JP4650259B2 - Device piece inspection device and its use - Google Patents

Description

  The present invention relates to an inspection apparatus or the like for processing a plurality of element pieces. The present invention is particularly useful in a capacitor element inspection apparatus for processing and / or laminating a capacitor element with high accuracy and efficiency. By the multilayer capacitor manufacturing apparatus, the solid electrolytic capacitor manufacturing apparatus, and these methods, Includes manufactured capacitors.

Recently, electronic devices have been made smaller and higher in frequency, and electronic components used therefor are also required to be reduced in size. In general, however, the demand for miniaturization is met by a laminated chip shape.
For example, the example shown in FIG. 8 is a cross-sectional view of a chip-shaped multilayer solid electrolytic capacitor in which a plurality of capacitor elements are stacked. Capacitor elements 6 are arranged in the exterior resin 9 in the same direction. The capacitor element 6 is formed by forming an oxide film on the base material 1 to form the cathode portion 3 and the anode portion 1 (metal constituting the base material), both of which are insulated by the masking layer 5. The cathode part 3 is fixed with a conductive adhesive, and is fixed with the cathode lead part 8 with a conductive adhesive. The anode part 1 of the capacitor element 6 is resistance-welded at the fixing part 4 with the anode lead part 7. The whole is sealed with an exterior resin 9 such as an epoxy resin.
An example (cross-sectional view) of the capacitor element 6 of FIG. 8 is shown in FIG. A dielectric film 62 is formed on the surface of the substrate 61, and this dielectric film 62 is formed, for example, by subjecting a porous metal foil 61 to a chemical conversion treatment. Further, an insulating material masking 63 is provided on this surface, and a cathode layer containing a solid electrolyte 64 is provided on the side opposite to the base 61 serving as an anode.

  For example, as shown in FIG. 7, such a capacitor element is formed by fixing a raw material base material 21 for forming a capacitor element to the lower edge of a support 22 (hereinafter also referred to as “temporary bar”). The base material 21 is suspended in a row, and the base material 21 is immersed in various treatment liquids 24 and subjected to various treatments. The substrate 21 may be provided with the masking 63 as described above in order to prevent the treatment liquid from soaking into the region that should not be treated with the treatment liquid. Can be performed in a state of being fixed to the support. The capacitor element manufactured by performing the processing in this way is finally removed from the support 22 and laminated on a lead frame (13 in FIG. 8) or the like as necessary to form a multilayer capacitor.

  A base material 22 for forming the capacitor element or an intermediate product of the capacitor element (hereinafter referred to as “capacitor element piece” together) 21 is fixed in a state in which a large number of them are suspended in a row. Since various processes are performed in this state, the accuracy of the fixed position of the element piece affects the quality of the product. For example, if the distance L from the tip of the temporary bar to the first element piece side edge or the distance between the element pieces exceeds the allowable range, a misalignment between the lead frame or other elements occurs in the stacking process. In the subsequent sealing step, an unsealed portion is generated, and the product yield is reduced. Therefore, it is necessary to remove from the production line those whose element piece fixing accuracy and the like are outside the allowable range, and inspection means such as position accuracy are required. Further, variations in the masking position and width on the element piece also affect the quality of the product.

Conventionally, for a solid electrolytic capacitor, a method of simply inspecting the solid state of a solid electrolyte from the outside of the case is known (Patent Document 1), but a system for inspecting a fixed state of an element piece or the like is not known.
JP 2001-85062 A

  The present invention relates to an element piece for processing an element piece, for example, a member in which a large number of rectangular metal foils are suspended in a row on a support while maintaining the fixing position of the element piece with high accuracy. An object of the present invention is to provide an apparatus for efficiently inspecting the accuracy of a fixed position of a capacitor, an apparatus for inspecting the accuracy of fixing a large number of capacitor element pieces fixed to a temporary bar in the manufacturing process of a solid electrolytic capacitor element, and electrical characteristics An object of the present invention is to provide a capacitor element manufacturing method and manufacturing apparatus excellent in the above, and a capacitor manufactured by this method, particularly a multilayer capacitor.

The present invention relates to an element piece processing method described below, an inspection apparatus used therefor, a method and apparatus for manufacturing a capacitor element as an application thereof, and a capacitor manufactured by the method, particularly a multilayer capacitor.
1. An inspection apparatus used for processing an element piece in which a plurality of element pieces are fixed in a row on a support and one or more processes are sequentially performed on the element piece, and the element piece is supported prior to any of the processes. An element piece inspection apparatus comprising: means for measuring a position on a body; and determination means for determining pass / fail by comparing a measured value with a predetermined reference value.
2. The means for measuring the position of the element piece on the support includes imaging means for measuring the fixed position of the element piece closest to the tip of the support and imaging means for measuring the interval between the element pieces. The element piece inspection apparatus according to 1.
3. 3. The element piece inspection apparatus according to 2 above, wherein the imaging means for measuring the interval between the element pieces simultaneously photographs a plurality of element pieces on the support.
4). And further comprising a means for moving the support relative to the image pickup means along the element piece row direction and a sensor for detecting the progress of the support and the element piece row, wherein the image pickup means is responsive to information from the sensor. 4. The element piece inspection apparatus according to any one of 1 to 3, wherein the shutter is operated to photograph a fixed position of the element piece on the support.
5. 5. The element piece inspection apparatus according to 4, wherein the determination unit further has a function of processing the imaging data from the imaging unit to determine whether the processing already performed for each element piece is good or bad.
6). 6. The element piece inspection apparatus according to 5 above, comprising control means for adjusting the position of the support in the subsequent process and / or eliminating defective products according to the determination result.
7). The element piece inspection apparatus according to any one of 1 to 6 is used for at least one of inspection of a raw material base material for forming a capacitor element and inspection of a capacitor element piece that is an intermediate product of the capacitor element. Capacitor element piece inspection apparatus.
8). An apparatus for inspecting a plurality of capacitor element pieces fixed to a support so that a part of the capacitor element protrudes from a support edge, the position of the capacitor element pieces, and the fixed number of capacitor element pieces on the support 8. The capacitor element inspection apparatus according to 7, wherein at least one of a protruding length and a protruding angle of the capacitor element piece from the edge of the support is measured.
9. 9. A multilayer capacitor manufacturing apparatus comprising the capacitor element piece inspection apparatus according to 7 or 8, wherein alignment is performed at the time of stacking based on the inspection result.
10. 10. A multilayer capacitor manufactured using the manufacturing apparatus according to 9.
11. The element piece is subjected to at least one treatment of masking, conversion, formation of a conductive polymer layer, formation of a conductive paste layer, and separation of the element from the support. 7 or 8 further measuring at least one of a masking position and a masking width, a chemical layer forming position and a forming state, a conductive polymer layer forming position and a forming state, a conductive paste layer forming position and a conductive paste layer forming state. 2. Capacitor element piece inspection apparatus according to 1.
12 A solid electrolytic capacitor manufacturing apparatus including the capacitor element piece inspection apparatus according to 11 above.
13. A solid including a control device for accumulating defective product data detected by the capacitor element piece inspection device as described in 11 above, displaying an alarm when the set value is exceeded, and stopping processing of at least the process that causes it Electrolytic capacitor manufacturing equipment.
14 14. The solid electrolytic capacitor manufacturing apparatus according to 13, wherein the set value is the number of consecutive occurrences of defective products and / or the number of defective products generated with respect to a predetermined number of supports.
15. 15. The solid electrolytic capacitor manufacturing apparatus according to 13 or 14, wherein the control device includes a failure factor analysis mechanism and displays the failure factor on the alarm display device.
16. The solid electrolytic capacitor manufactured using the manufacturing apparatus of any one of said 12-15.

  INDUSTRIAL APPLICABILITY The inspection apparatus according to the present invention is effective in uniforming the processing for each element piece in the processing method for processing element pieces in a lump. In particular, in the manufacture of capacitors, the fixing accuracy of a large number of capacitor element pieces fixed to a support can be inspected during the manufacturing process. Therefore, the product quality of the capacitor can be improved by removing defective products from the production line.

  The inspection apparatus (inspection system) according to the present invention is a device element process in which a plurality of element pieces are fixed in a row on the edge of a support and one or more processes are sequentially performed on the element pieces. It can be used regardless of the material and dimensions of the piece, and the type of treatment, but it is particularly useful as a device for inspecting the fixing position of each element piece on the support for a support in which capacitor element pieces are fixed in a row. . Accordingly, the processing of the capacitor element piece will be described below as an example. However, the element piece to be an object of the inspection apparatus of the present invention is not limited to the capacitor element piece, and may be an inspection apparatus in the processing of other element pieces. Can be used. In the present invention, an “element piece” includes a relatively small-sized article or member that is a target of some collective processing, and whether or not it is referred to as an “element”, Any material can be used as long as it can become a part of an electrical or mechanical mechanism or an article used alone after processing. For example, an electrical element and its raw materials and intermediate products, and a mechanical element and its raw materials and intermediate products are included. In the present invention, the “capacitor element piece” includes a raw material base material for forming the capacitor element or an intermediate product of the capacitor element as described above.

Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.
FIG. 1 shows an example of a measurement object to which the inspection apparatus of the present invention is applied. The example shown in the figure is a member (referred to as a member to be measured 40 in FIG. 2 and thereafter) in which a large number of capacitor element pieces 21 are fixed to the temporary bar 22 and the large number of element pieces 21 are suspended in a row. It is the tip part. Both ends of the temporary bar 22 (only one end is shown in the figure) have an ear, and the element piece 21 is fixed to the lower edge of the temporary river 22 at a certain distance from the tip of the ear. The element piece 21 is provided with a masking 23. The element piece 21 is fixed to the temporary bar 22 at a portion above the masking 23 with a slight distance, and a large number of element pieces 21 are fixed in a row. It is formed in a state of hanging with a gap.

  A configuration example of the inspection apparatus of the present invention for inspecting the member to be measured is shown in FIG. As shown in the figure, the inspection apparatus of the present invention includes a means 31 for measuring the fixed position of the element piece, a determination means for performing arithmetic processing based on the photographed image and comparing the measured value with a predetermined reference value to determine pass / fail. 32. The position of the element piece on the support may be one in which the entire support including the entire element piece row is measured by one fixed position measuring means (for example, one of the units 30A and 30C). A plurality of fixed position measuring means 31 (both units 30A and 30C or a similar additional unit) may be used to measure each portion. In FIG. 2, two similar units 30A and 30C are illustrated.

In the present invention, it is preferable to further include means for moving the support relative to the imaging means along the element row direction. For example, in the example shown in FIG. 2, the support plate 40 is moved in the direction of the arrow in the drawing, that is, from the right side to the left side in the drawing. The moving means (not shown) may be a means for gripping and carrying the support plate 40, or a device for moving the support plate 40 on a roller, a conveyor, a rail or the like. The support plate 40 may be fixed and the fixed position measuring means 31 may be moved.
The inspection apparatus of the present invention preferably includes a sensor 33 for detecting the progress of the member to be measured, and a means (trigger means) 34 for operating the fixed position measuring means 31 in accordance with information from the sensor. In the illustrated example of the apparatus, the sensor 33 and the trigger means 34 are integrally formed.

  The image pickup means 31 may be anything that can generally measure changes in the outer shape, reflectivity, etc. of an article (hereinafter also simply referred to as a camera; the same applies to FIG. 1). A camera having an image sensor such as a CCD is preferable, and a commercially available still camera, video camera, or the like can be used.

In the above apparatus configuration, for example, for the member to be measured shown in FIG. 1, the fixed position of the first element piece 21 fixed to the temporary bar 22, that is, the distance L from the tip of the temporary bar to the side edge of the first element piece 21. Measured. Specifically, in the apparatus example of FIG. 2, when the member to be measured 40 enters the shooting position, the sensor 33 of the measurement unit 30 detects the entry position and activates the trigger means 34, and the camera 31 temporarily operates. The tip of the bar 22 is photographed. Similarly, the distance between the element pieces 21 can also be measured.
As described above, the element pieces at different positions of the support are preferably measured by a plurality of fixed position measuring means. When the support body dimension is larger than the element piece dimension, this configuration enables accurate measurement at any element piece position.
For example, the measurement unit 30A measures the fixed position of the element piece closest to the support tip, and the measurement unit 30C measures the distance between the element pieces. The measurement unit 30A obtains the fixed position (L) of the element piece closest to the tip of the support, and the measurement unit 30C measures the distance (dn) between the nth and (n + 1) th element pieces, so that (n + 1 The position of the) th element piece can be obtained by L + (sum from d1 to dn) + (element piece width × n). In FIG. 2, the measurement unit 30A is provided on the back side as viewed from the element piece fixing side (in this aspect, it also serves as an inspection mechanism for masking on the back side). However, a unit for inspecting the tip fixing position is provided separately. It may be provided on the front side.

  The determination unit 32 includes a program that calculates the distance between the objects based on the captured image. For such measurement, given the distance between the camera 31 and the member to be measured 40 and data relating to the optical system used in the camera, the distance between them may be calculated from the position of the object on the captured image. Further, when the camera 31 and the member to be measured 40 move relatively as described above, the time and moving speed from the time when one object enters before the camera to the time when another object enters. It may be calculated from As shown in FIG. 2, in a preferred embodiment, the inspection apparatus of the present invention may include a monitor 35 that displays a captured image and a determination result, and a unit 36 that controls a measurement system formed by these. It is also possible to input conditions such as measurement using the monitor 35 and to judge or correct the photographing result. For example, the shooting position may be adjusted based on the monitor image.

  The determination means 35 and the control means 36 may be a computer. Note that a backlight 37 may be provided at the shooting position of the camera 31. Further, it is preferable that two element pieces can be inspected simultaneously in order to shorten the calculation processing time.

  The number and position of the cameras 31 depend on the required accuracy and the field of view that can be accurately captured by the camera 31. For example, when shooting the distance L from the front end of the support 22 to the first element piece 21, if the shooting range of one camera is narrow, as shown in FIG. The fixed position (L) of the element piece closest to the tip of the support may be obtained from the total value (however, only one camera 31 is shown for each measurement unit in FIG. 2).

The determination means 32 can store a program for comparing the reference value and the measured value, and determining that a difference is within a permissible range as a non-defective product and that a difference outside the permissible range is a defective product. These programs can be general programs.
The allowable range with respect to the reference value can be appropriately determined according to the specifications of each product. For example, for a capacitor element using a rectangular element piece having a foil thickness of about 40 to 300 μm, a width of about 1 to 50 mm and a length of about 1 to 50 mm as a flat element unit, ± 0 with respect to a reference value .15 mm is allowed, and a product outside this range can be determined as a defective product.

  In the example of the apparatus shown in FIGS. 2 and 3, the measurement unit 30 provided on the production line and a means 50 for removing defective products from the production line are provided in front of the measurement unit 30 on the production line. Based on this, the member to be measured 40 determined to be defective is excluded from the storage tray 51 outside the line. On the other hand, the member to be measured that is determined to be non-defective passes through the exclusion means 50 and is sent to the semi-finished product storage tray 52 as it is.

  According to the inspection apparatus of the present invention, since the position of the element piece fixed to each of the plurality of support plates can be measured, position control in a subsequent process can be performed using these data. For example, when processing an element piece using a set of support plates prior to capacitor element processing, the leading position (L above) on the kth support plate is shifted by +0.1 mm by the inspection apparatus of the present invention. If the leading position (L) of the mth support plate is shifted by −0.1 mm and the qth support plate is shifted by +3.0 mm, the kth support plate is When processing, the head position is shifted by -0.1 mm, when the m-th support plate is processed, the head position is shifted by +0.1 mm, and the q-th support plate is discarded. Such a mechanism is particularly useful in a lamination process in which capacitor elements are laminated.

  The inspection apparatus of the present invention is not limited to the distance L (leading distance L) from the tip of the temporary bar to the first element piece, but based on the photographed image, the fixed pitch W of the element piece, the protruding length T of the element piece, the element The quality of the mask can be determined by measuring the masking position H and masking width M of the one surface, the fixed number S of element pieces, and the like. Other important elements in the capacitor to be manufactured, for example, in the case of a solid electrolytic capacitor, the formation position and formation state of the formation layer, the formation position and formation state of the conductive polymer layer, the formation position of the conductive paste layer and the formation of the conductive paste layer The state may be measured.

  In addition, if the error in the fixed pitch of the element pieces is large, as in the case of the head distance L of the element pieces, a positional deviation from the lead frame occurs in the stacking process, which causes an unsealed portion, resulting in a product yield. Therefore, the inspection apparatus (inspection system) of the present invention can improve the product yield by inspecting the accuracy of the fixed pitch during the manufacturing process and eliminating defective products.

  For example, as shown in FIG. 4, for a pair of element pieces 21 fixed in a row, a distance W1 from the side end of one element piece to the side end (same side) of the other element piece based on the captured image. , W2 is measured. The fixed pitch of the element pieces is detected by the distances W1 and W2. Further, the lengths T1 and T2 of the element pieces are measured based on the photographed image, and the accuracy of the element piece length is detected for the plurality of element pieces 21.

  Similarly to the head distance L and the fixed pitch W of the element piece 21, the masking 23 formed on the surface of the element piece 21 is based on the photographed image, the distance H1 from the temporary bar lower end G to the masking lower end, and the lower end G A distance H2 from the upper end of the masking to the upper end of the masking is measured, and the position of the masking 23 and the masking width (W = H1-H2) are detected by the measured distances H1 and H2.

  The position H and width W of the masking 23 can be similarly detected on the front and back of the masking. Further, as shown in FIG. 5, when the masking 23 is formed in two stages (see FIG. 2), the upper masking 23 and the lower masking 23 are the same as in FIG. By measuring the distance H1 from G to the lower end of masking and the distance H2 from the upper end of masking, the position and width of each masking can be detected.

  Since the capacitance depends on the masking position, it is important to detect the masking position and width. In addition, when the masking width is insufficient or there is a masking defect, the applied voltage is insufficient during the chemical conversion treatment, the formation of the chemical conversion film is hindered, the electrical characteristics are significantly deteriorated, and the product yield is reduced. With this inspection apparatus (inspection system), it is possible to improve the product yield by inspecting the masking processing accuracy during the manufacturing process and eliminating defective products.

  Furthermore, since the difference in the protruding length T of the element pieces and the shortage of the number of element pieces also cause the capacitance to be changed, the length of the element pieces and the number of element pieces are reduced during the manufacturing process by the inspection apparatus of the present invention. By inspecting and eliminating defective products, product yield can be improved.

The additional inspection described above may be performed by image diagnosis using the camera as the position measuring unit, or a dedicated camera may be used as shown in the apparatus example of FIG. For example, in FIG. 3, three measurement units 30 </ b> A, 30 </ b> B, and 30 </ b> C are used in accordance with the travel position of the member to be measured. A measurement unit 30A for photographing the central portion and a measurement unit 30C for measuring the distance between the element pieces are installed, and a measurement unit 30B is also installed for the member 40 to be measured in the production line. It is possible to perform image diagnosis of various characteristics of the piece. However, any of them may be used for image diagnosis, and one camera may have a plurality of functions. Further, in FIG. 3, the units B and C are located on one side when viewed from the element piece, but either of them may be located on the opposite side across the element piece. Thereby, the front and back of an element piece can be test | inspected.
The image diagnosis can be performed by a known method. For example, a masking part or the like may be extracted from a change in color or luminance in the image and compared with a design value.

According to the present invention, a solid electrolytic capacitor manufacturing apparatus including the above-described capacitor element piece inspection apparatus is provided.
As described above, this manufacturing apparatus can perform position control in the subsequent process based on information from the capacitor element piece inspection apparatus, but accumulates and sets defective product data detected by the capacitor element piece inspection apparatus. A control device may be included for displaying an alarm when the value is exceeded and stopping processing of at least the process that causes the alarm.
Here, the set value may be the number of consecutive occurrences of defective products and / or the number of defective products generated with respect to a predetermined number of supports. The control device preferably includes a failure factor analysis mechanism, and displays the failure factor on the alarm display device. For example, when the fixed number of element pieces with respect to the support plate is insufficient for a predetermined number of times (for example, four times), a message indicating that and / or the necessity of inspection in the process is displayed. The operator looks at the above display and inspects the fixing device (or the welding device when fixing is performed by welding). For example, if the fixing is done by welding, check the welding ring, and if it is dirty, clean or replace it. If there is no dirt, check and replace the foil guide that supplies the original foil of the element piece to the welding apparatus. Further, when a defective product is frequently generated (for example, the defective product rate is 10% or more) with a predetermined number of supports (for example, 100 sheets), the same alarm display or the like is performed.
Further, when there is a defect in masking, according to the present invention, by measuring the H1 and H2 values in FIGS. 4 and 5, respectively, (1) the line width is narrow for each of the first and second masking, (2 It is possible to analyze and identify the cause of defects such as () wide line width, (3) unstable line width, (4) masking position change, etc.
If the manufacturing process is continuous, the entire process may be stopped at an appropriate timing for each individual process, not just the problematic process.
In the manufacturing apparatus of the present invention, the inspection apparatus may be provided at any position in the manufacturing process, and inspection may be performed at a plurality of locations between the processes. Further, control of accumulation of defective data, analysis of defective data, alarm display, and the like may be performed by the control device 36, or a control device different from the control of the measurement system may be provided.

  The inspection apparatus according to the present invention includes, for example, a camera that captures a fixed position of an element piece, a sensor that detects the progress of a member to be measured, a means that operates a shutter of the camera in accordance with the operation of the sensor, and an imaged element A measurement unit is formed by a determination means for comparing the measured value at the fixed position of the piece with a reference value to determine pass / fail and a monitor for displaying a photographed image and a determination result. It is possible to measure the distance to the element piece, the fixed pitch of the element piece, the protruding length of the element piece, the masking position and masking width on the surface of the element piece, and the fixed number of the element piece. Can be performed.

Further, in the inspection apparatus of the present invention, the measurement unit is installed at a position where the tip portion of the member to be measured is photographed and a position where the central portion of the member to be measured is photographed, and a plurality of positions are set according to the progress position of the member to be measured Since a configuration in which a plurality of measurement units for photographing the member to be measured can be employed, a more accurate inspection result can be obtained.
In addition, according to the manufacturing apparatus of the present invention, since defective products can be accurately eliminated and the occurrence of defective products can be eliminated at an early stage, the yield of non-defective products can be improved with high accuracy. Capacitors can be manufactured efficiently.
Therefore, the inspection method and the manufacturing apparatus of the present invention can be used for various products such as multilayer capacitors and solid electrolytic capacitors, in which the processing position in the element piece and the element piece fixing position on the support greatly affect the characteristics of the final product. Useful for manufacturing.

The conceptual diagram which shows the state of the element piece fixed to the support body. The conceptual diagram which shows the example of an apparatus of this invention. The conceptual diagram which shows the other example of an apparatus of this invention. The conceptual diagram which shows the fixed position and masking state of an element piece. The conceptual diagram which shows the fixed position of an element piece, and a two-stage masking state. The schematic sectional drawing of a solid electrolytic capacitor. Explanatory drawing which shows the chemical conversion treatment state of the element piece fixed to the support body. 1 is a schematic cross-sectional view of a multilayer capacitor.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base material 2 Oxide film 3 Cathode part 3
4 Fixing part 5 Masking layer 6 Capacitor element 7 Anode lead part 7
8 Cathode lead portion 9 Exterior resin 21-Element piece 22-Temporary bar (support)
23-Masking 24-Chemical conversion solution 30-Measuring unit 31-Camera 32-Control means (determination means)
33-sensor 34-trigger means 35-monitor 36-control means 37-backlight 38-alarm display device 40-measured member 50-exclusion means 51-defective product tray 52-semi-product storage tray 61-substrate (element piece) )
62-dielectric coating H1, H2-masking distance G-temporary bar lower end L-element piece leading distance T1, T2-element piece projection length W1, W2-fixed pitch

Claims (12)

An inspection apparatus used for processing an element piece in which a plurality of element pieces are fixed in a row on a support and one or more processes are sequentially performed on the element piece, and the element piece is supported prior to any of the processes. A measuring means having an imaging means for measuring a fixed position of an element piece closest to a support tip for measuring a position on the body and an imaging means for measuring a distance between the element pieces; Determining means for comparing the predetermined reference value with a predetermined reference value, means for moving the support relative to the imaging means along the direction of the element strip, and the progress of the support and the element strip The image sensing means operates the shutter in accordance with information from the sensor to photograph the fixed position of the element piece on the support, and the determination means processes the image data from the image sensing means. The quality of the processing already performed on the element piece Has a function of determining, determination result, the element piece testing apparatus including control means for adjusting the support position in the later step. The element piece inspection apparatus according to claim 1 , wherein an imaging means for measuring a distance between the element pieces simultaneously photographs a plurality of element pieces on the support. The element piece inspection apparatus according to claim 1 or 2 is used for at least one of inspection of a raw material base material for forming a capacitor element and inspection of a capacitor element piece that is an intermediate product of the capacitor element. Capacitor element piece inspection device. An apparatus for inspecting a plurality of capacitor element pieces fixed to a support so that a part of the capacitor element protrudes from a support edge, the position of the capacitor element pieces, and the fixed number of capacitor element pieces on the support The capacitor element inspection apparatus according to claim 3 , wherein at least one of a protruding length and a protruding angle of the capacitor element piece from the edge of the support is measured. A multilayer capacitor manufacturing apparatus comprising the capacitor element piece inspection apparatus according to claim 3 or 4 , wherein alignment is performed at the time of stacking based on the inspection result. A multilayer capacitor manufactured using the manufacturing apparatus according to claim 5 . The element piece is subjected to at least one treatment of masking, chemical conversion, formation of a conductive polymer layer, formation of a conductive paste layer, and separation of the element from the support. 4. The method according to claim 3 , wherein at least one of a masking position and a masking width, a chemical layer forming position and a forming state, a conductive polymer layer forming position and a forming state, a conductive paste layer forming position and a conductive paste layer forming state is further measured. 4. The capacitor element piece inspection apparatus according to 4. A solid electrolytic capacitor manufacturing apparatus including the capacitor element piece inspection apparatus according to claim 7 . 8. A control device for accumulating defective product data detected by the capacitor element piece inspection device according to claim 7 , displaying an alarm when a set value is exceeded, and at least stopping the processing of the process that causes it. Solid electrolytic capacitor manufacturing equipment. The solid electrolytic capacitor manufacturing apparatus according to claim 9 , wherein the set value is the number of consecutive occurrences of defective products and / or the number of defective products generated relative to a predetermined number of supports. The solid electrolytic capacitor manufacturing apparatus according to claim 9 or 10 , wherein the control device includes a failure factor analysis mechanism and displays the failure factor on the alarm display device. The solid electrolytic capacitor manufactured using the manufacturing apparatus of any one of Claims 8-11 .

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