JP4632802B2 - Bonding correction stage that can change inner and outer perimeter - Google Patents

Description

  The present invention relates to an optical information recording medium such as an optical disk and a laminating apparatus used for manufacturing a magnetic recording medium.

Optical discs made by bonding two light-transmitting substrates are already manufactured and sold in optical discs that use laser wavelength light to read recorded information, write information, or erase information. . DVDs and laser discs are examples.
This consists of two light-transmitting substrates, a reflective layer, an adhesive layer, and a printing layer. PC (polycarbonate) and PMMA (polymethyl methacrylate; commonly called acrylic) resin are used as materials for the light-transmitting substrate. In addition, Au, Ag, Al alloy or the like is used as the reflective layer, and an ultraviolet (UV) curable adhesive is used as the adhesive.
The radical UV method most commonly used as a conventional substrate bonding method is that a radical UV adhesive is dispensed by a dispenser on a predetermined concentric circle of a substrate (having a single plate on which information is recorded, a recording layer and a reflective layer). After dripping and placing the cover substrate (transparent single plate as a cover) on the information substrate, the excess adhesive is shaken off at a predetermined rotation speed and rotation time, irradiated with ultraviolet light, and the UV adhesive is cured. A bonded substrate was obtained.
However, since this method cannot correct the amount of warpage of the substrate, the R-Tilt value and the like are particularly large, which causes many defective products.
The warpage of the information side veneer before pasting is proportional to the difficulty of pasting. When the amount of warpage of the two plates to be bonded is the same amount and are bonded face to face, a balanced flat bonding medium can be obtained.

As shown in FIG. 1, the conventional DVD-ROM laminating method is as flat as possible in such a state, and it is easy to obtain a single plate before laminating with relative warpage, so the laminating table is a simple mirror surface. Even if it is, a good value can be easily obtained only by balancing two single plates. In the figure, symbol (1) indicates a cover single plate, symbol (2) indicates an information single plate, and symbol (3) indicates a UV irradiation means such as a UV lamp for UV irradiation.
At times, as a method of further bringing the amount of warpage closer to 0, a method of applying a weight (4) to the inner circumference and further pressing it against a mirror surface has been taken.

  However, as shown in FIG. 2, in such a conventional method, warpage due to thermal deformation caused by sputtering is generated by providing several sputter deposition layers on a single plate on one side of a rewritable method (+/- RW, RAM). Change or write-once (+/- R) track grooves are so deep that mold transferability is difficult to achieve on the same level as the original, making it impossible to cope with large changes in warpage due to molding thermal deformation that occurs when the mold temperature rises. .

  For this reason, in various discs other than the ROM, only one information veneer (2) is warped, and the warp level is large and the performance is poor. Warp and R-tilt values after bonding are large in the form reflecting the warp of the information veneer (-) Warp tendency and some correction method is added so that warp and R-tilt after bonding are well within the standard There was a need to control.

As a method for correcting the R-Tilt value, the stage (7) on which the substrate is placed during light irradiation is depressurized on the inner circumference to suck the disk inner circumference clamp part, or the weight (4) is put on the clamp part and the disk is placed on the mirror surface. Although there is a method of pressing the entire surface, this method does not correct the R-Tilt value, but instead of correcting the axial acceleration value (the degree to which the substrate surface suddenly deviates in the direction perpendicular to the reference surface due to the rotation of the substrate, that is, “ The presence or absence of unevenness ”) tends to increase.
The reasons are as follows: (i) When the substrate is attached to the stage, a slight dust of about 20 μm or less between the substrate and the stage and adhesion of the adhesive material are generated, and burrs on the stage and on the outer periphery of the stage are remarkable. (Ii) The part that has been adsorbed and the part that has not been adsorbed are generated, and the cured adhesive can be visually observed as a wave, (iii) Stage mirror surface If the suction hole is provided on the top, the shape may be left as it is, and these defects lead to deterioration of the axial acceleration.

In addition, there is an attempt to solve the above-mentioned problem by pressing the two substrates while adsorbing to an adsorption stage with high surface accuracy and cutting the adsorption just before light irradiation (see, for example, Patent Document 1). In pasting substrates having a large R-Tilt value, the adsorption was once cut, so that the corrected one returned, and a large correction effect could not be obtained. The R-Tilt value represents the warpage in the radial direction of the disk as an angle, and the R-Tilt value deteriorates and affects the offset and amplitude of the push-pull signal when the substrate shows a large value.
The axial acceleration is the acceleration of the recording layer in the direction perpendicular to the reference plane when the rotational speed is 30 Hz (1800 rpm), and is measured in a band from 30 Hz to 1.5 kHz. A substrate that shows a large value due to acceleration deterioration due to irregularities on the disk surface affects the pull-in response, tracking and stability of the focus / tracking servo.

In recent years, the quality of axial acceleration has been regarded as important for DVDs that have been recorded at high speed.
The axial acceleration is defined by a residual focus / tracking error according to, for example, the DVD + R / RW Orange Book, and 2.1 m / s ² or less is required in terms of axial acceleration.

In Patent Document 2, a material with an elastic modulus of 0.1 to 20 Mpa is used for the stage mirror surface portion with respect to the axial acceleration, and the device is devised so that an increase in acceleration can be suppressed even if the stage and the disk surface come into contact with each other. However, as a result, the effect is up to 2.1 m / s ² or more, and it is not a production method capable of stably producing a product of 2.1 m / s ² or less.
As is apparent from FIG. 11 of Patent Document 2, irregularities of 100 μm or more on the stage mirror surface correspond to accelerations of 2.1 m / s ² or more, and irregularities of 20 μm or less show a sharp deterioration. As described above, the deterioration is caused only by a few μm of dust / adhesive material placed on the stage mirror surface. Therefore, the conventional table shape has a large adverse effect on the non-defective product rate of 2.1 m / s ² or less and the equipment operation rate.
As a cause of the adhesion of dust on the stage, dust adhering to the single-plate disk is transferred and moved to the correction stage, resulting in adhesion on the stage. Since the size of the influential dust is several μm larger, the dust adheres to the transport system, the human body, and the standing time of the veneer for more than 1 day from the application of the protective layer for R-Tilt stabilization to the bonding. Is a problem.
Adhesive adhesion on the stage is caused by adhesion of the adhesive from the outer peripheral edge of the disk, an inner peripheral hole of the adhesive when the disk stays due to a device trouble, and specular contamination due to flowing into the outer peripheral edge.

  In Patent Document 3, when two substrates are placed on a turntable and bonded via a UV curable adhesive, the turntable does not support the entire lower surface of the placed substrate. In addition to supporting the outer peripheral portion and the inner peripheral portion of the lower side of the substrate in an annular manner, there is a difference between the support level of the annular support portion of the inner peripheral portion and the support level of the annular support portion of the outer peripheral portion. In addition, a warp in a direction opposite to the tendency of the bonded substrate to be warped by the subsequent printing process is applied in advance by bending and deforming in a convex shape from the outer periphery to the inner periphery due to the weight of the substrate. In addition, it is disclosed that the difference in the level of warping to be applied can be changed by relatively adjusting the difference in the level of support between both the inner and outer support parts. However, only by changing the height of the annular support portion on the inner peripheral portion and the annular support portion on the outer peripheral portion, the correction ability of the obtained substrate is poor.

  Patent Document 4 also describes a bonding type optical disk bonding apparatus in which a disk is supported by an inner annular protrusion and an outer annular protrusion of the turntable (53). In addition, there is provided an optical disc recording / reproducing apparatus having a disc-shaped recording medium driving device in which a disc is supported only by an inner annular convex portion (clamper 2a) and an outer annular convex portion (clamper 2b) of the turntable (2). Patent Document 6 describes a laminating apparatus for laminating optical disks that is supported only by the annular convex portion inside the turntable (60), but has similar difficulties.

Further, in Patent Document 7, the lower surface of the disk (4, 5) placed by only the double annular protrusions (2a, 2b) on the inner periphery and the annular protrusion (2c) on the outer periphery of the spinner table (2) is provided. By supporting and making the diameter of the spinner table (2) smaller than the diameter of the disk, the photocurable adhesive moved in the outer peripheral direction by centrifugal force is prevented from being transmitted from the outer wall of the disk to the upper surface of the spinner table. A vacuum suction hole (3b) is provided on the outer periphery of the spinner table (2), and a plurality of vacuum suction holes (3d) are provided on the surface of the center boss (2d) opposite to the inner peripheral surface of the disk, so that vacuum suction is performed. Although it has been disclosed to prevent the inner suction hole from being blocked by the adhesive, there is no consideration about such a bending deformation of the disk substrate due to vacuum suction and a preventive measure thereof.
The technologies disclosed in Patent Documents 3 to 7 mainly focus on correcting the warpage of the disk, and an extremely small dust adhesion or adhesive having a height of 8 to 10 μm between the correction table and the disk. If the UV resin is cured in the presence of adhesion, the axial acceleration of the disk deteriorates (the disk surface shape locally changes in unevenness), and no special consideration is given. For example, there is no disclosure of a measure against the deterioration of the axial acceleration as a result of the adhesive being placed on the outer peripheral side surface of the disk and solidifying.

JP-A-9-262907 JP 2000-215524 A JP 2002-260301 A JP 2003-59119 A JP 2001-176158 A JP 2003-203403 A JP-A-9-265672

  The present invention provides a laminating apparatus that does not deteriorate the axial acceleration of the bonded optical disc and does not increase the R-Tilt value when correcting and bonding during light irradiation under the above circumstances. There is to do. Here, the “optical disk” includes a magneto-optical recording medium (so-called “MO”) using the Kerr effect or the Faraday effect.

The above problem is (1) of the present invention having “a ring-shaped outer peripheral convex portion and an inner peripheral convex portion for receiving a substrate to be placed, and the top of the ring-shaped outer peripheral convex portion is a smooth mirror surface, and A height adjusting means for adjusting the height of at least one of the outer peripheral convex portion (hereinafter also referred to as “outer peripheral receiver”) and the inner peripheral convex portion (also referred to as “inner peripheral receiver”); A correction stage of a substrate laminating apparatus having a stage shape in which the radius of the ring-shaped outer peripheral convex portion is smaller than the radius of the substrate to be described above, wherein the inner peripheral region of the substrate is placed on the inner peripheral portion of the stage. A correction stage for a substrate laminating apparatus, characterized in that an inner peripheral portion fixing means for correcting warping by pressing and fixing to the peripheral convex portion is provided;
(2) "The correction stage according to (1), wherein the radius of the ring-shaped outer peripheral convex portion is 1.5 mm or more smaller than the radius of the substrate";
(3) "The correction stage according to item (1), wherein the inner periphery fixing means is detachable from the correction stage";
(4) “The inner peripheral portion fixing means is a vacuum suction fixing means, and the vacuum suction fixing means presses and fixes the inner peripheral portion of the substrate to the inner peripheral convex portion by suction. Correction stage according to item (1) ";
(5) In the above (1), wherein the inner periphery fixing means is a weight fixing means, and the weight fixing means presses and fixes the inner peripheral area of the substrate to the inner peripheral protrusion. Described correction stage ";
(6) “The inner periphery fixing means is a boss clamp means, and the boss clamp means presses the inner peripheral area of the substrate against the inner peripheral convex portion, and the base of the boss protruding on the substrate is detected. The correction stage according to item (1), wherein the stage is clamped;
(7) "The correction stage according to (1), wherein the height adjusting means is at least one outer circumferential step ring";
(8) “The correction stage according to (7), wherein the outer circumferential step ring is detachable from the correction stage”;
(9) "The correction stage according to (7) above, wherein the height of the outer circumferential step ring is ± 0.3 mm or less";
(10) "The correction stage according to (1), wherein the substrate is an information side substrate having at least a recording layer on the substrate";
(11) “The correction stage according to the item (1), including a surface pressure adjusting means for adjusting the substrate surface pressure when performing correction”;
(12) “The correction stage according to (11), wherein the surface pressure adjusting means sucks the inner peripheral clamp portion of the substrate by the reduced pressure suction portion on the inner periphery of the correction stage”;
(13) The problem is solved by “the correction stage according to the item (11), wherein at least one surface pressure adjusting means is provided on the outer periphery of the correction stage”.

Moreover, the said subject is (14) "the bonding apparatus characterized by using the correction stage in any one of said (1) term | claim (13) term" of this invention;
(15) “Boarding method for substrates, characterized by using the laminating apparatus according to item (14)”;
(16) “Laminated recording medium characterized by being produced using the laminating method according to item (15)”;
(17) “Laminated recording medium as described in (16) above, wherein the axial acceleration of the recording medium after pasting is 2.1 m / s ² or less”;
(18) The “solvent recording medium according to (16) above, wherein the R-tilt value of the recording medium after pasting is within ± 0.6 °” is solved.
Here, “apparatus” also means facilities and facilities.

According to the present invention, it is possible to perform bonding without deterioration of axial acceleration due to the influence of dust and adhesive material adhesion on the correction stage, and it is possible to realize axial acceleration after bonding of 2.1 m / s ² or less, and Even a single plate with a large R-tilt level that is not fully controlled in the molding process can correct the R-tilt after bonding to within ± 0.6 ° within the specified range. Regarding the adjustment of R-tilt after alignment, it is possible to correct warpage and R-tilt on the 0 or (+) side by adjusting the height of the outer peripheral step according to the amount of (-) R-tilt. An extremely excellent effect that the problem can be solved is achieved.
Therefore, it is possible to improve the yield in the production of optical information recording media and the like, and to suppress the variation in quality with high accuracy only by a simple modification at a low cost.

Embodiments of the present invention will be described below.
That is, as shown in FIG. 4, the solution taken for solving the above problem is:
(I) The disc laminating apparatus for adhering the signal recording substrate having the center hole and the protective substrate with a photo-curing resin has a convex structure (i) that receives only the inner and outer circumferences without hitting the entire mirror surface. The top of the convex structure is preferably a smooth mirror surface. A few μm of dust or adhesive is simply stuck on the bonding correction table and is sandwiched between the disk and the axial acceleration is prevented from deteriorating and exceeding the disk standard. That is, since it is not in contact with the surface, it is possible to eliminate the deterioration of the axial acceleration due to the influence of dust on the table and adhesion of the adhesive.

(II) As shown in FIGS. 4 and 5, the configuration (ii) is such that the radius of the ring-shaped outer peripheral convex portion is set to be smaller than the outer peripheral end of the substrate by 1.5 mm or more. It is. Thereby, it is possible to prevent the adhesive from adhering to the table outer periphery receiver due to the adhesive dripping at the outer periphery of the disk. By eliminating adhesion of the adhesive to the outer peripheral edge of the correction table, it is possible to prevent deterioration in axial acceleration.

(III) A height adjusting means for adjusting the height of at least one of the outer peripheral convex portion and the inner peripheral convex portion is provided. For example, as shown in FIG. 4, a configuration (iii) in which a removable height adjusting means (6) and a disk receiver are provided on a ring-shaped outer peripheral convex part for receiving a disk to be placed. it can. The height adjusting means (6) may be composed of one or a plurality, and when it is composed of a plurality of height adjusting means (6), the height adjusting means (6) may be replaced with different height levels, or as shown in the figure. Further, the height adjusting means (6b) may be added later on the previously installed height adjusting means (6a), and such height adjusting means may be provided on the inner peripheral convex portion.

(IV) Further, as shown in FIG. 6, a vertically adjustable structure such as +0.1 mm, +0.2 mm, +0.3 mm, etc. within a range of ± 0.3 mm with respect to the inner peripheral convex portion. (Iv). Thereby, the radial tilt can be adjusted.

(V) Further, the present invention is characterized by a configuration (v) in which an inner peripheral portion pressing and fixing means for correcting the warp by pressing and fixing the inner peripheral portion of the substrate is detachably provided on the inner peripheral portion of the stage. Examples of such inner peripheral portion pressing and fixing means include vacuum suction fixing means (v1) and weight pressing and fixing means (v2) for sucking and fixing the inner peripheral region of the substrate to the mirror-like inner peripheral convex surface. The boss part clamping means (v3) is included. Hereinafter, the inner peripheral portion pressing and fixing means for correcting the warp by pressing and fixing the inner peripheral portion of these substrates will be described.

(VI) The vacuum suction fixing means (v1) may be a vacuum suction means provided on the inner peripheral convex portion of the stage as shown in FIG. 7, for example. By cutting the four points on the circumference with a width of 2 mm each to form the notch part (8), eliminating the reception of that part, and releasing the vacuum, by performing vacuum suction only on the inner circumference clamp part It is also one of the features that a structure (v4) in which R-tilt correction is performed along the inner and outer perimeter supports.
As shown in FIG. 3, without this notch (8) for eliminating the vacuum, the substrate is deformed by the pressure difference between the inside and outside.

(VII) Further, as shown in FIG. 8, the ring-shaped outer periphery receiving shape is not provided as in the above solution means (VI), and a weight is placed on the disk inner periphery clamp portion at the time of light irradiation. This is a configuration (vi) in which R-tilt correction is performed along the disk along the circumference.

(VIII) Further, in the present invention, as shown in FIG. 8, as the inner peripheral portion pressing and fixing means (v) for correcting the warpage by pressing and fixing the inner peripheral portion of the substrate to the inner peripheral portion of the stage, The inner peripheral portion pressing and fixing means (v2) comprising a weight (4) for correcting the warp by pressing and fixing the inner peripheral portion of the substrate to the inner peripheral portion may be detachably provided.

(IX) Furthermore, in the present invention, as shown in FIG. 7, as the inner peripheral portion pressing and fixing means (v), the inner peripheral portion of the substrate is pressed and fixed to the inner peripheral portion of the stage to correct the warp. The boss portion clamping means (v3) for clamping the base of the boss portion (9) protruding on the substrate after pressing the inner peripheral area of the substrate to the mirror-like inner peripheral convex portion may be provided. The part clamp means (v3) has a leading edge fitted into the opening of the elastic hook-shaped member (10), and presses the bottom of the hook-shaped member (10) to place the root of the boss part (9). It can be a spring (11) to be clamped. Moreover, even if this boss | hub part clamp means (v3) act | operates independently, it operates together with the inner peripheral part press fixing means (v2) which consists of said vacuum suction fixing means (v1) and / or weight (4). When the combined operation is performed, the effect of the present invention can be exerted more strongly.

First, an outline of a conventional bonding method and configuration will be described.
The information substrate is vacuum-adsorbed onto the stage with the recording film sputtered side up, and the UV curable adhesive (viscosity: 500 cp) is removed from the center of the substrate by a dispenser while rotating the stage at a rotation speed of about several tens of rpm. It is dropped concentrically on a circumference of about 30 mm. In this state, the cover substrate is bonded together, and the stage is rotated at several hundred to several thousand rotations to spread the adhesive to the end of the disk. Thereafter, the bonded substrate is moved to a light irradiation stage (correction stage).

  However, as shown in FIG. 7, in the present invention, the correction stage has a reduced-pressure suction hole, and the bonded inner substrate clamp is suctioned at a reduced pressure of, for example, 50 kPa on the correction stage, and the adhesive is applied by irradiating ultraviolet rays. Cured into a laminated optical disk.

FIG. 11 is a view showing a laminating apparatus of the present invention.
The laminating apparatus (100) includes a stage (106) for guiding a lower substrate, a stage (107) for guiding an upper substrate, cleaning units (108) and (109), an adhesive coating unit (110), and a reversing unit (111). , A pressing part (12), a removal spinner (13), a half-finished object removing device (50), a connection part (14), and conveying arms (15), (16), (17).
The cleaning units (108) and (109) include a cleaner (21) having an antistatic unit and a spinner (20).
The adhesive coating part (110) includes a disk table (22) and an adhesive coating unit (23).
A conveyance arm (17) conveys the board | substrate bonded together by the press part (12) to the removal spinner (13).

Next, embodiments will be described with reference to the drawings.
Example 1
The following experiment was performed using an information side substrate (radius 60.0 mm) for DVD + RW and a cover substrate (radius 60.0 mm).
As shown in FIG. 8, when light irradiation is performed without applying the correction stage only for the inner and outer circumference receivers of the present invention, the dust and the adhesive adhered on the mirror surface are stuck together, Large irregularities are generated, leading to deterioration of acceleration. When the method of the solution (I) is used, a good disk having almost no unevenness can be obtained as shown in the graph of FIG. The radius of the inner circumference receiver is R = 21.5 mm. The outer circumference receiver has a rounded surface per disk, and the disk surface is received at R = 57.0 to 57.5 mm. Here, the R-contact of the disk contact surface means that the surface in contact with the disk on the outer peripheral convex portion is smoothly (extremely gently) formed as an arc-shaped surface in the radial direction, and in particular, a trapezoidal convex portion. In order to round the corners so as not to damage the disk surface that hits the corners on the inner peripheral side and the outer peripheral side of the apex of the corners, rounding is performed. If the corners on the inner peripheral side and the outer peripheral side are almost rounded, there will be no scratches. However, if there are concerns about scratches, the top flat surface will be rounded smoothly. However, if it is processed into a ridge with a sharp R (pointed R surface), the contact area with the disk becomes linear, the area is minimized, the contact pressure with the disk increases, and the axial acceleration deteriorates. For this reason, the correction stage used in this example is limited to a gentle R chamfering that is almost horizontal.
FIG. 10 shows a measurement result of R-tilt by the same disk substrate that exhibited the “axial acceleration” shown in the graph of FIG.
9 and FIG. 10, “information single plate”, “after inner / outer circumference receptacle (outer circumference receptacle notch) 1 after bonding”, “after inner / outer circumference receptacle (outer circumference receptacle notch) after pasting 1”, “entire area receptacle, dust adhesion Referring to “1”, “full surface receiving, dust adhesion 2”, and “full surface receiving, adhesive adhesion”, “information veneer” is a veneer used for subsequent samples. The effect of the pasted table is shown by how the R-tilt and acceleration change.
“After inner / outer circumference receptacle (outer circumference receptacle notch) pasting 1” and “after inner / outer circumference receptacle (outer circumference receptacle notch) pasting 2” are due to dusting on the middle part of the subsequent sample and adhesive dripping at the outer circumference edge. It is an improved type that can avoid deterioration in acceleration, and is obtained by placing a disk on the inner and outer perimeter receiving tables and bonding them together. Since these are performed with N = 2, they are set to 1 and 2, but there is no difference in conditions.
“Full-surface receptacle, dust adhesion 1” and “Full-surface receptacle, dust adhesion 2” are the conventional full-surface flat table, in which dust or adhesive is blown and hardened on the middle circumference, and a disk is placed on it. It is what was pasted together. During the test, a test was performed by placing dust caused by molding burr on the inner peripheral hole of the disk on the table. Since these are performed with N = 2, they are set to 1 and 2, but there is no difference in conditions.
“Whole surface receiving, adhesive adhesion” is a conventional full surface flat table where the adhesive hangs from the outer peripheral edge of the disk due to a transport error in the apparatus and sticks around 59 mm on the outer peripheral edge. They are placed and pasted together.
Further, the axial acceleration in FIG. 9 and the R-Tilt value in FIG. 10 are obtained by measuring the axial acceleration and the R-tilt value with a mechanical property measuring device called Birf-126P manufactured by Dr. Shenk. is there.

(Example 2)
The following experiment was performed using an information side substrate (radius 60.0 mm) for DVD + RW and a cover substrate (radius 60.0 mm).
According to the stage having the ring-shaped outer periphery receiver moved to the inner periphery side by 1.5 mm or more in radius from the outer periphery of the disk by the solution (II) as shown in FIG. 5, adhesion of the adhesive to the outer periphery receiver can be prevented. Therefore, it is possible to prevent the deterioration of acceleration due to the sandwiching of the adhesive.

(Example 3)
The following experiment was performed using an information side substrate (radius 60.0 mm) for DVD + RW and a cover substrate (radius 60.0 mm).
Examples of the solving means (III) and (V) will be described below.
An important point for obtaining good R-tilt and warpage after optical normal bonding is that a flatter plate is used, and the plate faces in the same amount of warpage. In the DVD-ROM, this condition is satisfied, and in the case of FIG. 1, the target R-tilt / warpage is obtained at the time when the adhesive is spun out. Therefore, it can be easily bonded without requiring correction on the mirror surface.
However, in the case of +/− RW, +/− R, and RAM in FIG. 2, a thermal load is applied to the information board on the inner side of the two single plates in the previous process, which causes (−) warping, and the adhesive shown in FIG. Even after the spin-out, the (−) warp is maintained. On the other hand, there was no effect of changing the warp even if it was pushed by a weight pushing only the inner circumferential clamp surface of 9 to 33 g.
Therefore, according to FIG. 8, correction to the (+) side was performed with the outer peripheral end raised in a ring shape.

As a condition, use 10 discs that have already been confirmed to have the same level of warpage and R-tilt on a single plate in advance,
(1): Mirror stage + inner circumference weight (conventional method), see FIG.
(2) -1: 0.3 mm UP stage + inner circumference weight (type 1) at an outer circumference receiving radius of 55 mm, see weight (4) in the figure, and the weight of the inner circumference weight is 33 g.
(2) -2: 0.2 mm UP stage + inner circumference weight (type 2) at an outer periphery receiving radius of 58 mm, see weight (4) of the present invention in FIG. 8, the weight of the inner circumference weight is 33 g.
The pasting work was performed under all three conditions. R-tilt was compared and investigated with a mechanical property measuring device called Biref-126P manufactured by Schenk.
The results are shown in Table 1. R-tilt standard +/− 0.6 ° or a value close to 0 is desirable.

表中の＊は、ＮＧを表わし、ｒ，ｈは、図６中に記載の「非面当り半径の長さ」、「非面当り領域の高さ」をそれぞれ示す。

* In the table represents NG, and r and h represent “the length of the radius per non-surface” and “the height of the non-surface area” described in FIG.

Fix the shape of the outer periphery receiving 0.2mm UP stage by irradiation by curing the adhesive,
It is not so important at this time that the weight is not placed. Good R-tilt and warpage can be obtained even if only the inner and outer circumference bearings do not hit the mirror surface.
(1): In the conventional method, the (−) warp is large at the outer peripheral radius position, and the warp of the disk is reflected as it is without being corrected.
(2) -1: The outer peripheral step is UP, Type 1 has a step radius value at the outer periphery, but when r = 55 mm is arranged slightly inside, the disk is lifted from the inner periphery under the influence of the step, which is extremely And fixed in the shape of a mortar.
(2) -2: Changed and improved the step radius with the outer peripheral step UP, Type 2 to a lower 0.2mm step with r = 58mm, and within +/- 0.3 standard and margin The R-tilt value in which

Example 4
In the third embodiment, the weight is placed on the inner circumferential clamp portion of the disk. However, depending on the laminating apparatus, the conventional straightening may be performed by reducing the inner circumferential clamp portion by reducing the pressure. However, when only the inner and outer circumferences that are the correction stage shape of the solution (I) are used, the disk on the stage is bonded to the concave shape along the stage shape due to the vacuum pressure leaked from the inner circumference clamp part. End up.
In the stage shape with a notch in the outer periphery receiver by this solution (IV), even if the decompression at the inner periphery leaks into the space between the stage inner periphery and the disk, the disk always leaks at the outer periphery. It is only adsorbed under reduced pressure, and good R-tilt and warpage equivalent to pushing with the weight of Example 3 is obtained.

(Example 5)
The following experiment was conducted using a substrate for DVD + ROM (radius 60.0 mm). In addition, the radius of the outer peripheral convex portion was 57.0 μm.
In Examples 3 and 4, an example in which a single plate having a large (−) warp was corrected after the bonding adhesive was spun, but a DVD-ROM level R-tilt of 0.6 ° or less was bonded. In this case, it is only necessary to adjust the height of the ring-shaped outer periphery receiver so that the R-tilt approaches 0, and correction weighting by inner peripheral clamp portion vacuum suction, inner peripheral weight loading, etc. is not necessary. For example, in the case where the height difference between the inner and outer peripheries is 0 mm and correction weighting is not performed, R-tilt and axial acceleration values that are substantially equivalent to a single plate can be obtained even after bonding.
In each of the above-described embodiments, the example of the bonding of the disk substrate has been described. However, the present invention is not limited to this, and the same applies to other varieties and processes that require a highly accurate bending angle of bonding. Can be implemented.

It is a schematic diagram of the R-tilt correction method of ROM disk by a prior art. It is a schematic diagram of the R-tilt correction method of RW disc and DVD disc by a prior art. It is a schematic diagram which shows a mode that a board | substrate deform | transforms with an internal-external pressure difference on a table. It is a schematic diagram for demonstrating clearly the main characteristics of this invention. It is an expansion outline figure for explaining clearly one main characteristic of the present invention. It is an expansion outline figure for explaining other main characteristics of the present invention plainly. It is an expansion outline figure for explaining another main feature of the present invention plainly. It is a schematic diagram of the R-tilt correction method for RW discs and DVD discs according to the present invention. It is a measurement graph which shows the small axial acceleration (no unevenness | corrugation) by the disk of this invention. It is a measurement graph which shows small R-tilt (no curvature) by the disk of this invention. It is a figure which shows the bonding apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cover single plate 2 Information single plate 3 UV irradiation means 4 Weight 6 Outer periphery holder 7 Stage 8 Notch part 9 Boss part 10 Hook-shaped member 11 Spring 12 Press part 13 Removal spinner 14 Connection part 15 Transport arm 16 Transport arm 17 Transport arm 20 Spinner 21 Cleaner 22 Disc table 23 Adhesive coating unit 50 Half-finished object removing device 100 Laminating device 106 Stage 107 Stage 108 Cleaning unit 109 Cleaning unit 110 Adhesive coating unit 111 Inversion unit

Claims (15)

  A ring-shaped outer peripheral convex portion and an inner peripheral convex portion for receiving a substrate to be placed; the top of the ring-shaped outer peripheral convex portion is a smooth mirror surface; and at least of the outer peripheral convex portion and the inner peripheral convex portion A correction stage of a substrate laminating apparatus having a height adjusting means for adjusting one of the heights, wherein the ring-shaped outer peripheral convex portion has a stage shape smaller than the radius of the substrate to be placed; A correction stage for a substrate laminating apparatus, wherein an inner peripheral portion fixing means for correcting a warp by pressing and fixing an inner peripheral region of the substrate to the inner peripheral convex portion is provided on the inner peripheral portion of the stage.   The correction stage according to claim 1, wherein a radius of the ring-shaped outer peripheral convex portion is 1.5 mm or more smaller than a radius of the substrate.   The correction stage according to claim 1, wherein the inner peripheral portion fixing means is detachable from the correction stage.   The said inner peripheral part fixing means is a vacuum suction fixing means, and this vacuum suction fixing means presses and fixes to an inner peripheral convex part by attracting | sucking the inner peripheral part area | region of a board | substrate. Correction stage.   2. The correction stage according to claim 1, wherein the inner peripheral portion fixing means is a weight fixing means, and the weight fixing means presses and fixes the inner peripheral portion region of the substrate to the inner peripheral convex portion.   The inner peripheral portion fixing means is a boss clamp means, and the boss clamp means presses the inner peripheral area of the substrate against the inner peripheral convex portion to clamp the root of the boss protruding on the substrate. The correction stage according to claim 1.   The correction stage according to claim 1, wherein the height adjusting means is at least one outer peripheral step ring.   The correction stage according to claim 7, wherein the outer circumferential step ring is detachable from the correction stage.   The correction stage according to claim 7, wherein a height of the outer peripheral step ring is ± 0.3 mm or less.   The correction stage according to claim 1, wherein the substrate is an information side substrate having at least a recording layer on the substrate.   2. The correction stage according to claim 1, further comprising a surface pressure adjusting means for adjusting a substrate surface pressure when performing correction.   The correction stage according to claim 11, wherein the surface pressure adjusting means sucks the inner peripheral clamp part of the substrate by the reduced pressure suction part on the inner periphery of the correction stage.   The correction stage according to claim 11, wherein at least one of the surface pressure adjusting means is provided on an outer periphery of the correction stage.   A bonding apparatus using the correction stage according to any one of claims 1 to 13.   A method for bonding substrates, comprising using the bonding apparatus according to claim 14.

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