JP4619690B2 - Diaphragm pump containing conductive polymer and driving method thereof - Google Patents

Description

  The present invention relates to a fluid transfer device, and more particularly to a small or ultra-compact fluid transfer device, and more particularly to a water supply device for cooling a semiconductor device including a device for supplying a raw material represented by methanol in a fuel cell and a CPU. The present invention relates to a pump for incorporating an electronic machine device including a circulation device.

  A pump that is a device that transports fluid such as water includes a cooling pump for a heating element device represented by a semiconductor of a computer device, a means for transporting blood to a blood test chip, a pump for a reagent dispenser, and an artificial Application to an in-vivo implantable device pump including a heart has been studied, and miniaturization or ultra-miniaturization has been achieved.

  For example, as a device for cooling a heating element such as a CPU in a computer, a heat medium circulation cooling electronic device such as water provided with a circulation pump has been proposed (for example, Patent Document 1).

Japanese Patent Laid-Open No. 2003-133776

  Pumps that can be used as cooling pumps for heat generating elements typified by the above-described electronic devices, blood transporting means, reagent dispensers, and in-vivo implant pumps are used for heat medium circulation cooling devices of notebook computers. In addition, it is preferable that it is small, lightweight, and can be driven with a low voltage of about several volts or less. For example, a pump using a motor as a drive source of the pump is difficult to reduce in size, and uses a large amount of metal parts, so the configuration is complicated and it is difficult to reduce the weight. In addition, a pump using a motor is loud and is not suitable for indoor use or medical use. In addition, it is desired to reduce the size and weight of a feed pump for a raw material represented by methanol in a fuel cell.

  As a small pump that can be used in the above-described apparatus, for example, a pump that drives a piezoelectric element made of a ceramic material as a driving element can be used. However, the ceramic piezoelectric element can be reduced in size, but since it is driven at a high voltage of 100 V, a voltage conversion device is required to use a low-voltage power source, and the device configuration is complicated. When the pump driven at a high voltage is used for an in-vivo implant device, there is a concern about the influence on the human body due to electric leakage. That is, a pump that has a simple device configuration, is small and lightweight, can be driven at a low voltage, and is silent has not been obtained yet.

  An object of the present invention is a pump that can be used as a cooling pump for a heat generating element, a blood transfer means, a reagent dispenser, a feed pump for raw materials typified by methanol in a fuel cell, and an in-vivo implanted pump. It is an object of the present invention to provide a pump that can be reduced in weight, can be driven at a low voltage of about several volts or less, and can be driven silently.

  As a result of intensive studies, the present inventors have found that the above-described problems can be solved by the following invention.

  The present invention is a pump characterized in that a drive unit that controls suction of fluid and / or discharge of fluid includes a drive element including a conductive polymer molded product. Such a pump has a simple device configuration, is small and lightweight, can be driven at a low voltage, and silently.

  In the present invention, the pump is a diaphragm pump, and the diaphragm constituting at least a part of the pump chamber includes the driving element. The present invention is also a pump in which the pump is a tube pump, and at least a part of the tube of the tube pump is constituted by a tubular conductive polymer molded product, and the inside of the tube is a fluid flow path. Further, the present invention is also a pump in which the pump is a bellows pump, a wall portion of the pump chamber is formed by the bellows, and the driving element is connected to an upper portion and a bottom portion of the pump chamber.

  The pump of the present invention includes a conductive polymer in the drive unit, and the conductive polymer is driven by a chemical mechanism called electrolytic expansion / contraction, so that the pump can be driven at a low voltage and is silent. Furthermore, the device configuration is simple, and it is easy to reduce the size and weight.

  Hereinafter, although demonstrated using figures, this invention is not limited to these embodiment.

  FIG. 1 is a sectional view of a first embodiment of the pump of the present invention. A diaphragm pump 1 which is a pump of the present invention is a diaphragm pump provided with diaphragms 3 and 4 made of a conductive polymer inside a coin-shaped casing 2 having an internal space. The diaphragm 3 and the diaphragm 4 are disc-shaped conductive polymer films, and the circumferential portion thereof is fixed to the wall surface 5 and is connected to each other via the connecting member 6 at the central portion. The two diaphragms 3 and 4 are each installed in a state where tension is applied in the film surface direction, and form a substantially conical shape. The diaphragm 3 forms the housing 2 and the first pump chamber 7, and the diaphragm 4 forms the housing 2 and the second pump chamber 8. The space 9 inside the diaphragm pump 1 is formed by being partitioned by a diaphragm 3, a diaphragm 4, and a housing 2 formed by a film-like conductive polymer molded product. By filling the space 9 with the electrolytic solution, the diaphragms 3 and 4 are in contact with the electrolytic solution. The conductive polymer molded product of the diaphragm 3 and the conductive polymer molded product of the diaphragm 4 are connected to a power source via leads 10 and 10 ', respectively. For example, an anion is used as the supporting salt of the electrolytic solution, a negative voltage is applied to the membrane-shaped conductive polymer molded product of diaphragm 4, and a positive voltage is applied to the membrane-shaped conductive polymer molded product of diaphragm 3. Thus, the diaphragm 4 contracts, the diaphragm 3 expands, the pump chamber 9 widens, and the pump chamber 8 narrows. Conversely, when a positive voltage is applied to the membrane-shaped conductive polymer molded product of the diaphragm 4 and a negative voltage is applied to the membrane-shaped conductive polymer molded product of the diaphragm 3, the diaphragm 3 contracts and the diaphragm 4 becomes The pump chamber 7 is narrowed and the pump chamber 8 is widened. That is, the two conductive polymer films that are diaphragms expand and contract with one conductive polymer film serving as a working electrode and the other serving as a counter electrode. Due to such diaphragm movement, one diaphragm contracts and discharges the fluid in the pump chamber formed by one diaphragm. At the same time, the other diaphragm expands due to the contracting force of one diaphragm, and the other diaphragms expand. The volume of the pump chamber which comprises is expanded, and the pump 1 functions as a twin diaphragm pump.

  The pump 1 of FIG. 1 includes a suction valve 121 near the suction port 11 and a discharge valve 122 near the discharge port 13. Further, the pump 1 includes a suction valve 123 near the suction port 11 ′ and a discharge valve 124 near the discharge port 13 ′. The suction valves 121 and 123 prevent fluid from being discharged from the suction port, and the discharge valves 122 and 124 prevent fluid from being sucked from the discharge port. In FIG. 1, the diaphragm 4 contracts, so that the fluid in the pump chamber 8 passes through the discharge port 13 ′ and is discharged by opening the discharge valve 124 by the discharge pressure of the fluid. At the same time as the fluid in the pump chamber 8 is discharged, the diaphragm 3 is expanded by the diaphragm 4, the suction valve 121 is opened by the suction force, and the fluid is sucked into the pump chamber 7 through the suction port 11. . In addition, a member for mounting the suction pipe, the discharge pipe, or the like may be appropriately attached in the vicinity of the suction port and / or the discharge port. In addition, the material of the intake valve and the discharge valve is not particularly limited, and a known metal valve or resin valve can be used, and a known method such as adhesion can be used for joining to the housing. it can.

  FIG. 2 is a cross-sectional view of the first embodiment of the pump of the present invention when no connection member is used for the pump of FIG. The diaphragm pump 1 ′ includes diaphragms 3 ′ and 4 ′ that constitute at least a part of the pump chamber, the diaphragm is made of a conductive polymer film, and is a space that is a closed space facing the diaphragms 3 ′ and 4 ′. 9 'is filled with the electrolyte. Each diaphragm is provided with pump chambers 7 'and 8' on the opposite side of the closed space with the diaphragm interposed therebetween. Since each diaphragm is a conductive polymer film, it is in contact with the electrolytic solution in the space 9 '. Each of the diaphragms is made of a conductive polymer film. As with the diaphragm pump of FIG. 1, if the diaphragm is driven by the electrolytic expansion / contraction action of the conductive polymer, the conductive polymer film is one of the diaphragms. The laminated body which may be contained as a part and uses a conductive polymer film as one layer may be sufficient. As the conductive polymer film, a film-shaped conductive polymer molded product can be used.

  In FIG. 2, the diaphragm pump 1 'includes two pump chambers, and is in a state of being driven as a pump by applying a voltage to the diaphragms 3' and 4 'made of a conductive polymer film. When a voltage is applied to the diaphragm 3 'which is one diaphragm and a reverse voltage is applied to the diaphragm 4' which is the other diaphragm, the diaphragm 4 'contracts and the diaphragm 3' expands. To do. By contracting the diaphragm 4 ', the volume of the pump chamber 8' is reduced and the fluid in the pump chamber is discharged. Further, the expansion of the diaphragm 3 ′ increases the volume of the pump chamber 7 ′, and fluid is sucked into the pump chamber. When one conductive polymer film is used as a working electrode, the other conductive polymer film serves as a counter electrode, so that driving of one diaphragm and driving of the other diaphragm are in opposite phases in the suction-discharge cycle. . By applying the polarity of the applied voltage of each conductive polymer film alternately positive and negative, the expansion and contraction of the diaphragm are alternately performed, and suction and discharge are alternately performed in each pump chamber. The diaphragm pump 1 ′ is continuously driven in the same manner as the diaphragm pump 1 in FIG. 1, but by applying the polarity of the applied voltage to each conductive polymer film alternately positive and negative, This can be done by periodically applying the polarity of the applied voltage to the molecular film alternately positive and negative.

  The diaphragm pump 1 ′ in FIG. 2 does not include a connection member for connecting the two diaphragms as compared with the diaphragm pump 1 in FIG. 1, and the two diaphragms are not connected. By applying a voltage to the diaphragm 4 ′, which is a conductive polymer film, the diaphragm 4 ′ contracts. The volume of the pump chamber 8 'is reduced by the contraction movement. In addition, since the space portion 9 ′ provided on the opposite side of the pump chamber 8 ′ across the diaphragm 4 ′ is a closed space, the contraction movement is performed via the electrolytic solution filled in the space portion 9 ′. The volume of the pump chamber 7 'can be increased by pulling on the expanding diaphragm 3'.

  The diaphragm pump in FIG. 2 has two pump chambers, but the diaphragm pump of the present invention may be provided with two or more pump chambers. The diaphragms constituting part of the pump chamber are each provided with a conductive polymer film, and when each conductive polymer film is applied with a voltage, each conductive polymer film acts as an electrode to perform electrolytic expansion and contraction. Arise. When the conductive polymer film included in the diaphragm constituting one pump chamber is applied with a voltage, the conductive polymer film included in the other pump chamber is made a counter electrode via the electrolytic solution in the closed space. If possible, the positional relationship between the diaphragms is not particularly limited. For example, the closed space is formed so that a large number of diaphragms form a polyhedron, and the closed space is filled with an electrolytic solution, and a conductive polymer film included in one or more diaphragms is included in another diaphragm. It can also be made to be a counter electrode of the polymer membrane. In particular, in the diaphragm pump, the positional relationship between one diaphragm and the other diaphragm is arranged so that the diaphragms face each other through the electrolyte solution, and having one or more pairs of these diaphragms reduces energy loss, The drive is also smooth, which is preferable. By continuously driving one diaphragm of the pair and the other diaphragm so that they have mutually opposite phases in the suction-discharge cycle, it becomes easy for the diaphragms that contract to pull the diaphragms of the same pair to expand. .

  In the example embodiment of FIG. 2, the pair of diaphragms is not connected. When the diaphragms are connected to each other, as shown in FIG. 1, the cross section of the diaphragm at the time of inhalation has a substantially triangular pyramid shape, and the cross section of the diaphragm at the time of discharge has an arc shape. Therefore, when the diaphragms are connected, the shape of the diaphragm changes greatly at the moment when suction and discharge are switched, resulting in a time lag at the time of switching. In order to prevent this time lag, it is preferable that the diaphragms are not connected. As shown in FIG. 2, the diaphragm is not connected between the diaphragms, so that the diaphragm shape in suction and the diaphragm shape in discharge are the same, and a time lag at the time of switching between suction and discharge can be prevented. Further, since the diaphragm pump that is not connected between the diaphragms does not have a connecting member, it becomes easy to manufacture a small diaphragm pump such as a diaphragm pump having a circular outer diameter of 10φ and functions as a driving element. Since the part which a conductive polymer film can expand-contract increases, it is preferable.

  In the embodiment example of FIGS. 1 and 2, the voltage applied to the conductive polymer film included in each diaphragm is 1 or more per second between the application of the positive voltage and the application of the negative voltage. Preferably there is. By applying a voltage to the conductive polymer film such that the period between application of the positive polarity voltage and application of the negative polarity voltage is 1 or more per second, a time lag at the time of switching between suction and discharge is unlikely to occur.

  FIG. 3 is a sectional view of a second embodiment of the pump of the present invention. A diaphragm pump 21 which is a pump according to the present invention is a diaphragm pump including a diaphragm 23 made of a conductive polymer inside a coin-shaped casing 22 having an internal space. The diaphragm 23 is a circular conductive polymer film, and the circumferential portion thereof is fixed to the wall surface 24. The diaphragm 23 forms a housing 22 and a pump chamber 25. The diaphragm 23 is installed in a state in which a spring member 26 is attached to the inner upper portion of the housing 22 and is connected to the membrane surface of the diaphragm 23 so that tension is applied in the membrane surface direction. An electrode 27 is provided on the bottom surface of the inner space of the housing 22. The diaphragm 23 and the electrode 27 are connected to a power source via lead wires 28 and 28 ', respectively. By filling the electrolytic solution in the space 29 partitioned by the casing 22 and the diaphragm 23, the diaphragm 23 and the electrode 27 are in contact with the same electrolytic solution. By applying a positive voltage to the diaphragm 23 using the diaphragm 23, which is a membrane-shaped conductive polymer molded product, as a working electrode and the electrode 27 as a counter electrode, the anion in the electrolytic solution is a membrane of the conductive polymer molded product. It is taken in, the diaphragm 23 expand | extends, and the pump chamber 25 becomes large with the force which the spring member 26 pushes. Further, by applying a negative voltage to the diaphragm 23, the diaphragm 23 contracts, the spring member 26 is contracted, and the pump chamber 25 becomes narrow. By such movement of the diaphragm 23, the pump 21 functions as a diaphragm pump.

  The pump 21 in FIG. 3 includes a suction valve 311 in the vicinity of the suction port 30 and a discharge valve 312 in the vicinity of the discharge port 32 as in the case of FIG. The suction valve 311 prevents fluid from being discharged from the suction port, and the discharge valve 312 prevents fluid from being sucked from the discharge port. In addition, a member for mounting the suction pipe, the discharge pipe, or the like may be appropriately attached in the vicinity of the suction port and / or the discharge port. In addition, the material of the intake valve and the discharge valve is not particularly limited, and a known metal valve or resin valve can be used, and a known method such as adhesion can be used for joining to the housing. it can.

  The diaphragm pump in FIGS. 1 and 3 shows the case of a diaphragm composed only of a conductive polymer film. However, the diaphragm pump of the present invention is not limited to a diaphragm made of only a conductive polymer film, and may have a laminated structure. For example, the diaphragm may have a structure including a non-woven fabric that can function as a protective layer on a conductive polymer film. In addition, the diaphragm may be formed by laminating a conductive polymer film through which electrolyte can pass by having a hole on a conductive polymer film through which electrolyte does not pass. There may be further provided a stretchable layer or a stretchable solid electrolyte layer through which an electrolyte solution such as a nonwoven fabric can permeate between the molecular films.

  For the conductive polymer film, the composition of the conductive polymer is not particularly limited, and a known conductive polymer can be used, and the conductive polymer film has a conductive property according to the performance of the diaphragm such as discharge pressure and discharge amount. The composition of the polymer can be appropriately selected. More specifically, polypyrrole can be used as the monomer of the conductive polymer, and a known anion can be used as the dopant and dopant ion. A known supporting electrolyte can also be used as the supporting electrolyte in the electrolytic solution for driving the diaphragm pump.

  As for the above-described conductive polymer film, for example, a polypyrrole film that can generate a force of 5 Mpa in the film surface direction of the conductive polymer film by applying a voltage of 1 V and 200 mA to the conductive polymer film. The pump used for the diaphragm can generate a discharge pressure of 20 kPa for one pump chamber. Further, in the pump of the embodiment shown in FIG. 1, a circular conductive polymer film having a diameter of 40 mm and a thickness of 40 μm is used as each diaphragm, and the film is expanded and contracted by 0.9% per 0.5 second in the film surface direction. A discharge amount of 72 ml / s per second can be generated. Further, a desired discharge pressure can be obtained by laminating the conductive polymer film.

In particular, as the conductive polymer film, a conductive polymer film having an elongation rate due to electrolytic expansion / contraction per 0.5 second of 0.5% or more when a voltage of 1 V is applied is 0.5 seconds in the film surface direction. It is preferable because the expansion / contraction of 0.9% or more can be performed, and a large discharge amount can be easily obtained. An electroconductive polymer film having an elongation percentage of 0.5% or more per 0.5 seconds by electrolytic stretching is a conductive polymer film that produces an electroconductive polymer having stretchability by electrochemical oxidation-reduction by electrolytic polymerization. A method for producing a molecule, wherein the electrolytic polymerization method comprises an organic compound containing at least one bond or functional group of an ether bond, an ester bond, a carbonate bond, a hydroxyl group, a nitro group, a sulfone group, and a nitrile group, and Easy using an electrolytic solution containing a halogenated hydrocarbon as a solvent and a method for producing a conductive polymer containing trifluoromethanesulfonic acid ions and / or anions containing a plurality of fluorine atoms with respect to the central atom in the electrolytic solution Can get to. The conductive polymer film is a method for producing a conductive polymer using an electrolytic polymerization method, wherein the electrolytic polymerization method is used as an anion to the trifluoromethanesulfonate ion and / or the central atom. On the other hand, instead of an anion containing a plurality of fluorine atoms, chemical formula (1)
(C _n F _{(2n + 1)} SO ₂ ) (C _m F _{(2m + 1)} SO ₂ ) N ⁻ (1)
(Here, n and m are arbitrary integers.)
It can obtain easily with the manufacturing method of the conductive polymer using the electrolyte solution containing perfluoroalkyl sulfonylimide ion represented by these.

  Examples of the organic compound contained as a solvent in the electrolytic polymerization method include 1,2-dimethoxyethane, 1,2-diethoxyethane, tetrahydrofuran, 2-methyltetrahydrofuran, and 1,4-dioxane (above, organic compounds including an ether bond). Compound), γ-butyrolactone, ethyl acetate, n-butyl acetate, t-butyl acetate, 1,2-diacetoxyethane, 3-methyl-2-oxazolidinone, methyl benzoate, ethyl benzoate, butyl benzoate, phthalate Diethyl acid (above, organic compound containing an ester bond), propylene carbonate, ethylene carbonate, dimethyl carbonate, diethyl carbonate, methyl ethyl carbonate (above, organic compound containing a carbonate bond), ethylene glycol, butanol, 1-hexanol, cyclohexane Sanol, 1-octanol, 1-decanol, 1-dodecanol, 1-octadecanol (above, organic compound containing hydroxyl group), nitromethane, nitrobenzene (above, organic compound containing nitro group), sulfolane, dimethyl sulfone (above And organic compounds containing sulfone groups), acetonitrile, butyronitrile, and benzonitrile (organic compounds containing nitrile groups). Note that the organic compound containing a hydroxyl group is not particularly limited, but is preferably a polyhydric alcohol or a monohydric alcohol having 4 or more carbon atoms because the stretching ratio is good. In addition to the above-mentioned examples, the organic compound may have any two or more bonds or functional groups among the ether bond, ester bond, carbonate bond, hydroxyl group, nitro group, sulfone group and nitrile group in the molecule. The organic compound contained in the combination may be sufficient.

  The organic compound includes an organic compound including an ether bond, an organic compound including an ester bond, an organic compound including a carbonate bond, and a hydroxyl group when two or more of the organic compounds are mixed and used as a solvent of an electrolytic solution. Of organic compounds, organic compounds containing a nitro group, organic compounds containing a sulfone group, and organic compounds containing a nitrile group, an organic compound having excellent elongation and an organic compound having excellent shrinkage are combined and obtained by electrolytic polymerization. The expansion / contraction rate per oxidation-reduction cycle of the obtained conductive polymer can also be improved.

  The halogenated hydrocarbon contained as a solvent in the electrolytic solution in the method for producing a conductive polymer is one in which at least one hydrogen in the hydrocarbon is substituted with a halogen atom, and the liquid is produced under electrolytic polymerization conditions. There is no particular limitation as long as it can exist stably.

  Examples of the halogenated hydrocarbon include dichloromethane and dichloroethane. Although only one kind of the halogenated hydrocarbon can be used as a solvent in the electrolyte solution, two or more kinds can be used in combination. The halogenated hydrocarbon may be used in a mixture with the above organic compound, or a mixed solvent with the organic solvent may be used as a solvent in the electrolytic solution.

  In the method for producing a conductive polymer, the electrolytic solution used in the electropolymerization method includes an organic compound (for example, pyrrole) to be electropolymerized and a trifluoromethanesulfonate ion and / or a fluorine atom with respect to the central atom. Contains anion containing more than one. By conducting electrolytic polymerization using this electrolytic solution, it is possible to obtain a conductive polymer excellent in the expansion / contraction rate per one oxidation-reduction cycle and / or the displacement rate per specific time in electrolytic expansion / contraction. By the electrolytic polymerization, trifluoromethanesulfonic acid ions and / or anions containing a plurality of fluorine atoms with respect to the central atom are taken into the conductive polymer.

  The content of the anion containing a plurality of fluorine atoms with respect to the trifluoromethanesulfonate ion and / or the central atom is not particularly limited, but is 0.1 to 30% by weight in the electrolyte. Preferably, it is contained in an amount of 1 to 15% by weight.

Trifluoromethanesulfonate ion is a compound represented by the chemical formula CF ₃ SO ₃ ^— . An anion containing a plurality of fluorine atoms with respect to the central atom has a structure in which a plurality of fluorine atoms are bonded to a central atom such as boron, phosphorus, antimony and arsenic, Contains a plurality of fluorine atoms to be bonded. The anion containing a plurality of fluorine atoms with respect to the central atom is not particularly limited, but includes tetrafluoroborate ion (BF ₄ ⁻ ), hexafluorophosphate ion (PF ₆ ⁻ ), hexafluoroantimonate ion. (SbF ₆ ⁻ ) and hexafluoroarsenate ion (AsF ₆ ⁻ ) can be exemplified. Among these, CF ₃ SO ₃ ⁻ , BF ₄ ⁻ and PF ₆ ⁻ are preferable in consideration of safety to the human body and the like, and CF ₃ SO ₃ ⁻ and BF ₄ ⁻ are more preferable. As the anion containing a plurality of fluorine atoms with respect to the central atom, one type of anion may be used, or a plurality of types of anions may be used simultaneously in the electrolytic solution. An anion containing a plurality of fluorine atoms with respect to the central atom of the seed may be simultaneously used in the electrolytic solution.

Further, the perfluoroalkylsulfonylimide ion contained as an anion has a sulfonyl group bonded to a nitrogen atom which is the center of the anion, and further has two perfluoroalkyl groups which are substituents. The perfluoroalkyl sulfonyl is represented by _{C n F (2n + 1)} SO 2, other perfluoroalkyl sulfonyl group _is represented by _{C m F (2m + 1)} SO 2. The n and m are each an arbitrary integer of 1 or more, and n and m may be the same integer, or n and m may be different integers. For example, trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, undecafluoropentyl group, tridecafluorohexyl group, pentadecafluoroheptyl group, heptadecafluorooctyl group and the like can be mentioned. . Examples of the perfluoroalkylsulfonylimide salt include bistrifluoromethylsulfonylamide salt, bis (pentafluoroethylsulfonyl) imide salt, and bis (heptadecafluorooctylsulfonyl) imide salt.

The perfluoroalkylsulfonylimide ion of the above chemical formula (1) can form a salt with a cation, and may be added as a perfluoroalkylsulfonylimide salt to the electrolytic solution in the electrolytic polymerization method. The cation that forms a salt with the perfluoroalkylsulfonylimide may be composed of one element, such as Li ⁺ , or may be composed of a plurality of elements. The cation is not particularly limited as long as it can form a perfluoroalkylsulfonylimide ion as a monovalent cation and can be dissociated in the electrolytic solution.

  Further, when the diaphragm has a multilayer structure, it is not necessary to have a laminated structure of the conductive polymer film layer and other layers on the entire surface of the diaphragm, and the fluid in the pump chamber does not permeate. As long as it has a layer, a conductive polymer film having a space near the center of the shape may be used.

  In the diaphragm pump of the present invention, a plurality of diaphragms may be provided in parallel on the same surface. The diaphragm pump may be installed in a stack in the pump. As described above, when a plurality of diaphragms are provided in the pump, a diaphragm unit including a plurality of diaphragms arranged in parallel on the same surface may be formed. In the diaphragm pump of the present invention, a plurality of the diaphragm units may be provided in parallel, or a plurality of the diaphragm units may be provided in a stacked manner.

  FIG. 10 is a front view of an embodiment of the diaphragm unit. The diaphragm unit 71 includes a metal frame 72 having a large number of conductive polymer films 73 formed in openings of circular holes. Also, the back side of the metal frame 72 is provided with 72 ′ having the same shape. A tab portion 74 for applying voltage is formed on the metal frame 72. The metal frame 72 'is similarly formed with a tab portion. In addition, a conductive polymer film is formed in the hole 73 so as to cover the opening of the hole 73. 11 is a cross-sectional view of the diaphragm unit of FIG. 10 taken along the line AA. 12 is a partially enlarged view of the cross-sectional view of FIG.

  In FIG. 12, the conductive polymer film 77 formed at the opening of the circular hole of the metal frame 72 is insulated from the conductive polymer film 77 ′ formed at the opening of the circular hole of the metal frame 72 ′. Via the body 75, they face each other so that the convex portions face each other. The diaphragm can be driven to extend and contract like the diaphragm of FIG. 1 or 2 described above. Further, by disposing the porous body 76 between the metal frame 72 and the metal frame 72 ′, it is possible to form a gap between the metal frames, and the conductive polymer films 77 and 77 ′ are formed. The cross section can be maintained in an arc shape. In addition, since a voltage can be applied to each diaphragm in each metal frame by applying a voltage to the metal frames 72, 72 ', the driving of a plurality of diaphragms can be easily controlled. Note that an electrolytic solution is preferably sealed between the conductive polymer film 77 and the conductive polymer film 77 ′. When the electrolytic solution exists between the conductive polymer films, the conductive polymer films 77 and 77 ′ have a relationship between the working electrode and the counter electrode, and the expansion and contraction driving as shown in FIG. 1 or FIG. 2 is facilitated. can do. The insulator is disposed in each hole in order to prevent the conductive polymer film 77 and the conductive polymer film 77 ′ from being in direct contact with each other. If the conductive polymer film 77 ′ is not in contact, it may not be arranged.

  The method for forming the conductive polymer film formed on the metal frames 72, 72 'is not particularly limited. For example, a metal frame is used as a working electrode, a back plate is applied to the metal frame, and the hole of the metal frame is formed by electrolytic polymerization in a state where the hole of the metal frame is closed with the back plate. The covering conductive polymer film can be easily formed. The conductive polymer film formed by such an electrolytic polymerization method is a film that covers the metal frame on one side, but the conductive polymer film as a diaphragm is circular in the hole. Since many small diaphragms can be formed in the same space, the conductive polymer film formed in each hole can be expanded and contracted to obtain a large discharge pressure, and a plurality of diaphragm pumps can be connected in parallel. Since it is formed, the diaphragm using the diaphragm unit can discharge a large flow rate.

  FIG. 13 is a perspective view of an embodiment of a diaphragm pump using the diaphragm unit. 14 is a cross-sectional view taken along the line B-B in the diaphragm pump of FIG. 15 is a partially enlarged cross-sectional view in the vicinity of the suction port in the cross-sectional view of FIG. 16 is a partially enlarged cross-sectional view of the vicinity of the discharge port in the cross-sectional view of FIG.

  In FIG. 13, the diaphragm pump 81 has a housing formed of a lid body 82 and a bottom body 83. The diaphragm unit is housed inside the housing. The lid is provided with suction ports 84 and 84 'and discharge ports 85 and 85'. Further, the voltage application terminals 86 and 86 'are also provided in the diaphragm pump 81 so as to be connected to an external power source. In the diaphragm pump 81, the suction port 84 and the discharge port 85 are provided so that the fluid sucked into the pump from the suction port 84 is discharged from the discharge port 85. Further, in the diaphragm pump 81, both the suction port 84 'and the discharge port 85' are provided so that the fluid sucked into the pump from the suction port 84 'is discharged from the discharge port 85'.

  As shown in the BB cross-sectional view of FIG. 14, the diaphragm pump 81 includes three diaphragm units. As shown in FIG. 15, the three diaphragm units 87, 88, 89 are spaced from each other, and flow paths 90, 91, 92, 93 are formed. The flow path 90 and the flow path 92 are provided with seal bodies 94 and 95 at the end on the suction port side so that fluid does not flow to the valve 96 for suction. Further, as shown in FIG. 16, the flow path 91 and the flow path 93 are provided with seal bodies 97 and 98 at the end on the discharge port side so that fluid does not flow to the discharge valve 99. . The flow path 91 and the flow path 93 communicate with the suction port 84 via the valve 96 and also communicate with the discharge port 84 ′ via a valve provided near the discharge port 84. Similarly, the flow channel 90 and the flow channel 92 communicate with the suction port 85 ′ via a valve provided near the suction port 85 ′ and through the valve 99 provided near the discharge port 85. 85.

  15 and 16, the diaphragms on the lower side of the diaphragm units 87 and 89 and the diaphragm on the upper side of the diaphragm unit 88 extend, and fluid flows through the flow paths 91 and 93 from the suction port 84 through the valve 96. It can flow into the space between the diaphragm unit 87 and the diaphragm unit 88 and the space between the bottom body 83 and the diaphragm unit 89. Simultaneously with this inflow, the diaphragms on the upper side of the diaphragm units 87 and 89 and the diaphragm on the lower side of the diaphragm unit 88 contract, so that the fluid existing in the space between the diaphragm units 87 and 88, and The fluid fluid existing in the space between the diaphragm unit 88 and the lid 82 can pass through 90 and 92 and be discharged from the discharge port 85 via the valve 99. Thus, in the diaphragm unit 87 and the diaphragm unit 88, the conductive polymer films facing each other are driven so that the expansion and contraction are in phase. Similarly, in the diaphragm unit 88 and the diaphragm unit 89. The conductive polymer films facing each other are driven so that the expansion and contraction are in phase.

  That is, in the embodiment examples of the diaphragm pump illustrated in FIGS. 14 to 16, the diaphragms on the lower side of the diaphragm units 87 and 89 and the diaphragm on the upper side of the diaphragm unit 88 are expanded to suck the fluid from the suction port 84. When the diaphragms on the lower side of the diaphragm units 87 and 89 and the diaphragm on the upper side of the diaphragm unit 88 are contracted, the fluid sucked from the suction port 84 is discharged from the discharge port 85 ′. Similarly, the diaphragms on the upper side of the diaphragm units 87 and 89 and the diaphragm on the lower side of the diaphragm unit 88 are expanded to suck the fluid from the suction port 84, and the diaphragms on the upper side of the diaphragm units 87 and 89 and By contracting the diaphragm on the lower side of the diaphragm unit 88, the fluid sucked from the suction port 84 is discharged from the discharge port 85. The expansion and contraction of the conductive polymer film of each diaphragm unit can occur as described above by applying a voltage to the metal frame of each diaphragm unit.

  The pump of the present invention has the structure as described above, and the conductive polymer is driven by a chemical mechanism. Therefore, the pump can be driven at a low voltage, and is silent. Simple and easy to downsize. Moreover, since almost no metal parts are used, the weight can be easily reduced.

  FIG. 4 is a longitudinal sectional view of a third embodiment of the pump of the present invention. FIG. 5 is a cross-sectional view of the pump of FIG. FIG. 6 is a longitudinal sectional view showing a state where the pump of FIG. 5 is driven. A tube pump 40 that is a pump of the present invention includes a tube-shaped conductive polymer molded product 41 and a rod-shaped core member 42 inside thereof. The outer surface of the core material is covered with a separator, and a flow path 44 is formed between the separator 43 and the inner surface of the tube of the tubular conductive polymer 41. When the fluid passing through the flow path 44 is an electrolyte and the core material 42 is a metal wire that can be energized, the tube pump 40 applies a voltage to the core material and the tube-shaped conductive polymer, Since the dopant ions in the conductive polymer molded product are released into the electrolytic solution and contracted, and the tubular conductive polymer molded product is deformed inward, the channel can be blocked as shown in FIG. . In this tube pump, by gradually moving the portion to which the voltage is applied in one direction of the length of the tube pump, the flow path is blocked by the contact between the tubular conductive polymer molded product and the separator. Since the portion gradually moves in one direction in the length direction, the fluid in the flow path can be pumped. In addition, as a method of gradually moving the portion where the voltage is applied to the tubular conductive polymer molded product in one direction in the length direction of the tube pump, the electrical resistance of the conductive polymer is used. It is easy to attach the lead wires so that they are spaced at regular intervals in the length direction of the tube-shaped conductive polymer molded product, and move the lead wires to which voltage is applied sequentially to the adjacent lead wires. Can do.

  In the tube pump shown in FIGS. 4 to 6, the core material functions as an electrode, and a separator is provided outside the core material. However, the tube pump of the present invention is not limited to such a configuration. Absent. For example, as another embodiment of the tube pump of the present invention, a fluid flow path is provided between the core material and the tube of the tube-shaped conductive polymer molded product. A structure in which an electrolyte layer is provided and an electrode layer is further provided on the electrolyte layer can be shown. By applying a voltage using the electrode layer as a counter electrode and the conductive polymer molded article as a working electrode, the same drive as shown in FIG. 6 can be performed.

The tube pump of the present invention has the structure as described above, and the conductive polymer is driven by a chemical mechanism, so that the pump can be driven at a low voltage and is silent, and further, the device configuration It is also easy to downsize. Moreover, since almost no metal parts are used, the weight can be easily reduced. The conductive polymer molded product includes the conductive polymer obtained by the method for producing a conductive polymer by an electrolytic polymerization method, and the electrolytic polymerization method includes an ether bond. Using an electrolyte containing an organic compound and / or a halogenated hydrocarbon containing at least one bond or functional group among ester bond, carbonate bond, hydroxyl group, nitro group, sulfone group and nitrile group as a solvent, 3% or more of the conductive polymer obtained by the method for producing a conductive polymer containing a trifluoromethanesulfonate ion and / or an anion containing a plurality of fluorine atoms with respect to the central atom in the electrolytic solution. Since expansion and contraction can be easily obtained, it is preferable. In particular, the conductive polymer molded product is a method for producing a conductive polymer using an electrolytic polymerization method, and the electrolytic polymerization method includes the trifluoromethanesulfonate ion and / or the central atom as an anion. On the other hand, instead of an anion containing a plurality of fluorine atoms, chemical formula (2)
(C _n F _{(2n + 1)} SO ₂ ) (C _m F _{(2m + 1)} SO ₂ ) N ⁻ (2)
(Here, n and m are arbitrary integers.)
Including a conductive polymer obtained by a method for producing a conductive polymer using an electrolytic solution containing a perfluoroalkylsulfonylimide ion represented by the formula can cause an electrolytic expansion and contraction of 16% or more, preferable.

  FIG. 7 is a longitudinal sectional view of a fourth embodiment of the pump of the present invention. FIG. 8 is a longitudinal sectional view showing a state in which the pump of FIG. 7 is driven. The bellows pump 51 which is a pump of the present invention is formed by a bellows in which a wall 53 of the pump chamber 52 also has a function as a spring, and includes a bottom 54 and an upper part 55 joined to the wall 53. The bellows pump 51 includes a driving element 56 that is a linear conductive polymer molded product so as to be connected to the upper portion 55 and the bottom portion 54. 7 includes a suction valve 581 in the vicinity of the suction port 57, and a discharge port 582 in the vicinity of the discharge port 59. The suction valve 581 prevents the fluid from being discharged from the suction port, and the discharge valve 582 prevents the fluid from being sucked from the discharge port. In addition, a member for mounting the suction pipe, the discharge pipe, or the like may be appropriately attached in the vicinity of the suction port and / or the discharge port. In addition, the material of the intake valve and the discharge valve is not particularly limited, and a known metal valve or resin valve can be used, and a known method such as adhesion can be used for joining to the housing. it can.

  The bellows pump 51 shown in FIG. 7 uses, for example, a fluid sucked and discharged into the pump chamber 52 as an electrolytic solution, and a lead wire is attached to a driving element 56 that is a linear conductive polymer molded product to apply a voltage as a working electrode. Further, by applying a voltage by providing a counter electrode in the pump chamber 52, it can be driven by the expansion / contraction movement of the linear conductive polymer molded product and the expansion / contraction movement of the bellows that also functions as a spring. FIG. 8 is a longitudinal sectional view showing a state in which the bellows pump of FIG. 7 is contracted. In the state of FIG. 7, the driving element 56, which is a conductive polymer linear body, is expanded by applying a voltage, and the bellows pump 51 is expanded by the expansion force of the bellows having a spring function. As the bellows pump 51 extends, fluid is sucked into the pump chamber 52. Next, by applying a voltage reverse to the voltage applied in the state of FIG. 7 to the driving element 56, the pump 51 is contracted to the state of FIG. In the state of FIG. 8, the driving element 56, which is a conductive polymer linear body, is contracted by voltage application, the bellows having a spring function is contracted, and the pump chamber 52 is contracted. By contracting the pump chamber 52, the fluid in the pump chamber 52 is discharged from the discharge port. The wall portion which is a bellows is not particularly limited as long as it has a spring function for expanding and contracting the bellows pump. For example, a metal bellows, a resin bellows, or a rubber bellows can be used. A bellows having a protective layer on the inside can also be used.

  In the bellows pump of the present invention, it is preferable that the fluid to be discharged is an electrolytic solution because it is not necessary to provide an electrolyte layer. When the fluid is an electrolytic solution, the metal bellows preferably has corrosion resistance for durability.

  The bellows pump of the present invention exercises by repeating the states shown in FIGS. 8 and 7 and performs a pump function. The bellows pump of the present invention has the above-described structure, and the conductive polymer is driven by a chemical mechanism. Therefore, the pump can be driven at a low voltage, and is silent. It is also easy to downsize. Moreover, since almost no metal parts are used, the weight can be easily reduced.

  FIG. 9 is a longitudinal sectional view of an embodiment in which a metal coil spring is provided inside the pump chamber 52 of the bellows pump. The bellows pump 51 ′ of FIG. 9 includes a coiled spring 60 in addition to the configuration of the bellows pump 51 of FIG. 8, so that the coiled spring functions as a counter electrode when the fluid to be discharged is an electrolytic solution. In addition, the bellows pump 51 'can be extended by a coil spring. When the linear conductive polymer molded product as the driving element is contracted by voltage application, the bellows pump 51 'is contracted and the coil spring is contracted. When a linear conductive polymer molded product is stretched by applying a reverse voltage, even if the wall portion of the bellows is a bellows that does not have a spring function such as a resin bellows, the repulsive force of the coiled spring The bellows pump 51 'can be extended. That is, the bellows pump of the present invention is a bellows pump in which the fluid to be discharged is an electrolytic solution and a metal coil spring is provided inside the pump chamber, and the coil spring can function as a counter electrode. The expansion and contraction of the bellows pump, that is, the suction and discharge of the fluid can be performed more smoothly, which is preferable.

  The drive element for the bellows pump of the present invention is connected to the upper and bottom portions of the pump chamber, and extends from the connection portion with the upper portion of the pump chamber to the connection portion between the upper and lower portions of the pump chamber. It is not necessary to be a driving element. About half of the length from the top to the bottom may be a driving element, and may be connected to the top and bottom of the pump chamber via a connecting member.

The driving element is a conductive polymer molded product, and the shape is not particularly limited as long as the bellows can be contracted and expanded, but the connection between the top and bottom of the pump chamber is easy. Therefore, it is preferable that the shape of the conductive polymer molded product is any of a linear shape, a columnar shape, a strip shape, or a cylindrical shape. In addition, when the driving element has these shapes, the driving element may be provided so that the long axis of the conductive polymer molded product coincides with the expansion / contraction direction of the pump chamber. It is preferable because of its high efficiency. The bellows pump can be driven by driving the driving element by alternately applying a positive voltage and a negative voltage to the conductive polymer molded article to cause an electrolytic expansion and contraction motion. The conductive polymer molded product includes the conductive polymer obtained by the method for producing a conductive polymer by an electrolytic polymerization method, and the electrolytic polymerization method includes an ether bond. Using an electrolyte containing an organic compound and / or a halogenated hydrocarbon containing at least one bond or functional group among ester bond, carbonate bond, hydroxyl group, nitro group, sulfone group and nitrile group as a solvent, 3% or more of the conductive polymer obtained by the method for producing a conductive polymer containing a trifluoromethanesulfonate ion and / or an anion containing a plurality of fluorine atoms with respect to the central atom in the electrolytic solution. Since expansion and contraction can be easily obtained, it is preferable. In particular, the conductive polymer molded product is a method for producing a conductive polymer using an electrolytic polymerization method, and the electrolytic polymerization method includes the trifluoromethanesulfonate ion and / or the central atom as an anion. On the other hand, instead of an anion containing a plurality of fluorine atoms, chemical formula (3)
(C _n F _{(2n + 1)} SO ₂ ) (C _m F _{(2m + 1)} SO ₂ ) N ⁻ (3)
(Here, n and m are arbitrary integers.)
Including a conductive polymer obtained by a method for producing a conductive polymer using an electrolytic solution containing a perfluoroalkylsulfonylimide ion represented by the formula can cause an electrolytic expansion and contraction of 16% or more, preferable.

  The pump of the present invention can be reduced in size, is lightweight, can be driven at a low voltage of about several volts or less, and can be driven silently. Therefore, the heat generating element cooling pump, blood transporting means, and reagent dispenser The fuel cell can be suitably used for a feed pump for raw materials represented by methanol and a pump for implantation in a living body. As for the in-vivo implantable pump, since the pump of the present invention can be driven at 1 Hz and can pulsate close to a pulse, it is preferably used as an artificial heart for humans or animals. Can do.

  In particular, since the pump of the present invention uses a conductive polymer molded product and is driven by an electrochemical reaction of the conductive polymer molded product, the refrigerant in a device for cooling a heating element such as a CPU in a computer is circulated. When the refrigerant is used in a pump for the purpose, since the refrigerant is warmed by the heating element and has heat, an electrochemical reaction is likely to proceed. Therefore, the refrigerant can be more suitably used as a cooling pump for the heating element. .

  The pump of the present invention can be used for an ink cartridge in a printer using ink typified by an ink jet printer. The pump of the present invention can be used as an ink discharge pump or an ink supply pump by being installed in the ink cartridge. For example, a printer using an ink cartridge having the pump of the present invention by using the pump of the present invention as an ink discharge pump of the ink cartridge and connecting the pump to a printer head via a flexible pipe, Since the printer head can be reduced in size, it can be suitably used as a portable printer having a small printing mechanism. In addition, the ink cartridge provided with the pump of the present invention has a small number of pump parts and the structure of the pump is simple, so that it can be easily made disposable. When the ink cartridge provided with the pump of the present invention is disposable, there is no worry about ink leakage and the like, and the life of the pump is not considered, so that the ink cartridge can be used more suitably.

Sectional drawing of the example of the 1st embodiment of the pump of this invention. Sectional drawing in case a connection member is not used in the pump of FIG. Sectional drawing of the example of the 2nd embodiment of the pump of this invention. The longitudinal section of the example of the 3rd embodiment of the pump of the present invention. Sectional drawing of the pump of FIG. The longitudinal cross-sectional view which shows the state which driven the pump of FIG. The longitudinal section of the example of the 4th embodiment in the pump of the present invention. FIG. 8 is a longitudinal sectional view showing a state where the pump of FIG. 7 is driven. The longitudinal cross-sectional view of the example of an embodiment provided with the metal coil-shaped spring in the inside of the pump chamber 52 of the pump of FIG. The front view of one embodiment example of a diaphragm unit. FIG. 11 is a cross-sectional view of the diaphragm unit of FIG. 10 taken along the line AA. The elements on larger scale in AA sectional drawing of the diaphragm unit of FIG. The perspective view in the example of one embodiment of the diaphragm pump using a diaphragm unit. BB sectional drawing in the diaphragm pump of FIG. FIG. 15 is a partially enlarged sectional view in the vicinity of the suction port in the sectional view of FIG. 14. FIG. 15 is a partially enlarged sectional view in the vicinity of the suction port in the sectional view of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 1 'Diaphragm pump 2, 2' Housing 3, 3 'Diaphragm 4, 4' Diaphragm 5, 5 'Wall surface 6 Connection member 7, 7' First pump chamber 8, 8 'Second pump chamber 9, 9' Space portion 10, 10 'Lead 11, 11' Suction port 121, 123 Suction valve 122, 124 Discharge valve 13, 13 'Discharge port 21 Diaphragm pump 22 Housing 23 Diaphragm 24 Wall surface 25 Pump chamber 26 Spring member 27 Electrodes 28, 28 'Lead wire 29 Space portion 30 Suction port 311 Suction valve 312 Discharge valve 32 Discharge port 40 Tube pump 41 Tubular conductive polymer 42 Core material 43 Separator 44 Channel 51 Bellows pump 52 Pump chamber 53 Wall portion 54 Bottom portion 55 Top portion 56 Drive element 57 Suction port 581 Suction valve 582 Discharge valve 59 Discharge port 60 Coiled spring 71 Diaphragm units 72, 72 'Metal frame 73 Hole 76 Porous body 81 Diaphragm pump 82 Lid 83 Bottom body 84, 84 'Suction port 85, 85' Discharge port 86, 86 'Terminal 87, 88, 89 Diaphragm unit 90, 91 Channel 92, 93 Channel 94 95 Seal body 96, 99 Valve 97, 98 Seal body

Claims (16)

Driving unit for controlling the discharge of inhalation and / or fluid of the fluid, a diaphragm pump including a driving element comprising a conductive polymer molded article,
A diaphragm constituting at least a part of the pump chamber includes the driving element,
A plurality of the diaphragms, each diaphragm constitutes a part of a separate pump chamber,
A diaphragm pump in which a membrane surface of one diaphragm is connected to a membrane surface of another diaphragm directly or via a connecting member . Two diaphragms are disposed in a state of tension is applied to each membrane surface direction, the diaphragm pump according to claim 1, wherein the diaphragm comprises a film-like conductive polymer molded article, said diaphragm constituting a pump chamber, respectively. The diaphragm pump according to claim 2 , wherein a space facing two diaphragms is filled with an electrolytic solution, and a film-like conductive polymer molded product contained in each diaphragm is in contact with the electrolyte. The diaphragm pump according to any one of claims 1 to 3, wherein the conductive polymer molded article includes a conductive polymer having an elongation rate per 0.5 second of 0.5% or more when a voltage of 1 V is applied. . The conductive polymer molded article includes a conductive polymer obtained by a method for producing a conductive polymer by an electrolytic polymerization method, and the electrolytic polymerization method includes an ether bond, an ester bond, a carbonate bond, a hydroxyl group, a nitro An electrolyte containing an organic compound and / or a halogenated hydrocarbon containing at least one bond or functional group among a group, a sulfone group and a nitrile group as a solvent, and trifluoromethanesulfonate ions and / or Or the diaphragm pump of any one of Claim 1 to 4 containing the said conductive polymer obtained by the manufacturing method of the conductive polymer containing the anion which contains multiple fluorine atoms with respect to a central atom. The conductive polymer molded article is a method for producing a conductive polymer using an electrolytic polymerization method, wherein the electrolytic polymerization method is used as an anion to the trifluoromethanesulfonic acid ion and / or the central atom. Instead of an anion containing multiple fluorine atoms, chemical formula (1)
(C _n F _{(2n + 1)} SO ₂ ) (C _m F _{(2m + 1)} SO ₂ ) N ⁻ (1)
(Here, n and m are arbitrary integers.)
The diaphragm pump of any one of Claim 1 to 5 containing the conductive polymer obtained by the manufacturing method of the conductive polymer using the electrolyte solution containing perfluoroalkyl sulfonylimide ion represented by these . A driving method of the diaphragm pump according to any one of claims 1 to 6 ,
A driving method of a diaphragm pump, in which a positive voltage and a negative voltage are alternately applied to the conductive polymer molded product to cause electrolytic expansion and contraction, thereby driving the driving element and driving the pump. A diaphragm pump having two or more pump chambers,
Including a diaphragm constituting at least a part of each pump chamber;
The diaphragm includes a conductive polymer film,
The electrolyte is filled in a closed space facing two or more diaphragms,
A diaphragm pump in which each diaphragm includes a pump chamber on the opposite side of the closed space across the diaphragm, and each diaphragm includes a conductive polymer film in contact with the electrolyte.     The diaphragm pump according to claim 8, comprising at least one pair of diaphragms arranged so as to face each other, and the pair of diaphragms are not connected to each other. The diaphragm pump according to claim 8 or 9, wherein the conductive polymer molded article contains a conductive polymer having an elongation rate per 0.5 second of 0.5% or more when a voltage of 1 V is applied. The conductive polymer molded article includes a conductive polymer obtained by a method for producing a conductive polymer by an electrolytic polymerization method, and the electrolytic polymerization method includes an ether bond, an ester bond, a carbonate bond, a hydroxyl group, a nitro An electrolyte containing an organic compound and / or a halogenated hydrocarbon containing at least one bond or functional group among a group, a sulfone group and a nitrile group as a solvent, and trifluoromethanesulfonate ions and / or The diaphragm pump according to claim 8 or 9, comprising the conductive polymer obtained by a method for producing a conductive polymer containing an anion containing a plurality of fluorine atoms with respect to a central atom. The conductive polymer molded article is a method for producing a conductive polymer using an electrolytic polymerization method, wherein the electrolytic polymerization method is used as an anion to the trifluoromethanesulfonic acid ion and / or the central atom. Instead of an anion containing multiple fluorine atoms, chemical formula (1)
(C _n F _{(2n + 1)} SO ₂ ) (C _m F _{(2m + 1)} SO ₂ ) N ⁻ (1)
(Here, n and m are arbitrary integers.)
The diaphragm pump of Claim 8 or 9 containing the conductive polymer obtained by the manufacturing method of the conductive polymer using the electrolyte solution containing perfluoroalkyl sulfonylimide ion represented by these. A driving method of a diaphragm pump according to claim 8 ,
The reverse voltage of the voltage applied to one conductive polymer film is applied to the other conductive polymer film so that the driving of one diaphragm and the driving of the other diaphragm are in opposite phases in the suction-discharge cycle Apply the voltage as
A driving method of a diaphragm pump in which the polarity of each applied voltage is continuously applied by alternately applying positive and negative polarities.     The conductive polymer film contracts by applying a voltage to reduce the volume of one pump chamber, and the contracting movement expands by applying a voltage having a polarity opposite to the voltage. The driving method of the diaphragm pump according to claim 13, wherein the volume of the other pump chamber is increased by pulling the membrane through the electrolytic solution.     The method for driving a diaphragm pump according to claim 13 or 14, wherein a cycle of applying the positive voltage and applying the negative voltage is 1 or more per second.     Claims: There are one or more pairs in which the diaphragms are arranged so as to face each other with an electrolytic solution therebetween, and one diaphragm and the other diaphragm of the pair are continuously driven so as to be in opposite phases in the suction-discharge cycle. Item 16. A driving method of a diaphragm pump according to any one of Items 13 to 15.

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