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JP4548834B2 - Aluminum foil for electrolytic capacitor electrode - Google Patents
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JP4548834B2 - Aluminum foil for electrolytic capacitor electrode - Google Patents

Aluminum foil for electrolytic capacitor electrode Download PDF

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JP4548834B2
JP4548834B2 JP2005032957A JP2005032957A JP4548834B2 JP 4548834 B2 JP4548834 B2 JP 4548834B2 JP 2005032957 A JP2005032957 A JP 2005032957A JP 2005032957 A JP2005032957 A JP 2005032957A JP 4548834 B2 JP4548834 B2 JP 4548834B2
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aluminum foil
electrolytic capacitor
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rolling
aluminum
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JP2006222202A (en
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伸夫 大澤
淳 日比野
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Sumitomo Light Metal Industries Ltd
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Description

本発明は、電解コンデンサ電極用アルミニウム箔、とくに電気化学的エッチング処理により均一且つ多数のピットが形成され、高い静電容量を有する電解コンデンサ電極用アルミニウム箔に関する。   The present invention relates to an aluminum foil for electrolytic capacitor electrodes, and more particularly to an aluminum foil for electrolytic capacitor electrodes having a high electrostatic capacity, in which a large number of uniform pits are formed by electrochemical etching.

電解コンデンサ電極用アルミニウム箔の製造は、アルミニウム箔を塩素イオンを含む溶液中で電気化学的エッチング処理を施すことにより行われ、エッチピットと呼ばれる多数の孔を形成してエッチング面の表面積を拡大させ静電容量を増大させている。   The production of aluminum foil for electrolytic capacitor electrodes is performed by electrochemically etching the aluminum foil in a solution containing chlorine ions to form a large number of holes called etch pits to increase the surface area of the etched surface. The capacitance is increased.

近年における電子部品の小型化に伴って、電子部品に使用される電解コンデンサ電極用アルミニウム箔についても、静電容量の一層の向上が要請されており、静電容量を高めるための多くの試みが行われている。   With the recent miniaturization of electronic components, there has been a demand for further improvement in the capacitance of aluminum foil for electrolytic capacitor electrodes used in electronic components, and many attempts have been made to increase the capacitance. Has been done.

このうち、アルミニウム箔の結晶構造と静電容量との関係については、(100)結晶面占有率を高めることにより静電容量を向上させることが知られており、理想立方体配向((100)結晶面がシート面に平行で、[010]結晶方向がシートの圧延方向と平行となっている)に対するずれが10〜20°の結晶粒を20%未満として静電容量を高めることが提案されている(特許文献1参照)。   Among these, regarding the relationship between the crystal structure of the aluminum foil and the capacitance, it is known that the capacitance is improved by increasing the (100) crystal plane occupancy, and the ideal cubic orientation ((100) crystal It has been proposed to increase the capacitance by reducing the crystal grains with a deviation of 10 to 20 ° to less than 20% with respect to the [010] crystal direction parallel to the sheet rolling direction. (See Patent Document 1).

上記の提案のものによれば、かなりの程度の静電容量の向上が期待できるが、エッチング処理時に表面溶解が生じる場合があり、折曲強さが低下したり、高い静電容量が確実に得難いなど問題を残している。   According to the above proposal, a considerable improvement in capacitance can be expected, but surface dissolution may occur during the etching process, and bending strength is reduced, and high capacitance is ensured. It remains difficult to obtain.

発明者らは、前記の提案のものをベースとして、さらに試験、検討を行った結果、エッチング初期に発生するエッチピットは半立方体の形状をし、〈100〉方向へトンネル状の溶解を生じて成長すること、このため、圧延方向(Rolling Direction=RD)に対する回転角、すなわちRD(100)[100]に対する回転角θ(図1参照)が小さい結晶粒が多いと、図2に示すように、圧延方向に沿ってピットが成長し易くなり(図2の矢印方向(横走りピットの成長方向))、表面溶解が生じて静電容量の低下を招き、RD(100)[100]に対する回転角θが大きい結晶粒が多いと、図3に示すように、圧延目残りDの部分でピットの横走りが停止して表面溶解が抑制され、結果として静電容量を向上させることを見出した。
特表平9−511360号公報
As a result of further tests and examinations based on the above-mentioned proposal, the inventors have formed a semi-cubic shape of the etch pits generated in the initial stage of etching, resulting in a tunnel-like dissolution in the <100> direction. For this reason, when there are many crystal grains having a small rotation angle with respect to the rolling direction (Rolling Direction = RD), that is, the rotation angle θ (see FIG. 1) with respect to RD (100) [100], as shown in FIG. Pits easily grow along the rolling direction (arrow direction in FIG. 2 (transverse pit growth direction)), surface dissolution occurs, causing a decrease in capacitance, and rotation with respect to RD (100) [100]. If there are many crystal grains with a large angle θ, as shown in FIG. 3, the lateral running of the pits stops at the portion of the rolling remainder D and the surface dissolution is suppressed, and as a result, the capacitance is improved. Heading was.
Japanese National Patent Publication No. 9-511360

本発明は、上記の知見に基づいてさらに検討を重ねた結果としてなされたものであり、その目的は、電気化学的エッチング処理により表面溶解を生じることなくエッチピットがアルミニウム箔の内部まで深くトンネル状に進行し、拡面率の増大と高静電容量を得ることを可能とする電解コンデンサ電極用アルミニウム合金箔を提供することにある。   The present invention has been made as a result of further studies based on the above-mentioned knowledge, and its purpose is that the etch pit is deeply tunneled to the inside of the aluminum foil without causing surface dissolution by electrochemical etching treatment. It is an object of the present invention to provide an aluminum alloy foil for an electrolytic capacitor electrode that can increase the area expansion ratio and obtain a high capacitance.

上記の目的を達成するための請求項1による電解コンデンサ電極用アルミニウム箔は、電解コンデンサ電極に使用するためのアルミニウム箔であって、該アルミニウム箔の表面を1画素40μmのステップで分割した画素のうち、理想立方体配向に対するずれが10°未満の立方体方位で、該立方体方位の圧延方向に対する回転角θが10°以上45°以下の画素の割合が全体の画素の5%以上存在することを特徴とする。 An aluminum foil for an electrolytic capacitor electrode according to claim 1 for achieving the above object is an aluminum foil for use in an electrolytic capacitor electrode, wherein the surface of the aluminum foil is divided by a step of 40 μm per pixel. Among these, the deviation from the ideal cube orientation is less than 10 ° in the cube orientation, and the ratio of pixels having a rotation angle θ of 10 ° to 45 ° with respect to the rolling direction of the cube orientation is 5% or more of the total pixels. And

請求項2による電解コンデンサ電極用アルミニウム箔は、請求項1において、前記アルミニウム箔の圧延方向と直角方向における表面の中心線平均粗さRaが0.07μm以上であることを特徴とする。   The aluminum foil for electrolytic capacitor electrodes according to claim 2 is characterized in that, in claim 1, the center line average roughness Ra of the surface in the direction perpendicular to the rolling direction of the aluminum foil is 0.07 μm or more.

請求項3による電解コンデンサ電極用アルミニウム箔は、請求項1または2において、前記アルミニウム箔のアルミニウム純度が99.90%以上であることを特徴とする。   The aluminum foil for electrolytic capacitor electrodes according to claim 3 is characterized in that, in claim 1 or 2, the aluminum purity of the aluminum foil is 99.90% or more.

本発明によれば、電気化学的エッチング処理により表面溶解を生じることなくエッチピットがアルミニウム箔の内部まで深くトンネル状に進行し、拡面率の増大と高静電容量を得ることを可能とする電解コンデンサ電極用アルミニウム合金箔が提供される。   According to the present invention, the etch pit proceeds deeply into the inside of the aluminum foil without causing surface dissolution by the electrochemical etching process, and it is possible to increase the surface expansion ratio and obtain a high capacitance. An aluminum alloy foil for electrolytic capacitor electrodes is provided.

本発明の電解コンデンサ電極用アルミニウム箔は、アルミニウム箔の表面を1画素40μmのステップで分割した画素のうち、理想立方体配向に対するずれが10°未満の立方体方位で、この立方体方位の圧延方向に対する回転角θが10°以上45°以下の画素の割合が全体の画素の5%以上存在することを特徴とする。回転角θが10°未満の画素の割合が多いと、圧延方向に沿ってピットが成長し易くなって、エッチング処理時に表面溶解が生じ、静電容量の低下に起因する(図2参照)。 The aluminum foil for electrolytic capacitor electrodes according to the present invention is a cube orientation in which the deviation from the ideal cube orientation is less than 10 ° among the pixels obtained by dividing the surface of the aluminum foil in steps of 40 μm per pixel. The ratio of pixels having an angle θ of 10 ° to 45 ° is 5% or more of the entire pixels . If the ratio of pixels having a rotation angle θ of less than 10 ° is large, pits are likely to grow along the rolling direction, and surface dissolution occurs during the etching process, resulting in a decrease in capacitance (see FIG. 2).

回転角θは10°以上45°以下であることが望ましく、この範囲の回転角θを有すと、圧延目残りDの部分でピットの横走りが停止して表面溶解が抑制されるため、静電容量の向上が達成できる(図3参照)。回転角θが10°以上45°以下の画素の割合は全体の画素の5%以上存在することが好ましい。 It is desirable rotation angle θ is 10 ° to 45 °, when that having a rotation angle θ in this range, the surface dissolution is suppressed by stopping the partial lateral running of the pits in the rolling eyes remaining D An improvement in capacitance can be achieved (see FIG. 3). The ratio of pixels having a rotation angle θ of 10 ° to 45 ° is preferably 5% or more of the entire pixels.

理想立方体配向に対するずれが10°未満の立方体方位に限定する理由は、10°以上になると結晶方位の不揃いが生じて、ピットの成長により表面溶解が生じるためである。   The reason why the deviation from the ideal cube orientation is limited to a cube orientation of less than 10 ° is that when it is 10 ° or more, the crystal orientation is uneven, and surface growth occurs due to pit growth.

圧延方向に対する回転角θ(図1参照)の測定、理想立方体配向に対するずれ角の測定は、EBSD(Electron Back Scattering Diffraction=電子後方散乱回折)技術により走査顕微鏡で測定することができる。   The measurement of the rotation angle θ (see FIG. 1) with respect to the rolling direction and the measurement of the shift angle with respect to the ideal cube orientation can be performed with a scanning microscope by an EBSD (Electron Back Scattering Diffraction) technique.

本発明の電解コンデンサ電極用アルミニウム箔においては、アルミニウム箔の圧延方向と直角方向におけるアルミニウム箔表面の中心線平均粗さRaが0.07μm以上であることが好ましく、圧延目残りDでピットの横走りを確実に抑制する効果が得られる。中心線平均粗さRa0.10μm以上とするのがより好ましい。中心線平均粗さRaがあまり大きいと、圧延目のみの溶解が過剰に促進されるため、結果としてピットの分布が不均一となるから、上限は0.70μm以下とする。   In the aluminum foil for electrolytic capacitor electrodes of the present invention, the center line average roughness Ra on the surface of the aluminum foil in the direction perpendicular to the rolling direction of the aluminum foil is preferably 0.07 μm or more. An effect of reliably suppressing running can be obtained. The center line average roughness Ra is more preferably 0.10 μm or more. If the center line average roughness Ra is too large, melting of only the rolling marks is excessively promoted, resulting in nonuniform pit distribution. Therefore, the upper limit is made 0.70 μm or less.

本発明の電解コンデンサ電極用アルミニウム箔は、アルミニウム箔およびアルミニウム合金箔を含むが、アルミニウム純度99.90%以上のアルミニウム箔を適用するのが好ましい。アルミニウム純度99.96%以上のアルミニウム箔を適用するのがさらに好ましい。   Although the aluminum foil for electrolytic capacitor electrodes of the present invention includes an aluminum foil and an aluminum alloy foil, it is preferable to apply an aluminum foil having an aluminum purity of 99.90% or more. It is more preferable to apply an aluminum foil having an aluminum purity of 99.96% or higher.

本発明の性状をそなえたアルミニウム箔を得るためには、熱間圧延工程において斜め方向に圧延を行う手法、冷間圧延工程において斜め圧延を行う手法、または、これらを組み合わせる手法が適用される。   In order to obtain the aluminum foil having the properties of the present invention, a method of rolling in the oblique direction in the hot rolling step, a method of performing oblique rolling in the cold rolling step, or a method of combining them is applied.

以下、本発明の実施例を比較例と対比して説明する。これらの実施例は本発明の一実施態様を示すものであり、本発明はこれに限定されるものではない。   Examples of the present invention will be described below in comparison with comparative examples. These examples show one embodiment of the present invention, and the present invention is not limited thereto.

アルミニウム純度99.90%以上の純度を有するアルミニウム合金溶湯を、半連続鋳造により造塊し、得られた鋳塊を常法に従って均質化処理、熱間圧延し、厚さ5mmの板材とした。ついで、冷間圧延を繰り返し、厚さ0.1mmのアルミニウム箔を得た。冷間圧延中、厚さが0.16mmおよび0.13mmの段階で、大気中において180〜280℃の温度域で12時間の中間焼鈍を行った。   A molten aluminum alloy having a purity of aluminum of 99.90% or more was ingoted by semi-continuous casting, and the resulting ingot was homogenized and hot-rolled according to a conventional method to obtain a plate material having a thickness of 5 mm. Next, cold rolling was repeated to obtain an aluminum foil having a thickness of 0.1 mm. During the cold rolling, intermediate annealing was performed for 12 hours in the temperature range of 180 to 280 ° C. in the air at a thickness of 0.16 mm and 0.13 mm.

その後、冷間圧延の方向に対して0〜45°の方向に付加圧延(スキンパス圧延)を施した後、最終焼鈍を、アルゴンガス雰囲気中において、昇温速度30〜200℃/h、保持温度500〜570℃で実施した。   Then, after performing additional rolling (skin pass rolling) in a direction of 0 to 45 ° with respect to the direction of cold rolling, final annealing is performed in an argon gas atmosphere at a heating rate of 30 to 200 ° C./h, a holding temperature. It carried out at 500-570 degreeC.

上記の工程を経て得られたアルミニウム箔(試験材)について、一次電解処理として、塩酸1.0mol/lと硫酸3.0mol/lの混合水溶液(液温83℃)中、電流密度20A/dm2 の条件で100秒間通電し、さらに二次電解処理として、硝酸1.5mol/l水溶液(液温74℃)中、電流密度10A/dm2 の条件で300秒間通電することにより直流エッチング処理を行い、その後、ホウ酸アンモニウム溶液中で250Vに化成後、LCRメータを用いて静電容量の測定を行った。 For the aluminum foil (test material) obtained through the above steps, as a primary electrolytic treatment, a current density of 20 A / dm in a mixed aqueous solution of hydrochloric acid 1.0 mol / l and sulfuric acid 3.0 mol / l (liquid temperature 83 ° C.). As a secondary electrolysis treatment, a direct current etching process was performed by energizing for 300 seconds under a current density of 10 A / dm 2 in a 1.5 mol / l aqueous solution of nitric acid (liquid temperature 74 ° C.). Then, after chemical conversion to 250 V in an ammonium borate solution, the capacitance was measured using an LCR meter.

圧延方向に対する回転角θは、前記EBSD(TSL製OIM2.6)を用いて、2mm×1mmの領域3視野を1画素40μmのステップで測定し、理想立方体方位配向に対するずれが10°未満の立方体方位で、この立方体方位の圧延方向に対する回転角θが10°以上45°以下の画素の割合を求めた。EBSD分析を行う前処理として、アルミニウム箔の表面をバフ研磨し、さらに過塩素酸エタノール液中で電解研磨処理した。   The rotation angle θ with respect to the rolling direction is a cube whose deviation from the ideal cube orientation is less than 10 ° by measuring 3 fields of 2 mm × 1 mm in steps of 40 μm using the EBSD (TSL OIM 2.6). With respect to the orientation, the ratio of pixels having a rotation angle θ of 10 ° to 45 ° with respect to the rolling direction of the cube orientation was determined. As a pretreatment for performing the EBSD analysis, the surface of the aluminum foil was buffed and further electropolished in a perchloric acid ethanol solution.

各試験材について、理想立方体方位配向に対するずれが10°未満の立方体方位で、この立方体方位の圧延方向に対する回転角θが10°以上45°以下の画素の割合(G%)、圧延方向と直角方向における表面の中心線平均粗さ(Raμm)、アルミニウム純度、静電容量を表1、表2に示す。   For each test material, the ratio (G%) of pixels whose deviation from the ideal cube orientation is less than 10 ° and whose rotation angle θ with respect to the rolling direction is 10 ° to 45 °, and perpendicular to the rolling direction. Tables 1 and 2 show the centerline average roughness (Raμm), aluminum purity, and capacitance of the surface in the direction.

Figure 0004548834
Figure 0004548834

Figure 0004548834
Figure 0004548834

表1にみられるように、本発明に従う試験材、とくにRaが0.07μm以上、アルミニウム純度99.96%以上の試験材No.1〜12はいずれも、100%以上の優れた静電容量をそなえている。   As can be seen from Table 1, the test material according to the present invention, in particular, the test material No. Each of Nos. 1 to 12 has an excellent capacitance of 100% or more.

一方、表2に示すように、アルミニウム純度が99.94%の試験材No.13、Raが0.05μmの試験材No.14は、やや静電容量が低下している。Gが3%で本発明の条件を外れた試験材No.15は静電容量92%と低い値を示した。   On the other hand, as shown in Table 2, test material No. with an aluminum purity of 99.94% was used. 13, test material No. with Ra of 0.05 μm. No. 14 has a somewhat lower capacitance. A test material No. having a G of 3% and deviating from the conditions of the invention 15 showed a low value of 92% electrostatic capacity.

圧延方向に対する回転角θを示す図で、矢印は回転方向を示す。It is a figure which shows rotation angle (theta) with respect to a rolling direction, and an arrow shows a rotation direction. アルミニウム箔表面から見たエッチング処理時のエッチピットの形成において、圧延方向に対する回転角θが10°未満の場合における横走りピットの成長方向を示す模式図である。横走りピットが圧延方向に進行している。In the formation of etch pits during the etching process viewed from the surface of the aluminum foil, it is a schematic diagram showing the growth direction of laterally running pits when the rotation angle θ with respect to the rolling direction is less than 10 ° . Sideways pits are running in the rolling direction. アルミニウム箔表面から見たエッチング処理時のエッチピットの形成において、圧延方向に対する回転角θが10°以上の場合における横走りピットの成長方向を示す模式図である。横走りピットが圧延目残りで停止する。In the formation of etch pits during the etching process viewed from the aluminum foil surface, it is a schematic diagram showing the growth direction of laterally running pits when the rotation angle θ with respect to the rolling direction is 10 ° or more. The sideways pit stops at the remaining roll.

符号の説明Explanation of symbols

D 圧延目残り   D Rolling remainder

Claims (3)

電解コンデンサ電極に使用するためのアルミニウム箔であって、該アルミニウム箔の表面を1画素40μmのステップで分割した画素のうち、理想立方体配向に対するずれが10°未満の立方体方位で、該立方体方位の圧延方向に対する回転角θが10°以上45°以下の画素の割合が全体の画素の5%以上存在することを特徴とする電解コンデンサ電極用アルミニウム箔。 An aluminum foil for use in an electrolytic capacitor electrode, wherein the deviation of the surface of the aluminum foil with respect to the ideal cube orientation is less than 10 ° among pixels divided by a step of 40 μm per pixel, An aluminum foil for electrolytic capacitor electrodes, wherein a ratio of pixels having a rotation angle θ of 10 ° or more and 45 ° or less with respect to a rolling direction is 5% or more of the entire pixels. 前記アルミニウム箔の圧延方向と直角方向における表面の中心線平均粗さRaが0.07μm以上であることを特徴とする請求項1記載の電解コンデンサ電極用アルミニウム箔。 The aluminum foil for electrolytic capacitor electrodes according to claim 1, wherein the center line average roughness Ra of the surface in a direction perpendicular to the rolling direction of the aluminum foil is 0.07 µm or more. 前記アルミニウム箔のアルミニウム純度が99.90%(質量%、以下同じ)以上であることを特徴とする請求項1または2記載の電解コンデンサ電極用アルミニウム箔。 The aluminum foil for electrolytic capacitor electrodes according to claim 1 or 2, wherein the aluminum purity of the aluminum foil is 99.90% (mass%, the same shall apply hereinafter) or more.
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