JP4540978B2 - Motorized valve diagnosis method and apparatus - Google Patents

Description

  The present invention relates to a diagnostic method for diagnosing the torque of a motor-operated valve and a diagnostic apparatus suitable for carrying out the diagnostic method.

  The motor-operated valve is configured to open and close the valve body with a motor driving force, and its greatest features are that a large valve body driving force can be secured and that the opening and closing operation can be performed remotely. Because of these characteristics, for example, it is frequently used in large plants equipped with large-diameter pipes, pipes of nuclear power plants where manual operation is regulated, and the use is used as a valve for flow rate adjustment. Rather than being used, it is often used as a valve for fully opening and closing a passage in a pipe.

  Such an electric valve includes a valve body that opens and closes a passage in a pipe, a worm that is rotationally driven by a motor, a valve body driving unit that opens and closes the valve body by receiving the rotational force of the worm, A spring cartridge that includes a disc spring that expands and contracts according to the thrust generated in the worm with a predetermined tension load is provided, and the torque is applied to the valve body drive unit to open and close the valve body. By stopping the motor when the amount of compression of the disc spring reaches the regulated amount, it is possible to ensure a reliable valve action with an appropriate on-off valve holding force and prevent damage due to avoidance of excessive driving force load. Realized.

  On the other hand, in order to maintain the function of the motorized valve for a long period of time, in addition to confirming the soundness of the function of the motorized valve itself, in addition to the motor part and the worm, the rotational force of the worm Therefore, it is necessary to confirm the soundness of the valve body drive unit or the like that transmits the pressure to the valve body side. The focus of diagnosis for this is, for example, whether or not the valve body is driven with an appropriate torque, whether or not an appropriate holding torque is ensured in the fully open / closed state of the valve body, and the required torque is applied. The setting of the torque switch for automatically stopping the motor at the time when the motor is applied is appropriate, the degree of progress of the wear of the valve body drive unit and the like. Among these diagnosis items, diagnosis regarding the torque of the motor-operated valve is considered to be the most important from the past examples that most of the malfunctions of the motor-operated valve are caused by torque improperness. For this reason, various proposals have conventionally been made for a method for diagnosing a motor-operated valve related to torque.

  For example, the amount of worm movement is regarded as the amount of compression of the disc spring, and after knowing the relationship between the amount of worm movement and the corresponding compression force, the amount of worm movement is measured, There is a diagnostic method for acquiring a compression force that is obtained, further knowing the torque actually acting on the valve body drive unit from the worm based on this compression force, and making a diagnosis on the torque of the motor-operated valve based on this torque ( Patent Document 1). According to this method, even if the operating direction of the motor-operated valve is the opening operation direction or the closing operation direction, the phenomenon that the disc spring is compressed is the same and there is no difference. If measured, the compression force corresponding to the worm movement amount (that is, the torque corresponding thereto) can be known. That is, if the amount of worm movement and the value obtained by converting the amount of worm movement into torque are acquired as data, the torque corresponding to the amount of worm movement can be known both when the motor-operated valve is opened and when it is closed. It is something that can be done.

Japanese Patent No. 2982090 (paragraphs “0021” to [0031], FIGS. 1 to 4)

  By the way, the disc springs are normally used as a spring cartridge in which a predetermined number of disc springs are arranged to face each other and a predetermined tension load is applied by reducing the disc springs by a predetermined amount. That is, the spring cartridge is fitted between a pair of restraining members arranged at a predetermined interval on the motor-operated valve side, and when the motor-operated valve is closed, one side of the pair of restraining members is fixed and the other side moves. On the contrary, at the time of the opening operation, the other side of the pair of restraining members is fixed and the one side is compressed by moving.

  In this case, the amount of compression of the disc spring (ie, the amount of compression of the spring cartridge) is measured by measuring the displacement of the distance from a certain reference position to the end of the spring cartridge or the portion connected thereto (ie, the amount of worm movement). It can be actually measured by doing. For this reason, as a practical method for obtaining the relationship between the worm movement amount and the compression force (that is, the compression force having a certain relationship with the torque), the displacement and the torque when the motor-operated valve is opened and closed are used. There is also a method of creating a single torque curve indicating the relationship. For example, as shown in FIG. 14, the torque curve “C1” at the closing operation obtained from the measured worm movement amount and the compression force is folded point-symmetrically around the reference position “a”, and at the time of the opening operation. This is a technique that is adopted as the torque curve “C2” and creates these two torque curves as a single torque curve. In FIG. 14, for the sake of visual recognition, the torque value at the closing operation is indicated by “+”, and the torque value at the opening operation is indicated by “−”.

  In this manner, that is, the torque curve “C1” at the time of closing operation is folded point-symmetrically to obtain the torque curve “C2” at the time of opening operation, and these two torque curves are acquired as a single torque curve. When a diagnosis related to the torque of the motor-operated valve is performed based on the torque curve thus obtained, a highly accurate diagnosis can be expected when the spring cartridge is fitted between the pair of restraining members. When the length and the distance between the pair of restraining members match and there is no backlash between them, that is, in FIG. 14, the base point of the torque curve “C1” at the closing operation and the torque curve “C2 at the opening operation” in FIG. Only when the base points coincide at the same worm position “a”, and when there is backlash, that is, in FIG. ”, The base point of the torque curve“ C2 ′ ”during the opening operation is the worm position“ b ”, and the base point“ a ”of the torque curve“ C1 ”during the closing operation is in the axial direction of the worm. When the deviation occurs, for example, the torque at the worm position “c” should be the torque “T2” acquired from the torque curve “C2 ′”, which is acquired as the torque “T1” from the torque curve “C2”. Thus, a difference of “T2−T1” occurs in the torque value. Therefore, if the torque “T1” obtained from the torque curve “C2” is used for diagnosis of the motor-operated valve, a highly accurate diagnosis cannot be expected.

  However, there has not yet been proposed a method for diagnosing a motor-operated valve in consideration of such looseness of the spring cartridge. Therefore, development of the method is demanded from the viewpoint of performing highly accurate diagnosis.

  Therefore, the present invention has been made with the object of providing a diagnostic method for a motor-operated valve capable of performing a diagnosis regarding the torque of the motor-operated valve with high accuracy, and a diagnostic apparatus suitable for carrying out this diagnostic method.

  In the present invention, the following configuration is adopted as a specific means for solving such a problem.

  In the first invention of the present application, a worm that applies a driving force to the valve body drive unit that opens and closes the valve body is disposed so as to be movable in the axial direction, and a plurality of disc springs are provided on the axial center of the worm. A spring cartridge that is arranged coaxially and opposed to each other and is applied as a unit by applying a predetermined tension load is arranged, and a torque corresponding to the compression amount of the disc spring accompanying the axial displacement of the worm is applied to the valve body drive unit. In the diagnostic method for diagnosing various diagnostic items related to the torque of the motor-operated valve for the motor-operated valve to be applied, the reference compression amount and the reference compression amount of the disc spring in the spring cartridge A corresponding reference compression force is acquired, a correspondence relationship with a reference torque generated corresponding to the reference compression force is acquired as reference data, and the spring cartridge is When the motor-operated valve is actuated to the open side while being incorporated in the valve, the spring cartridge is moved to one end side in the axial direction and stopped, and the spring cartridge is actuated to the close side. The axial distance between the measurement point set on the spring cartridge side and the measurement reference position at each of the second initial positions of the spring cartridge when the spring cartridge moves to the other end side in the axial direction and stops. The dimensions are acquired as a first initial value and a second initial value, respectively, and stored together with the reference data. When diagnosing the motor-operated valve, the measurement point and the measurement standard are measured with the spring cartridge incorporated in the motor-operated valve. The first axial measurement during the closing operation by measuring the axial distance from the position for each of the closing operation and the opening operation. And the second measured value at the time of opening operation are detected, the operating direction of the motor-operated valve is detected, the absolute value of the difference between the first measured value and the second initial value at the closing operation, The absolute value of the difference between the second measured value and the first initial value is set as the actual compression amount, and the actual compression amount is replaced with the reference compression amount in the reference data to obtain the reference compression force corresponding thereto. In addition, a reference torque corresponding to the reference compression force is acquired as an actual torque, and the diagnosis is performed by comparing the actual torque with appropriate torques in various diagnosis items.

In the second invention of the present application, a worm that applies a driving force to the valve body drive unit that opens and closes the valve body is disposed so as to be movable in the axial direction, and a plurality of disc springs are provided on the axial center of the worm. A spring cartridge that is arranged coaxially and opposed to each other and is applied as a unit by applying a predetermined tension load is arranged, and a torque corresponding to the compression amount of the disc spring accompanying the axial displacement of the worm is applied to the valve body drive unit. In the diagnostic method for diagnosing various diagnostic items related to the torque of the motor-operated valve for the motor-operated valve to be applied, the reference compression amount and the reference compression amount of the disc spring in the spring cartridge A corresponding reference compression force is acquired, a correspondence relationship with a reference torque generated corresponding to the reference compression force is acquired as reference data, and the spring cartridge is When the motor-operated valve is actuated to the open side while being incorporated in the valve, the spring cartridge is moved to one end side in the axial direction and stopped, and the spring cartridge is actuated to the close side. The axial distance between the measurement point set on the spring cartridge side and the measurement reference position at each of the second initial positions of the spring cartridge when the spring cartridge moves to the other end side in the axial direction and stops. The dimensions are acquired as a first initial value and a second initial value, respectively, and an absolute value of a difference between the first initial value and the second initial value is acquired as a backlash, and the reference data and the first initial value and The second initial value and the amount of play are stored and retained, and when the motor-operated valve is diagnosed, the spring cartridge is incorporated in the motor-operated valve. The axial distance between the measurement point and the measurement reference position is measured for each of the closing operation and the opening operation to obtain a first measurement value during the closing operation and a second measurement value during the opening operation. The operating direction of the motor-operated valve is detected. When the valve is closed, the absolute value of the difference between the first measured value and the second initial value is calculated. When the valve is opened, the difference between the second measured value and the second initial value is calculated. The value obtained by subtracting the amount of play from the absolute value is
Alternatively, the value obtained by subtracting the amount of play from the absolute value of the difference between the first initial value and the first measurement value during the closing operation, and the difference between the second measurement value and the first initial value during the opening operation. Absolute value,
Each of the actual compression amounts is replaced with the reference compression amount in the reference data to obtain a reference compression force corresponding thereto, and a reference torque corresponding to the reference compression force is obtained as an actual torque, The diagnosis is performed by comparing the actual torque with the appropriate torque in various diagnosis items.

  According to a third invention of the present application, in the motor-driven valve diagnosis method according to the first and second inventions, the reference data acquisition operation is performed with the spring cartridge removed from the motor-operated valve. .

  According to a fourth invention of the present application, in the motor-driven valve diagnosis method according to the first and second inventions, the reference data acquisition operation is performed in a state where the spring cartridge is incorporated in the motor-operated valve. .

According to a fifth invention of the present application, in the motor-driven valve diagnosis method according to the first and second inventions, the reference data acquisition operation is performed in a state where the operation of the motor-operated valve is stopped.

According to a sixth invention of the present application, in the motor-driven valve diagnosis method according to the fourth invention, the reference data is acquired while the motor-operated valve is operated.

  According to a seventh invention of the present application, in the motor-driven valve diagnosis method according to the first, second, third, fourth, fifth and sixth inventions, the measurement reference position is set on a casing of the motor-operated valve. It is characterized by doing.

  In the eighth invention of the present application, a worm for applying a driving force to the valve body drive unit for opening and closing the valve body is disposed so as to be movable in the axial direction, and a plurality of disc springs are provided on the axial center of the worm. A spring cartridge that is arranged coaxially and opposed to each other and is applied as a unit by applying a predetermined tension load is arranged, and a torque corresponding to the compression amount of the disc spring accompanying the axial displacement of the worm is applied to the valve body drive unit. In the diagnostic device for diagnosing various diagnostic items related to the torque of the motor-operated valve for the motor-operated valve to be applied, each reference compression amount and each reference compression amount of the disc spring in the spring cartridge Reference data acquisition means for acquiring a corresponding reference compression force and acquiring a correspondence relationship with a reference torque generated corresponding to the reference compression force as reference data; and the spring cart A first initial position of the spring cartridge at the time when the motorized valve is moved to one end side in the axial direction and stopped when the motorized valve is operated to the open side with the wedge incorporated in the motorized valve; The measurement point and the measurement reference position set on the spring cartridge side at each of the second initial positions of the spring cartridge when the spring cartridge is moved to the other end side in the axial direction and stopped when the spring cartridge is stopped. A first measuring means for acquiring the axial interval dimension as a first initial value and a second initial value, storage means for storing and holding the reference data, the first initial value, and the second initial value, With the spring cartridge installed in the motor-operated valve, the axial distance between the measurement point and the measurement reference position is set to close and open. Second measuring means for measuring each of them to obtain a first measured value at the closing operation and a second measured value at the opening operation, an operating direction detecting means for detecting the operating direction of the motor-operated valve, and at the closing operation time The absolute value of the difference between the first measured value and the second initial value is the actual compression amount, and the absolute value of the difference between the second measured value and the first initial value is the actual compression amount during opening operation. An actual torque acquisition means for replacing the reference compression amount in the reference data with the reference compression amount and acquiring a reference compression force corresponding to the reference compression amount, and acquiring a reference torque corresponding to the reference compression force as an actual torque; and acquiring the actual torque And a diagnostic means for making a diagnosis by comparing the actual torque acquired by the means with the appropriate torque in various diagnostic items.

In the ninth invention of the present application, a worm for applying a driving force to the valve body drive unit for opening and closing the valve body is disposed so as to be movable in the axial direction, and a plurality of disc springs are provided on the axial center of the worm. A spring cartridge that is arranged coaxially and opposed to each other and is applied as a unit by applying a predetermined tension load is arranged, and torque corresponding to the compression amount of the disc spring accompanying the axial displacement of the worm is applied to the valve body drive unit. In the diagnostic device for diagnosing various diagnostic items related to the torque of the motor-operated valve for the motor-operated valve to be applied, each reference compression amount and each reference compression amount of the disc spring in the spring cartridge Reference data acquisition means for acquiring, as reference data, a correspondence relationship with a reference torque generated correspondingly, and the electric power in a state where the spring cartridge is incorporated in the motor-operated valve. When the valve is actuated to the open side and the spring cartridge is moved to one end side in the axial direction and stopped, the first initial position of the spring cartridge and the motorized valve are actuated to the close side to cause the spring cartridge to move in the axial direction. The axial distance between the measurement point set on the spring cartridge side and the measurement reference position at each of the second initial positions of the spring cartridge at the time of moving to the other end side and stopping is set to the first initial value and First measurement means for obtaining as a second initial value, play amount obtaining means for obtaining an absolute value of a difference between the first initial value and the second initial value as play amount, the reference data, and the first initial value. And a storage means for storing and holding the second initial value and the amount of play, and the measurement point and the above in a state where the spring cartridge is incorporated in the electric valve. A second measuring means for measuring the axial distance from the measurement reference position for each of the closing operation and the opening operation and obtaining a first measurement value at the closing operation and a second measurement value at the opening operation; An operating direction detecting means for detecting an operating direction of the motor-operated valve, an absolute value of a difference between the first measured value and the second initial value at the closing operation, and the second measured value and the second at the opening operation. A value obtained by subtracting the amount of play from the absolute value of the difference from the initial value,
Alternatively, the value obtained by subtracting the amount of play from the absolute value of the difference between the first initial value and the first measurement value during the closing operation, and the difference between the second measurement value and the first initial value during the opening operation. Absolute value,
An actual compression amount is obtained, and the actual compression amount is replaced with the reference compression amount in the reference data to obtain a reference compression force corresponding thereto, and a reference torque corresponding to the reference compression force is obtained as an actual torque. It is characterized by comprising a torque acquisition means and a diagnosis means for making a diagnosis by comparing the actual torque acquired by the actual torque acquisition means with appropriate torques in various diagnostic items.

  According to a tenth invention of the present application, in the motor-operated valve diagnosis device according to the eighth or ninth invention, the motor-operated valve diagnosis device includes display means for displaying a diagnosis result in the diagnosis means, and the display means displays a torque curve. It is configured as described above.

  The eleventh invention of the present application is characterized in that, in the motor-operated valve diagnostic apparatus according to the eighth or ninth invention, the first measuring means and the second measuring means are constituted by the same measuring means.

  According to a twelfth aspect of the present invention, in the motor-operated valve diagnostic apparatus according to the eleventh aspect, the first and second measuring means receive reflected light at the measurement point on the spring cartridge side of the irradiated laser light. And it is characterized by comprising with the laser sensor which detects the distance to this measurement point.

  According to a thirteenth aspect of the present invention, in the motor-operated valve diagnostic apparatus according to the twelfth aspect of the present invention, the laser sensor and the spring cartridge are oil-tightly partitioned with a transparent material, and the laser sensor passes through the transparent material. It is characterized by being configured to be able to face the measurement points.

  According to the motor-driven valve diagnostic method and motor-operated valve diagnostic apparatus according to the present invention, the following specific effects can be obtained.

  (A) According to the motor-driven valve diagnosis method according to the first invention of the present application, the actual motor-driven valve diagnosis is performed by acquiring the reference torque, the first initial value, and the second initial value in advance. At this time, the first and second measured values are acquired and the operating direction of the motor-operated valve is detected, and the first and second initial values are used to determine the first and second measured values. The actual torque corresponding to the first and second measured values from which the dimensional difference between the initial value and the second initial value, that is, the influence of the backlash amount of the spring cartridge is eliminated can be easily and reliably acquired. Therefore, by making a diagnosis by comparing the acquired actual torque with the appropriate torque in the target diagnosis item, it is possible to obtain a highly reliable diagnosis result. It can contribute to the improvement of reliability.

  Further, when the motorized valve is diagnosed, only the acquisition of the first and second measured values and the detection of the operating direction of the motorized valve need only be performed. Therefore, the diagnostic work itself is simplified and speeded up, and the diagnostic cost is reduced. As a result, reduction in running cost of the motor-operated valve is promoted.

  (B) According to the motor-driven valve diagnosis method of the second invention of the present application, the reference torque, the first initial value and the second initial value, and the first initial value and the second initial value By acquiring the amount of play expressed as the absolute value of the difference, when actually diagnosing the motor-operated valve, the first and second measured values are acquired and the operating direction of the motor-operated valve is detected. In addition to the reference data and the backlash amount, the actual torque corresponding to the first and second measured values from which the influence of the backlash amount has been eliminated is calculated based on the first initial value or the second initial value. It can be acquired easily and reliably. Therefore, by making a diagnosis by comparing the acquired actual torque with the appropriate torque in the target diagnosis item, it is possible to obtain a highly reliable diagnosis result. It can contribute to the improvement of reliability. In addition, since it is possible to grasp the dimensional difference between the first initial value and the second initial value, that is, the secular change in the amount of play of the spring cartridge itself, a multifaceted diagnosis result can be obtained.

  Further, when the motorized valve is diagnosed, only the acquisition of the first and second measured values and the detection of the operating direction of the motorized valve need only be performed. Therefore, the diagnostic work itself is simplified and speeded up, and the diagnostic cost is reduced. As a result, reduction in running cost of the motor-operated valve is promoted.

  (C) According to the method for diagnosing a motor-operated valve according to the third invention of the present application, in addition to the effect described in the above (a) or (b), the following specific effect is obtained. That is, in the present invention, the reference data acquisition operation is performed with the spring cartridge removed from the motor-operated valve. For example, the reference data acquisition operation is performed with the spring cartridge incorporated in the motor-operated valve. Compared with the case of performing the operation, the acquisition work is easier and more accurate, and the reliability of the acquired reference data is improved. As a result, the diagnostic accuracy of the motorized valve is further improved. Can be expected.

  In addition, by acquiring the reference data of a new spring cartridge in advance in preparation for replacement with an existing spring cartridge, it is necessary to acquire reference data of a new spring cartridge anew when replacing the spring cartridge. Therefore, the work efficiency in replacing the spring cartridge is improved, and the reduction of the diagnostic cost is promoted.

  (D) According to the method for diagnosing a motor-operated valve according to the fourth invention of the present application, in addition to the effect described in the above (a) or (b), the following specific effect can be obtained. That is, in the present invention, the reference data acquisition operation is performed in a state where the spring cartridge is incorporated in the motor-operated valve. For example, the spring is disassembled and the spring cartridge is removed and the spring cartridge is removed. As compared with the case where the cartridge reference data acquisition operation is performed, the acquisition operation procedure can be simplified and the work efficiency can be improved. Moreover, compared with the case where it disassembles and performs the said motor operated valve, the fall of the operation rate of the plant etc. provided with this motor operated valve can be suppressed.

  (E) According to the motor-driven valve diagnosis method of the fifth invention of the present application, in addition to the effect described in (d) above, the following specific effect is obtained. That is, in the present invention, it is not necessary to operate the motor-operated valve. Therefore, the isolation of the system accompanying the operation of the motor-operated valve is unnecessary, and the motor-driven valve driving power source is not required. The degree of freedom is large, and the influence on other work can be reduced.

  (F) According to the method for diagnosing a motor-operated valve according to the sixth invention of the present application, in addition to the effect described in (d) above, the following specific effect is obtained. That is, in the present invention, the operation is performed by operating the motor-operated valve. Therefore, for example, compared with the case where the operation of acquiring the reference data is performed in a state where the operation of the motor-operated valve is stopped. The reference data can be acquired in a state closer to the operating state.

  (G) According to the motor-driven valve diagnostic method of the seventh invention of the present application, in addition to the effects described in the above (a), (b), (c), (d), (e) or (f) The following unique effects can be obtained. That is, in the present invention, since the measurement reference position is set on the casing of the motor-operated valve, the position is fixed on the casing of the motor-operated valve regardless of the operation of the disc spring. The first and second initial positions and the first and second measurement values can be acquired with high accuracy because there is no position fluctuation of the measurement reference position because it is a part, and based on these acquired values. Further improvement of the diagnostic accuracy of the diagnosis regarding the torque of the motorized valve performed in this manner can be expected.

  (H) According to the motor-operated valve diagnostic device of the eighth invention of the present application, the reference torque is acquired in advance by the reference data acquisition unit, and the first initial value and the first measurement unit are acquired by the first measurement unit. By acquiring the second initial value, when actually diagnosing the motor-operated valve, the first and second measured values are acquired by the second measuring unit, and the motor-operated valve is operated by the operating direction detecting unit. The first initial value and the second initial value based on the reference data, the first initial value, and the second initial value obtained from the storage means by the actual torque acquisition means only by detecting the direction. The actual torque corresponding to the first and second measured values in which the influence of the dimensional difference, that is, the influence of the play amount of the spring cartridge is eliminated, can be easily and reliably acquired. Then, the diagnosis means compares the acquired actual torque with the appropriate torque in the target diagnosis item, thereby obtaining an extremely reliable diagnosis result. It can contribute to the improvement of the operational reliability of the valve.

  Furthermore, in the diagnosis of the motor-operated valve, it is only necessary to obtain the first and second measured values by the second measuring means and to detect the operating direction of the motor-operated valve by the operating direction detecting means. This can be performed easily and quickly, which can contribute to a reduction in diagnostic cost and, in turn, to a reduction in running cost of the motor-operated valve.

  (I) According to the motor-operated valve diagnostic device of the ninth invention of the present application, the reference torque is acquired in advance by the reference data acquisition means, and the first initial value and the first value are acquired by the first measurement means. 2 by acquiring the initial value, and by acquiring the backlash amount expressed as the absolute value of the difference between the first initial value and the second initial value by the backlash amount acquisition means. In the diagnosis, the actual torque acquisition means can detect the first and second measurement values by the second measurement means and the operation direction of the motor-operated valve by the operation direction detection means. Based on the first initial value or the second initial value in addition to the reference data and the play amount obtained from the storage means, the actual values corresponding to the first and second measurement values from which the influence of the play amount has been eliminated. Obtain torque easily and reliably Rukoto can. Then, the diagnosis means compares the acquired actual torque with the appropriate torque in the target diagnosis item, thereby obtaining an extremely reliable diagnosis result. It can contribute to the improvement of the operational reliability of the valve. In addition, since it is possible to grasp the dimensional difference between the first initial value and the second initial value, that is, the secular change in the amount of play of the spring cartridge itself, a multifaceted diagnosis result can be obtained.

  Furthermore, in the diagnosis of the motor-operated valve, it is only necessary to obtain the first and second measured values by the second measuring means and to detect the operating direction of the motor-operated valve by the operating direction detecting means. This can be performed easily and quickly, which can contribute to a reduction in diagnostic cost and, in turn, to a reduction in running cost of the motor-operated valve.

  (J) According to the motor-operated valve diagnosis device according to the tenth invention of the present application, since the diagnosis result by the diagnosis means is displayed by the display means, the diagnosis result can be easily and accurately confirmed by visually checking the display. Can grasp. Further, since the torque curve is displayed, the presence and the size of the play can be easily and accurately grasped by visually recognizing the torque curve.

  (K) According to the motor-operated valve diagnostic apparatus of the eleventh aspect of the present application, in addition to the effects described in (h) or (i) above, the following specific effects can be obtained. That is, in the present invention, the first measuring means and the second measuring means are constituted by the same measuring means. For example, as compared with the case where these two measuring means are constituted by individual measuring means, It is possible to reduce the cost by simplifying the arrangement configuration of the measuring means and reducing the number of arrangement points, and as a result, the cost of the entire diagnostic apparatus can be reduced.

  (L) According to the motor-operated valve diagnostic device of the twelfth aspect of the present invention, the following unique effect is obtained in addition to the effect described in (k) above. In other words, in the present invention, the first and second measuring means are constituted by laser sensors that receive the reflected light of the irradiated laser light at the measurement point on the spring cartridge side and detect the distance to the measurement point. Therefore, for example, compared with the case where the first and second measuring means are configured by a differential transformer or the like, it can be configured more compactly, and thus the diagnostic apparatus can be made more compact. Can do. Further, since the first and second measuring means have a compact configuration, it is possible to permanently install the motor-operated valve. For example, it is necessary to attach and detach each measuring means for each diagnosis. Compared to the case, the work cost can be kept low.

  (M) According to the motor-operated valve diagnostic apparatus of the thirteenth aspect of the present application, in addition to the effect described in (l) above, the following specific effect is obtained. That is, in the present invention, the laser sensor and the spring cartridge are oil-tightly partitioned with a transparent material, and the laser sensor is configured to face the measurement point through the transparent material. Even if the laser sensors constituting the first and second measuring means are permanently installed on the motor-operated valve side, the gap between them is oil-tightly partitioned by the transparent material. The laser sensor is reliably prevented from leaking and fouling, and the measurement point can be seen through the transparent material, so that the sensor function of the laser sensor is properly maintained over a long period of time. As a synergistic effect, it is possible to achieve both improvement in durability of the first and second measuring means and realization of highly reliable measurement work.

  Hereinafter, the present invention will be specifically described based on preferred embodiments.

  FIG. 1 shows a motor-operated valve provided with a diagnostic device used for carrying out the diagnostic method according to the present invention. This motor-operated valve has a conventionally well-known structure, and is connected to a lower end portion of the valve stem 2 and is connected to a lower end portion of the valve stem 2 that is disposed facing the piping passage to open and close the passage. A stem nut 3 is screwed into the upper threaded portion of 2. The stem nut 3 is inserted into and fixed to a cylindrical drive sleeve 4 and integrated with the drive sleeve 4. The drive sleeve 4 is rotatable relative to a worm wheel 5 fitted and arranged on the outer peripheral side thereof.

  The drive sleeve 4 (that is, the stem nut 3) and the worm wheel 5 are composed of a projection 4a provided on the drive sleeve 4 side and a projection 5a provided on the worm wheel 5 side of the worm wheel 5. By rotating and colliding with each other, it rotates integrally, and the rotational force of the stem nut 3 is transmitted to the valve stem 2 as its axial displacement force, and the valve body is driven to open and close via the valve stem 2. (Elevation drive). The valve stem 2 is only allowed to move in the axial direction, and its rotation is restricted. The worm wheel 5, the stem nut 3, and the valve stem 2 constitute a valve body drive unit X.

  A worm 7 is meshed with the worm wheel 5, and the worm wheel 5 is rotated by a motor 10, whereby the worm wheel 5 is rotated and the rotational force is transmitted through the stem nut 3 to the valve stem. 2 is transmitted as the raising / lowering driving force.

  The motor 10 is a reversible rotary motor fixedly disposed on the casing 1 side, and the motor shaft 9 is provided with a spline 9a. The worm 7 is spline-fitted to the spline 9a portion of the motor shaft 9, so that the worm 7 receives the rotational force from the motor shaft 9, but in its axial direction (arrow MN direction). Is movable.

  Further, the worm 7 has its one end side extended in the axial direction to form an extended cylindrical portion 8. A circumferential groove 13 is provided on the outer periphery of the extended cylindrical portion 8, and an actuator 14 a of a torque switch 14 is engaged with the circumferential groove 13. The torque switch 14 operates when the worm 7 moves in the axial direction from its neutral position and the amount of movement reaches a predetermined value, and generates a stop signal for the motor 10 to stop it. The excessive torque transmission to the said valve stem 2 side is controlled, and the protection is aimed at.

  A bearing 11 is fixed to an end portion of the extended cylindrical portion 8 of the worm 7 by a nut 12 and a movable shaft 15 described below is connected to the end of the extending cylindrical portion 8 through the bearing 11 so as to be relatively rotatable. The movable shaft 15 is a different-diameter cylindrical body having a large-diameter cylindrical portion 15a into which the bearing 11 is inserted and fixed, and a small-diameter cylindrical portion 15b continuous to the large-diameter cylindrical portion 15a. Along with the movement in the axial direction, it moves in the axial direction integrally therewith. A spring cartridge 19 described below is attached to the small diameter cylindrical portion 15b of the movable shaft 15.

  The spring cartridge 19 generates a predetermined holding torque on the worm wheel 5 via the worm 7 after the valve body is fully opened or fully closed. The spring cartridge 19 is a large-diameter cylinder of the movable shaft 15. One spacer 21 disposed on the stepped surface side 18 between the portion 15a and the small diameter cylindrical portion 15b and the other spacer disposed on the seat surface side of the nut 25 screwed to the end of the small diameter cylindrical portion 15b. A plurality of disc springs 20 are alternately mounted between the front and back surfaces 22 and a required tension load is applied. Reference numeral 23 is a shim for adjusting the tension load, and reference numeral 24 is a torque limit sleeve for regulating the maximum compression displacement of the disc spring 20.

  The axial length of the spring cartridge 19 in the free state (that is, the outer dimension between the spacers 21 and 22 when a predetermined tension load is generated) is the same as that of the large-diameter cylindrical portion 15a of the movable shaft 15. It is fixed and held at a predetermined value by the step surface between the small diameter cylindrical portion 15b and the seat surface of the nut 25. In the following, the configuration of the spring cartridge 19 in the free state is referred to as “initial configuration”, and the compression configuration of the disc spring 20 in the “initial configuration” is referred to as “initial compression configuration”.

  Further, out of the movable shaft 15 and the spring cartridge 19, the movable shaft 15 is fitted into a small diameter hole portion 16 provided coaxially with the worm 7, and the spring cartridge 19 is inserted into the small diameter hole portion 16. The movable shaft 15 is axially movable in the small-diameter hole 16 and the spring cartridge 19 is inserted in the large-diameter hole 17. It can be expanded and contracted. The spacer 21 of the spring cartridge 19 is restricted from moving further in the direction of arrow M by engaging with the shoulder 18 between the small diameter hole 16 and the large diameter hole 17. .

  On the other hand, on the end portion side of the large-diameter hole portion 17, the flanged cylindrical adapter 37 is fitted in the mouth end portion of the large-diameter hole portion 17 and the packing 26 is interposed. It is fastened and fixed on the surface 1 a of the casing 1 by bolts 36. Further, the sensor unit 30 described below is attached to the outer end surface of the adapter 37. The sensor unit 30 includes a cylindrical sensor holder 34 with a bottomed hook that is abutted and fixed to the outer end surface of the adapter 37. The space between the adapter 37 and the sensor holder 34 is divided into two in the axial direction at the abutting portion between the outer end surface of the adapter 37 and the end surface of the sensor holder 34 mounted on the outer end. A plate-shaped transparent material 31 is disposed in a state where a seal packing 33 is interposed between the inner surface of the sensor holder 34, and spaces on both sides thereof are oil-tightly partitioned by the transparent material 31. . The transparent material 31 only needs to be a material having at least oil resistance and transparency. For example, various materials such as a glass plate and an acrylic plate can be adopted.

  Of the section on the adapter 37 side and the section on the sensor holder 34 side partitioned by the transparent material 31, the nut 25 is inserted into the space on the adapter 37 side located near the spring cartridge 19. A laser sensor 32 is disposed in the space on the sensor holder 34 side. The laser sensor 32 corresponds to “first measurement means” and “second measurement means” in the claims, and is attached to the tip of the movable shaft 15 through the transparent material 31. The axial position of the worm 7 is indirectly measured by facing the nut 25 and measuring the position of the nut 25. Specifically, a “measurement point” is set on the top surface 25a of the nut 25, and the distance (interval) from the laser sensor 32 to the measurement point is measured.

  Thus, since the laser sensor 32 is oil-tightly partitioned from the spring cartridge 19 side by the transparent material 31, for example, even if the laser sensor 32 is permanently installed on the motor-operated valve side, Lubricating oil present on the valve side is reliably prevented from leaking to the laser sensor 32 side and contaminating it. As a result, the durability of the laser sensor 32 is improved, and a highly reliable measurement operation by the laser sensor 32 is realized. A cover 34 is attached to the outer end of the adapter 37, and the laser sensor 32 is encapsulated and protected by the cover 34.

  In addition, in this embodiment, in addition to causing the laser sensor 32 to function as “first measurement means” and “second measurement means” in the claims, “reference data” in the claims is also included. A part of “acquiring means”, specifically, a means for detecting a reference compression amount of the disc spring 20 in the spring cartridge 19 is also used. For this reason, in order to detect a reference compression force that can be generated corresponding to this reference compression amount, for example, a strain sensor (not shown) calibrated by some technique is arranged on the adapter 34 side. Here, for example, when adopting a configuration in which strain sensors are simultaneously arranged in a plurality of parts of the motor-operated valve such as a spring cartridge, a stem, and a yoke, if the correlation between each of these strain sensors is grasped, then Can secondarily detect the reference compression force by any one of these secondarily calibrated strain sensors.

  Since the sensor unit 30 has a compact configuration, the sensor unit 30 can be permanently installed on the casing 1 side. When the sensor unit 30 is permanently installed, the sensor unit 30 constantly performs a detecting action as will be described later. Can be made. However, when the sensor unit 30 is not permanently installed, such as sharing the sensor unit 30 with other motor-operated valves, the sensor unit 30 including the sensor holder 34 is replaced with the sensor unit 30 as shown in FIG. A cap 39 may be attached to the adapter 37. That is, only the adapter 37 is permanently installed on the casing 1 side, and the cap 39 or an external torque sensor can be selected and attached to the adapter 37 as necessary.

  Here, the operation of the motor-operated valve and the sensor unit 30 will be described.

  For example, when the electric valve is closed from the fully open state to the fully closed position, the worm 7 is rotated by the motor 10. In response to the rotation of the worm 7, the worm wheel 5 meshed with the worm 7 rotates in the closing direction, and the protrusion 5 a provided on the worm wheel 5 engages with the protrusion 4 a provided on the drive sleeve 4. Then, the drive sleeve 4 and the stem nut 3 rotate integrally with the worm wheel 5. Due to the rotation of the stem nut 3, the valve stem 2 operates in the downward direction, and the closing operation of the valve body is started. When the valve body is closed, the valve stem 2 is in an unloaded state, so that the worm 7 only rotates and thrust in the axial direction does not act. Therefore, the spring cartridge 19 maintains the initial form.

  When the lowering of the valve body proceeds and abuts against a valve seat (not shown), the valve body cannot be lowered any further. Therefore, rotational resistance is generated on the worm wheel 5 side, and the worm 7 A thrust in the axial direction acts. The thrust acting on the worm 7 is applied to the spacer 21 of the spring cartridge 19 through the bearing 11 and the movable shaft 15, and the spring cartridge 19 is urged in the direction of arrow N. In this case, since the spacer 22 on the other end side of the spring cartridge 19 is in contact with the end face of the sensor unit 30 and its movement is restricted, the disc spring 20 built in the spring cartridge 19 A compressive force will act.

  However, since the disc spring 20 of the spring cartridge 19 is mounted with a predetermined tension load, the disc spring 20 is in a period until the thrust acting on the spring cartridge 19 reaches the tension load. Maintains the initial compressed form without any compression displacement, and thus the spring cartridge 19 also maintains the initial form. When the thrust acting on the spring cartridge 19 side from the worm 7 gradually rises and reaches a tension load, the disc spring 20 starts to be compressed from the initial compression mode, and the disc spring 20 is accompanied by the compression displacement. Thus, the worm 7 moves in the direction of arrow N. When the amount of movement of the worm 7 (that is, the amount of compression of the disc spring 20) reaches a predetermined amount, the torque switch 14 is activated and the operation of the motor 10 is stopped. By stopping the operation of the motor 10 by the operation of the torque switch 14, an excessive torque input to the valve stem 2 side is blocked, and the motor-operated valve is protected. Then, the valve body is controlled by the torque acting during this period (that is, after the valve body comes into contact with the valve seat until the motor 10 is operated and the operation of the motor 10 is stopped). It is pressed against the seat side to ensure sealing performance with the valve seat.

  On the other hand, when the valve body is opened from the fully closed state to the fully opened direction, the moving direction of the worm 7 and the compression direction of the disc spring 20 of the spring cartridge 19 are both opposite directions. Since this is the same as the operation from fully open to fully closed, description thereof is omitted here. During the opening operation, the disc spring 20 is restrained by the shoulder 18, so that the disc spring 20 of the spring cartridge 19 receives thrust in the direction of arrow M from the nut 25 side.

  As described above, in the motor-operated valve, additional torque load after the valve body is fully opened and fully closed is to ensure the holding performance in the fully opened state and the sealing performance in the fully closed state. This is important in terms of improving the reliability of the motor-operated valve. Accordingly, the torque acting on the worm wheel 5 is diagnosed and evaluated so that the torque acting on the worm wheel 5 is always properly maintained, and each reference compression amount of the disc spring in the spring cartridge 19 and each reference compression are adjusted as necessary. Obtaining a reference compression force corresponding to the amount and obtaining a correspondence relationship with a reference torque generated corresponding to the reference compression force as reference data (that is, calibration of the torque curve) This is one of the most important diagnostic items. For this reason, in this embodiment, in order to implement | achieve the appropriate maintenance of the said torque, the diagnostic apparatus which uses the said sensor unit 30 as one of the components is provided. Hereinafter, the configuration of the diagnostic apparatus and the diagnostic method using the diagnostic apparatus will be specifically described.

  First, the basic idea of the diagnostic method according to the present invention will be described.

  The torque “T” acting on the worm wheel 5 is a distance “r” between the compression force “f” of the disc spring 20 acting as a movement resistance of the worm 7 and the worm 7 and the axis of the worm wheel 5. "Is expressed as" F = f * r ". The disc spring 20 has a spring characteristic specific to the compression displacement, and there is a certain correlation between the amount of compression and the compression force generated thereby. Therefore, by knowing the compression amount of the disc spring 20, it is possible to indirectly know the magnitude of the torque loaded on the worm wheel 5 side.

  Therefore, in this embodiment, as shown in FIG. 5, the spring characteristics of the disc spring 20, that is, the respective reference compression amounts La1, La2,... Lan and the respective reference compression forces F1, F2 corresponding thereto. ,... Fn and the respective reference torques T1, T2,... Tn calculated based on the respective reference compression forces F1, F2,. In the diagnosis, the compression amount of the disc spring 20 at that time is measured, the measured value is replaced with “reference compression amount”, the reference torque is acquired from the reference data, and the reference torque is diagnosed. The diagnosis of the appropriateness of the reference torque in comparison with the appropriate torque set in advance for each item is the “first basic idea”. In this embodiment, the reference data is shown as a data table. However, as a method for displaying the reference data, various methods can be appropriately selected. For example, the reference data can be displayed in a graph. Of course.

  On the other hand, based on the above “first basic idea”, the compression amount of the disc spring 20 at the present time is measured, the measured value is replaced with the reference compression amount in the reference data, and the corresponding reference torque is acquired, When diagnosing the motor-operated valve using this reference torque, at least the measurement of the compression amount of the disc spring 20 needs to be performed in a state where the spring cartridge 19 is incorporated on the motor-operated valve side. It is difficult to directly measure the amount of compression of the spring 20 due to the arrangement structure of the spring cartridge 19, and as a convenient alternative to this, as described above, the laser is positioned at the axial position of the spring cartridge 19. A sensor 32 is arranged, and the laser sensor 32 measures the axial position of the measurement point set on the spring cartridge 19 side. Not but adopt a method of acquiring a compression amount of the conical spring 20 with the amount of change in value.

  In this case, as shown in FIG. 1, the spring cartridge 19 includes a shoulder 18 of the large-diameter hole 17 on the casing 1 side and an end of the sensor unit 30 assembled to the end of the large-diameter hole 17. In the axial space between the end surface 37a of the adapter 37, it is inserted and arranged in the initial form. Accordingly, when the axial length of the axial space matches the axial length of the spring cartridge 19 in the initial form and there is no dimensional difference therebetween (that is, there is no axial backlash), the spring cartridge Even if the change amount of the measurement point on the 19th side is adopted as the compression amount of the disc spring 20 as it is, no trouble occurs.

  However, as a real problem, the “back” is inevitably generated due to a manufacturing error or an assembly error. Therefore, when the amount of change in the measured value is directly used as the compression amount of the disc spring 20, The compression amount includes the backlash amount. Therefore, when the measured compression amount is directly replaced with the reference compression amount in the reference data and the corresponding reference torque is obtained, it is between the reference torque and the actually generated torque (actual torque). Since there is an error, high-accuracy diagnosis cannot be expected in the diagnosis based on the reference torque as described above.

  FIG. 11 shows experimental data of a change state of the worm position during the closing operation and the opening operation of the electric valve. In this experiment, the total net compression is about 1.7 mm in the closing direction and about 1.9 mm in the opening direction. Since the play is 0.6 mm, if the second initial position (described later) is the origin of the worm position, the ratio of the play and the net total compression amount is “0.6 / 1.9” = about 32% in the opening direction. Become. Therefore, in the case where a diagnosis related to torque is performed using the reference data and the worm displacement, an error of about 32% at maximum may occur in this experiment unless the play is taken into consideration. The error of about 32% due to this play is, for example, a criterion for diagnosis of set torque (that is, diagnosis of torque when the torque switch is activated by the movement of the worm and the motor drive power is turned off). Considering that it is ± 10%, it can be said that the influence is great.

  Therefore, as the operation of the reference data, prior to diagnosis, the above-mentioned backlash amount is obtained in advance by measurement, and at the time of diagnosis, the actual measurement value excluding the backlash amount is obtained as the “actual compression amount”. The compression amount is replaced with the reference compression amount in the reference data to obtain a reference torque corresponding to the reference compression amount, which is referred to as a “second basic idea”.

  As described above, the diagnosis method of the present invention is characterized in that diagnosis is performed based on the “first basic idea” and the “second basic idea”. The aim is to obtain a highly diagnostic evaluation.

  The reference data is more reliable as the number of samplings is larger (that is, the more the recorded values are subdivided), the sampling is performed at an appropriate interval, and the reference data is used in operation. It is considered that the reference data file can be made more compact by interpolating between recorded values by an appropriate method. As an interpolation method, for example, a method of interpolating adjacent binary values with a straight line is the simplest, and this is suitable when the spring constant of the disc spring 20 is considered to be linear. Further, when the spring constant of the disc spring 20 is considered to be non-linear, for example, a method such as a moving average method or a least square method may be employed.

  The method for acquiring the reference data is as follows. That is, as shown in FIG. 5, the items of reference data include three elements: a reference compression amount, a reference compression force corresponding to the reference compression amount, and a reference torque calculated based on the reference compression force. . Of these elements, the reference compression amount and the reference compression force are both obtained by measurement. Specifically, as described above, a method of using the laser sensor 32 with the spring cartridge 19 incorporated in an electric valve, and a method of removing the spring cartridge 19 from the electric valve in a single state There is. Of these two methods, in the latter measurement method, the spring cartridge 19 is directly compressed and compressed by the pressurizing means, and the compression amount (reference compression amount) is measured, and generated according to the reference compression amount. Since the reference compression force to be measured may be measured using means such as a strain sensor, the “backlash” problem does not occur here. However, in the former measurement method, it is necessary to eliminate the influence of “backlash” from the measurement result and adopt the actual compression amount as the “reference compression amount”, as in the case of the measurement of the compression amount at the time of diagnosis described later. It becomes. In obtaining the reference data, it is desirable to obtain the reference data at least twice in consideration of variations in measurement values due to the reproducibility of the compression characteristics of the disc spring in the spring cartridge.

  Next, the diagnostic method and diagnostic apparatus of the present invention will be specifically described.

  First, with reference to the schematic diagrams of FIGS. 6 to 9, the form of compression operation of the spring cartridge 19 and a measurement method of position information that changes with the compression operation will be described. Here, as shown in the drawings, the space for fitting the spring cartridge 19 on the casing 1 side, that is, the axial distance between the shoulder 18 of the casing 1 and the end surface 37a of the adapter 37, It is assumed that there is a backlash “ΔL” between the axial length of the spring cartridge 19 in the initial form.

  When the play amount “ΔL” exists in this way, the compression of the disc spring 20 in the spring cartridge 19 is performed at one end in the axial direction while the spring cartridge 19 maintains the initial form as shown in FIG. A position (hereinafter referred to as “first initial position”) in which the spacer 21 positioned is in contact with and engaged with the shoulder portion 18 and is further moved in the direction of the arrow M (that is, the open side); As shown in FIG. 7, the spacer 22 positioned at the other end in the axial direction of the spring cartridge 19 maintains its initial form, and abuts and engages the end surface 37a of the adapter 37 so that the arrow N ( That is, it is assumed that the movement to the closed side is started from one of the restricted positions (hereinafter referred to as “second initial position”) (actually, compression is performed from these intermediate states. In some cases be initiated, even in this case, always from the fact that the expiration of either of said first initial position or the second initial position, is not particularly consider the need for compression from the intermediate state). At the first initial position, the play amount “ΔL” appears as a gap between the outer surface of the spacer 22 and the end surface 37 of the adapter 37. In the second initial position, the play amount “ΔL” appears as a gap between the outer surface of the spacer 21 and the shoulder portion 18.

FIG. 8 shows that the motor-operated valve is closed and the spring cartridge 19 is moved from the first initial position or the second initial position in the direction of the arrow N, and the spacer 22 contacts the end surface 37a of the adapter 37. A further compressed state is shown after the contact engagement. When the closing operation is started from the state of the first initial position, the state of FIG. 8 is reached from the first initial position through the second initial position. Further, when the closing operation is started from the state of the second initial position, the state of FIG. 8 is reached directly from the second initial position.

FIG. 9 shows that the motor-operated valve is opened and the spring cartridge 19 is moved from the first initial position or the second initial position in the direction of arrow M, and the spacer 21 is in contact with the shoulder 18. After being combined, it is further compressed. When the opening operation is started from the first initial position, the state shown in FIG. 9 is reached directly from the first initial position. When the opening operation is started from the second initial position, the state shown in FIG. 9 is reached from the second initial position through the first initial position.

  Here, the position measurement by the laser sensor 32 will be described. The position measurement by the laser sensor 32 is performed by measuring the distance (interval) from the laser sensor 32 to the measurement target point (that is, the position of the laser sensor 32 becomes the measurement reference position). The laser sensor 32 is disposed on the adapter 37 side, and there is a possibility that the position of the laser sensor 32 may fluctuate due to factors such as the settling of the packing 26, a manufacturing error of the adapter 37, or an assembly error. A position where there is no fluctuation, that is, the end face 1a of the casing 1 is set as a measurement reference position, and all the measured values of the laser sensor 32 (that is, the distance from the laser sensor 32) are replaced with the distance from the measurement reference position. Then, the value after replacement is acquired as “measured value”. As described above, the measurement point on the spring cartridge 19 side is set on the top surface 25a of the nut 25.

  Accordingly, at the first initial position shown in FIG. 6, the distance dimension “Ls1” between the top surface 25a of the nut 25 and the end surface 1a of the casing 1 is a measured value at the first initial position. This is referred to as a first initial value “Ls1”. Further, in the second initial position shown in FIG. 7, the distance dimension “Ls2” between the top surface 25a of the nut 25 and the end surface 1a of the casing 1 is a measured value at the second initial position. Is referred to as a second initial value “Ls2”.

  A relationship of “ΔL” = “Ls1” − “Ls2” is established between the play amount “ΔL”, the first initial value “Ls1”, and the second initial value “Ls2”. That is, when the measured value is replaced with the reference compression amount in the reference data, the play amount “ΔL” that needs to be excluded is the first initial value “Ls1” and the second initial value “Ls2”. By measuring each of these, an accurate value can be obtained by calculation.

  Further, regarding the measurement at the closed operation position shown in FIG. 8 and the measurement at the open operation position shown in FIG. 9, the distance dimension “L1” between the top surface 25a of the nut 25 and the end surface 1a of the casing 1 is shown. And “L2” are acquired as the first measurement value “L1” (measurement value at the closing operation) and the second measurement value “L2” (measurement value at the opening operation), respectively, at the time of actual diagnosis. .

  The “actual compression amount” required for diagnosis includes the first and second measurement values “L1” and “L2”, the first and second initial values “Ls1” and “Ls2”, and the play amount “ΔL”. "Based on". That is, the relationship “ΔL = Ls1−Ls2” is established between the first initial value “Ls1”, the second initial value “Ls2”, and the play amount “ΔL”. Accordingly, the first actual compression amount “Lr1” during the closing operation is “Lr1 = Ls1−L1−ΔL = Ls2” both in the closing operation from the first initial position and in the closing operation from the second initial position. -Obtained as “L1”. Further, the second actual compression amount “Lr2” during the opening operation is “Lr2 = L2−ΔL−Ls2 = L2−” in both the opening operation from the first initial position and the opening operation from the second initial position. Ls1 ".

  The first actual compression amount “Lr1” or the second actual compression amount “Lr2” obtained in this way is an actual compression amount from which the influence of the play amount “ΔL” has been eliminated, and therefore these actual compression amounts Is replaced with the reference compression amount of the reference data, the reference compression force generated under the actual compression amount and the reference torque corresponding to the reference compression force can be easily obtained. This makes it possible to perform diagnosis on the torque of the motor-operated valve with extremely high accuracy.

  Next, a diagnostic method relating to the torque of such a motor-operated valve will be specifically described together with a diagnostic device used for its implementation.

(First embodiment)
FIG. 3 is a functional block diagram of the diagnostic apparatus according to the first embodiment. This diagnostic apparatus includes reference data acquisition means 101, first measurement means 102, storage means 104, second measurement means 105, operation direction detection means 106, actual torque acquisition means 107, diagnosis means 108, appropriate torque 111 for each diagnosis item, and Each means of the display means 112 is provided.

  The reference data acquisition unit 101 acquires reference data (see FIG. 5). The reference data acquisition unit 101 acquires reference compression amounts “La1 to Lan” and reference compression forces “F1 to Fn” by measurement, and uses the reference compression force as the reference compression force. Corresponding reference torques “T1 to Tn” are acquired, and these data are output to the storage means 104 described later. Note that the reference compression amount and the reference compression force are measured in the reference data acquisition unit 101 by a method in which the spring cartridge 19 is incorporated in the motor-operated valve, or by removing the spring cartridge 19 from the motor-operated valve in a single state. In this embodiment, the former method is adopted.

  The first measuring means 102 uses the laser sensor 32 as one of the constituent elements, acquires the first initial value “Ls1” and the second initial value “Ls2” by measurement, and stores them in the storage means 104 described later. Output to.

  The storage unit 104 stores the reference data output from the reference data acquisition unit 101 (that is, the reference compression amount “La1 to Lan”, the reference compression force “F1 to Fn” and the reference torque “T1 to Tn” corresponding thereto). ) And the first initial value “Ls1” and the second initial value “Ls2” output from the first measuring means 102, and stores and holds them, and if necessary, actual torque acquisition means to be described later It outputs to 107.

  In the actual diagnosis (that is, in a state where the spring cartridge 19 is incorporated in the motor-operated valve), the second measuring means 105 performs the measurement point (that is, the nut 25 of the nut 25) at both the closing operation and the opening operation. The distance between the top surface 25a) and the measurement reference position (that is, the end surface 1a of the casing 1) is measured, and the first measurement value “L1” and the second measurement value “L2” are acquired. It outputs to the real torque acquisition means 107 mentioned later.

  The operation direction detection unit 106 detects whether the measurement by the first measurement unit 102 and the second measurement unit 105 is performed when the motor-operated valve is closed or when the motor-operated valve is opened. The detection results are output to the first measuring means 102 and the second measuring means 105, respectively. The operation direction detection means 106 is appropriately configured, for example, such as a structure for outputting a signal related to the switching operation from a switching means for switching the rotation direction of the motor 10 as an operation direction signal or a structure for transmitting a signal by manual operation. You can choose.

  The actual torque acquisition means 107 includes a reference compression amount “La1 to Lan” from the storage means 104, a reference compression force “F1 to Fn”, a reference torque “T1 to Tn”, and a first initial value “Ls1”. ”, A second initial value“ Ls 2 ”, a first measurement value“ L 1 ”and a second measurement value“ L 2 ”from the second measurement unit 105, and a closing or opening operation signal from the operation direction detection unit 106. In response, the absolute value of the difference between the first measured value “L1” and the second initial value [Ls2] during the closing operation, and the second measured value “L2” and the first initial value during the opening operation. The absolute value of the difference from the value [Ls1] is set as the first actual compression amount “Lr1” and the second actual compression amount “Lr2”, respectively, and the respective actual compression amounts “Lr1” and “Lr2” are the above-mentioned reference data. Standards corresponding to the standard compression amount “La1 to Lan” The compression force “F1 to Fn” is acquired, the reference torque “T1 to Tn” corresponding to the reference compression force “F1 to Fn” is acquired as the actual torque, and the actual torque is output to the diagnostic means 108 described later. is there.

  The diagnostic means 108 receives the actual torque from the actual torque acquisition means 107 and the appropriate torque previously set for each of the various diagnostic items, and compares the actual torque with the appropriate torque of the corresponding diagnostic item. This is to evaluate the suitability of the diagnosis.

  The result of this diagnostic evaluation is appropriately displayed on the display means 112. Therefore, the operator can use the motor-operated valve in a proper operating state by adjusting the torque switch 14 or the like based on the result of the diagnostic evaluation, and the reliability and durability can be improved. It will be planned. Further, in the display unit 112, together with the result of the diagnostic evaluation, the torque curve shown in FIG. 10 includes the first initial value “Ls1”, the second initial value “Ls2”, and the first measured value “L1”. The second measurement value “L2” and the backlash amount “ΔL” are displayed in correlation with each other. Therefore, by visually recognizing this torque curve, it is possible to easily and accurately grasp the presence and size of the play, and a more reliable diagnosis is realized.

(Second embodiment)
FIG. 4 is a functional block diagram of the diagnostic apparatus according to the second embodiment. This diagnostic apparatus includes a reference data acquisition unit 101, a first measurement unit 102, a backlash amount acquisition unit 103, a storage unit 104, a second measurement unit 105, an operation direction detection unit 106, an actual torque acquisition unit 107, a diagnosis unit 108, and a diagnosis. Each unit is configured to include appropriate item-specific torque 111 and display unit 112.

  The reference data acquisition unit 101 acquires reference data (see FIG. 5). The reference data acquisition unit 101 acquires reference compression amounts “La1 to Lan” and reference compression forces “F1 to Fn” by measurement, and the reference compression force “ Reference torques “T1 to Tn” corresponding to “F1 to Fn” are acquired, and these data are output to the storage means 104 described later.

  The first measuring means 102 uses the laser sensor 32 as one of the constituent elements, acquires the first initial value “Ls1” and the second initial value “Ls2” by measurement, and acquires these to be described later. The data are output to the means 103 and the storage means 104, respectively.

  The backlash acquisition means 103 receives the first initial value “Ls1” and the second initial value “Ls2” from the first measurement means 102, and plays back the difference between these initial values “Ls1” and “Ls2”. This is acquired as an amount “ΔL” and is output to the storage means 104 described later.

  The storage unit 104 stores the reference data output from the reference data acquisition unit 101 (that is, the reference compression amount “La1 to Lan”, the reference compression force “F1 to Fn” and the reference torque “T1 to Tn” corresponding thereto). ), The first initial value “Ls1” and the second initial value “Ls2” output from the first measuring unit 102, and the backlash amount “ΔL” output from the backlash amount acquiring unit 103. Are stored and output to an actual torque acquisition means 107 described later as required.

  In the actual diagnosis (that is, in a state where the spring cartridge 19 is incorporated in the motor-operated valve), the second measuring means 105 performs the measurement point (that is, the nut 25 of the nut 25) at both the closing operation and the opening operation. The distance between the top surface 25a) and the measurement reference position (that is, the end surface 1a of the casing 1) is measured, and the first measurement value “L1” and the second measurement value “L2” are acquired. It outputs to the real torque acquisition means 107 mentioned later.

  The operation direction detection unit 106 detects whether the measurement by the first measurement unit 102 and the second measurement unit 105 is performed when the motor-operated valve is closed or when the motor-operated valve is opened. The detection result is output to the actual torque acquisition means 107 described later. The operation direction detection means 106 is appropriately configured, for example, such as a structure for outputting a signal related to the switching operation from a switching means for switching the rotation direction of the motor 10 as an operation direction signal or a structure for transmitting a signal by manual operation. You can choose.

The actual torque acquisition means 107 includes a reference compression amount “La1 to Lan” from the storage means 104, a reference compression force “F1 to Fn”, a reference torque “T1 to Tn”, and a first initial value “Ls1”. ”, The second initial value“ Ls2 ”, the play amount“ ΔL ”, the first measurement value“ L1 ”and the second measurement value“ L2 ”from the second measurement unit 105, and the operation direction detection unit 106. Upon receipt of the closing operation or opening operation signal, as shown in FIG. 12 (the closing operation is expressed as positive and the opening operation is expressed as negative), the first measured value “L1” and the second initial value “Ls2” are displayed during the closing operation. The absolute value of the difference from the difference between the second measured value “L2” and the second initial value “Ls2” during opening operation is obtained by subtracting the amount of play from the absolute value of the first actual compression. The amount “Lr1” and the second actual compression amount “Lr2”,
Alternatively, as shown in FIG. 13 (expressed as positive for the closing operation and negative for the opening operation), at the closing operation, the absolute value of the difference between the first initial value “Ls1” and the first measured value “L1” is used. The value obtained by subtracting the amount of play “ΔL” is set to the absolute value of the difference between the second measured value “L2” and the first initial value “Ls1” during the opening operation, and the first actual compression amount “Lr1” and the first 2 The actual compression amount is “Lr2”.
The actual compression amounts “Lr1” and “Lr2” are replaced with the reference compression amounts “La1 to Lan” in the reference data to obtain reference compression forces “F1 to Fn” corresponding to the reference compression amounts “L1 to Lan”. The reference torques “T1 to Tn” corresponding to “F1 to Fn” are acquired as actual torques, and the actual torques are output to the diagnostic means 108 described later.

  The diagnostic means 108 receives the actual torque from the actual torque acquisition means 107 and the appropriate torque previously set for each of the various diagnostic items, and compares the actual torque with the appropriate torque of the corresponding diagnostic item. This is to evaluate the suitability of the diagnosis.

The result of this diagnostic evaluation is appropriately displayed on the display means 112. Therefore, the operator can use the motor-operated valve in a proper operating state by adjusting the torque switch 14 or the like based on the result of the diagnostic evaluation, and the reliability and durability can be improved. It will be planned. Further, in the display unit 112, together with the result of the diagnostic evaluation, the torque curve shown in FIG. 10 includes the first initial value “Ls1”, the second initial value “Ls2”, and the first measured value “L1”. The second measurement value “L2” and the backlash amount “ΔL” are displayed in correlation with each other. Therefore, by visually recognizing this torque curve, the presence and size of the play can be easily and accurately grasped, and a more reliable diagnosis can be realized.
In addition, since it is possible to grasp the dimensional difference between the first initial value and the second initial value, that is, the secular change in the amount of play of the spring cartridge itself, a multifaceted diagnosis result can be obtained.

(Other)
(1) The amount of play based on the difference in axial distance between the spring cartridge 19 and the shoulder 18 of the casing 1 in which the spring cartridge 19 is fitted and the end surface 37a of the adapter 37 is, for example, that of the spring cartridge 19 It also occurs and fluctuates due to variations in the clamping pressure of the packing 26 when the adapter 37 is replaced. The amount of play due to such a cause is also acquired by the actual torque acquisition means 107. Since it is sometimes excluded, a highly reliable diagnosis and evaluation regarding torque can be realized regardless of the presence of the backlash.

  (2) In each of the above examples of this embodiment, the spring characteristics of the disc spring 20 (that is, the reference compression amount and the compression force corresponding thereto) in the reference data are measured. However, the present invention is not limited to such a measurement method, and the following method can also be adopted.

  That is, one of them is a method of measuring the spring characteristics of the disc spring 20 in a state where the spring cartridge 19 is incorporated in the motor-operated valve and the motor-operated valve is not operated. In this case, the sensor unit 30 or the cap 39 is removed, a spring compression mechanism having a pressing function and a position detection function is attached, the disc spring 20 is compressed by the pressing force of the spring compression mechanism, and the compression amount This is done by detecting The advantage of this method is that although the sensor unit 30 needs to be removed, the spring cartridge 19 is not required to be removed, and the measurement workability is better than when the spring cartridge 19 is required to be removed. This is the point.

  The other is a method of measuring the spring characteristics of the disc spring 20 in a single state in which the spring cartridge 19 is removed from the motor-operated valve. The advantage of this method is that the measurement work is easy and can be performed with high accuracy. Thus, when the spring characteristic is measured in a single state in which the spring cartridge 19 is detached from the motor-operated valve, the measurement result does not consider the influence of the dimensional difference. Processing that eliminates the effects of dimensional differences is required.

It is sectional drawing which shows the drive part of the motor operated valve with which the diagnostic apparatus which concerns on this invention was mounted | worn. In the diagnostic apparatus of FIG. 1, it is a fragmentary sectional view which shows the state which replaced the sensor unit with the cap instead of the sensor unit. It is a block diagram which shows the system configuration | structure in the 1st Example of the diagnostic method and diagnostic apparatus of the motor operated valve which concerns on this invention. It is a block diagram which shows the system configuration | structure in the 2nd Example of the diagnostic method and diagnostic apparatus of the motor operated valve which concerns on this invention. It is a figure which shows an example of the reference | standard data of this invention. It is state explanatory drawing in the 1st initial position of a spring cartridge. It is state explanatory drawing in the 2nd initial position of a spring cartridge. It is explanatory drawing of the compression state at the time of closing operation of a spring cartridge. It is explanatory drawing of the compression state at the time of opening operation of a spring cartridge. It is explanatory drawing of the example of a display of the torque curve in this invention. It is a figure which shows the example of experiment data of the play amount detection experiment of a spring cartridge. It is explanatory drawing of the actual compression amount acquisition method in a 2nd Example. It is explanatory drawing of the actual compression amount acquisition method in a 2nd Example. It is explanatory drawing of the acquisition method of the conventional general torque curve.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Casing 2 Valve stem 3 Stem nut 4 Drive sleeve 5 Worm wheel 6 Worm structure 7 Worm 8 Extension cylinder part 9 Motor shaft 10 Motor 11 Bearing 12 Nut 13 Circumferential groove 14 Torque switch 15 Movable shaft 16 Small diameter hole part 17 Large diameter Hole 18 Shoulder 19 Torque spring cartridge 20 Disc spring 21 Spacer 22 Spacer 23 Shim 24 Torque limit sleeve 25 Nut 26 Packing 30 Sensor unit 31 Transparent material 32 Laser sensor 33 Packing 34 Sensor holder 36 Bolt 37 Adapter 39 Cap X Valve body drive Part

Claims (13)

A worm for applying a driving force to a valve body drive unit that opens and closes the valve body is disposed so as to be movable in the axial direction, and a plurality of disc springs are coaxially disposed opposite to each other on a shaft center of the worm and are predetermined. A motorized valve is arranged in which a spring cartridge that is unitized by applying a tension load is provided, and a torque corresponding to the compression amount of the disc spring accompanying the axial displacement of the worm is applied to the valve body drive unit. A diagnostic method for diagnosing various diagnostic items related to the torque of the motor-operated valve,
The reference compression amount corresponding to each reference compression amount of the disc spring in the spring cartridge and the reference compression force corresponding to the reference compression amount is acquired, and a correspondence relationship between the reference torque generated corresponding to the reference compression force is acquired as reference data. A first initial position of the spring cartridge when the spring cartridge is moved to one end side in the axial direction and stopped when the motorized valve is operated to the open side in a state where the spring cartridge is incorporated in the motorized valve; A measurement point and a measurement standard set on the spring cartridge side at each of the second initial positions of the spring cartridge when the motor-operated valve is operated to the closed side and the spring cartridge moves to the other axial end and stops. The axial distance from the position is acquired as a first initial value and a second initial value, respectively, It was stored and held with the data,
When diagnosing the motorized valve, the axial distance between the measurement point and the measurement reference position is measured for each of the closing operation and the opening operation while the spring cartridge is incorporated in the motorized valve. The first measured value and the second measured value at the time of opening operation are acquired, the operating direction of the motor-operated valve is detected, and the absolute value of the difference between the first measured value and the second initial value is calculated at the closing operation time. In the opening operation, the absolute value of the difference between the second measured value and the first initial value is set as the actual compression amount, and the actual compression amount is replaced with the reference compression amount in the reference data to correspond to this. A motor-driven valve diagnosis characterized in that a reference compression force is acquired, a reference torque corresponding to the reference compression force is acquired as an actual torque, and a diagnosis is made by comparing the actual torque with an appropriate torque in various diagnostic items. Method. A worm for applying a driving force to a valve body drive unit that opens and closes the valve body is disposed so as to be movable in the axial direction, and a plurality of disc springs are coaxially disposed opposite to each other on a shaft center of the worm and are predetermined. A motorized valve is arranged in which a spring cartridge that is unitized by applying a tension load is provided, and a torque corresponding to the compression amount of the disc spring accompanying the axial displacement of the worm is applied to the valve body drive unit. A diagnostic method for diagnosing various diagnostic items related to the torque of the motor-operated valve,
The reference compression amount corresponding to each reference compression amount of the disc spring in the spring cartridge and the reference compression force corresponding to the reference compression amount is acquired, and a correspondence relationship between the reference torque generated corresponding to the reference compression force is acquired as reference data. A first initial position of the spring cartridge when the spring cartridge is moved to one end side in the axial direction and stopped when the motorized valve is operated to the open side in a state where the spring cartridge is incorporated in the motorized valve; A measurement point and a measurement standard set on the spring cartridge side at each of the second initial positions of the spring cartridge when the motor-operated valve is operated to the closed side and the spring cartridge moves to the other axial end and stops. When the above-mentioned axial distance dimension with respect to the position is acquired as the first initial value and the second initial value, respectively. Obtains the absolute value of the difference between the first initial value and the second initial value as the play amount, the reference data and the first initial value and the second initial value and the amount of play stored and held,
When diagnosing the motorized valve, the axial distance between the measurement point and the measurement reference position is measured for each of the closing operation and the opening operation while the spring cartridge is incorporated in the motorized valve. The first measured value and the second measured value at the time of opening operation, and detecting the operating direction of the motor-operated valve,
A value obtained by subtracting the amount of play from the absolute value of the difference between the first measured value and the second initial value during the closing operation, and from the absolute value of the difference between the second measured value and the second initial value during the opening operation. The
Alternatively, the value obtained by subtracting the amount of play from the absolute value of the difference between the first initial value and the first measurement value during the closing operation, and the difference between the second measurement value and the first initial value during the opening operation. Absolute value,
Each of the actual compression amounts is replaced with the reference compression amount in the reference data to obtain a reference compression force corresponding thereto, and a reference torque corresponding to the reference compression force is obtained as an actual torque, A diagnosis method for a motor-operated valve, characterized in that diagnosis is performed by comparing the actual torque with appropriate torques for various diagnostic items. In claim 1 or 2,
A method for diagnosing a motor-operated valve, wherein the reference data acquisition operation is performed with the spring cartridge removed from the motor-operated valve. In claim 1 or 2,
A method for diagnosing a motor-operated valve, wherein the reference data acquisition operation is performed in a state where the spring cartridge is incorporated in the motor-operated valve. In claim 4,
A method for diagnosing a motor-operated valve, wherein the operation for acquiring the reference data is performed in a state where the operation of the motor-operated valve is stopped. In claim 4,
A method for diagnosing a motor-operated valve, wherein the reference data is acquired in a state where the motor-operated valve is operated. In claim 1, 2, 3, 4, 5 or 6,
A method for diagnosing a motor-operated valve, wherein the measurement reference position is set on a casing of the motor-operated valve. A worm for applying a driving force to a valve body drive unit that opens and closes the valve body is disposed so as to be movable in the axial direction, and a plurality of disc springs are coaxially disposed opposite to each other on a shaft center of the worm and are predetermined. A motorized valve is arranged in which a spring cartridge that is unitized by applying a tension load is provided, and a torque corresponding to the compression amount of the disc spring accompanying the axial displacement of the worm is applied to the valve body drive unit. A diagnostic device for diagnosing various diagnostic items related to the torque of the motor-operated valve,
A reference for acquiring, as reference data, a correspondence relationship between each reference compression amount of the disc spring in the spring cartridge and a reference compression force corresponding to the reference compression amount and a reference torque generated corresponding to the reference compression force. Data acquisition means;
A first initial position of the spring cartridge at the time when the spring cartridge is moved to one end side in the axial direction and stopped while the spring cartridge is incorporated in the motor operated valve, A measurement point and a measurement reference position set on the spring cartridge side at each of the second initial positions of the spring cartridge when the valve is operated to the closed side and the spring cartridge moves to the other end side in the axial direction and stops. First measuring means for acquiring the axial interval dimension as a first initial value and a second initial value, respectively,
Storage means for storing and holding the reference data, the first initial value, and the second initial value;
With the spring cartridge incorporated in the motor-operated valve, the axial distance between the measurement point and the measurement reference position is measured for each of the closing operation and the opening operation, and the first measured value and the opening value during the closing operation are measured. Second measuring means for acquiring a second measured value during operation;
An operation direction detecting means for detecting an operation direction of the motor-operated valve;
The absolute value of the difference between the first measured value and the second initial value during the closing operation is the actual compression amount, and the absolute value of the difference between the second measured value and the first initial value is the actual compression amount during the opening operation. Replacing the actual compression amount with the reference compression amount in the reference data to obtain a reference compression force corresponding thereto, and obtaining a reference torque corresponding to the reference compression force as an actual torque;
A diagnostic device for a motor-operated valve, comprising diagnostic means for making a diagnosis by comparing the actual torque acquired by the actual torque acquisition means with appropriate torques in various diagnostic items. A worm for applying a driving force to a valve body drive unit that opens and closes the valve body is disposed so as to be movable in the axial direction, and a plurality of disc springs are coaxially disposed opposite to each other on a shaft center of the worm and are predetermined. A motorized valve is arranged in which a spring cartridge that is unitized by applying a tension load is provided, and a torque corresponding to the compression amount of the disc spring accompanying the axial displacement of the worm is applied to the valve body drive unit. A diagnostic device for diagnosing various diagnostic items related to the torque of the motor-operated valve,
A reference for acquiring, as reference data, a correspondence relationship between each reference compression amount of the disc spring in the spring cartridge and a reference compression force corresponding to the reference compression amount and a reference torque generated corresponding to the reference compression force. Data acquisition means;
A first initial position of the spring cartridge at the time when the spring cartridge is moved to one end side in the axial direction and stopped while the spring cartridge is incorporated in the motor operated valve, A measurement point and a measurement reference position set on the spring cartridge side at each of the second initial positions of the spring cartridge when the valve is operated to the closed side and the spring cartridge moves to the other end side in the axial direction and stops. First measuring means for acquiring the axial interval dimension as a first initial value and a second initial value, respectively,
A backlash amount acquisition means for acquiring, as a backlash amount, an absolute value of a difference between the first initial value and the second initial value;
Storage means for storing and holding the reference data, the first initial value and the second initial value, and the play amount;
With the spring cartridge incorporated in the motor-operated valve, the axial distance between the measurement point and the measurement reference position is measured for each of the closing operation and the opening operation, and the first measured value and the opening value during the closing operation are measured. Second measuring means for acquiring a second measured value during operation;
An operation direction detecting means for detecting an operation direction of the motor-operated valve;
A value obtained by subtracting the amount of play from the absolute value of the difference between the first measured value and the second initial value during the closing operation, and from the absolute value of the difference between the second measured value and the second initial value during the opening operation. The
Alternatively, the value obtained by subtracting the amount of play from the absolute value of the difference between the first initial value and the first measurement value during the closing operation, and the difference between the second measurement value and the first initial value during the opening operation. Absolute value,
An actual compression amount is obtained, and the actual compression amount is replaced with the reference compression amount in the reference data to obtain a reference compression force corresponding thereto, and a reference torque corresponding to the reference compression force is obtained as an actual torque. Torque acquisition means;
A diagnostic device for a motor-operated valve, comprising diagnostic means for making a diagnosis by comparing the actual torque acquired by the actual torque acquisition means with appropriate torques in various diagnostic items. In claim 8 or 9,
A motor-driven valve diagnostic apparatus, comprising: a display means for displaying a diagnosis result in the diagnosis means, wherein the display means is configured to display a torque curve. In claim 8 or 9,
The motor-driven valve diagnosis apparatus, wherein the first measuring means and the second measuring means are constituted by the same measuring means. In claim 11,
The first and second measuring means are configured by a laser sensor that receives reflected light at a measurement point on the spring cartridge side of the irradiated laser light and detects a distance to the measurement point. A motorized valve diagnostic device. In claim 12,
A motor-driven valve diagnostic device characterized in that the laser sensor and the spring cartridge are oil-tightly partitioned with a transparent material, and the laser sensor is configured to face the measurement point through the transparent material. .

Images