JP4577889B2 - Substrate processing apparatus, display method for substrate processing apparatus, and data analysis method for substrate processing apparatus - Google Patents

Description

  The present invention relates to a substrate processing apparatus such as crystal, liquid crystal, and semiconductor, and more particularly to a substrate processing apparatus in which the cause of a trouble is specified by a key log.

  In general, an apparatus controller is connected to the substrate processing apparatus, and the actuators of machinery, heat treatments, source gas supply system, and vacuum exhaust system are controlled by the controller. When changing the parameters of the program of the device controller of the substrate processing device, for example, a user or a maintenance engineer connects the key input device and the monitor to the device controller, and displays the program setting or changing portion on the monitor. Edit the parameters. At this time, the setting or change of the program by the user or maintenance engineer is saved as a key log in a storage unit such as a memory of the operation unit of the apparatus controller or a hard disk. The device controller is a computer to which a program such as a recipe related to substrate processing is supplied from an upper management computer in a semiconductor manufacturing system.

FIG. 19 is a functional block diagram of the operation unit of the apparatus controller 300. When a user or maintenance engineer calls a program using a key input device and enters a parameter such as a command or a number in the program sequence or sequence edit part, the key log of the key operated from the call to the confirmation is entered into the key log collection input module 301. The collected key logs are written to the SRAM (not shown) in the order of collection by the key log data SRAM writing module 302. In this case, the key log is written in the SRAM in a program language that the device controller 300 can understand. When the device controller 300 is shut down and restarted, the restart processing module 303 after the shutdown reads the key log from the SRAM and stores it as additional data in the hard disk (HD).
The module is a program module that uses hardware resources of the device controller 300. Hereinafter, the module is used in this sense.

In this way, the key log used to set or change the program is saved in storage means such as memory or hard disk, so it is possible to identify the cause of the trouble by analyzing the key log, but the latest key log is stored on the hard disk. Since the device controller is shut down and started up again, the key log on the hard disk is used for trouble analysis without shutting down and restarting the device controller when analyzing the key log. When using this data, there is a problem that the cause of the trouble cannot be specified.
The key log is written on the hard disk in a special programming language that can be understood by the device controller, so that it can be converted to text data by a special editing tool on the computer in order to convert it into characters and numbers that can be understood by humans. However, there is a problem that this takes a lot of time and effort.
Furthermore, even if the editing tool converts the text data of the key log, the converted data is simply a sequence of letters, numbers, and symbols, so that it takes a long time to complete the analysis. is there.

  Therefore, on the editing screen, a technique to be solved in order to make it possible to understand the contents of editing at a glance without converting a part edited by the key (hereinafter referred to as an editing part) with a tool on a computer. The present invention aims to solve this problem.

The first invention is a display means for displaying an edit screen for a program relating to substrate processing, and a key log saving means for saving the edited edit screen displayed on the display means and edited by a key in the storage means in association with the key log. , The previous screen key for calling the edited screen after editing from the storage means in reverse order and the previous screen key for calling in reverse order, and the screen display format of the portion edited by the key in the edited portion of the edited screen after editing, The present invention provides a substrate processing apparatus comprising display format changing means for changing the display to be distinguishable from other display portions of the editing screen. Here, the storage means is a memory, a hard disk, or the like, and the program related to the substrate processing is a program related to the substrate processing from substrate reception to dispensing. The edit screen is a screen having information for visually displaying information such as what screen is to be edited, etc., and characters and numbers are input for setting or changing the program. Although it is a screen provided with an edit part (input part) in a cell or dialog format, it may be a screen displaying characters and figures relating to the contents in order to promote visual understanding.
According to the first aspect of the present invention, an editing screen is called up on the display means, and a program sequence setting part and parameters are input to the editing part of the editing screen by means of keys.
When this editing screen is closed, the setting or change of the editing portion is reflected in the program.
The key log storage means stores the edited edit screen in the storage means in association with the key log of the key, and the display format change means stores the edited portion of the edit screen and other display portions in association with each other after editing. Save to means. Then, the display format changing means changes the screen display format of the part edited by the key in the edited part of the edited edit screen stored in the storage means so that it can be distinguished from other display parts of the same edit screen. To do.
After editing the edit screen, troubles due to settings or changes occur. When identifying the cause or confirming the change of settings, use the next screen key and the previous screen key to edit after saving from the storage means. The screen is displayed on the display means. At this time, the edit screen has information for displaying what the edit screen is, and the edit portion is visually displayed on the display means as characters and numbers that can be directly understood by the user and the maintenance engineer. Since the screen display format of the part edited by the key in the editing part has been changed to be distinguishable from other display parts of the same editing screen, the editing part of the editing face is converted with a tool on the computer. You can understand the contents of the editing at a glance without doing it.

  According to a second aspect of the present invention, the display format changing means displays a portion edited by the key among the editing portions by one display selected from blink display, color-coded display, and reverse display. Is to provide. In any display format, the edit portion is clearly distinguished from the other display portions of the edit screen to stimulate the operator's vision.

  Further, the third invention includes a step of displaying an edit screen of a program related to substrate processing, a step of saving an edited edit screen displayed on the display means and edited by a key in a storage means in association with a key log, A step of changing a screen display format of a portion edited by the key among edit portions of the edited edit screen stored in the storage means so as to be distinguishable from other display portions of the edit screen; and And a step of calling an edit screen in the order of storage or reverse order.

  According to a fourth aspect of the present invention, in the third aspect of the present invention, there is provided a substrate processing program verification method including a step of changing the editing portion by one display selected from blink display, color-coded display, and reverse display. Is.

In summary, according to the present invention, the following excellent effects are exhibited.
(1) According to the first aspect of the present invention, after editing a program related to substrate processing, the contents and history of settings and changes can be understood at a glance.

(2) Also, since attention is concentrated on the edited portion of the editing screen after editing by the key, work efficiency when grasping the contents and history of settings and changes is greatly improved.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

  First, the configuration and operation of the substrate processing apparatus according to the present invention will be described with reference to FIGS. In this embodiment, the substrate processing apparatus is a vertical substrate processing apparatus (hereinafter referred to as a processing apparatus) that performs diffusion processing, CVD processing, or the like on a substrate such as crystal, glass, or semiconductor substrate. FIG. 1 is a perspective view of the processing apparatus. FIG. 2 is a side sectional view of the processing apparatus of FIG. 1 as viewed from the side. In the present embodiment, the quantities and materials are basically merely examples, and the present invention is not limited thereby. The controller described below may be configured by a computer.

  As shown in FIG. 1, a pod (substrate container) 100 containing a wafer (substrate) 200 made of silicon or the like is inserted into the case 101 from the outside on the front surface of the case 101 of the processing apparatus 90. On the other hand, an I / O stage (holding member transfer member) 105 is attached to pay out from the inside of the casing 101 to the outside.

  A cassette shelf (mounting means) 109 for storing the pod 100 inserted into the housing 101 from the I / O stage (holder holding member) 105 is laid in the housing 101. In addition, an N 2 purge chamber (airtight chamber) 102 serving as a loading / unloading space for a boat (substrate holding means) 217, which will be described later, is provided in the casing 101.

  When processing the wafer 200, the inside of the N 2 purge chamber 102 becomes a sealed container and is filled with an inert gas such as N 2 gas in order to prevent a natural oxide film on the wafer 200.

  As the pod 100, the FOUP type is currently used in the mainstream, and the wafer 200 is isolated from the atmosphere by closing the opening provided on one side of the pod 100 with a lid (not shown). The wafer 200 can be transferred into and out of the pod 100 by removing the lid.

A pod opener (opening / closing means) 108 is provided on the front side of the N2 purge chamber 102 so that the lid of the pod 100 is removed and the pod 100 and the N2 purge chamber 102 communicate with each other.
The pod 100 is transported between the pod opener 108, the cassette shelf 109, and the I / O stage 105 by a cassette transfer machine 114. Air that has been cleaned by a clean unit (not shown) provided in the casing 101 is caused to flow in the transport space of the pod 100 by the cassette transfer device 114.

Inside the N2 purge chamber 102, a boat 217 for loading a plurality of wafers 200 in multiple stages, a substrate alignment device 106 for adjusting the position of the notch (or orientation flat) of the wafers 200 to an arbitrary position, and a pod opener 108 A wafer transfer device (conveying means) 112 that conveys the wafer 200 between the pod 100, the substrate alignment device 106, and the boat 217 is provided.
Further, a processing furnace 202 for processing the wafer 200 is provided at the upper part of the N 2 purge chamber 102, and the boat 217 is loaded into the processing furnace 202 by the boat elevator (lifting means) 115, or from the processing furnace 202. Unloaded.

Next, the operation of the processing apparatus 90 of the present invention will be described with reference to FIGS.
First, the pod 100 conveyed from the outside of the housing 101 by a wafer transfer machine (not shown) such as AGV or OHT is placed on the I / O stage 105. The pod 100 placed on the I / O stage 105 is directly transferred onto the pod opener 108 by the cassette transfer machine 114 or once stocked on the cassette shelf 109 and then onto the pod opener 108. Be transported.
The lid of the pod 100 is removed by the pod opener 108 from the pod 100 transferred onto the pod opener 108. At this time, the inside of the pod 100 and the N 2 purge chamber 102 communicate with each other, and the inside of the pod 100 is replaced with the N 2 atmosphere.

  Next, the wafer 200 is taken out from the pod 100 by the wafer transfer device 112. The taken-out wafer 200 is first aligned by the substrate alignment device 106 with reference to the notch (or orientation flat), and then transferred to the boat 217 by the wafer transfer device (transfer means) 112.

When the transfer of the wafer 200 to the boat 217 is completed, the furnace port shutter 116 of the processing furnace 202 is opened, and the boat 217 loaded with the wafer 200 is loaded into the processing furnace 202 by the boat elevator 115.
After loading, an arbitrary process such as a CVD process or a diffusion process is performed on the wafer 200 in the processing furnace 202. After the processing of the wafer 200, the wafer 200 and the pod 100 are paid out to the outside of the housing 101 in the reverse order of the above-described procedure.

FIG. 3 is a block diagram of an apparatus controller for automating the processing apparatus 119. The device controller 220 includes an operation unit 221 and a control unit 222, and an operation controller 223 for setting or changing a program is connected to the control unit 222 via a data transmission / reception module 224 so as to be communicable.
Although not shown in detail in FIG. 3, the control unit 222 includes a temperature controller (not shown) that feedback-controls the temperature of the heater based on the heating temperature of a heating device such as a thermocouple, and a pressure sensor detection. Based on a pressure controller (not shown) that feedback-controls the pressure of the processing furnace based on the temperature, a massflow controller (not shown) that feedback-controls the flow rate of the source gas based on the massflow monitor, and a position and rotation angle sensor And a mechanism controller (not shown) that controls various mechanisms, and is communicably connected to a main controller (not shown) for managing these mechanisms and an operation controller 223 of the operation unit 221. The mechanism controller includes the pod opener (opening / closing means) 108, the cassette transfer device 114, the substrate alignment device 106, the substrate alignment device 106, the wafer transfer device (transport means) 112, the boat. A controller for controlling an actuator (driving unit) such as an elevator (elevating means) 115, and a control sequence (program sequence) and parameters are read from, for example, a storage means such as a memory 225 of the operation controller 223 or a hard disk 226. It is. Further, the operation controller 223 includes a monitor (display means) 227 and a key input device 228 as a user interface for setting and changing a program sequence and parameters related to substrate processing of the processing apparatus 90.

  The key input device 228 includes a plurality of program buttons displayed on a monitor (display means) 225. Here, the “program button” is a key on the software that is displayed on the screen of the monitor (display means) 227 and switches between starting and ending the program when touched with a finger or a pen. It should be noted that the buttons and keys described below mean keys configured by software.

FIG. 4 shows a monitor screen of a program related to substrate processing, which is a screen called a PM main monitor screen. FIG. 4 shows a screen when the PM button 1 is touched. As shown in the figure, the operation panel 8 at the bottom of the PM main monitor screen 30a has a PM button 1, a system button 2, a return button 3, a forward button 4, an edit button 5, a data log button 6, a setup key as call keys. Operation buttons such as button 7 are arranged. A total of five panels including a gas panel 9, a temperature panel 10, a pressure panel 11, an AUX panel 12, and a recipe panel 13 are displayed above the operation panel 8. In each of the panels 9 to 13, cells (described later) are displayed as editing portions to be edited by an editing key 14 described later. Since FIG. 4 is a stage before editing, zero is displayed in each cell (described later).
On the gas panel 9, the temperature panel 10, the pressure panel 11, the AUX panel 12, and the recipe panel 13, characters and icons are displayed as information that visually complements the contents of the panels. These panels 9 to 13 or the icons on the panels are program keys for switching the screen to a related screen when touched with a finger or a pen.
On the gas panel 9 which is a monitor screen of the raw material gas flow rate, a mass flow controller abbreviation (mfc) on one side and the other side across the cell 15, a button 16 for displaying the number indicating the arrangement destination, and a character indicating the unit of flow rate (Slm) is displayed.
As with the gas panel 9, the temperature panel 10, which is a monitor screen of the furnace temperature, has a temperature zone of the furnace temperature in the process furnace 202 on one side with a graphic display 17 indicating the structure of the process furnace 202 interposed therebetween. u, cu, c, cl, l are arranged in a vertical row, and cells 18 for displaying the furnace temperature in each temperature zone of u, cu, c, cl, l are arranged in a vertical row on the other side. . The temperature panel 10 is provided with a cell 19 for displaying a temperature control mode.

  On the pressure panel 11 which is a monitor screen of the furnace pressure, cells 20 for displaying the furnace pressure of the processing furnace 202 and cells 21 and 22 for displaying control methods and commands are displayed.

  “APC valve control” is displayed in the cell 21 for monitoring the control method of the pressure panel, and “pressure setting” is displayed in the command cell 22. The APC valve control is a control system that detects the pressure in the furnace and feedback-controls the opening degree of a pressure control valve (Pirani meter) in which the furnace pressure is automatically held at a set pressure.

The recipe panel 13 includes a cell 23 that displays the current recipe that is currently used, a cell 24 that indicates the remaining time, a cell 25 that indicates the hold time, a cell 26 that indicates the disclosure time, and a cell that indicates the end time. 27 etc. are provided.
The AUX panel 12 is a panel for complementing the substrate processing, for example, a panel for monitoring the flow rate of water vapor due to external combustion. The AUX panel 12 is also provided with a plurality of cells 80 for monitoring a plurality of set points.

  5 shows a gas list monitor screen 28, FIG. 6 shows a temperature main monitor screen 29, FIG. 7 shows a pressure monitor screen 30, FIG. 8 shows an AUX list monitor screen 31, FIG. 9 shows a recipe progress monitor screen 32, This is a screen that appears on the monitor 227 when the temperature panel 10, the pressure panel 11, the AUX panel 12, the recipe panel 13, or the icons of these panels are touched. The recipe panel 13, the gas panel 9, the temperature panel 10, the pressure panel 11, the AUX panel 12, the gas list monitor screen 28, the temperature main monitor screen 29, the pressure monitor screen 30, the AUX list monitor screen 31, and the recipe progress monitor screen 32. Is stored in, for example, the memory 225 of the operation unit 221 or the hard disk 226.

The gas list monitor screen 28 in FIG. 5, the temperature main monitor screen 29 in FIG. 6, the pressure monitor screen 30 in FIG. 7, the AUX list monitor screen 31 in FIG. 8, and the recipe progress monitor screen 32 in FIG. Similar to the screen 33, the operation panel 8 is displayed at the bottom of the screen.
The editing button 5 on the operation panel 8 is a button that enables editing of the editing portion by the editing key 14 when touched.
The edit key 14 is composed of, for example, a character / number table provided at the top of the screen. First, a cell is specified, and then characters are touched by touching a plurality of characters or numbers displayed in the character / number table. Or a number is input to each cell described above.
The characters and numbers selected from the character / number table become the previously set cell setting or change data, and are reflected in the program relating to the substrate processing as setting, changing or parameters of the sequence, respectively.
Accordingly, the gas list monitor screen 28, the temperature main monitor screen 29, the pressure monitor screen 30, the AUX list monitor screen 31, and the recipe progress monitor screen 32 are displayed when the editing key 14 is touched. This is a program editing screen for processing, and the cells on each screen are editing portions to be set or changed by the user or program engineer. Of course, the editing part includes not only cells but also dialogs and pop-up windows.

In the gas list monitor screen of FIG. 5, the set value cell 37 for setting the flow rate (slm) of the mass flow controllers (mfc07 to mfc13) corresponds to the editing portion. In the temperature main monitor screen 29 of FIG. The cell 38 for setting the furnace temperature of each zone of u, cu, c, cl, and l and the cell 39 for setting the ramp rate correspond to the editing portion.
Further, in the pressure monitor screen 30 of FIG. 7, the control method cell 40, the control mode monitor cell 41, the setting 42, and the pressure command cell 43 correspond to the editing portion, and in the AUX list monitor screen 31 of FIG. For example, the cell 44 for setting the flow rates (slm) of hydrogen and oxygen from AUX07 to AUX12 corresponds to the editing portion. Here, hydrogen and oxygen are used for generating water vapor for annealing.

In the recipe progress monitor screen of FIG. 9, for example, a cell for setting a step name and a remaining step time and a cell for setting a recipe start time, skip time, and hold time are editing portions.

Next, the configuration of the operation controller 223 will be described with reference to FIGS.
As shown in FIG. 3, the operation controller 223 includes a key log collection input module 50 that collects key logs, a key log data in-memory write module 51, a memory → HD (hard disk) write module 52, key log data, and a screen. A file link display module 54 and a key log data search module 55 are provided.
Here, as shown in FIG. 10, the key log collection input module 50 is a module that sequentially collects the key logs of the call keys of the edit screen, and the key log data memory write module 51 is the key log collection input module 50. This is a module for executing in-memory key log collection processing for sequentially writing and storing collected key logs in a memory. The memory → HD (hard disk) writing module 53 is a module for executing processing for reading the key log written in the memory 225 from the memory 225, sequentially writing it in the hard disk 226, and storing it. The screen file link display module 54 is a module that stores the screen log in association with each other in order to combine the edited screen of the processing device with the key log data. The key log data search module 55 is a module that searches for key log data using a search key, which will be described later, and calls the edit screen data associated with the data.
For example, the key log includes a key log operated using each button arranged on the operation panel 8, the gas panel 9, the temperature panel 10, the pressure panel 11, the AUX panel 12, the recipe panel 13 or an icon as a call key. Applicable examples of the edit screen include the gas list monitor screen 28, the temperature main monitor screen 29, the pressure monitor screen 30, the AUX list monitor screen 31, and the recipe progress monitor screen 32.
For this reason, the key log storage means comprising the key log data in-memory writing module 52 and the memory → HD (hard disk) writing module 53 includes the gas panel 9, temperature panel 10, pressure panel 11, AUX panel 12, recipe panel 13 or icon. Etc. (see FIG. 4) as key keys, the edited gas list monitor screen 28 (FIG. 5), temperature main monitor screen 29 (FIG. 6), pressure monitor screen 30 (FIG. 7), AUX list monitor, respectively. The screen 31 (FIG. 8) and the recipe progress monitor screen 32 (FIG. 9) are associated and stored in the storage means (memory 225, hard disk 226) of the operation controller 223, and key log data and screen file links as display format change means The display module 54 includes the memory 225 and the hard disk 226. After saving the editing screen edited, the screen display format of the edit portion of the editing screen after editing (cell) is distinguishable change the other display portion of each editing screen. In this case, the display format change mode is preferably blink display, color-coded display, or reverse display. However, the editing area is surrounded by a frame and highlighted, or parameters and commands are displayed in bold. You may make it display distinguishing from a part.
When the display format is changed in this way, the visual attention of the user or maintenance engineer is naturally concentrated on the editing portion, so that the cause of the trouble can be identified in a short time.
Further, the operation controller 223 according to the present embodiment always saves the edited edit screen in the hard disk 226 in association with the key log using the icons of the panels 9 to 13 or the panels 9 to 13 as call keys. The latest key log is not removed from the analysis target as in the past.
Furthermore, since the attention of the user and maintenance engineer is gathered in the editing part, the editing screen after editing using the preview key (previous screen key) and next key (next screen key) without using the search key described later Even when calling, the cause of the trouble can be identified in a short time.

In addition, since a database searchable by the search key is constructed in the hard disk 226 as the storage means, for example, the results obtained by the date search, the search using the person name (user or maintenance engineer) as the search key, If the search is narrowed down by temperature or the like, the cause of the trouble can be identified in a shorter time.
FIG. 11 shows an example of a data log menu screen used for searching the storage means of the device controller 220 using the search key and for calling up the edited edit screen.
The data log menu screen 60 is a screen displayed on the monitor 227 that is integral with or separate from the device controller 220 when the data log button 6 on the PM monitor main screen 30a described in FIG. 4 is touched.
When the OU logging information button 61 is touched on the data log menu screen 60, the screen of the monitor 227 is switched to the OU logging menu screen 62 shown in FIG. When the key log button 63 is touched on the OU logging menu screen 62, the screen of the monitor 227 is switched to the key log analysis list screen 64 shown in FIG.
In this screen, Mon \ MonPMMainPress will change the screen to the pressure monitor screen.
Mon \ MonPMMainAUXSmallPanel displays the AUX list monitor screen.
Mon \ MonPMMainRcpProgress changes the screen to the recipe progress monitor screen,
Mon \ MonPMMainMFCL displays the above-mentioned gas list monitor screen.
Mon \ MonPMMainTempTCMon5Z is a database file that switches the screen to the temperature main monitor screen.
For example, when the cursor bar is moved to MonPMMainPress and the log analysis button 65 on the same screen is touched, the screen of the monitor 227 is switched to the pressure editing screen corresponding to the pressure panel 11 of the PM monitor main screen 30a described in FIG.
FIG. 14 shows the pressure editing screen 68. At the bottom of the pressure editing screen 68, a Prev key (previous screen key) 69, a Close key (end button) 70, and a Next key (next screen key) 71 are provided, and the Prev key (previous screen key) 69 is touched. Each time, the past pressure editing screen 68 stored in the hard disk 226 of the operation controller 223 is displayed in the reverse order of the storage order, and every time the Next key (next screen key) 71 is touched, it is stored in the hard disk 226. The past pressure editing screen 68 is displayed in the order of saving. As described above, if a database that can be searched by category such as pressure and temperature is constructed, the cause of trouble can be estimated, and the usability is improved. Therefore, the cause identification can be completed in a short time.
FIG. 15 shows a search screen 72 corresponding to the search key 73 shown in FIG. In this way, the search screen 72 is stored in the operation controller 223, and a database with the occurrence date (year / month / day, time) and the worker name as a search key is constructed in the operation controller 223 to search the edit screen by category. When configured in this manner, the work for identifying the cause of the trouble can be shortened.
Next, an operation example by the processing apparatus 90 according to the present embodiment will be described.
For example, if the film formation conditions of the customer (user) do not match after the process execution, how to change the settings of recipe (process program used for substrate processing) temperature setting, pressure setting, flow rate of source gas, etc. by key log Therefore, it is used as a means to check whether the conditions are not met. That is, if it is known how and what part of the recipe has been changed, the cause of the failure to meet the conditions can be specified.
More specifically, the edit button 5 is touched from the PM monitor main screen 4 in FIG. 4 to move to the edit menu screen in FIG. Then, the process recipe button 81 is touched to move to the process recipe editing screen of FIG. On this screen, the temperature setting of the recipe (temperature setting in the furnace) and the temperature setting of the source gas are performed. When the PM button 1 is touched after returning to the PM monitor main screen 30 of FIG. 4, a PM command screen 83 shown in FIG. 18 appears. On this screen, mode transition is performed in the order of IDEL → STANDBY → RUN → END, and a command or the like is input in each mode. As described above, the editing screens edited on these screens are stored in the hard disk 226 in the same image as the screen in association with the key log.
For example, when checking the pressure in the furnace after editing the recipe, the data log button 6 on the PM monitor main screen 30a described in FIG. 4 is touched to display the data log menu screen 60 in FIG. The logging information button 61 is touched to switch to the OU logging menu screen 62 shown in FIG. Then, the key log button 63 is touched on the OU logging menu screen 62 to switch to the key log analysis list screen 64 shown in FIG.
Next, the cursor bar is moved to MonPMMainPress and the log analysis button 65 on the same screen is touched to switch to the pressure editing screen of FIG. On this screen, the pressure editing screen 68 stored in the hard disk 226 is displayed by the previous key operation using the Prev key (previous screen key) 69 or the Next key (next screen key) 71, and the furnace pressure set or changed is displayed. Check if is correct. In this case, when the search screen of FIG. 15 is displayed and, for example, the occurrence date and time (year / month / day, time) and the name of the worker are searched as search keys, the work time for identifying the cause of the trouble is reduced. The cause of the trouble can be identified efficiently. Therefore, the work efficiency is improved, and the burden on the user and maintenance engineer can be greatly improved.
Thus, according to the present embodiment, it is possible to easily find and check an engineer's setting error that is not detected as an error. In addition, accidents due to setting mistakes can be prevented and the productivity can be improved.

In the present embodiment, in order to reduce the number of data to be saved in the hard disk 226 of the operation controller 223 as much as possible, an explanation is given for saving the editing screen such as the pressure monitor screen 30 in association with the key log of the calling key such as the pressure panel 11. However, when a large-capacity hard disk 226 is used, an edit screen such as the pressure monitor screen 30 may be stored in the hard disk 226 in association with the key log of the edit key 14 as well as the call key. Further, the editing screen is stored in the hard disk 226 in association with all the key logs, and the key log displayed on the key log analysis list screen 64 shown in FIG. 13 using the Prev key 69 (or Next key 71) in FIG. Information may be sequentially displayed on the screen.
In the description of the present embodiment, the present invention is applied to a vertical processing apparatus. However, the present invention can also be applied to a horizontal processing apparatus, and can also be applied to a single wafer apparatus. Furthermore, the various apparatuses according to the present invention can be applied to the processing of substrates such as CVD, oxidation, annealing, etc., and the substrates to be processed target various substrates such as crystal, liquid crystal, and semiconductor.
As described above, the present invention can be modified in various ways, and the present invention naturally extends to the modified invention.

It is explanatory drawing which showed the substrate processing apparatus which concerns on this invention by the perspective method. It is the sectional side view which looked at the substrate processing apparatus of FIG. 1 from the side. It is a block diagram of the apparatus controller for automating a processing apparatus. It is a monitor screen of the program regarding a board | substrate process. It is explanatory drawing which shows a gas list monitor screen. It is explanatory drawing which shows a temperature main monitor screen. It is explanatory drawing which shows a pressure monitor screen. It is explanatory drawing which shows an AUX list monitor screen It is explanatory drawing which shows a recipe progress monitor screen. It is a functional block diagram of an operation controller. It is an example of the data log menu screen used for searching the storage means of the device controller using a search key and used for calling up the edited screen after editing. It is explanatory drawing which shows an OU logging menu screen. It is explanatory drawing which shows a key log analysis list screen. It is explanatory drawing which shows the pressure edit screen of a furnace pressure. It is explanatory drawing of the search screen corresponding to a search key. It is explanatory drawing which shows the edit menu screen of a recipe. It is explanatory drawing which shows the edit screen of a recipe. It is explanatory drawing which shows PM command screen. It is a functional block diagram of the operation part of the conventional apparatus controller.

Explanation of symbols

10 Temperature panel (call key)
11 Pressure panel (call key)
12 AUX panel (call key)
13 Recipe panel (call key)
14 Edit Key 28 Gas List Monitor Screen (Edit Screen)
29 Temperature main monitor screen (edit screen)
30 Pressure monitor screen (edit screen)
31 AUX list monitor screen (edit screen)
32 Recipe progress monitor screen (edit screen)
52 Key log data memory writing module (key log storage means)
53 Memory → HD (hard disk) writing module (key log storage means)
54 Key log data and screen file link display module (display format change means)
226 Hard disk (storage means)
227 Memory (storage means)
69 Prev key (Previous screen key)
71 Next key (Next screen key)

Claims (4)

Display means for displaying an edit screen of a program relating to substrate processing;
Key log collection input means for collecting various key operations displayed on the editing screen as key logs;
Key log storage means for storing the editing screen edited by the key in the storage means in association with the key log;
Display format changing means for changing the screen display format of the edited screen and the portion edited by the key stored in the storage means to be distinguishable;
Key log data search means for searching the key log and displaying the editing screen associated with the key log;
A substrate processing apparatus comprising: A process of collecting various key operations displayed on the editing screen of a program related to substrate processing as a key log,
Storing the editing screen edited by the key in association with the key log;
Changing the screen display format of the part edited by the editing screen and the key to be distinguishable;
Searching the key log and displaying the editing screen associated with the key log;
A display method for a substrate processing apparatus comprising: A display method for a substrate processing apparatus according to claim 2,
In the step of displaying the editing screen associated with the key log, the portion edited by the key is displayed by one display selected from blink display, color-coded display, and reverse display. Display method. A data analysis method for a substrate processing apparatus implemented by the substrate processing apparatus according to claim 1,
When a key log analysis list screen that displays key log information such as occurrence date and time and file name is displayed, and a predetermined file and a log analysis button displayed on the key log analysis list screen are selected, a predetermined log associated with the file is selected . A data analysis method for a substrate processing apparatus that displays an edit screen.