JP4557262B2 - Gas dissolved water production equipment - Google Patents

Description

  The present invention is connected to a gas-liquid mixing pump for generating gas-liquid mixed water of gas and water, and a gas-liquid mixed water supply path from the gas-liquid mixing pump, so that the dissolved amount of gas with respect to water can be increased. The present invention relates to a gas-dissolved water production apparatus equipped with a simple mixer.

As a conventional gas-dissolved water production apparatus, a device having a fluid compression section with a narrowed flow path diameter and a fluid release section with a wide flow path diameter, and a mixer capable of increasing the dissolved amount of gas with respect to water is known. (For example, refer to Patent Document 1).
JP-A-8-155284 ([0011] FIGS. 1 and 4)

  By the way, the gas dissolved water manufactured by the gas dissolved water manufacturing apparatus mentioned above attracts attention in recent years as washing water of various workpieces. As a cleaning method, a multi-stage cleaning method in which a workpiece is sequentially moved to a plurality of cleaning tanks storing gas-dissolved water for cleaning is generally used. The gas-dissolved water used in each cleaning tank is, for example, the degree of contamination. It is preferable to vary the amount of dissolved gas according to the cleaning conditions.

  However, the conventional gas-dissolved water production apparatus described above has only one production line, and a plurality of types of gas-dissolved water having different gas-dissolved amounts can be produced by replacing the dissolution module provided in the production line. It was. That is, while any one of the gas-dissolved waters is produced, the production of the other gas-dissolved waters must be stopped, and a plurality of types of gas-dissolved waters cannot be produced at the same time.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a gas-dissolved water production apparatus capable of simultaneously producing a plurality of types of gas-dissolved water having different gas-dissolved amounts.

  A gas-dissolved water production apparatus according to the invention of claim 1 made to achieve the above object is connected to a water pipe and generates a deaerated water, and supplies a gas for dissolving in water. A gas supply device, a water supply path from the deaeration device, and a gas supply path from the gas supply device are connected together, and a gas-liquid mixing pump for generating gas-liquid mixed water of gas and water; It is connected to the gas-liquid mixed water supply path from the gas-liquid mixing pump and has a fluid compression section with a narrowed flow path diameter and a fluid release section with a wide flow path diameter to increase the dissolved amount of gas with respect to water In a gas-dissolved water production apparatus for producing gas-dissolved water by dissolving gas in water and providing a plurality of gas-liquid mixing pumps, a water supply path and gas supply from the degasser Divide the gas supply path from the equipment into multiple parts. It is connected to the liquid mixing pump, and it is possible to simultaneously produce multiple types of dissolved gas with different dissolved amounts by changing the flow path diameter of the fluid compression part in the plurality of mixers provided downstream of the plurality of gas-liquid mixing pumps It has the characteristics.

  The invention of claim 2 is characterized in that, in the gas dissolved water producing apparatus according to claim 1, the gas is hydrogen gas.

  According to a third aspect of the present invention, there is provided the gas-dissolved water producing apparatus according to the second aspect, wherein two gas-liquid mixing pumps are provided and hydrogen gas is dissolved in the first generation line including one gas-liquid mixing pump. Manufactures gas-dissolved water with an amount of 0.5-1.2 ppm, and produces gas-dissolved water with a dissolved hydrogen gas content of 1.3 ppm or more in the second generation line including the other gas-liquid mixing pump. It has the characteristic in the place comprised.

  According to a fourth aspect of the present invention, there is provided the gas dissolved water production apparatus according to the third aspect, wherein a mass flow controller is provided on the downstream side of the branch portion in the gas supply path from the gas supply device to generate the first system. The supply amount of hydrogen gas to water to the gas-liquid mixing pump in the line is set to 100 to 200 [ml / min], and the supply amount of gas to water to the gas-liquid mixing pump in the generation line of the second system is set to 250 to 500 [ ml / min].

  The invention of claim 5 is characterized in that, in the gas-dissolved water production apparatus according to claim 3 or 4, a defoaming device for removing bubbles in water is provided downstream of each mixer.

  The invention of claim 6 is characterized in that in the gas-dissolved water production apparatus according to any one of claims 1 to 5, a fluid compression section having a different flow path diameter can be replaced and attached to each mixer.

[Invention of Claim 1]
In the configuration of claim 1, a plurality of gas-liquid mixing pumps for generating gas-liquid mixed water of gas and water are provided, and a plurality of water supply paths from the deaeration device and a plurality of gas supply paths from the gas supply apparatus are provided. The gas-liquid mixing pump was branched and connected to each gas-liquid mixing pump, and a plurality of mixers were provided downstream of the gas-liquid mixing pumps. And by making the flow path diameters of the fluid compression sections in the plurality of mixers different, it is possible to simultaneously produce a plurality of types of gas-dissolved water having different dissolved amounts. Moreover, since the gas contained in water before mixing with gas is deaerated beforehand, it becomes easy to dissolve gas with respect to water, and the dissolved amount of gas can be raised more.

[Invention of claim 2]
Gas-dissolved water in which hydrogen gas is dissolved in water has different cleaning effects depending on the dissolved amount of hydrogen gas. That is, according to the gas dissolved water manufacturing apparatus of the present invention, a plurality of types of gas dissolved water having different cleaning effects can be manufactured simultaneously.

[Inventions of Claims 3 and 4]
If pre-cleaning is performed with gas-dissolved water with a dissolved hydrogen gas content of 0.5 to 1.2 ppm, and then cleaning with gas-dissolved water with a dissolved hydrogen gas content of 1.3 ppm or more, dirt is effective. Can be dropped. In the gas-dissolved water production apparatus of the present invention, gas-dissolved water having a dissolved amount of hydrogen gas of 0.5 to 1.2 ppm and gas-dissolved water having 1.3 ppm or more can be produced simultaneously. Here, in order to produce gas-dissolved water having a dissolved amount of hydrogen gas of 0.5 to 1.2 ppm, the supply amount of hydrogen gas to water to the gas-liquid mixing pump is set to 100 to 200 [ml / min], In order to produce gas-dissolved water in which the dissolved amount of hydrogen gas is 1.3 ppm or more, the gas supply amount to the gas-liquid mixing pump may be 250 to 500 [ml / min]. invention).

[Invention of claim 5]
Gas-dissolved water from which bubbles have been removed is suitable as cleaning water for ultrasonic cleaning.

[Invention of claim 6]
By replacing the fluid compression part of the mixer, the dissolved gas amount of the dissolved gas water can be changed. In addition, when the fluid compression section is damaged, other parts of the mixer are diverted and only the fluid compression section needs to be replaced, so that the running cost can be suppressed.

  Hereinafter, an embodiment according to the present invention will be described with reference to FIGS. The gas-dissolved water production apparatus 100 of this embodiment shown in FIG. 1 is for producing two types of gas-dissolved water GW1 and GW2 in which hydrogen gas is dissolved in water, and a water pipe through which water flows. 11 (corresponding to the “water supply path” of the present invention) in order from the upstream side, the pre-filter 18, the magnetic field applying device 17, the degassing device 25, the gas-liquid mixing pump 12, the mixer 10, and the defoaming device 19. It has.

  The pre-filter 18 filters tap water to remove foreign matters (such as rust) in the tap water.

  The magnetic field applying device 17 includes a magnet (for example, either an electromagnet or a permanent magnet) inside, and generates a magnetic flux penetrating the water pipe 11. And it is comprised so that water may pass the magnetic field by this magnetic flux. Thereby, it is estimated that the cluster size of water (the size of the aggregate of water molecules) is reduced.

  The deaeration device 25 has a configuration in which water is introduced into the vacuum module 25M, and the vacuum module 25M is evacuated by a vacuum pump 25P or the like to remove the water gas. Note that the deaeration device 25 is not limited to such a so-called vacuum deaeration device, and may be one utilizing ultrasonic vibration, for example.

  For example, the hydrogen gas supply device 13 generates hydrogen gas by electrolyzing water. For this purpose, a portion of the water pipe 11 downstream from the prefilter 18 and the hydrogen gas supply device 13 are connected by a water supply pipe. Hydrogen gas is supplied from the hydrogen gas supply device 13 to the gas-liquid mixing pumps 12 and 12 through a gas pipe 14 (corresponding to a “gas supply path” of the present invention). The hydrogen gas supply device 13 may be configured to generate hydrogen gas by reforming methanol or natural gas, or may be a commercially available hydrogen gas cylinder filled with hydrogen gas in advance.

  By the way, the gas dissolved water manufacturing apparatus 100 of this embodiment is based on two types of gas dissolved water GW1 and GW2 having different hydrogen gas dissolved amounts, that is, the first gas dissolved water GW1 and the first gas dissolved water GW1. In order to simultaneously produce the second gas-dissolved water GW2 in which the dissolved amount of hydrogen gas is high, the water pipe 11 is branched into two on the downstream side of the deaeration device 25. That is, on the downstream side of the deaeration device 25, a first generation line 11A for generating the first gas-dissolved water GW1 and a second system for generating the second gas-dissolved water GW2 are generated. Line 11B is provided. And the gas-liquid mixing pump 12, the mixer 10, and the defoaming device 19 are provided in each of the production lines 11A and 11B of these systems.

  The gas-liquid mixing pumps 12 and 12 provided in the generation lines 11A and 11B of each system have the same specifications. The gas-liquid mixing pump 12 supplies water at a predetermined flow rate (for example, 10 to 20 L / min) according to the setting of the constant flow valve 29 provided at the upstream end of the water pipe 11, and the hydrogen gas supply device 13 and each gas. A predetermined flow rate (for example, 0.1 to 0.5 L / min) and a predetermined pressure corresponding to the setting of the mass flow controller 28 provided on the downstream side of the branch portion of the gas pipe 14 connected between the liquid mixing pumps 12 and 12. The hydrogen gas is sucked at (for example, 0.2 to 0.4 MPa), the water and the hydrogen gas are stirred and mixed, and then pumped to the mixer 10 at a predetermined pressure (for example, 0.7 to 1.2 MPa). . In the process of passing through the mixer 10, the dissolved amount of hydrogen gas with respect to water is increased, and the first and second gas-dissolved waters GW1 and GW2 adjusted to a predetermined dissolved amount of hydrogen gas are produced. The first and second gas-dissolved waters GW1 and GW2 are subjected to ultrasonic cleaning after removing bubbles (for example, passing water through a nonwoven fabric or a membrane filter to separate the bubbles) with a defoaming device 19 having a known configuration. Supplied to the device 90.

  Specifically, the first gas dissolved water GW1 is supplied to the primary cleaning tank 91 for preliminary cleaning in the ultrasonic cleaning apparatus 90, and the second gas dissolved water GW2 is supplied to the primary cleaning tank 91. After the preliminary cleaning, the secondary cleaning tank 92 for finishing cleaning is supplied. Here, in the primary cleaning tank 91, ultrasonic vibration of a predetermined frequency (for example, 28 to 40 KHz) is applied while overflowing the first gas-dissolved water GW1, and the workpiece itself also swings with a predetermined swing width. Let In contrast, in the secondary cleaning tank 92, the same ultrasonic vibration (for example, 28 to 40 KHz) as that in the primary cleaning tank 91 is applied while overflowing the second gas-dissolved water GW2, but the work is not swung. It has become. Moreover, the mixer 10 provided in the production line 11A of the first system is configured so that the hydrogen gas dissolved amount of the generated first gas dissolved water GW1 is 0.5 to 1.2 ppm, and the second The mixer 10 provided in the generation line 11B of the system is configured such that the hydrogen gas dissolved amount of the generated second gas dissolved water GW2 is 1.3 ppm or higher, which is higher than that of the first gas dissolved water GW1. . Here, after the preliminary cleaning is performed with the first gas dissolved water GW1 having a relatively low hydrogen gas dissolved amount, the finish cleaning is performed with the second gas dissolved water GW2 having a relatively high hydrogen gas dissolved amount. As compared with the case where preliminary cleaning and finishing cleaning are performed only with any one kind of gas-dissolved water, it was visually confirmed that damage to the workpiece was suppressed and dirt could be effectively removed.

  In addition, pressure sensors 26 and 27 and flow rate sensors 60 and 61 are provided at predetermined portions of the piping provided in the gas dissolved water manufacturing apparatus 100. Further, valves (solenoid valve, motor valve, manual valve) are provided at predetermined positions of the water pipe 11 and the gas pipe 14.

  Further, the gas-dissolved water production apparatus 100 includes a water sampling pipe 21 branched from the water pipe 11 between the mixer 10 and the defoaming apparatus 19, and is not shown along with the constant flow valve 20 in the middle of the water sampling pipe 21. A pH meter, a redox potential meter, and a dissolved hydrogen meter are provided. Thereby, the water quality of the 1st and 2nd gas dissolved water GW1, GW2 produced | generated by each production | generation line 11A, 11B can be test | inspected. Moreover, the water remaining in the water pipe 11 can be drained by the water sampling pipe 21.

  Next, the mixer 10 will be described in detail. As shown in FIG. 2, the mixer 10 accommodates a metal (for example, stainless steel) mixing wall 40, an internal partition wall 42, and a sheet metal member 50 in a cylindrical body 30 made of metal (for example, stainless steel). It becomes. The mixers 10 and 10 provided in the generation lines 11A and 11B of the respective systems have the same specifications except for the sheet metal member 50.

  The cylindrical body 30 includes an inflow side pipe 32 and an outflow side pipe 33 at both end portions in the axial direction of a cylindrical body body 31. Each of these pipes 32, 33 has a circular shape smaller in diameter than the body main body 31, and a spiral portion 34 that is screwed into the water pipe 11 is formed on the inner peripheral surface thereof. These pipes 32 and 33 are connected in the middle of the water pipe 11 so that the gas-liquid mixed water of hydrogen gas and water pumped from the gas-liquid mixing pump 12 can pass through the mixer 10. The inner diameter of the inflow side pipe 32 is slightly smaller than the inner diameter of the outflow side pipe 33.

  More specifically, the body main body 31 is configured such that the flat ring-shaped end wall members 31B and 31B are addressed to both ends of the cylindrical member 31A open at both ends, and the cylindrical member 31A and the end wall members 31B and 31B are connected to each other. It is welded over the entire circumference. A cylindrical boss 36 is integrally formed at a radially outward position of the end wall member 31B, and the cylindrical boss 36 is fitted inside the end of the cylindrical member 31A. In addition, the cylindrical body 30 is configured so that the inflow side pipe 32 and the outflow side pipe 33 are respectively fitted in the holes 31C and 31C formed in the center of the end wall members 31B and 31B. It is welded over.

  As shown in FIG. 2, a mixing wall 40 is provided on the upstream end side of the body main body 31. As shown in FIG. 3A, the mixing wall 40 has a disk structure, and the outer diameter thereof is substantially the same as the inner diameter of the body main body 31 (cylindrical member 31A). Further, one circular first water passage hole 41 is formed through the central portion of the mixing wall 40. As shown in FIG. 3 (B), both opening edges 41K of the first water passage holes 41 have a tapered shape whose diameter is increased outward. Specifically, the maximum inner diameter D1 at both opening edges 41K of the first water passage hole 41 is, for example, 9 mm, and the minimum inner diameter D2 at the axial center portion of the first water passage hole 41 is, for example, 5 mm. . The taper angle θ1 at both opening edges 41K is about 45 degrees.

  As shown in FIG. 2, an inner partition wall 42 that is slightly thicker than the mixing wall 40 is provided in the body main body 31 on the downstream side of the mixing wall 40. As shown in FIG. 4A, the internal partition wall 42 has a disk structure similar to the mixing wall 40. That is, the outer diameter of the inner partition wall 42 is substantially the same as the inner diameter of the body main body 31 (cylindrical member 31A). A spiral hole 42N having a slightly larger diameter than the first water passage hole 41 of the mixing wall 40 is formed through the central portion of the inner partition wall 42 (see FIG. 4B).

  As shown in FIG. 2, the mixing wall 40 and the inner partition wall 42 are disposed so as to overlap each other with an interval in the axial direction of the cylindrical body 30 (body main body 31). Specifically, in the cylindrical body 30, between the upstream end wall member 31B and the mixing wall 40, between the mixing wall 40 and the internal partition wall 42, and between the internal partition wall 42 and the downstream end wall member. A flat cylindrical spacer 45 (for example, a stainless steel ring) is sandwiched between 31B. As a result, the mixing wall 40 and the internal partition wall 42 are fixed at an interval in the axial direction of the cylindrical body 30, and the interior of the body main body 31 is partitioned into a plurality of fluid passage areas in the axial direction.

  As shown in FIG. 2, a nozzle 55 is screwed into the spiral hole 42 </ b> N of the internal partition wall 42. The nozzle 55 has a cylindrical shape, and the tip portion reaches the inside of the outflow side pipe 33. Further, the inner diameter of the nozzle 55 is larger in the axial direction than the proximal end portion screwed into the spiral hole 42 </ b> N and the distal end portion disposed in the outflow side pipe 33.

  The nozzle 55 can be divided into a nozzle body 56 and a nozzle head 57 at a position near the tip. More specifically, a male spiral is formed on the outer peripheral surface of the nozzle body 56, and a coupling nut 58 engaged with the outer peripheral surface of the nozzle head 57 is screwed into the male spiral, whereby the nozzle main body 56 and the nozzle The head 57 is connected. And the outer edge part of the circular sheet-metal member 50 is clamped in the plate | board thickness direction between the front end surface of the nozzle main body 56, and the base end surface of the nozzle head 57. FIG.

  As shown in FIG. 5A, the sheet metal member 50 has a thin disk shape that is smaller in diameter and thinner (eg, 0.2 mm) than the mixing wall 40. A second water passage hole 51 having a diameter smaller than that of the first water passage hole 41 of the mixing wall 40 is formed at the center of the sheet metal member 50. And in the mixer 10 of this embodiment, all the water which passed the mixing wall 40 passes through this 2nd water flow hole 51. As shown in FIG. The mixing wall 40 and the sheet metal member 50 correspond to the “fluid compression section” according to the present invention, and the regions on the upstream and downstream sides of the mixing wall 40 and the sheet metal member 50 in the mixer 10 are “fluids” according to the present invention. Corresponds to "release part".

  The sheet metal member 50 is formed with a breaking groove 52 for breaking the sheet metal member 50 so as to widen the opening area of the second water passage hole 51 when the water pressure received from the upstream side exceeds a predetermined reference value. ing. The fracture groove 52 is formed on the surface facing the downstream side of the sheet metal member 50, and one end is connected to the opening edge of the second water passage hole 51 and extends outward in the radial direction. These breaking grooves 52 are arranged at positions where the sheet metal member 50 is divided into four equal parts in the circumferential direction, and the breaking grooves 52 adjacent in the circumferential direction are perpendicular to each other. As shown in FIG. 5B, the fracture groove 52 has, for example, a V-shaped cross section. Specifically, the sheet thickness of the sheet metal member 50 is 0.2 mm, the depth of the fracture groove 52 is about half of the sheet thickness of the sheet metal member 50 (about 0.08 to 0.1 mm), and the fracture groove 52 The taper angle θ2 is about 60 degrees.

  For example, if the second water passage hole 51 is clogged with foreign matter, crystal precipitation, or the like, the internal pressure of the water pipe 11 on the upstream side of the mixer 10 increases, and the water pipe 11 may be damaged or water may leak from the damaged portion. . On the other hand, according to the present embodiment, when the second water passage hole 51 is clogged and the water pressure received by the sheet metal member 50 is equal to or higher than a preset reference value, it is shown in FIGS. 6 (A) and 6 (B). As described above, the sheet metal member 50 is torn along the fracture groove 52 and plastically deformed downstream, and the opening area of the second water passage hole 51 is widened. Then, the clogging is eliminated and a large amount of water can pass through the sheet metal member 50, so that the internal pressure of the water pipe 11 decreases. Thereby, damage to the water pipe 11 and water leakage due to clogging of the mixer 10 can be prevented. Not only clogging of the second water passage hole 51 but also when water is excessively supplied to the mixer 10, the sheet metal member 50 is broken by water pressure as described above, and the water pipe 11 is damaged or leaked. It can be prevented in advance.

  By the way, each mixer 10 and 10 is equipped with several types of sheet-metal members 50 which varied the hole diameter (opening area) of the 2nd water flow hole 51 with respect to the nozzle 55, and in the gas dissolved water to manufacture The sheet metal member 50 can be selected from a plurality of types according to the target value of the dissolved hydrogen gas amount. In the present embodiment, in order to generate the first gas-dissolved water GW1 (hydrogen gas dissolved amount 0.5 to 1.2 ppm), the mixer 10 of the first generation line 11A has a first hole diameter of 3.0 mm. A sheet metal member 50 having two water passage holes 51 is assembled, and in order to generate the second gas-dissolved water GW2 (hydrogen gas-dissolved amount 1.3 ppm or more), the mixer of the generation line 11B of the second system 10 is assembled with a sheet metal member 50 having a second water passage hole 51 having a hole diameter of 2.0 mm. Here, the fact that the hydrogen gas dissolved amount is increased when the hole diameter of the second water passage hole 51 is reduced was proved by an experiment described later.

  The sheet metal member 50 can be replaced as follows. First, the mixer 10 is removed from the water pipe 11. Next, a dedicated rotary tool (not shown) is inserted from the outflow side pipe 33 of the mixer 10 to release the screw connection between the spiral hole 42N of the internal partition wall 42 and the nozzle 55, and the nozzle 55 is taken out from the cylindrical body 30. . Next, the connection nut 58 of the nozzle 55 is loosened and disassembled into the nozzle body 56 and the nozzle head 57, and a new sheet metal member 50 is set in place of the broken sheet metal member 50. When the nozzle body 56 and the nozzle head 57 are screwed together again, the outer peripheral edge of the sheet metal member 50 is sandwiched between the nozzle body 56 and the nozzle head 57 and fixed inside the nozzle 55. Finally, the nozzle 55 is inserted from the outflow side pipe 33 and screwed into the spiral hole 42N of the internal partition wall 42 with a rotary tool. Thus, the replacement work of the sheet metal member 50 is completed.

  The above is description of the structure of the gas dissolved water manufacturing apparatus 100 in this embodiment, and the effect | action and effect are demonstrated next. When the gas-dissolved water production apparatus 100 of the present embodiment is activated, tap water is flowed in the order of the pre-filter 18 and the magnetic field applying apparatus 17 and is deaerated by the deaerator 25. The degassed water flows into the production lines 11A and 11B of the first and second systems, respectively, and is sucked together with hydrogen gas by the gas-liquid mixing pumps 12 and 12 provided in the production lines 11A and 11B. Here, water is sucked at a predetermined flow rate (for example, 10 to 20 L / min) according to the setting of the constant flow valve 29.

  On the other hand, hydrogen gas is sucked into the gas-liquid mixing pumps 12 and 12 at a predetermined flow rate according to the settings of the mass flow controllers 28 and 28 provided in the production lines 11A and 11B of the respective systems. Specifically, hydrogen gas is supplied at 100 to 200 [ml / min] to the gas-liquid mixing pump 12 provided in the first generation line 11A, and the gas-liquid mixing provided in the second generation line 11B. Hydrogen gas is supplied to the pump 12 at 250 to 500 [ml / min]. Then, hydrogen gas and water are stirred and mixed by each gas-liquid mixing pump 12, 12, and the gas-liquid mixed water mixed with hydrogen gas is pumped toward the mixer 10 at a predetermined pressure.

  The gas-liquid mixed water mixed with the hydrogen gas flows into the mixer 10 and collides with the mixing wall 40. The water that collides with the mixing wall 40 is pressurized by being pushed into the first water passage holes 41 formed in the mixing wall 40.

  The water that has passed through the first water passage holes 41 of the mixing wall 40 flows into the fluid passage area between the mixing wall 40 and the internal partition wall 42. The pressure applied to water in this fluid passage area is reduced.

  The water flowing into the fluid passage area between the mixing wall 40 and the inner partition wall 42 is pressurized again by being pushed into the nozzle 55 connected to the inner partition wall 42, and the sheet metal member 50 provided in the nozzle 55. Further pressure is applied when passing through the second water passage hole 51. And if it passes the sheet-metal member 50, the pressure concerning water will be pressure-reduced. Thus, in the process of passing through the mixer 10, the pressure applied to the water mixed with the hydrogen gas is repeated. Thereby, the dissolved amount of hydrogen gas with respect to water is increased, and two types of gas-dissolved waters GW1 and GW2 having different hydrogen gas dissolved amounts are produced simultaneously. That is, in the first system generation line 11A, the first gas dissolved water GW1 in which the hydrogen gas dissolved amount is adjusted to 0.5 to 1.2 ppm is generated, and in the second system generation line 11B, the hydrogen gas dissolved The second gas-dissolved water GW2 whose amount is adjusted to 1.3 ppm or more is generated. Here, the first and second gas-dissolved waters GW1 and GW2 each have an extremely low value (approximately about the ORP) compared to tap water because hydrogen gas is dissolved. −600 mV). That is, the reducing property is strong.

  Bubbles may exist in the gas dissolved water GW1 and GW2 immediately after passing through the mixer 10, but the bubbles interfere with the propagation of ultrasonic waves and reduce the cleaning effect. It is not preferable to. In contrast, in the gas-dissolved water production apparatus 100 of the present embodiment, the bubbles in the first and second gas-dissolved waters GW1 and GW2 generated in the generation lines 11A and 11B of the respective systems are removed from the bubbles 19 and 19. Can be removed. And if the valve | bulb 24 with which each production line 11A, 11B was opened, the 1st and 2nd gas dissolved water GW1, GW2 will be the primary washing tank 91 and the secondary washing tank 92 of the ultrasonic cleaning apparatus 90. And supplied at the same time. This prevents the gas dissolved waters GW1 and GW2 from being insufficient even if the cleaning is performed while the gas dissolved waters GW1 and GW2 are overflowed in the respective cleaning tanks 91 and 92.

  In addition, as a workpiece | work which becomes washing | cleaning object by gas dissolved water GW1, GW2 of this embodiment, a medical device and industrial parts (For example, a semiconductor component, an optical system lens, a glass mold, a metal component) are mentioned. It can also be used for pipe cleaning and the like.

  As described above, according to the present embodiment, the first generation line 11A and the second line in which the water pipe 11 provided with the degassing device 25 and the gas pipe 14 from the hydrogen gas supply device 13 are connected together. A gas-liquid mixing pump 12 and a mixer 10 are provided in each of the generation lines 11B of the system, and the hole diameter of the second water passage hole 51 of the mixer 10 provided in the generation line 11A of the first system is set to be that of the second system. By making it larger than the hole diameter of the second water passage hole 51 of the mixer 10 provided in the generation line 11B, the second dissolved gas amount is larger than the first gas dissolved water GW1 and the first gas dissolved water GW1. Two types of gas dissolved water with gas dissolved water GW2 can be manufactured simultaneously. Thereby, these two types of gas-dissolved water GW1 and GW2 can be stably supplied to each of the cleaning tanks 91 and 92 of the ultrasonic cleaning apparatus 90 that performs cleaning separately for preliminary cleaning and finishing cleaning. Moreover, since the water before mixing with hydrogen gas is deaerated beforehand, it becomes easy to dissolve hydrogen gas in water, and the dissolved amount of hydrogen gas can be further increased.

  In addition, since a plurality of types of sheet metal members 50 having different diameters of the second water passage holes 51 are provided and the sheet metal members 50 can be replaced with respect to the mixer 10, the gas can be changed by changing the type of the sheet metal members 50. The dissolved hydrogen gas amount can be changed. Further, when the sheet metal member 50 is damaged, the other components of the mixer 10 are diverted and only the sheet metal member 50 needs to be replaced, so that the running cost can be suppressed.

  In addition, since the gas dissolved water GW1 and GW2 in which hydrogen gas is dissolved have a strong reducing property (ORP is low) compared to tap water, when a metal workpiece is washed with the gas dissolved water GW1 and GW2, Compared with the case of washing with tap water, it is possible to suppress the occurrence of rust after washing.

[Example 1]
In order to investigate the relationship between the hole diameter of the second water flow hole 51 of the mixer 10 and the dissolved amount of hydrogen gas, the following experiment was performed. That is, while changing the hole diameter of the 2nd water flow hole 51 in the range of 2.0-3.0 mm, the supply pressure of the water to the mixer 10 is 0.8 Mpa, and the hydrogen gas supply amount to the gas-liquid mixing pump 12 is changed. Gas dissolved water was actually produced at a constant rate of 250 ml / min, and the hydrogen gas dissolved amount of the gas dissolved water was measured. In addition, the production amount per unit time, pH, and ORP were also measured. The pH of water (tap water) before dissolving hydrogen gas is 6.83, and ORP is +294 mV.

[Experimental result]

  As shown in Table 1, as the diameter of the second water passage hole 51 was reduced, the dissolved hydrogen gas amount increased. Specifically, the minimum value was 1.145 ppm when the hole diameter was 3.0 mm, and the maximum value was 1.431 ppm when the hole diameter was 2.0 mm. Here, it was found that the dissolved hydrogen gas amount was 1.3 ppm or more when the pore diameter was 2.8 mm or less.

  It was found that the production amount of gas dissolved water per unit time increases as the diameter of the second water passage hole 51 is increased. Specifically, when the hole diameter is the minimum 2.0 mm, the production amount per minute was 5.5 L, whereas when the hole diameter is the maximum 3.0 mm, 1 minute. The production amount per unit was doubled to 11.0 L.

  The ORP of the gas-dissolved water was almost constant (−592 to −609 mV) regardless of the diameter of the second water passage hole 51. Moreover, although pH rose from the water (tap water) before melt | dissolving hydrogen gas irrespective of the hole diameter of the 2nd water flow hole 51, all were maintaining neutrality. Specifically, the pH was 7.40 when the pore diameter was 3.0 mm, and the other pore diameters were almost constant (pH 7.90 to 7.98).

[Other Embodiments]
The present invention is not limited to the above-described embodiment. For example, the embodiments described below are also included in the technical scope of the present invention, and various other than the following can be made without departing from the scope of the invention. It can be changed and implemented.

  (1) In the first and second embodiments, the magnetic field applying device 17 and the prefilter 18 are provided, but these may not be provided.

  (2) In the above embodiment, only one mixer 10 is provided in each of the generation lines 11A and 11B of each system, but a plurality of mixers 10 may be connected in series or in parallel.

  (3) A water storage tank for storing tap water may be provided, and the water pipe 11 may be connected thereto. In this way, the pressure of water supplied to the gas-liquid mixing pump 12 and further the pressure applied to the mixer 10 become constant, and it becomes possible to produce more stable gas-dissolved water.

  (4) In the above embodiment, the manufactured gas dissolved water GW1 and GW2 are directly supplied to the ultrasonic cleaning device 90, but may be temporarily stored by providing a generated water tank. The product water tank is preferably sealed but may be open. This prevents hydrogen gas from staying in the generated water tank.

  (5) A control device that automatically controls the supply amount of hydrogen gas based on the measured value of the dissolved hydrogen meter provided in the water sampling pipe 21 may be provided.

  (6) A circulation pipe for circulating the generated gas dissolved water GW1 and GW2 may be provided so that the gas dissolved water GW1 and GW2 pass through the mixer 10 a plurality of times.

  (7) A dechlorination device for removing residual chlorine in tap water and a soft water device for removing metal ions may be provided upstream of the gas-liquid mixing pump 12.

  (8) The gas dissolved in water is not limited to hydrogen gas, but may be oxygen, ozone, carbon dioxide, ammonia, or the like.

  (9) In the above embodiment, the gas dissolved water production apparatus 100 capable of producing two types of gas dissolved water having different amounts of dissolved gas is exemplified. However, three or more gas-liquid mixing pumps and mixers are provided to generate three or more systems. It is good also as a line being comprised and being able to manufacture three or more types of gas dissolved water from which a gas dissolved amount differs.

The conceptual diagram of the gas dissolved water manufacturing apparatus which concerns on one Embodiment of this invention. Cross section of mixer (A) Plan view of mixing wall, (B) Cross section of mixing wall (A) Plan view of internal partition, (B) Cross section of internal partition (A) Plan view of sheet metal member, (B) Cross section of sheet metal member (A) Plan view of a broken sheet metal member, (B) XX sectional view in FIG. 6 (A)

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Mixer 11A 1st generation line 11B 2nd generation line 12 Gas-liquid mixing pump 19 Deaerator 25 Deaerator 40 Mixing wall (fluid compression part)
50 Sheet metal member (fluid compression part)
100 Gas dissolved water production apparatus GW1 1st gas dissolved water GW2 2nd gas dissolved water

Claims (6)

A degassing device connected to a water pipe to generate degassed water;
A gas supply device for supplying a gas for dissolving in the water;
A gas-liquid mixing pump that connects a water supply path from the degassing apparatus and a gas supply path from the gas supply apparatus together to generate gas-liquid mixed water of the gas and the water;
The gas-liquid mixed water from the gas-liquid mixing pump is connected to a supply path, and has a fluid compression section with a narrowed flow path diameter and a fluid release section with a wide flow path diameter to reduce the dissolved amount of the gas with respect to the water. A gas-dissolved water production apparatus for producing gas-dissolved water by dissolving the gas in the water,
A plurality of the gas-liquid mixing pumps are provided, and a water supply path from the deaeration device and a gas supply path from the gas supply device are respectively branched into a plurality and connected to the gas-liquid mixing pumps, A plurality of types of gas-dissolved waters having different dissolved amounts can be produced simultaneously by changing the flow path diameters of the fluid compression portions in the plurality of mixers provided downstream of a plurality of gas-liquid mixing pumps. Gas dissolved water production equipment.   The gas-dissolved water production apparatus according to claim 1, wherein the gas is hydrogen gas.   Two gas-liquid mixing pumps are provided, and in the first generation line including one gas-liquid mixing pump, gas-dissolved water having a dissolved hydrogen gas content of 0.5 to 1.2 ppm is produced. 3. The gas according to claim 2, wherein gas dissolved water having a dissolved amount of the hydrogen gas of 1.3 ppm or more is produced in a generation line of a second system including the other gas-liquid mixing pump. Dissolved water production equipment.   In the gas supply path from the gas supply device, a mass flow controller is provided on the downstream side of the branch portion, and the amount of hydrogen gas supplied to water to the gas-liquid mixing pump of the generation line of the first system is set to 100. The gas supply amount to the gas-liquid mixing pump of the second system generation line is 250 to 500 [ml / min], and is set to 250 to 500 [ml / min]. The gas dissolved water manufacturing apparatus of description.   The gas-dissolved water production apparatus according to claim 3 or 4, further comprising a defoaming device for removing bubbles in water downstream from each mixer.   The gas-dissolved water production apparatus according to any one of claims 1 to 5, wherein the fluid compression unit having a different flow path diameter can be replaced and attached to each mixer.