JP4633377B2 - Pipe manufacturing method and manufacturing apparatus - Google Patents

Description

  The present invention relates to a method and an apparatus for manufacturing a pipe, and more particularly to a method and an apparatus for manufacturing an oscillating flow tube used in a Coriolis mass flow meter.

  The Coriolis mass flow meter is a new type of flow meter, based on a completely new principle of measuring mass flow directly. And because of its excellent measurement performance, the utility value of Coriolis flow meters is increasing. For example, an unprecedented high-precision flowmeter is required for an apparatus used in the fields of semiconductor, biotechnology, medical, fine chemistry, and the like. Since most of the fluids to be measured are expensive and require measurement of minute flow rates, Coriolis flowmeters that can directly measure mass flow rates can meet these needs, and furthermore, minute flow rates. There is a need for a level that accurately measures

  Most of the performance of the Coriolis flowmeter is determined by the physical properties (density, Young's modulus, strength) of a measurement vibration flow tube (hereinafter referred to as a vibration flow tube) through which a fluid to be measured flows. In order to improve the accuracy of the Coriolis flowmeter, it is necessary to use a vibrating flow tube that deforms greatly even with a small Coriolis force if the measurement system is the same. It is desirable to construct an oscillating flow tube using a material with a low rate. At present, stainless steel alloy and Hastelloy alloy are mainly used as the material of the oscillating flow tube.

For example, a mandrel casting method, a centrifugal casting method, a plate winding welding method, or the like is used as a method for manufacturing a vibrating flow tube used in a Coriolis flow meter.
However, the mandrel casting method requires a mandrel, and it has been difficult to produce a long vibrating flow tube having a small diameter and a small thickness. In addition, the centrifugal casting method requires a mechanism for rotating the mold, so that there is a problem that manufacturing equipment becomes expensive, and it is difficult to manufacture a long pipe with a small diameter and a small thickness. There is a problem that there is. Further, in the plate winding welding method, a material that requires considerable plasticity must be used, and there is a problem that usable materials are limited.

  The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a manufacturing method for manufacturing a thin pipe having a uniform size, a thin, thin thickness and a long length with simple equipment. There is.

  Another object of the present invention is to provide a manufacturing method and a manufacturing apparatus for easily manufacturing an ultrathin metal glass pipe having excellent mechanical properties.

  In order to solve the above problems, a first aspect of the present invention is a manufacturing method for manufacturing a pipe, wherein the pipe is configured using a mold having a columnar hollow portion extending in the length direction. A step of melting the material to be melted, and after the molten material is jetted into the hollow portion, the hollow portion is passed through the hollow portion at a predetermined speed to form a film of the molten material on the wall surface of the mold forming the hollow portion And a method of manufacturing a pipe.

  In the manufacturing method of this invention, it is preferable to further include the process of making the said hollow part into a negative pressure, when inject | pouring the said melted material into the said hollow part.

  Moreover, in the manufacturing method of this invention, it is preferable that the material which comprises the said pipe is at least 1 type selected from the group which consists of a metal, an alloy, metal glass, and ceramics.

  Moreover, in the manufacturing method of this invention, it is preferable to inject | pour the said molten material using the pressure by the compressed gas.

  A second aspect of the present invention is a manufacturing apparatus for manufacturing a pipe, the mold having a columnar hollow portion extending in the length direction, means for melting the material constituting the pipe, Manufacturing a pipe having means for injecting the molten material into a hollow portion and passing the hollow portion at a predetermined speed to form a film of the molten material on a wall surface of the mold forming the hollow portion Providing equipment.

  The pipe manufacturing apparatus of the present invention preferably further includes means for making the hollow part have a negative pressure when the molten material is injected into the hollow part.

  Furthermore, it is preferable to have a compression means for compressing the gas, and to inject the molten material using the pressure of the gas compressed by the compression means.

  The pipe manufacturing method of the present invention can produce a pipe simply by injecting a molten material into a hollow portion of a mold at a predetermined pressure, so that a thin, thin and long pipe with uniform dimensions can be easily produced. can do.

  Moreover, if a metal glass is used as a material of a pipe manufactured by the pipe manufacturing method of the present invention, a metal glass pipe can be easily manufactured. The metal glass pipe thus obtained is superior in strength, elasticity and corrosion resistance to crystalline pipes. Further, by using metallic glass, the Young's modulus can be significantly reduced, the strength can be increased, and the pipe can be thinned. Since a pipe with a low Young's modulus can be manufactured in this way, if this pipe is used in a Coriolis flow meter, the amount of elastic deformation strain increases when the flow tube receives the same Coriolis force, and the conventional stainless steel flow tube It is possible to achieve higher sensitivity than when using. In addition, according to the manufacturing method of the present invention, a thin and small-diameter pipe can be easily manufactured, so that further improvement in sensitivity can be realized by using such a pipe for a vibrating flow tube. Therefore, the manufacturing method of the present invention is extremely optimal as a manufacturing method of the oscillating flow tube used for the Coriolis flowmeter.

  The pipe manufactured by the manufacturing method of the present invention can be used in a wide range of fields such as petroleum, chemical, biotechnology, semiconductor, medicine, and has high strength, high elastic deformation rate, and high corrosion resistance. It can be used for

  The manufacturing apparatus of the present invention is optimal as an apparatus for realizing the manufacturing method of the present invention because the molten material can be injected into the hollow portion of the mold at a predetermined pressure.

Hereinafter, the manufacturing method of the pipe of the present invention is explained in detail based on the suitable mode shown in an accompanying drawing.
In FIG. 1, the conceptual diagram of the manufacturing apparatus of the pipe for implement | achieving the manufacturing method of the pipe of this invention is shown.
The pipe manufacturing apparatus 10 basically includes a mold 12, a nozzle 14, a compressor 16, a high-frequency coil 18, and a high-frequency power source 20.

  The mold 12 is a columnar mold for molding a pipe, and has a cylindrical hollow portion (cavity) 12 a extending in the length direction of the mold 12. One open end 12b of the hollow portion 12a of the mold 10 is an injection port for injecting a molten sample from the nozzle 14, and the other open end 12c is a molten sample injected into the hollow portion 12a. It is an outlet for discharging. As shown in FIG. 1, the injection port 12 b has a tapered shape whose diameter gradually decreases from the surface (upper surface) of the mold 12 toward the inside.

  The material constituting the mold 12 is preferably a material that is not easily deformed and has excellent cooling properties, and copper having high thermal conductivity is preferable. Moreover, it is preferable to use a water-cooled mold from the viewpoint of improving the cooling performance. The material of the mold 12 can be appropriately selected according to the material of the pipe to be used. The dimensions (diameter and length) of the hollow portion 12a of the mold 12 can be appropriately changed according to the dimensions of the pipe to be manufactured. For example, to manufacture a pipe having an outer diameter of 1 mm to 4 mm, the mold 12 What is necessary is just to make the internal diameter of the hollow part 12a into the magnitude | size, and what is necessary is just to form a hollow part so that it may become the length, in order to manufacture a pipe with a length of 2 mm.

  Here, the hollow portion 12a of the mold 12 may be formed by opening a hole (through hole) penetrating the mold 12, or a flat mold having a semicircular groove formed on a flat surface may be formed flat. You may form by combining so that the groove | channels formed in the surface might mutually face.

  In the pipe manufacturing apparatus of FIG. 1, the nozzle 14 is for injecting a molten sample, for example, metal, alloy, metal glass, ceramics, or the like into the mold 12 from its tip 14a. It is formed from a functional material. The nozzle 14 can be raised and lowered in the vertical direction (up and down direction in the figure) by an elevating device (not shown). The nozzle 14 is disposed above the mold 12 and coaxially with the hollow portion 12a of the mold 12 so that the tip 14a of the nozzle 14 faces the injection port 12b of the mold 12 by raising and lowering by an elevating device (not shown). Can move forward or backward.

  An openable / closable valve or shutter can be provided at the tip 14a of the nozzle 14, and the injection of the molten sample in the nozzle 14 into the mold 12 may be controlled by opening / closing the valve or shutter. Further, when the sample is melted in the nozzle 14, it is desirable that the inside of the nozzle 14 be in an inert gas atmosphere.

  The compressor 16 is for allowing the compressed gas to flow into the nozzle 14, and the compressed gas can be supplied into the nozzle 14 by opening the valve 22. Thereby, the pressure in the nozzle 14 before inject | pouring the molten sample in the nozzle 14 into the hollow part 12a of the casting_mold | template 12 can be raised. When the molten sample in the nozzle 14 is injected into the mold 12, the molten sample raised to a predetermined pressure is injected into the hollow portion 12 a of the mold 12 at a predetermined speed.

  The gas pressure in the nozzle 14 can be adjusted by controlling the compressor 16, and the injection speed of the molten sample is adjusted according to the gas pressure in the nozzle 14. Therefore, the gas pressure is preferably adjusted according to the thickness and length of the pipe to be manufactured. As compressed gas, air and inert gas (nitrogen, argon, etc.) can be used, for example.

  The high frequency coil 18 is wound around the nozzle 14 and connected to a high frequency power supply 20. By flowing a high-frequency current from the high-frequency power source 20 to the high-frequency coil 18, the sample in the nozzle 14 can be melted by high-frequency induction heating. In the illustrated example, high-frequency induction heating means using the high-frequency coil 18 and the high-frequency power source 20 is used as means for melting the sample in the nozzle 14, but not limited to this, means for melting the sample by arc heating is used. Also good.

Next, the material of the pipe used in the pipe manufacturing method of the present invention will be described.
As a material of a pipe manufactured using the pipe manufacturing method of the present invention, a pure metal, an alloy, a metal glass alloy, ceramics, or the like can be used. As the pure metal, for example, Ti can be used. As the alloy, Ti-based, Ni-based, Co-based, Pd-based, Cu-based, and Zr-based alloys can be used. For example, Ti-Sn based alloys, Ti-Cu-Ni-Zr-Sn based alloys, Ti A -Cu-Ni-Zr-Al-Si-B-based alloy can be used. As the metal glass alloy, for example, a metal glass alloy such as a Zr group, a Ti group, a Ni group, a Fe group, or a Cu group, or a Ti—Sn based metal glass can be used. Any ceramic can be used as long as it is a meltable ceramic.

In the present invention, a Ti-based amorphous alloy represented by the following composition formula and having a strength of 1500 MPa or more is preferable because of its high strength, elastic deformation rate, and corrosion resistance.
Ti _100-abcde Cu _a Ni _b M1 _c M2 _d M3 _e
In the formula, M1 is at least one element selected from the group consisting of Zr, Hf and Sc, M2 is at least one element of Al and Sn, and M3 is at least one element of Si and B , A, b, c, d and e represent atomic%, respectively, 10 <a <40, 0 <b <30, 2 <c <10, 2 <d <10, 0 <e <5 and 40 <A + b + c + d + e <60 is satisfied.
Such a Ti-based amorphous alloy is excellent in strength characteristics, and is therefore optimal as a material for thin-walled pipes.

Next, the operation of the pipe manufacturing apparatus 10 will be described with reference to FIGS.
First, a sample weighed to a desired composition ratio is put into the nozzle 14, and then an inert gas is introduced into the nozzle 14 to create an inert gas atmosphere (see FIG. 2A). Next, the high frequency power supply 20 is turned on, and a high frequency current is supplied to the high frequency coil 18 to dissolve the sample 24 existing inside the nozzle 14.

  Subsequently, the nozzle 14 is lowered by driving a lifting device (not shown), and the tip 14a of the nozzle 14 is inserted into the injection port 12b of the mold 12 (see FIG. 2B).

  Next, the valve 22 shown in FIG. 1 is opened, compressed gas is allowed to flow into the nozzle 14 from the compressor 16, the pressure inside the nozzle 14 is increased, and the molten sample 24 is removed from the hollow portion of the mold 12. It injects to 12a (refer FIG.2 (c)). The molten sample injected into the hollow portion 12 a passes through the hollow portion 12 a at a high speed and is then discharged from the discharge port 12 c of the mold 12. At this time, the molten sample passing through the hollow portion 12a adheres to the entire inner wall 12d of the mold 12 constituting the hollow portion 12a, and is rapidly cooled and solidified by contact with the low temperature inner wall 12d. On the other hand, since the temperature of the central part of the molten sample passing through the hollow part 12a is high and the viscosity is low, the molten sample does not stay in the middle of the hollow part and is pushed further below the hollow part 12 by the gas pressure of the compressed gas. Is discharged from the outlet 12c. Thus, as shown in FIG. 2D, a thin tubular (tubular) film is formed on the inner wall 12d of the mold 12 constituting the hollow portion 12a so as to cover the inner wall 12d. The thin film covering the inner wall 12d is formed by being rapidly cooled by contact with the inner wall 12d, and thus has an amorphous structure.

  Next, the thin tubular film 28 is pushed out from the inlet 12 b or the outlet 12 c of the mold 12, and the tubular film 28 is taken out from the mold 12. In this way, a pipe 28 having a small thickness and uniform dimensions is obtained. The surface roughness of the inner wall 12d of the mold 12 is transferred to the surface roughness of the outer surface of the pipe thus manufactured. That is, the surface roughness of the inner wall 12d of the mold 12 is reflected on the outer surface of the pipe. Therefore, by reducing the surface roughness of the inner wall 12d of the mold 12, the surface roughness of the pipe outer surface can also be reduced.

  The thickness of the pipe can be adjusted by controlling the pressure for injecting the molten sample from the nozzle. That is, by passing the hollow portion 12a at a high speed, the amount of the molten sample attached to the inner wall 12d can be reduced, and thereby a thin pipe can be obtained. In order to allow the hollow portion 12 to pass through at a higher speed, it is preferable to further provide a vacuum pump for making the hollow portion 12a of the mold 12 have a negative pressure in the pipe manufacturing apparatus 10 shown in FIG. That is, the vacuum pump and the discharge port of the mold 12 are connected using a tubular member having a pressure reducing valve, and the vacuum pump is operated to open the pressure reducing valve, thereby reducing the pressure in the hollow portion 12a of the mold 12 to a negative pressure. It is preferable to be configured as follows. And when the sample melted from the nozzle 14 is sprayed toward the hollow portion 12a of the mold 12, it is preferable to control the opening and closing of the pressure reducing valve so that the hollow portion 12a of the mold 12 has a negative pressure. The timing of depressurization of the hollow portion 12a may be the same as the injection of the molten sample into the hollow portion 12 of the mold, or may be before or after the injection, and is appropriately determined according to the desired pipe thickness. Can be controlled. In order to obtain a thin pipe, it is preferable to control the timing so that the thickness of the molded pipe is reduced.

  With such a configuration, it is possible to allow the molten sample injected from the nozzle 14 to pass through the interior of the hollow portion 12a at a higher speed than when the hollow portion 12a is not set to a negative pressure. That is, the speed of the molten sample passing through the hollow portion 12a of the mold 12 can be further increased. As a result, the thickness of the tubular film formed on the inner wall of the hollow portion 12a of the mold 12 can be reduced. Furthermore, the length of the tubular membrane formed on the inner wall, that is, the length of the pipe can be further increased.

  In the manufacturing method of the present invention, as described above, since the molten sample is injected into the hollow portion 12a of the mold 12 and the molten sample is fixed to the wall surface constituting the hollow portion, the temperature of the mold can be increased. On the other hand, in order to obtain a glass-like pipe, it is necessary to rapidly cool the molten sample injected into the hollow part on the wall surface of the hollow part. Therefore, it is preferable to maintain the mold at a low temperature during production. For example, the mold is cooled with water. However, it is preferable to produce a pipe by injecting a molten sample into a mold.

  The pipe obtained by the manufacturing method of the present invention is light in weight because it is thin. And since it has an amorphous structure in order to cool rapidly, intensity | strength is also raised. Such a pipe can be used for various applications, and is optimal for an oscillating flow tube used in, for example, a Coriolis flow meter. For example, if a metal glass pipe is produced by the above-described manufacturing method using glass metal, a vibrating flow tube having a small thickness, a low Young's modulus, and excellent corrosion resistance can be obtained. Using this vibrating flow tube, a Coriolis flow rate is obtained. If a meter is comprised, measurement sensitivity can be raised rather than before. It is considered that this makes it possible to measure the gas flow rate.

In this invention, it can also process so that the surface accuracy of at least one of the inner surface of a manufactured pipe and an outer surface may become high. For example, when used in a Coriolis flow meter, the vibrating flow tube is constantly vibrating, so if the surface accuracy of the inner and outer surfaces of the vibrating flow tube is low, fatigue failure may occur from that portion. .

Moreover, when using the pipe obtained by the manufacturing method of this invention for a vibration flow pipe, it is preferable to set it as a straight pipe type from the point of a shaping | molding process and a pressure loss. If pipes for straight- flow type oscillating flow pipes are manufactured by the manufacturing method of the present invention using glass metal, the resulting pipes are highly elastic and have high sensitivity, and even intuitive types are more accurate than before. The mass flow rate can be measured well.

  Next, an embodiment of the pipe manufacturing method of the present invention will be described with reference to FIGS.

  First, in this embodiment, an example of manufacturing a Ti-based metallic glass pipe having an outer diameter of 2 mm and a length of 200 mm will be described.

First, a metal glass pipe sample weighed to have a desired composition was prepared. The sample was put in the nozzle 14 and the nozzle 14 was filled with an inert gas. Next, the high frequency power supply 20 was turned on to supply current to the high frequency coil 18, and the sample in the nozzle 14 was dissolved by high frequency induction heating (see FIG. 2A). Next, the nozzle 14 is moved and inserted into the injection port 12b of the mold 12 (see FIG. 2B), the valve 22 is opened, and the compressed gas flows into the nozzle 14 from the compressor 16 to enter the nozzle 14 Was set to 2 kgf / cm ² (19.6 × 10 ⁴ N / m ² ), and the molten sample was injected into the hollow portion 12a of the mold 12 (see FIG. 2C). Thus, a thin tubular film 28 was formed on the inner wall constituting the hollow portion (see FIG. 2D). A tubular membrane was taken out from the hollow portion 12a to obtain a pipe. When the thickness of the manufactured pipe was measured, the average thickness was 0.25 mm. Moreover, when the structure of the pipe was analyzed by X-ray diffraction, it was found to be glassy (amorphous).

In this embodiment, the length of the hollow portion 12a of the mold is changed so that the length of the pipe to be manufactured is 180 mm, a Zr-based metallic glass material is used as the pipe material, and the pressure in the nozzle is set to 2. A pipe was manufactured in the same manner as in Example 1 except that the molten metal was injected at 5 kgf / cm ² (24.5 × 10 ⁴ N / m ² ). When the thickness of the manufactured pipe was measured, the average thickness was 0.3 mm.

In this example, except that Fe-based metallic glass was used as the material of the pipe, the pressure inside the nozzle was 1.5 kgf / cm ² (14.7 × 10 ⁴ N / m ² ), and molten metal was injected, A pipe was manufactured in the same manner as in Example 1. When the thickness of the manufactured pipe was measured, the average thickness was 0.2 mm.

  In this example, a pipe was manufactured in the same manner as in Example 1 except that a Cu-based metallic glass was used as the pipe material. When the thickness of the manufactured pipe was measured, the average thickness was 0.25 mm.

  Here, the distribution in the length direction of the thickness of the pipe manufactured in Examples 1 to 4 was measured. The measurement is performed by cutting the pipe from the portion located on the mold inlet side (hereinafter referred to as the inlet portion) every 10 mm, arithmetically averaging the thickness measured at five points, and plotting the distance from the inlet portion. did. The measurement results are shown in the graph of FIG. As can be seen from this graph, the thickness varies from the injection port to 40 mm, but when the length is longer than 40 mm, the thickness is approximately 30 mm or less.

  When the pipes obtained in Examples 1 to 4 were used for the vibratory flow tube of the Coriolis flow meter, the result of the performance index was about 28 times that of the Coriolis flow meter using the conventional SUS vibratory flow tube. was gotten. Coriolis flowmeters are indispensable measuring instruments that play an important role in a wide range of fields such as petroleum, chemicals, biotechnology, semiconductors, and medicine. Metal glass pipes manufactured by the manufacturing method of the present invention have high strength and high elastic deformation. Since it has a high rate and high corrosion resistance, it is extremely optimal as an oscillating flow tube for such a Coriolis flow meter.

Furthermore, for Ti-Cu-Ni-Zr-Sn-based alloys, a plurality of samples based on Ti ₅₀ Cu ₂₅ Ni ₁₅ Zr ₅ Sn ₅ as samples 1 and having compositions changed as shown in Table 1 below are used. Used to produce various pipes with different compositions. In the production of the pipe, a mold having a hollow part with a diameter of 2 mm was used as the mold 12 shown in FIG. 1, and the production method of the present invention was followed by the production apparatus shown in FIG. For each sample of different compositions shown in Table 1, it was possible to produce an amorphous alloy pipe having a diameter of 2 mm.

  As mentioned above, although the manufacturing method of the pipe of this invention was demonstrated in detail, this invention is not limited to the said embodiment and Example, In the range which does not deviate from the main point of this invention, various improvement and change are carried out. Of course it is also good.

  For example, the outer surface and the inner surface of a pipe manufactured by the manufacturing method of the present invention may be polished by machining or the like. For example, the outer surface may be centerless polished or the inner surface may be processed by wire electric discharge machining.

It is a schematic diagram of the manufacturing apparatus for implement | achieving the manufacturing method of this invention. (A)-(d) is a schematic diagram for demonstrating the manufacturing process of a pipe. It is a distribution map of thickness with respect to the length from the inlet part of the pipe manufactured in Examples 1-4.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Pipe manufacturing apparatus 12 Mold 12a Hollow part 12b Inlet 12c Outlet 12d Inner wall 14 Nozzle 16 Compressor 18 High frequency coil 20 High frequency power supply 22 Valve 24 Molten sample 28 Tubular membrane

Claims (4)

A manufacturing method for manufacturing a metal glass alloy pipe,
A copper mold having a columnar hollow portion extending in the length direction, which is formed by combining a pair of molds having semicircular grooves formed on a flat surface so that the grooves formed on the flat surface face each other. Use
Melting the metallic glass alloy material constituting the pipe;
With the hollow portion of the mold extending in the vertical direction, the mold is cooled with water as necessary, and the compressed gas is used at a pressure corresponding to the thickness of the pipe to be manufactured. All of the molten metallic glass alloy material in the nozzle is sprayed from the nozzle disposed at the top to the hollow portion of the mold, and the molten metallic glass alloy material is injected at a predetermined speed according to the pressure of the spraying. By passing the hollow portion downward, the molten metal glass alloy material is attached to the wall surface of the mold forming the hollow portion, and the molten metal glass alloy material attached to the wall surface is attached to the mold. Forming a film of the molten metallic glass alloy material on the wall surface of the mold that forms the hollow portion by cooling and solidifying by the method of manufacturing a pipe.   Furthermore, the manufacturing method of the pipe of Claim 1 including the process of making the said hollow part into a negative pressure when inject | pouring the said melted material into the said hollow part. A manufacturing apparatus for manufacturing a metal glass alloy pipe,
A mold formed by combining a pair of molds with semicircular grooves formed on a flat surface so that the grooves formed on the flat surfaces face each other, and extending in a length direction that matches the vertical direction A copper mold having a hollow portion, or a water-cooled copper mold having a columnar hollow portion extending in the length direction corresponding to the vertical direction ;
Means for melting the metallic glass alloy material constituting the pipe;
Compression means for compressing the gas;
Using the gas compressed by the compression means, at a pressure corresponding to the thickness of the pipe to be manufactured, from the nozzle disposed in the upper part of the mold to the hollow part of the mold, the molten metal in the nozzle By injecting all of the glass alloy material and passing the molten metal glass alloy material downward through the hollow portion at a predetermined speed corresponding to the pressure of the injection, the mold for forming the hollow portion The molten metal glass alloy material is attached to a wall surface, and the molten metal glass alloy material attached to the wall surface is cooled and solidified by the mold, and the molten metal glass alloy material is melted on the mold wall surface forming the hollow portion. A pipe manufacturing apparatus having means for forming a film of a metallic glass alloy material. The pipe manufacturing apparatus according to claim 3 , further comprising means for setting the hollow portion to a negative pressure when the molten material is injected into the hollow portion.

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