JP4631368B2 - Linear motor drive device - Google Patents

Description

  The present invention relates to a step-out detection method for a current control device in a long stroke linear motor using a winding switching method.

  In the conventional method for detecting the step-out of the current control device of the linear motor drive system, a light emitting part (or a light receiving part) is disposed at a predetermined position where the mover on the stator is positioned, while the light emitting part is arranged on the mover. A light receiving portion (or light emitting portion) that is paired with the light receiving portion (or the light receiving portion) is provided, and when the mover is positioned at a predetermined position of the stator, the presence or absence of light reception is determined to detect the step out of the mover. (For example, refer to Patent Document 1) When the feedback signal from the position detector and the command signal from the control circuit are counted by the counting means and compared, and the compared signal amount exceeds a preset specified amount In some cases, step-out is detected (see, for example, Patent Document 2).

First, the “linear motor device” disclosed in Patent Document 1 is a planar step motor type linear motor used in a semiconductor manufacturing apparatus or the like, and the linear motor disclosed in Patent Document 1 is a permanent magnet mover. This is not an example of the step out of a long long stroke movable magnet type linear motor constituted by a coil stator, but is shown as an example of step out of a linear motor.
In this “linear motor device”, as shown in FIG. 6, a light emitting unit 104 is disposed at a predetermined position of a stator 101, and the movable element 102 receives light from the light emitting unit 104. When the light receiving unit 103 is provided and the movable element 102 is positioned at a predetermined position of the stator 101, it is determined whether or not the light from the light emitting unit 104 is received by the light receiving unit 103. Here, light emitting units 104 each including an optical fiber 105 are provided at a plurality of locations of the stator 101, and light is introduced into these optical fibers 105 collectively or selectively from a light source 106. The
On the other hand, the light receiving portion 103 provided in the movable element 102 includes a pair of light receiving elements, for example, phototransistors, which are provided in a diagonal direction apart from the rectangular movable element 102. Specifically, the pair of light receiving elements are provided at opposite corners of the movable element 102, and the light receiving surfaces thereof are opposed to the stator 101. The size of the light receiving area of each light receiving element, that is, the field of view is set in accordance with the size of the light emitting unit 104, and light from the light emitting unit 104 is received only when facing the light emitting unit 104. It is supposed to be.

  In particular, since the light-emitting element 104 of the stator 101 is provided at a position where the grooves intersect, the light receiving element has a distance defined by the arrangement pitch of the grooves separated in the X and Y directions, and on the movable element 102. The separation distance is maximized. The light emitting unit 104 has a predetermined reference position for detecting the step-out on the stator 101 in relation to the arrangement position of the light receiving unit 103 (light receiving element) provided on the movable member 102. When positioned at (predetermined position), it is provided at a portion facing each of the light receiving elements.

Therefore, only when the movable element 102 is positioned at a predetermined position on the stator 101 and its posture is also stably held in the X and Y directions, the pair of light receiving elements provided in the movable element 102 is provided. Since the light from the light emitting unit 104 is received at the same time, the positioning of the movable element 102 at the predetermined position is confirmed with high accuracy from the presence or absence of light reception by the pair of light receiving elements. .
Thus, according to the linear motor device configured as described above, when the movable element 102 is moved on the stator 101 and the movement position thereof is controlled, for example, the light emitting unit described above is provided in the middle of the movement path set in advance by a program. A predetermined position where 104 is installed is incorporated, and when the movable element 102 is positioned at the predetermined position, it is checked whether or not the light from the light emitting unit 104 is received by the light receiving unit 103. The step out of 102 can be easily detected. In addition, since the light from the light emitting unit 104 is detected by the pair of light receiving elements provided in the diagonal direction of the movable element 102 so as to maximize the distance, the slight change in the posture of the movable element 102 is detected. Can be reliably detected, and the detection accuracy can be increased. Moreover, deviations in the X and Y directions can be collectively detected in a batch.

  As described above, in the conventional step-out detection method for the current control device of the linear motor drive system, the light emitting portion (or the light receiving portion) is disposed at a predetermined position where the mover on the stator is positioned. Is provided with a light-receiving part (or light-emitting part) that is paired with the light-emitting part (or light-receiving part), and when the mover is positioned at a predetermined position of the stator, the presence or absence of light reception is judged and the mover is stepped out. It is to detect. As described above, the linear motor disclosed in Patent Document 1 is a so-called plane step in which the stator is formed of a permanent magnet and the mover is formed of a coil, as opposed to a long stroke type movable magnet type linear motor. It is a genre linear motor called a motor type or a surface motor type.

The “bonding device” disclosed in Patent Document 2 relates to a rotary stepping motor built in a semiconductor bonding device, and does not relate to the step-out of a long stroke type linear motor. As shown in FIG. 7, when the apparatus is activated by the operation of an external operation means, the control circuit generates a command signal and a pulse signal defined by the control circuit synchronized with the clock signal from the pulse generator. To drive the pulse motor. On the other hand, an encoder that generates a pulse signal corresponding to the number of rotations of the pulse motor inputs a pulse signal that is a feedback signal to the control circuit, and based on this input signal, the control circuit outputs the pulse signal obtained from the encoder. The number of pulses is counted by a counting means such as an internal counter (step 201).
The control circuit determines whether or not the number of pulses as a feedback signal from the encoder matches the number of pulses as the command signal (number of pulses generated from the pulse generator) (step 202). If the two pulse numbers match, it is assumed that the apparatus is operating normally without any abnormality, and the process returns to step 201. If the pulse numbers of the two pulse signals do not match, it is determined whether the difference between the number of pulses as the command signal and the number of pulses as the feedback signal from the encoder is within a predetermined amount range (step) 203).
When the difference in the number of pulses is within the range of the predetermined amount set in advance, the process returns to step 201. However, when the number of pulses exceeds the preset range of the predetermined amount, the control circuit considers that some abnormality has occurred, that is, a step-out, and stops the apparatus.

As described above, the step-out detection method in the step motor of the conventional bonding apparatus counts and compares the feedback signal from the position detector and the command signal from the control circuit by the counting means, and the amount of the compared signal is determined in advance. A procedure was taken to detect step-out when the specified amount was exceeded.
Japanese Patent Laid-Open No. 10-23785 (5th page, FIG. 3) Japanese Patent Laid-Open No. 11-312663 (page 8, FIG. 3)

However, in the conventional linear motor device step-out detection method shown in Patent Document 1, a light emitting portion (or a light receiving portion) is disposed at a predetermined position where the mover on the stator is positioned. A light-receiving unit (or light-emitting unit) that is paired with the light-emitting unit (or light-receiving unit) is provided, and when the mover is positioned at a predetermined position of the stator, the presence or absence of light reception is determined to detect the step-out of the mover. Therefore, there is a problem that the installation of the light emitting part and the light receiving part makes the apparatus complicated and expensive. There is also a problem that the arrangement of the light emitting part on the movable element side is limited.
Further, in the bonding apparatus step-out detection method disclosed in Patent Document 2, the feedback signal from the position detector and the command signal from the control circuit are counted by the counting means and compared, and the amount of the compared signal is set in advance. Since measures are taken to detect step-out when the specified amount is exceeded, there is a problem that it is costly to install an encoder for step-out detection.

  Therefore, the present invention has been made in view of such problems, and determines the number of stators that are driving the mover without requiring a step-out detection sensor, and drives the mover. It is an object of the present invention to provide a step-out detection method and a step-out detection device for a winding switching linear motor capable of detecting a step-out of a mover from the number of stators and a position generated by a position generation unit.

In order to solve the above problem, the invention described in claim 1 is provided with a mover provided with a magnetic loading means constituted by a permanent magnet , and an electric loading means which is a multiphase winding , and the movable through a gap. A linear motor having a plurality of stators opposed to a child, a sensor for detecting that the movable element and the stator are opposed to each other, and an excitation and torque current command based on a speed command from a host device a current command generation unit for generating a current detecting means for outputting a current detection value by detecting the output current to the linear motor, excitation and so that the current detection value and the exciting and torque current command matches a current control unit for generating a torque voltage command, wherein a position generator for generating a position based on the speed command, the excitation and torque voltage command and the voltage to an output voltage on the basis of said position Comprising a current control device having a power section, and the said current control device, based on the speed command and the detection signal of the sensor, and outputs the output current in order to the multi-phase winding of the stator In the linear motor drive device that moves the mover, the stator is energized based on the motor constants that are the speed command, the excitation and torque current command, the excitation and torque voltage command, the resistance value, and the inductance value. A stator number determination unit that calculates the square of the number of coils of the stator and determines the number of the stators that are energized based on the square of the number of coils of the stator, and based on the number of the stators and the position A step-out detection unit that detects whether or not the mover is out of step.

According to the first aspect of the present invention, the step-out detection sensor is not required, the number of stators driving the mover is determined, and the number of stators driving the mover and the position generation unit are determined. The step-out of the mover can be detected from the generated position.
Further, without detecting a step-out detection sensor, the number of stators driving the mover is determined, and the number of stators driving the mover and the position generated by the position generation unit are used. A step-out detection device such as a long stroke type movable magnet type linear motor used in a semiconductor manufacturing device or the like that can detect step-out can be configured.

  Hereinafter, specific examples of the method of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing a configuration of a current control device of a linear motor driving system to which a step-out detection method for a winding switching linear motor according to the present invention is applied.
In the figure, 1 detects the step-out of the linear motor 16 using the number of stators 17 driving the mover determined by the stator number determination unit 3 and the position 18 generated by the position generation unit 5. The step-out detection unit outputs a step-out alarm 2 when the linear motor 16 has stepped out. Reference numeral 2 denotes a step-out alarm, and processing such as stopping the linear motor 16 is performed by the step-out alarm to prevent a failure of the linear motor due to step-out. Reference numeral 3 denotes a stator number discriminating unit that discriminates the number of coils of the stator driving the mover using the equation (1). In the equation (1), ω is the speed command 4, I is the excitation current command (Id_refA) 7 and torque current command (Iq_ref) 8 generated by the current command generator 6, V is the excitation voltage command (Vd_ref) 10, This is a voltage command calculated by the equation (2) using the torque voltage command (Vq_ref) 11.

However,
N: Number of coils of the stator driving the mover I: Current command R * I: Voltage drop due to resistance
ωL : voltage drop due to inductance V: voltage command φω: induced voltage
ω: Speed command .

  Reference numeral 9 denotes a current control unit that drives the linear motor 16 in the same manner as the current command generation unit 6. Therefore, the current feedback value received from the current detection means 15 and the excitation current command (Id_refA) 7 output from the current command generation unit 6 are displayed. The excitation voltage command (Vd_ref) 10 and the torque voltage command (Vq_ref) 11 are output so that the torque current command (Iq_ref) 8 matches. Reference numeral 12 denotes a two-phase / three-phase converter. The excitation voltage command (Vd_ref) 10 and the torque voltage command (Vq_ref) 11 output from the current control unit 9 are converted into a U-phase voltage (Vu_ref), a V-phase voltage (Vv_ref), Convert to W phase voltage (Vw_ref). Reference numeral 13 denotes a PWM control unit, and reference numeral 14 denotes a voltage output unit including the two-phase / three-phase conversion unit 12 and the PWM control unit 13. Reference numeral 30 denotes the entire current control device that drives the linear motor 16 with the above-described configuration.

FIG. 4 is a linear motor drive system diagram to which the step-out detection method of the present invention is applied.
FIG. 5 is a diagram showing a winding switching device in the linear motor drive system shown in FIG.

  For example, a system for driving a long-stroke type magnet movable linear motor to which the present invention is applied includes a mover 31 having a magnetic loading means constituted by a permanent magnet 36, as shown in FIG. A stator 32 having an electric loading means constituted by a winding having a winding surface facing the permanent magnet 36 is opposed to the permanent magnet 36 via a gap, and the stator 32 is a plurality of windings divided in the stroke direction. Each of the phase windings of each phase constituting the winding group 34 has a winding start terminal and a winding end terminal, and the winding group 34 has a stroke direction in the stroke direction. A linear motor 16 provided with a sensor 33 for detecting that it is completely opposed to the mover 31, and a current for generating a current command using the speed command 4 as shown in FIG. Command generator 6 and current A current detection unit 15 for detecting, a current control unit 9 for generating a voltage command so that a current detection value detected by the current detection unit 15 and the current command match, and a voltage from the speed command 4 is output. A position generation unit 5 that generates a position 18; a voltage output unit 14 that outputs a voltage using the voltage command and the position 18; a stator number determination unit that determines the number of stators 17; A current control device 30 comprising a step-out detection unit 1 that performs the above operation, a three-phase rectifier 37 as shown in FIG. 5, and a semiconductor switch 38 at both ends of the DC output side of the three-phase rectifier. Each of the windings of a plurality of winding groups 34 divided in the stroke direction is configured by a winding switching device 35 configured by providing a resistor 39 and a capacitor 40 in parallel with the semiconductor switch 38. The winding start terminal of the phase winding is connected to the output end of the current control device 30, and the other end is connected to the AC input side of the three-phase rectifying means 37 of the winding switching device 35. Is closed to excite a plurality of winding groups 34 divided in the stroke direction.

FIG. 2 is a flowchart showing the processing procedure of the stator discriminating unit of the present invention. The method for determining the number of stators will be described step by step with reference to this figure.
First, in step 19 (hereinafter abbreviated as S19), the voltage command V calculated by the equation (2) using the excitation voltage command (Vd_ref) 10 and the torque voltage command (Vq_ref) 11 is fetched (S19). V and V ² are calculated (S20), and the induced voltage φω and the square of the induced voltage (φω) ² are calculated (S21). Subsequently, V ² −2 × V × φω + (φω) ² which is the denominator of the equation (1) is calculated (S22), and the voltage RI of the resistance and the square of the voltage of the resistance (RI) ² are calculated ( Next, the reactance voltage ωLI and the reactance voltage square (ωLI) ² are calculated (S24), and the square N ² of the number of stator coils is calculated using the equation (1) (S25). From the result of step 25, the number of stators is discriminated using the stator number discriminating criterion (S26), and the number of stators 17 driving the mover is output.
In this stator number discrimination process, the square N ² of the number of coils of the stator is calculated using the equations (1) and (2) as described above, and based on the square N ² of the number of coils of the stator. The number of stators is obtained, and each coil 34 is modularized with a respective winding switching device 35 and driven in a relay manner.

FIG. 3 is a flowchart showing a processing procedure of the step-out detection method of the present invention. The method of the present invention will be described step by step with reference to this figure.
First, it is determined whether the number of stators 17 which is the determination result of the stator number determination unit 3 is 0 or other than 0 (S27). When the number of stators 17 is 0 , it is determined whether or not the number of stators that drive the mover at position 18 that is the output of the position generator 5 is 1 or more (S28). If the number of stators driving the mover is 1 or more, the step-out alarm 2 is output (S30). If the number of stators driving the mover is 0, the step- out alarm is output. 2 is not output (S31).
If the number of stators is one or more in the determination result of S27, it is determined whether or not the number of stators driving the mover at position 18 as the output of the position generation unit 5 is one or more (S29). ). If the number of stators driving the mover is 1 or more, the step-out alarm 2 is not output (S32). If the number of stators driving the mover is 0, a step-out alarm 2 is output (S33).
In this way, the number of stators 32 driving the mover 31 is determined using the speed command, the current command, the voltage command, and the motor constant, and the determination result of the number of stators 17 and the position generator 5 Since the procedure of detecting the step-out of the linear motor using the generated position 18 is taken, a step-out detection sensor is not required, the number of energized stators is determined, and the energized stator is determined. The step-out of the mover 31 can be detected from the number and the position 18 generated by the position generator 5.
That is, in this stator number 17 by the stator discriminating unit 3 is to detect the out-of-step by the position 18 determined by the position determining unit 5, the coil number of the stator to seek in the stator determination unit 3 by (1) Corresponds to the actually measured value (Fb), and the position 18 corresponds to the position command value obtained by directly calculating the speed command ω by the integral calculation or the like in the position generation unit 5 without using the Fb value of the encoder or the like. Then, the actual number of stators obtained by the stator discriminating unit 3 is determined by the number of stators of the position command value 18 to detect step-out.
Therefore, in Patent Document 1 cited as a conventional example, a number of light emitting units and light receiving units are provided for step out detection, and step out is detected based on actual measurement values. The step-out detection can be easily performed by calculating the actual number of stators and comparing it with the position (command value) 18 only by the calculation by.
Thus, Patent Document 1 is an example of a planar step motor type linear motor, and although the format is different from the linear motor targeted in the present invention, the step-out detection sensor required in Patent Document 1 and Suitable for long stroke type moving magnet (movable magnet) type linear motors used in semiconductor manufacturing equipment, etc. that do not require sensor processing. A tone detector was constructed.

  The step-out detection sensor is not required, the number of energized stators is determined, and the mover is stepped out from the number 17 of energized stators and the position 18 generated by the position generator 5. In particular, the present invention can be applied to a linear motor system such as a long stroke type movable magnet type linear motor for semiconductor manufacturing equipment.

It is a block diagram which shows the structure of the current control apparatus of the linear motor to which the step-out detection method of the coil | winding switching linear motor of this invention is applied. It is a flowchart which shows the process sequence of the stator discrimination | determination part of this invention. It is a flowchart which shows the process sequence of the step-out detection method of this invention. It is a figure of the linear motor drive system to which the step-out detection method of this invention is applied. It is a figure which shows the coil | winding switching apparatus shown in FIG. It is a block diagram of the conventional linear motor apparatus. It is a flowchart of the process of the conventional bonding apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Step-out detection part 2 Step-out alarm 3 Stator number discrimination | determination part 4 Speed command 5 Position generation part 6 Current command generation part 7 Excitation current command 8 Torque current command 9 Current control part 10 Excitation voltage command 11 Torque voltage command 12 Two-phase Three-phase conversion unit 13 PWM control unit 14 Voltage output unit 15 Current detection means 16 Linear motor 17 Number of stators 18 Position 30 Current control device 31 Movable element 32 Stator 33 Sensor 34 Winding group 35 Winding switching device 36 Permanent magnet 37 Three-phase rectifier 38 Semiconductor switch 39 Resistor 40 Capacitor

Claims (1)

A mover provided with magnetic loading means constituted by a permanent magnet, a plurality of stators provided with electric loading means that are multiphase windings and facing the mover through a gap, and the mover and the fixed A linear motor having a sensor for detecting that the child is facing ,
A current command generating unit that generates excitation and torque current commands based on a speed command from a host device ; current detection means that detects an output current to the linear motor and outputs a current detection value; and the current detection value ; a current control unit that generates the excitation and torque voltage command so that the exciting and torque current command coincides, a position generator for generating a position based on the speed command, and the position and the excitation and torque voltage command and a current control device having a voltage output unit for outputting an output voltage based on,
In the linear motor driving device in which the current control device sequentially outputs the output current to the multiphase winding of the stator and moves the mover based on the speed command and the detection signal of the sensor .
Calculate the square of the number of coils of the stator that is energized based on the motor command that is the speed command, the excitation and torque current command, the excitation and torque voltage command, the resistance value and the inductance value, A stator number discriminating unit for discriminating the number of stators energized based on the square of the number of coils;
A linear motor drive device comprising: a step-out detection unit that detects whether or not the mover has stepped out based on the number of the stators and the position.