JP4636840B2 - Cleaning method and cleaning device - Google Patents

Description

  The present invention is a cleaning method that can be suitably used for surface cleaning of a buffing product, an ion plating pretreatment product, a mirror surface press product, a cutting product, etc., on which contaminants such as oil adhere to the surface, and The invention relates to a cleaning device.

  Hydrocarbon solvents are used in cleaning agents as substitutes for chlorinated solvents such as methylene chloride and trichlene that induce ozone layer destruction and air / water pollution. The cleaning method using this hydrocarbon-based cleaning agent is different from the water-based cleaning agent that uses water as a solvent, and rust is generated during drying even if the object is cleaned using carbon steel or alloy steel. There is utility that can be suppressed.

  However, since there are some deposits on the surface of the object that are difficult to remove with the hydrocarbon-based cleaning agent, the surface of the object to be cleaned may not be sufficiently cleaned even if the object is cleaned with the hydrocarbon-based cleaning agent. In order to improve the cleaning of the surface of the object to be cleaned, a hydrocarbon-based cleaning agent may be used after cleaning using an aqueous cleaning agent, and in this case, generation of rust can be prevented.

A cleaning method using a hydrocarbon-based cleaning agent after cleaning with an aqueous cleaning agent is disclosed in Patent Document 1, for example. That is, Patent Document 1 includes a step of washing an object to be cleaned using an aqueous cleaning agent, a rinsing process for washing an object to be cleaned, and a glycol ether or the like in order to exert hydrophilic and lipophilic properties. There is disclosed a cleaning method in which a step of immersing in the hydrocarbon-based cleaning agent, a step of performing steam cleaning of an object to be cleaned with hydrocarbon-based steam, and a step of drying the object to be cleaned are sequentially performed.
JP 2002-18372 A

  However, according to the method disclosed in Patent Document 1, a large amount of washing water is required to remove the water-based cleaning agent adhering to the surface of the object to be cleaned in the previous rinsing process. There is a problem that wastewater is generated.

  Further, the method disclosed in Patent Document 1 includes a step of immersing in a hydrocarbon-based cleaning agent after a rinsing step of rinsing an object to be cleaned, but the method disclosed in Patent Document 1 is continuously used. In such a case, the water concentration in the hydrocarbon-based cleaning agent gradually increases. As a result, the process proceeds to a drying process with moisture adhering to the surface of the object to be cleaned, and dry spots and rust are generated on the surface of the object to be cleaned. In order to prevent the occurrence of dry spots and rust, it is necessary to periodically replace the entire amount of the hydrocarbon-based cleaning agent and to add equipment for removing water in the hydrocarbon-based cleaning agent. Therefore, the complexity of cleaning and the cost of equipment used for cleaning will be increased.

  In view of the problem that a large amount of cleaning water is required when removing the aqueous cleaning agent, and the problem of dry spots and rust generation on the surface of the object to be cleaned that occurs when continuous cleaning is performed, the aqueous system It is an object of the present invention to provide a cleaning method for efficiently removing moisture on the surface of an object to be cleaned such as a cleaning agent, and a cleaning device used for this cleaning.

The inventor of the present invention based on the knowledge that water on the surface of an object to be cleaned can be efficiently removed by immersing the object to be cleaned on the surface in a hydrophobic water replacement solution. It came to be completed. Chi words, the present invention, by immersing the object to be cleaned in an aqueous detergent, a first cleaning step of the cleaning object immersed ultrasonic cleaning with an aqueous cleaning agent by operating the ultrasonic oscillator, the first wash step by immersing the object to be cleaned in a hydrophobic water displacement liquid after the water replacement step of replacing the water on the cleaning object surface water displacement liquid, non to be cleaned of hydrophobic after the water replacement step a second cleaning step of immersing ultrasonic cleaning and steam cleaning with an aqueous cleaning agent, after the steam cleaning of the second cleaning step, a drying step which makes vacuum drying under reduced pressure the non-aqueous detergent cleaning object surface, the The water replacement step is configured to include a water replacement liquid storage tank for storing a water replacement liquid , a first pressure reducing pump for reducing the pressure of the water replacement liquid storage tank, and the reduced water replacement liquid. In a water replacement treatment unit comprising a first return pressure valve for returning the storage tank to atmospheric pressure, And sealing the immersed the water substitute liquid reservoir, a decompression process for decompressing the water substitute liquid storage tank by the first pressure reducing pump, the water replacement fluid reservoir by opening said first recovery valve a pressure recovery process for releasing to the atmospheric pressure, the water was separated from the cleaning object surface with an appropriate number of repeat Succoth and collected below the water replacement fluid reservoir by water displacement liquid phase separation by specific gravity difference The steam cleaning process includes a single combined processing tank for performing the steam cleaning and the vacuum drying, a third vacuum pump for reducing the pressure of the combined processing tank, and a non-aqueous system for supplying the combined processing tank. In a steam cleaning / vacuum drying section having a steam generation tank for generating cleaning agent vapor, the non-aqueous cleaning agent vapor in the steam generation tank is caused to flow into the combined treatment tank in a state where an object to be cleaned is arranged and sealed. To expose the surface of the object to be cleaned to the cleaning agent vapor. It is executed Te.

  The aqueous cleaning agent is obtained by dissolving a cleaning component in water. Examples of the cleaning component include one or more or all of alkali salts, surfactants, organic acids, glycol solvents and the like.

  The water replacement liquid is a hydrophobic liquid mainly composed of a non-aqueous detergent, and the hydrophobic liquid is preferably a liquid hydrocarbon to which a fatty acid amine salt is added. Isoparaffin, normal paraffin, or a mixture of two or more of isoparaffin and normal paraffin, and the isoparaffin and normal paraffin may have 8 to 15 carbon atoms. That is, the liquid hydrocarbon includes a single type of isoparaffin, a single type of normal paraffin, a mixture of multiple types of isoparaffin, a mixture of multiple types of normal paraffin, a mixture of a single type of isoparaffin and multiple types of normal paraffin, and multiple types of isoparaffin. And a single kind of normal paraffin, or a mixture of a plurality of kinds of isoparaffins and a plurality of kinds of normal paraffins, preferably having 8 to 15 carbon atoms.

  The non-aqueous cleaning agent is a cleaning agent that does not substantially contain water, and is preferably a liquid hydrocarbon.

  The moisture includes not only water alone but also water in which a cleaning component is dissolved.

  The second cleaning step is a step of immersing the object to be cleaned in a non-aqueous cleaning agent and / or exposing the object to be cleaned to a non-aqueous cleaning agent vapor. The non-aqueous cleaning agent used in the second cleaning step is preferably the same hydrocarbon as the liquid hydrocarbon of the water replacement liquid used in the water replacement step.

The present invention also includes a first cleaning processing unit for immersing an object to be cleaned in an aqueous cleaning agent and operating an ultrasonic oscillator to immerse the object to be cleaned in an aqueous cleaning agent and ultrasonically cleaning the first cleaning processing unit. The object to be cleaned that has been cleaned in step 1 is immersed in a hydrophobic water replacement solution to replace the water on the surface of the object to be cleaned with the water replacement solution, and the object to be cleaned that has been subjected to the water replacement process is hydrophobic. second cleaning unit and the drying process of the non-aqueous cleaning agent for the cleaning object surface and steam cleaning with a non-aqueous detergent Ru was vacuum dried under reduced pressure to immersion ultrasonic cleaning and steam cleaning with sexual nonaqueous detergent A water replacement liquid storage tank for storing a water replacement liquid , a first pressure reducing pump for reducing the pressure of the water replacement liquid storage tank, and the reduced water replacement liquid. It is configured to include a first recovery valve for returning the reservoir to atmospheric pressure, and said the object to be cleaned is immersed And sealing the replacement fluid reservoir to open the decompression process for decompressing the water substitute liquid storage tank by the first pressure reducing pump, the water replacement fluid reservoir by opening said first recovery valve to the atmospheric pressure and pressure recovery process, the moisture is removed from the cleaning object surface with an appropriate number of repeat Succoth and by water displacement liquid phase separation was collected below the water substitution fluid reservoir by a difference in specific gravity, the steam cleaning The treatment includes a single combined treatment tank for performing the steam cleaning and the vacuum drying, a third decompression pump for depressurizing the combined treatment tank, and a steam for generating a non-aqueous cleaning agent vapor to be supplied to the combined treatment tank. In a steam cleaning / vacuum drying section having a generation tank, a non-aqueous detergent vapor from the steam generation tank is allowed to flow into the combined treatment tank in which the object to be cleaned is placed and sealed, and the surface of the object to be cleaned is Performed by exposure to the detergent vapor .

  According to the invention configured as described above, the water replacement liquid that removes the water on the surface of the object to be cleaned has a hydrophobic property, and is separated from the surface of the object to be cleaned to be compatible with the water replacement liquid. Since only water such as the water-based cleaning agent in the separated state can be efficiently removed and collected, the cleaning method and the cleaning apparatus can efficiently remove the water on the surface of the object to be cleaned.

  Hereinafter, the present invention will be described based on embodiments. FIG. 1 is a configuration diagram illustrating an example of a cleaning apparatus according to the present invention. The apparatus shown in FIG. 1 removes water adhering to the surface of the object to be cleaned, and the first cleaning processing unit 10 including the water-based cleaning tanks 11a and 11b for storing the water-based cleaning agent for cleaning the object to be cleaned. After having a water replacement processing unit 20 having a water replacement liquid storage tank 21 for storing a water replacement liquid for carrying out, and a non-aqueous cleaning tank 31 for storing a non-aqueous cleaning agent for immersing an object to be cleaned An immersion cleaning processing unit 30 and a steam cleaning / vacuum drying unit 40 for cleaning the object to be cleaned by exposing it to a non-aqueous cleaning agent vapor and drying the cleaning agent on the surface of the object to be cleaned after the cleaning are provided. Moreover, the cleaning apparatus in the present embodiment includes a control unit (not shown) for appropriately controlling the apparatus. In addition, this apparatus does not provide the rinse process part which wash | cleans the to-be-cleaned object wash | cleaned by the 1st washing process part 10 before the process in the water substitution process part 20.

  In the present embodiment, the first cleaning processing unit 10 is provided with two aqueous cleaning tanks 11a and 11b for storing an aqueous cleaning agent, and each of the aqueous cleaning tanks 11a and 11b is stored in the cleaning tank. Ultrasonic oscillators 13a and 13b for generating ultrasonic waves in the aqueous cleaning agent, a decompression pump 15 for depressurizing the inside of the cleaning tank, and the pressure in the depressurized cleaning tanks 11a and 11b are set to atmospheric pressure. The return pressure valves 14a and 14b for returning are provided. In addition, the water-based cleaning tanks 11a and 11b are provided with discharge valves 17a and 17b that can discharge the water-based cleaning agent arbitrarily.

  The water-based cleaning tanks 11a and 11b are tanks for continuously cleaning the objects to be cleaned. After the objects to be cleaned are cleaned in one cleaning tank 11a, the objects to be cleaned are further cleaned in the other cleaning tank 11b. The water-based cleaning tanks 11a and 11b have an opening on the upper side, and after the object to be cleaned is placed in the cleaning tank, the water-based cleaning tanks 11a and 11b are closed with closing lids 12a and 12b for closing the openings, so that the inside of the tank can be sealed. It has a configuration.

  The water-based cleaning agent stored in the cleaning tanks 11a and 11b is a cleaning agent using water as a solvent, and in this embodiment, in order to clean and remove oil that cannot be removed from the surface of the object to be cleaned with water alone. A cleaning agent in which an alkaline cleaning agent is dissolved is selectively used.

  The ultrasonic oscillators 13a and 13b generate ultrasonic waves in the aqueous cleaning agent, and the ultrasonic waves generate cavitations that are countless cavities in the aqueous cleaning agent. Thereafter, cavitation breaks, and the cleaning effect on the surface of the object to be cleaned is further enhanced by the shock wave generated at this time.

  The decompression pump 15 is connected to an end of a main pipe consisting of a main pipe and a branch pipe divided into two from the main pipe, and aqueous cleaning tanks 11a and 11b are connected to the ends of the branch pipes, respectively. . In the middle of the branch pipe, pressure reducing valves 16a and 16b are provided. Note that the decompression pumps 25, 35, and 45, which will be described later, are separate decompression pumps, so that the water replacement liquid and the non-aqueous cleaning agent are not mixed in the cleaning agent vapor sucked by the decompression pump 15. Yes.

  The return pressure valves 14a and 14b are provided in the vicinity of the upper ends of the water-based cleaning tanks 11a and 11b, and are opened when the pressure-reduced water-based cleaning tanks are suddenly returned to atmospheric pressure. Due to this rapid return to atmospheric pressure, external pressure is applied to the cavitation generated at the time of decompression, the destruction of the cavitation is promoted, and the cleaning effect is improved.

  The water replacement processing unit 20 depressurizes the water replacement liquid storage tank 21 for immersing the object to be cleaned and replacing the water adhering to the surface of the cleaning object with a water replacement liquid, and the storage tank 21. A depressurizing pump 25, a return pressure valve 24 for rapidly returning the pressure in the depressurized cleaning tank to atmospheric pressure, and a replacement water collection connected to the water replacement liquid storage tank 21 via an on-off valve 29a A tank 27 is provided.

  The water replacement liquid storage tank 21 is a container for storing the water replacement liquid, and the shape of the storage tank 21 has a bottom narrow taper structure that gradually narrows toward the bottom. Therefore, the water-based cleaning agent having a specific gravity larger than that of the water replacement liquid is concentrated in the narrowest portion of the taper structure. The storage tank 21 has an opening on the upper side, and has a structure in which the opening is closed by the closing lid 22 after the object to be cleaned is arranged in the storage tank 21. The water replacement liquid storage tank 21 is provided with a discharge valve 29c for discharging the stored water replacement liquid.

  A hydrophobic liquid mainly composed of liquid hydrocarbon is used as the water replacement liquid. Preferably, a liquid hydrocarbon containing 0.1 to 10% by weight of a fatty acid amine salt as an additive having a specific gravity lower than that of an aqueous detergent is used. For the liquid hydrocarbon, isoparaffin, normal paraffin, or a mixture of two or more selected from isoparaffin and normal paraffin is preferably used, and the isoparaffin and normal paraffin may have 8 to 15 carbon atoms. In addition, the water replacement liquid is marketed and corresponds to the water replacement liquid for which Aqua Solvent Z-400, Aqua Solvent Z-71, and Aqua Solvent Z-GN by Aqua Chemical Co., Ltd. are marketed.

  The decompression pump 25 for decompressing the storage tank 21 is connected to the vicinity of the upper end of the storage tank 21 through a pipe in which the pressure reducing valve 26 and the condenser 50 are interposed in the middle from the side close to the storage tank 21. A pipe for discharging the sucked gas is connected to the decompression pump 25, and a collector (not shown) for collecting the water replacement liquid is connected to the other end of the pipe. The decompression pump 25 is a pump that is separate from the decompression pump 15 used in the first cleaning processing unit 10, and includes a pipe connected to the pump 15 and the aqueous cleaning tanks 11a and 11b, a pump 25, and a water replacement liquid. Since the pipe connected to the storage tank 21 is independent, the water replacement liquid vapor sucked by the pump 25 is not mixed with the aqueous cleaning agent.

  The replacement water collection tank 27 is a tank that temporarily collects the replacement water 23 generated by replacing the water adhering to the surface of the object to be cleaned with the water replacement liquid. The replacement water collection tank 27 is provided below the water replacement liquid storage tank 21, and is connected to the bottom end of the water replacement liquid storage tank 21 by a pipe via an on-off valve 29a. A discharge valve 29c for discharging the replacement water 23 inside the storage tank 27 is provided at the bottom of the replacement water collection tank 27. The replacement water collection tank 27 has a lower specific gravity than the aqueous cleaning agent. A float switch 28 is provided to open and close the discharge valve 29b by the vertical movement of a floating body having a higher specific gravity than the water replacement liquid. When the replacement water 23 accumulates in the replacement water collection tank 27 and the floating body rises to a predetermined position, the float switch 28 is turned on, the discharge valve 29b is opened, and the replacement water 23 is discharged from the replacement water collection tank 27. To do. Thereafter, when the discharge valve 29 b is closed, the replacement water 23 is collected in the replacement water collection tank 27.

  The post-immersion cleaning processing unit 30 is a processing unit for removing foreign matters remaining on the surface of the object to be cleaned processed by the water replacement processing unit 20, and includes a non-aqueous cleaning tank 31 storing a non-aqueous cleaning agent, and this cleaning An ultrasonic oscillator 33 for generating ultrasonic waves in the non-aqueous cleaning agent stored in the tank, a pressure reducing pump 35 for reducing the pressure in the cleaning tank 31, and a pressure in the pressure reducing cleaning tank A return pressure valve 34 for returning the pressure to atmospheric pressure and a discharge valve 37 capable of arbitrarily discharging the non-aqueous cleaning agent in the storage tank 31 are provided.

  The non-aqueous cleaning tank 31 is a tank for cleaning an object to be cleaned by immersing it in an aqueous cleaning agent. As the non-aqueous cleaning agent, the same non-aqueous cleaning agent that is used as the main component of the water replacement liquid is used. That is, it is a liquid hydrocarbon selected from isoparaffin, normal paraffin, or a mixture of two or more selected from isoparaffin and normal paraffin, wherein the isoparaffin and normal paraffin have 8 to 15 carbon atoms. Since this liquid hydrocarbon is the same as the liquid hydrocarbon used in the water replacement liquid, even if the object to be cleaned with the water replacement liquid adhering to the surface is immersed in a non-aqueous cleaning agent, Contamination of the cleaning agent can be extremely prevented.

  The decompression pump 35 is the same decompression pump as the decompression pump 25 connected to the water replacement liquid storage tank 21. The decompression pump 35 and the non-aqueous cleaning tank 31 are connected via a branch pipe that branches from between the condenser 50 and the decompression valve 26 of a pipe extending from the pump 35 to the water replacement liquid storage tank 21. A pressure reducing valve 36 is provided in the middle of the branch pipe.

  The steam cleaning / vacuum drying unit 40 is a processing unit that cleans and removes foreign matter remaining on the surface of the object to be cleaned that has been processed by the post-immersion cleaning unit 30 and then dries the surface of the object to be cleaned. The steam cleaning / vacuum drying unit 40 includes a steam cleaning / vacuum processing tank 41 that performs steam cleaning and drying of the surface of the object to be cleaned, a decompression pump 45 for reducing the pressure in the processing tank 41, and a processing tank 41. And a steam generation tank 47 for generating non-aqueous cleaning agent steam to be supplied.

  The steam cleaning / vacuum processing tank 41 is a box having an opening, a closing lid 42 that closes the opening and seals the inside of the steam cleaning / vacuum processing tank 41, and a non-aqueous cleaning accumulated in the processing tank 41. A discharge valve 43 for discharging the agent is provided. In addition, a heating mechanism (not shown) for heating the atmosphere inside the processing tank 41 is provided.

  The decompression pump 45 is a pump for decompressing the inside of the steam cleaning / vacuum processing tank 41, and is provided between the recovery tank 60 that collects the steam released from the pump 45 and the processing tank 41. Further, a pressure reducing valve 46 is provided in a pipe between the pressure reducing pump 45 and the steam cleaning / vacuum processing tank 41.

  The steam generation tank 47 generates steam to be introduced into the steam cleaning / vacuum processing tank 41 and is connected to the processing tank 41 by piping. An opening / closing valve 44 is provided between the steam generation tank 47 and the processing tank 41.

  A non-aqueous cleaning agent that is a source of steam is injected into the steam generation tank 47, and this non-aqueous cleaning agent is stored in the non-aqueous cleaning tank 31 of the post-immersion cleaning processing unit 30. Same cleaning agent.

  The cleaning method according to the present embodiment will be described below based on the operation of the above apparatus. In this cleaning method, the object to be cleaned is sequentially subjected to the processing of the first cleaning processing unit 10, the water replacement processing unit 20, the post-immersion cleaning processing unit 30, and the steam cleaning / vacuum drying unit 40. A first cleaning step in which the object to be cleaned is immersed in an aqueous cleaning agent, and after the first cleaning step, the object to be cleaned is immersed in a hydrophobic water replacement solution on the surface of the object to be cleaned. A water replacement step for replacing water with a water replacement solution, a second cleaning step for cleaning the object to be cleaned with a hydrophobic non-aqueous cleaning agent after the water replacement step, and a surface to be cleaned after the second cleaning step And a drying step for drying. This method does not provide a rinsing step for washing an object to be washed between the first washing step and the water replacement step.

  A 1st washing | cleaning process is performed in the water washing process part 10 as follows. First, the object to be cleaned is immersed in the aqueous cleaning agent in the aqueous cleaning tank 11a in a state in which the return pressure valve 14a, the pressure reducing valve 16a, and the discharge valve 17a are closed. When the operation of the ultrasonic oscillator is started after the immersion, the opening of the aqueous cleaning tank 11a is closed by the closing lid 12a, and the inside of the aqueous cleaning tank 11a is sealed. Thereafter, as a pressure reduction treatment, the pressure reducing valve 16a is opened, the pressure inside the water-based cleaning tank 11a is reduced, and the water-based cleaning agent penetrates into the details of the object to be cleaned.

  Next, as a pressure recovery process, after the pressure reducing valve 16a is closed, the pressure reducing valve 14a is opened. By opening the return pressure valve 14a, the atmospheric pressure in the water-based cleaning tank 11a suddenly returns to atmospheric pressure. The rapid return to the atmospheric pressure in the water-based cleaning tank 11a has a function of penetrating into the details when the cleaning liquid is urged toward the details of the object to be cleaned. This makes it possible to clean the details of the object that could not be cleaned. In addition, sudden return to atmospheric pressure destroys all cavitation caused by ultrasonic waves during decompression and generates shock waves toward the object to be cleaned. Ultrasonic cleaning by cavitation destruction at atmospheric pressure. To achieve a higher level of cleaning. The process in which the decompression process and the decompression process are performed in one cycle is performed an appropriate number of times according to the target object to be cleaned.

  The cleaning in the water-based cleaning tank 11a is similarly performed in the water-based cleaning tank 11b storing a water-based cleaning agent that is less contaminated than the cleaning tank 11a, and the cleanliness of the surface of the object to be cleaned is increased.

  The water replacement process is performed as follows in the water replacement processing unit 20 after the first cleaning process. With the return pressure valve 24, the pressure reducing valve 26, and the discharge valve 29b closed, the object to be cleaned is immersed in the water replacement liquid stored and held in the water replacement liquid storage tank 21. After the immersion, the opening of the water replacement liquid storage tank 21 is closed by the closing lid 22, and the inside of the water replacement liquid storage tank 21 is sealed. Thereafter, as a decompression process, the decompression valve 26 is opened, the inside of the water replacement liquid storage tank 21 is decompressed, the water replacement liquid penetrates into the details of the object to be cleaned, and the water on the surface of the object to be cleaned is replaced with the water replacement liquid. To do.

  Next, as the pressure recovery process, the pressure reducing valve 24 is opened after the pressure reducing valve 26 is closed. By opening the return pressure valve 24, the atmospheric pressure in the water replacement liquid storage tank 21 rapidly returns to atmospheric pressure. This return to atmospheric pressure has the effect that the water replacement solution vigorously penetrates into the details of the object to be cleaned, so that the water replacement solution can be brought into contact only by reducing the pressure of the water replacement solution storage tank 21. It is possible to allow the water replacement liquid to permeate and contact the details of the object to be cleaned, and to replace the water on the surface of the object to be cleaned with the water replacement liquid. The treatment in which one cycle of the decompression treatment and the decompression treatment in the water replacement step is performed at an appropriate number of times according to the object to be cleaned.

When the water replacement step is continuously performed, the accumulated amount of the replacement water 23 generated by replacing the water adhering to the surface of the object to be cleaned with the water replacement liquid increases. This replacement water 23 is hydrophobic. Since the compatibility with the water replacement liquid is poor and the specific gravity is higher than that of the water replacement liquid, it accumulates in a state of being phase-separated from the water replacement liquid from below the replacement water collection tank 27 communicating with the pipe by opening the on-off valve 29a. Will do. When a certain amount of replacement water 23 accumulates in the replacement water collection tank 27, the float switch 28 in the replacement water collection tank 27 is turned on to open the discharge valve 29b, and the water accumulated in the replacement water collection tank 27 is discharged. Will be. When the float switch 28 is lowered to a predetermined position due to the water being discharged, the discharge valve 29b is closed to prevent the water replacement liquid from being discharged. Since only the replacement water 23 in the replacement water storage tank 27 is discharged by opening the discharge valve 29b, the water replacement liquid is not wasted. In addition, by collecting the discharged water, it is possible to reuse this water.

  In the second cleaning step, the object to be cleaned is immersed in the non-aqueous cleaning agent in the non-aqueous cleaning tank 31 of the post-immersion cleaning processing unit 30, and after the pressure reduction and return pressure in the non-aqueous cleaning tank 31 are repeated, the immersion cleaning is performed. This is a process of sequentially performing the process and the steam cleaning process in which the object to be cleaned is exposed to the non-aqueous cleaning agent vapor in the steam cleaning / vacuum processing tank 41 of the steam cleaning / vacuum drying unit 40.

  The post-immersion cleaning process is performed in the same manner as the first cleaning process. That is, it is performed by generating ultrasonic waves in the non-aqueous cleaning agent in which the object to be cleaned is immersed, and repeating the depressurization and return pressure in the non-aqueous cleaning tank 31 storing the non-aqueous cleaning agent. The details of the object to be cleaned are cleaned by the non-aqueous cleaning agent due to the reduced pressure inside the non-aqueous cleaning tank 31, and the cavitation caused by the ultrasonic waves is destroyed by the rapid return pressure inside the non-aqueous cleaning tank 31. This improves the ultrasonic cleaning. The decompression process and the decompression process in this treatment process are performed at an appropriate number of times according to the object to be cleaned. After this, the water replacement liquid adhering to the surface of the object to be cleaned is taken into the non-aqueous cleaning agent in the cleaning process, but the main component of the water replacement liquid is the same as the non-aqueous cleaning agent. Contamination of the water-based cleaning agent can be prevented.

  The steam cleaning process is performed as follows. An object to be cleaned is placed in the steam cleaning / vacuum processing tank 41 with the discharge valve 43, the on-off valve 44, and the pressure reducing valve 46 closed. Thereafter, the opening of the steam cleaning / vacuum processing tank 41 is closed with a closing lid 42, and the inside of the steam cleaning / vacuum processing tank 41 is sealed. Thereafter, by opening the on-off valve 44, the non-aqueous cleaning agent vapor in the steam generation tank 47 flows into the steam cleaning / vacuum processing tank 41. When this non-aqueous cleaning agent vapor flows into the vapor cleaning / vacuum processing tank 41, the pressure reducing valve 46 is opened in order to promote this inflow by suction of the pressure reducing pump 45. When the non-aqueous cleaning agent vapor flows into the treatment tank 41, the surface of the object to be cleaned is cleaned by the cleaning agent vapor.

The drying process is performed as follows in the steam cleaning / drying treatment tank 41 in which this process is performed after the steam cleaning process. The surface of the object to be cleaned is dried in a state where the opening / closing valve 44 of the steam cleaning / vacuum drying unit 40 is closed and the pressure reducing valve 46 is opened to reduce the pressure in the steam cleaning / vacuum processing tank 41. At this time, the pressure in the tank 41 is rapidly reduced to a higher degree of decompression than in the steam cleaning so that the temperature of the non-aqueous cleaning agent adhering to the surface of the object to be cleaned is equal to or higher than the boiling point. The agent is boiled and evaporated, and the surface of the object to be cleaned is dried.
Since this drying is performed in a state where the inside of the processing tank 41 is heated by a heating mechanism provided on the inner surface of the processing tank 41 (not shown), the surface of the object to be cleaned is quickly dried. is there.

  The cleaning of this embodiment is performed through the above-described steps.

  In the above embodiment, for example, a rinsing process in which water is washed after the washing process in the water washing process part, and a water replacement process part after the object to be cleaned is immersed in a rust preventive agent to perform a rust prevention process It is possible to add various treatments such as performing a water replacement treatment by the method.

It is a block diagram showing an example of the washing | cleaning apparatus which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 1st washing | cleaning processing part 11a, 11b Aqueous washing tank 20 Water substitution processing part 21 Water substitution liquid storage tank 23 Replacement water 27 Replacement water collection tank 28 Float switch 30 Post immersion washing treatment part 31 Non-aqueous washing tank 40 Steam washing / drying Processing section 41 Steam cleaning / vacuum processing tank

Claims (4)

A first cleaning step of immersing an object to be cleaned in an aqueous cleaning agent, operating an ultrasonic oscillator and immersing the object to be cleaned in an aqueous cleaning agent by ultrasonic cleaning ;
The object to be cleaned is immersed in a hydrophobic water displacement liquid after the first washing step, the water replacement step of replacing the water on the cleaning object surface water displacement liquid,
A second cleaning step of immersing the object to be cleaned with a hydrophobic non-aqueous cleaning agent after the water replacement step, ultrasonic cleaning and steam cleaning;
After the steam washing of the second cleaning process, it is configured to include a vacuum drying makes drying under reduced pressure the non-aqueous detergent cleaning object surface,
The treatment of the water replacement step is
A water replacement liquid storage tank for storing the water replacement liquid , a first pressure reducing pump for reducing the pressure of the water replacement liquid storage tank, and a first pressure-reducing valve for returning the reduced pressure of the water replacement liquid storage tank to atmospheric pressure; In a water replacement processing unit comprising:
To seal the water replacement liquid reservoir to be washed is immersed, a vacuum treatment for reducing the pressure of the water substitute liquid storage tank by the first pressure reducing pump, the water replaced by opening the first recovery valve a pressure recovery process for releasing the liquid reservoir to the atmospheric pressure, the water was separated from the cleaning object surface with an appropriate number of repeat Succoth, said water replacement fluid reservoir by water displacement liquid phase separation by specific gravity difference Collect below and
The steam cleaning process is
A single combined treatment tank for performing the steam cleaning and the vacuum drying; a third decompression pump for depressurizing the combined treatment tank; and a steam generation tank for generating a non-aqueous detergent vapor to be supplied to the combined treatment tank; In a steam cleaning / vacuum drying section comprising:
A non-aqueous cleaning agent vapor from the steam generation tank is allowed to flow into the combined treatment tank in a state where an object to be cleaned is arranged and sealed, and the surface of the object to be cleaned is exposed to the cleaning agent vapor. Cleaning method. The processing of the first cleaning step is
A water-based cleaning tank for storing the water-based cleaning agent; an ultrasonic oscillator for supplying ultrasonic waves to the water-based cleaning agent stored in the water-based cleaning tank; a second pressure reducing pump for depressurizing the water-based cleaning tank; In the first cleaning section comprising the second return pressure valve for returning the water-based cleaning tank that has been converted to atmospheric pressure,
In the state where the water-based cleaning tank in which the object to be cleaned is immersed is sealed and the ultrasonic oscillator is operated, the pressure reducing step of reducing the pressure inside the water-based cleaning tank by the second pressure reducing pump;
2. The return pressure step of opening the second return pressure valve and opening the aqueous cleaning tank to atmospheric pressure in a state where the ultrasonic oscillator is operated is performed by repeating the number of times as appropriate. Cleaning method. The process of the drying step is
A single combined treatment tank that performs steam cleaning and drying of the surface of the object to be cleaned, a third decompression pump that depressurizes the combined treatment tank, and steam generation that generates non-aqueous detergent vapor to be supplied to the combined treatment tank The cleaning method according to claim 1 or 2, wherein the steam cleaning / vacuum drying unit including the tank is continuously executed with the preceding steam cleaning processing. A first cleaning processing section for immersing the object to be cleaned in an aqueous cleaning agent, operating an ultrasonic oscillator and immersing the object to be cleaned in an aqueous cleaning agent by ultrasonic cleaning ;
A water replacement treatment unit that immerses the object to be cleaned that has been cleaned in the first cleaning processing unit in a hydrophobic water replacement liquid to replace the water on the surface of the object to be cleaned with the water replacement liquid
A second cleaning treatment section for subjecting the object subjected to the water replacement treatment to immersion ultrasonic cleaning and steam cleaning with a hydrophobic non-aqueous cleaning agent;
And a drying unit which Ru was vacuum dried under reduced pressure non-aqueous detergent cleaning object surface vapor-washed with the non-aqueous detergent,
The water replacement processing unit
A water displacement liquid storage tank for storing the water displacement liquid, a first recovery valve for returning a first vacuum pump for reducing the pressure of the water replacement fluid reservoir, depressurization has been the water substitute liquid storage tank to the atmospheric pressure And comprising
To seal the water replacement liquid reservoir to be washed is immersed, a vacuum treatment for reducing the pressure of the water substitute liquid storage tank by the first pressure reducing pump, the water replaced by opening the first recovery valve a pressure recovery process for releasing the liquid reservoir to the atmospheric pressure, the water was separated from the cleaning object surface with an appropriate number of repeat Succoth, said water replacement fluid reservoir by water displacement liquid phase separation by specific gravity difference Collect below and
The steam cleaning process
A single combined treatment tank for performing the steam cleaning and the vacuum drying; a third decompression pump for depressurizing the combined treatment tank; and a steam generation tank for generating a non-aqueous detergent vapor to be supplied to the combined treatment tank; In a steam cleaning / vacuum drying section comprising:
A non-aqueous cleaning agent vapor from the steam generation tank is allowed to flow into the combined treatment tank in a state where an object to be cleaned is arranged and sealed, and the surface of the object to be cleaned is exposed to the cleaning agent vapor. A cleaning device.

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