JP4536178B2 - Semiconductor manufacturing apparatus, semiconductor manufacturing apparatus parameter editing method, and semiconductor manufacturing apparatus display method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor manufacturing apparatus, and more particularly to a semiconductor manufacturing apparatus capable of solving the problems related to the waste of system restart time when changing the apparatus parameters of the semiconductor manufacturing apparatus.
[0002]
FIG. 9 is a diagram for explaining a general system configuration of a conventional semiconductor manufacturing apparatus.
The main controller 111 has display and input means such as a touch panel 112, manages data such as parameters, and controls the order of processes. In addition, a designated value of a process to be executed is instructed to each sub controller by the communication means, and data from the sub controller is displayed. In FIG. 9, as a sub-controller, a transport control sub-controller 113 mainly responsible for transport control and a process control sub-controller 114 that performs detailed process control such as temperature and gas flow rate are shown.
[0003]
In addition to process recipe and control table parameters, semiconductor manufacturing apparatuses have specific parameters that depend on the settings of the controller itself, device specifications, and hardware. In the present specification, this parameter is referred to as a device parameter, and is denoted by reference numeral 115 in FIG.
[0004]
FIG. 10 is a diagram for explaining an example of device parameter data.
The transport system 121 includes data such as the configuration of the cassette storage shelf and error level. In the process system 122, the number of heater temperature zones, the heater temperature zone name, presence / absence of functions such as temperature lamp correction, set limit temperatures, Open / close valve number corresponding to gas, gas name for each MFC, full scale of each MFC, ramp rate of each MFC, display unit of each MFC, delay timer until each MFC flow error is recognized, etc. 123 , Switching between Japanese and English, sub-controller communication failure recognition delay timer and so on.
[0005]
FIG. 11 is a flowchart for conventional device parameter editing.
First, when parameter editing work is started in step S20, the process proceeds to step S21, where it is determined whether or not there is a change in parameters. If there is a change, the process proceeds to step S22 and the changed data is saved in the parameter file. In step S23, a controller restart message is displayed, and the process ends in step S24. In step S21, if there is no change in the parameters, the process proceeds to step S24 and the process is terminated.
[0006]
FIG. 12 is a flowchart of device parameter setting at system startup.
When the system is activated, data is read from the apparatus parameter file in step S25, and then the process proceeds to step S26 to read and set the data used by the main controller. In step S27, the sub controller used data is notified to the sub controller, and step S28 End the process.
[0007]
[Problems to be solved by the invention]
In such conventional semiconductor manufacturing equipment, it is necessary to restart the system regardless of the data type when equipment parameters are changed during equipment installation, prior setup, and user process evaluation. The time required for this restart was wasted.
In addition, if the language that each operator or engineer operating the semiconductor device is good at is different, it is necessary to restart the system even if it is desired to immediately change the language of characters displayed on the screen. At the time of mass production, it was difficult to secure the time required to restart the system and it was difficult to change.
[0008]
Therefore, an object of the present invention is to solve the problems related to the waste of system restart time when changing the device parameters of a conventional semiconductor manufacturing apparatus. The object is to provide a semiconductor device that can be shortened.
[0009]
[Means for Solving the Problems]
In order to solve the above-described problems, the present invention displays a list of parameters that require a system restart and parameters that do not require a system restart when a setting change of a specific parameter depending on hardware is performed. After confirming the display contents, the respective parameters are changed at a desired stage.
[0010]
Further, according to the present invention, it is possible to select whether to immediately change the parameter that does not require system restart or to change it when the system is restarted.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a system configuration diagram of one embodiment of the present invention.
Also in this invention, the semiconductor manufacturing apparatus has display and input means such as the touch panel 112 as in the conventional apparatus, and manages data such as parameters and controls the order of processes. In addition, a designated value of a process to be executed is instructed to each sub controller by the communication means, and data from the sub controller is displayed. In FIG. 1, as a sub-controller, a transport control sub-controller 113 mainly responsible for transport control and a process control sub-controller 114 that performs detailed process control such as temperature and gas flow rate are shown.
[0012]
The semiconductor manufacturing apparatus according to the present invention has an apparatus parameter 115 and is divided into an apparatus parameter file group 11 that requires a system restart and an apparatus parameter file group 12 that does not require a system restart. These file groups include, for example, a transport system, a process system, and other files.
[0013]
FIG. 2 is a diagram for explaining an example of the device parameter file group 12 that does not require a system restart.
The transfer system file 21 includes data such as an error level; the process system file 22 includes a heater temperature zone name, a set limit temperature, a gas name for each MFC, a display unit of each MFC, a flow rate error check time, and the like. Other files 23 include switching between Japanese and English.
[0014]
FIG. 3 is a diagram for explaining an example of the device parameter file group 11 that requires system restart.
The transfer system file 31 includes the configuration of the cassette storage shelf, etc .; the process system file 32 includes the number of heater temperature zones, the presence / absence of functions such as temperature ramp correction, the open / close valve number corresponding to each gas, and the full scale of each MFC. The other file 33 includes a delay timer until the sub-controller communication failure is recognized.
[0015]
FIG. 4 is a functional block diagram of one embodiment of the present invention.
The main controller 111 has a display means 41 such as a touch panel and an input means 42. The apparatus parameter display / editing means 43 displays an apparatus parameter editing screen, and provides a user with reference and editing functions of apparatus parameters. The device parameters are saved as a file by the device parameter storage means 44. Data used by the main controller 111 is set by the device parameter setting means 45. In addition, the device parameters used by the sub-controller are notified to the process control detailed processing unit 401 (sub-controller group) by the sub-controller communication unit 46.
[0016]
FIG. 5 is a flowchart for device parameter editing and setting according to an embodiment of the present invention.
First, data is read from each parameter file and displayed on the device parameter editing screen. After the user edits the device parameter on the device parameter edit screen (step S1), the process proceeds to step S2, where it is determined whether or not the parameter is changed. If there is a change, the process proceeds to step S3 and the changed data is stored in each parameter file. When there is no change, it progresses to step S4 and complete | finishes a process. Next, the process proceeds to step S5, where it is determined whether or not there is a change in the restart required data. If there is a change, the process proceeds to step S6, where a list of system restart necessary parameter changes as shown in FIG. 6 is displayed to allow the user to confirm, and a system restart request message is displayed in step S7.
[0017]
Next, it progresses to step S8 and it is determined whether the data which do not require restart have been changed. If it has been changed, the process advances to step S9 to display a list of changes to the system restart unnecessary data as shown in FIG. If not changed, the process proceeds to step S15 to end the process. Subsequently, in step S10, a message asking whether to change immediately is displayed and inquired to the user. When the user selects “Yes” in step S11, the process proceeds to step S12 to set data for using the main controller, and in step S13, notifies the sub controller of data for using the sub controller. If the user selects “No”, the process proceeds to step S14 to display a message indicating that the system will be valid when the system is restarted, allowing the user to confirm, and the process ends in step S15.
[0018]
FIG. 6 is a diagram for explaining a system restart necessary parameter change list screen.
The device parameter editing screen 61 displays a list of changes to parameters required for system restart. On the screen 61, parameters such as the transfer system 62, process system 63, and other 64 are displayed. As indicated by reference numeral 65, “the above data has been changed. It will be effective after the system is restarted”. A message is displayed.
[0019]
FIG. 7 is a diagram for explaining a system restart unnecessary parameter change list screen.
In the device parameter editing screen 71, a list of system restart unnecessary parameter changes is displayed. On the screen 71, parameters such as the transport system 72, the process system 73, and the other 74 are displayed. As indicated by reference numeral 75, "the above data has been changed. Do you want to make the changed data valid now?" A message like this is displayed. When the user selects “No”, a message such as “Changes will be effective after system restart” is displayed as indicated by reference numeral 76.
[0020]
FIG. 8 is a flowchart for setting device parameters at system startup according to an embodiment of the present invention.
When the system is started, data is read from each parameter file in step S16, then data used by the main controller is set in step S17, and then the process proceeds to step S18 to notify the sub controller of data used by the sub controller. End the process.
[0021]
【The invention's effect】
According to the semiconductor manufacturing apparatus of the present invention, when changing the setting of the specific parameter depending on the hardware, the parameter that requires system restart and the parameter that does not require system restart are displayed in a list, respectively, and the operator displays the list. After confirming the contents, the respective parameters are changed at a desired stage, so that the problem relating to the waste of the system restart time when changing the device parameters of the semiconductor manufacturing apparatus is solved. Time and advance setup and process evaluation time can be shortened by the user.
[0022]
In addition, for parameters that do not require system restart, it is possible to select whether to change the parameter immediately or at system restart, thereby reducing the time required for system restart and improving efficiency. Good device tuning is possible.
Further, when the language that each operator or engineer operating the semiconductor device is good at differs, the language of characters displayed on the screen can be immediately changed.
Furthermore, by dividing the device parameter into a plurality of files, it is possible to divert the necessary files to a device in charge of a similar process.
In addition, when a device parameter is changed, an incorrect change can be suppressed by displaying a change list and allowing the user to confirm the change contents.
[Brief description of the drawings]
FIG. 1 is a system configuration diagram of an embodiment of the present invention.
FIG. 2 is a diagram for explaining an example of a device parameter file group that does not require a system restart;
FIG. 3 is a diagram for explaining an example of a device parameter file group that requires a system restart;
FIG. 4 is a functional block diagram of an embodiment of the present invention.
FIG. 5 is a flowchart for device parameter editing and setting according to an embodiment of the present invention;
FIG. 6 is a diagram for explaining a system restart necessary parameter change list screen;
FIG. 7 is a diagram for explaining a system restart unnecessary parameter change list screen;
FIG. 8 is a flowchart for setting device parameters at system startup according to an embodiment of the present invention;
FIG. 9 is a diagram for explaining a general system configuration of a conventional semiconductor manufacturing apparatus;
FIG. 10 is a diagram for explaining an example of device parameter data;
FIG. 11 is a flowchart for conventional device parameter editing.
FIG. 12 is a flowchart of apparatus parameter setting at system startup.
[Explanation of symbols]
11 Device parameter file group that requires system restart 12 Device parameter file group 21 and 31 that does not require system restart Transport system files 22 and 32 Process system files 23 and 33 Other files 111 Main controller 112 Touch panel 113 Sub-controller 114 for transport control Sub-controller 115 for process control Device parameter

Claims (4)

Upon changing the setting of specific parameters that depend on the hardware, system and parameters that require a restart, and a system restart unnecessary parameters shown Re table each it, after confirming the previous Symbol display contents, at the desired stage A semiconductor manufacturing apparatus characterized in that each of the parameters can be changed.   2. The semiconductor manufacturing apparatus according to claim 1, wherein a parameter that does not require system restart can be selected to be immediately changed or changed when the system is restarted. When changing the setting of specific parameters depending on the hardware, the parameters that require system restart and the parameters that do not need to be restarted are displayed, and after confirming the displayed contents, each of the parameters is displayed at a desired stage. A parameter editing method for a semiconductor manufacturing apparatus, wherein the parameter can be changed. When changing the setting of specific parameters depending on the hardware, the parameters that require system restart and the parameters that do not need to be restarted are displayed, and after confirming the displayed contents, each of the parameters is displayed at a desired stage. A display method for a semiconductor manufacturing apparatus, comprising: displaying a message indicating a parameter change.

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