JP4639245B2 - 半導体素子とそれを用いた半導体装置 - Google Patents
半導体素子とそれを用いた半導体装置 Download PDFInfo
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- JP4639245B2 JP4639245B2 JP2008134697A JP2008134697A JP4639245B2 JP 4639245 B2 JP4639245 B2 JP 4639245B2 JP 2008134697 A JP2008134697 A JP 2008134697A JP 2008134697 A JP2008134697 A JP 2008134697A JP 4639245 B2 JP4639245 B2 JP 4639245B2
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- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
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- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
- H10W70/65—Shapes or dispositions of interconnections
- H10W70/654—Top-view layouts
- H10W70/655—Fan-out layouts
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- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
- H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
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- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07551—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
- H10W72/07554—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting changes in dispositions
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/29—Bond pads specially adapted therefor
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- H—ELECTRICITY
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
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- H—ELECTRICITY
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/59—Bond pads specially adapted therefor
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/921—Structures or relative sizes of bond pads
- H10W72/926—Multiple bond pads having different sizes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/931—Shapes of bond pads
- H10W72/932—Plan-view shape, i.e. in top view
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- H—ELECTRICITY
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/931—Shapes of bond pads
- H10W72/934—Cross-sectional shape, i.e. in side view
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
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- H—ELECTRICITY
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- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
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- Wire Bonding (AREA)
Description
この結果、半導体素子をワイヤー接続するべき場合とバンプ接続するべき場合とが並行して存在する際にも、実装方法に応じて2種類の半導体素子を用意することは不要となり、低コスト化に効果がある。以下には、それぞれの実装方法について示す。
以下に、前記実施形態の変形例を説明する。
1a 第1バンプ接続用電極
1b 第1ワイヤー接続用電極
1c 第1ダミー基板
1x 他の第1バンプ接続用電極
2 第2領域
2a 第2バンプ接続用電極
2b 第2ワイヤー接続用電極
2c 第2ダミー基板
3 第3領域
3a 第3バンプ接続用電極
3b 第3ワイヤー接続用電極
3c 第3ダミー電極
4 第4領域
4a 第4バンプ接続用電極
4b 第4ワイヤー接続用電極
4c 第4ダミー電極
10 半導体素子
11 基板
11a 主面
20、21 破線
32 実装基板
32a 実装基板
33 接続端子
33a 接続端子
34 外部接続端子
35 貫通電極
36 外部接続用バンプ
37 ワイヤー
38 封止樹脂
38a 封止樹脂
41 バンプ
42 端子位置
42 配線
51〜54 端子位置
61、62 軸
Claims (11)
- 集積回路を有する正方形の基板と、
前記集積回路に対して同じ接続機能を有する電極として、前記基板の同一主面上に、ワイヤー接続用電極及びバンプ接続用電極を備え、
前記主面をその対角線に沿って2つに分割する直線を定めるとき、
前記ワイヤー接続用電極と、前記バンプ接続用電極とは、前記直線を挟んで互いに反対側に位置することを特徴とする半導体素子。 - 請求項1において、
前記ワイヤー接続用電極は、前記主面の周縁部に配置され、
前記バンプ接続用電極は、前記主面において前記ワイヤー接続用電極よりも内側に配置されることを特徴とする半導体素子。 - 請求項1又は2において、
前記基板の前記主面を2行2列に分割する4つの領域を定めるとき、
前記ワイヤー接続用電極は、ある一つの前記領域に位置し、
前記バンプ接続用電極は、前記ある一つの領域に対して前記対角線を軸に線対称となる他の領域に位置することを特徴とする半導体素子。 - 請求項1又は2において、
前記基板の前記主面を2行2列に分割する4つの領域を定めるとき、
前記ワイヤー接続用電極は、ある一つの前記領域に位置し、
前記バンプ接続用電極は、前記基板を、前記対角線を軸に裏返したときに前記一つの領域に対応する配置となる領域に位置することを特徴とする半導体素子。 - 請求項1又は2において、
前記基板の前記主面を2行2列に分割する4つの領域を定め、時計回りに第1領域、第2領域、第3領域及び第4領域とするとき、
前記ワイヤー接続用電極及び前記バンプ接続用電極のペアを複数備え、
前記複数のペアとして、
前記第1領域に位置する前記ワイヤー接続用電極と前記第1領域に位置する前記バンプ接続用電極とからなるペアと、
前記第2領域に位置する前記バンプ接続用電極と前記第4領域に位置する前記ワイヤー接続用電極とからなるペアとが設けられていることを特徴とする半導体素子。 - 請求項1〜5のいずれか一つにおいて、
前記基板の少なくとも一つの角部にダミー電極を備えることを特徴とする半導体素子。 - 請求項6において、
前記ダミー電極は、前記バンプ接続用電極よりも大きいことを特徴とする半導体素子。 - 請求項6又は7において、
前記ダミー電極のうちの少なくとも一つに認識マークが付されていることを特徴とする半導体素子。 - 請求項1〜8のいずれか一つの半導体素子と、
前記半導体素子を実装する実装基板とを備え、
前記半導体素子は、前記主面を前記実装基板とは反対側に向けて実装され、
前記実装基板上における前記半導体素子の外側の領域に接続端子が複数設けられ、
前記半導体素子の前記ワイヤー接続用電極と、前記実装基板の前記接続端子とがワイヤーを介して接続されていることを特徴とする半導体装置。 - 請求項1〜8のいずれか一つの半導体素子と、
前記半導体素子を実装する実装基板とを備え、
前記半導体素子は、前記主面を前記実装基板に向けて実装され、
前記実装基板上における前記半導体素子の内側の領域に接続端子が複数設けられ、
前記半導体素子の前記バンプ接続用電極と、前記実装基板の前記接続端子とがバンプを介して接続されていることを特徴とする半導体装置。 - 請求項6〜8のいずれか一つの半導体素子と、
前記半導体素子を実装する実装基板とを備え、
前記半導体素子は、前記主面を前記実装基板に向けて実装され、
前記実装基板上における前記半導体素子の内側の領域に接続端子が複数設けられ、
前記半導体素子の前記バンプ接続用電極と、前記実装基板の前記接続端子とがバンプを介して接続され、
前記実装基板に設けられた放熱用電極と、前記半導体素子に設けられた前記ダミー電極とがバンプを介して接続されていることを特徴とする半導体装置。
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008134697A JP4639245B2 (ja) | 2008-05-22 | 2008-05-22 | 半導体素子とそれを用いた半導体装置 |
| US12/365,542 US20090289357A1 (en) | 2008-05-22 | 2009-02-04 | Semiconductor element and semiconductor device using the same |
| US13/152,095 US20110233772A1 (en) | 2008-05-22 | 2011-06-02 | Semiconductor element and semiconductor device using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008134697A JP4639245B2 (ja) | 2008-05-22 | 2008-05-22 | 半導体素子とそれを用いた半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009283718A JP2009283718A (ja) | 2009-12-03 |
| JP4639245B2 true JP4639245B2 (ja) | 2011-02-23 |
Family
ID=41341480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008134697A Expired - Fee Related JP4639245B2 (ja) | 2008-05-22 | 2008-05-22 | 半導体素子とそれを用いた半導体装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US20090289357A1 (ja) |
| JP (1) | JP4639245B2 (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6262573B2 (ja) | 2014-03-07 | 2018-01-17 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| JP6565895B2 (ja) * | 2016-12-26 | 2019-08-28 | 日亜化学工業株式会社 | 半導体装置用パッケージ及び半導体装置 |
| US10937707B2 (en) * | 2017-02-22 | 2021-03-02 | Kyocera Corporation | Wiring substrate, electronic device, and electronic module |
| CN110660747A (zh) * | 2018-06-28 | 2020-01-07 | 晟碟信息科技(上海)有限公司 | 包含加固角部支撑件的半导体装置 |
| JP7721275B2 (ja) * | 2021-01-22 | 2025-08-12 | キヤノン株式会社 | 半導体素子、機器、チップ |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2633249B2 (ja) * | 1987-04-27 | 1997-07-23 | 株式会社日立製作所 | 半導体装置およびその製造方法 |
| JPH0494732U (ja) * | 1991-01-11 | 1992-08-17 | ||
| JP3549714B2 (ja) * | 1997-09-11 | 2004-08-04 | 沖電気工業株式会社 | 半導体装置 |
| US6175152B1 (en) * | 1998-06-25 | 2001-01-16 | Citizen Watch Co., Ltd. | Semiconductor device |
| US6927491B1 (en) * | 1998-12-04 | 2005-08-09 | Nec Corporation | Back electrode type electronic part and electronic assembly with the same mounted on printed circuit board |
| US6399958B1 (en) * | 1998-12-09 | 2002-06-04 | Advanced Micro Devices, Inc. | Apparatus for visual inspection during device analysis |
| JP2000232127A (ja) * | 1999-02-09 | 2000-08-22 | Mitsubishi Electric Corp | 半導体装置 |
| US6511901B1 (en) * | 1999-11-05 | 2003-01-28 | Atmel Corporation | Metal redistribution layer having solderable pads and wire bondable pads |
| US6342399B1 (en) * | 1999-11-08 | 2002-01-29 | Agere Systems Guardian Corp. | Testing integrated circuits |
| JP3996315B2 (ja) * | 2000-02-21 | 2007-10-24 | 松下電器産業株式会社 | 半導体装置およびその製造方法 |
| JP3701542B2 (ja) * | 2000-05-10 | 2005-09-28 | シャープ株式会社 | 半導体装置およびその製造方法 |
| JP3922870B2 (ja) * | 2000-08-04 | 2007-05-30 | 東レエンジニアリング株式会社 | 実装方法 |
| JP2003007902A (ja) * | 2001-06-21 | 2003-01-10 | Shinko Electric Ind Co Ltd | 電子部品の実装基板及び実装構造 |
| US6528351B1 (en) * | 2001-09-24 | 2003-03-04 | Jigsaw Tek, Inc. | Integrated package and methods for making same |
| JP2003124255A (ja) * | 2001-10-17 | 2003-04-25 | Seiko Epson Corp | 半導体装置及びその製造方法、半導体チップ及び実装方法 |
| JP3890947B2 (ja) * | 2001-10-17 | 2007-03-07 | 松下電器産業株式会社 | 高周波半導体装置 |
| TW525281B (en) * | 2002-03-06 | 2003-03-21 | Advanced Semiconductor Eng | Wafer level chip scale package |
| US7579681B2 (en) * | 2002-06-11 | 2009-08-25 | Micron Technology, Inc. | Super high density module with integrated wafer level packages |
| JP3657246B2 (ja) * | 2002-07-29 | 2005-06-08 | Necエレクトロニクス株式会社 | 半導体装置 |
| US6960830B2 (en) * | 2002-10-31 | 2005-11-01 | Rohm Co., Ltd. | Semiconductor integrated circuit device with dummy bumps |
| JP3692353B2 (ja) * | 2002-12-19 | 2005-09-07 | 沖電気工業株式会社 | 半導体装置のアッセンブリ方法 |
| JP4150604B2 (ja) * | 2003-01-29 | 2008-09-17 | 日立マクセル株式会社 | 半導体装置 |
| JP2006269598A (ja) * | 2005-03-23 | 2006-10-05 | Fuji Photo Film Co Ltd | 固体撮像素子、固体撮像素子の製造方法 |
| US7554193B2 (en) * | 2005-08-16 | 2009-06-30 | Renesas Technology Corp. | Semiconductor device |
| JP2007053148A (ja) * | 2005-08-16 | 2007-03-01 | Renesas Technology Corp | 半導体モジュール |
| JP4850029B2 (ja) * | 2006-10-31 | 2012-01-11 | セイコーインスツル株式会社 | 半導体装置 |
-
2008
- 2008-05-22 JP JP2008134697A patent/JP4639245B2/ja not_active Expired - Fee Related
-
2009
- 2009-02-04 US US12/365,542 patent/US20090289357A1/en not_active Abandoned
-
2011
- 2011-06-02 US US13/152,095 patent/US20110233772A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US20090289357A1 (en) | 2009-11-26 |
| JP2009283718A (ja) | 2009-12-03 |
| US20110233772A1 (en) | 2011-09-29 |
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