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JP4548730B2 - Manufacturing method of solid electrolytic capacitor - Google Patents
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JP4548730B2 - Manufacturing method of solid electrolytic capacitor - Google Patents

Manufacturing method of solid electrolytic capacitor Download PDF

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JP4548730B2
JP4548730B2 JP2005280287A JP2005280287A JP4548730B2 JP 4548730 B2 JP4548730 B2 JP 4548730B2 JP 2005280287 A JP2005280287 A JP 2005280287A JP 2005280287 A JP2005280287 A JP 2005280287A JP 4548730 B2 JP4548730 B2 JP 4548730B2
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anodic oxidation
electrolytic capacitor
solid electrolytic
solution
electrical conductivity
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JP2007095801A (en
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明弘 伊藤
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Nichicon Corp
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Description

本発明は、各種電子機器に利用される固体電解コンデンサの製造方法に関し、特に、酸化皮膜層を形成するための陽極酸化の方法に関するものである。   The present invention relates to a method for manufacturing a solid electrolytic capacitor used in various electronic devices, and more particularly to an anodizing method for forming an oxide film layer.

従来の固体電解コンデンサは、タンタルまたはニオブ等の弁作用を有する金属粉末を加圧成形した後、焼結して多孔質焼結体を形成し、更に、誘電体となる酸化皮膜層、陰極となる導電性高分子または二酸化マンガンなどの固体電解質層、グラファイト層、および陰極銀層などの陰極引出層を順次形成した後、陽極リード線と陽極リードフレームとを抵抗溶接で接続し、陰極引出層と陰極リードフレームとを導電性接着剤を介して接続した後、トランスファーモールドにより外装樹脂を形成して構成されている。   In the conventional solid electrolytic capacitor, a metal powder having a valve action such as tantalum or niobium is pressed and then sintered to form a porous sintered body, and further, an oxide film layer serving as a dielectric, a cathode, After sequentially forming a cathode electrolyte layer such as a conductive polymer or manganese dioxide, a graphite layer, and a cathode silver layer, the anode lead wire and the anode lead frame are connected by resistance welding, and the cathode lead layer And a cathode lead frame are connected via a conductive adhesive, and an exterior resin is formed by transfer molding.

一般に、酸化皮膜層を形成する工程では、多孔質焼結体を陽極酸化液であるリン酸などの酸性電解質溶液に浸漬し、電解質溶液中で電圧を印加する方法が使用されている。しかし、従来の方法では、細孔径の小さい多孔質焼結体を陽極酸化する場合、多孔質焼結体の内部は電気的に抵抗が高く、陽極酸化電流が流れにくいため、陽極酸化を長時間行わなければならなかった。   In general, in the step of forming an oxide film layer, a method is used in which a porous sintered body is immersed in an acidic electrolyte solution such as phosphoric acid, which is an anodizing solution, and a voltage is applied in the electrolyte solution. However, in the conventional method, when anodizing a porous sintered body having a small pore diameter, the inside of the porous sintered body has high electrical resistance, and the anodizing current hardly flows. Had to be done.

そこで、陽極酸化電流を流れやすくするため、陽極酸化液の溶質濃度を高めて電気伝導度を高くする方法や、陽極酸化液を振動させて、多孔質焼結体内部への陽極酸化液の供給を高めて、酸化皮膜層の形成を促進する方法などが用いられている(例えば、特許文献1参照)。
特開平9−283380号公報
Therefore, in order to make the anodic oxidation current flow easily, a method of increasing the solute concentration of the anodic oxidation solution to increase the electrical conductivity, or supplying the anodic oxidation solution to the inside of the porous sintered body by vibrating the anodic oxidation solution Is used to promote the formation of an oxide film layer (see, for example, Patent Document 1).
JP-A-9-283380

しかしながら、上記の陽極酸化液の電気伝導度を高くする方法では、酸化皮膜層が陽極酸化液中の溶質イオンをより多く取り込むこととなり、酸化皮膜中に多くの欠陥が発生して、漏れ電流特性が悪化するという問題があった。   However, in the above-described method for increasing the electrical conductivity of the anodic oxidation solution, the oxide film layer takes in more solute ions in the anodic oxidation solution, and many defects are generated in the oxide film, resulting in leakage current characteristics. There was a problem of getting worse.

また、陽極酸化液を振動させる特許文献1記載の方法では、陽極酸化槽に超音波発生装置を取り付ける必要があり、設備コストの増大を招いていた。
更に、陽極酸化を行う際、多孔質焼結体から突出した陽極リードを金属バーに接続して陽極酸化液中に浸漬し、金属バーを介して当該多孔質焼結体に電圧を付加するが、陽極酸化槽の振動によって陽極酸化液が金属バーまではい上がり、そこから直接陽極酸化液に電流が流れてしまうため、酸化皮膜層の形成が不十分となる問題があった。また、これを防ぐためには、陽極リードを長くする必要があり、生産コストの増大を招いていた。
Moreover, in the method of patent document 1 which vibrates an anodic oxidation liquid, it was necessary to attach an ultrasonic generator to an anodic oxidation tank, and caused the increase in equipment cost.
Furthermore, when performing anodization, the anode lead protruding from the porous sintered body is connected to a metal bar and immersed in an anodizing solution, and a voltage is applied to the porous sintered body through the metal bar. In addition, the anodizing solution rises up to the metal bar due to the vibration of the anodizing tank, and the current flows directly from there to the anodizing solution, so that there is a problem that the formation of the oxide film layer becomes insufficient. In order to prevent this, it is necessary to lengthen the anode lead, resulting in an increase in production cost.

本発明は上記事情に鑑みてなされたものであり、長時間の陽極酸化および生産コストの増大を招くことなく、漏れ電流特性および耐圧特性の良好な固体電解コンデンサの製造方法を提供することにある。   The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a method of manufacturing a solid electrolytic capacitor having good leakage current characteristics and withstand voltage characteristics without incurring long-term anodic oxidation and an increase in production cost. .

上記問題を解決するために、本発明は、弁作用金属からなる多孔質焼結体に対し、陽極酸化によって酸化皮膜層を形成する工程において、前記陽極酸化を複数回行い、少なくとも1回、初回よりも電気伝導度の高い陽極酸化液によって陽極酸化を行うことを特徴とする固体電解コンデンサの製造方法である。   In order to solve the above-mentioned problem, the present invention performs the anodic oxidation a plurality of times in the step of forming an oxide film layer by anodic oxidation on a porous sintered body made of a valve action metal, at least once, for the first time. A method for producing a solid electrolytic capacitor, characterized in that anodization is performed with an anodizing solution having higher electrical conductivity.

上記構成において、前記弁作用金属は、タンタルまたはニオブであることを特徴とする固体電解コンデンサの製造方法である。   Said structure WHEREIN: The said valve action metal is a tantalum or niobium, The manufacturing method of the solid electrolytic capacitor characterized by the above-mentioned.

上記のように構成された本発明によれば、初回の陽極酸化によって欠陥のない酸化皮膜層を形成した後、電気伝導度の高い陽極酸化液によって多孔質焼結体の細孔の内部まで十分な酸化皮膜層を形成できるため、長時間の陽極酸化および生産コストの増大がなく、漏れ電流特性および耐圧特性の良好な固体電解コンデンサを製造することができる。   According to the present invention configured as described above, an oxide film layer having no defect is formed by the first anodic oxidation, and then the inside of the pores of the porous sintered body is sufficiently filled with the anodic oxidation liquid having high electrical conductivity. Since a simple oxide film layer can be formed, a solid electrolytic capacitor having good leakage current characteristics and withstand voltage characteristics can be manufactured without anodizing for a long time and an increase in production cost.

以下、本発明の実施例数例について説明し、これらの特性と従来例の特性とをそれぞれ比較検討する。   Hereinafter, several examples of the present invention will be described, and these characteristics and the characteristics of the conventional example will be compared and examined.

[実施例1]
陽極リードの一方を埋設したタンタル粉末を加圧成形した後、高温で真空焼結して形成した多孔質焼結体に対し、電気伝導度3mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを2時間印加して1回目の陽極酸化を行った。
続いて、上記多孔質焼結体に対し、電気伝導度6mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを1時間印加して2回目の陽極酸化を行い、酸化皮膜層を形成した。
そして、上記多孔質焼結体を硝酸マンガン水溶液に含浸した後、200〜400℃での熱分解を複数回行い、誘電体酸化皮膜層上に二酸化マンガンからなる固体電解質層を充分に形成した。
更に、黒鉛粉末を懸濁させたグラファイト液に浸潰して高温槽で乾燥し、カーボン層を形成した後、陰極銀層を形成し、陰極引出層とした。その後、陽極リードと陽極端子とを抵抗溶接により接続すると共に、陰極引出層と陰極端子とを導電性接着剤で接続し、トランスファーモールドにて外装樹脂を被覆後、陽極端子と陰極端子とを外装樹脂に沿って折り曲げ、実施例1のチップ状タンタル固体電解コンデンサを得た。
[Example 1]
A tantalum powder embedded with one of the anode leads is pressed and then sintered in a vacuum at a high temperature, and then an anodic oxidation voltage in a phosphoric acid aqueous solution having an electrical conductivity of 3 mS / cm. A first anodic oxidation was performed by applying 30 V for 2 hours.
Subsequently, the porous sintered body was subjected to a second anodic oxidation by applying an anodic oxidation voltage of 30 V for 1 hour in an aqueous phosphoric acid solution having an electric conductivity of 6 mS / cm, thereby forming an oxide film layer. .
And after impregnating the said porous sintered compact in manganese nitrate aqueous solution, thermal decomposition at 200-400 degreeC was performed in multiple times, and the solid electrolyte layer which consists of manganese dioxide was fully formed on the dielectric oxide film layer.
Furthermore, after immersing in a graphite liquid in which graphite powder was suspended and drying in a high-temperature bath to form a carbon layer, a cathode silver layer was formed to form a cathode lead layer. After that, the anode lead and the anode terminal are connected by resistance welding, the cathode lead layer and the cathode terminal are connected by a conductive adhesive, and the exterior resin is covered with a transfer mold, and then the anode terminal and the cathode terminal are packaged. The chip-shaped tantalum solid electrolytic capacitor of Example 1 was obtained by bending along the resin.

[実施例2]
電気伝導度3mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを2時間印加して1回目の陽極酸化を行い、続いて、電気伝導度15mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを1時間印加して2回目の陽極酸化を行った点を除き、実施例1と同一の要領で、実施例2のチップ状タンタル固体電解コンデンサを得た。
[Example 2]
In a phosphoric acid aqueous solution with an electrical conductivity of 3 mS / cm, an anodic oxidation voltage of 30 V is applied for 2 hours to perform the first anodic oxidation, and then in an aqueous phosphoric acid solution with an electrical conductivity of 15 mS / cm, A chip-shaped tantalum solid electrolytic capacitor of Example 2 was obtained in the same manner as in Example 1 except that the oxidation voltage of 30 V was applied for 1 hour and the second anodic oxidation was performed.

[実施例3]
電気伝導度3mS/cmの硝酸水溶液中にて、陽極酸化電圧30Vを2時間印加して1回目の陽極酸化を行い、続いて、電気伝導度6mS/cmの硝酸水溶液中にて、陽極酸化電圧30Vを1時間印加して2回目の陽極酸化を行った点を除き、実施例1と同一の要領で、実施例3のチップ状タンタル固体電解コンデンサを得た。
[Example 3]
An anodizing voltage of 30 V is applied for 2 hours in an aqueous nitric acid solution having an electric conductivity of 3 mS / cm, and the first anodizing is performed. Subsequently, an anodizing voltage is applied in an aqueous nitric acid solution having an electric conductivity of 6 mS / cm. A chip-shaped tantalum solid electrolytic capacitor of Example 3 was obtained in the same manner as in Example 1 except that 30 V was applied for 1 hour and the second anodic oxidation was performed.

[実施例4]
電気伝導度3mS/cmの硝酸水溶液中にて、陽極酸化電圧30Vを2時間印加して1回目の陽極酸化を行い、続いて、電気伝導度6mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを1時間印加して2回目の陽極酸化を行った点を除き、実施例1と同一の要領で、実施例4のチップ状タンタル固体電解コンデンサを得た。
[Example 4]
Anodization voltage of 30V is applied for 2 hours in an aqueous nitric acid solution having an electrical conductivity of 3 mS / cm for the first time, followed by anodization in an aqueous phosphoric acid solution having an electrical conductivity of 6 mS / cm. A chip-like tantalum solid electrolytic capacitor of Example 4 was obtained in the same manner as in Example 1 except that the voltage 30 V was applied for 1 hour and the second anodic oxidation was performed.

[実施例5]
電気伝導度3mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを2時間印加して1回目の陽極酸化を行い、続いて、電気伝導度6mS/cmの硝酸水溶液中にて、陽極酸化電圧30Vを1時間印加して2回目の陽極酸化を行った点を除き、実施例1と同一の要領で、実施例5のチップ状タンタル固体電解コンデンサを得た。
[Example 5]
The first anodic oxidation is performed by applying an anodic oxidation voltage of 30 V for 2 hours in a phosphoric acid aqueous solution having an electric conductivity of 3 mS / cm, and then an anodic oxidation in an aqueous nitric acid solution having an electric conductivity of 6 mS / cm. A chip-like tantalum solid electrolytic capacitor of Example 5 was obtained in the same manner as in Example 1 except that the voltage 30 V was applied for 1 hour and the second anodic oxidation was performed.

[比較例1]
電気伝導度3mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを2時間印加して1回目の陽極酸化を行い、続いて、電気伝導度3mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを1時間印加して2回目の陽極酸化を行った点を除き、実施例1と同一の要領で、比較例1のチップ状タンタル固体電解コンデンサを得た。
[Comparative Example 1]
In a phosphoric acid aqueous solution having an electrical conductivity of 3 mS / cm, an anodic oxidation voltage of 30 V is applied for 2 hours to perform the first anodic oxidation, followed by an anodic oxidation in an aqueous phosphoric acid solution having an electrical conductivity of 3 mS / cm. A chip-like tantalum solid electrolytic capacitor of Comparative Example 1 was obtained in the same manner as in Example 1, except that the oxidation voltage of 30 V was applied for 1 hour and the second anodic oxidation was performed.

[比較例2]
電気伝導度6mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを2時間印加して1回目の陽極酸化を行い、続いて、電気伝導度3mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを1時間印加して2回目の陽極酸化を行った点を除き、実施例1と同一の要領で、比較例2のチップ状タンタル固体電解コンデンサを得た。
[Comparative Example 2]
In a phosphoric acid aqueous solution having an electric conductivity of 6 mS / cm, an anodic oxidation voltage of 30 V is applied for 2 hours to perform the first anodic oxidation, and then in an aqueous phosphoric acid solution having an electric conductivity of 3 mS / cm, A chip-shaped tantalum solid electrolytic capacitor of Comparative Example 2 was obtained in the same manner as in Example 1, except that the oxidation voltage of 30 V was applied for 1 hour and the second anodic oxidation was performed.

[従来例1]
電気伝導度3mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを8時間印加して1回のみで陽極酸化を行った点を除き、実施例1と同一の要領で、従来例1のチップ状タンタル固体電解コンデンサを得た。
[Conventional example 1]
In the same manner as in Example 1, except that the anodic oxidation was performed only once by applying an anodic oxidation voltage of 30 V for 8 hours in a phosphoric acid aqueous solution having an electrical conductivity of 3 mS / cm, A chip-shaped tantalum solid electrolytic capacitor was obtained.

[従来例2]
電気伝導度6mS/cmのリン酸水溶液中にて、陽極酸化電圧30Vを3時間印加して1回のみで陽極酸化を行った点を除き、実施例1と同一の要領で、従来例2のチップ状タンタル固体電解コンデンサを得た。
[Conventional example 2]
In the same manner as in Example 1, except that the anodic oxidation was performed only once by applying an anodic oxidation voltage of 30 V for 3 hours in a phosphoric acid aqueous solution having an electrical conductivity of 6 mS / cm. A chip-shaped tantalum solid electrolytic capacitor was obtained.

上記のチップ状タンタル固体電解コンデンサの漏れ電流値(10V印加、1分後)、耐電圧、高温負荷試験後(85℃、10V、1000時間印加)の漏れ電流値(10V印加、1分後)を比較した結果を表1に示す。   Leakage current value of the above chip-shaped tantalum solid electrolytic capacitor (applied 10V, 1 minute), withstand voltage, leakage current value after high temperature load test (applied at 85 ° C, 10V, 1000 hours) (applied 10V, 1 minute) Table 1 shows the results of the comparison.

Figure 0004548730
Figure 0004548730

表1より明らかなように、2回目の陽極酸化液の電気伝導度を1回目の陽極酸化液の電気伝導度より高くした実施例1〜5では、短時間の陽極酸化で、漏れ電流値、耐電圧および高温負荷試験後の漏れ電流値において、従来例1と同等以上の特性が得られる。   As is clear from Table 1, in Examples 1 to 5 in which the electrical conductivity of the second anodic oxidation solution was higher than the electrical conductivity of the first anodic oxidation solution, the leakage current value was reduced by short-term anodic oxidation. In the withstand voltage and the leakage current value after the high-temperature load test, characteristics equal to or higher than those of the conventional example 1 can be obtained.

また、実施例1と比較例1、2との比較により、2回目の陽極酸化液の電気伝導度を1回目の陽極酸化液の電気伝導度以下とした場合、陽極酸化を複数回実施しても、漏れ電流値、耐電圧、高温負荷試験後の漏れ電流値のいずれも改善しないことが分かる。   In addition, when the electrical conductivity of the second anodic oxidation liquid was set to be equal to or lower than the electrical conductivity of the first anodic oxidation liquid by comparing Example 1 with Comparative Examples 1 and 2, the anodic oxidation was performed a plurality of times. It can also be seen that none of the leakage current value, withstand voltage, or leakage current value after the high temperature load test is improved.

さらに、実施例3〜5と従来例1との比較により、1回目と2回目の陽極酸化の液種を変更しても、初回の陽極酸化液の電気伝導度よりも2回目の陽極酸化液の電気伝導度を高くすることで、漏れ電流値、耐電圧、高温負荷試験後の漏れ電流値において、従来例1と同等以上の特性が得られる。   Furthermore, even if the liquid type of the first and second anodic oxidation is changed by comparing the examples 3 to 5 with the conventional example 1, the second anodic oxidation liquid is more than the electric conductivity of the first anodic oxidation liquid. By increasing the electrical conductivity, the characteristics equivalent to or higher than those of Conventional Example 1 can be obtained in the leakage current value, the withstand voltage, and the leakage current value after the high temperature load test.

また、本発明の実施例は、陽極酸化液としてリン酸、硝酸を用いたが、アジピン酸、クエン酸、酢酸、蓚酸、酒石酸、ホウ酸を用いても同様の効果が得られる。   In the examples of the present invention, phosphoric acid and nitric acid were used as the anodizing solution, but the same effect can be obtained by using adipic acid, citric acid, acetic acid, oxalic acid, tartaric acid, and boric acid.

なお、実施例では、陽極酸化を2回行ったが、3回以上行い、少なくとも1回、初回よりも電気伝導度の高い陽極酸化液によって陽極酸化を行えばよく、例えば、2回目の陽極酸化液の電気伝導度を1回目より高くし、3回目の陽極酸化液の電気伝導度を2回目より低くしたり、2回目の陽極酸化液の電気伝導度を1回目より高くし、3回目の陽極酸化液の電気伝導度を2回目よりさらに高くしたり、2回目の陽極酸化液の電気伝導度を1回目より高くし、3回目の陽極酸化液の電気伝導度を2回目と同じにした場合も、上記実施例と同様の効果が得られる。   In the embodiment, the anodic oxidation is performed twice. However, the anodic oxidation may be performed three or more times and at least once with an anodic oxidation liquid having higher electrical conductivity than the first time. The electric conductivity of the liquid is made higher than the first time, the electric conductivity of the third anodizing liquid is made lower than the second time, the electric conductivity of the second anodizing liquid is made higher than the first time, and the third time The electrical conductivity of the anodizing liquid is made higher than the second time, the electric conductivity of the second anodizing liquid is made higher than the first time, and the electric conductivity of the third anodizing liquid is made the same as the second time. In this case, the same effect as in the above embodiment can be obtained.

Claims (2)

弁作用金属からなる多孔質焼結体に対し、陽極酸化によって酸化皮膜層を形成する工程において、
前記陽極酸化を複数回行い、少なくとも1回、初回よりも電気伝導度の高い陽極酸化液によって陽極酸化を行うことを特徴とする固体電解コンデンサの製造方法。
In the process of forming an oxide film layer by anodic oxidation for a porous sintered body made of a valve metal,
A method for producing a solid electrolytic capacitor, wherein the anodization is performed a plurality of times, and anodization is performed at least once with an anodizing solution having a higher electrical conductivity than the first time.
前記弁作用金属は、タンタルまたはニオブであることを特徴とする請求項1記載の固体電解コンデンサの製造方法。   The method for manufacturing a solid electrolytic capacitor according to claim 1, wherein the valve metal is tantalum or niobium.
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