JP4628866B2 - Ultrasonic probe - Google Patents

Description

  The present invention relates to an ultrasonic probe.

  Conventionally, as an ultrasonic probe, there is a probe for surface wave measurement described in Japanese Patent Laid-Open No. 2000-1312297 (Patent Document 1).

  The surface wave measuring probe includes a base and three plate-like vibrators attached to the base in a circular arc-shaped concave section at substantially equal intervals.

  This surface wave measuring probe oscillates an ultrasonic wave from the ultrasonic wave transmitting / receiving surface of one of the three vibrators toward the member to be measured for fatigue, and the oscillated ultrasonic wave is After the surface layer portion (including the surface) of the fatigue measurement member is propagated, the ultrasonic wave is propagated through the fatigue measurement member by being received by a vibrator other than the one vibrator. The propagation speed is measured. And based on this propagation speed, the degree of metal fatigue of the above-mentioned fatigue degree measuring member is measured.

However, in the above conventional surface wave measurement probe, ultrasonic waves that propagate toward the transducer other than the one transducer after propagating through the surface layer oscillate from the edge of the one transducer. Then, there is a problem that the propagation speed when the ultrasonic wave propagates through the fatigue level measuring member cannot be accurately measured due to interference with the reflected wave reflected on the surface of the fatigue level measuring member. Further, the conventional ultrasonic probe requires a plurality of transducers having a predetermined shape, and there is a problem that the shape and number of transducers are limited.
Japanese Unexamined Patent Publication No. 2000-131297 (FIG. 3)

  SUMMARY OF THE INVENTION An object of the present invention is to provide an ultrasonic probe that can accurately measure the propagation speed of ultrasonic waves propagating through a member to be measured for fatigue, and can increase the degree of freedom of the shape of a vibrator.

In order to solve the above problems, an ultrasonic probe of the present invention is
A vibrator,
A masking member provided with at least one hole through which the sound wave from the vibrator passes is provided in the main body portion that blocks the sound wave from the vibrator ,
Two holes are provided in the main body,
At least, is characterized that you have been corrugations are formed on the other of said holes side edge of one of said holes.

  The present invention may have only one vibrator, or may have a plurality of vibrators independent of each other. Moreover, this invention may have only one masking member and may have a several different masking member.

  According to the present invention, since the main body is provided with a masking member provided with at least one hole through which the sound wave from the vibrator passes, the hole whose shape and size are appropriately set in the masking member In this way, it is possible to measure the propagation speed of the ultrasonic wave propagating through the member to be measured for fatigue, regardless of how the number and shape of the vibrators are set. That is, the degree of freedom of the shape of the vibrator can be increased.

  Further, according to the present invention, only a necessary portion of the ultrasonic wave oscillated from the vibrator can be easily taken out by passing through the hole, and the hole in the masking member is formed. It is possible to easily block unnecessary and noisy portions of the ultrasonic waves oscillated from the vibrator at the portions that are not present. Therefore, it is possible to accurately measure the propagation speed of the ultrasonic wave propagating through the fatigue level measuring member.

  In the ultrasonic probe of one embodiment, the wave is a sawtooth wave.

According to the embodiment, since the wave is a sawtooth wave , the wave shape can be formed easily and inexpensively, and the manufacturing cost of the ultrasonic probe can be reduced.

Further , according to the present invention , the body portion is provided with two holes, and at least at the edge of the other hole side of the one hole, a wave is formed. After passing through the one hole, it propagates through the fatigue measurement member, and further, based on the ultrasonic wave that passes through the other hole and reaches the vibrator, the ultrasonic fatigue test member Propagation speed can be measured. In addition, since the wave eye is formed at the other hole side edge of the one hole, the diffracted wave (noise ultrasonic wave) generated at the other hole side edge of the one hole can be suppressed. The propagation speed of the ultrasonic fatigue resistance measuring member can be accurately measured.

  In the ultrasonic probe according to an embodiment, the transducer has one ultrasonic reception surface having both an ultrasonic transmission function and an ultrasonic reception function.

  According to the embodiment, the vibrator can be easily manufactured.

  In the ultrasonic probe according to an embodiment, the masking member is a plate member having a substantially rectangular surface shape, and has a slit that accommodates a pair of opposite edges of the masking member. A positioning member for positioning the masking member with respect to the vibrator is provided.

  According to the embodiment, since the positioning member for positioning the masking member with respect to the vibrator is provided, the relative position of the masking member with respect to the vibrator is changed while the vibrator is oscillating ultrasonic waves. There is no change. Therefore, the propagation speed of the ultrasonic wave propagating through the fatigue level measuring member can be measured more accurately. In addition, since the positioning member uses a slit to position the masking member with respect to the vibrator, the masking member can be easily and inexpensively positioned with respect to the vibrator.

  The ultrasonic probe according to an embodiment includes a moving device that moves the masking member relative to the vibrator.

  According to the embodiment, since the moving device that moves the masking member relative to the vibrator is provided, the masking member can be moved closer to the vibrator and the masking member is moved to the vibrator. It can be moved away from the transducer.

  According to the ultrasonic probe of the present invention, since the main body portion includes the masking member provided with at least one hole through which the sound wave from the vibrator passes, the shape and size of the masking member are appropriately set. By forming the holes, it is possible to measure the propagation speed of the ultrasonic wave propagating through the fatigue-measurement member, regardless of how the number and shape of the vibrators are set. That is, the degree of freedom of the shape of the vibrator can be increased.

  Further, according to the present invention, only a necessary portion of the ultrasonic wave oscillated from the vibrator can be easily taken out by passing through the hole, and the hole in the masking member is formed. It is possible to easily block unnecessary and noisy portions of the ultrasonic waves oscillated from the vibrator at the portions that are not present. Therefore, it is possible to accurately measure the propagation speed of the ultrasonic wave propagating through the fatigue level measuring member.

  Hereinafter, the present invention will be described in detail with reference to the drawings.

  1-3 is a figure which shows the ultrasonic probe of 1st Embodiment before attaching the masking member 4. FIG. Specifically, FIG. 1 is a bottom view of the ultrasonic probe of the first embodiment, FIG. 2 is a side view of the ultrasonic probe of the first embodiment, and FIG. 1 is a cross-sectional view taken along line α-α. In FIG. 1, the vibrator 2 and the guide member 3 are not cross sections, but are subjected to hashing in order to clarify the difference between the members.

  As shown in FIGS. 1 and 3, the ultrasonic probe includes a backing member 1, a vibrator 2, a guide member 3 as an example of a positioning member, and a plate-like masking member 4.

  The backing member 1 is made of resin and has a spherical concave surface 5. The vibrator 2 has an integral ultrasonic transmission / reception surface 8. The vibrator 2 has a curved long plate shape. The vibrator 2 is fixed to the concave surface 5 of the backing member 1 so that the vibrator 2 extends on the great circle of the spherical concave surface 5. The ultrasonic transmission / reception surface 8 has both an ultrasonic transmission function and an ultrasonic reception function. The ultrasonic transmission / reception surface 8 extends on the great circle of the virtual spherical surface.

  As shown in FIG. 1, the guide member 3 includes a first side portion 10 and a second side portion 11 that are disposed opposite to each other on the great circle so as to sandwich the vibrator 2, and a first side portion 10. And a stopper portion 13 that connects the second side portion 11 to each other. As shown in FIG. 2, the first side portion 10 (the same applies to the second side portion 11) extends in the thickness direction of the backing member 1. The first side portion 10 (the same applies to the second side portion 11) is in contact with the side surface of the backing member 1. The contact surfaces of the first side portion 10 and the second side portion 11 with respect to the backing member 1 are bonded to the backing member 1.

  In addition, as shown in FIG. 2, a portion protruding from the backing member in the first side portion 10 (the same applies to the second side portion 11) accommodates an end portion in the longitudinal direction of the masking member 4. The slit 15 is formed.

  The dimension between the bottom 17 of the slit 15 of the first side part 10 (see FIG. 1) and the bottom 18 of the slit of the second side part 11 is substantially equal to the longitudinal dimension of the masking member 4. Yes. That is, when the masking member 4 is manually moved in the direction indicated by the arrow a in FIG. 1 and the first and second side portions 10 and 11 are inserted into the slits 15, the masking member 4 The relative position with respect to the vibrator 2 is not movable in the longitudinal direction of the masking member 4.

  The stopper portion 13 extends substantially parallel to the great circle in the bottom view shown in FIG. The stopper portion 13 is in contact with the concave surface 5 of the backing member 1. When the masking member 4 is inserted into the slit 15 of the first and second side portions 10 and 11, the stopper portion 13 comes into contact with one edge in the longitudinal direction of the masking member 4, thereby The relative position with respect to the guide member 3 and the vibrator 2 is not movable in the width direction of the masking member 4.

  The masking member 4 is arranged at a fixed position by bringing one edge in the longitudinal direction of the masking member 4 into contact with the stopper portion 13. That is, the position at which one edge in the longitudinal direction of the masking member 4 contacts the stopper portion 13 is a fixed position of the masking member 4. The guide member 3 positions the masking member 4 with respect to the vibrator 2 so that the relative position of the masking member 4 with respect to the vibrator 2 does not change.

  As shown in FIG. 1, the masking member 4 has a rectangular surface. The masking member 4 has two identical substantially rectangular shapes that are plane-symmetric with respect to a plane perpendicular to the surface of the masking member 4 and the longitudinal edge of the masking member 4 and passing through the center of the masking member 4. The long holes 20 and 21 are provided. Portions other than the long holes 20 and 21 of the masking member 4 are main body portions that block the passage of ultrasonic waves. The longitudinal edges 22, 23, 24, 25 of the long holes 20, 21 are substantially parallel to the widthwise edges of the masking member 4. As shown in FIG. 1, an edge 23 of the slot 20 on the slot 21 side, an edge 22 of the slot 20 opposite to the slot 21 side, an edge 24 of the slot 21 on the slot 20 side, On the edge 25 opposite to the long hole 20 side of the hole 21, a saw-tooth wave shape in which peaks and valleys are alternately formed in the width direction of the masking member 4 is formed. Specifically, the mountain extends in the longitudinal direction of the masking member 4.

  Hereinafter, a method for measuring the fatigue level of the track bottom of the raceway groove of the inner ring of the ball bearing as an example of a fatigued measurement member using this ultrasonic probe will be briefly described.

  First, with respect to the ultrasonic probe to which the masking member 4 shown in FIGS. 4 and 5 is not attached, the inner ring so that the track bottom of the track groove of the inner ring faces the great circle of the concave surface 5 of the backing member 1. Place.

  Next, water is filled between the ultrasonic probe and the inner ring. This is realized by a method such as filling a transparent water tank containing the ultrasonic probe and the inner ring with water.

  Next, an ultrasonic wave is oscillated from the vibrator 2, the ultrasonic wave oscillated from the vibrator 2, reflected by the bottom of the orbit and reaching the vibrator 2 is detected by the vibrator 2, and the vibrator 2 The time from the time when the oscillates until the time when the ultrasonic wave first arrives at the vibrator 2 is measured. Based on this time, the distance between the vibrator 2 and the track groove is measured, and the distance between the vibrator 2 and the track groove is determined as the center P of the great circle of the vibrator 2 and the recess 5 (see FIG. 4). Is set to a predetermined distance shorter than the distance between and.

  Next, the masking member 4 is manually inserted into the guide member 3, and the masking member 4 is fixed at a fixed position. Then, an ultrasonic wave is oscillated from the vibrator 2, is oscillated from the vibrator 2, passes through one hole 20 of the masking member 4, propagates along the orbit bottom along the circumferential direction, and then masks. Ultrasonic waves that pass through the other hole 21 of the member 4 and reach the vibrator 2 are detected.

  Finally, based on the detection of the ultrasonic wave, the propagation speed of the ultrasonic wave at the bottom of the orbit is calculated, and based on the propagation speed of the ultrasonic wave at the bottom of the orbit, there is a correspondence relationship with the propagation speed of the ultrasonic wave. Measure the degree of fatigue at a certain track bottom.

  According to the ultrasonic probe of the first embodiment, the masking member 4 having the holes 20 and 21 is provided, and the passage of ultrasonic waves can be restricted by the masking member 4. Therefore, by appropriately setting the size, shape, and number of holes, the fatigue level of the fatigued measurement member can be measured in any shape of the vibrator. Therefore, the degree of freedom of the shape of the vibrator can be greatly increased.

  Further, according to the ultrasonic probe of the first embodiment, the holes 20 and 21 have the masking member 4 and through which part of the ultrasonic waves oscillated from the vibrator 2 passes. Therefore, only the necessary portion of the ultrasonic waves oscillated from the vibrator 2 by the masking member 4 can be easily taken out, and unnecessary and noise of the ultrasonic waves oscillated from the vibrator 2 can be removed. Can be easily cut off. Therefore, it is possible to accurately measure the propagation speed of the ultrasonic wave propagating through the fatigue level measuring member.

  In addition, according to the ultrasonic probe of the first embodiment, the corrugation is formed in the portions 22, 23, 24, 25 of the edges of the holes 20, 21 of the masking member 4. , 21 are generated by the ultrasonic waves passing through the edge portions 22, 23, 24, 25 of each other, being weakened by overlapping each other and being generated from the edge portions 22, 23, 24, 25 of the holes 22, 23. Waves (noise ultrasonic waves) can be significantly suppressed. Therefore, the propagation speed of the ultrasonic wave propagating through the orbital bottom can be measured more accurately.

  Further, according to the ultrasonic probe of the first embodiment, the wave eyes formed in the portions 22, 23, 24, 25 of the edges of the holes 20, 21 of the masking member 4 are sawtooth wave waves. Since it is an eye, the wave shapes of the edge portions 22, 23, 24, 25 of the holes 20, 21 can be formed easily and inexpensively, and the manufacturing cost of the ultrasonic probe can be reduced.

  Further, according to the ultrasonic probe of the first embodiment, the masking member 4 has the two holes 20 and 21 through which ultrasonic waves can pass simultaneously, so that it is oscillated from the ultrasonic transmission / reception surface 8. After passing through one hole 20 or 21, the ultrasonic wave trajectory is propagated based on the ultrasonic wave that propagates through the bottom of the trajectory and passes through the other hole 21 or 20 and is received by the ultrasonic wave transmitting / receiving surface 8. Can measure the velocity of propagation to the bottom. In addition, since the corrugation is formed in the edge 23, 24 on the other hole 21 or 20 side of the one hole 20 or 21, it occurs at the edge on the other hole 21 or 20 side of the one hole 20 or 21. Diffracted waves (noise ultrasonic waves) can be remarkably suppressed, and the propagation speed of ultrasonic waves to the orbital bottom can be accurately measured.

  In the ultrasonic probe of the first embodiment, the stopper portion 13 is not in contact with the side surface of the backing member 1, but in the present invention, as shown in FIGS. The stopper portion 33 may have a structure in contact with the side surface of the backing member 30. In this case, the guide member 31 can be reliably fixed to the backing member 30.

  Further, in the ultrasonic probe of the first embodiment, sawtooth wave-like waves are formed in the long holes 20 and 21 of the masking member 4. However, in the present invention, a wave other than a sawtooth wave such as a sine wave may be formed in the hole of the masking member.

  Further, in the ultrasonic probe of the first embodiment, as shown in FIG. 1, sawtooth wave-like waves are formed on the longitudinal edges 22, 23, 24, 25 of the long holes 20, 21 of the masking member 4. Formed.

  However, in the present invention, instead of the masking member 4, as shown in FIG. 8, as compared with the masking member 4, the corrugation at the edge opposite to the long hole 41 side in the longitudinal direction of the long hole 40 is omitted. In addition, a masking member 45 that omits the wave of the edge of the long hole 41 opposite to the long hole 40 side in the longitudinal direction may be employed.

  Further, a masking member 64 shown in FIG. 9 may be employed instead of the masking member 4. The masking member 64 has round holes 60 and 61, and peaks and valleys extending substantially in the longitudinal direction of the masking member 64 are formed in the width direction of the masking member 4 at all edges of the round holes 60 and 61. Alternating sawtooth wave-like waves are formed.

  Further, instead of the masking member 4, a masking member 75 shown in FIG. The masking member 75 has D-shaped holes 70 and 71, and the circular arc portions of the hole 70 and the hole 71 are arranged to face each other. Further, on all edges of the D-shaped holes 70, 71, there are sawtooth wave-like waves in which peaks and valleys extending substantially in the longitudinal direction of the masking member 75 are alternately formed in the width direction of the masking member 75. Is formed.

  In the ultrasonic probe of the first embodiment, the backing member 1 and the guide member 3 are separate bodies, but the backing member and the guide member may be integrated.

In the ultrasonic probe according to the first embodiment, there is no restriction on the size of the wave of the sawtooth wave formed at the edges of the holes 20 and 21. However, the width w between adjacent peaks of the sawtooth wave is made smaller than the height h of the peaks, and the width w between the peaks is set so that the ultrasonic wave oscillated from the vibrator 2 is submerged in water. If it is set to be smaller than ½ of the wavelength, the generation of a diffracted wave (noise wave) from the edge where the wave eye is formed can be reliably prevented. For example, when the frequency of the ultrasonic wave oscillated from the vibrator 2 is 5 × 10 ⁶ [Hz], the sound velocity of the sound wave in water when the water temperature is 26.3 [° C.] is 1500 [m / s]. Therefore, when the water temperature is 26.3 [° C.], the wavelength of the ultrasonic wave oscillated from the vibrator 2 in water is approximately 3 × 10 ⁻⁴ [m]. Therefore, if w is set to be smaller than (3 × 10 ⁻⁴ ) /2=1.5×10 ⁻⁴ [m], it is possible to reliably generate a diffracted wave (noise wave) from the edge where the wave is formed. Can be prevented. In addition, since the fluctuation of the underwater sound speed due to the fluctuation of the water temperature is very small, 1500 [m / s] can be used as the underwater sound speed.

  Further, in FIG. 1, when the masking member 4 is inserted into the guide member 3, it is assumed that a mountain has come to the center of the edge 23 of the masking member 4 and a mountain has come to the center of the edge 24. With the path length of the ultrasonic wave oscillated from the peak at the center of the edge 23 and reflected at the bottom of the orbit reaching the peak at the center of the edge 24 as y1 [m], the masking member 4 is inserted into the guide member 3, It is assumed that a valley has come to the center of the edge 23 of the masking member 4 and, when it is assumed that a valley has come to the center of the edge 24, it is oscillated from the valley at the center of the edge 23 and reflected from the bottom of the orbit. When the path length of the ultrasonic wave reaching the central valley is y2 [m] and the wavelength when the ultrasonic wave propagates in water is λ [m], | y2-y1 | y1 | = (n + 1/2) λ (where n is an integer greater than or equal to 0) If the relationship of (number) is satisfied, the noise waves from the edges 23 and 24 can be weakened, and the measurement can be performed accurately.

  In the measurement of the fatigue level of the fatigue level measuring member, the ultrasonic wave propagating through the inner ring in a state where water as a solvent is filled between the ultrasonic probe and the inner ring as an example of the fatigue level measuring member. The propagation speed of was measured. However, between the ultrasonic probe of the present invention and the fatigue measurement member, spindle oil (acoustic wave propagation speed is 1342 [m / s] at 32 ° C.) and ethanol (acoustic wave propagation speed is 20 ° C.). 1168 [m / s]) or air (the propagation speed of the sound wave is 340 [m / s] at 15 ° C.) and other solvents such as water are filled to measure the fatigue level of the member to be measured for fatigue. Of course, it is also good. In this case, the shape of the edge of the hole of the masking member is set to a wave shape, and the width of the adjacent mountain is set to be equal to or less than the height of the mountain, and the ultrasonic wave oscillated from the vibrator is set. When the wavelength is set to ½ or less of the wavelength in the solvent, as in the case where the solvent is water, noise ultrasonic waves are not oscillated from the edge of the hole, and the fatigue level of the member to be measured for fatigue is determined. Can be done accurately.

  FIGS. 11-14 is a figure which shows the ultrasonic probe of 2nd Embodiment. The ultrasonic probe of the second embodiment is a second new plate shape in addition to the backing member 1, the guide member 3, the vibrator 2, and the masking member 4 of the ultrasonic probe of the first embodiment. The second masking member 84 is different from the ultrasonic probe of the first embodiment.

  In the ultrasonic probe of the second embodiment, the same components as those of the ultrasonic probe of the first embodiment are denoted by the same reference numerals, and description thereof is omitted. In the ultrasonic probe according to the second embodiment, the description of the operational effects and modifications common to those of the ultrasonic probe according to the first embodiment is omitted, and the ultrasonic probe according to the first embodiment is omitted. Only configurations, effects, and modifications different from those of the child will be described.

  As shown in the sectional view of FIG. 11 and the bottom view of FIG. 12, the second masking member 84 has a rectangular surface shape. The second masking member 84 has one hole 86 having a substantially rectangular shape extending in the width direction substantially at the center in the longitudinal direction. The portion other than the hole 86 of the second masking member 84 is a main body that blocks the passage of ultrasonic waves. The second masking member 84 has the same structure as the masking member 4 except for the shape of the hole such as the plate thickness.

  The longitudinal edge of the hole 86 is substantially parallel to the widthwise edge of the masking member 84. As shown in FIG. 13, a sawtooth wave is formed at the edge of the hole 86 in the longitudinal direction.

  The second masking member 84 is used when measuring the distance between the vibrator 2 and a fatigue level measuring member (for example, the raceway bottom of the inner ring of the ball bearing). That is, the second masking member 84 is inserted until it comes into contact with the stopper portion 13 of the guide member 3, and the second masking member 84 is arranged at the fixed position, and then the ultrasonic wave is oscillated from the vibrator 2. Yes. In this way, the ultrasonic waves that can reach the member to be measured for fatigue are limited to the portion of the total ultrasonic waves oscillated from the vibrator 2 that has passed through the hole 86.

  Hereinafter, a method for measuring the fatigue level of a member for measuring fatigue level using the ultrasonic probe of the second embodiment (for example, the raceway bottom of the inner ring of the ball bearing) will be briefly described.

  First, as shown in FIGS. 11 and 12, the second masking member 84 is inserted into the slit of the guide member 3 to place the second masking member 84 at a fixed position, and the above-mentioned great circle of the concave surface 5 of the backing member 1. The inner ring is arranged so that the bottom of the raceway groove of the inner ring faces.

  Next, as before, water is filled between the ultrasonic probe and the inner ring.

  Next, an ultrasonic wave is oscillated from the vibrator 2, is oscillated from the vibrator 2, passes through the hole 86 of the second masking member 84, is reflected at the bottom of the orbit, passes through the hole 86 again, and passes through the hole 2. Is detected by the vibrator 2, and the time from the time when the vibrator 2 oscillates the ultrasonic wave until the time when the ultrasonic wave first arrives at the vibrator 2 is measured. Based on this time, the distance between the vibrator 2 and the orbital bottom is measured, and the distance between the vibrator 2 and the orbital bottom is set to a predetermined value shorter than the distance between the vibrator 2 and the center P of the great circle. The backing member 1 is set to a distance and fixed with an appropriate fixing device.

  Next, after manually removing the second masking member 84, the masking member 4 is manually inserted into the guide member 3, and the masking member 4 is fixed at a fixed position as shown in FIGS. Then, as before, an ultrasonic wave is oscillated from the vibrator 2, oscillated from the vibrator 2, passes through one hole 20 of the masking member 4, and propagates a predetermined distance along the circumference of the orbit along the circumferential direction. Thereafter, ultrasonic waves that pass through the other hole 21 of the masking member 4 and reach the vibrator 2 are detected, and the degree of fatigue of the track bottom is measured.

  According to the ultrasonic probe of the second embodiment, the measurement of the distance between the vibrator 2 and the bottom of the track of the inner ring, which is a fatigue measurement member, is performed using the second masking member 84, and the measurement is performed. The ultrasonic wave to be performed is limited to a portion passing through the hole 86 of the second masking member 84 among all the ultrasonic waves oscillated by the vibrator 2. Therefore, the normal line of the state where the vibrator 2 is not inclined with respect to the bottom of the orbit, that is, the normal line of the bottom part of the orbit facing the hole 86 coincides with the normal line of the ultrasonic transmission / reception surface of the vibrator 2. In this state, the distance can be measured and the distance can be measured accurately.

  In the ultrasonic probe of the second embodiment, as shown in FIG. 12, a sawtooth wave is formed at the longitudinal edge of the long hole 86 of the second masking member 84.

  However, in the present invention, the second masking member 104 shown in FIG. 15 may be employed instead of the second masking member 84. The second masking member 104 has a round hole 106 at substantially the center, and peaks and valleys extending substantially in the longitudinal direction of the second masking member 104 are formed on the edges of the round hole 106. A sawtooth wave pattern alternately formed in the width direction 104 is formed.

  FIGS. 16-18 is a figure which shows the ultrasonic probe of 3rd Embodiment of this invention. The ultrasonic probe of the third embodiment is different from the ultrasonic probe of the first embodiment in that the masking member is not moved manually but moved by a moving device.

  In the ultrasonic probe of the third embodiment, the description of the operational effects and modifications common to those of the ultrasonic probe of the first embodiment will be omitted, and the ultrasonic probe of the first embodiment will be omitted. Only different configurations, operational effects, and modifications will be described.

  This ultrasonic probe includes a backing member 111, a vibrator 112, a guide member 113, a motor 114 as an example of a moving device, as shown in FIG. And a masking member 115.

  The vibrator 112 is attached to the backing member 111 so as to extend on the great circle of the spherical concave surface 117 of the backing member 111. Further, as shown in FIG. 16, the guide member 113 has a thickness of one side portion 118 larger than a thickness of the other side portion 119 in the great circle direction.

  The motor 114 has a main body 117 and a gear 120. As shown in FIG. 16, the main body 117 is fixed to an end surface of the one side portion 118 in a direction substantially perpendicular to the great circle direction.

  As shown in FIG. 16, the masking member 115 is a plate-shaped member having a rectangular surface. The masking member 115 has the same long holes 130 and 131 as the masking member 4 of the first embodiment. Further, a gear 121 extending in the width direction is formed at one end of the plate-like mask member 115 having a rectangular surface shape in the longitudinal direction.

  The gear 120 of the motor 114 is engaged with the gear 121 of the masking member 115. As shown in FIG. 17 which is a side view, the masking member 115 is inserted into the slit 133 by rotating the gear 120 of the motor 114 in the direction of the arrow α. Further, the masking member 115 is taken out from the slit 133 by rotating the gear 120 of the motor 114 in the arrow β direction.

  The ultrasonic probe of the third embodiment is shown in FIG. 16 by rotating the gear 120 of the motor 114 in the direction of arrow β when measuring the distance between the transducer 112 and the member to be fatigued. As described above, the masking member 115 is completely removed from the slit 133.

  On the other hand, when measuring the propagation speed when the ultrasonic wave propagates through the member to be measured for fatigue, the masking member 115 is guided by the guide member 113 as shown in FIG. The masking member 115 is moved into the slit 133 until it comes into contact with the stopper portion 116, and the masking member 115 is arranged at a fixed position.

  According to the ultrasonic probe of the third embodiment, since the motor 114 that moves the masking member 115 relative to the vibrator 112 is provided, the masking member 115 can be moved to a fixed position and masking is performed. The member 115 can be moved from the fixed position.

  19 to 22 are diagrams showing an ultrasonic probe according to the fourth embodiment.

  In the ultrasonic probe of the fourth embodiment, the guide member 143 has no stopper, the masking member 145 has the longitudinal edge of the masking member 4 of the first embodiment, and the longitudinal length of the second masking member 84. The ultrasonic probe according to the third embodiment is different from the ultrasonic probe according to the third embodiment in that it has a shape in which the edges of the directions are attached. The masking member 145 is also different from the ultrasonic probe of the third embodiment in that the masking member 145 is disposed at the first fixed position and the second fixed position, that is, there are two fixed positions.

  In the ultrasonic probe of the fourth embodiment, the description of the operational effects and modifications common to those of the ultrasonic probe of the first to third embodiments will be omitted, and the ultrasonic waves of the first to third embodiments will be omitted. Only configurations, operational effects, and modifications different from those of the probe will be described.

  In the ultrasonic probe of the fourth embodiment, as described above, the masking member 145 attaches the longitudinal edge of the masking member 4 of the first embodiment to the longitudinal edge of the second masking member 84. It has a shape like Specifically, the masking member 145 has a rectangular surface shape, and a gear 150 is formed at the edge of one side of one surface of the masking member 145.

  Further, as shown in FIG. 19, the motor 147 as an example of the moving device is fixed to the surface of the guide member 143 opposite to the backing member side. The gear 148 of the motor 147 meshes with the gear 150 of the masking member 145.

  When measuring the distance between the vibrator 151 and the member to be fatigued, that is, when measuring the specular reflection wave, the gear 148 of the motor 147 is rotated to the arrow δ shown in FIG. As shown in FIG. 20, a portion of the masking member 145 where one long hole 156 exists at the center in the direction perpendicular to the moving direction of the masking member 145 is made to face the vibrator 151. Specifically, the masking member 145 is arranged at the first fixed position so that the center of the long hole 156 faces the vibrator 151. In this state, undulations are formed on the edge in the longitudinal direction of the one long hole 156, that is, the edge parallel to the gear 150 of the masking member 145 in the long hole 156.

  On the other hand, when measuring the propagation speed of the ultrasonic wave propagating through the member to be fatigued, that is, when detecting a leaky Rayleigh wave, the gear 148 of the motor 147 is rotated in the direction of the arrow γ shown in FIG. As shown in FIG. 22, the portion of the masking member 145 in which the two elongated holes 154 and 155 that are plane-symmetric with respect to the perpendicular bisector in the direction perpendicular to the moving direction of the masking member 145 is designated as the vibrator 151. So that it is opposite. Specifically, the masking member 145 is arranged at the second fixed position so that the center of the long holes 154 and 155 is opposed to the vibrator 151. In this state, corrugations are formed at the longitudinal edges of the long holes 154, 155, that is, the edges parallel to the gear 150 of the masking member 145 in the long holes 154, 155. Portions other than the long holes 154, 155, and 156 in the masking member 145 are main body portions that block the passage of ultrasonic waves.

  As shown in FIG. 19, the masking member 145 includes a gear 148 of the motor 147 fixed to the guide member 143 and a slit 158 of the side surface portion 157 opposite to the motor side of the vibrator 151 of the guide member 143. It is supported.

  According to the ultrasonic probe of the fourth embodiment, the long hole 156 for measuring the distance from the fatigued measurement member is one part when the masking member 145 is disposed opposite to the transducer 151 in the moving direction. In addition, the long holes 154 and 155 for measuring the propagation speed of the ultrasonic fatigued measuring member are composed of two parts. Therefore, only by changing the rotation direction of the motor 147, the elongated hole 156 in the masking member 145 has one part and the elongated holes 154 and 155 in the masking member 145 have two parts in an arrangement facing the vibrator 151. It can be moved easily, and the degree of fatigue of the fatigued measurement member can be easily measured.

  In the ultrasonic probe of the fourth embodiment, no sensor is used to place the masking member 145 at the first or second fixed position. However, in the present invention, for example, the length of the long hole is long. Applying paint near the center of the edge of the direction, creating a marker on the part where the paint is applied, and detecting the marker with an optical sensor or the like, the ultrasonic probe is fixed in the first or second direction. You may make it arrange | position correctly in a position.

  23 to 26 are views showing an ultrasonic probe according to a fifth embodiment of the present invention.

  In the ultrasonic probe according to the fifth embodiment, the ultrasonic transmission / reception surface having both the ultrasonic transmission function (oscillation function) and the ultrasonic reception function of the vibrator is not integrated (only one), but is vibrated. The first embodiment is that the ultrasonic transmission / reception surface of the child is composed of three mutually independent portions, in other words, the vibrator is composed of the first vibrator 161, the second vibrator 162, and the third vibrator 163. Different from the ultrasound probe.

  In the ultrasonic probe of the fifth embodiment, the description of the operational effects and modifications common to those of the ultrasonic probe of the first to fourth embodiments will be omitted, and the ultrasonic probe of the first embodiment will be omitted. Only configurations, effects, and modifications different from those of the child will be described.

  As described above, the ultrasonic probe includes the first transducer 161, the second transducer 162, and the third transducer 163. As shown in FIGS. 23 and 24, the first, second, and third vibrators 161, 162, 163 have substantially the same shape and are arranged on the great circle of the spherical concave surface 165 of the backing member 164. Are arranged at substantially equal intervals at intervals. As shown in FIG. 24, the first, second, and third transducers 161, 162, 163 have substantially square ultrasonic wave transmitting / receiving surfaces.

  When measuring the distance from the member to be fatigued, the ultrasonic probe is removed from the second vibrator 162 with the masking member 170 (see FIGS. 25 and 26) removed, as shown in FIG. The propagation time of the ultrasonic wave that is oscillated and reflected by the fatigued measurement member (not shown) and reaches the second vibrator 162, and the third vibration that is oscillated from the first vibrator 161 and reflected by the fatigued measurement member. By detecting that the propagation time of the ultrasonic wave reaching the child 163 is the same, it is confirmed that the ultrasonic probe is not inclined with respect to the fatigued measurement member. From this state, the distance between the ultrasonic probe and the fatigued measurement member is shortened by a predetermined distance, and the distance of the portion of the fatigued measurement member through which the ultrasonic wave propagates is set.

  Further, when measuring the propagation speed at which the ultrasonic wave propagates through the fatigued measurement member, that is, when measuring the propagation time of the leaky Rayleigh wave, the masking member 170 is attached to the guide member 174 as shown in FIGS. Install. Then, after being oscillated from the first vibrator 161 and passing through the first hole 176 of the masking member 170 to reach the fatigued measurement member and propagating through the fatigued measurement member for a predetermined distance, Based on the ultrasonic wave that has passed through the hole 177 and reached the third vibrator 163, the propagation speed of the ultrasonic fatigued measurement member is measured.

  According to the ultrasonic probe of the fifth embodiment, when measuring the propagation time of the leaky Rayleigh wave, since the measurement is performed with the masking member 170 attached, the first hole 176 and the second hole The ultrasonic wave that has passed through 177 can be measured, and the ultrasonic wave of a desired path can be measured. Therefore, it is possible to accurately measure the propagation speed of the ultrasonic fatigued measurement member.

It is a bottom view of the ultrasonic probe of the first embodiment. It is a side view of the ultrasonic probe of a 1st embodiment. It is the alpha-alpha sectional view taken on the line of FIG. It is a figure which shows the ultrasonic probe to which the masking member is not attached. It is a figure which shows the ultrasonic probe to which the masking member is not attached. It is a figure which shows the modification of the ultrasonic probe of 1st Embodiment. It is a figure which shows the modification of the ultrasonic probe of 1st Embodiment. It is a figure which shows the modification of the masking member of the ultrasonic probe of 1st Embodiment. It is a figure which shows the modification of the masking member of the ultrasonic probe of 1st Embodiment. It is a figure which shows the modification of the masking member of the ultrasonic probe of 1st Embodiment. It is sectional drawing of the ultrasonic probe of 2nd Embodiment equipped with the 2nd masking member. It is a bottom view of the ultrasonic probe of 2nd Embodiment equipped with the 2nd masking member. It is sectional drawing of the ultrasonic probe of 2nd Embodiment equipped with the masking member. It is a bottom view of the ultrasonic probe of 2nd Embodiment equipped with the masking member. It is a figure which shows the modification of the 2nd masking member of the ultrasonic probe of 2nd Embodiment. It is a bottom view of the ultrasonic probe of 3rd Embodiment which is not mounting | wearing with the masking member. It is a side view of the ultrasonic probe of a 3rd embodiment which is not wearing a masking member. It is a bottom view of the ultrasonic probe of 3rd Embodiment equipped with the masking member. It is a bottom view of an ultrasonic probe of a 4th embodiment which has arranged a masking member in the 1st fixed position. It is a side view of the ultrasonic probe of a 4th embodiment which has arranged a masking member in the 1st fixed position. It is a bottom view of the ultrasonic probe of 4th Embodiment which has arrange | positioned the masking member in the 2nd fixed position. It is a side view of the ultrasonic probe of a 4th embodiment which has arranged a masking member in the 2nd fixed position. It is sectional drawing of the ultrasonic probe of 5th Embodiment which is not mounting | wearing with the masking member. It is a bottom view of the ultrasonic probe of 5th Embodiment which is not mounting | wearing with the masking member. It is sectional drawing of the ultrasonic probe of 5th Embodiment equipped with the masking member. It is a bottom view of the ultrasonic probe of 5th Embodiment equipped with the masking member.

1,111,164 backing member 2,112,151 vibrator 3,31,113,143,175 guide member 4,45,64,75,115,145,170 masking member 84,104 second masking member 114,147 Motor 161 First vibrator 162 Second vibrator 163 Third vibrator

Claims (5)

A vibrator,
A masking member provided with at least one hole through which the sound wave from the vibrator passes is provided in the main body portion that blocks the sound wave from the vibrator ,
Two holes are provided in the main body,
At least, the ultrasonic probe is characterized that you have other corrugations the edge of the hole side of one of the holes are formed. The ultrasonic probe according to claim 1,
The wave th ultrasonic probe and said corrugations der Rukoto of sawtooth. The ultrasonic probe according to claim 1 or 2 ,
The transducer has one ultrasonic transmission / reception surface having both an ultrasonic transmission function and an ultrasonic reception function. The ultrasonic probe according to any one of claims 1 to 3 ,
The masking member is a plate member having a substantially rectangular surface shape,
An ultrasonic probe, comprising: a slit that accommodates a pair of opposing edges of the masking member; and a positioning member that positions the masking member with respect to the transducer. The ultrasonic probe according to any one of claims 1 to 4 ,
An ultrasonic probe comprising: a moving device that moves the masking member relative to the vibrator.

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