JP4582011B2 - Ultrasonic flow meter - Google Patents
Ultrasonic flow meter Download PDFInfo
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- JP4582011B2 JP4582011B2 JP2006020270A JP2006020270A JP4582011B2 JP 4582011 B2 JP4582011 B2 JP 4582011B2 JP 2006020270 A JP2006020270 A JP 2006020270A JP 2006020270 A JP2006020270 A JP 2006020270A JP 4582011 B2 JP4582011 B2 JP 4582011B2
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Description
本発明は、超音波パルスの送受信を行う超音波送受波器および超音波送受波器を用いて気体や液体の流量や流速の計測を行う超音波流量計に関するものである。 The present invention relates to an ultrasonic transducer that transmits and receives ultrasonic pulses and an ultrasonic flowmeter that measures the flow rate and flow velocity of gas and liquid using the ultrasonic transducer.
従来この種の超音波送受波器の固定具として用いられるものは、図7に示すように位置決め体25に接続端子26a、26bを設けた絶縁部27を備え、超音波振動子28の端子29a、29bが接続端子26a、26bに電気的に接続されている。位置決め体25は流体通路壁30にねじ等で固定されている。また、図8で示すように固定体31は超音波振動子28の端子29a、29bが接触せずに貫通する取出穴32を設けており、流体通路壁30にねじ等で固定されている(例えば、特許文献1参照)。
しかしながら、上記従来の構成では端子29a、29bや接続端子26a、26bが位置決め体25や固定体31を貫通しているため、貫通した部分で端子同士は完全に独立されていない。このため導電体などの外乱要因により電気的な短絡を起こすことがある。また、端子29a、29bや接続端子26a、26bは位置決め体25や固定体31よりも長いため、外部からの衝撃により変形するという問題がある。さらに、固定体31には端子29a、29bを貫通させる取出穴32を設けているため、超音波振動子28の回転角度を固定させることができないという問題もある。 However, since the terminals 29a and 29b and the connection terminals 26a and 26b penetrate the positioning body 25 and the fixed body 31 in the above-described conventional configuration, the terminals are not completely independent at the penetrated portion. For this reason, an electrical short circuit may occur due to disturbance factors such as a conductor. Further, since the terminals 29a and 29b and the connection terminals 26a and 26b are longer than the positioning body 25 and the fixed body 31, there is a problem that the terminals 29a and 29b are deformed by an external impact. Furthermore, since the fixing body 31 is provided with the extraction holes 32 that allow the terminals 29a and 29b to pass therethrough, there is also a problem that the rotation angle of the ultrasonic transducer 28 cannot be fixed.
本発明では上記課題を解決するもので、超音波送受波器の固定具で超音波送受波器の電極ピンを外乱要因から保護する構成にすることで、安定した電気的接続を可能とし、不具合を押えた信頼性が高い取り付け構成の超音波送受波器とその超音波送受波器を用いた超音波流量計を提供することを目的とする。 In the present invention, the above-mentioned problems are solved, and it is possible to achieve a stable electrical connection by protecting the electrode pins of the ultrasonic transmitter / receiver from disturbance factors with the fixture of the ultrasonic transmitter / receiver. It is an object of the present invention to provide an ultrasonic transmitter / receiver having a highly reliable mounting structure and an ultrasonic flowmeter using the ultrasonic transmitter / receiver.
本発明は上記課題を解決するために、被測定流体が流れる流量測定部と、前記流量測定部に設けられ超音波を送受信する1対の超音波送受波器と、前記超音波送受波器を前記流量測定部に固定する固定具と、前記超音波送受波器間の伝搬時間を計測する計測回路と、前記計測回路からの信号に基づいて流量を算出する流量演算手段とを備え、前記超音波送受波器は、正極と負極の電極ピンと、前記電極ピンに電気的に接続されたリード線を有し、前記固定具は、前記正極と負極の電極ピン及び前記リード線が共に挿入される開口と、前記正極と負極の電極ピンを覆うと共に、前記リード線を引き出し可能とする為に前記開口を部分的に覆う天壁と、前記天壁から垂下され前記正極と負極の電極ピンを絶縁する保護壁とを有することを特徴とするものである。 In order to solve the above problems, the present invention includes a flow rate measurement unit through which a fluid to be measured flows, a pair of ultrasonic transducers provided in the flow rate measurement unit for transmitting and receiving ultrasonic waves, and the ultrasonic transducers. A fixture for fixing to the flow rate measurement unit; a measurement circuit for measuring a propagation time between the ultrasonic transducers; and a flow rate calculation means for calculating a flow rate based on a signal from the measurement circuit, The sonic transducer includes positive and negative electrode pins and lead wires electrically connected to the electrode pins, and the fixture is inserted with both the positive and negative electrode pins and the lead wires. insulating an opening, said cover the electrode pins of the positive electrode and the negative electrode, and a top wall covering the opening partially in order to be drawn out of the lead wire, suspended from the ceiling wall of the electrode pins of the positive electrode and the negative electrode And a protective wall It is intended.
上記発明によれば、超音波送受波器の正極と負極の電極ピンは固定具に設けた空間におさまるため、外乱要因である導電体や衝撃を受けにくくすることができ、電気的な短絡も防止することができる。また、電極ピンが空間内に収まるため、回転方向の規制をすることができる。 According to the above invention, since the positive and negative electrode pins of the ultrasonic transducer are accommodated in the space provided in the fixture, it is possible to make the conductor and shock that are disturbance factors less susceptible to electrical short circuit. Can be prevented. In addition, since the electrode pin fits in the space, the rotation direction can be regulated.
本発明の超音波送受波器の固定具およびそれを用いた超音波流量計は、超音波送受波器を流路に固定すると同時に電極ピンを保護することにより、電極ピンの電気的な短絡や変形を防止することが可能となるため、信頼性の高い超音波送受波器を得ることができ、被測定流体の流量測定を安定して測定することができる。 An ultrasonic transducer fixture and an ultrasonic flowmeter using the same according to the present invention fix an ultrasonic transducer to a flow path and at the same time protect the electrode pin, Since deformation can be prevented, a highly reliable ultrasonic transducer can be obtained, and the flow measurement of the fluid to be measured can be stably measured.
第1の発明は、被測定流体が流れる流量測定部と、前記流量測定部に設けられ超音波を送受信する1対の超音波送受波器と、前記超音波送受波器を前記流量測定部に固定する固定具と、前記超音波送受波器間の伝搬時間を計測する計測回路と、前記計測回路からの信号に基づいて流量を算出する流量演算手段とを備え、前記超音波送受波器は、正極と負極の電極ピンと、前記電極ピンに電気的に接続されたリード線を有し、前記固定具は、前記正極と負極の電極ピン及び前記リード線が共に挿入される開口と、前記正極と負極の電極ピンを覆うと共に、前記リード線を引き出し可能とする為に前記開口を部分的に覆う天壁と、前記天壁から垂下され前記正極と負極の電極ピンを絶縁する保護壁とを有することを特徴とすることにより、超音波送受は器の電極ピンに外乱要因である導電体や衝撃を受けにくくすることにより、信頼性の高い超音波送受波器を得ることができ、被測定流体の流量測定を安定して測定することができる。 In the first invention, a flow rate measurement unit through which a fluid to be measured flows, a pair of ultrasonic transducers provided in the flow rate measurement unit for transmitting and receiving ultrasonic waves, and the ultrasonic transducers are provided in the flow rate measurement unit. A fixing device for fixing, a measurement circuit for measuring a propagation time between the ultrasonic transducers, and a flow rate calculation means for calculating a flow rate based on a signal from the measurement circuit, wherein the ultrasonic transducer is The positive and negative electrode pins, and lead wires electrically connected to the electrode pins, and the fixture includes an opening into which the positive and negative electrode pins and the lead wires are inserted, and the positive electrode and covering the electrode pins of the negative electrode, and a top wall covering the opening partially in order to be drawn out of the lead wire, and a protective wall which is suspended from the ceiling wall to insulate the electrode pins of the positive electrode and the negative electrode By having the ultrasonic Receiving the electrode pin of the device to make it less susceptible to disturbance and conductors, it is possible to obtain a highly reliable ultrasonic transducer, and to stably measure the flow rate of the fluid to be measured Can do.
(実施の形態1)
図1、図2は本発明の第1の実施の形態における超音波送受波器およびそれを用いた超音波流量計の構成図を示すものである。
(Embodiment 1)
1 and 2 show a configuration diagram of an ultrasonic transducer and an ultrasonic flowmeter using the ultrasonic transducer according to the first embodiment of the present invention.
図1において、超音波送受波器1は振動伝播抑制体4と方向抑制体5を装着し、流路6に固定具3を介して図示していないビスで固定されている。リード線11は、リード線端子10a、10bに超音波送受波器1の電極ピン2a、2bと90度方向を変えて接続されている。 In FIG. 1, an ultrasonic transducer 1 is equipped with a vibration propagation suppressing body 4 and a direction suppressing body 5, and is fixed to a flow path 6 with a screw (not shown) via a fixture 3. The lead wire 11 is connected to the lead wire terminals 10a and 10b with the electrode pins 2a and 2b of the ultrasonic transducer 1 by changing the direction by 90 degrees.
図2は、第1の実施の形態における超音波送受波器の固定具の斜視図を示すものである。 FIG. 2 is a perspective view of the fixture of the ultrasonic transducer according to the first embodiment.
リード線室8a、8bは、電極ピン2a、2bに接続されたリード線端子10a、10bを囲むように保護壁9a、9b、9c、9dで構成されている。流路6への固定はビス穴7a、7bに図示していないビスを通して固定される。 The lead wire chambers 8a and 8b are constituted by protective walls 9a, 9b, 9c and 9d so as to surround the lead wire terminals 10a and 10b connected to the electrode pins 2a and 2b. The flow path 6 is fixed through screws (not shown) in the screw holes 7a and 7b.
以上のように構成された超音波送受波器の固定具について、以下その動作、作用を説明する。まず、固定具3は樹脂などの絶縁作用のある材質を使用している。超音波送受波器1の電極ピン2a、2bにリード線端子10a、10bを接続し、リード線11を固定具3のリード線室8a、8bから通し、流路6に固定具3を図示していないビスで固定する。固定具3にある保護壁9a、9b、9c、9dは、リード線端子10a、10bよりも高くしている。 The operation and action of the fixture for an ultrasonic transducer configured as described above will be described below. First, the fixture 3 is made of an insulating material such as resin. Lead wire terminals 10 a and 10 b are connected to the electrode pins 2 a and 2 b of the ultrasonic transducer 1, the lead wire 11 is passed through the lead wire chambers 8 a and 8 b of the fixture 3, and the fixture 3 is illustrated in the flow path 6. Fix with screws that are not. The protective walls 9a, 9b, 9c, 9d in the fixture 3 are higher than the lead wire terminals 10a, 10b.
以上のように、実施の形態においては固定具3の保護壁9a、9b、9c、9dをリード線端子10a、10bよりも高くすることにより、外乱要因である導電体などで短絡しにくくなり、衝撃などが直接リード線端子10a、10bに受けなくなりことで、リード線端子10a、10bの変形を防止することもできる。 As described above, in the embodiment, by making the protective walls 9a, 9b, 9c, 9d of the fixture 3 higher than the lead wire terminals 10a, 10b, it becomes difficult to short-circuit with a conductor that is a disturbance factor, Since the impact or the like is not directly received by the lead wire terminals 10a and 10b, the deformation of the lead wire terminals 10a and 10b can be prevented.
また、本実施の形態ではリード線室8a、8bとも保護壁9a、9b、9c、9a、9b、を設けてあるが、構成上によりリード線室8a,8bを仕切る保護壁9dのみを設けることにより、リード線端子10a、10bどうしの電気的な短絡を防止し、超音波送受波器1の回転方向を規制することもできる。 The lead wire chamber 8a in the present embodiment, 8b both protection walls 9a, 9b, 9c, 9a, 9b, but the is provided, the lead chamber 8a by the configuration, only the protective walls 9d partitioning the 8b provided By doing so, it is possible to prevent an electrical short circuit between the lead wire terminals 10a and 10b and to regulate the rotation direction of the ultrasonic transducer 1.
(実施の形態2)
図3は、第2の実施の形態における超音波送受波器の固定具の斜視図を示すものである。
(Embodiment 2)
FIG. 3 is a perspective view of the fixture of the ultrasonic transducer according to the second embodiment.
リード線室8a、8bは、電極ピン2a、2bに接続されたリード線端子10a、10bを囲むように保護壁9a、9b、9c、9dで構成されており、保護壁9a、9b、9c、9dに天壁12を備えている。 The lead wire chambers 8a and 8b are configured by protective walls 9a, 9b, 9c and 9d so as to surround the lead wire terminals 10a and 10b connected to the electrode pins 2a and 2b. A ceiling wall 12 is provided at 9d.
以上のように構成された超音波送受波器の固定具について、以下その動作、作用を説明する。まず、超音波送受波器1の電極ピン2a、2bにリード線端子10a、10bを接続し、リード線11を固定具3のリード線室8a、8bから通し、流路6に固定具3を図示していないビスで固定する。リード線端子10a、11bは固定具3にある保護壁9a、9b、9c、9dおよび天壁12で囲われた空間内に収まる。 The operation and action of the fixture for an ultrasonic transducer configured as described above will be described below. First, the lead wire terminals 10 a and 10 b are connected to the electrode pins 2 a and 2 b of the ultrasonic transducer 1, the lead wire 11 is passed through the lead wire chambers 8 a and 8 b of the fixture 3, and the fixture 3 is connected to the flow path 6. Secure with screws not shown. The lead wire terminals 10 a and 11 b are accommodated in a space surrounded by the protective walls 9 a, 9 b, 9 c and 9 d and the top wall 12 in the fixture 3.
以上のように、実施の形態においてはリード線端子10a、10bが固定具3の保護壁9a、9b、9c、9dと天壁12内に収まることにより、導電体が直接リード線端子1
0a、10bに触れなくなるので電気的な短絡を起こしにくくなり、衝撃などが直接リード線端子10a、10bに受けなくなりことで、リード線端子10a、10bの変形を防止することもできる。
As described above, in the embodiment, the lead wire terminals 10a and 10b are accommodated in the protective walls 9a, 9b, 9c, and 9d of the fixture 3 and the top wall 12, so that the conductor is directly connected to the lead wire terminal 1.
Since no contact with 0a and 10b occurs, it is difficult to cause an electrical short circuit, and an impact or the like is not directly received by the lead wire terminals 10a and 10b, so that deformation of the lead wire terminals 10a and 10b can be prevented.
(実施の形態3)
図4は、第3の実施の形態における超音波送受波器の固定具の断面図を示すものである。
(Embodiment 3)
FIG. 4 shows a cross-sectional view of the fixture of the ultrasonic transducer according to the third embodiment.
リード線室8a、8bは、電極ピン2a、2bに接続されたリード線端子10a、10bを囲むように保護壁9a、9b、9c、9dと天壁12を備えており、天壁12とリード線端子10a、10bの間には隙間13が設けられている。 The lead wire chambers 8a, 8b are provided with protective walls 9a, 9b, 9c, 9d and a ceiling wall 12 so as to surround the lead wire terminals 10a, 10b connected to the electrode pins 2a, 2b. A gap 13 is provided between the line terminals 10a and 10b.
以上のように、実施の形態においてはリード線端子10a、10bと固定具3の天壁12の間に隙間13を設けることにより、リード線端子10a、10bが直接天壁12と触れることがなくなるので、水などの導電性がある液体が天壁12に付着してリード線端子10a、10b側に流れた場合、毛細管現象により天壁12とリード線端子10a、10bの隙間に水等の導電性の液体が流れ込み、リード線端子10a、10bが腐食する可能性を防止することもできる。 As described above, in the embodiment, by providing the gap 13 between the lead wire terminals 10 a and 10 b and the top wall 12 of the fixture 3, the lead wire terminals 10 a and 10 b do not directly touch the top wall 12. Therefore, when a liquid having conductivity such as water adheres to the top wall 12 and flows to the lead wire terminals 10a and 10b, the conductive material such as water flows into the gap between the top wall 12 and the lead wire terminals 10a and 10b due to capillary action. It is also possible to prevent the possibility of corrosion of the lead liquid terminals 10a and 10b due to the flowing of the liquid.
なお、図5の斜視図で示すように、天壁12を設けた構成として、天壁12を保護壁9aや9cで方持ち支持し天壁12にリード線端子10a、10bを仕切る保護壁9dを備えた構成にしてもよい。 As shown in the perspective view of FIG. 5, the top wall 12 is provided as a configuration, and the top wall 12 is supported by the protection walls 9a and 9c, and the protection wall 9d partitions the lead wire terminals 10a and 10b on the top wall 12. You may make it the structure provided with.
(実施の形態4)
図6は、第4の実施の形態における超音波送受波器の固定具およびそれを用いた超音波流量計の概略構成を示すブロック図である。
(Embodiment 4)
FIG. 6 is a block diagram showing a schematic configuration of an ultrasonic transducer fixture and an ultrasonic flowmeter using the fixture according to the fourth embodiment.
本実施例では被測定流体を都市ガス、超音波流量計として家庭用ガスメ−タを想定し、流量測定部15を構成する材料をアルミニウム合金ダイカストとする。 In this embodiment, the gas to be measured is assumed to be a city gas and a household gas meter is assumed to be an ultrasonic flowmeter, and the material constituting the flow rate measurement unit 15 is an aluminum alloy die casting.
また超音波送受波器16、17の使用周波数には約500kHzを選択する。発振回路18は例えばコンデンサと抵抗で構成され約500kHzの方形波を発信し、駆動回路19では発振回路18の信号から超音波送受波器16を駆動するため方形波が3波のバースト信号からなる駆動信号を出力可能とする。また測定手段には測定流量の分解能を向上するため、シングアラウンド法を用いる。 In addition, about 500 kHz is selected as the operating frequency of the ultrasonic transducers 16 and 17. The oscillation circuit 18 is composed of, for example, a capacitor and a resistor and transmits a square wave of about 500 kHz. The drive circuit 19 drives the ultrasonic transducer 16 from the signal of the oscillation circuit 18, and the square wave is composed of a burst signal of three waves. A drive signal can be output. The measuring means uses a single-around method to improve the resolution of the measured flow rate.
制御部24では駆動回路19に送信開始信号を出力すると同時に、タイマ22の時間計測を開始させる。駆動回路19は送信開始信号を受けると超音波送受波器16を駆動し、超音波パルスを送信する。送信された超音波パルスは流量測定部15内を伝搬し超音波送受波器17で受信される。受信された超音波パルスは超音波送受波器17で電気信号に変換され、受信検知回路21に出力される。受信検知回路21では受信信号の受信タイミングを決定し、制御部24に受信検知信号を出力する。制御部24では受信検知信号を受けると、あらかじめ設定した遅延時間td経過後に再び駆動回路19に送信開始信号を出力し、2回目の計測を行う。この動作をN回繰返した後、タイマ22を停止させる。演算部23ではタイマ22で測定した時間を測定回数のNで割り、遅延時間tdを引いて伝搬時間t1を演算する。 The control unit 24 outputs a transmission start signal to the drive circuit 19 and starts time measurement of the timer 22 at the same time. When receiving the transmission start signal, the drive circuit 19 drives the ultrasonic transducer 16 and transmits an ultrasonic pulse. The transmitted ultrasonic pulse propagates through the flow rate measurement unit 15 and is received by the ultrasonic transducer 17. The received ultrasonic pulse is converted into an electric signal by the ultrasonic transducer 17 and output to the reception detection circuit 21. The reception detection circuit 21 determines the reception timing of the reception signal and outputs the reception detection signal to the control unit 24. Upon receipt of the reception detection signal, the control unit 24 outputs a transmission start signal to the drive circuit 19 again after the elapse of a preset delay time td, and performs the second measurement. After repeating this operation N times, the timer 22 is stopped. The calculation unit 23 calculates the propagation time t1 by dividing the time measured by the timer 22 by the number of times N and subtracting the delay time td.
引き続き切替回路20で駆動回路19と受信検知回路21に接続する超音波送受波器を切り替え、再び制御部24では駆動回路19に送信開始信号を出力すると同時に、タイマ22の時間計測を開始させる。伝搬時間t1の測定と逆に、超音波送受波器17で超音波
パルスを送信し、超音波送受波器16で受信する計測をN回繰返し、演算部23で伝搬時間t2を演算する。
Subsequently, the ultrasonic transducer connected to the drive circuit 19 and the reception detection circuit 21 is switched by the switching circuit 20, and the control unit 24 again outputs a transmission start signal to the drive circuit 19 and simultaneously starts the time measurement of the timer 22. Contrary to the measurement of the propagation time t1, an ultrasonic pulse is transmitted by the ultrasonic transducer 17 and the measurement received by the ultrasonic transducer 16 is repeated N times, and the propagation time t2 is calculated by the calculation unit 23.
ここで、超音波送受波器16と超音波送受波器17の中心を結ぶ距離をL、空気の無風状態での音速をC、流量測定部15内での流速をV、非測定流体の流れの方向と超音波送受波器16と超音波送受波器17の中心を結ぶ線との角度をθとすると、伝搬時間t1、t2は、
t1=L/(C+Vcosθ) (1)
t2=L/(C−Vcosθ) (2)
で示される。(1)(2)式より音速Cを消去して、流速Vを求めると
V=L/2cosθ(1/t1−1/t2) (3)
が得られる。L、θは既知であるのでt1とt2を測定すれば流速Vが求められる。この流速Vと流量測定部15の面積をS、補正係数をKとすれば、流量Qは
Q=KSV (4)
で演算できる。
Here, the distance connecting the centers of the ultrasonic transducer 16 and the ultrasonic transducer 17 is L, the speed of sound in an air-free state is C, the flow velocity in the flow rate measurement unit 15 is V, and the flow of the non-measurement fluid And the propagation time t1, t2 are given by θ being the angle between the direction of the line and the line connecting the centers of the ultrasonic transducer 16 and the ultrasonic transducer 17.
t1 = L / (C + V cos θ) (1)
t2 = L / (C − Vcos θ) (2)
Indicated by (1) (2) to erase the sound velocity C from equation when obtaining the flow velocity V V = L / 2cosθ (1 / t1 - 1 / t2) (3)
Is obtained. Since L and θ are known, the flow velocity V can be obtained by measuring t1 and t2. If the flow velocity V and the area of the flow rate measuring unit 15 are S and the correction coefficient is K, the flow rate Q is Q = KSV (4)
It can be calculated with.
以上のように、本発明にかかる超音波送受波器の固定具およびそれを用いた超音波流量計は、外乱要因である導電体や衝撃を直接電極ピンに受けなくなりことで、電気的な短絡を防止することが可能となるので、被測定流体の流量測定を安定性の高い計測が可能となる。更に、超音波により気体や液体の流量や流速の計測を行う超音波流量計等の用途にも適用できる。 As described above, the ultrasonic transducer fixture according to the present invention and the ultrasonic flowmeter using the fixture are electrically short-circuited by not being directly subjected to a conductor or an impact as a disturbance factor on the electrode pin. Therefore, it is possible to measure the flow rate of the fluid to be measured with high stability. Furthermore, the present invention can be applied to applications such as an ultrasonic flowmeter that measures the flow rate and flow velocity of gas and liquid by ultrasonic waves.
1 超音波送受波器
3 固定具
8a、8b リード線室
9a、9b、9c、9d 保護壁
12 天壁
13 隙間
DESCRIPTION OF SYMBOLS 1 Ultrasonic transducer 3 Fixing tool 8a, 8b Lead wire chamber 9a, 9b, 9c, 9d Protective wall 12 Top wall 13 Crevice
Claims (1)
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| Application Number | Priority Date | Filing Date | Title |
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| JP2006020270A JP4582011B2 (en) | 2006-01-30 | 2006-01-30 | Ultrasonic flow meter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006020270A JP4582011B2 (en) | 2006-01-30 | 2006-01-30 | Ultrasonic flow meter |
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| Publication Number | Publication Date |
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| JP2007201992A JP2007201992A (en) | 2007-08-09 |
| JP4582011B2 true JP4582011B2 (en) | 2010-11-17 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5175805B2 (en) * | 2009-07-03 | 2013-04-03 | 日本特殊陶業株式会社 | Ultrasonic device |
| JP5175804B2 (en) * | 2009-07-03 | 2013-04-03 | 日本特殊陶業株式会社 | Ultrasonic device |
| US20120266690A1 (en) | 2009-11-19 | 2012-10-25 | Panasonic Corporation | Ultrasonic flow meter device |
| JP5659956B2 (en) | 2011-06-03 | 2015-01-28 | パナソニックIpマネジメント株式会社 | Ultrasonic transducer and ultrasonic flowmeter |
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| JPH0416342Y2 (en) * | 1986-08-13 | 1992-04-13 | ||
| JPH0521819Y2 (en) * | 1987-11-30 | 1993-06-04 | ||
| JP3533941B2 (en) * | 1998-05-08 | 2004-06-07 | 松下電器産業株式会社 | Ultrasonic flow meter |
| JP2000350293A (en) * | 1999-03-29 | 2000-12-15 | Taiyo Yuden Co Ltd | Piezoelectric vibrator, and piezoelectric sound device and its manufacture |
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