JP4544397B2 - Display element manufacturing equipment - Google Patents

Description

  The present invention relates to an apparatus for manufacturing a display element containing an organic compound for display.

  In recent years, in the field of display devices such as displays, an organic EL layer containing an organic light-emitting material is sandwiched between a pair of electrodes, and an organic EL is formed by injecting electrons and holes into the organic EL layer. An organic EL element that emits light by recombination within a layer has attracted attention. Here, the organic EL layer is a light emitting material for emitting RGB three colors, a charge transport material for transporting electrons and holes to the light emitting material, a partition (bank) for electrically insulating the three color light emitting materials from each other, and the like. It is composed of multiple types of organic materials.

  Here, in an organic EL element used for a full-color display, a luminescent material corresponding to three types of RGB dyes is dissolved for a luminescent material among a plurality of types of organic materials constituting the organic EL layer. Since the three types of solutions need to be appropriately applied at predetermined positions where the three primary colors emit light, the light emitting layer is formed by partial coating such as an inkjet method (for example, see Patent Document 1) or a printing method. A method suitable for separability is generally used. On the other hand, when forming the barrier ribs, it is necessary to apply the insulating material on the anode so that the thickness is as uniform as possible. It is desirable to form by a method suitable for this.

By the way, the applicant of the present application applied the insulating material on the anode smoothly, and then applied an ink having a solvent and a light emitting material for dissolving the insulating layer on the insulating layer, and the portion where the ink was applied A method for manufacturing an organic EL display is proposed in which the insulating layer is dissolved in a solvent to form a partition (see, for example, Patent Document 2). According to this manufacturing method, since the partition can be formed by simply applying ink on the smooth insulating layer, an independent process such as exposure or etching for forming the partition becomes unnecessary.
Japanese Patent Laid-Open No. 10-12377 (page 3, FIG. 1-2) Japanese Patent Laying-Open No. 2003-86366 (page 3-9, FIG. 4-5)

  However, when a plurality of types of organic materials constituting the organic EL layer are applied onto the electrodes by different methods, a certain amount of time elapses between preparation steps for preparation of the next step. It often happens. Then, in the meantime, the surface of the organic material previously applied is oxidized, and an oxide or the like is formed at the interface with the organic material applied thereon. It may occur and the device life may be reduced.

In particular, when the partition walls are formed by the method of Patent Document 2 proposed by the applicant of the present application, when an ink is applied by an inkjet method or the like after an insulating layer is formed by a vacuum deposition method or a spin coating method. When a predetermined time or more elapses after the insulating layer is formed until the ink is applied, the surface of the insulating layer is dried. The degree of drying of the insulating layer varies depending on the elapsed time. Since it is actually difficult to control the degree of drying, there is a possibility that the shape of the partition wall varies when it is formed by dissolving the insulating layer with the solvent in the ink.
It is an object of the present invention to apply two types of solutions for forming a display organic compound layer having different functions or properties on an electrode successively by a method suitable for each solution, In other words, it is possible to prevent the generation of device defects in the layer as much as possible.

  The display device manufacturing apparatus according to claim 1, wherein the display device has a pair of electrodes and a display organic compound layer sandwiched between the pair of electrodes. An apparatus main body equipped with an ink jet head spaced apart is provided, and one electrode arranged below the apparatus main body and the apparatus main body are configured to be relatively movable in the separation direction of the spray head and the ink jet head, and the spray head By applying a first solution containing one or more organic compounds dissolved in a solvent on one electrode, and immediately after applying the first solution through the relative movement, the inkjet head Thus, the second solution containing one or more kinds of organic compounds dissolved in a solvent is applied.

  In this display element manufacturing apparatus, an organic compound layer for display is formed between a pair of electrodes as follows. That is, a first solution containing one or more organic compounds dissolved in a solvent is applied onto one electrode by a spray head. In this spray head (spray method), since the solution is sprayed over a wide range from the spray head toward the electrode, the film forming property is excellent. The spray head (spray method) uniformly distributes the solution over the entire surface of the electrode. This is a very useful method when applying smoothly in thickness. Therefore, an organic compound layer having a uniform thickness can be easily formed by applying the first solution to the electrodes using this spray head.

  Further, a second solution containing one or more organic compounds dissolved in a solvent is applied immediately after the first solution is applied by relative movement through an inkjet head (inkjet method). This ink-jet head (ink-jet method) is a method with excellent so-called coatability when a solution is applied to a predetermined place. For example, three kinds of light-emitting materials that emit three primary colors of RGB are dissolved in a solvent. This is a very useful method when, for example, the three kinds of solutions are applied separately. In this way, two solutions having different uses and properties can be applied onto the electrode by an optimum method.

  By the way, if a predetermined time or more elapses between the application of the first solution and the second solution, and the other solution is applied on the first solution in a dry state, the first solution is applied. There is a possibility that the solution and the second solution are not sufficiently mixed and the organic compound in each solution is segregated. Therefore, the first solution and the second solution are continuously applied, and before the previously applied solution is completely dried, the next solution is applied thereon. In addition, it is applicable to either the case where the first solution is applied first or the case where the second solution is applied first.

  Further, immediately after the first solution is applied by the spray head, the second solution is applied by an ink jet head from above. Therefore, immediately after the first solution is uniformly applied to the electrode surface by the spray head, the second solution is applied by the ink jet head, so that the first solution and the second solution are mixed together. It is possible to prevent either of them from segregating.

  The display element manufacturing apparatus according to claim 2 is characterized in that, in the invention according to claim 1, the second solution is applied before the first solution applied by the spray head is completely dried. To do. Therefore, since the second solution is applied by the inkjet head onto the first solution that has been applied on the electrode by the spray head and has not yet been completely dried, the first solution and the second solution are separated from each other. It is possible to prevent any one from segregating when mixed.

  According to the first aspect of the present invention, the first solution containing one or more kinds of organic compounds dissolved in the solvent is applied on one electrode by the spray head, and the first solution is obtained through relative movement. Immediately after applying the solution, the second solution containing one or more organic compounds dissolved in a solvent is applied by an ink jet head, so that two solutions having different functions or properties are suitable for each solution. Can be applied on the electrode.

  Furthermore, since the first solution and the second solution are continuously applied, the next solution can be applied before the previously applied solution is completely dried, and the organic compound layer is oxidized. It is possible to prevent the formation of element defects such as objects. Furthermore, since the organic compound in each solution can be mixed on the electrode, the organic compound in each solution can be prevented from segregating.

  Further, immediately after the first solution is applied by the spray head, the second solution is applied by the inkjet head from above, so that the first solution and the second solution can be mixed and segregation is prevented. You can also.

  According to the invention of claim 2, since the second solution is applied before the first solution applied by the spray head is completely dried, it is applied onto the electrode by the spray head and is still completely dried. Since the second solution is applied onto the first solution that is not formed by the inkjet head, the first solution and the second solution can be mixed together, and segregation can be prevented.

  Two kinds of solutions for forming organic compound layers for display having different functions or properties are applied on the electrodes successively by a method suitable for each solution, and device defects are generated in the organic compound layer. In order to achieve the object of the present invention, such as to prevent as much as possible, manufacture for manufacturing a display element having a pair of electrodes and an organic compound layer for display sandwiched between the pair of electrodes The apparatus includes an apparatus main body in which the spray head and the inkjet head are separated from each other, and one electrode arranged under the apparatus main body and the apparatus main body can be relatively moved in the separation direction of the spray head and the inkjet head. The first solution containing one or more organic compounds dissolved in a solvent is applied onto one electrode by the spray head, and the first solution is applied via the relative movement. Immediately after the fabric, by the inkjet head it was achieved by configured to apply the second solution comprising one or more organic compound dissolved in a solvent.

Examples of the present invention will be described. The present embodiment is an example in which the present invention is applied to the manufacture of an organic EL element used for an organic EL display.
First, the overall configuration of the organic EL display 1 will be described with reference to FIG. The organic EL display 1 includes a glass substrate 2, a plurality of organic EL elements 3 (display elements) arranged in a grid pattern on the glass substrate 2, a current driving TFT 4, a horizontal driving circuit 5, a vertical driving circuit 6, and A sealing layer 7 is provided. Each organic EL element 3 includes an organic EL layer 10 for display, and an anode (ITO (indium-tin oxide) 11) and a cathode 12 that sandwich the organic EL layer 10 from above and below.

  In each organic EL element 3, when a DC voltage is applied between ITO 11 serving as the anode and the cathode 12, the light emitting material in the organic EL layer 10 is excited and emits light, passes through the glass substrate 2, and passes downward in FIG. Irradiate light. On the other hand, when the voltage between the anode (ITO11) and the cathode 12 is OFF, the light is extinguished.

One current driving TFT 4 is provided for each organic EL element 3, and acts as a switch for controlling current supply to the corresponding organic EL element 3. The horizontal drive circuit 5 and the vertical drive circuit 6 perform independent light emission and extinction control of each organic EL element 3 by turning on or off the current drive TFT 4 corresponding to each organic EL element 3. Since these current drive TFT 4, horizontal drive circuit 5 and vertical drive circuit 6 are known techniques, their description is omitted.
The sealing layer 7 covers the organic EL element 3, the current drive TFT 4, the horizontal drive circuit 5, the vertical drive circuit 6 and the like from above and protects them.

Next, a method for manufacturing the organic EL element 3 using the display element manufacturing apparatus of the present invention will be described.
First, as shown in FIG. 2A, ITO 11 is deposited on the glass substrate 2 to a thickness of 150 nm to form an anode.
Then, as shown in FIG. 2-2, an exposure resist is applied to the surface of the ITO 11 by a method such as spin coating, and then a desired electrode pattern is mask-exposed. Thereafter, the resist and ITO 11 in portions not exposed are removed by etching using aqua regia, which is a mixed solution of concentrated nitric acid and concentrated sulfuric acid, to form a desired electrode pattern. Further, the surface of the ITO 11 on which the electrode pattern is formed is sequentially cleaned by neutral detergent cleaning, acetone cleaning, IPA (isopropyl alcohol) cleaning, and UV ozone cleaning.

  Next, the process of forming the organic EL layer 10 provided with the insulating layer 10a for forming a partition wall and the light emitting layer 10b containing a light emitting material will be described. In this step, the first solution 15 in which the organic compound constituting the insulating layer 10a is dissolved in a solvent is applied on the ITO 11 by the spray method, and immediately thereafter, the organic compound constituting the light emitting layer 10b is dissolved in the solvent. The 2nd solution 16 is apply | coated on the insulating layer 10a by the inkjet method.

  First, the first solution 15 for forming an insulating layer is prepared by dissolving PMMA (polymethyl methacrylate) and polycarbonate in a hydrocarbon solvent. On the other hand, the second solution 16 for forming the light emitting layer includes a hole transporting polymer PVK (poly (N-vinylcarbazole)), an electron transporting material BND (2,5-bis (1-naphthyl) -1, 3,4-oxadiazole) and TPD (N, N′-bis (3-methylphenyl) -N, N′-diphenylbenzidine) as a light emitting material are dissolved in a hydrocarbon solvent (tetralin). .

Next, the first solution 15 is applied on the ITO 11 by the spray method, and then the second solution 16 is applied by the ink jet method. The solution application device 20 (display element manufacturing device) used at that time is used. As shown in FIG.
The solution coating apparatus 20 includes an apparatus main body 21, and a spray head 22 and an ink jet head 23 that are provided on the apparatus main body 21 so as to be separated from each other in the front-rear direction. The first solution 15 is ejected from the spray head 22 by moving it forward and backward (separate direction), and at the same time, the second solution 16 is dripped from the inkjet head 23.

  When the first solution 15 is ejected from the spray head 22, an inert gas such as nitrogen or argon is supplied to the spray head 22, and the first solution 15 is sprayed onto the ITO 11 together with the inert gas in the form of a mist. Then, as shown in FIG. 2-3, the insulating layer 10a is formed on the ITO 11. Since the particle diameter of the droplets ejected from the spray head 22 is very small (for example, several μm to several tens μm), it is easy to form the insulating layer 10a with a uniform thickness. The distance from the spray head 22 to the ITO 11 is about 1.0 to 5.0 cm.

  The second solution 16 is dropped from the inkjet head 23 immediately after the spraying of the first solution 15 by the spray head 22. As shown in FIG. 4, the ink jet head 23 is a piezoelectric element type ink jet head provided with a piezoelectric element 23a. From the orifice 23b formed in the ink jet head 23 in response to a signal from the driver 23c, the second solution 16 droplets are ejected. In the application by the ink jet method, in order to improve the ink landing position accuracy, the distance from the ink jet head 23 to the ITO 11 is shorter than the spray method and is about 0.1 to 1.0 mm. Further, as described above, the distance from the head to the ITO 11 is different between the spray method and the ink jet method, and even if the second solution is immediately applied by the ink jet method while applying the first solution by the spray method, each of them is applied during the application. The solution of almost no interference. That is, the first solution 15 and the second solution 16 can be applied almost simultaneously.

Then, as shown in FIGS. 2-4 and 2-5, a part of the insulating layer 10a is dissolved by the solvent in the second solution 16, and the second solution 16 comes into contact with the ITO 11 and becomes the light emitting layer 10b. At the same time, the portion of the insulating layer 10 a that has not been dissolved becomes the partition wall 10 c that insulates the organic EL layer 10 . Here, since the second solution 16 is dropped immediately after the application of the first solution 15, when the second solution 16 is applied on the insulating layer 10a, the insulating layer 10a is not yet completely dried. . Therefore, the insulating layer 10a can be easily dissolved in the solvent of the second solution 16 to form the partition 10c having a desired shape, and the light emitting layer 10b can be reliably insulated by the partition 10c.

  Finally, as shown in FIG. 2-6, a cathode 12 made of LiF (lithium fluoride) as an electron injection layer and an Al layer is formed on the organic EL layer 10 by vacuum deposition. Here, the thicknesses of the LiF layer and the Al layer are 10 mm and 1000 mm, respectively, and are laminated continuously.

According to the organic EL element manufacturing method using the display element manufacturing apparatus of the present invention described above, the following effects can be obtained.
Since the first solution 15 containing the light emitting material is applied by the spray method and the second solution 16 containing the organic compound for forming the partition wall 10c is applied by the ink jet method, the two types of solutions are made into the properties of the respective solutions. It can be applied on the anode (ITO11) by any suitable method.

  Further, immediately after the first solution 15 is applied by the spraying method and before the insulating layer 10a is completely dried, the second solution 16 is applied from the top by the ink jet method. Thus, the insulating layer 10a is easily dissolved, and the partition 10c having a desired shape can be easily formed, and the light emitting layer 10b can be reliably insulated by the partition 10c. Moreover, element defects such as oxides can be prevented from being formed in the organic EL layer 10.

Next, modified examples in which various modifications are made to the above embodiment will be described.
1] The organic compound contained in the light emitting layer 10b is not limited to that of the above-described embodiment. First, as the light emitting material, for example, perylene, kunmarin, rubrene, Nile red, DCM (4-dicyanomethylene-2-methyl-6-dimethylaminostyryl-4-pyran), DCJTB (4-dicyanomethylene-6-C) Jurolidinostyryl-2-tert-butyl-4H-pyran), squarylium, aluminum complexes, etc.

  Examples of the hole transport material include oxadiazole, oxazole, triphenylmethane, hydrazoline, arylamine, hydrazone, stilbene, and the like. Specifically, TPD, α-NPD (N , N′-di (1-naphthyl) -N, N′diphenylbenzidine), TAPC (1,1-bis (di4tolylaminophenyl) -cyclohexane), PPD (N, N′-di (9-phenanthryl) -N, N'-diphenylbenzidine), TRP, NPB (α-NPD dimer), etc.

  Further, examples of the electron transport material include electron transport materials such as an oxadiazole derivative, a triazole derivative, and an aluminum complex. Specifically, tBu-PBD (2- (4-biphenyl) -5- (para- Tert-butylphenyl) -1,3,4-oxadiazole), TAZ (3- (4′-tert-butylphenyl) -4-phenyl-5- (4 ″ -biphenyl) -1,2,4 -Triazole), AlQ3 (tris (8-quinolinolato) aluminum (III)), BND (2,5-bis (1-naphthyl) -1,3,4-oxadiazole), Bphen (vasophenanthroline), P- EtTAZ (3- (4′-tert-butylphenyl) -4- (paraethylphenyl) -5- (4 ″ -biphenyl) -1,2,4 triazole) etc. There is.

  2] The material constituting the insulating layer 10a for forming the partition wall 10c is not limited to that of the above embodiment. For example, there are PVK, polystyrene, nylon, polyacetal, polyethylene terephthalate, polybutylene terephthalate, polyphenylene oxide, polyarylate, polysulfone, polyphenylene sulfide, polyamideimide, polyimide, fluorine resin, and the like.

  3] A hole injection layer for injecting holes into the light emitting material in the light emitting layer 10b is formed on the ITO 11, and then the first solution 15 and the second solution 16 are continuously applied as described above. It may be. In this case, as shown in FIG. 2-2, after the ITO 11 is patterned into a predetermined electrode pattern, it is applied and dried on the ITO 11 by various methods such as a spin coating method, an ink jet method, or a spray method. Thereafter, as described above, the organic EL layer 10 is formed by a spray method and an inkjet method.

  Since the hole injection layer is a water-soluble layer, as shown in FIG. 2-3, when the second solution 16 is dropped by the ink jet method after forming the insulating layer 10a, the oil-soluble insulating layer 10a. Dissolves in the solvent of the second solution 16, but does not dissolve the water-soluble hole injection layer. Examples of the material for forming the hole injection layer include, but are not limited to, polyethylene dioxythiophene polystyrene sulfonate (PEDOT / PSS), copper phthalocyanine, and triphenylamine derivatives.

4] After the partition wall 10c is formed on the ITO 11, the first solution 15 containing the organic compound for forming the hole injection layer is applied on the ITO 11 by the spray method to form the hole injection layer. The second solution 16 containing a light emitting material for forming the layer 10b may be applied by an inkjet method. In this case, it is possible to prevent element defects such as oxides from being formed between the hole injection layer and the light emitting layer 10b. Further, when the oily second solution 16 is applied on the water-soluble hole injection layer in a dry state, the second solution 16 repels on the hole injection layer, and the organic EL layer 10 is formed in a predetermined manner. However, the second solution 16 is applied before the hole injection layer is completely dried by applying the second solution 16 immediately after the first solution 15 is applied. Therefore, the second solution applied on the hole injection layer does not repel.

  5] As a material for forming the electron injection layer of the cathode 12, other materials such as lithium oxide and cesium fluoride may be used in addition to the LiF of the above embodiment.

Next, another embodiment of the present invention will be described.
The above embodiment is an example of the case where the light emitting material and the charge transport material (hole transport material and electron transport material) can be dissolved in a common solvent. If the solvent cannot be dissolved in the solvent, it is difficult to apply simultaneously on the anode ITO 11 in one step as in the above-described embodiment (application of the second solution 16 by the ink jet method of FIG. 2-4). is there. Therefore, the light emitting material and the charge transport material are dissolved in different solvents to prepare two types of solutions, and the respective solutions are applied onto the anode ITO 11.

  However, if the light-emitting material and the charge transport material are dissolved in different solutions and applied separately in separate steps, the first solution applied must be completely dried before the other solution is applied. As a result, an element defect such as an oxide is formed in the organic EL layer 10. Furthermore, the organic compounds in the two solutions are applied in a state where they are not mixed together. For example, if the luminescent material is segregated, the charge transport material cannot sufficiently transport charges to the luminescent material. Each organic material may not be able to perform its original function.

  Therefore, in this other embodiment, immediately after the first solution 30 having excellent film formability prepared by dissolving the host material containing the charge transport material in the solvent is applied to the ITO 11 by the spray method, the applied first solution is applied. A second solution that requires good paintability, prepared by dissolving a guest material containing a light-emitting material having excellent light-emitting properties in a solvent different from the solvent of the first solution 30 before 30 is completely dried. 31 is applied by an inkjet method.

An apparatus for manufacturing the organic EL element 3A in another embodiment will be described with reference to FIG.
First, as shown in FIGS. 5A and 5B, an exposure resist is applied to the surface of the ITO 11 on the glass substrate 2 by a method such as a spin coat method, as in the above embodiment. A desired electrode pattern is formed. Further, the surface of the ITO 11 on which the electrode pattern is formed is similarly cleaned.

  Next, as shown in FIG. 5-3, a solution prepared by dissolving PMMA and polycarbonate in a hydrocarbon-based solvent is made into an ITO 11 by an existing method such as a spin coating method, the above-described spray method, or an inkjet method. After coating on the insulating layer, the insulating layer at the position corresponding to the patterned anode is removed by light exposure to form the partition 10c. The upper surface of the partition wall 10c is subjected to a coating process for repelling the first and second solutions 30 and 31 to be applied next, while the side walls of the partition wall 10c are provided with the first and second solutions 30, A coating treatment for improving the wettability of 31 with respect to the solvent is performed.

  In this state, as shown in FIG. 5-4, the organic compound (host material) containing the charge transport material was dissolved in the solvent using the solution coating apparatus (display element manufacturing apparatus) of the above example. Immediately after the solution 30 is applied to the ITO 11 by the spray method, as shown in FIG. 5-5, the second solution 31 in which the organic compound (guest material) containing the light emitting material is dissolved in another solvent is applied by the ink jet method. As shown in FIGS. 5-6, the light emitting layer 10b is formed. In addition, as an organic compound used as a host material, there are PVK, ALQ3, TPD, α-NPD and the like, and as an organic compound used as a guest material, there are perylene, kummarin, rubrene, Nile red, etc. The material is not limited.

In this way, after the first solution 30 containing the charge transport material is smoothly applied to the ITO 11 with a uniform thickness by the spray method, before the applied first solution 30 is completely dried, the light emitting material is used. Since the second solution 31 containing the solution is applied onto the first solution 30 by the ink jet method, the charge transport material and the light emitting material can be mixed on the anode ITO 11, so that the light emitting material is the charge transport material. It is possible to prevent segregation in the light source and to ensure that the charge is transported to the light emitting material by the charge transport material.
And finally, as shown in FIGS. 5-7, the cathode 12 which consists of a layer of LiF and Al is formed on the organic EL layer 10 by vacuum deposition, and manufacture of the organic EL element 3A is completed.

  In this alternative embodiment, since the first solution 30 and the second solution 31 need to be mixed on the ITO 11, the second solution 31 is applied to the inkjet head after the first solution 30 is applied from the spray head 22. It is desirable to make the interval from 23 to application very short (apply almost simultaneously). Here, since the distance from the spray head 22 to the ITO 11 and the distance from the inkjet head 23 to the ITO 11 are considerably different as described in the above embodiment, the first solution 30 and the second solution 31 are applied almost simultaneously. Even so, each solution hardly scatters due to interference.

  The present invention is not limited to the embodiments described above, and those skilled in the art can implement the invention by adding various modifications to the embodiments without departing from the spirit of the present invention. The present invention includes those modifications.

1 is an overall configuration diagram of an organic EL display according to an embodiment of the present invention. It is sectional drawing of the organic EL element at the time of ITO vapor deposition in a manufacturing process. It is sectional drawing of the organic EL element in the ITO patterning of a manufacturing process. It is sectional drawing of the organic EL element in the insulating layer formation by the spray method of a manufacturing process. It is sectional drawing of the organic EL element in the 2nd solution application | coating by the inkjet method of a manufacturing process. It is sectional drawing of the organic EL element in the partition formation of a manufacturing process. It is sectional drawing of the organic EL element in the cathode vapor deposition of a manufacturing process. It is a schematic block diagram of a solution coating device. It is a schematic block diagram of an inkjet head. It is sectional drawing of the organic EL element in ITO vapor deposition of the manufacturing process of another Example. It is sectional drawing of the organic EL element in the ITO patterning of the manufacturing process of another Example. It is sectional drawing of the organic EL element in the partition formation of the manufacturing process of another Example. It is sectional drawing of the organic EL element in the 1st solution application | coating by the spray method of the manufacturing process of another Example. It is sectional drawing of the organic EL element in the 2nd solution application | coating by the inkjet method of the manufacturing process of another Example. It is sectional drawing of the organic EL element in the organic EL layer formation of the manufacturing process of another Example. It is sectional drawing of the organic EL element in the cathode vapor deposition of the manufacturing process of another Example.

3,3A Organic EL element 11 ITO
10b Light emitting layer 10c Partition 12 Cathode 15 First solution 16 Second solution 30 First solution 31 Second solution

Claims (2)

In a manufacturing apparatus for manufacturing a display element having a pair of electrodes and an organic compound layer for display sandwiched between the pair of electrodes,
A device body equipped with a spray head and an ink jet head separated from each other,
One electrode arranged below the device main body and the device main body are configured to be relatively movable in the separation direction of the spray head and the inkjet head,
Immediately after applying the first solution containing one or more organic compounds dissolved in a solvent on one electrode by the spray head, and applying the first solution via the relative movement, An apparatus for manufacturing a display element, wherein the inkjet head is configured to apply a second solution containing one or more organic compounds dissolved in a solvent.   The display element manufacturing apparatus according to claim 1, wherein the second solution is applied before the first solution applied by the spray head is completely dried.