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JP4522972B2 - High gloss rolled copper foil for copper-clad laminates - Google Patents
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JP4522972B2 - High gloss rolled copper foil for copper-clad laminates - Google Patents

High gloss rolled copper foil for copper-clad laminates Download PDF

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JP4522972B2
JP4522972B2 JP2006126242A JP2006126242A JP4522972B2 JP 4522972 B2 JP4522972 B2 JP 4522972B2 JP 2006126242 A JP2006126242 A JP 2006126242A JP 2006126242 A JP2006126242 A JP 2006126242A JP 4522972 B2 JP4522972 B2 JP 4522972B2
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善雄 黒澤
康雄 平能
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Nippon Mining Holdings Inc
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Description

本発明は、フレキシブルプリント回路基板(Flexible printed circuit;FPC)等の可撓性配線部材の用途として好適な、優れた耐屈曲性を有する圧延銅箔に関する。   The present invention relates to a rolled copper foil having excellent bending resistance suitable for use as a flexible wiring member such as a flexible printed circuit (FPC).

有機物を基材としたプリント配線基板は、ガラスエポキシ及び紙フェノール基板を構成材料とする硬質銅張積層板(リジット)と、ポリイミド及びポリエステル基板を構成材料とする可撓性銅張積層基板(FPC)とに大別され、導電材に銅箔を使用する場合のFPCは、キャスティング方式とラミネート方式がある。キャスティング方式では、銅箔に樹脂を塗り加熱し、ラミネート方式では銅箔を樹脂と接着剤で接着する。近年では高密度実装の有効な手段として、ビルドアップ基板と呼ばれる多層配線基板が多く用いられている。このFPCの構成部材となる銅箔には、主に圧延銅箔が用いられている。
フレキシブルプリント回路基板(FPC)はプリンターのヘッド部やハードディスクドライブ装置内のヘッドキャリッジ部等の可動部分への配線が必要とされる場所に広く使用され、可動部分の作動に従って100万回以上の屈曲が繰り返される。このため、FPCの素材となる圧延銅箔には高い耐屈曲性が要求され、近年は装置の小型化や機能の高度化に伴い、FPCの使用環境は従来よりも激しくなり、圧延銅箔には従来を上回るレベルの耐屈曲性が求められるようになって来ている。
なお、FPCの屈曲は、曲率の大きい屈曲、即ち歪みの低い状態での屈曲(以下、低歪み屈曲負荷と称す)で、但し、繰返し回数が、何万、何十万回と多いことが特徴である。
Printed circuit boards based on organic materials are rigid copper clad laminates (rigids) composed of glass epoxy and paper phenolic substrates, and flexible copper clad laminates (FPC) composed of polyimide and polyester substrates. FPC when using copper foil as the conductive material is divided into a casting method and a laminate method. In the casting method, a copper foil is coated with a resin and heated. In the lamination method, the copper foil is bonded to the resin with an adhesive. In recent years, a multilayer wiring board called a build-up board is often used as an effective means for high-density mounting. A rolled copper foil is mainly used as a copper foil that is a constituent member of the FPC.
Flexible printed circuit boards (FPC) are widely used in places where wiring to moving parts such as the head part of a printer or a head carriage part in a hard disk drive device is required, and bend over 1 million times according to the operation of the moving part. Is repeated. For this reason, rolled copper foil, which is the material of FPC, is required to have high bending resistance.In recent years, with the downsizing of equipment and the advancement of functions, the usage environment of FPC has become more intense than before, and rolled copper foil Is required to have a higher level of bending resistance than ever before.
The FPC bend is a bend with a large curvature, that is, a bend in a low strain state (hereinafter referred to as a low strain bend load). However, the number of repetitions is as many as tens of thousands or hundreds of thousands. It is.

FPCに使用される圧延銅箔の素材には、例えばタフピッチ銅(酸素含有量100〜500mass ppm)又は無酸素銅(酸素含有量10mass ppm以下)が用いられ、これらのインゴットを熱間圧延した後、所定の厚さまで冷間圧延と焼鈍とを繰り返し、最後に、最終の冷間圧延で厚みを50μm以下に仕上げて圧延銅箔が製造される。その後、樹脂基板との接着性を向上させるため、圧延銅箔には表面に粗化めっきが施される。粗化めっき後の圧延銅箔は、裁断された後、樹脂基板と貼り合わされる。圧延銅箔と樹脂との貼りあわせには、例えばエポキシ等の熱硬化性樹脂からなる接着剤が用いられ、張り合わせ後130〜170℃の温度で数時間〜数十時間加熱して硬化させる。つぎに、圧延銅箔をエッチングして種々の配線パターンを形成する。   For example, tough pitch copper (oxygen content of 100 to 500 mass ppm) or oxygen-free copper (oxygen content of 10 mass ppm or less) is used as the material of the rolled copper foil used for FPC, and after hot rolling these ingots Then, cold rolling and annealing are repeated to a predetermined thickness, and finally, the final cold rolling is used to finish the thickness to 50 μm or less to produce a rolled copper foil. Thereafter, the surface of the rolled copper foil is roughened to improve the adhesion to the resin substrate. The rolled copper foil after the rough plating is cut and then bonded to the resin substrate. For bonding the rolled copper foil and the resin, for example, an adhesive made of a thermosetting resin such as epoxy is used, and after the lamination, it is heated and cured at a temperature of 130 to 170 ° C. for several hours to several tens of hours. Next, the rolled copper foil is etched to form various wiring patterns.

FPC用圧延銅箔の低歪み屈曲負荷が繰り返しかかる条件下での疲労特性は、最終冷間圧延後に再結晶の生じる条件での加熱を行うことにより、最終冷間圧延のままの状態よりも著しく向上する。この理由は、純銅の冷間圧延材を再結晶の生じる条件で加熱すると立方体集合組織(200)が発達し、その結果変形方向のヤング率が小さくなるためであると推測される。そこで圧延銅箔は最終冷間圧延後に再結晶の生じる条件で加熱してからFPCの構成部材として使用され、この熱処理は粗化めっきして裁断した後に加熱処理を行うか、樹脂基板と接着する際の加熱で兼ねられる。特許文献1では再結晶の生じる条件で加熱した後の圧延面のX線回折で求めた(200)面の積分強度(I)の、微粉末銅の(200)面の積分強度(I0)に対する割合I/I0>20である立方体集合組織を有する圧延銅箔を開示し、最終冷間圧延加工及び焼鈍工程の制御により製造している。 Fatigue properties of rolled copper foil for FPC under repeated conditions of low strain bending load are significantly higher than those in the final cold rolled state by heating under conditions that cause recrystallization after the final cold rolling. improves. The reason for this is presumed to be that when a cold rolled material of pure copper is heated under conditions that cause recrystallization, a cubic texture (200) develops, and as a result, the Young's modulus in the deformation direction decreases. Therefore, the rolled copper foil is used as a component of the FPC after being heated under conditions that cause recrystallization after the final cold rolling. This heat treatment is performed by roughening plating and cutting, or heat treatment or bonding to the resin substrate. It also serves as heating. In Patent Document 1, the integrated intensity (I) of the (200) plane of finely divided copper (I 0 ) obtained by X-ray diffraction of the rolled surface after heating under conditions that cause recrystallization. A rolled copper foil having a cubic texture with a ratio I / I 0 > 20 is disclosed and manufactured by controlling the final cold rolling and annealing steps.

上記の他に圧延銅箔の耐屈曲性に影響を与える因子として、箔の表面状態が挙げられる。銅材料を冷間圧延する場合、圧延材表面の凹凸には、圧延ロール面の凹凸の圧延材表面への転写(ロール面の転写)によるものと、ロールと材料との間に一定の厚さで存在する圧延油膜により発生するオイルピット(微小な凹凸)がある。オイルピットの寸法、形態及び分布は、圧延ロール径、圧延ロール面粗さ、圧延加工度、圧延速度、圧延油の粘度等の圧延条件を調整することにより制御することができる。オイルピットによって生じるくぼみは、くぼみの先端形状が鋭角状であるため、圧延銅箔に屈曲変形を繰り返し与えると、応力集中により亀裂の起点となって破断に至らしめるため、屈曲疲労寿命を低下させる原因になる。更に深いオイルピットほど疲労破壊の起点になりやすい。そのため、特許文献2では、冷間圧延で形成された表面において、オイルピットの深さh(JIS B0601−1994準拠の最大高さRyに対応する)を2.0μm以下として耐屈曲性の向上を図っている。
特許第3009383号明細書 特開2001−58203号公報
In addition to the above, the surface condition of the foil may be mentioned as a factor that affects the bending resistance of the rolled copper foil. When the copper material is cold-rolled, the unevenness on the surface of the rolled material has a certain thickness between the roll and the material by transferring the unevenness of the rolling roll surface to the surface of the rolled material (transfer of the roll surface). There are oil pits (fine irregularities) generated by the rolling oil film present at The size, form and distribution of the oil pits can be controlled by adjusting rolling conditions such as the rolling roll diameter, rolling roll surface roughness, rolling degree, rolling speed, and rolling oil viscosity. The pit caused by the oil pit has an acute angle at the tip of the pit, so repeated bending deformation of the rolled copper foil causes the crack to become a starting point of cracking due to stress concentration, thus reducing the bending fatigue life. Cause. Deeper oil pits tend to be the starting point of fatigue failure. Therefore, in Patent Document 2, on the surface formed by cold rolling, the oil pit depth h (corresponding to the maximum height Ry in accordance with JIS B0601-1994) is 2.0 μm or less to improve the bending resistance. I am trying.
Japanese Patent No. 3009383 JP 2001-58203 A

しかし、上記特許文献1のような最終冷間圧延の圧延加工度および最終冷間圧延前の結晶粒径を規定した、再結晶立方体集合組織の発達による耐屈曲性の改善には限界がある。例えば、立方体集合組織がより発達するように圧延銅箔の製造工程を調整すると圧延銅箔の軟化温度が低下するが、従来から使用され実績があり、製造条件の確定しているものは、その軟化特性を変更することは実際には困難である。更に軟化温度が著しく低い圧延銅箔は常温で保管中に軟化し、しわが発生しやすい等、取り扱いが困難になる。
又、特許文献2では、オイルピットの深さを規定して耐屈曲性の向上を図っているが、オイルピットの深さが浅い場合、最大高さRyは2.0μmであるにも関わらず、オイルピットが密集しているために屈曲性が劣っているものがある。すなわち、圧延表面のオイルピットを含む微少凹凸の密度の不均一さが、屈曲疲労寿命の低下や同一ロットでの寿命のばらつきの一因となっており、特許文献2の最大高さRyが2.0μmの規定では不充分である。
However, there is a limit to the improvement of the bending resistance by the development of the recrystallized cube texture that defines the rolling degree of the final cold rolling and the crystal grain size before the final cold rolling as in Patent Document 1 described above. For example, although the softening temperature of the rolled copper foil and cubic texture adjusts the manufacturing process of the rolled copper foil so as to more developed is reduced, has a proven track record are conventionally used, which has been determined in the manufacturing conditions, the It is actually difficult to change its softening properties. Furthermore, a rolled copper foil having a remarkably low softening temperature is softened during storage at room temperature, and wrinkles are likely to occur, making handling difficult.
In Patent Document 2, the depth of the oil pit is defined to improve the bending resistance, but when the oil pit depth is shallow, the maximum height Ry is 2.0 μm. Some have poor flexibility due to dense oil pits. That is, the unevenness of the density of the minute irregularities including the oil pits on the rolling surface contributes to the decrease in the bending fatigue life and the variation in the life in the same lot, and the maximum height Ry in Patent Document 2 is 2. The specification of 0.0 μm is insufficient.

FPC用の圧延銅箔の厚みは、以前は35μmのものが主流であり、その屈曲疲労寿命(回数)は、通常3万回の水準が求められていた。しかし近年においては厚みが従来の2分の1である18μmの圧延銅箔の使用量が伸びており現在においてすでに主流になりつつある。圧延銅箔の厚みとその厚みで要求される屈曲疲労寿命(回数)とは逆対数的な関係があり、従って、18μm圧延銅箔の屈曲疲労寿命(回数)では、30万回以上の水準に向上させることが望まれている。
そこで本発明は、従来の圧延銅箔の耐屈曲性を、その他の特性を低下させることなく改善し、低歪み屈曲負荷が繰り返しかかる条件下で使用できる圧延銅箔を提供することを目的とする。
In the past, the thickness of the rolled copper foil for FPC was mainly 35 μm, and the bending fatigue life (number of times) was usually required to be 30,000 times. In recent years, however, the amount of 18 μm rolled copper foil, which is half the thickness of the conventional one, has been increasing and is now becoming mainstream. The thickness of the rolled copper foil and the bending fatigue life (number of times) required by the thickness have an inverse logarithmic relationship. Therefore, the bending fatigue life (number of times) of the 18 μm rolled copper foil is about 300,000 times or more. Improvement is desired.
Then, this invention aims at providing the rolled copper foil which can improve the bending resistance of the conventional rolled copper foil, without reducing other characteristics, and can be used on the conditions which a low distortion bending load repeats. .

本発明は、下記記載の圧延銅箔に関する。
(1)200℃で30分加熱後、圧延面のX線回折で求めた(200)面の積分強度(I)の、微粉末銅の(200)面の積分強度(I0)に対する割合I/I0が20以上である圧延銅箔において、冷間圧延で形成された表面の圧延平行方向の光沢度(JIS Z8741準拠)でGs(60°)が150%以上であることを特徴とする耐屈曲性に優れた圧延銅箔。
(2)最大高さRy(JIS B0601−1994準拠)が2.0μm以下である上記圧延銅箔。
(3)圧延平行方向に採取した試験片を用いたフレキシブルプリント配線板耐屈曲性試験(JIS C5016準拠)において、屈曲疲労寿命が30万回以上である上記圧延銅箔。
(4)厚みが35μm以下である上記圧延銅箔。
The present invention relates to the rolled copper foil described below.
(1) After heating for 30 minutes at 200 ° C., the ratio I of the integrated intensity (I) of the (200) plane obtained by X-ray diffraction of the rolled surface to the integrated intensity (I 0 ) of the (200) plane of finely powdered copper In the rolled copper foil having / I 0 of 20 or more, Gs (60 °) is 150% or more in terms of gloss in the rolling parallel direction (based on JIS Z8741) of the surface formed by cold rolling. Rolled copper foil with excellent bending resistance.
(2) The rolled copper foil having a maximum height Ry (based on JIS B0601-1994) of 2.0 μm or less.
(3) The rolled copper foil having a flex fatigue life of 300,000 times or more in a flexible printed wiring board bending resistance test (based on JIS C5016) using test pieces collected in the rolling parallel direction.
(4) The rolled copper foil having a thickness of 35 μm or less.

本発明は、最終冷間圧延条件を種々変えることにより、高い表面光沢度を有する圧延銅箔を製造することができる。その結果、圧延表面上の微小凹凸が制御され、低歪み屈曲負荷が繰り返しかかる条件下でも疲労特性に優れ、屈曲疲労寿命が高くばらつきの小さい圧延銅箔を提供できる。本発明の圧延銅箔の製造をするためには、工程を新たに追加する必要がなく、又、合金元素を添加する必要もないため製造コストが従来より上昇することはない。   The present invention can produce a rolled copper foil having a high surface gloss by variously changing the final cold rolling conditions. As a result, it is possible to provide a rolled copper foil having excellent fatigue characteristics, high bending fatigue life, and small variations even under conditions in which minute irregularities on the rolled surface are controlled and a low strain bending load is repeatedly applied. In order to manufacture the rolled copper foil of the present invention, it is not necessary to add a new process and it is not necessary to add an alloy element, so that the manufacturing cost does not increase as compared with the conventional method.

本発明における圧延銅箔は、試料を200℃で30分の加熱を行い、加熱後の圧延面のX線回折で求めた場合の(200)面の積分強度(I)、及び微粉末銅の(200)面の積分強度(I0)の測定値から得られるI/I0が20以上の要件を満たすものである。I/I0が20を下回ると表面の金属結晶の(200)面の発達が不充分で((200)集合度が低く)、耐屈曲性が劣化するからである。微粉末銅の(200)面の積分強度(I0)は、結晶が無秩序に配向した状態(特定の面が発達していない状態)の基準値として選択した。圧延面のX線回折強度は、例えば理学電機(株)社製X線ディフラクトメーターRINT2000等を使用して測定できる。なお、特許文献1ではI/I0における上限を規定していないが、本発明においては、好ましくは20〜40である。I/I0が40を超えると、圧延銅箔の軟化温度が低下する。軟化温度が著しく低い圧延銅箔は常温で保管中に軟化し、しわが発生しやすい等、取り扱いが困難になるからである。 In the rolled copper foil in the present invention, the sample was heated at 200 ° C. for 30 minutes, and the integral strength (I) of the (200) plane when obtained by X-ray diffraction of the rolled surface after heating, and the fine powder copper The I / I 0 obtained from the measured value of the (200) plane integrated intensity (I 0 ) satisfies the requirement of 20 or more. This is because when I / I 0 is less than 20, the development of the (200) plane of the metal crystal on the surface is insufficient ((200) the degree of assembly is low), and the flex resistance deteriorates. The integrated intensity (I 0 ) of the (200) plane of finely powdered copper was selected as a reference value for a state in which crystals were randomly oriented (a state in which a specific plane was not developed). The X-ray diffraction intensity of the rolled surface can be measured using, for example, an X-ray diffractometer RINT2000 manufactured by Rigaku Corporation. In Patent Document 1, the upper limit of I / I 0 is not defined, but in the present invention, it is preferably 20 to 40. When I / I 0 exceeds 40, the softening temperature of the rolled copper foil decreases. This is because a rolled copper foil having a remarkably low softening temperature is softened during storage at room temperature, and wrinkles are likely to occur, making handling difficult.

通常、深いオイルピットが形成された圧延銅箔表面の最大高さRyは、浅いオイルピットが形成された表面のそれに比べ高い値を示す。オイルピットの深さは、表面の粗さ曲線から求めた最大高さRy(JIS B0601−1994準拠)と相関関係がある。ここで、Ryは、JIS B0601−1994において定義されている「最大高さ」と称される指標である。
本発明における最大高さRy(JIS B0601−1994準拠)は、2.0μm以下が好ましい。オイルピットの密度に関わらず、Ryが2.0μmを超えるような深いオイルピットは、屈曲性を低下させる原因となるからである。更に好ましくは0.05μm〜1.5μmである。一方、Ryが0.05μm未満であると粗化めっきを施したものを樹脂基板と貼り合わせる際、両者の接着強度が低下するので好ましくない。オイルピットは圧延方向と直交した割れ状の形態であるため、接触粗さ計による上記最大高さRyの測定は、圧延方向と平行に粗さの触針を走査することが重要である。本発明のオイルピットの形態観察には、例えば(株)エリオニクス社製の電子線三次元粗さ解析装置ERA−8000が使用できる。
しかしながら、オイルピットの形成に関して圧延銅箔の耐屈曲性は発生したオイルピットの深さのみではなく、密度に影響されるが、Ryでは、屈曲性に影響を与えるオイルピットの密度については正確な評価ができない。
Usually, the maximum height Ry of the rolled copper foil surface on which deep oil pits are formed is higher than that on the surface on which shallow oil pits are formed. The depth of the oil pit has a correlation with the maximum height Ry (conforming to JIS B0601-1994) obtained from the surface roughness curve. Here, Ry is an index called “maximum height” defined in JIS B0601-1994.
The maximum height Ry (based on JIS B0601-1994) in the present invention is preferably 2.0 μm or less. This is because deep oil pits with Ry exceeding 2.0 μm cause a decrease in flexibility regardless of the density of oil pits. More preferably, it is 0.05 micrometer-1.5 micrometers. On the other hand, when Ry is less than 0.05 μm, when a plate subjected to roughening plating is bonded to a resin substrate, the adhesive strength between the two is reduced, which is not preferable. Since the oil pit is in the form of a crack perpendicular to the rolling direction, the measurement of the maximum height Ry with a contact roughness meter is important to scan the roughness stylus parallel to the rolling direction. For the observation of the form of the oil pit of the present invention, for example, an electron beam three-dimensional roughness analyzer ERA-8000 manufactured by Elionix Corporation can be used.
However, regarding the formation of oil pits, the bending resistance of the rolled copper foil is affected not only by the depth of the generated oil pits but also by the density, but in Ry, the density of oil pits affecting the bendability is accurate. Cannot be evaluated.

そこで、本発明ではオイルピットの密度が表面の光沢度と相関関係があることに着目し、JIS Z8741に準拠した光沢度の測定により評価した。尚、オイルピットが低密度で形成された表面の光沢度は、オイルピットが高密度で形成された表面のそれに比べ高い値を示す。
即ち、本発明の圧延銅箔は、圧延平行方向の光沢度(JIS Z8741準拠)でGs(60°)は150%以上、好ましくは250%以上、更に好ましくは300%〜600%、最も好ましくは400%〜600%である。
圧延銅箔表面の光沢度Gs(60°)が150未満である場合は、(1)オイルピットの存在する領域が多い、(2)オイルピットの深さが深い、(3)オイルピット密度が高い、(4)オイルピット以外の凹凸を含めた表面を構成する微少凹凸が多い等により、屈曲変形を繰り返し与えると亀裂の起点となる部分が多くなり、耐屈曲性試験(JIS C5016準拠)においての寿命評価が劣るものとなる。
一方、圧延表面の光沢度Gs(60°)が600%を超えると金属光沢の均一性が低下した表面となり、圧延銅箔をFPCに処理加工する工程において外観不良となるので、600%を超えないことが好ましい。圧延表面の光沢度Gs(60°)が600%を超えると金属光沢の均一性が低下するのは、オイルピットの密度が極端に低いため、オイルピット以外の微小な凹凸の分布が外観に反映されることによる。オイルピット以外の微小な凹凸には圧延前に存在していた凹凸がその後の冷間圧延において完全には消失せず形態を変化させ残存したものである。最終冷間圧延前の焼鈍後に行う酸洗で形成される凹凸が挙げられる。酸洗では、焼鈍で生成した酸化膜や金属銅が溶出し凹凸が生じるが、特に、結晶粒界が優先的に溶出し溝状の凹凸が生じる。又、酸洗後のバフ研磨では研磨目として凹凸が生じる。そして、圧延後に残存したこれらの微小な凹凸は、圧延銅箔の表面内において均一には分布せず、即ち金属光沢の均一性が低下して外観不良(スジ・ムラ・シミ等)の原因となる。
光沢度の測定はJIS Z8741に準拠して、圧延方向に平行な方向の入射角60度で測定できる。
Therefore, in the present invention, paying attention to the fact that the density of the oil pits has a correlation with the glossiness of the surface, the glossiness was evaluated by measuring the glossiness according to JIS Z8741. The glossiness of the surface where the oil pits are formed at a low density shows a higher value than that of the surface where the oil pits are formed at a high density.
That is, the rolled copper foil of the present invention has a gloss in the rolling parallel direction (based on JIS Z8741) and Gs (60 °) of 150% or more, preferably 250% or more, more preferably 300% to 600%, most preferably. 400% to 600%.
When the glossiness Gs (60 °) of the rolled copper foil surface is less than 150, (1) there are many areas where oil pits exist, (2) the depth of oil pits is deep, (3) the oil pit density is high High (4) Due to the large number of minute irregularities that make up the surface including irregularities other than oil pits, the portion that becomes the starting point of cracks increases when bending deformation is repeatedly applied, and in the bending resistance test (conforming to JIS C5016) The life evaluation of is inferior.
On the other hand, if the glossiness Gs (60 °) of the rolled surface exceeds 600%, the surface of the metallic luster becomes less uniform, and the appearance of the rolled copper foil in the FPC processing process becomes poor. Preferably not. When the glossiness Gs (60 °) of the rolled surface exceeds 600%, the uniformity of the metallic luster is reduced because the density of oil pits is extremely low, and the distribution of minute irregularities other than oil pits is reflected in the appearance. By being done. The minute irregularities other than the oil pits are irregularities that existed before the rolling and are not completely lost in the subsequent cold rolling, but remain after changing the form. The unevenness | corrugation formed by the pickling performed after the annealing before final cold rolling is mentioned. In pickling, the oxide film and metallic copper produced by annealing are eluted and unevenness occurs, but in particular, the crystal grain boundaries are preferentially eluted and groove-like unevenness occurs. Also, buffing after pickling causes irregularities as polishing eyes. And these minute irregularities remaining after rolling are not uniformly distributed within the surface of the rolled copper foil, that is, the uniformity of the metallic luster is lowered, causing the appearance defect (streaks, unevenness, spots, etc.) Become.
The glossiness can be measured at an incident angle of 60 degrees in a direction parallel to the rolling direction in accordance with JIS Z8741.

本発明の圧延銅箔は、例えばタフピッチ銅、無酸素銅のインゴット又はAg入り銅を熱間圧延した後、冷間圧延と焼鈍とを繰り返し、最後に最終冷間圧延を行って製造される。
そして、最終冷間圧延条件を種々変えることにより、オイルピットを形成する状態がかわる。例えば、最終冷間圧延時にロールと材料の間に導入される油膜が厚い場合、材料の塑性変形によるせん断帯は圧延面にオイルピットを形成する。油膜が薄ければ材料表面の凸部はロールと接触するため変形が制限され、オイルピットが発達せず平滑な表面が形成される。オイルピットの成長を抑え、オイルピットの少ない領域を広くなることで、高光沢の銅箔表面が得られる。
従って、本発明の圧延銅箔の製造ではロールと材料の間に導入される油膜の厚さを、圧延ロールの形状、圧延油粘度、及び圧延速度で制御してオイルピットの密度及びその深さを調整して、目的とする光沢度及び好ましい最大高さRyを有する圧延銅箔を製造する。目的とする光沢度及び好ましい最大高さRyを有する圧延銅箔を製造するための、最終冷間圧延における圧延ロール径、圧延ロール表面粗さ、圧延油粘度及び圧延速度の設定条件を以下に具体的に示す。
The rolled copper foil of the present invention is produced by, for example, hot rolling a tough pitch copper, an oxygen-free copper ingot or Ag-containing copper, then repeating cold rolling and annealing, and finally performing final cold rolling.
And the state which forms an oil pit changes by changing final cold rolling conditions variously. For example, when the oil film introduced between the roll and the material at the time of final cold rolling is thick, the shear band due to plastic deformation of the material forms an oil pit on the rolling surface. If the oil film is thin, the convex portion of the material surface comes into contact with the roll, so that deformation is limited, and oil pits do not develop and a smooth surface is formed. By suppressing the growth of the oil pit and widening the area with few oil pits, a highly glossy copper foil surface can be obtained.
Therefore, in the production of the rolled copper foil of the present invention, the thickness of the oil film introduced between the roll and the material is controlled by the shape of the rolling roll, the rolling oil viscosity, and the rolling speed, and the density and depth of the oil pits are controlled. Is adjusted to produce a rolled copper foil having a desired glossiness and a preferred maximum height Ry. Specific conditions for setting the rolling roll diameter, rolling roll surface roughness, rolling roll viscosity, and rolling speed in the final cold rolling to produce a rolled copper foil having the desired glossiness and preferred maximum height Ry are as follows: Indicate.

尚、これらの個々の設定条件は他の設定条件が下記の設定条件内にあるときに成立つものであり、他の設定条件を無視して単独で成立つものではない。又、これらの設定条件は圧延機により固有の値をとるため、本発明の範囲を限定するものではない。
本発明における最終冷間圧延では、好ましくはロール径が50mm〜100mmで表面粗さRa(算術平均粗さRa、JIS B0601−1994準拠)が0.05〜0.10μmに調整された圧延ロールを使用する。圧延ロール径が100mmを超えると、最終冷間圧延時にロールと材料の間に導入される油膜が厚くなり、オイルピットが形成されやすくなり、オイルピットの密度が高くなる。一方、圧延ロール径が50mmを下回ると、最終冷間圧延時にロールと材料の間に導入される油膜が薄くなり、オイルピットの密度が極端に低くなる。オイルピットの密度が極端に低いと、金属光沢の均一性が低下し、圧延銅箔をFPCに処理加工する工程において外観不良となる。又、圧延ロールの表面粗さRaが0.10μmを超えると、最終冷間圧延時にロールと材料の間に導入される油膜が厚くなり、オイルピットが形成されやすくなり、オイルピットの密度が高くなる。一方、圧延ロールの表面粗さRaが0.05μmを下回ると、最終冷間圧延時にロールと材料の間に導入される油膜が薄くなり、オイルピットの密度が極端に低くなる。オイルピットの密度が極端に低いと、金属光沢の均一性が低下し、圧延銅箔をFPCに処理加工する工程において外観不良となる。
These individual setting conditions are satisfied when other setting conditions are within the following setting conditions, and are not satisfied independently by ignoring the other setting conditions. Moreover, since these setting conditions take unique values depending on the rolling mill, they do not limit the scope of the present invention.
In the final cold rolling in the present invention, a rolling roll preferably having a roll diameter of 50 mm to 100 mm and a surface roughness Ra (arithmetic average roughness Ra, conforming to JIS B0601-1994) adjusted to 0.05 to 0.10 μm. use. If the rolling roll diameter exceeds 100 mm, the oil film introduced between the roll and the material at the time of final cold rolling becomes thick, oil pits are easily formed, and the density of oil pits increases. On the other hand, when the rolling roll diameter is less than 50 mm, the oil film introduced between the roll and the material at the time of final cold rolling becomes thin, and the density of oil pits becomes extremely low. If the density of the oil pits is extremely low, the uniformity of the metallic luster is lowered, and the appearance is poor in the process of processing the rolled copper foil into FPC. Also, if the surface roughness Ra of the rolling roll exceeds 0.10 μm, the oil film introduced between the roll and the material at the time of the final cold rolling becomes thick, oil pits are easily formed, and the density of oil pits is high. Become. On the other hand, when the surface roughness Ra of the rolling roll is less than 0.05 μm, the oil film introduced between the roll and the material at the time of final cold rolling becomes thin, and the density of oil pits becomes extremely low. If the density of the oil pits is extremely low, the uniformity of the metallic luster is lowered, and the appearance is poor in the process of processing the rolled copper foil into FPC.

本発明の最終冷間圧延で使用する圧延油の粘度は、好ましくは1〜7cStである。7cSt以上では、最終冷間圧延時にロールと材料の間に導入される油膜が厚くなり、オイルピットが形成されやすくなる。一方、1cStを下回ると、最終冷間圧延時にロールと材料の間に導入される油膜が薄くなり、オイルピットの密度が極端に低くなる。オイルピットの密度が極端に低いと、金属光沢の均一性が低下し、圧延銅箔をFPCに処理加工する工程において外観不良となる。
又、最終冷間圧延速度は好ましくは100〜400m/分である。400m/分を超えると、最終冷間圧延時にロールと材料の間に導入される油膜が厚くなり、オイルピットが形成されやすくなる。一方、100m/分を下回ると、最終冷間圧延時にロールと材料の間に導入される油膜が薄くなり、オイルピットの密度が極端に低くなる。オイルピットの密度が極端に低いと、金属光沢の均一性が低下し、圧延銅箔をFPCに処理加工する工程において外観不良となる。
本発明の最終冷間圧延の圧延加工度は好ましくは90〜99%、更に好ましくは95〜99%である。圧延加工度が90%未満であると、再結晶の生じる温度で加熱した後の立方体集合組織((100)面、<001>方向、(100)面と(200)面は等価)の発達が劣るため耐屈曲性に劣り、99%を超えると、最終冷間圧延においてピンホールが発生しやすくなる。
The viscosity of the rolling oil used in the final cold rolling of the present invention is preferably 1 to 7 cSt. If it is 7 cSt or more, the oil film introduced between the roll and the material at the time of final cold rolling becomes thick, and oil pits are easily formed. On the other hand, if it is less than 1 cSt, the oil film introduced between the roll and the material at the time of final cold rolling becomes thin, and the density of oil pits becomes extremely low. If the density of the oil pits is extremely low, the uniformity of the metallic luster is lowered, and the appearance is poor in the process of processing the rolled copper foil into FPC.
The final cold rolling speed is preferably 100 to 400 m / min. If it exceeds 400 m / min, the oil film introduced between the roll and the material at the time of final cold rolling becomes thick, and oil pits are easily formed. On the other hand, if it is less than 100 m / min, the oil film introduced between the roll and the material at the time of final cold rolling becomes thin, and the density of oil pits becomes extremely low. If the density of the oil pits is extremely low, the uniformity of the metallic luster is lowered, and the appearance is poor in the process of processing the rolled copper foil into FPC.
The rolling degree of the final cold rolling of the present invention is preferably 90 to 99%, more preferably 95 to 99%. When the rolling degree is less than 90%, the development of the cube texture ((100) plane, <001> direction, (100) plane and (200) plane is equivalent) after heating at a temperature at which recrystallization occurs is performed. Since it is inferior, it is inferior in bending resistance, and when it exceeds 99%, pinholes are likely to occur in the final cold rolling.

本発明の圧延銅箔は、所定条件で測定される(200)面の積分強度比I/I0が20以上、表面光沢度Gsが150%を満たすものであるが、これらの要件は通常の製造手順では同時に達成することはできなかった。例えば、本発明の背景技術である特許文献1では最終冷間圧延の直前の焼鈍を、再結晶粒の平均粒径が5〜20μmになる条件下で行い、最終冷間圧延での圧延加工度を90%以上とすることによりI/I0が20以上を達成している。通常、圧延速度が速い場合にはロールと材料の間に導入される油膜が均一に広がるように圧延油粘度を低くし、圧延速度が遅い場合には上記油膜が薄くなるため油膜が途切れないように圧延油粘度は高くする必要がある。このために、特許文献1等の最終冷間圧延(圧延加工度を90%以上)で通常採用される圧延速度及び圧延油粘度の組み合わせは、圧延速度400〜800m/分、圧延油粘度1〜7cStであった。一方、圧延加工度90%以上で圧延速度100〜400m/分の場合は、圧延油粘度を高くする必要があるため圧延油粘度7〜13cStの組み合わせが適当である。しかしこの条件下での厚みが35μm以下の箔の圧延は、圧延速度が遅いために生産性が著しく低下しコスト高となるため採用できない。本発明者らの研究によると、圧延加工度90%以上で上記圧延速度及び圧延油粘度の組み合わせでは積分強度比I/I020以上は達成できても、高い圧延加工度による圧延によりオイルピットが著しく形成されるために表面光沢度Gs150%を得ることはできないことが判明した。そして、表面光沢度を高くするためには、オイルピットが形成されるのを抑制する必要があり、圧延加工度を90%未満の低いものに設定しなくてはならないこともわかった。しかし圧延加工度を90%未満の低いものに設定すると圧延加工度が低いために積分強度比I/I0は20未満となってしまう。
本発明は、特定の積分強度比及び表面光沢度を同時に達成するために、圧延加工度は90%以上としたままで、圧延条件を変えることによりオイルピットの生成を抑制する方法を目的としており、圧延速度及び圧延油粘度に関する従来の技術常識に反して、最終冷間圧延において遅い圧延速度100〜400m/分を採用した場合にもあえて低い圧延油粘度1〜7cStを好ましく使用している。
The rolled copper foil of the present invention has an integrated intensity ratio I / I 0 of (200) plane of 20 or more and a surface glossiness Gs of 150% measured under predetermined conditions. The manufacturing procedure could not be achieved at the same time. For example, in Patent Document 1 which is the background art of the present invention, the annealing immediately before the final cold rolling is performed under the condition that the average grain size of the recrystallized grains is 5 to 20 μm, and the rolling work degree in the final cold rolling is By setting the ratio to 90% or more, I / I 0 has achieved 20 or more. Usually, when the rolling speed is high, the viscosity of the rolling oil is lowered so that the oil film introduced between the roll and the material spreads uniformly, and when the rolling speed is slow, the oil film becomes thin so that the oil film does not break. In addition, it is necessary to increase the viscosity of the rolling oil. For this reason, the combination of the rolling speed and the rolling oil viscosity normally employed in the final cold rolling (rolling degree of 90% or more) of Patent Document 1 and the like is a rolling speed of 400 to 800 m / min, a rolling oil viscosity of 1 to 1. 7 cSt. On the other hand, when the rolling degree is 90% or more and the rolling speed is 100 to 400 m / min, it is necessary to increase the rolling oil viscosity, so the combination of the rolling oil viscosity of 7 to 13 cSt is appropriate. However, the rolling of a foil having a thickness of 35 μm or less under these conditions cannot be employed because the rolling speed is slow and the productivity is significantly reduced and the cost is increased. According to the research by the present inventors, even if the combination of the rolling speed and the rolling oil viscosity is 90% or higher and the integrated strength ratio I / I 0 20 or higher can be achieved by the combination of the rolling speed and the rolling oil viscosity, As a result, the surface glossiness Gs of 150% cannot be obtained. It was also found that in order to increase the surface glossiness, it is necessary to suppress the formation of oil pits, and the rolling degree should be set to a low value of less than 90%. However, when the rolling degree is set to a low value of less than 90%, the integrated strength ratio I / I 0 is less than 20 because the rolling degree is low.
The present invention is aimed at a method for suppressing the formation of oil pits by changing rolling conditions while maintaining a rolling degree of 90% or more in order to achieve a specific integral intensity ratio and surface gloss at the same time. Contrary to conventional technical common sense regarding rolling speed and rolling oil viscosity, a low rolling oil viscosity of 1 to 7 cSt is preferably used even when a slow rolling speed of 100 to 400 m / min is adopted in the final cold rolling.

本発明では、最終冷間圧延条件を上記に設定することに加え、好ましくは最終冷間圧延前の焼鈍において再結晶粒の平均粒径を20μm以下とすることで、深いオイルピットが形成されていない圧延表面とする。最終冷間圧延前の焼鈍における再結晶粒の平均粒径が20μmを超えると、深いオイルピットが形成された圧延表面となる。再結晶粒の平均粒径を20μm以下とするためには、例えば焼鈍を連続焼鈍炉で行う場合、500〜800℃の温度で、当該温度に依存して5〜600秒加熱し、焼鈍をバッチ式で行う場合は、130〜500℃の温度で当該温度に依存して1〜24時間加熱する。
又、近年の電子機器部品の小型化・低背化により素材である圧延銅箔の薄肉化が望まれ、かつ高屈曲性が望まれるため、本発明の最終冷間圧延後の厚みは、好ましくは50μm以下、更に好ましくは35μm以下、最も好ましくは18μm以下でより有効である。
In the present invention, in addition to setting the final cold rolling conditions as described above, preferably the deep oil pits are formed by setting the average grain size of the recrystallized grains to 20 μm or less in the annealing before the final cold rolling. No rolling surface. When the average grain size of the recrystallized grains in the annealing before the final cold rolling exceeds 20 μm, a rolled surface having deep oil pits is formed. In order to set the average grain size of the recrystallized grains to 20 μm or less, for example, when annealing is performed in a continuous annealing furnace, heating is performed at a temperature of 500 to 800 ° C. for 5 to 600 seconds depending on the temperature, and the annealing is batch-processed. When performing by a formula, it heats for 1 to 24 hours at the temperature of 130-500 degreeC depending on the said temperature.
Further, since it is desired to reduce the thickness of the rolled copper foil as a material due to downsizing and low profile of electronic device parts in recent years, and high flexibility is desired, the thickness after the final cold rolling of the present invention is preferably Is more effective at 50 μm or less, more preferably 35 μm or less, and most preferably 18 μm or less.

本発明の圧延銅箔は、上記要件を満たすことにより、圧延平行方向に採取した試験片を用いたフレキシブルプリント配線板耐屈曲性試験(JIS C5016準拠)において、17μm膜厚の場合、屈曲疲労寿命が10万回以上、好ましくは20万回以上、更に好ましくは30万回以上の耐屈曲性を有しており、曲率半径rの比較的緩やかな低歪み屈曲負荷が繰り返しかかる条件に対し優れた耐性を示す。そのため、本発明の圧延銅箔はFPCに使用される圧延銅箔として有用である。
本発明の圧延銅箔は、加熱により軟質化した状態でFPCの構成部材として用いる。そこで、本発明の圧延銅箔の素材には、例えば、軟化温度がそれほど高くない通常のタフピッチ銅(酸素濃度100〜500mass ppm)又は無酸素銅(酸素濃度10mass ppm以下)、常温保管時の軟化を防止するため、微量のAg等を添加して軟化温度を適度な範囲に調整したタフピッチ銅(特開2000−212661号公報)、軟化温度を低下させることを目的とし、少量の合金元素を添加した無酸素銅(特許第1582981号等)、不純物量を調整することにより軟化温度を適度な範囲に調整した無酸素銅(特開平1−319641号公報等)等の素材を用いることができる。
When the rolled copper foil of the present invention satisfies the above requirements, in a flexible printed wiring board bending resistance test (compliant with JIS C5016) using test pieces taken in the rolling parallel direction, the bending fatigue life is 17 μm. Has a bending resistance of 100,000 times or more, preferably 200,000 times or more, and more preferably 300,000 times or more, and is excellent for conditions where a relatively gentle low strain bending load with a radius of curvature r is repeatedly applied. Shows tolerance. Therefore, the rolled copper foil of the present invention is useful as a rolled copper foil used for FPC.
The rolled copper foil of the present invention is used as an FPC constituent member in a softened state by heating. Therefore, the material of the rolled copper foil of the present invention includes, for example, normal tough pitch copper (oxygen concentration of 100 to 500 mass ppm) or oxygen-free copper (oxygen concentration of 10 mass ppm or less) that does not have a very high softening temperature, softening at room temperature storage In order to prevent this, tough pitch copper (Japanese Patent Laid-Open No. 2000-212661) whose softening temperature is adjusted to an appropriate range by adding a small amount of Ag or the like, a small amount of alloying elements is added for the purpose of lowering the softening temperature. It is possible to use materials such as oxygen-free copper (Japanese Patent No. 1582981 etc.) and oxygen-free copper (Japanese Patent Laid-Open No. 1-319641 etc.) whose softening temperature is adjusted to an appropriate range by adjusting the amount of impurities.

以下、本発明の実施態様の一例を説明する。
厚さ200mm、幅600mmのタフピッチ銅インゴット(酸素含有量200ppm)、無酸素銅インゴット(酸素含有量10ppm未満)及びAg入り銅(Ag含有量200ppm、酸素含有量200ppm)を素材として、熱間圧延後に冷間圧延と焼鈍を繰り返し行い、圧延上がりの所定の厚さの板(厚さt mm)を得た。この板を、温度180℃に保持した加熱炉中で2時間にて焼鈍を行い、17μmまで冷間圧延した。
ここで、最終冷間圧延での圧延加工度Rは、R=(t−0.017)/t×100(%)で与えられる。又、焼鈍後の結晶粒径を圧延方向に直角な断面においてJIS G0551準拠の切断法で測定した。最終冷間圧延前の焼鈍で得られる再結晶粒の平均粒径は15μm、最終冷間圧延に使用した圧延ロール直径は100mm、圧延ロールの表面粗さRaは0.10μmとした。又、最終冷間圧延の圧延加工度の制御により立方体集合組織の発達度(I/I0)を変化させた。
この製造方法において、(1)最終冷間圧延前の焼鈍温度及び、(2)最終冷間圧延の圧延条件(圧延速度、圧延加工度、圧延油の粘度)を種々に変化させ、発明例1〜6及び比較例1〜14の圧延銅箔を得た。
Hereinafter, an example of an embodiment of the present invention will be described.
Hot rolling using 200mm thick and 600mm wide tough pitch copper ingot (oxygen content 200ppm), oxygen free copper ingot (oxygen content less than 10ppm) and copper containing Ag (Ag content 200ppm, oxygen content 200ppm) Later, cold rolling and annealing were repeated to obtain a plate (thickness t mm) having a predetermined thickness after rolling. This plate was annealed in a heating furnace maintained at a temperature of 180 ° C. for 2 hours and cold-rolled to 17 μm.
Here, the rolling work degree R in the final cold rolling is given by R = (t−0.017) / t × 100 (%). The crystal grain size after annealing was measured by a cutting method based on JIS G0551 in a cross section perpendicular to the rolling direction. The average grain size of recrystallized grains obtained by annealing before the final cold rolling was 15 μm, the diameter of the rolling roll used for the final cold rolling was 100 mm, and the surface roughness Ra of the rolling roll was 0.10 μm. Further, the degree of development (I / I 0 ) of the cube texture was changed by controlling the rolling degree of the final cold rolling.
In this production method, (1) the annealing temperature before the final cold rolling, and (2) the rolling conditions (rolling speed, rolling workability, rolling oil viscosity) of the final cold rolling are variously changed, and Invention Example 1 To 6 and Comparative Examples 1 to 14 were obtained.

発明例及び比較例の圧延銅箔について、以下の特性を評価した。
(1)光沢度Gs(60°)
JIS Z8741に準拠した光沢度計を使用し、圧延方向に平行な方向の入射角60度で光沢度を測定した。
(2)立方体集合組織(I/I0
試料を200℃で30分加熱後、理学電機(株)社製X線ディフラクトメーターRINT2000を使用して圧延面のX線回折で200面強度の積分値(I)求めた。この値をあらかじめ測定しておいた微粉末銅の(200)面強度の積分値(I0)で割り、I/I0の値を計算した。なお、ピーク強度の積分値の測定は、Co管球を用い、2θ=57〜63°(θは回折角度)の範囲で行った。この測定は、測定位置を変えて2回行い、その平均値を求めた。なお、以下では、I/I0を200面集合度と称している。
(3)最大高さ(Ry)
JIS B0601−1994に準拠して、基準長さ0.8mm、評価長さ4mm、カットオフ値0.8mm、送り速さ0.1mm/秒の条件で測定した。この測定を圧延方向と平行に、測定位置を変えて10回行い、10回の測定での最大値を求めた。
(4)耐屈曲性
試料を200℃で30分にて加熱した後に、JIS C5016準拠のFPC耐屈曲性試験を行い、屈曲疲労寿命を測定した。具体的には、図1に示す装置により、屈曲疲労寿命の測定を行った。この装置は、発振駆動体4に振動伝達部材3を結合した構造になっており、被試験圧延銅箔1は、矢印で示したねじ2の部分と振動伝達部材3の先端部の計4点で装置に固定される。振動伝達部材3が上下に駆動すると、圧延銅箔1の中間部は、所定の曲率半径rでヘアピン状に屈曲される。
本試験では、次の条件下で屈曲を繰り返す加速試験における破断までの回数を求めた。試験片幅12.7mm、試験片長さ:200mm、試験片採取方向:試験片の長さ方向が圧延方向と平行になるように採取、曲率半径r:2.5mm、引張り荷重負荷なし、振動ストローク:25mm、振動速度:1500回/分。これは、実際にFPCが使用される条件よりも厳しい条件である。測定は同じ材料について5回行い、その平均値を求めた。
The following characteristics were evaluated about the rolled copper foil of the invention example and the comparative example.
(1) Glossiness Gs (60 °)
Using a gloss meter in accordance with JIS Z8741, the gloss was measured at an incident angle of 60 degrees in a direction parallel to the rolling direction.
(2) Cube texture (I / I 0 )
After heating the sample at 200 ° C. for 30 minutes, an integral value (I) of the 200-plane strength was determined by X-ray diffraction of the rolled surface using an X-ray diffractometer RINT2000 manufactured by Rigaku Corporation. This value was divided by the integral value (I 0 ) of the (200) plane strength of finely powdered copper that had been measured in advance, and the value of I / I 0 was calculated. In addition, the measurement of the integrated value of peak intensity was performed in the range of 2 (theta) = 57-63 degrees ((theta) is a diffraction angle) using Co tube. This measurement was performed twice at different measurement positions, and the average value was obtained. In the following, I / I 0 is referred to as the 200-plane aggregation degree.
(3) Maximum height (Ry)
Based on JIS B0601-1994, the measurement was performed under the conditions of a reference length of 0.8 mm, an evaluation length of 4 mm, a cut-off value of 0.8 mm, and a feed speed of 0.1 mm / second. This measurement was performed 10 times in parallel with the rolling direction while changing the measurement position, and the maximum value in 10 measurements was obtained.
(4) Bending resistance After heating the sample at 200 ° C. for 30 minutes, an FPC bending resistance test based on JIS C5016 was performed to measure the bending fatigue life. Specifically, the bending fatigue life was measured with the apparatus shown in FIG. This apparatus has a structure in which a vibration transmission member 3 is coupled to an oscillation driver 4, and the tested rolled copper foil 1 has a total of four points including a screw 2 portion indicated by an arrow and a tip portion of the vibration transmission member 3. Fixed to the device. When the vibration transmitting member 3 is driven up and down, the intermediate portion of the rolled copper foil 1 is bent into a hairpin shape with a predetermined radius of curvature r.
In this test, the number of times until fracture in the accelerated test in which bending was repeated under the following conditions was determined. Specimen width 12.7 mm, Specimen length: 200 mm, Specimen sampling direction: Collected so that the length direction of the specimen is parallel to the rolling direction, Curvature radius r: 2.5 mm, No tensile load applied, Vibration stroke : 25 mm, vibration speed: 1500 times / min. This is a more severe condition than the condition in which FPC is actually used. The measurement was performed 5 times for the same material, and the average value was obtained.

発明例及び比較例の圧延条件と測定結果を表1に示す。
発明例1〜4、及び比較例1〜12は、厚みが17μmの圧延銅箔について実施した。発明例1〜4は、最終冷間圧延における圧延加工度が適正な範囲であるため、200面集合度が本発明の範囲であり、かつ最終冷間圧延における圧延速度及び圧延油粘度が好ましい範囲内であるため、光沢度が本発明の範囲内である。その結果、発明例1〜4は、比較例1〜12に比べ屈曲疲労サイクル寿命(回数)が多く、いずれも30万回を超えている。それに対し、比較例1〜4は、圧延速度及び圧延油粘度が好ましい範囲外であるため、光沢度が本発明の範囲を下回っている。又、比較例5〜12は、圧延加工度が好ましい範囲外であるため200面集合度が本発明の範囲を下回っている。その結果、比較例1〜12は、発明例1〜4に比べて屈曲疲労サイクル寿命が少なく30万回を下回り、比較例1〜8は20万回を下回り、特に比較例5〜8は10万回を下回っている。
なお、発明例1〜4および比較例9〜12は、いずれも圧延速度100〜400m/分、圧延油粘度1〜7cStであるが、発明例1〜4は比較例9〜12に比べ光沢度が低い。これは、発明例1〜4は、比較例9〜12に比べ圧延加工度が高いことによる。
Table 1 shows the rolling conditions and measurement results of the inventive examples and comparative examples.
Invention Examples 1-4 and Comparative Examples 1-12 were implemented about the rolled copper foil whose thickness is 17 micrometers. In Invention Examples 1 to 4, since the degree of rolling work in the final cold rolling is in an appropriate range, the degree of 200-side assembly is in the range of the present invention, and the rolling speed and rolling oil viscosity in the final cold rolling are preferable. Therefore, the glossiness is within the scope of the present invention. As a result, Inventive Examples 1 to 4 have a longer bending fatigue cycle life (number of times) than Comparative Examples 1 to 12, and all exceed 300,000 times. On the other hand, in Comparative Examples 1 to 4, the rolling speed and the rolling oil viscosity are out of the preferred ranges, so the glossiness is below the range of the present invention. In Comparative Examples 5 to 12, the degree of rolling is outside the preferred range, so the degree of 200-plane aggregation is below the range of the present invention. As a result, Comparative Examples 1 to 12 have less flexural fatigue cycle life than Inventive Examples 1 to 4, which is less than 300,000 times, Comparative Examples 1 to 8 are less than 200,000 times, and Comparative Examples 5 to 8 are particularly 10 Less than 10,000 times.
Inventive Examples 1-4 and Comparative Examples 9-12 all have a rolling speed of 100-400 m / min and a rolling oil viscosity of 1-7 cSt, but Inventive Examples 1-4 are glossy compared to Comparative Examples 9-12. Is low. This is because Invention Examples 1 to 4 have a higher degree of rolling than Comparative Examples 9 to 12.

発明例1及び2は、光沢度及び200面集合度が本発明の範囲内であるだけでなく、圧延前の焼鈍における結晶粒径及び圧延加工度が好ましい範囲内であるため、最大高さRyが本発明の好ましい範囲内である。その結果、発明例1及び2は、発明例1〜6のなかで屈曲疲労サイクル寿命が最も多い。
一方、発明例3及び4は、光沢度及び200面集合度が本発明の範囲内であるが最終冷間圧延前の焼鈍における結晶粒径が好ましい範囲を超えているため、最大高さRyが本発明の好ましい範囲を超えている。その結果、発明例3及び4は、発明例1及び2に比べ屈曲疲労サイクル寿命が少ない。
発明例5及び6は、厚みが33μm及び66μmの圧延銅箔について実施した。発明例5及び6は、圧延速度、圧延油粘度、圧延前の焼鈍における結晶粒径及び圧延加工度が好ましい範囲内であるため、光沢度及び200面集合度が本発明の範囲内であるだけでなく、最大高さRyも本発明の好ましい範囲内である。従って、発明例5及び6は、厚みが厚いため発明例1〜4に比べ屈曲疲労サイクル寿命が少ないが、同じ厚みの比較例13及び14に比べて屈曲疲労サイクル寿命が多く、本発明の効果が確認できる。
In Invention Examples 1 and 2, not only the glossiness and the degree of aggregation of 200 planes are within the range of the present invention, but also the crystal grain size and the rolling workability in the annealing before rolling are within the preferable ranges, so the maximum height Ry Is within the preferred range of the present invention. As a result, Invention Examples 1 and 2 have the longest bending fatigue cycle life among Invention Examples 1-6.
On the other hand, in Invention Examples 3 and 4, the glossiness and the degree of aggregation of 200 planes are within the range of the present invention, but the crystal grain size in the annealing before the final cold rolling exceeds the preferred range, so the maximum height Ry is The preferred range of the present invention is exceeded. As a result, Invention Examples 3 and 4 have a shorter bending fatigue cycle life than Invention Examples 1 and 2.
Invention Examples 5 and 6 were carried out on rolled copper foils having thicknesses of 33 μm and 66 μm. In Invention Examples 5 and 6, since the rolling speed, rolling oil viscosity, crystal grain size in annealing before rolling, and rolling degree are within preferable ranges, the glossiness and the degree of aggregation of 200 planes are only within the scope of the present invention. In addition, the maximum height Ry is also within the preferred range of the present invention. Therefore, Invention Examples 5 and 6 have a thick bending fatigue cycle life as compared with Invention Examples 1 to 4 because they are thick, but have a longer bending fatigue cycle life than Comparative Examples 13 and 14 of the same thickness. Can be confirmed.

比較例1及び2は、最終冷間圧延における圧延速度及び圧延油粘度が好ましい範囲を超えているため、光沢度が本発明の範囲を外れているものの、最終冷間圧延前の焼鈍における結晶粒径及び圧延加工度が好ましい範囲内であるため200面集合度が本発明の範囲内であり最大高さRyが本発明の好ましい範囲内である。その結果、比較例1及び2は、発明例1〜4及び比較例9〜12より屈曲疲労サイクル寿命は少ないが、比較例1〜8の中では最も多い。
比較例3及び4は、光沢度が本発明の範囲を下回り、かつ最終冷間圧延前の焼鈍における結晶粒径が好ましい範囲外であるため、最大高さRyが本発明の好ましい上限を超えている。その結果、比較例3及び4は、発明例1〜4は勿論、比較例1及び2に比べても屈曲疲労サイクル寿命が少ない。
比較例5及び6は、最終冷間圧延における圧延速度及び圧延油粘度が好ましい上限を超え、かつ圧延加工度が好ましい範囲を下回っているため、光沢度及び200面集合度が本発明の範囲を下回っている。その結果、比較例5及び6の屈曲疲労サイクル寿命は、発明例1〜4より少なく、比較例1〜4よりも更に少ない。
In Comparative Examples 1 and 2, since the rolling speed and rolling oil viscosity in the final cold rolling exceed the preferred ranges, the glossiness is outside the range of the present invention, but the crystal grains in the annealing before the final cold rolling. Since the diameter and the rolling degree are within the preferable ranges, the degree of 200-side assembly is within the range of the present invention, and the maximum height Ry is within the preferable range of the present invention. As a result, Comparative Examples 1 and 2 have a shorter bending fatigue cycle life than Invention Examples 1 to 4 and Comparative Examples 9 to 12, but are the largest among Comparative Examples 1 to 8.
In Comparative Examples 3 and 4, since the gloss is below the range of the present invention and the crystal grain size in the annealing before the final cold rolling is outside the preferred range, the maximum height Ry exceeds the preferred upper limit of the present invention. Yes. As a result, Comparative Examples 3 and 4 have less bending fatigue cycle life than Comparative Examples 1 and 2 as well as Invention Examples 1 to 4.
In Comparative Examples 5 and 6, the rolling speed and rolling oil viscosity in the final cold rolling exceeds the preferable upper limit, and the rolling degree is less than the preferable range, so the glossiness and the 200-plane aggregation degree are within the scope of the present invention. It is below. As a result, the bending fatigue cycle life of Comparative Examples 5 and 6 is less than Invention Examples 1 to 4, and is even less than Comparative Examples 1 to 4.

比較例7及び8は、最終冷間圧延における圧延速度及び圧延油粘度が好ましい範囲を超え、かつ最終冷間圧延前の焼鈍における結晶粒径及び圧延加工度が好ましい範囲外であるため、光沢度及び200面集合度が本発明の範囲を下回り、最大高さRyが本発明の好ましい範囲外である。その結果、比較例7及び8の屈曲疲労サイクル寿命は、発明例1〜4は勿論、比較例1〜6よりも少ない。
比較例9及び10は、最終冷間圧延における圧延速度及び圧延油粘度が好ましい範囲内であるため、光沢度が本発明の範囲内であるが、圧延加工度が好ましい範囲を下回っているため、200面集合度が本発明の範囲を下回っている。その結果、比較例9及び10は、発明例1及び2に比べ屈曲疲労サイクル寿命が少ない。
比較例11及び12は、最終冷間圧延における圧延速度及び圧延油粘度が好ましい範囲内であるため光沢度が本発明の範囲内であるが、最終冷間圧延前の焼鈍における結晶粒径及び圧延加工度が好ましい範囲外であるため、200面集合度が本発明の範囲未満であり、最大高さRyが本発明の好ましい範囲外である。その結果、比較例11及び12は、発明例1〜4に比べ屈曲疲労サイクル寿命が少なく、比較例9及び10よりも低い。
比較例13及び14は、厚みが33μm及び66μmについて実施したもので、最終冷間圧延における圧延速度及び圧延油粘度が好ましい範囲を超えているため、光沢度が本発明の範囲を下回っている。その結果、比較例13及び14は、発明例5及び6より屈曲疲労サイクル寿命は少ない。さらに、比較例13及び14は、厚みが厚いため、比較例1〜12に比べても屈曲疲労サイクル寿命が少ない。特に、比較例14は、厚みが本発明の好ましい範囲外であるため、屈曲疲労サイクル寿命が最も少ない水準であった。
In Comparative Examples 7 and 8, the rolling speed and rolling oil viscosity in the final cold rolling exceeds the preferable ranges, and the crystal grain size and the rolling work degree in the annealing before the final cold rolling are outside the preferable ranges. And the degree of assembly of 200 planes is below the range of the present invention, and the maximum height Ry is outside the preferred range of the present invention. As a result, the bending fatigue cycle life of Comparative Examples 7 and 8 is less than Comparative Examples 1 to 6 as well as Invention Examples 1 to 4.
In Comparative Examples 9 and 10, since the rolling speed and rolling oil viscosity in the final cold rolling are within a preferable range, the glossiness is within the range of the present invention, but the rolling degree is below the preferable range, The degree of 200-plane assembly is below the scope of the present invention. As a result, Comparative Examples 9 and 10 have a shorter bending fatigue cycle life than Invention Examples 1 and 2.
In Comparative Examples 11 and 12, since the rolling speed and rolling oil viscosity in the final cold rolling are within the preferred ranges, the glossiness is within the scope of the present invention, but the crystal grain size and rolling in the annealing before the final cold rolling Since the degree of processing is outside the preferred range, the degree of 200-plane assembly is less than the range of the present invention, and the maximum height Ry is outside the preferred range of the present invention. As a result, Comparative Examples 11 and 12 have a shorter bending fatigue cycle life than Invention Examples 1 to 4, and are lower than Comparative Examples 9 and 10.
Comparative Examples 13 and 14 were carried out for thicknesses of 33 μm and 66 μm. Since the rolling speed and rolling oil viscosity in the final cold rolling exceeded the preferable ranges, the glossiness was below the range of the present invention. As a result, Comparative Examples 13 and 14 have a shorter bending fatigue cycle life than Invention Examples 5 and 6. Furthermore, since Comparative Examples 13 and 14 are thick, the flex fatigue cycle life is less than Comparative Examples 1-12. In particular, Comparative Example 14 had a bending fatigue cycle life at the lowest level because the thickness was outside the preferred range of the present invention.

Figure 0004522972
Figure 0004522972

JIS C5016に準拠したFPC耐屈曲性試験装置の概略図である。It is the schematic of the FPC bending resistance test apparatus based on JISC5016.

Claims (3)

200℃で30分加熱後、圧延面のX線回折で求めた(200)面の積分強度(I)の、微粉末銅の(200)面の積分強度(I0)に対する割合I/I0が20以上である圧延銅箔において、冷間圧延で形成された表面の圧延平行方向の光沢度(JIS Z8741準拠)でGs(60°)が150%以上であり、最大高さRy(JIS B0601−1994準拠)が2.0μm以下であることを特徴とする耐屈曲性に優れた圧延銅箔。 After heating at 200 ° C. for 30 minutes, the ratio I / I 0 of the integrated intensity (I) of the (200) plane determined by X-ray diffraction of the rolled surface to the integrated intensity (I 0 ) of the (200) plane of finely powdered copper There the rolled copper foil is 20 or more, parallel to the rolling direction of the gloss of the cold-rolled at the surface formed (JIS Z8741 compliant) with Gs (60 °) is Ri der least 150%, the maximum height Ry (JIS rolled copper foil B0601-1994 compliant) and excellent bending resistance, characterized in der Rukoto below 2.0 .mu.m. 圧延平行方向に採取した試験片を用いたフレキシブルプリント配線板耐屈曲性試験(JIS C5016準拠)において、屈曲疲労寿命が30万回以上である請求項1記載の圧延銅箔。 Rolled copper foil in the direction parallel to the rolling direction in the collected specimen flexible printed wiring board flex resistance test using (JIS C5016 compliant), according to claim 1 Symbol placement flex fatigue life is more than 300,000 times. 厚みが35μm以下である請求項1又は2記載の圧延銅箔。 The rolled copper foil according to claim 1 or 2 , wherein the thickness is 35 µm or less.
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