JP4587786B2 - Position adjustment device - Google Patents

Description

  The present invention relates to a position adjusting device capable of accurately adjusting the position of a moving object or a table on which the moving object is mounted on a base with a small number of drive sources.

Conventionally, for example, a position adjusting device is used to move or process a semiconductor wafer (including one after a semiconductor circuit is formed), an electric circuit board, or the like (including mounting of an electronic component or the like) ( For example, see Patent Document 1). In the technology of the moving base device disclosed in Patent Document 1, a moving base is provided on a fixed base, and the moving base is fixed to the fixed base using two servo motors, two in each of the X direction and the Y direction. The left and right direction movement, the front and rear direction movement, and the horizontal rotation are possible.
JP 2004-160640 A

However, in Patent Document 1, etc., there is a problem that the apparatus becomes large because four servomotors are used.
In the conventional position adjusting device, when the X direction drive mechanism (X mechanism), the X direction drive mechanism (Y mechanism), and the rotation mechanism (θ mechanism) are controlled to rotate, the X mechanism, the Y mechanism, and the θ mechanism. Each will be controlled independently.
In this case, since the center of rotation is fixed, when a transmission hole (working hole) in the direction of the rotation axis is required, the base itself must have a large transmission hole. You have to prepare a big base. Further, when the base surface is large, there is a problem that the rigidity of the base itself is lowered.
An object of the present invention is to provide a position adjusting device capable of accurately adjusting the position of an object with a small number of driving sources on a base.
Another object of the present invention is to provide a position adjusting device that can freely set the center of rotation, and thereby can open a large transmission hole in the base without increasing the size of the base, for example. It is in.

  The position adjusting device according to claim 1, wherein a first X-direction moving member provided on the first X-direction guide member fixed on the base so as to be movable in the X-direction, and the first X-direction moving on the base. A second X-direction moving member provided to be movable in the X direction on a second X-direction guiding member fixed at a distance from the member, and a first Y-direction guide fixed to the first X-direction moving member. The first Y-direction moving member provided to be movable in the Y direction on the member and the second Y-direction guide member fixed to the second X-direction moving member are provided to be movable in the Y direction. 2Y-direction moving member, first X-direction driving device that moves the first X-direction moving member in the X direction, second X-direction driving device that moves the second X-direction moving member in the X direction, and the first Y-direction moving member as Y Move the direction The first Y-direction moving member is provided with a first shaft support portion that pivotally supports a moving object or a table on which the moving object is mounted, and the second Y-direction moving member includes the movement A second shaft support portion for supporting the object or the table is provided.

  According to a second aspect of the present invention, in the position adjusting device according to the first aspect, the X-direction moving member provided on the X-direction guide member fixed on the base so as to be movable in the X direction. The Y-direction guide member fixed to the X-direction movement member includes at least one pair with a Y-direction movement member provided so as to be movable in the Y-direction. A shaft support part for supporting the moving object or the table is provided.

  In the position information storage device of the present invention, the number of drive devices can be three, and since the drive device dedicated to rotation is not provided, the device can be miniaturized. Further, the position of the object can be accurately adjusted with a small number of drive sources on the base. Furthermore, the center of rotation can be set freely, which makes it easy to open a transmission hole in the base without enlarging the base, for example.

  FIG. 1 is an external view showing an embodiment of a position adjusting device of the present invention. In FIG. 1, the position adjusting device 11 includes a first X direction guide member 111 and a first X direction moving member 112, a second X direction guide member 113 and a second X direction moving member 114, a first Y direction guide member 121 and a first Y direction moving member. 122, a second Y-direction guide member 123, a second Y-direction moving member 124, a first X-direction drive device 131, a second X-direction drive device 132, and a Y-direction drive device 133.

The first X-direction moving member 112 is provided on the first X-direction guide member 111 fixed on the base 181 so as to be movable in the X direction.
The second X-direction moving member 114 is provided on a second X-direction guide member 113 fixed on the base 181 with a distance from the first X-direction moving member 112 so as to be movable in the X direction. The first Y-direction moving member 122 is provided on the first Y-direction guide member 121 fixed to the first X-direction moving member 112 so as to be movable in the Y direction. The second Y-direction moving member 124 is provided on the second Y-direction guide member 123 fixed to the second X-direction moving member 114 so as to be movable in the Y direction.

  The first X direction driving device 131 can move the first X direction moving member 112 in the X direction, and the second X direction driving device 132 can move the second X direction moving member 114 in the X direction. Further, the Y-direction drive device 133 can move the first Y-direction moving member 122 in the Y direction. As these drive devices (that is, actuators), a motor is usually used.

  The first Y-direction moving member 122 is provided with a first shaft support portion 141 that supports a table 191 on which a wafer or the like (not shown) to be moved is mounted, and the second Y-direction moving member 124 has a table 191. A second shaft support portion 142 is provided to support the shaft. Table receivers 151 and 152 for receiving a table 191 are provided around the first shaft support portion 141 and the second shaft support portion 142. Note that the table 191 is shown as a rectangular plate for convenience of explanation, but can be appropriately shaped so that a movement target (wafer or the like) can be set. In the following embodiments, the moving object is mounted on the table 191 and moved. However, the moving object itself can be directly mounted on the first shaft support part 141 and the second shaft support part 142 and moved.

  2A and 2B are plan explanatory views showing the operation of the position adjusting device 11 of FIG. 1 in a simplified manner. FIG. 2B shows a state in which the first shaft support portion 141 and the second shaft support portion 142 are displaced counterclockwise at the rotation angle α around P0 in FIG.

2A and 2B, the positions before displacement of the first shaft support 141 and the second shaft support 142 are indicated by P1 and P2, and the positions after the displacement are indicated by P1 'and P2'.
As shown in FIGS. 2A and 2B, the first shaft support portion 141 and the second shaft support portion 142 are arranged in the X direction of the first X direction moving member 112, the second X direction moving member 114, and the first Y direction moving member 122. Substantial rotation is performed by movement and movement in the Y direction.

FIG. 3 shows an embodiment in which the control unit 2 is provided in the position adjusting device 11 of FIG. A personal computer can be used as the control unit 2.
In FIG. 3, the control unit 2 includes a position information storage device 21, a rotation angle setting device 22, a drive amount calculation device 23, a drive signal output device 24, a center position change device 25, and a position information update device 26. It has. Here, the drive signal output device 24 includes a first X-direction drive signal output device 241 that drives the first X-direction drive device 131, a second X-direction drive signal output device 242 that drives the second X-direction drive device 132, and a Y-direction. And a Y-direction drive signal output device 243 for driving the drive device 133.

The position information storage device 21 holds the position information of the predetermined base point P0, the position information of the first shaft support 141 (P1), and the position information of the second shaft support 142 (P2).
The rotation angle setting device 22 can set the rotation angle α of the first shaft support 141 and the second shaft support 142 around the predetermined base point P0.

  When the rotation angle α is set by the rotation angle setting device 22, the drive amount calculation device 23 uses the position information P 1 and P 2 of the first shaft support portion 141 and the second shaft support portion 142 stored in the position information storage device 21. With reference to this, the drive amounts of the first X-direction drive device 131, the second X-direction drive device 132, and the Y-direction drive device 133 corresponding to the rotation angle α are calculated.

The first X-direction drive signal output device 241, the second X-direction drive signal output device 242, and the Y-direction drive signal output device 243 drive the drive signal corresponding to the drive amount calculated by the drive amount calculation device 23 to the first X-direction drive. Output to the device 131, the second X-direction drive device 132, and the Y-direction drive device 133.
Hereinafter, the operation of the position adjusting device 11 provided with the control unit 2 shown in FIG. 3 will be described with reference to FIG.

Here, in the position information storage device 21, the X-direction distance X1 from the predetermined base point P0 to the first shaft support 141 (P1), the Y-direction distance Y1 from the predetermined base point P0 to the first shaft support 141 (P1), The distance A (X2-X1) in the X direction from the first shaft support 141 (P1) to the second shaft support 142 (P2) and the distance L (between P1 and P2) between the first shaft support 141 and the second shaft support 142 Distance) is stored. In addition, it is assumed that the rotation angle α around the predetermined base point P0 is set in the rotation angle setting device 22. In addition, without memorizing the distance L (distance between P1 and P2) between the first shaft support portion 141 and the second shaft support portion 142, the first shaft support portion 141 (P1) to the second shaft support portion 142 (P2). The Y-direction distance B may be stored. In this case, L is (A ² + B ² ) ^1/2 .

  The drive amount calculation device 23 calculates the X-direction displacement amount ΔX1 of the first shaft support portion 141, the X-direction displacement amount ΔX2 of the second shaft support portion 142, and the Y-direction displacement amount ΔY1 of the first shaft support portion 141.

Prior to this calculation, the angle θ1 with respect to the X direction of the line connecting the predetermined base point P0 before displacement and the first shaft support portion 141 (P1), the first shaft support portion 141 (P1), and the second shaft support portion 141 (P2). An angle θ2 with respect to the Y direction of the line connecting the two and a rotation radius R are calculated in advance.
θ1 = tan ⁻¹ (Y1 / X1)
θ2 = sin ⁻¹ [(X2−X1) / L]
(L: distance between the first shaft support 141 (P1) and the second shaft support 141 (P2))
R = (X1 ² + Y1 ² ) ^1/2

Since these values do not depend on the rotation angle α, they may be calculated in advance and stored in a predetermined storage device (not shown).
The X-direction displacement amount ΔX1 of the first shaft support portion 141, the X-direction displacement amount ΔX2 of the second shaft support portion 142, and the Y-direction displacement amount ΔY1 of the first shaft support portion 141 are expressed as follows.
ΔX1 = R × cos (θ1−α) −X1
ΔX2 = L × sin (θ2−α) + ΔX1− (X2−X1)
ΔY1 = R × sin (θ1−α) −Y1

  The position information update device 26 updates X1, Y1, X2-X1 of the position information storage device 21 when the movement of the table 191 is completed.

In the position adjusting device 11, there is a case where it is desired to change the displacement center of the table 191 as appropriate. In this embodiment, the center position changing device 25 changes the center position to a desired location (stored in the position information storage device 21. Change the location information).
For example, when the table 191 needs to be operated, processed, etc. from the back side, it is necessary to open a hole (not shown) in the base 181. However, in the position adjusting device 11 of the present embodiment, this displacement center is set to an appropriate position. Since it can be set, there is no need to increase the size of the hole. In addition, the aspect which opens a hole is mentioned later (refer FIG. 5).

  In the embodiment of FIG. 1, if the width of the table 191 is too large, the table 191 cannot be accurately held, and a large torque is applied to the first shaft support 141 and the second shaft support 142. In such a case, the position adjusting device shown in FIG. 5 can be used. The position adjusting device 12 of FIG. 5 is configured to support the table 191 at four points, and the base 181 is formed with holes 3 for performing operations, processing, and the like on the table 191 from the lower surface.

  1, the third X direction guide member 115, the third X direction moving member 116, the fourth X direction guide member 117, the fourth X direction moving member 118, the third Y direction guide member 125, A third Y-direction moving member 126, a fourth Y-direction guiding member 127, and a fourth Y-direction moving member 128 are provided.

  The third X-direction moving member 116 is provided on the third X-direction guide member 115 fixed on the X-direction axis of the first X-direction guide member 111 on the base 181 so as to be movable in the X direction.

The fourth X direction moving member 118 is movable in the X direction to the fourth X direction guiding member 117 fixed to the third X direction moving member 116 on the X direction axis of the second X direction guiding member 113 on the base 181. Is provided.
The third Y-direction moving member 126 is provided on the third Y-direction guide member 125 fixed to the third X-direction moving member 116 so as to be movable in the Y direction.
The fourth Y-direction moving member 128 is provided on the fourth Y-direction guide member 127 fixed to the fourth X-direction moving member 118 so as to be movable in the Y direction.
The third Y-direction moving member 126 is provided with a third shaft supporting portion that supports the table 191, and the fourth Y-direction moving member 128 is provided with a fourth shaft supporting portion that supports the table 191. Table receivers 153 and 154 for receiving a table 191 are provided around the third shaft support portion 143 and the fourth shaft support portion 144.
In the embodiment of FIG. 5, the third X direction guide member 115 and the fourth X direction guide member 117 are provided on the X direction axis of the first X direction guide member 111 and the second X direction guide member 113. It is not limited to this. A third X direction guide member 115, a third X direction movement member 116, a third Y direction guide member 125, a set of support mechanisms for the table 191 of the third Y direction movement member 126, a fourth X direction guide member 117, a fourth X direction movement member 118, The installation positions and orientations of the support mechanisms for the table 191 of the fourth Y-direction guide member 127 and the fourth Y-direction moving member 128 are arbitrary. Instead of these table support mechanisms, any mechanism can be adopted as long as it can support the table 191 without restricting movement in the XY directions.

Further, as shown in FIG. 6, in addition to the components of the position adjusting device 11 of FIG. 1, the third X-direction guide member 115 and the third X-direction moving member 116, and the third Y-direction guide member 125 and the third Y-direction movement. By providing the member 126, the position adjusting device 12 can be configured to support the table 191 at three points.
Although not shown, the position adjusting device 12 may be configured to support at five or more points.

It is an external view which shows embodiment of the position adjustment apparatus of this invention. (A), (B) is plane explanatory drawing which simplifies and shows the operation | movement of the position adjustment apparatus of FIG. It is a figure which shows embodiment by which the control part was provided in the position adjustment apparatus of FIG. It is a figure for demonstrating operation | movement of the position adjustment apparatus provided with the control part shown in FIG. It is an external view which shows embodiment of the position adjustment apparatus of a structure so that a table may be supported by 4 points | pieces. It is an external view which shows embodiment of the position adjustment apparatus of a structure so that a table may be supported by 3 points | pieces.

Explanation of symbols

11 Position Adjustment Device 21 Position Information Storage Device 22 Rotation Angle Setting Device
23 driving amount calculation device 24 driving signal output device 25 center position changing device 26 position information updating device 27 driving signal output device 111 first X direction guide member 112 first X direction moving member 113 second X direction guiding member 114 second X direction moving member 115 3rd X direction guiding member 116 3rd X direction moving member 117 4th X direction guiding member 118 4th X direction moving member 121 1st Y direction guiding member 122 1st Y direction moving member 123 2nd Y direction guiding member 124 2nd Y direction moving member 125 3rd Y Direction guide member 126 3rd Y direction moving member 127 4th Y direction guide member 128 4th Y direction moving member 131 1st X direction drive device 132 2nd X direction drive device 133 Y direction drive device 141 1st shaft support portion 142 2nd shaft support portion 151 152,153,154 Table receiver 181 Base 191 table

Claims (2)

A first X-direction moving member provided on the first X-direction guide member fixed on the base so as to be movable in the X direction;
A second X direction moving member provided on the base so as to be movable in the X direction on a second X direction guiding member fixed at a distance from the first X direction moving member;
A first Y-direction moving member provided on the first Y-direction guide member fixed to the first X-direction moving member so as to be movable in the Y direction;
A second Y-direction moving member provided on the second Y-direction guiding member fixed to the second X-direction moving member so as to be movable in the Y direction;
A first X-direction drive device for moving the first X-direction moving member in the X direction;
A second X-direction drive device for moving the second X-direction moving member in the X direction;
A Y-direction drive device that moves the first Y-direction moving member in the Y direction;
The first Y-direction moving member is provided with a first pivot support that pivotally supports a moving object or a table on which the moving object is mounted,
The second Y-direction moving member is provided with a second shaft support portion that supports the object to be moved or the table. The X-direction guide member fixed on the base can be moved in the Y-direction by the X-direction movement member provided to be movable in the X-direction and the Y-direction guide member fixed to the X-direction movement member. At least one pair with the Y-direction moving member provided
The position adjusting device according to claim 1, wherein each Y-direction moving member is provided with a shaft support portion that supports the moving object or the table.

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