JP4581575B2 - Manufacturing method of plate-shaped ceramic body and load applying member for ceramic firing - Google Patents

Description

  The present invention relates to a method for manufacturing a ceramic body using a ceramic firing load applying member and the load applying member in order to prevent warping of the ceramic body when firing a plate-shaped ceramic body.

  Conventionally, a plate-like ceramic body has been widely used as an electronic component substrate. An electronic component substrate is strongly required to have excellent flatness. On the other hand, when obtaining a plate-shaped ceramic body, the plate-shaped ceramic green body is usually fired after producing the plate-shaped ceramic green body. In this case, there is a problem that warpage is likely to occur in the firing process of obtaining a plate-like ceramic body.

Therefore, Patent Document 1 below discloses a method for correcting warpage of a ceramic substrate in which warpage has occurred. That is, the ceramic substrate warped in the firing process is placed on a flat jig. Thereafter, the warpage is corrected by applying an evenly distributed load over the ceramic substrate and re-baking.
JP-A-4-31368

  However, the warp correction method described in Patent Document 1 is only a method of correcting the warp caused by firing in a subsequent process. Therefore, after obtaining a warped ceramic substrate, a process of correcting the warp has to be performed, and the manufacturing process is complicated. In addition, in the case of a very thin ceramic substrate, there is a possibility that the ceramic substrate may be cracked or chipped even if the warp is corrected in such a process.

  Further, as shown in FIG. 8A, a plate-like ceramic green body 52 is placed on a plate-like jig 51, and in that state, a plate-like load applying member 53 is placed and fired. A method of performing the above is also conceivable. That is, a method is conceived in which a flat load applying member 53 is used to suppress the entire upper surface of the ceramic green body 52 and thereby suppress warping caused by firing.

  However, when the load applied by the load application member 53 is small, warping tends to occur after firing. Further, when the load on the load applying member 53 is sufficiently increased, the warpage is suppressed, but there is a problem that the obtained sintered body has a sliding flaw on the surface. That is, as shown in FIG. 8B, after firing, the size of the plate-like ceramic body 52A is reduced by shrinkage. Therefore, the upper surface of the ceramic body 52 </ b> A slid between the lower surface of the load application member 53, and the scratch tends to occur. When such scratches occur, the surface properties of the obtained plate-like ceramic body 52A are impaired, and for example, when used as an electronic component substrate, it becomes difficult to form electrodes and the like with high accuracy.

  The object of the present invention is to eliminate the above-mentioned drawbacks of the prior art, and to stably obtain a flat plate-like ceramic body without requiring complicated steps and without generating scratches on the surface. It is in providing the load addition member for ceramic baking used for this manufacturing method and this manufacturing method.

The method for producing a plate-like ceramic body of the present invention includes a step of preparing a plate-like ceramic green body, and an upper surface of the ceramic green body so that a load is applied to the center of gravity of the ceramic green body on the ceramic green body. And a step of firing the ceramic green body with the firing load addition member placed on the ceramic green body, the load applied to the center of gravity of the ceramic green body When the firing load addition member is placed on the ceramic green body so as to be added, as the firing load addition member, a plate-like load addition member main body is integrally formed on the lower surface of the load addition member main body, and using the firing load application member having a protrusion having a hemispherical tip, the tip of the protrusion portion of the ceramic green body weight The firing load application member to two-point contact contact characterized by placed on the upper surface of the ceramic green body.

In a specific aspect of the method for manufacturing a ceramic plate according to the present invention, the front Symbol projections are more disposed to a predetermined position includes a central protrusion which is arranged in the center of the lower surface of the load application member body, the central The protruding amount of the protruding portion from the lower surface is larger than the other protruding portions.

In another specific aspect of the method for producing a plate-shaped ceramic body according to the present invention, a step of preparing a plate-shaped ceramic green body, and a load is applied to the center of gravity of the ceramic green body on the ceramic green body. A step of placing a firing load addition member on the upper surface of the ceramic green body, and a step of firing the ceramic green body in a state where the firing load addition member is placed on the ceramic green body, When the firing load adding member is placed on the ceramic green body so that a load is applied to the center of gravity of the ceramic green body, the firing load adding member having a flat bottom surface is used as the firing load adding member. as, in the center of gravity, the are integrally formed on the upper surface of the ceramic green bodies, and with a hemispherical tip protrusion Using a ceramic green body which is provided, for placing the firing load applying member so that the tip of Oite the protrusion in a region including the projection portion of the upper surface of the ceramic green body is point contact contact It is characterized by that. In this case, the load applying member for firing the ceramic green body is a flat plate shape, and the protrusion includes a center of gravity protrusion disposed at the center of gravity of the ceramic green body, and is provided at a predetermined position on the upper surface of the ceramic green body. It is preferable that a plurality of the protrusions of the center of gravity are protruded from the upper surface so that the protrusion is larger than the other protrusions.

Ceramic firing load application member according to the present invention is intended for use in firing a sheet-shaped ceramic green body, having a plate-like shape having an upper surface and a lower surface, projects downward from the lower surface Thus, it is formed integrally with the load applying member main body, and has a protrusion having a hemispherical tip that makes point contact.

  In the above-mentioned ceramic firing load applying member, the protrusion amount of the protrusion is preferably in the range of 10 to 100 μm.

In the manufacturing method according to the present invention, first, a sheet-shaped ceramic body is prepared, the plate-like ceramic green body on, so that the focus load than the rest added to the centroid of the ceramic green body, A firing load applying member is placed on the upper surface, and the ceramic green body is fired in this state. Therefore, centroid reliably suppressed to be fired in the ceramic green body progresses. Therefore, shrinkage during firing occurs evenly around the center of gravity of the ceramic green body. Therefore, distortion of the entire shape of the obtained ceramic body can be suppressed. Therefore, it is possible to stably obtain a plate-like ceramic body that hardly warps. Moreover, since the sintered such heavily load is applied to the center of gravity takes place, scratches, etc. due to sliding of the load application member hardly occurs in the plate-shaped ceramic body surface.

  Therefore, according to the present invention, it is possible to stably provide a flat plate-like ceramic body having almost no sliding scratches on the surface and almost no warpage.

In the present invention, a member having a protrusion on the lower surface is used as the firing load applying member, and the firing load applying member is placed on the upper surface of the ceramic green body so that the protrusion is in point contact with the center of gravity of the ceramic green body. placed by rows firing Utame, ceramic green body portion in contact with the protrusion portion it is reliably pressed against the. Therefore, the plate-like ceramic body contracts evenly around the pressed portion. Therefore, a plate-like ceramic body with little warpage can be obtained with certainty.

The firing load applying member has a flat bottom surface, is integrally formed on the top surface of the ceramic green body at the center of gravity as the ceramic green body , and is provided with a protrusion having a hemispherical tip . When a material is used and the firing load addition member is placed in the region including the projection on the upper surface, the load due to the firing load addition member is preferentially applied to the projection on the ceramic green body side. Therefore, when the ceramic green body is fired, the ceramic is uniformly contracted around the center of gravity. Therefore, according to the present invention, it is possible to obtain a plate-like ceramic body having almost no sliding scratches on the surface and almost no warpage.

The load application member for firing ceramic according to the present invention has a plate-like shape having an upper surface and a lower surface, is integrally formed with the load application member main body so as to protrude downward from the lower surface , and is point-contacting A protrusion having a hemispherical tip that contacts the surface. Therefore, in the manufacturing method of the present invention, the firing is performed by disposing the ceramic firing load applying member so that the protrusion is in contact with the upper surface of the plate-shaped ceramic green body at the center of gravity of the plate-shaped ceramic green body. According to the present invention, a plate-like ceramic body that is flat and has almost no sliding scratches on the surface can be obtained.

In particular, when the protruding amount of the protrusion is in the range of 10~100μm is reliably centroid can contract the ceramic green body around a, to obtain warpage is small ceramic plate more reliably It becomes possible.

  Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.

1A and 1B are a side view and a plan view for explaining a method for manufacturing a plate-like ceramic body according to an embodiment of the present invention. In the present embodiment, a flat jig 1 is prepared. The jig 1 is made of an appropriate rigid material such as metal. A plate-shaped ceramic green body 2 is placed on the upper surface 1 a of the jig 1. The plate-shaped ceramic green body 2 is prepared in order to obtain a plate-shaped ceramic body such as a ceramic substrate. The plate-like ceramic green body 2 can be obtained by a method of laminating a plurality of ceramic green sheets and pressing in the thickness direction or a method of forming a composition containing ceramic powder and a binder resin by an appropriate method. it can. A load applying member 3 is placed on the upper surface of the plate-shaped ceramic green body 2 during firing. Here, the load addition member 3 has a flat plate-like load addition member main body 3a, and protrudes downward from the lower surface of the load addition member main body 3a, and has a hemispherical protrusion 3b at the tip . Although the protrusion 3b is formed integrally with the load applying member main body 3a, the protrusion 3b formed separately may be joined to the lower surface of the load applying member main body 3a.

The protrusion 3b and the load applying member main body 3a can be made of an appropriate rigid material such as metal or insulating ceramics. However, the projections 3b, upon firing, it is necessary that the load is located above the center of gravity of the plate-shaped ceramic green body 2. The load application member 3, upon firing, positively pressurized from above the center of gravity of the ceramic green bodies, is arranged to produce a uniform shrinkage around a point that pressurized the pressurized. Accordingly, the weight of the load applying member 3 is selected so that the weight can exhibit such an action effect.

  In the present embodiment, preferably, the protruding amount of the protruding portion 3b, that is, the protruding amount downward from the lower surface of the load applying member main body 3a is in the range of 10 to 100 μm. When the thickness exceeds 100 μm, the effect of suppressing warpage may not be sufficiently obtained. When the thickness is smaller than 10 μm, the lower surface of the load applying member main body 3 a may also partially contact the upper surface of the ceramic green body 2. However, the function of the protrusion 3b may not be sufficiently exhibited. Preferably, the protrusion amount is 20 μm or more.

In the present embodiment, the protruding portion 3b is load centroid of the ceramic green body 2 to join the focus than the remaining portion, in a state in which the load application member 3 placed on the ceramic green body 2 Firing is performed. As a result, it is possible to obtain a plate-like ceramic body with less warpage and almost no sliding scratches on the surface. This will be described for a specific experimental example.

  As the plate-like ceramic green body 2, a ceramic green body made of low-temperature sintered ceramics of 135 × 135 × 700 μm thickness was prepared. The center of gravity of the plate-shaped ceramic green body is located at the center of the rectangular shape when viewed in plan. The load applying member 3 is made of alumina, and the load adding member main body 3a has dimensions of 135 × 135 × thickness 1 mm, and a protrusion 3b having a protrusion amount of 100 μm is provided at the center. did.

  In the example, the load applying member 3 was placed on the plate-shaped ceramic green body 2 so that the protrusion 3b was in contact with the upper portion of the center of the plate-shaped ceramic green body 2, and firing was performed. Firing was performed by maintaining at a temperature of 900 ° C. or higher for about 1.5 days. Thus, the experiment which bakes two plate-shaped ceramic bodies was performed twice.

  FIG. 2 is a plan view schematically showing the actually measured shape of the substrate in the plate-like ceramic body 2A obtained by the first firing experiment. The solid line in FIG. 2 indicates the contour of the actually measured shape, and the broken line indicates the contour shape of the design value.

  FIG. 3 is a plan view schematically showing the actually measured shape and the design shape of the plate-like ceramic body 2A obtained by the second firing experiment.

  On the other hand, a load applying member configured in the same manner as described above except that the protrusion 3b was not provided was placed on the plate-shaped ceramic green body 2 and fired. Also in this case, two firing experiments were performed. 4 and 5 are each a schematic plan view showing the shape of a plate-like ceramic body 2B of a comparative example obtained in each firing experiment. 4 and 5, the actual measurement shape of the plate-like ceramic body 2B from which the solid line is obtained, and the broken line indicate the design shape.

  As apparent from a comparison between FIGS. 2 and 3 and FIGS. 4 and 5, according to the manufacturing method of the present embodiment, the planar shape is close to the design shape, that is, the shrinkage is substantially uniform around the center of gravity. It can be seen that the resulting plate-like ceramic body 2A can be obtained. Accordingly, it can be seen that a plate-like ceramic body with little warpage and few sliding flaws can be obtained because shrinkage occurs uniformly.

  On the other hand, in the comparative example, the planar shape of the plate-shaped ceramic body 2B is greatly deviated from the design value, so that not only warpage is likely to occur, but also scratches caused by sliding on the surface in contact with the load application member. It turns out that it is easy to occur.

  In the above embodiment, the load applying member 3 is provided with the projection 3b at the center of the lower surface of the load applying member main body 3a. However, as shown in FIGS. 13, a plurality of protrusions 13c to 13f may be further provided on the lower surface of the load applying member main body 13a in addition to the structure in which the protrusion 13b is provided at the center. In this case, the four projecting portions 13c to 13f are arranged in the vicinity of each corner portion on the lower surface of the load applying member main body 13a, thereby causing the posture when the load adding member 13 is placed on the upper surface of the ceramic green body 2. Can be stabilized.

However, in the modification shown in FIG. 6 (a) and (b), yo Ri preferably, in the case of providing a plurality of projections, the central projection portion 13b, increase the projecting amount than the remaining projections 13c~13f It is desirable to do.

Further, in the embodiment described above, the protrusion 3b to the load application member 3,13 side and 13b are provided, as shown in FIG. 7, the upper surface of the plate-shaped ceramic green body 2 tip hemispherical The protrusion 2b may be provided. In this case, the protrusion 2 a is disposed on the upper surface at the center of gravity of the plate-like ceramic green body 2. Therefore, by placing the load application member 23 having a flat bottom surface, the center of gravity of the plate-shaped ceramic green body 2 is more heavily pressurized and fired than the rest, as in the above-described embodiment. be able to. Therefore, even when the protrusion is provided on the upper surface of the plate-shaped ceramic green body 2 and the load applying member 23 having a flat lower surface is used, the plate shape in which the warpage is small and the sliding scar hardly occurs on the surface according to the present invention. The ceramic body can be obtained.

(A) is a side view for showing the baking process in one Embodiment of this invention, (b) is a top view. The typical top view for demonstrating the planar shape of the plate-shaped ceramic body obtained by the 1st baking experiment of embodiment shown in FIG. The typical top view for demonstrating the planar shape of the plate-shaped ceramic body obtained by the 2nd baking experiment of embodiment shown in FIG. The schematic plan view for demonstrating the shape of the plate-shaped ceramic body baked for the comparison. The schematic plan view for demonstrating the shape of the plate-shaped ceramic body baked for the comparison. (A) is a top view for demonstrating the modification of the manufacturing method of the plate-shaped ceramic body of this invention, (b) is the side view. Projections on cell La Mick Green side is a schematic partial cutaway cross-sectional view for explaining a modified example provided. (A) And (b) is each front sectional drawing for demonstrating an example of the manufacturing method of the conventional plate-shaped ceramic body.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Jig 2 ... Ceramic green body 2a ... Projection part 3 ... Load application member 3a ... Load application member main body 3b ... Projection part 3c-3f ... Projection part 13 ... Load application member 13a ... Load application member main body 13b ... Projection part 13c ˜13f... Projection 23, 33... Load application member 33a... Load application member main body 33b.

Claims (6)

Preparing a plate-like ceramic green body;
Placing a load addition member for firing on the upper surface of the ceramic green body such that a load is applied to the center of gravity of the ceramic green body on the ceramic green body;
Firing the ceramic green body in a state where the load applying member for firing is placed on the ceramic green body,
When placing the firing load addition member on the ceramic green body so that a load is applied to the center of gravity of the ceramic green body, as the firing load addition member, a plate-like load addition member main body, and a load addition member main body A firing load applying member that is integrally formed on the lower surface and has a projection with a hemispherical tip, so that the tip of the projection comes into point contact with the center of gravity of the ceramic green body. A method for producing a plate-like ceramic body, wherein a firing load applying member is placed on an upper surface of a ceramic green body. Before SL is projecting portion is a plurality arranged in a predetermined position includes a central protrusion which is arranged in the center of the lower surface of the load application member main body, the protruding amount from the lower surface of the central projecting portion is larger than the other projections, The manufacturing method of the plate-shaped ceramic body of Claim 1. Preparing a plate-like ceramic green body;
Placing a load addition member for firing on the upper surface of the ceramic green body such that a load is applied to the center of gravity of the ceramic green body on the ceramic green body;
Firing the ceramic green body in a state where the load applying member for firing is placed on the ceramic green body,
When placing the load addition member for firing on the ceramic green body so that a load is applied to the center of gravity of the ceramic green body,
As the firing load addition member, a firing load addition member having a flat lower surface is used, and the ceramic green body is integrally formed on the upper surface of the ceramic green body at the center of gravity , and has a hemispherical tip. using a ceramic green body which protrusion is provided, mounting the firing load applying member so that the tip of Oite the protrusion in a region including the projection portion of the upper surface of the ceramic green body is point contact contact A method for producing a plate-like ceramic body, characterized by comprising:   The load member for firing the ceramic green body is a flat plate, and a plurality of the protrusions are arranged at predetermined locations on the upper surface of the ceramic green body including a center of gravity protrusion disposed at the center of gravity of the ceramic green body. The method for manufacturing a plate-like ceramic body according to claim 3, wherein an amount of protrusion of the center-of-gravity protrusion from the upper surface is larger than other protrusions. A ceramic firing load adding member used when firing a plate-shaped ceramic green body,
A hemispherical shape that has a plate-like shape having an upper surface and a lower surface, is integrally formed with the load application member body so as to protrude downward from the lower surface of the load application member body, and is in point contact contact A load application member for firing ceramics, characterized by having a protrusion having a tip .   The load application member for ceramic firing according to claim 5, wherein the protruding amount of the protruding portion is in a range of 10 to 100 μm.

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