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JP4552246B2 - Method for producing purified fluorocarbon or chlorofluorocarbon - Google Patents
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JP4552246B2 - Method for producing purified fluorocarbon or chlorofluorocarbon - Google Patents

Method for producing purified fluorocarbon or chlorofluorocarbon Download PDF

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Publication number
JP4552246B2
JP4552246B2 JP37236399A JP37236399A JP4552246B2 JP 4552246 B2 JP4552246 B2 JP 4552246B2 JP 37236399 A JP37236399 A JP 37236399A JP 37236399 A JP37236399 A JP 37236399A JP 4552246 B2 JP4552246 B2 JP 4552246B2
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Prior art keywords
chlorofluorocarbon
fluorocarbon
solid alkali
adsorbent
hydrogen halide
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JP37236399A
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JP2001181220A (en
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智広 星
卓 渡辺
由城 紫垣
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Kureha Corp
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Kureha Corp
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    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00Preparation of halogenated hydrocarbons
    • C07C17/38Separation; Purification; Stabilisation; Use of additives

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、精製フルオロカーボン又はクロロフルオロカーボンの製造方法に関し、詳しくは、フルオロカーボン又はクロロフルオロカーボンに含まれるハロゲン化水素の除去のために固体アルカリを使用した工業的に有利な、精製フルオロカーボン又はクロロフルオロカーボンの製造方法に関する。
【0002】
【従来の技術】
フルオロカーボン又はクロロフルオロカーボンの製造方法としては、炭素数1〜4のハロゲン化炭化水素を触媒を使用してフッ素化する方法、または、炭素数2〜4の不飽和炭化水素または不飽和ハロゲン化炭化水素にフッ素原子を付加する方法などが知られている。この様な方法においては、触媒の種類や反応条件などによって、生成したフルオロカーボン又はクロロフルオロカーボン中にハロゲン化水素などの酸成分が不純物として副生する。
【0003】
また、電離層の破壊、地球の温暖化などの問題から、冷媒、半導体産業における洗浄用溶媒などとして使用されたフルオロカーボン又はクロロフルオロカーボンの回収または再生が行われている。回収されたフルオロカーボン又はクロロフルオロカーボン中にはハロゲン化水素の酸成分や水分などが不純物として相当量存在する。
【0004】
フルオロカーボン又はクロロフルオロカーボンの製造における不純物の除去方法として、蒸留により精製する方法などが行われている。また、回収されたフルオロカーボン又はクロロフルオロカーボンの再生方法としては、回収したフッ素化炭化水素または炭化フッ素化合物を水と接触させて水溶性不純物を水側に移行させ、次いで、残存する不純物を吸着剤によって除去する方法などが行われている。
【0005】
【発明が解決しようとする課題】
しかしながら、上述の方法では、何れも、ppmオーダーで含まれているハロゲン化水素などの酸成分を除去するには充分とは云えず、また、低沸点のフルオロカーボン又はクロロフルオロカーボンの貯蔵および出荷に際しては、加圧して液化する必要があり、そのため、設備が大きくなるばかりでなく、液化の操作が必要となり、製造コストが高くなる一因となっている。
【0006】
従って、本発明の目的は、フルオロカーボン又はクロロフルオロカーボン中のハロゲン化水素などの酸成分を液体状態で除去することから成る、工業的に有利な精製フルオロカーボン又はクロロフルオロカーボンの製造方法を提供することにある。
【0007】
【課題を解決するための手段】
本発明者らは、上記目的を達成すべく鋭意検討した結果、フルオロカーボン又はクロロフルオロカーボンを固体アルカリと液体状態で接触させ、含有するハロゲン化水素などの酸成分を中和して固体アルカリ中に固定化することにより、上記課題が解決できることを見い出し、本発明を完成するに至った。
【0008】
本発明は、上記の知見に基づき完成されたものであり、その要旨は、ハロゲン化水素を含有するフルオロカーボン又はクロロフルオロカーボンを固体アルカリと液状で接触させてハロゲン化水素を除去する精製フルオロカーボン又はクロロフルオロカーボンの製造方法であって、固体アルカリが炭酸カルシウムであることを特徴とする精製フルオロカーボン又はクロロフルオロカーボンの製造方法に存する。
【0009】
本発明の要旨の好ましい実施態様においては、固体アルカリと接触後のフルオロカーボン又はクロロフルオロカーボンを吸着材と液状で接触させて水分または二酸化炭素を除去する。
【0010】
【発明の実施の態様】
以下、本発明を説明する。本発明の製造方法は、原料として、通常の方法で製造されたフルオロカーボン或いはクロロフルオロカーボン又は冷媒や半導体産業における洗浄用溶媒などとして使用されたフルオロカーボン又はクロロフルオロカーボンを使用する。これらは、炭素数が通常1〜4であり、ハロゲン化水素などの酸成分を含有する。ハロゲン化水素の酸成分とは、フッ化水素、塩化水素または臭化水素などが例示される。
【0011】
本発明で使用する固体アルカリとしては、炭酸カルシウム、水酸化カルシウム又は酸化カルシウムが挙げられる。固体アルカリとしてのカルシウム化合物と酸成分としてのハロゲン化水素との反応によって生成するカルシウム塩は、精製フルオロカーボン又はクロロフルオロカーボン中に溶解することがなく、固体アルカリ中に固定化される。また、反応によって得られるこれらのカルシウム塩は再資源化することも可能である。
【0012】
除去すべきハロゲン化水素の酸成分がフッ化水素で、固体アルカリが炭酸カルシウムである場合、炭酸カルシウムとフッ化水素の反応でフッ化カルシウムが生成する。この場合、上記の反応は、炭酸カルシウム(真密度:2.71g/ml)とフッ化カルシウム(真密度:3.18g/ml)との密度が異なるため、個体炭酸カルシウムに空隙を形成しながら進行する。その結果、炭酸カルシウム表面のフッ化カルシウム被覆によって反応の進行が阻害されることなく、炭酸カルシウム内部まで反応が進行するため、炭酸カルシウムの利用率が高く純度の高いフッ化カルシウムが得られる。
【0013】
原料のフルオロカーボン又はクロロフルオロカーボンは、液状で固体アルカリとの反応に供されるため、予め、沸点以下に冷却されるか、または、液状に加圧される。固体アルカリと液状原料との接触は、固体アルカリを充填した固定床式充填塔に液状原料を通液することにより行われる。充填塔の入口から出口方向に向かって液状原料の滞留時間が増加すると共に酸成分濃度が低下していくので、その濃度勾配を考慮して充填塔の固体アルカリの固定床高さを決める。固体アルカリの形状は、ハンドリングの容易性や固定床の圧力損失の低減の見地から粒状体であることが好ましい。
【0014】
固体アルカリと酸成分の反応よって、副生物として水が、特に、炭酸カルシウムを使用した場合は、水と二酸化炭素が生成する。これらは、ゼオライト、シリカゲル、活性アルミナ、活性白土、活性炭または高分子吸着材などの吸着材によって吸着除去することが出来る。また、固定床の固体アルカリと反応しなかった酸成分を吸着材で除去することにより、より高純度の精製フルオロカーボン又はクロロフルオロカーボンを製造することが出来る。吸着材による吸着除去は、固体アルカリの場合と同様に、吸着材を充填した固定床式充填塔に通液することにより行われる。処理物中の二酸化炭素および水の濃度によって、充填塔の吸着材の固定床高さを決める。また、吸着材は、破過した段階で脱着処理することにより、繰り返し使用することが出来る。
【0015】
【実施例】
以下、実施例により本発明を具体的に説明するが、本発明は、その要旨を超えない限り、以下の実施例に限定されるものではない。
【0016】
実施例1及び2
原料として、既知の方法で製造した1,1−ジフルオロエタン(酸成分含有量:フッ化水素2000wtppm、塩化水素150wtppm)を使用した。固体アルカリとして、粉砕により平均粒径を3mmに調整した炭酸カルシウムを使用した。吸着材として、合成ゼオライト4A(ビーズ)を使用した。
【0017】
ハロゲン化水素などの酸性分の除去および水分または二酸化炭素の除去のための充填塔のサイズは、炭酸カルシウム充填塔および吸着材充填塔ともに、内径48mm、高さ500mmの円筒で、固体アルカリ及び吸着材の充填量を表1に記載の様に変えて充填高さを調整した。タンクからポンプにて、温度20℃、圧力0.65MPaGの液状1,1−ジフルオロエタンを炭酸カルシウム充填塔および吸着材充填塔に表1に示す流量で順次に通液し、出口の酸分、水分、二酸化炭素の濃度を測定した。結果を表1に示す。
【0018】
【表1】

Figure 0004552246
【0019】
【発明の効果】
上述の様に、液体状態でフルオロカーボン又はクロロフルオロカーボンと固体アルカリを接触させて、含まれるハロゲン化水素などの酸成分を除去することにより、高純度の精製フルオロカーボン又はクロロフルオロカーボンを製造することが出来、且つ、コンパクトな精製プラントを実現することが出来るとともに精製コストを低減すること出来る。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for producing a purified fluorocarbon or chlorofluorocarbon, and more particularly, industrially advantageous production of a purified fluorocarbon or chlorofluorocarbon using a solid alkali for removing hydrogen halide contained in the fluorocarbon or chlorofluorocarbon. Regarding the method.
[0002]
[Prior art]
As a method for producing fluorocarbon or chlorofluorocarbon, a method of fluorinating a halogenated hydrocarbon having 1 to 4 carbon atoms using a catalyst, or an unsaturated hydrocarbon or unsaturated halogenated hydrocarbon having 2 to 4 carbon atoms For example, a method of adding a fluorine atom to is known. In such a method, an acid component such as hydrogen halide is by-produced as an impurity in the generated fluorocarbon or chlorofluorocarbon depending on the type of catalyst and reaction conditions.
[0003]
In addition, due to problems such as ionospheric destruction and global warming, recovery or regeneration of fluorocarbons or chlorofluorocarbons used as refrigerants, cleaning solvents in the semiconductor industry, and the like is being performed. In the recovered fluorocarbon or chlorofluorocarbon, an acid component of hydrogen halide, moisture, and the like are present as impurities.
[0004]
As a method for removing impurities in the production of fluorocarbons or chlorofluorocarbons, a method of purification by distillation or the like is performed. The recovered fluorocarbon or chlorofluorocarbon may be regenerated by bringing the recovered fluorinated hydrocarbon or fluorocarbon compound into contact with water to transfer water-soluble impurities to the water side, and then removing the remaining impurities with an adsorbent. There is a method to remove it.
[0005]
[Problems to be solved by the invention]
However, none of the above-mentioned methods is sufficient to remove acid components such as hydrogen halide contained in the order of ppm, and when storing and shipping low-boiling fluorocarbons or chlorofluorocarbons. Therefore, it is necessary to pressurize and liquefy, so that not only the equipment becomes large, but also a liquefaction operation is required, which is a cause of increasing the manufacturing cost.
[0006]
Accordingly, an object of the present invention is to provide an industrially advantageous method for producing purified fluorocarbons or chlorofluorocarbons, which comprises removing acid components such as hydrogen halides in fluorocarbons or chlorofluorocarbons in a liquid state. .
[0007]
[Means for Solving the Problems]
As a result of intensive studies to achieve the above-mentioned object, the present inventors brought fluorocarbon or chlorofluorocarbon into contact with a solid alkali in a liquid state, neutralized acid components such as hydrogen halide contained therein, and fixed the solid alkali in the solid alkali. As a result, it has been found that the above problems can be solved, and the present invention has been completed.
[0008]
The present invention has been completed based on the above findings, and the gist of the present invention is a purified fluorocarbon or chlorofluorocarbon in which a hydrogen halide-containing fluorocarbon or chlorofluorocarbon is brought into contact with a solid alkali in a liquid state to remove the hydrogen halide. And a method for producing a purified fluorocarbon or chlorofluorocarbon, wherein the solid alkali is calcium carbonate .
[0009]
In a preferred embodiment of the gist of the present invention, the fluorocarbon or chlorofluorocarbon after contact with the solid alkali is brought into contact with the adsorbent in liquid form to remove moisture or carbon dioxide.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
The present invention will be described below. The production method of the present invention uses, as a raw material, a fluorocarbon or chlorofluorocarbon produced by a usual method, or a fluorocarbon or chlorofluorocarbon used as a refrigerant or a cleaning solvent in the semiconductor industry. These usually have 1 to 4 carbon atoms and contain an acid component such as hydrogen halide. Examples of the acid component of hydrogen halide include hydrogen fluoride, hydrogen chloride, and hydrogen bromide.
[0011]
Examples of the solid alkali used in the present invention include calcium carbonate, calcium hydroxide, and calcium oxide. The calcium salt produced by the reaction between the calcium compound as the solid alkali and the hydrogen halide as the acid component is not dissolved in the purified fluorocarbon or chlorofluorocarbon, but is immobilized in the solid alkali. Further, these calcium salts obtained by the reaction can be recycled.
[0012]
When the acid component of the hydrogen halide to be removed is hydrogen fluoride and the solid alkali is calcium carbonate, calcium fluoride is generated by the reaction of calcium carbonate and hydrogen fluoride. In this case, since the density of calcium carbonate (true density: 2.71 g / ml) is different from that of calcium fluoride (true density: 3.18 g / ml), the above reaction is performed while forming voids in the solid calcium carbonate. proceed. As a result, since the reaction proceeds to the inside of calcium carbonate without being inhibited by the calcium fluoride coating on the surface of calcium carbonate, calcium fluoride having a high utilization rate of calcium carbonate and high purity can be obtained.
[0013]
Since the raw material fluorocarbon or chlorofluorocarbon is subjected to a reaction with a solid alkali in a liquid state, it is cooled in advance to the boiling point or pressurized in a liquid state. The contact between the solid alkali and the liquid raw material is performed by passing the liquid raw material through a fixed bed packed column packed with the solid alkali. Since the residence time of the liquid raw material increases from the entrance to the exit of the packed tower and the concentration of the acid component decreases, the solid alkali fixed bed height of the packed tower is determined in consideration of the concentration gradient. The shape of the solid alkali is preferably a granular material from the viewpoint of ease of handling and reduction of pressure loss of the fixed bed.
[0014]
By the reaction between the solid alkali and the acid component, water and carbon dioxide are generated as a by-product, particularly when calcium carbonate is used. These can be adsorbed and removed by adsorbents such as zeolite, silica gel, activated alumina, activated clay, activated carbon or polymer adsorbent. Moreover, a purified fluorocarbon or chlorofluorocarbon having a higher purity can be produced by removing an acid component that has not reacted with the solid alkali of the fixed bed with an adsorbent. The adsorption removal by the adsorbent is performed by passing the liquid through a fixed bed packed tower packed with the adsorbent, as in the case of solid alkali. The fixed bed height of the adsorbent in the packed tower is determined by the concentration of carbon dioxide and water in the treated product. Further, the adsorbent can be repeatedly used by desorption treatment at the stage of breakthrough.
[0015]
【Example】
EXAMPLES Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited to a following example, unless the summary is exceeded.
[0016]
Examples 1 and 2
As a raw material, 1,1-difluoroethane produced by a known method (acid component content: hydrogen fluoride 2000 wtppm, hydrogen chloride 150 wtppm) was used. As the solid alkali, calcium carbonate having an average particle size adjusted to 3 mm by pulverization was used. Synthetic zeolite 4A (beads) was used as the adsorbent.
[0017]
The size of the packed column for removing acidic components such as hydrogen halide and removing water or carbon dioxide is a cylinder with an inner diameter of 48 mm and a height of 500 mm for both the calcium carbonate packed column and the adsorbent packed column. The filling height was adjusted by changing the filling amount of the material as shown in Table 1. Liquid 1,1-difluoroethane at a temperature of 20 ° C. and a pressure of 0.65 MPaG was sequentially passed from the tank to the calcium carbonate packed column and the adsorbent packed column at the flow rates shown in Table 1, and the acid content and moisture at the outlet The concentration of carbon dioxide was measured. The results are shown in Table 1.
[0018]
[Table 1]
Figure 0004552246
[0019]
【The invention's effect】
As described above, a high purity purified fluorocarbon or chlorofluorocarbon can be produced by contacting the fluorocarbon or chlorofluorocarbon with a solid alkali in a liquid state to remove an acid component such as hydrogen halide, In addition, a compact refining plant can be realized and the refining cost can be reduced.

Claims (4)

ハロゲン化水素を含有するフルオロカーボン又はクロロフルオロカーボンを固体アルカリと液状で接触させてハロゲン化水素を除去する精製フルオロカーボン又はクロロフルオロカーボンの製造方法であって、固体アルカリが炭酸カルシウムであることを特徴とする精製フルオロカーボン又はクロロフルオロカーボンの製造方法。A method for producing a purified fluorocarbon or chlorofluorocarbon in which a hydrogen halide-containing fluorocarbon or chlorofluorocarbon is brought into contact with a solid alkali in a liquid state to remove the hydrogen halide, wherein the solid alkali is calcium carbonate Method for producing fluorocarbon or chlorofluorocarbon. ハロゲン化水素がフッ化水素である請求項1に記載の製造方法。The production method according to claim 1 , wherein the hydrogen halide is hydrogen fluoride . 固体アルカリと接触後のフルオロカーボン又はクロロフルオロカーボンを吸着材と液状で接触させて水分または二酸化炭素を除去する請求項1に記載の方法。  The method according to claim 1, wherein the fluorocarbon or chlorofluorocarbon after contact with the solid alkali is brought into liquid contact with the adsorbent to remove moisture or carbon dioxide. 吸着材が、ゼオライト、シリカゲル、活性アルミナ、活性白土、活性炭および高分子吸着材の群から選ばれる少なくとも少なくとも1種である請求項3に記載の方法。  The method according to claim 3, wherein the adsorbent is at least one selected from the group consisting of zeolite, silica gel, activated alumina, activated clay, activated carbon, and a polymer adsorbent.
JP37236399A 1999-12-28 1999-12-28 Method for producing purified fluorocarbon or chlorofluorocarbon Expired - Fee Related JP4552246B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108137448A (en) * 2015-08-19 2018-06-08 霍尼韦尔国际公司 Method for removing acidic impurities from halopropene

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6995292B2 (en) * 2002-09-16 2006-02-07 Eastman Chemical Company Process for reducing fluoride impurities resulting from use of fluorophosphite catalysts
US6846960B2 (en) * 2002-09-16 2005-01-25 Eastman Chemical Company Process for reducing fluoride impurities resulting from use of fluorophosphite catalysts
JP5044947B2 (en) * 2005-03-10 2012-10-10 三菱瓦斯化学株式会社 Method for producing carboxylic acid or carboxylic acid ester
CN100431689C (en) * 2006-12-21 2008-11-12 北京工业大学 Preparation method of composite adsorbent for removing nitrogen oxides
JP5834791B2 (en) 2011-11-11 2015-12-24 セントラル硝子株式会社 (E) Process for producing 1-chloro-3,3,3-trifluoropropene
JP6074670B2 (en) * 2016-04-05 2017-02-08 大石 哲也 Process for producing arene compounds containing perfluoroalkenyloxy groups
CN109937196B (en) * 2016-11-15 2022-08-16 Agc株式会社 Method for producing 1-chloro-2, 3, 3-trifluoropropene
JP6870778B1 (en) * 2020-12-11 2021-05-12 昭和電工マテリアルズ株式会社 Resin composition for molding and electronic component equipment

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5458674A (en) * 1993-08-24 1995-10-17 E. I. Du Pont De Nemours And Company Organic separation from HF
DE4205341A1 (en) * 1992-02-21 1993-08-26 Pharmpur Gmbh METHOD FOR CLEANING PERFLUOR CARBON AND USE OF CLEANED PERFLUOR CARBON
JPH0733695A (en) * 1993-07-23 1995-02-03 Central Glass Co Ltd Method for removing water from 1,1-dichloro-1-fluoroethane
JP3856409B2 (en) * 1997-05-08 2006-12-13 昭和電工株式会社 Method for purifying trifluoromethane
PT1109766E (en) * 1998-09-03 2005-02-28 Solvay Fluor & Derivate PURIFICATION OF 1,1,1,3,3-PENTAFLUOROBUTANE

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108137448A (en) * 2015-08-19 2018-06-08 霍尼韦尔国际公司 Method for removing acidic impurities from halopropene
CN108137448B (en) * 2015-08-19 2022-02-22 霍尼韦尔国际公司 Process for removing acidic impurities from halopropenes

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