JP4632965B2 - Exhaust cart for panel processing - Google Patents

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a panel processing exhaust cart used when multiple panels such as plasma display panels are stacked and guided to a processing furnace, and each panel is sealed and exhausted, and in particular, the panel processing exhaust cart. Is characterized in that it can be reduced in size to reduce various costs.

  Conventionally, when sealing and exhausting a panel such as a plasma display panel, the above panel is laminated in multiple stages on a panel processing exhaust cart, and each panel stacked by this panel processing exhaust cart is guided to a processing furnace, Each panel is sealed and exhausted (see, for example, Patent Documents 1 and 2).

  As a conventional panel processing exhaust cart, generally, as shown in FIGS. 1A and 1B, a vacuum pump (not shown) or the like is built in, and a wheel that runs on a rail R in the lower part. 11, a cart body 10 having a partition wall 12 at the rear, a panel holding magazine 20 for holding the above-described panels P stacked in multiple stages on the cart body 10, and sealing and exhausting each panel P A device provided with exhaust processing means for processing is used.

  Here, in the panel holding magazine 20, four magazine columns 21 are arranged on the cart body 10 so as to have a planar square shape, and a plurality of support beams 22 are provided on the magazine column 21. Each support beam 22 is provided with a support member 23 for holding the panel P described above.

  In the exhaust processing means, an exhaust head column 31 is provided in the vicinity of one magazine column 21 on the cart body 10 so that the exhaust head column 31 corresponds to the support beam 22. The exhaust head mounting members 32 are mounted in a plurality of stages, and each exhaust head mounting member 32 is provided with an exhaust head 34 for holding a tip tube 33 for performing sealing exhaust processing in the panel P. A heat insulating box 35 is provided in the vicinity of the holding magazine 20.

  In the heat insulation box 35, as shown in FIG. 2, the cooling water individual introduction pipe 36a for guiding the cooling water individually to the exhaust heads 34 and the cooling water after the exhaust heads 34 are cooled. The individual cooling water discharge pipes 36b for returning the air to the exhaust heads 34, the high pressure air guide pipes 36c for guiding the compressed air for holding the tip pipes 33 to the exhaust heads 34, and the exhaust pipes 34 through the tip pipes 33. Each panel P is accommodated with each exhaust pipe 36 d for performing vacuum exhaust processing, and each of these pipes 36 a to 36 d is connected to each exhaust head 34.

  And since many pipes 36a-36d are piped in the heat insulation box 35 in this way, the heat insulation box 35 is enlarged, and cooling water is individually introduced into the heat insulation box 35 to guide the cooling water to each exhaust head 34. Since the exhaust pipe 36d for performing the vacuum exhaust processing of each panel P is accommodated together with the pipe 36a, the heat of the exhaust pipe 36d is transferred to the cooling water individual introduction pipe 36a, and the temperature of the cooling water rises. There was a problem that the heat insulation efficiency of the heat insulation box 35 deteriorated.

  In addition, since the cart body 10 is provided with the large heat insulation box 35 as described above, the cart body 10 becomes large and the panel processing exhaust cart becomes large, and the manufacturing cost increases, and the panel processing exhaust cart is stacked. There is a problem that the heat treatment efficiency is lowered and the running cost is high in the case where each panel P is guided to a treatment furnace for sealing exhaust treatment.

  Further, in order to increase the heat treatment efficiency when the panels P stacked on the panel processing exhaust cart are guided to the processing furnace for sealing exhaust processing, as shown in FIG. Two panel holding magazines 20 and two exhaust processing means are provided, and two rows of panels P arranged in each panel holding magazine 20 are sealed and exhausted by one panel processing exhaust cart. Proposed.

However, even when two panel holding magazines 20 and two exhaust processing means are provided on the cart body 10 as described above, the heat insulation box 35 is large as described above, and thus the same problem as in the above case still exists. However, a sufficient effect is not obtained.
JP 2003-146409 A JP 2004-127900 A

  The present invention solves the above-mentioned problems in an exhaust cart for panel processing used when a panel such as a plasma display panel is laminated in multiple stages and led to a processing furnace, and each panel is sealed and exhausted. It is to be an issue.

  That is, in the panel processing exhaust cart according to the present invention, when sealing and exhausting the inside of each of the stacked panels, the cooling water piping for cooling each exhaust head and its heat insulation can be efficiently performed. At the same time, the insulation box is made smaller, the panel processing exhaust cart is downsized, the manufacturing cost is reduced, and the heat treatment efficiency is improved in the case where each panel is guided to the processing furnace for sealing exhaust processing. The object is to reduce the cost.

In the present invention, in order to solve the above-described problems, a cart body, a panel holding magazine that holds the panels stacked in multiple stages on the cart body, and a chip for performing an evacuation process in the panel An exhaust cart for panel processing comprising an exhaust processing means provided with an exhaust head for holding a tube for each panel, wherein the panel holding magazine has at least two pairs of magazine columns standing on the cart body. And a support beam for holding the panel is bridged between each pair of magazine columns, and a heat insulating box is provided in a space portion between the pair of magazine columns in the panel holding magazine . A cooling water collecting introduction pipe for guiding cooling water for cooling each exhaust head and a cooling water collecting discharge pipe for returning the cooling water after cooling each exhaust head. In addition, the guide pipes are connected to the exhaust heads from the cooling water collection introduction pipe and the cooling water collection discharge pipe, respectively, while the exhausts for exhausting the panels from the exhaust heads through the chip pipes. A pipe and each high-pressure air guide pipe for guiding compressed air for holding the tip pipe to the exhaust head to each exhaust head are provided outside the heat insulation box.

  In addition, as the panel holding magazine, three pairs of magazine columns are erected on the cart body and a support beam for holding a panel is bridged between adjacent pairs of magazine columns. It is preferable to arrange two rows of panels in the panel holding magazine.

  And when arranging two rows of panels in the panel holding magazine in this way, each of the heat insulation boxes is provided in the space between the two pairs of magazine columns, and each of the panels provided corresponding to the two rows of panels is provided. It is preferable to connect the exhaust pipes of each row for exhausting the inside of each panel through the chip pipe from the exhaust heads of the row to the main exhaust pipe located in the middle.

  In the panel processing exhaust cart according to the present invention, as described above, the cooling water collecting introduction pipe for guiding the cooling water for cooling each exhaust head into the heat insulating box and the cooling water for returning the cooling water after cooling each exhaust head. A collection discharge pipe is provided, and a guide pipe is connected to each exhaust head from the cooling water collection introduction pipe and the cooling water collection discharge pipe, so that the cooling water is individually guided to each exhaust head as in the past. Compared to the case where the cooling water individual introduction pipe and the cooling water individual discharge pipe for individually returning the cooling water after cooling each exhaust head are provided in the heat insulation box, the heat insulation box can be reduced in size.

  Furthermore, in the exhaust cart for panel processing according to the present invention, each exhaust pipe for exhausting the inside of each panel from each exhaust head through the chip pipe is provided outside the heat insulating box, so that the heat insulating box can be further downsized. The heat insulation efficiency of the heat insulation box is improved without the heat of the exhaust pipe being transferred to the cooling water collecting introduction pipe and the temperature of the cooling water rising.

In the cart panel processing exhaust gas in the present invention, the results can be miniaturized insulation box as described above, and be provided with a heat insulating box into the space between a pair of magazine posts in the panel holding the magazine, thereby The overall size of the panel processing exhaust cart can be reduced.

  As a result, the manufacturing cost of the panel processing exhaust cart is reduced, and the heat treatment efficiency is improved when the panels stacked in the panel processing exhaust cart are guided to the processing furnace for sealing exhaust processing, and the running is improved. Cost is also reduced.

  In addition, as the panel holding magazine, three pairs of magazine posts are erected on the cart body, and support beams for holding panels are bridged between adjacent pairs of magazine posts. If two panels are arranged in the panel holding magazine and a heat insulating box is provided in the space between the two pairs of magazine columns, the weight of the panel holding magazine is reduced and the thermal load is reduced. The length of the panel processing exhaust cart can be shortened, and the heat treatment efficiency is further improved when the panels stacked on the panel processing exhaust cart are guided to the processing furnace for sealing exhaust processing. Cost is further reduced.

  Hereinafter, an exhaust cart for panel processing according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. The panel processing exhaust cart according to the present invention is not limited to the one shown in the following embodiment, and can be implemented with appropriate modifications within a range not changing the gist of the invention.

  Also in the panel processing exhaust cart in this embodiment, as shown in FIG. 4, a vacuum pump (not shown) or the like is incorporated inside, and a wheel 11 running on the rail R is provided in the lower part and a partition is formed in the rear part. A cart body 10 provided with a wall 12, a panel holding magazine 20 that holds the above-described panels P in a stacked manner on the cart body 10, and an exhaust processing means for sealing and exhausting each panel P are provided. It has been.

  In the panel processing exhaust cart of this embodiment, three pairs (six) of magazine columns 21 are formed as the panel holding magazine 20 so that two squares are formed on the cart body 10. A plurality of support beams 22 that hold the panel P so as to be bridged between each pair of adjacent magazine columns 21 and a support member 23 that holds the panel P is provided on each support beam 22; The panel P can be placed in two rows.

  Further, as an exhaust processing means for sealing and exhausting each panel P, the exhaust head mounting member 32 is arranged so as to correspond to the support beam 22 with respect to one magazine column 21 in the first row and the second row. A plurality of stages are mounted, and each exhaust head mounting member 32 is provided with an exhaust head 34 for holding a tip tube 33 for performing sealed exhaust processing in the panel P, and is paired in the first row and the second row. Insulation boxes 35 are provided in the spaces between the magazine columns 21.

  Then, as shown in FIG. 5, the cooling water collecting introduction pipe 37 that guides the cooling water for cooling the exhaust heads 34 and the cooling water after cooling the exhaust heads 34 are returned into the heat insulation boxes 35. A cooling water collecting and discharging pipe 38 is provided, and guide pipes 37 a and 38 a are connected to the exhaust head 34 from the cooling water collecting and introducing pipe 37 and the cooling water collecting and discharging pipe 38, respectively, while the tip pipe 33 is connected to the exhaust head 34. The high-pressure air guide pipes 36c that guide the compressed air to be held to the exhaust heads 34, and the exhaust pipes 36d for performing the vacuum exhaust processing of the panels P from the exhaust heads 34 through the tip pipes 33, respectively It is arranged outside the box 35. In this way, the heat insulating box 35 can be reduced in size as described above and disposed in the space between the magazine columns 21, and the heat of the exhaust pipe 36 d is transmitted to the cooling water collecting / introducing pipe 37 and the cooling water. The temperature does not increase. Furthermore, since the temperature inside the exhaust pipe 36d rises compared with the case where the exhaust pipe 36d is provided in the heat insulation box 35, the exhaust of the outgas on the inner wall surface of the exhaust pipe 36d is promoted and the exhaust can be exhausted to high vacuum more quickly. It becomes like this.

  Further, in the panel processing exhaust cart of this embodiment, each panel P is exhausted through the tip tube 33 from the exhaust head 34 of each row provided corresponding to the two rows of panels P as described above. When piping the exhaust pipes 36d in a row, as shown in FIGS. 6 (A) and 6 (B), the exhaust pipes 36d in each row are connected to both sides of a main exhaust pipe 39 having a large diameter located in the middle, The air led from the exhaust pipes 36d in each row is exhausted through the main exhaust pipe 39. Further, if necessary, the gas to be filled into each panel P through the main exhaust pipe 39 is led to the exhaust pipe 36d in each row, and the gas led to each exhaust pipe 36d is chipped from each exhaust head 34 to the tip. Each panel P is filled through the tube 33. In this way, only one main exhaust pipe 39 having a large diameter needs to be provided, and the cost can be reduced as compared with the case where two main exhaust pipes 39 are provided corresponding to the exhaust pipes 36d in each row.

  Further, in the panel processing exhaust cart of this embodiment, in order to place two rows of panels P on the panel holding magazine 20, three pairs ( (6) magazine columns 21 are arranged and the second column magazine column 21 is shared, so that the panel holding magazine 20 becomes smaller and the panel processing exhaust cart becomes smaller. The manufacturing cost is reduced, and the efficiency of the heat treatment is further improved when the panels P stacked on the panel processing exhaust cart are led to a processing furnace (not shown) and subjected to sealing exhaust processing. Cost is further reduced.

  In the panel processing exhaust cart according to this embodiment, two rows of panels P are placed on the panel holding magazine 20, but as shown in FIG. It is also possible to arrange two pairs (four) of magazine support columns 21 so that a panel P is placed on the panel holding magazine 20 in one row.

It is the schematic plan view and schematic side view of the conventional panel processing exhaust cart. In the conventional panel processing exhaust cart, it is a schematic explanatory view showing a state where each pipe provided in the heat insulation box is connected to each exhaust head. It is the schematic plan view and schematic side view of the conventional panel processing exhaust cart in which two rows of panels are placed. In one Embodiment of this invention, it is the schematic top view and schematic side view of the exhaust cart for panel processing which made it mount two panels in a row. In the exhaust cart for panel processing concerning the embodiment, it is the schematic explanatory view showing the state where each pipe provided inside and outside the heat insulation box was connected to each exhaust head. In the exhaust cart for panel processing concerning the embodiment, it is the schematic plan view and schematic side view which showed the piping state of each exhaust pipe which exhausts in each panel. It is the schematic plan view and schematic side view of the exhaust cart for panel processing concerning other embodiment made to mount a panel in 1 row.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Cart body 11 Wheel 12 Partition wall 20 Panel holding magazine 21 Magazine support 22 Support beam 23 Support member 32 Exhaust head mounting member 33 Tip pipe 34 Exhaust head 35 Heat insulation box 36c High pressure air guide pipe 36d Exhaust pipe 37 Cooling water collecting introduction pipe 37a Guide pipe 38 Cooling water collecting discharge pipe 38a Guide pipe 39 Main exhaust pipe P Panel R Rail

Claims (3)

Each panel is provided with a cart body, a panel holding magazine that holds the panels stacked in multiple stages on the cart body, and an exhaust head that holds a chip tube for performing sealing exhaust processing in the panel. In the panel processing exhaust cart provided with the exhaust processing means, the panel holding magazine has at least two pairs of magazine columns standing on the cart body and holds the panel between each pair of magazine columns. A support beam is installed on the panel holding magazine . A cooling water collecting and discharging pipe for returning cooling water after cooling the collecting introduction pipe and each exhaust head is provided. A guide pipe is connected to each exhaust head from the collective exhaust pipe, while each exhaust pipe for exhausting the inside of each panel from each exhaust head through the tip pipe, and holding the tip pipe on the exhaust head An exhaust cart for panel processing, characterized in that each high-pressure air guide pipe for guiding compressed air to the exhaust head is provided outside the heat insulating box. 2. The panel processing exhaust cart according to claim 1, wherein the panel holding magazine has three pairs of magazine columns installed on the cart body and supports the panels between adjacent magazine columns. The above-mentioned panels are arranged in two rows in the panel holding magazine, and the heat insulating boxes are provided in the spaces between the two pairs of magazine columns in the panel holding magazine. An exhaust cart for panel processing. 3. The panel processing exhaust cart according to claim 2, wherein the exhaust in each panel is exhausted through the tip tube from the exhaust head of each row provided corresponding to the two rows of panels arranged in the panel holding magazine. An exhaust cart for panel processing, characterized in that the exhaust pipes in each row are connected to a main exhaust pipe located in the middle .

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