low-side pins is completed in S40, the inspection apparatus 2a and the inspection apparatus The synchronization check process may be continued without releasing the synchronization established with 2b. In this case, it is not necessary to perform the synchronization process of S41.

FIG. 9 is a flowchart showing an example of the inspection determination process of the circuit inspection system according to the present invention.
In the inspection determination process of the present invention, each inspection device (in this case, the inspection device 2a) determines whether or not the inspection by the inspection device 2a is determined to be defective (step S71), and the failure is not determined. (S71: NO), the inspection determination process is terminated without performing any special process. However, if a defect is determined (S71: YES), the DUT 5 is determined to be defective in the first functional block 51. The notification signal is transmitted to another inspection device (herein referred to as inspection device 2b) (step S72).

  The inspection device 2b receives the notification signal transmitted from the inspection device 2a (step S73), grasps from the received notification signal that the DUT 5 has been determined to be defective by the first functional block 51, and is supplied by the inspection device 2b. The inspection of the second inspection block 52 is stopped (step S74).

  Further, the inspection apparatus 2a transmits the inspection number for which the DUT 5 is determined to be defective to the host computer apparatus 1 (step S75). The host computer device 1 receives the inspection number transmitted from the inspection device 2a (step S76), and displays the inspection result on the display unit 12 based on the received inspection number inspection number (step S77). Thereby, the inspection worker can grasp what kind of inspection the DUT 5 has been determined to be defective by looking at the inspection result displayed on the display unit 12.

  If the DUT 5 is determined to be defective in one inspection, it is not necessary to perform another inspection in another inspection apparatus because it is defective even if it is determined to be good in another inspection. When the DUT 5 is determined to be defective by one inspection device, the information is notified to the other inspection devices, and the inspection is stopped not only in the one inspection device but also in the other inspection devices. Can be prevented and the throughput of inspection can be improved.

  In addition, when the defect is not determined (S71: NO), notification information that the inspection number is determined to be good may be transmitted to the host computer apparatus 1, and each inspection apparatus 2a is controlled by the control unit 10. , 2b, 2c may be used to calculate the statistical information of the inspection numbers transmitted to the so-called inspection lot.

  Further, in the inspection determination process shown in FIG. 9, the form in which the inspection apparatus notifies the other inspection apparatus that the DUT 5 has been determined to be defective has been described. However, the inspection apparatus grasps the inspection state of the other inspection apparatus. As a matter of course, the notification of the inspection state may be requested to another inspection device. FIG. 10 is a flowchart showing another example of the inspection determination process of the circuit inspection system according to the present invention.

  In another example of the inspection determination process of the present invention, whether or not each inspection device (herein referred to as inspection device 2a) has been determined to be defective in DUT 5 by inspection of another inspection device (herein referred to as inspection device 2b). Is transmitted to the inspection apparatus 2b (step S81). The inspection device 2b receives the request signal transmitted from the inspection device 2a (step S82), and according to the received request signal, whether or not the DUT 5 is determined to be defective by the second functional block 52 by the inspection of the inspection device 2b. Is determined (step S83).

  If it is determined in S83 that the DUT 5 is determined to be defective in the second functional block 52 (S83: YES), the inspection apparatus 2b generates a notification signal indicating that the DUT 5 is determined to be defective (Step S84). If the DUT 5 is determined not to be defective in the second functional block 52 (S83: NO), the inspection apparatus 2b generates a notification signal indicating that the DUT 5 is determined good (step S85). Then, the inspection apparatus 2b transmits the notification signal generated in S84 or S85 to the inspection apparatus 2a so that the inspection apparatus 2a can grasp the inspection state of the inspection apparatus 2b (step S86).

  Then, the inspection device 2a receives the notification signal transmitted from the inspection device 2b (step S87), and determines whether or not the received notification signal indicates a failure determination of the DUT 5 (step S88).

  If the inspection device 2a determines in S88 that the notification signal indicates a failure determination of the DUT 5 (S88: YES), the inspection device 2a recognizes that the DUT 5 has been determined to be defective in the second functional block 52, and the inspection device The inspection of the first inspection block 51 by 2a is stopped (step S89). On the other hand, when it is determined in S88 that the notification signal indicates a good determination of DUT 5 (S88: NO), the inspection determination process is terminated without performing any special process, and the first inspection block by the inspection apparatus 2a is completed. Continue the inspection of 51.

  In this way, by transmitting a request signal for requesting notification of an inspection state to another inspection apparatus, the other inspection apparatus can grasp the inspection state of the other inspection apparatus in response to the request signal. Since the notification signal is received from another inspection device, it is possible to grasp the inspection state of the other inspection device, determine whether the inspection device can execute the inspection, prevent unnecessary inspection execution, and Throughput can be improved.

  The circuit inspection method and the circuit inspection system according to the present invention have been described above by showing specific embodiments, but the present invention is not limited to these. A person skilled in the art can add various changes or improvements to the configurations and functions of the invention according to the above-described embodiments without departing from the gist of the present invention.

1 is a block diagram showing a configuration of a circuit inspection system according to the present invention. It is a figure which shows the state in case each test | inspection apparatus test | inspects the functional block which comprises DUT. It is a time chart for demonstrating the test | inspection time by each test | inspection apparatus which concerns on this invention. It is a flowchart which shows the outline of the test | inspection process of the circuit test | inspection system based on this invention. It is a flowchart which shows the outline of the synchronous inspection process which concerns on this invention. It is a flowchart which shows an example of the operation | movement flow of the circuit inspection system which concerns on this invention. It is a flowchart which shows an example of the operation | movement flow of the circuit inspection system which concerns on this invention. It is a flowchart which shows an example of the operation | movement flow of the circuit inspection system which concerns on this invention. It is a flowchart which shows an example of the test | inspection determination process of the circuit test | inspection system which concerns on this invention. It is a flowchart which shows another example of the test | inspection determination process of the circuit test | inspection system which concerns on this invention. It is a block diagram which shows the structure of the conventional circuit inspection system.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Host computer apparatus 10 Control part 11 Operation part 12 Display part 13a 1st inspection program 13b 2nd inspection program 13c 3rd inspection program 2 (2a, 2b, 2c) Inspection apparatus 20 (20a, 20b, 20c) Control part 21 ( 21a, 21b, 21c) Storage unit 22 (22a, 22b, 22c) Communication unit 23 (23a, 23b, 23c) Inspection execution unit 5 DUT
51 1st functional block 51a 1st functional block pin 52 2nd functional block 52a 2nd functional block pin 53 3rd functional block 53a 3rd functional block pin

Claims (9)

A circuit inspection method in a circuit inspection system comprising a plurality of inspection devices capable of inspecting each functional block of a circuit to be inspected on which a plurality of functional blocks are mounted,
Each inspection device
When conducting your own inspection, determine whether the inspection of other inspection devices has an impact on your own inspection,
If it is determined that there is no influence, the inspection is performed asynchronously with the inspection of other inspection apparatuses,
A circuit inspection method characterized in that, when it is determined that there is an influence, after the synchronization is established with the other inspection device, the self inspection is executed . Each of the inspection devices
Determine the pass / fail judgment state of the circuit under test by the inspection of the other inspection device,
If the circuit under test is determined to be in the state of being determined not by the other inspection devices, circuit inspection method according to claim 1, characterized in that to terminate the own inspection. Each inspection performed by the inspection device has an identifier for identifying the inspection contents,
Each inspection device
Receiving from the other inspection device an identifier of the inspection being performed by the other inspection device;
Depending on whether or not the combination of the received examination identifier and the own examination identifier exists in the database storing the combination of the affected examination identifiers, the examination by the other examination apparatus is performed. To determine whether there is any impact
The circuit inspection method according to claim 1, wherein: A circuit inspection system comprising a plurality of inspection devices capable of inspecting each functional block of a circuit to be inspected on which a plurality of functional blocks are mounted,
Each inspection device
A determination means for determining whether or not there is an influence on the inspection by the inspection of another inspection apparatus when performing the inspection;
Synchronization establishment means for establishing synchronization with the other inspection apparatus when the determination means determines that there is an influence;
When the determination means determines that there is an influence, the execution of its own inspection is stopped, and after the synchronization is established with the other inspection apparatus by the synchronization establishment means, the own inspection is executed, When the determination means determines that there is no influence, control means for executing the inspection of the device asynchronously with the inspection of other inspection devices;
Circuit test system, comprising a. Each of the inspection devices further includes means for judging a pass / fail judgment state of a circuit to be inspected by inspection of the other inspection device,
When the control means determines that the circuit to be inspected is in a state determined to be negative by the other inspection device, the control means ends the inspection itself.
The circuit inspection system according to claim 4. Each inspection performed by the inspection device has an identifier for identifying the inspection contents,
Each inspection device
Receiving means for receiving, from the other inspection device, an identifier of the inspection being performed by the other inspection device;
A database that stores the combinations of identifiers of the affected tests
Have
The determination means determines whether the combination of the identifier of the inspection received by the receiving means and the identifier of the own inspection exists in the database or not by the inspection of another inspection apparatus. Judging whether there is any influence of
The circuit inspection system according to claim 4 or 5. The synchronization establishment means includes
According claim 4, characterized in that the said by inspection of other test devices when it is no longer examined impact on the testing device, are to be canceled synchronization established between said other inspection device Item 7. The circuit inspection system according to any one of Items 6 to 6 . Each of the inspection devices
When the inspection of each inspection device is affected by the inspection of the other inspection device, each inspection block is not affected at the end of the inspection of the other inspection device or at the time of inspection. The circuit inspection system according to any one of claims 4 to 7 , further comprising means for setting the inspection condition. The circuit inspection system according to any one of claims 4 to 8 , further comprising a control device for comprehensively controlling the operation of each of the inspection devices.

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