Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP4600129B2 - Solid state laser equipment - Google Patents
[go: Go Back, main page]

JP4600129B2 - Solid state laser equipment - Google Patents

Solid state laser equipment Download PDF

Info

Publication number
JP4600129B2
JP4600129B2 JP2005116430A JP2005116430A JP4600129B2 JP 4600129 B2 JP4600129 B2 JP 4600129B2 JP 2005116430 A JP2005116430 A JP 2005116430A JP 2005116430 A JP2005116430 A JP 2005116430A JP 4600129 B2 JP4600129 B2 JP 4600129B2
Authority
JP
Japan
Prior art keywords
etalon
voltage
laser light
solid
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005116430A
Other languages
Japanese (ja)
Other versions
JP2006295015A (en
Inventor
守 久光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2005116430A priority Critical patent/JP4600129B2/en
Publication of JP2006295015A publication Critical patent/JP2006295015A/en
Application granted granted Critical
Publication of JP4600129B2 publication Critical patent/JP4600129B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Lasers (AREA)

Description

本発明は、固体レーザ装置に関し、さらに詳しくは、高速にモード波長を制御することが出来ると共に大きな電力を消費しない固体レーザ装置に関する。   The present invention relates to a solid-state laser device, and more particularly to a solid-state laser device that can control a mode wavelength at high speed and does not consume a large amount of power.

従来、励起レーザ光を出射する半導体レーザと、励起レーザ光により励起され基本波レーザ光を誘導放出するレーザ媒質と、縦モードをシングル化するためのエタロンと、光共振器の一端を構成すると共に出力レーザ光を透過させる出力ミラーと、エタロンを加熱するヒータの温度を変化させることにより高周波ノイズが最も少なくなるようにする温度チューニング手段とを具備した固体レーザ装置が知られている(例えば、特許文献1参照。)。
特開2003−158318号公報
Conventionally, a semiconductor laser that emits excitation laser light, a laser medium that is excited by excitation laser light and stimulates and emits fundamental wave laser light, an etalon for making a longitudinal mode into a single unit, and one end of an optical resonator are configured. 2. Description of the Related Art A solid-state laser device including an output mirror that transmits output laser light and a temperature tuning unit that minimizes high-frequency noise by changing the temperature of a heater that heats an etalon is known (for example, a patent) Reference 1).
JP 2003-158318 A

上記従来の固体レーザ装置において、エタロンを加熱するヒータの温度を変化させることによりエタロンの光学的厚みを変化させて、モード波長を制御することが可能であった。
しかし、温度による制御は応答が遅いため、例えば外乱に応じて高速にモード波長を制御することが出来ない問題点がある。また、ヒータは大きな電力を消費する問題点がある。
そこで、本発明の目的は、高速にモード波長を制御することが出来ると共に大きな電力を消費しない固体レーザ装置を提供することにある。
In the conventional solid-state laser device, the mode wavelength can be controlled by changing the optical thickness of the etalon by changing the temperature of the heater that heats the etalon.
However, since control by temperature is slow in response, there is a problem that the mode wavelength cannot be controlled at high speed according to disturbance, for example. In addition, the heater has a problem of consuming large electric power.
Therefore, an object of the present invention is to provide a solid-state laser device that can control the mode wavelength at high speed and does not consume a large amount of power.

第1の観点では、本発明は、励起レーザ光を出射する半導体レーザと、前記励起レーザ光により励起され基本波レーザ光を誘導放出するレーザ媒質と、縦モードをシングル化するためのエタロンと、光共振器の一端を構成すると共に出力レーザ光を透過させる出力ミラーと、前記エタロンに所定の電圧を印加して前記エタロンの屈折率を調整することによりモード波長を制御するモード波長制御手段とを具備したことを特徴とする固体レーザ装置を提供する。
上記第1の観点による固体レーザ装置では、エタロンに電圧を印加し、その電圧を変化させて、電気光学効果により、エタロンの屈折率を変化させ、これによりモード波長を制御する。この電気光学効果の応答は速いため、例えば外乱に応じて高速にモード波長を制御することが出来る。また、電流はほとんど流れないため、大きな電力を消費することがなくなる。
In a first aspect, the present invention relates to a semiconductor laser that emits excitation laser light, a laser medium that is excited by the excitation laser light and stimulates and emits fundamental wave laser light, an etalon for making the longitudinal mode into a single unit, An output mirror that constitutes one end of an optical resonator and transmits output laser light; and a mode wavelength control unit that controls a mode wavelength by applying a predetermined voltage to the etalon to adjust a refractive index of the etalon. A solid-state laser device is provided.
In the solid-state laser device according to the first aspect, a voltage is applied to the etalon, the voltage is changed, and the refractive index of the etalon is changed by the electro-optic effect, thereby controlling the mode wavelength. Since the response of the electro-optic effect is fast, the mode wavelength can be controlled at high speed according to a disturbance, for example. In addition, since almost no current flows, large power is not consumed.

第2の観点では、本発明は、前記第1の観点による固体レーザ装置において、前記エタロンが、タンタル酸リチウムまたはニオブ酸リチウムからなることを特徴とする固体レーザ装置を提供する。
上記第2の観点による固体レーザ装置では、電気光学効果の大きな材料でエタロンを構成するため、制御効率を向上できる。
In a second aspect, the present invention provides the solid-state laser apparatus according to the first aspect, wherein the etalon is made of lithium tantalate or lithium niobate.
In the solid-state laser device according to the second aspect, since the etalon is made of a material having a large electro-optic effect, the control efficiency can be improved.

第3の観点では、本発明は、前記第1または前記第2の観点による固体レーザ装置において、前記エタロンの温度を調整するためのエタロン温調手段を具備すると共に、前記モード波長制御手段は、前記エタロンに印加する電圧および前記エタロンの温度の両方を併用してモード波長を制御することを特徴とする固体レーザ装置を提供する。
上記第3の観点による固体レーザ装置では、例えば外乱が加わった場合はエタロンに印加する電圧を調整して高速にモード波長を制御すると共に、その後はエタロンに印加する電圧による制御のマージンが大きくなるようにエタロンの温度を調整し、電圧を再調整する。これにより、繰り返し外乱が起こった場合にも好適に対応できる。
In a third aspect, the present invention provides the solid-state laser device according to the first or second aspect, further comprising etalon temperature adjusting means for adjusting the temperature of the etalon, and the mode wavelength control means includes: A solid-state laser device characterized by controlling a mode wavelength by using both a voltage applied to the etalon and a temperature of the etalon in combination.
In the solid-state laser device according to the third aspect, for example, when a disturbance is applied, the voltage applied to the etalon is adjusted to control the mode wavelength at a high speed, and thereafter, the control margin due to the voltage applied to the etalon increases. Adjust the etalon temperature and readjust the voltage. Thereby, it can respond suitably also when a disturbance repeatedly occurs.

本発明の固体レーザ装置によれば、応答が速い電気光学効果を利用するため、高速にモード波長を制御することが出来る。また、電流がほとんど流れないため、大きな電力を消費することがなくなる。   According to the solid-state laser device of the present invention, the mode wavelength can be controlled at high speed because the electro-optic effect having a quick response is used. In addition, since no current flows, large power is not consumed.

以下、図に示す実施例により本発明をさらに詳細に説明する。なお、これにより本発明が限定されるものではない。   Hereinafter, the present invention will be described in more detail with reference to the embodiments shown in the drawings. Note that the present invention is not limited thereby.

図1は、実施例1に係る固体レーザ装置100を示す構成説明図である。
この固体レーザ装置100は、励起レーザ光Leを出射する半導体レーザ1と、励起レーザ光LeをNd:YAGレーザ媒質3に集光する集光レンズ2と、励起レーザ光Leで励起され基本波レーザ光を誘導放出するNd:YAGレーザ媒質3と、基本波レーザ光を高調波レーザ光に変換する非線形光学素子4と、縦モードをシングル化するためのエタロン5と、光共振器7の一端を構成すると共に出力レーザ光Loを透過させる出力ミラー6と、出力レーザ光Loの一部を取り出すビームスプリッタ8と、半導体レーザ1を駆動する半導体レーザ駆動回路9とを具備している。
FIG. 1 is a configuration explanatory diagram illustrating a solid-state laser device 100 according to the first embodiment.
The solid-state laser device 100 includes a semiconductor laser 1 that emits excitation laser light Le, a condensing lens 2 that condenses the excitation laser light Le on an Nd: YAG laser medium 3, and a fundamental laser that is excited by the excitation laser light Le. An Nd: YAG laser medium 3 that stimulates and emits light, a nonlinear optical element 4 that converts fundamental laser light into harmonic laser light, an etalon 5 for making a longitudinal mode into a single unit, and one end of an optical resonator 7 An output mirror 6 configured to transmit the output laser light Lo, a beam splitter 8 for extracting a part of the output laser light Lo, and a semiconductor laser driving circuit 9 for driving the semiconductor laser 1 are provided.

また、固体レーザ装置100は、ビームスプリッタ8で取り出したレーザ光を受光する受光素子11と、受光素子11における受光強度が一定になるように半導体レーザ駆動回路9を介して半導体レーザ1を制御する制御装置12と、光共振器7の全体を加熱または冷却するための光共振器温調器21と、エタロン5を加熱または冷却するためのエタロン温調器22と、制御装置12の制御下で光共振器温調器21を駆動する第1温調器駆動回路23と、制御装置12の制御下でエタロン温調器22を駆動する第2温調器駆動回路24と、制御装置12の制御下でエタロン5に電極31,32を介して直流電圧Vを印加するための直流電源回路30とを具備している。   The solid-state laser device 100 controls the semiconductor laser 1 via the light receiving element 11 that receives the laser light extracted by the beam splitter 8 and the semiconductor laser driving circuit 9 so that the light reception intensity at the light receiving element 11 is constant. Under the control of the control device 12, an optical resonator temperature controller 21 for heating or cooling the entire optical resonator 7, an etalon temperature controller 22 for heating or cooling the etalon 5, and the control device 12. A first temperature controller driving circuit 23 that drives the optical resonator temperature controller 21, a second temperature controller driving circuit 24 that drives the etalon temperature controller 22 under the control of the control device 12, and control of the control device 12. A DC power supply circuit 30 for applying a DC voltage V to the etalon 5 via the electrodes 31 and 32 is provided.

エタロン5は、タンタル酸リチウムやニオブ酸リチウムなど、電気光学効果の大きな材料からなる。   The etalon 5 is made of a material having a large electro-optic effect, such as lithium tantalate or lithium niobate.

図2に示すように、電極31,32の間隔をdとし、エタロン5の厚さをLとし、x方向に進んでエタロン5に入射するz方向に偏光した光に対する屈折率をneとし、ポッケルス定数をr33とし、電極31,32間に電圧Vを印加するとき、電気光学効果による屈折率変化の大きさ|Δn|は、
|Δn|=0.5・ne 3・r33・|V|/d (1)
である(宮澤信太郎「光学結晶」培風館、74頁)。
As shown in FIG. 2, the distance between the electrodes 31 and 32 is d, the thickness of the etalon 5 is L, the refractive index and n e for light polarized in the z-direction incident on the etalon 5 advances in the x-direction, When the Pockels constant is r 33 and the voltage V is applied between the electrodes 31 and 32, the magnitude of the refractive index change | Δn |
| Δn | = 0.5 · ne 3 · r 33 · | V | / d (1)
(Shintaro Miyazawa “Optical Crystal” Baifukan, p. 74).

他方、エタロン5のM次のモード波長λMは、
λM=2・ne・L/M (2)
であるから、屈折率変化の大きさが|Δn|のときの波長変化の大きさ|Δλ|は、
|Δλ|=2・|Δn|・L/M (2’)
On the other hand, the M-order mode wavelength λ M of the etalon 5 is
λ M = 2 · ne · L / M (2)
Therefore, the magnitude of the wavelength change | Δλ | when the magnitude of the refractive index change is | Δn |
| Δλ | = 2 · | Δn | · L / M (2 ′)

(1)(2)により(2’)式を変形すると、
|Δλ|=2・|Δn|・L/M
=2・|Δn|・L/(2・ne・L/λM
=λM・|Δn|/ne
=0.5・λM・ne 2・r33・|V|/d (3)
となる。
(1) When (2 ′) is transformed by (2),
| Δλ | = 2 · | Δn | · L / M
= 2 · | Δn | · L / (2 · ne · L / λ M )
= Λ M · | Δn | / n e
= 0.5 · λ M · n e 2 · r 33 · | V | / d (3)
It becomes.

数値例として、λM=1.0[μm]、ne=2.2、r33=36×10-12[m/V]、V=100[V]、d=0.4[mm]とすれば、
|Δλ|=22[pm]
となる。
As numerical examples, λ M = 1.0 [μm], ne = 2.2, r 33 = 36 × 10 −12 [m / V], V = 100 [V], d = 0.4 [mm] given that,
| Δλ | = 22 [pm]
It becomes.

22[pm]という値は、共振器長23[mm]、波長1.0[μm]のレーザの発振波長付近での縦モード間隔である(ただし、共振器を中空として計算している)。従って、光共振器7の共振器長が23[mm]以上で、レーザの波長1.0[μm]なら、100[V]程度の電圧Vを印加することで発振縦モードをホップさせることが可能である。   The value 22 [pm] is a longitudinal mode interval near the oscillation wavelength of a laser having a resonator length of 23 [mm] and a wavelength of 1.0 [μm] (however, the resonator is calculated as hollow). Therefore, if the resonator length of the optical resonator 7 is 23 [mm] or more and the laser wavelength is 1.0 [μm], the oscillation longitudinal mode can be hopped by applying a voltage V of about 100 [V]. Is possible.

最初に、制御装置12は、電圧Vの調整範囲がVo±Vhとするとき、直流電源回路30の出力電圧V=Voとし、それで出力が安定になるように第2温調器駆動回路24でエタロン5の温度を調整し、運転する。
運転中に出力が不安定になると、直流電源回路30の出力電圧Vを調整して高速応答で出力を安定化させる。その後、直流電源回路30の出力電圧Vが一定になると、出力電圧VがVoに近づく方向に第2温調器駆動回路24でエタロン5の温度を調整する。これにより、電圧Vの調整範囲を最大マージンの±Vhに戻すことが出来る。
First, when the adjustment range of the voltage V is set to Vo ± Vh, the control device 12 sets the output voltage V = Vo of the DC power supply circuit 30 so that the output is stabilized by the second temperature controller driving circuit 24. Adjust the temperature of the etalon 5 and operate.
If the output becomes unstable during operation, the output voltage V of the DC power supply circuit 30 is adjusted to stabilize the output with a high-speed response. Thereafter, when the output voltage V of the DC power supply circuit 30 becomes constant, the temperature of the etalon 5 is adjusted by the second temperature controller driving circuit 24 in a direction in which the output voltage V approaches Vo. Thereby, the adjustment range of the voltage V can be returned to the maximum margin ± Vh.

実施例1の固体レーザ装置100によれば、エタロン5に電圧Vを印加し、その電圧Vを変化させて、電気光学効果により、エタロン5の屈折率を変化させ、これによりモード波長を制御する。この電気光学効果の応答は速いため、例えば外乱に応じて高速にモード波長を制御することが出来る。また、電流はほとんど流れないため、大きな電力を消費することがなくなる。また、タンタル酸リチウムやニオブ酸リチウムなどの電気光学効果の大きな材料でエタロンを構成するため、制御効率を向上できる。さらに、エタロン5に印加する電圧Vおよびエタロン5の温度の両方を併用してモード波長を制御するため、エタロン5に印加する電圧Vによる制御のマージンを大きくすることが出来る。   According to the solid-state laser device 100 of the first embodiment, the voltage V is applied to the etalon 5, the voltage V is changed, and the refractive index of the etalon 5 is changed by the electrooptic effect, thereby controlling the mode wavelength. . Since the response of the electro-optic effect is fast, for example, the mode wavelength can be controlled at high speed according to disturbance. In addition, since almost no current flows, large power is not consumed. Further, since the etalon is made of a material having a large electro-optic effect such as lithium tantalate or lithium niobate, the control efficiency can be improved. Furthermore, since the mode wavelength is controlled by using both the voltage V applied to the etalon 5 and the temperature of the etalon 5, the control margin by the voltage V applied to the etalon 5 can be increased.

本発明の固体レーザ装置は、バイオエンジニアリング分野や計測分野で利用できる。   The solid-state laser device of the present invention can be used in the bioengineering field and the measurement field.

実施例1に係る固体レーザ装置を示す構成説明図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration explanatory diagram illustrating a solid-state laser device according to a first embodiment. エタロンの拡大模式図である。It is an expansion schematic diagram of an etalon.

符号の説明Explanation of symbols

1 半導体レーザ
2 集光レンズ
3 Nd:YAGレーザ媒質
4 非線形光学素子
5 エタロン
6 出力ミラー
7 光共振器
8 ビームスプリッタ
9 半導体レーザ駆動回路
100 固体レーザ装置
DESCRIPTION OF SYMBOLS 1 Semiconductor laser 2 Condensing lens 3 Nd: YAG laser medium 4 Nonlinear optical element 5 Etalon 6 Output mirror 7 Optical resonator 8 Beam splitter 9 Semiconductor laser drive circuit 100 Solid state laser apparatus

Claims (2)

励起レーザ光を出射する半導体レーザと、前記励起レーザ光により励起され基本波レーザ光を誘導放出するレーザ媒質と、前記基本波レーザ光の縦モードをシングル化するためのエタロンと、光共振器の一端を構成すると共に出力レーザ光を透過させる出力ミラーとを有する固体レーザにおいて、
前記エタロンに電圧を印加し、前記電圧を制御して、前記出力レーザ光を安定化させるとともに、
前記電圧が一定になった時を契機として、前記電圧が当該電圧の調整範囲の中央値に近づく方向に変化するように、前記エタロンの温度を調整することを特徴とする固体レーザの出力安定化方法。
A semiconductor laser that emits pump laser light; a laser medium that is pumped by the pump laser light and stimulates and emits fundamental wave laser light; an etalon for unifying the longitudinal mode of the fundamental laser light; and an optical resonator In a solid-state laser having an output mirror that constitutes one end and transmits output laser light,
Applying a voltage to the etalon and controlling the voltage to stabilize the output laser light,
The output stabilization of the solid-state laser, characterized in that, when the voltage becomes constant, the temperature of the etalon is adjusted so that the voltage changes in a direction approaching the median value of the adjustment range of the voltage. Method.
請求項1に記載の固体レーザの出力安定化方法において、前記エタロンが、タンタル酸リチウムまたはニオブ酸リチウムからなることを特徴とする固体レーザ装置の出力安定化方法。 2. The output stabilization method for a solid-state laser according to claim 1, wherein the etalon is made of lithium tantalate or lithium niobate.
JP2005116430A 2005-04-14 2005-04-14 Solid state laser equipment Expired - Fee Related JP4600129B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005116430A JP4600129B2 (en) 2005-04-14 2005-04-14 Solid state laser equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005116430A JP4600129B2 (en) 2005-04-14 2005-04-14 Solid state laser equipment

Publications (2)

Publication Number Publication Date
JP2006295015A JP2006295015A (en) 2006-10-26
JP4600129B2 true JP4600129B2 (en) 2010-12-15

Family

ID=37415237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005116430A Expired - Fee Related JP4600129B2 (en) 2005-04-14 2005-04-14 Solid state laser equipment

Country Status (1)

Country Link
JP (1) JP4600129B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009016396A (en) * 2007-06-29 2009-01-22 Optical Comb Inc Wavelength scanning type fiber laser light source

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248640A (en) * 1988-08-11 1990-02-19 Nippon Telegr & Teleph Corp <Ntt> Fabry-perot type optical filter
JP2982168B2 (en) * 1989-03-08 1999-11-22 日本電気株式会社 Optical heterodyne homodyne detection communication method
JPH10221669A (en) * 1997-02-03 1998-08-21 Yazaki Corp Optical device, wavelength selection filter, and temperature control method used for these
JP3509598B2 (en) * 1999-01-12 2004-03-22 株式会社島津製作所 Semiconductor laser pumped solid-state laser device
JP2001168439A (en) * 1999-12-09 2001-06-22 Fuji Photo Film Co Ltd Light-emitting device
JP2003270434A (en) * 2002-01-10 2003-09-25 Shin Etsu Chem Co Ltd Etalon and method for producing etalon
JP2003309319A (en) * 2002-04-15 2003-10-31 Toyo Commun Equip Co Ltd Wavelength locker module

Also Published As

Publication number Publication date
JP2006295015A (en) 2006-10-26

Similar Documents

Publication Publication Date Title
JP4654424B2 (en) Light source device
JP4162876B2 (en) Laser equipment
JP3977529B2 (en) Wavelength conversion laser device and laser processing device
JP4891526B2 (en) Laser welding equipment
US20050157382A1 (en) Industrial directly diode-pumped ultrafast amplifier system
CN102112917A (en) Wavelength conversion laser light source, and projection display device, liquid crystal display device, and laser light source provided with same
JP2009544049A (en) Method of controlling light source having precisely controlled wavelength conversion average output, and wavelength conversion system
JPH09260762A (en) Ultrashort pulse laser
US7791790B2 (en) Wavelength converter
CN117239528A (en) Frequency doubling control method and control device for multiplexing frequency doubling crystals and electro-optical modulation elements
JP4600129B2 (en) Solid state laser equipment
JP6508058B2 (en) Light source device and wavelength conversion method
JP3968868B2 (en) Solid state laser equipment
JP3509598B2 (en) Semiconductor laser pumped solid-state laser device
JP6273716B2 (en) Solid state laser equipment
JP2011118012A (en) Laser light source device
JP4763337B2 (en) Semiconductor laser pumped solid-state laser device
JP2011053314A (en) Light source device
JP4968149B2 (en) Solid state laser equipment
JP5087919B2 (en) Laser pointer using semiconductor laser pumped solid-state laser
JP2727935B2 (en) External harmonic generation laser oscillator
JP2008130848A (en) Laser frequency stabilizing apparatus, and laser frequency stabilizing method
JP2003315859A (en) Wavelength conversion laser device
JP3119810U (en) Semiconductor laser pumped solid-state laser device
JP2007242974A (en) Semiconductor laser pumped solid-state laser device

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070612

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070612

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090520

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090526

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090723

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100216

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100408

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100831

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100913

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131008

Year of fee payment: 3

R151 Written notification of patent or utility model registration

Ref document number: 4600129

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131008

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees