JP4614155B2 - Gate valve - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention includes, for example, a transfer passage for transferring a work such as an integrated circuit (IC) and its parts from one vacuum processing chamber to the other vacuum processing chamber, or a flow passage or an exhaust passage for pressure fluid, gas, etc. The present invention relates to a gate valve that can be opened and closed.
[0002]
[Prior art]
Conventionally, for example, in processing apparatuses such as semiconductor wafers and liquid crystal substrates, semiconductor wafers and liquid crystal substrates have been taken in and out of various processing chambers through passages, and the passages are respectively connected to the passages. A gate valve that opens and closes is provided.
[0003]
This type of gate valve is used, for example, after the valve disk reaches the position facing the opening of the valve box by the rotational movement of a valve rod that is displaced under the action of a rotational drive source such as a motor, and then the action of pressure fluid. The passage formed in the valve box is closed by pressing the valve disk against the opening and seating it below.
[0004]
[Problems to be solved by the invention]
By the way, in the gate valve according to the prior art, when the pressure fluid is accidentally supplied for some reason such as trouble in a state where the valve disc does not face the opening, the valve disc is displaced and the inner wall surface of the valve box Therefore, the seal member mounted on the valve disk may come into contact with the inner wall surface, and the valve disk and the seal member may be damaged.
[0005]
The present invention has been made in consideration of the above-mentioned various problems and the like, and is capable of preventing damage to the valve disk and the seal member when pressure fluid is accidentally supplied for some reason. The purpose is to provide.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, the present invention comprises a drive source,
A body to which the drive source is fixed;
A rotating portion disposed inside the body and rotating in a circular arc shape by a predetermined angle under the driving action of the driving source;
A valve disk to which a sealing member for closing the opening of the valve box is mounted;
A displacement mechanism that is integrally connected to the rotating part and that displaces the valve disk toward the opening under the action of a pressure fluid;
With
A first flow path to which a pressure fluid is supplied when the valve disk is seated on the opening is formed in the body, and a second flow path is formed in the rotation part. Only when the valve disk is rotated to a position facing the opening under the drive action of the drive source, the first flow path and the second flow path are communicated with each other so that the pressure fluid is transferred to the displacement mechanism. It is introduced in.
[0007]
Moreover, it is good to provide the shaft part supported by the said body at the said rotation part, and the valve rod which one end part is connected with the said shaft part, and rotates integrally with the said shaft part.
[0008]
In addition, a plurality of cylinder chambers that are separately formed inside the displacement mechanism are provided, and pressure fluid is supplied from the second flow path to each of the plurality of cylinder chambers substantially simultaneously, and the pressure fluid is supplied to the plurality of cylinders. It is preferable to act on each pressure receiving surface of the chamber substantially simultaneously and in the same direction.
[0009]
In the present invention, the first flow path of the body and the second flow path of the rotation section are only moved when the rotation section is rotated under the action of the drive source and the valve disk is displaced to a position facing the opening. And the valve disc closes the opening by supplying pressure fluid to the displacement mechanism. Therefore, even when the pressure fluid is erroneously supplied in a state other than the position where the valve disk faces the opening, the valve disk is not displaced, and the valve disk and the seal member are prevented from being damaged.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Preferred embodiments of the gate valve according to the present invention will be described below and described in detail with reference to the accompanying drawings.
[0011]
In FIG. 1, reference numeral 10 indicates a gate valve according to an embodiment of the present invention.
[0012]
The gate valve 10 basically functions as a drive source, for example, a rotary actuator 12 (hereinafter simply referred to as an actuator 12) (see FIG. 7), a body 14 to which the actuator 12 is fixed, A rotating shaft (shaft portion) 16 supported by the upper portion of the body 14 and rotated by a predetermined angle under the driving action of the actuator 12 and one end portion are connected to the rotating shaft 16, and rotate around the axis of the rotating shaft 16. A rotating portion 19 comprising a valve rod 18 that rotates a predetermined angle as a moving center, a displacement mechanism 21 including a piston 20 provided at the other end of the valve rod 18, and an outer periphery of the piston 20 are inserted and displaced. And a valve disc 22 that is displaced under the action of the mechanism 21.
[0013]
A gear 23 is connected to the drive shaft of the actuator 12, and the gear 23 is provided to rotate in the direction of the arrow A1 or A2 under the drive action of the actuator 12 (see FIG. 7).
[0014]
The body 14 is fixed to the upper portion of the valve box 26 and holds a bearing block 25 that rotatably supports the rotating shaft 16 via a pair of bearing members 28a and 28b, and one end of the rotating shaft 16. A port block 27 in which a first fluid port 38 and a second fluid port 40 to be described later are respectively formed, and a cover plate 29 that closes an opening of the bearing block 25. The port block 27 communicates with the first fluid port 38, communicates with the first fluid passage (first flow path) 31 extending to the rotating shaft 16 side, and the second fluid port 40, and communicates with the rotating shaft. A second communication path 33 extending to the 16 side is formed.
[0015]
A pair of seal members 30a and 30b is mounted on the sliding portion of the rotary shaft 16 and the bearing block 25 via an annular groove portion, and a seal member 30c is provided on the mating surface of the bearing block 25 and the valve box 26. It is attached and the sealing member 30a, 30b, 30c keeps the atmosphere and the inside of the valve box 26 airtight.
[0016]
Further, the port block 27 opens a first fluid port (first flow path) 38 to which a pressure fluid is supplied when a first opening 32 to be described later is closed, and the closed first opening 32. When the pressure fluid is supplied, a second fluid port 40 spaced apart from the first fluid port 38 by a predetermined distance is formed. Inside the port block 27, a support portion 36 that supports one end portion of the rotating shaft 16 is formed. Is formed.
[0017]
Further, as shown in FIG. 1, a first communication passage 31 on the port block 27 side and a first fluid passage (a first fluid passage (described later) on the rotation shaft 16 side) are provided between the port block 27 and one end of the rotation shaft 16. A pair of first packings 44a and 44b are attached to hold the connection portion with the (two flow paths) 42 in an airtight manner.
[0018]
A second communication passage 33 on the port block 27 side and a second fluid passage (to be described later) on the rotation shaft 16 side are provided between the port block 27 adjacent to the first packings 44a and 44b and one end portion of the rotation shaft 16. A second packing 46 that holds the connection portion with the airtight 48 is attached.
[0019]
As shown in FIGS. 3 and 4, in one of the internal spaces of the valve box 26 formed in a substantially oval shape, a first opening for exhausting a gas or the like (not shown) and a work in and out of both ends is provided. 32 and the second opening 34 (see FIGS. 1 and 2) are formed, and the other is a space 52 in which the valve disk 22 is disposed in a state where the first opening 32 and the second opening 34 communicate with each other. (See FIG. 4) is formed.
[0020]
As shown in FIGS. 1 and 2, the rotating shaft 16 that rotates under the driving action of the actuator 12 (see FIG. 7) has a function of transmitting the driving force of the actuator 12 to the valve disk 22 via the valve rod 18. A gear 54 that meshes with the gear 23 connected to the drive shaft of the actuator 12 and transmits a driving force is fixed to one end of the rotary shaft 16 via a nut 56.
[0021]
One end portion of the first fluid passage 42 extends radially outward so as to be connected to the first communication passage 31 communicating with the first fluid port 38, and the other end portion is bent from substantially the center of the rotating shaft 16. It is provided so as to communicate with a third fluid passage 60 extending along the axial direction of the valve rod 18.
[0022]
One end of the second fluid passage 48 extends along the axis T of the rotation shaft 16 so as to be connected to the second communication passage 33 communicating with the second fluid port 40, and the other end of the second fluid passage 48 is connected to the rotation shaft 16. It is provided so as to communicate with a fourth fluid passage 62 that is bent from substantially the center and extends along the axial direction of the valve rod 18.
[0023]
One end of the first breathing passage 58 formed along the axis T of the rotating shaft 16 is provided to open to one end surface of the rotating shaft 16 and communicate with the atmosphere, and the other end is rotated. It is provided so as to communicate with a second respiratory passage 64 that is bent from substantially the center of the shaft 16 and extends along the axial direction of the valve rod 18.
[0024]
As shown in FIGS. 3 and 5, the first fluid port 38 and the first fluid passage 42 are not in communication with each other in a state other than the position where the valve disk 22 faces the first opening 32. .
[0025]
That is, since the positions of the end portion of the first communication passage 31 communicating with the first fluid port 38 and the end portion of the first fluid passage 42 do not coincide with each other, the end portion of the first communication passage 31 is connected to the rotary shaft 16. While being closed by the outer peripheral surface, the end of the first fluid passage 42 is closed by the inner peripheral wall surface of the support portion 36 of the port block 27.
[0026]
As shown in FIGS. 4 and 6, the end of the first communication passage 31 and the end of the first fluid passage 42 only when the valve disk 22 is rotated to a position facing the first opening 32. Therefore, the first fluid port 38 and the first fluid passage 42 are in communication with each other.
[0027]
Furthermore, since the connection part of the end part of the 2nd communicating path 33 connected to the 2nd fluid port 40 and the 2nd fluid path 48 is located in the axis line T of the rotating shaft 16, the 2nd fluid port 40 and internal The second fluid passage 48 formed in the state is always in communication.
[0028]
Further, as shown in FIGS. 1 to 4, a third packing 65 is attached to a contact portion between the rotating shaft 16 and the valve rod 18 via an annular groove formed in the valve rod 18. The airtightness of the pressure fluid supplied to the first fluid passage 42, the second fluid passage 48, and the second breathing passage 64 is maintained by the three packings 65.
[0029]
As shown in FIGS. 3 and 4, a substantially semicircular engaging groove 66a with which the rotary shaft 16 is engaged is formed at one end of the valve rod 18 having a substantially T-shaped cross section. The bottom of the joint groove 66a is formed in a substantially planar shape. In other words, the flat portion 68 formed on a part of the peripheral surface of the rotating shaft 16 and the bottom of the engaging groove 66a are brought into contact with each other to have a function of preventing the valve rod 18 from rotating relative to the rotating shaft 16. A plurality of through holes 70 (see FIG. 8) are formed on both sides spaced apart from the engagement groove 66a by a predetermined distance.
[0030]
Furthermore, a substantially semicircular engaging groove 66b that engages with the rotating shaft 16 is formed in the shaft support member 72, and a plurality of screw holes (not shown) are formed on both sides spaced apart from the engaging groove 66b by a predetermined distance. Is formed.
[0031]
The outer circumferential surface of the rotary shaft 16 is surrounded by the engagement grooves 66a and 66b of the valve rod 18 and the shaft support member 72, and the screw member 76 is screwed into the plurality of through holes 70 and the screw holes. The shaft 16 and the valve rod 18 are fixed integrally.
[0032]
The valve rod 18 communicates with the first fluid passage 42 of the rotating shaft 16 and is supplied with pressure fluid when the valve disc 22 is seated on the inner wall surface of the first opening 32. 60, a fourth fluid passage 62 that communicates with the second fluid passage 48 of the rotary shaft 16 and is supplied with pressure fluid when the valve disk 22 is separated from the inner wall surface of the first opening 32, A second breathing passage 64 is formed in communication with the first breathing passage 58 to release a fluid in the bellows 110 described later to the atmosphere.
[0033]
As shown in FIG. 8, the third fluid passage 60, the fourth fluid passage 62, and the second breathing passage 64 formed in the valve rod 18 are arranged in the fourth fluid passage in the direction of arrow X in FIG. 8. 62, the third fluid passage 60, and the second breathing passage 64 are arranged at predetermined intervals in the order, and the third fluid passage 60, the fourth fluid passage 62, and the second breathing passage 64 are arranged in the direction of the arrow Y. It is arranged with. The fourth fluid passage 62 is formed on the axis T of the rotating shaft 16.
[0034]
Note that the arrangement of the third fluid passage 60, the fourth fluid passage 62, and the second breathing passage 64 is not limited to this arrangement as long as they are formed at a predetermined interval from each other.
[0035]
As shown in FIGS. 1 and 2, the displacement mechanism 21 includes a piston 20 having a substantially T-shaped cross section, a rod cover 92 fitted to the outer periphery on one end side of the piston 20, and a flange portion. Snap ring 112 engaged with the inner peripheral surface of 80 and integrally displaced, bellows holder 104 inserted into the outer periphery of flange portion 80 of valve disk 22, and interposed between bellows holder 104 and plate member 102. And a bellows 110 to be mounted.
[0036]
The piston 20 is connected to the other end of the valve rod 18 via a screw member 78, and receives the pressure fluid supplied from the third fluid passage 60 and the fourth fluid passage 62, and the piston 20. And a rod portion 88 formed in a cylindrical shape on the valve rod 18 side. The diameter of the pressure receiving portion 84 of the piston 20 is formed larger than the diameter of the rod portion 88 of the piston 20.
[0037]
Further, an annular damper 91 is attached to one end surface of the pressure receiving portion 84 of the piston 20 that contacts the valve disk 22 via a groove, so that the impact when the piston 20 contacts the valve disk 22 is reduced. A piston packing 90 is mounted on the outer peripheral surface of the pressure receiving portion 84 via an annular groove portion, and comes into contact with the inner peripheral surface of the flange portion 80 inserted into the outer peripheral surface of the pressure receiving portion 84, thereby to be described later as a first cylinder chamber. 116 and the return cylinder chamber 120 are kept airtight.
[0038]
Furthermore, one end surface of the rod portion 88 is inserted into a recess formed in the valve rod 18 and is fixed to the valve rod 18 via a screw member 78. Further, a rod cover 92 is fitted to the outer peripheral surface of the rod portion 88, and a rod packing 94 and a bush 96 are attached to a groove portion formed on the inner peripheral surface of the rod cover 92, and a second cylinder chamber 118 described later. And the airtightness of the return cylinder chamber 120 is maintained.
[0039]
A seal member 98 is attached to the valve disk 22 along an annular groove on one end surface that is seated on the inner wall surface of the first opening 32, and the valve disk 22 is attached to the inner wall surface of the first opening 32 by the seal member 98. Airtightness is maintained when seated. In addition, on the valve disk 22 side of the set of flange portions 80 that protrude to the other end surface side of the valve disk 22 at a predetermined interval, a plate member 102 is formed by a screw member 100 in a recess formed on the other end surface of the valve disk 22. Is fixed.
[0040]
A bellows holder 104 is inserted on the outer periphery of the flange portion 80 and is integrally fixed to the valve rod 18 by a screw member 106. A sliding packing 108 is attached to an annular groove formed on the inner peripheral surface of the bellows holder 104.
[0041]
In addition, a bellows 110 is provided between the plate member 102 and the bellows holder 104, and when pressure fluid leaks from the second cylinder chamber 118 through the flange 80 of the valve rod 18 and the sliding packing 108. Then, the air is led from the second breathing passage 64 to the atmosphere through the first breathing passage 58.
[0042]
Further, in order to prevent damage to the bellows 110 caused by the pressure fluid leaking from the second cylinder chamber 118 flowing into the bellows 110 and accumulating, the second breathing passage 64 communicating with the bellows 110 is provided with a valve rod. 18 is formed inside.
[0043]
That is, since the second breathing passage 64 is opened to the atmosphere via the first breathing passage 58, the pressure fluid flowing into the bellows 110 is suitably discharged to the atmosphere without accumulating in the bellows 110, and the bellows. 110 can be prevented from being damaged.
[0044]
An annular snap ring 112 is connected to the other end surface of the rod cover 92, and the snap ring 112 has an annular groove portion formed on the inner peripheral side of the flange portion 80 of the valve disk 22. Since the inner peripheral portion is inserted into the small diameter portion of the rod cover 92, the rod cover 92 and the valve disk 22 are integrally displaced.
[0045]
A first cylinder chamber 116 is defined between the other end surface of the valve disk 22 and one end surface of the pressure receiving portion 84 of the piston 20, and communicates with a communication passage 117 formed inside the flange portion 80. A second cylinder chamber 118 is defined between the valve rod 18 and the rod cover 92 and communicates with the third fluid passage 60.
[0046]
Further, a return cylinder chamber 120 is defined between the other end surface of the pressure receiving portion 84 of the piston 20 and one end surface of the rod cover 92, and communicates with the fourth fluid passage 62.
[0047]
1 to 4, the first fluid port 38, the second fluid port 40, the first breathing passage 58, the first fluid passage 42, the second fluid passage 48, the second breathing passage 64, and the third fluid passage 60. The fourth fluid passage 62 is indicated by a solid line for convenience.
[0048]
The gate valve 10 according to the embodiment of the present invention is basically configured as described above. Next, its operation and effects will be described.
[0049]
In the following description, the valve disk 22 is disposed in the space 52, and the first fluid port 38 and the first fluid passage 42 are not in communication with each other as shown in FIG. This will be described as the initial position.
[0050]
As shown in FIG. 3, in the initial position, the pressure fluid is supplied from the pressure fluid supply source (not shown) to the actuator 12 that is the driving source via the tube (not shown). As shown in FIG. 7 under the action of the pressure fluid, when the actuator 12 rotates clockwise (in the direction of the arrow A1), the rotary shaft 16 meshed with the actuator 12 via the gear 23 and the gear 54 is obtained. It rotates integrally counterclockwise (arrow B1 direction).
[0051]
When the rotating shaft 16 rotates counterclockwise, the first opening 32 is formed from the state in which the valve disk 22 is disposed in the space 52 via the valve rod 18 connected to the rotating shaft 16 (see FIG. 3). (In the direction of arrow C1).
[0052]
As shown in FIG. 4, the valve disk 22 faces the first opening 32 (see FIG. 3) formed in the lower portion of the body 14, and as shown in FIG. 1, the inner wall surface of the first opening 32. When reaching a position separated by a predetermined distance, the end of the first communication passage 31 and the end of the first fluid passage 42 are connected, and the first fluid port 38 formed on the upper portion of the body 14 and the rotary shaft 16 are connected. The first fluid passage 42 formed inside communicates with each other (see FIG. 6).
[0053]
In this case, it is assumed that the return cylinder chamber 120 communicating with the second fluid port 40, the second fluid passage 48, and the fourth fluid passage 62 is in an open state.
[0054]
Then, a pressure fluid is supplied to the first fluid port 38 from a pressure fluid supply source (not shown) via a tube (not shown).
[0055]
The supplied pressure fluid is communicated from the first fluid port 38 to the first cylinder chamber 116 via the first fluid passage 42 of the rotating shaft 16, the valve rod 18, and the communication passage 117 formed inside the flange portion 80. At the same time, the valve disk 22 is introduced into the second cylinder chamber 118 and pressed substantially horizontally in the direction of the inner wall surface of the first opening 32 under the action of the pressure fluid supplied to the first cylinder chamber 116. At approximately the same time, the pressure fluid supplied to the second cylinder chamber 118 presses the rod cover 92 toward the valve disk 22 via the snap ring 112, whereby the first cylinder chamber 116, the second cylinder chamber 118, The valve disk 22 is pressed in a substantially horizontal direction in the direction of the inner wall surface of the first opening 32 under the pressing action of the pressure fluid introduced into (see FIG. 2).
[0056]
That is, since a plurality of cylinder chambers composed of the first cylinder chamber 116 and the second cylinder chamber 118 are provided in parallel, and the pressure receiving areas of the plurality of cylinder chambers are added by supplying pressure fluid substantially simultaneously, the first cylinder chamber A pressing force in substantially the same direction by 116 and the second cylinder chamber 118 is obtained, and the force for pressing the valve disk 22 against the inner wall surface of the first opening 32 can be increased.
[0057]
As a result, the valve disc 22 displaced in the substantially horizontal direction under the pressure action of the pressure fluid is moved into the first opening 32 under the action of the pressure fluid supplied to the first cylinder chamber 116 and the second cylinder chamber 118. By sitting on the wall surface, the first opening 32 is closed, and the communication between the first opening 32 and the second opening 34 is blocked.
[0058]
Further, even when the pressure fluid supplied to the second cylinder chamber 118 leaks from between the flange portion 80 of the valve rod 18 and the sliding packing 108, it is more preferable that it flows into the bellows 110. Airtightness is maintained and pressure fluid is prevented from leaking into the first opening 32 and the second opening 34.
[0059]
Furthermore, the pressure fluid that has flowed into the bellows 110 from the second cylinder chamber 118 enters the atmosphere via the second breathing passage 64 communicating with the bellows 110 and the first breathing passage 58 formed in the valve rod 18. By being discharged, the bellows 110 is prevented from being damaged.
[0060]
Next, when the valve disk 22 is separated from the inner wall surface of the first opening 32 and returned to the initial position, pressure fluid is supplied to the second fluid port 40 under the action of a switching valve (not shown). The pressure fluid is introduced from the second fluid port 40 into the return cylinder chamber 120 through the second fluid passage 48 of the rotating shaft 16 and the fourth fluid passage 62 formed inside the valve rod 18. In this case, it is assumed that the first fluid port 38, the first fluid passage 42, the third fluid passage 60, the first cylinder chamber 116, and the second cylinder chamber 118 are open to the atmosphere.
[0061]
The rod cover 92 is pressed toward the valve rod 18 under the pressing action of the pressure fluid supplied to the return cylinder chamber 120, and the snap ring 112 is also displaced integrally with the valve rod 18.
[0062]
As a result, the snap ring 112 fitted to the flange portion 80 of the valve disc 22 is displaced, so that the valve disc 22 is separated from the inner wall surface of the first opening portion 32 in a substantially horizontal direction (see FIG. 1).
[0063]
Next, pressure fluid is supplied to the actuator 12 through a tube (not shown) under the action of a switching valve (not shown), and the actuator 12 rotates counterclockwise (in the direction of arrow A2) under the action of the pressure fluid. The rotating shaft 16 meshed with the actuator 12 via the gear 23 and the gear 54 rotates integrally in the clockwise direction (arrow B2 direction).
[0064]
Then, when the rotating shaft 16 rotates clockwise (in the direction of the arrow B2), the valve rod 18 and the valve disk 22 connected to the rotating shaft 16 are integrally formed from the first opening 32 and the second opening 34. It rotates in the direction of the space 52 (the direction of the arrow C2), returns to the initial position where the valve disk 22 is disposed in the space 52 (see FIG. 3), and the first opening 32 and the second opening of the valve box 26. It will be in the state which the part 34 connected.
[0065]
At this time, even if the pressure fluid is erroneously supplied to the first fluid port 38, the first fluid port 38 and the first fluid passage 42 are not in communication with each other. The two-cylinder chamber 118 is not introduced. That is, since the valve disk 22 is not displaced substantially horizontally and does not contact the inner wall surface of the space 52, the valve disk 22 and the seal member 98 are prevented from being damaged (see FIG. 5).
[0066]
As described above, in the present embodiment, the first fluid port 38 formed in the body 14 and the first fluid passage 42 formed in the rotary shaft 16 are such that the valve disk 22 faces the first opening 32. Since the communication is performed only at the position, the pressure fluid is erroneously supplied to the first fluid port 38 in a position other than the position where the valve disk 22 faces the first opening 32 (for example, the state where the valve disk 22 is disposed in the space 52). Even if this is done, the valve disk 22 will not be displaced. Therefore, the valve disk 22 and the seal member 98 do not come into contact with the inner wall surface of the body 14 and the valve disk 22 and the seal member 98 can be prevented from being damaged.
[0067]
Also, a first fluid port 38, a second fluid port 40, a first fluid passage 42, and a second fluid passage 48 for displacing the valve disk 22 are formed inside the body 14, the rotating shaft 16, and the valve rod 18. This eliminates the need for piping outside, so that the installation space can be reduced and the complexity of piping work and the like can be eliminated.
[0068]
Further, by providing a plurality of cylinder chambers for displacing the valve disk 22 in parallel between the valve rod 18 and the valve disk 22, the pressure receiving area can be increased, and the valve disk 22 is opened to the first opening. Since the thrust at the time of being seated on the inner wall surface of the portion 32 can be increased, the pressure receiving area of one cylinder chamber can be reduced, and the bellows 110 holding the airtightness in the cylinder chamber can be reduced in size. be able to.
[0069]
That is, since the cylinder chamber can be made smaller, the valve disk 22 and the piston 20 can be reduced in size, and the expensive bellows 110 can be reduced in size, thereby effectively reducing the cost.
[0070]
【The invention's effect】
According to the present invention, the following effects can be obtained.
[0071]
That is, by configuring the first flow path formed inside the body and the second flow path formed inside the rotating portion to communicate only at a position where the valve disk faces the opening, Even when the pressure fluid is supplied by mistake, the valve disc is not displaced, so that damage to the valve disc and the seal member can be suitably prevented.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of an initial position of a gate valve according to an embodiment of the present invention.
FIG. 2 is a longitudinal sectional view when a valve disk of a gate valve according to an embodiment of the present invention faces an opening.
FIG. 3 is a partial longitudinal sectional view when the valve disk of the gate valve according to the embodiment of the present invention is disposed in a space.
FIG. 4 is a partial vertical cross-sectional view when the valve disk of the gate valve according to the embodiment of the present invention faces the opening.
FIG. 5 is an enlarged longitudinal sectional view showing a state where the first fluid port and the first fluid passage of the gate valve according to the embodiment of the present invention are not in communication.
FIG. 6 is an enlarged longitudinal sectional view showing a state in which the first fluid port and the first fluid passage of the gate valve according to the embodiment of the present invention communicate with each other.
FIG. 7 is an enlarged longitudinal sectional view of the actuator and the rotation shaft of the gate valve according to the embodiment of the present invention.
8 is a cross-sectional view taken along line VIII-VIII in FIG.
[Explanation of symbols]
10 ... Gate valve 14 ... Body
16 ... Rotating shaft 18 ... Valve rod
19 ... rotating part 20 ... piston
21 ... Displacement mechanism 22 ... Valve disc
25 ... Bearing block 26 ... Valve box
28a, 28b ... bearing member 31 ... first communication path
33 ... 2nd communicating path 38 ... 1st fluid port
40 ... second fluid port 42 ... first fluid passage
48 ... second fluid passage 58 ... first breathing passage
60 ... Third fluid passage 62 ... Fourth fluid passage
64 ... Second breathing passage 66a, 66b ... Engagement groove
88 ... Rod part 92 ... Rod cover
98 ... Sealing member 110 ... Bellows
116: first cylinder chamber 118 ... second cylinder chamber
120 ... Return cylinder chamber

Claims (3)

A driving source;
A body to which the drive source is fixed;
A rotating portion disposed inside the body and rotating in a circular arc shape by a predetermined angle under the driving action of the driving source;
A valve disk to which a sealing member for closing the opening of the valve box is mounted;
A displacement mechanism that is integrally connected to the rotating part and that displaces the valve disk toward the opening under the action of a pressure fluid;
With
A first flow path to which a pressure fluid is supplied when the valve disk is seated on the opening is formed in the body, and a second flow path is formed in the rotation part. Only when the valve disk is rotated to a position facing the opening under the drive action of the drive source, the first flow path and the second flow path are communicated with each other so that the pressure fluid is transferred to the displacement mechanism. A gate valve characterized by being introduced into. The gate valve according to claim 1, wherein
The rotating part includes a shaft part supported by the body;
A valve rod having one end connected to the shaft and rotating integrally with the shaft;
A gate valve characterized by comprising: The gate valve according to claim 1, wherein
The displacement mechanism has a plurality of cylinder chambers formed independently inside,
Pressure fluid is supplied from the second flow path to each of the plurality of cylinder chambers substantially simultaneously, and the pressure fluid acts on each pressure receiving surface of the plurality of cylinder chambers substantially simultaneously and in substantially the same direction. Gate valve to be used.

Images