JP4656120B2 - Barrel for vapor deposition coating equipment - Google Patents

Description

  The present invention relates to a barrel for housing a part to be coated used in a vapor deposition coating apparatus used for forming a coating film when manufacturing various electric / electronic parts and the like.

  Conventionally, a barrel 1 as shown in FIG. 7 is known as the barrel for the above-described vapor deposition coating apparatus (for example, JP-A-7-70738). The conventional barrel 1 shown in FIG. 7 is provided with a plurality of cylindrical bodies 2 having a circular cross section and a cylindrical wall surface formed of a metal mesh material, on a substantially circumference around the rotation shaft 3. Yes. In FIG. 7, 4 is a cylinder receiving plate, and 5 is a stopper plate. As a procedure for forming a coating film on the surface of a part to be coated such as an iron core using such a barrel 1, first, the part to be coated 6 is accommodated in a cylindrical body 2 provided in the barrel 1 (see FIG. 8). . In this case, as shown in FIG. 8, the part to be coated 6 is introduced from the opening 2 a and is stored inside the cylinder 2. Next, the barrel 1 is set in a vacuum vapor deposition apparatus 8 shown in FIG. On the other hand, as shown in FIG. 9, the evaporation tubes E and F in which the raw materials A and B are set are attached to the introduction tubes G and H, respectively. Next, the vacuum pump I is evacuated to a predetermined pressure, the inside of the vapor deposition tank J is evacuated, and the raw materials A and B are heated by the heaters K and L, while the rotating shaft 3 of the barrel 1 is moved by the motor M. The cylinder 2 (see FIG. 7) provided in the barrel 1 is driven to rotate about the rotation shaft 3. Then, the vapor of the raw material is introduced into the vapor deposition tank J via the introduction pipes G and H, and the raw materials A and B are vapor deposited (deposited) on the surface of the part to be coated housed in the cylinder. Then, along with the deposition of the raw materials A and B, the vapor deposition tank J is heated to polymerize the deposited raw materials A and B, thereby forming a coating film on the surface of the part to be coated 6.

Here, as shown in the schematic cross-sectional view of the cylinder 2 in FIG. 10, the part to be coated 6 in the cylinder 2 provided in the conventional barrel 1 is agitated as the cylinder 2 rotates, A coating film is formed on the entire surface of the part to be coated 6.
JP-A-7-70738 JP-A-8-13136

  However, there are two problems with the conventional barrel described above, and improvements are desired.

  The first problem is that the cylinder wall of the barrel body of the barrel is conventionally made of a metal mesh material such as iron, so the parts to be coated are ceramic, sintered metal (ferrite, etc.) In the case of a material that is inferior in impact resistance such as glass, or in the case of a metal part that has a caulking part, the part to be coated is removed when the cylinder is rotated around the rotation axis. There was a problem that it was agitated and collided with the cylinder wall of the body of the cylinder to cause cracks, chipping, or separation of the caulking part. When the barrel is rotated quickly with the aim of making the thickness more uniform, the problem that this cracking, chipping, or separation of the caulking portion occurs is remarkable.

  As a second problem, as shown in FIG. 7, in a conventional barrel in which a plurality of cylinders having a long length in the longitudinal direction are arranged on a substantially circumference around the rotation axis of the barrel. When the size of the part to be coated is extremely fine, for example, the maximum length is about 0.1 to 2 mm, the length of the cylinder is long, so that the part to be coated is uniformly distributed in the cylinder. Thus, there is a problem that it is difficult to throw in or that the parts to be coated are easily scattered when taken out.

  The present invention has been made in view of the second problem among the above circumstances. That is, when the size of the part to be coated is very fine, for example, about 0.1 to 2 mm at the maximum length, the processing of the part to be coated that is processed at a time in a vacuum deposition apparatus that is a limited space Provided is a barrel for a vapor deposition coating apparatus having a structure in which the amount to be coated is small, the coated component can be introduced so as to be uniformly distributed in the cylinder, and the coated component is difficult to scatter when the coated component is taken out. The purpose is that.

  The barrel for a vapor deposition coating apparatus according to the first aspect of the present invention includes a cylindrical body that accommodates a part to be coated, and a rotary shaft that rotates the cylindrical body. A barrel in which a plurality of cylinders having a longitudinal direction parallel to the rotation axis is disposed, and the cylinder is stored in a vapor deposition tank in which a part to be coated is housed in the cylinder and is in a vacuum state. In a barrel used in a vapor deposition coating apparatus for forming a coating film by depositing a raw material material for forming a coating film on the surface of the part to be coated while rotating, the rotation axis is the center. Each of the plurality of cylinders arranged on a substantially circumference is formed by a combination of a plurality of small cylinders that are divided in a direction parallel to the rotation axis and are separable. It is a vapor deposition coating apparatus for a barrel you are.

  In the barrel for the vapor deposition coating apparatus according to the first aspect of the present invention, each of the plurality of cylinders arranged on a substantially circumference centered on the rotation axis of the barrel is divided in a direction parallel to the rotation axis. It is formed by a combination of a plurality of small cylinders that can be separated. Thus, by making it a small cylinder, it is possible to throw the coated parts so as to be evenly distributed in the cylindrical body, and it becomes difficult for the coated parts to scatter when the coated parts are taken out. In addition to simply shortening the length of the cylinder, it is divided in a direction parallel to the rotation axis of the barrel and is a combination of a plurality of small cylinders that are separable. Since it replaces the cylindrical body, there is an advantage that the degree of reducing the processing amount of the part to be coated processed in the vacuum deposition apparatus is small.

  According to the barrel for the vapor deposition coating apparatus of the invention according to claim 1, even if the size of the part to be coated is extremely fine, the coating is performed at once in the vacuum vapor deposition apparatus which is a limited space. The effect of reducing the amount of processing of the parts is small, the coated parts can be introduced so as to be evenly distributed in the cylinder, and the coated parts are less likely to be scattered when the coated parts are taken out from the cylinder. Play.

  Embodiments of the present invention will be described below. In addition, regarding the member of the same name, the same code | symbol as the code | symbol used by the above-mentioned prior art is used also in description of embodiment of this invention.

  The barrel according to the first aspect of the present invention relates to a barrel for housing a part to be coated, which is used in the vacuum deposition apparatus 8 as shown in FIG. 9 described in the prior art. (In the vacuum evaporation apparatus 8 of FIG. 9, the detailed structure of the barrel 1 is abbreviate | omitted.) And the barrel in invention of Claim 1 is the same as the conventional barrel 1 as shown in FIG. A cylindrical body 2 that houses the component to be coated and a rotating shaft 3 that rotates the cylindrical body 2 are provided. Further, in the barrel according to the present invention, like the conventional barrel, the component to be coated is accommodated in a cylindrical body provided in the barrel 1 with the inside of the vapor deposition tank J of the vacuum vapor deposition apparatus 8 as shown in FIG. Then, while rotating the entire barrel 1 around the rotation shaft 3 by the motor M, the raw materials A and B for forming a coating film are formed on the surface of the part to be coated (only one raw material or three or more raw materials). It may be the case of a material) and is a barrel used to vaporize and polymerize it to form a coating film. The raw material is not particularly limited, and examples thereof include various polyimide resin raw materials (for example, acid anhydrides and diamines) and polyurea resin raw materials.

  Next, embodiments will be described in order.

  First, the 1st illustration form of the cylinder 2 with which the barrel relevant to this invention is equipped is demonstrated. In this first exemplary embodiment, the cylindrical wall of the barrel 2b of the cylindrical body 2 (shown in side view in FIG. 1) provided in the barrel is made of a resin material that can withstand the temperature at which the raw material for coating film formation is polymerized. It is made of a net or woven fabric. As described above, when the material forming the cylindrical wall is not a conventional metal but a resin material, the part to be coated 6 is agitated when the cylindrical body 2 provided in the barrel is rotated around the rotation axis. Thus, even if it collides with the cylinder wall of the barrel part of the cylinder, cracks, chipping, or separation of the caulking part is less likely to occur. This effect is particularly noticeable when the part to be coated 6 is formed of a sintered metal such as ceramic or ferrite, or a material with poor impact resistance such as glass, or a metal part that has a crimped portion. . The material for forming the net or woven fabric may be any material that can withstand the temperature at which the raw material for forming the coating film is polymerized. The temperature at which the raw material for forming the coating film is polymerized does not have to be a temperature required for complete reaction completion, and may be any temperature at which the coating film is formed in the vapor deposition tank of the vacuum vapor deposition apparatus. This is because the part to be coated on which the coating film has been formed can be taken out of the vapor deposition tank and additionally subjected to further necessary heating. Furthermore, when forming the cylindrical wall of the body of the cylindrical body, if it is formed of woven fabric, it is easy to make the cylindrical wall with a smaller gap than in the case of the net, and the size of the part to be coated is small For example, it is possible to easily produce a barrel in which components do not fall even when the maximum length is about 0.1 to 2 mm. If at least one of aramid fiber, fluororesin fiber and polyester fiber is used as the fiber forming this woven fabric, these are excellent in heat resistance, and therefore can be used as raw materials for forming various coating films. preferable.

  Next, the 2nd illustration form of the cylinder 2 with which the barrel relevant to this invention is equipped is demonstrated. In this exemplary embodiment, as shown in FIGS. 2 and 3, the cylindrical body 2 provided in the barrel includes support columns 7 that form the skeleton of the cylindrical body 2, and can withstand the temperature at which the raw material for forming the coating film is polymerized. A net or woven fabric made of a resin material is supported by the support columns 7. There is no particular limitation on the material for forming the column 7, and metal, various resins, and the like can be used. Thus, when the support column 7 forming the skeleton of the cylindrical body 2 is provided, even if the cylindrical wall of the body portion 2b of the cylindrical body 2 is formed of a net or a woven cloth made of a resin material, the shape of the cylindrical body 2 is maintained. It is self-held and the mounting property of the cylinder 2 to the barrel is not impaired. Further, when the column 7 is formed so that the position at which the column 7 is formed is exposed on the inner peripheral surface of the cylinder wall of the cylinder 2 as shown in FIG. 4, the column 7 is coated when the cylinder 2 is rotated. Part 6 is preferred because it strikes and is well agitated.

  Next, the 3rd illustration form of the cylinder 2 with which the barrel relevant to this invention is equipped is demonstrated. In this exemplary embodiment, the cylindrical wall of the barrel portion of the cylindrical body 2 provided in the barrel is formed of a net or woven fabric made of a resin material that can withstand the temperature at which the raw material for forming the coating film is polymerized, and the perspective view of FIG. As shown in FIG. 2, since the cross-sectional shape of the cylindrical body 2 is a polygonal shape, compared with the cylindrical cylindrical body, the coated part is well stirred when the cylindrical body 2 is rotated around the rotation axis. Also has the effect of being.

  Next, an embodiment related to the invention of claim 1 will be described with reference to FIG.

  In this embodiment, as shown in FIG. 7, in the conventional barrel 1, each of the plurality of cylindrical bodies 2, 2. New creations are included for points that were not divided in the direction parallel to the rotation axis 3. That is, in this embodiment, as shown in FIG. 6, each of the plurality of cylinders arranged on a substantially circumference centered on the rotation shaft 3 of the barrel 1 is divided in a direction parallel to the rotation shaft 3. The plurality of small cylinders 2-1, 2-2, and 2-3 that are separable are formed. As described above, when the combination of the small cylinders 2-1, 2-2, and 2-3 is used instead of the conventional long cylinder, the size of the part to be coated is, for example, 0. Even in a very fine case of about 1 to 2 mm, it is easy to achieve the uniform distribution of the parts to be coated in the separable small cylinder, and the parts to be coated can be easily distributed in the small cylinder. When taken out from the container, the fine parts to be coated are not scattered. In addition to simply shortening the length of the cylinder, it is divided in a direction parallel to the rotation axis of the barrel and is a combination of a plurality of small cylinders that are separable. Since it replaces the cylindrical body, there is an advantage that the degree of reducing the processing amount of the part to be coated processed in the vacuum deposition apparatus is small. The material forming the cylindrical wall of such a small cylindrical body is not particularly limited, and may be made of metal such as stainless steel, or made of a resin material that can withstand the temperature at which the raw material for forming the coating film is polymerized. You can also

FIG. 2 is a side view of a cylinder for explaining a first exemplary form of a cylinder provided in the barrel of the present invention. It is a side view of the cylinder for demonstrating the 2nd illustration form of the cylinder with which the barrel of this invention is equipped. It is sectional drawing same as the above. It is sectional drawing of the cylinder which accommodates the to-be-coated part for demonstrating the 3rd illustration form of the cylinder with which the barrel of this invention is equipped, and is rotating. It is a perspective view of the cylinder for demonstrating the 4th illustration form of the cylinder with which the barrel of this invention is equipped. It is a side view of the barrel for demonstrating embodiment of this invention. It is a perspective view of the conventional barrel. It is a side view of the cylinder with which the conventional barrel is equipped. It is a schematic sectional drawing of a vacuum evaporation system. It is sectional drawing of the cylinder which accommodates the to-be-coated part for demonstrating the motion of the to-be-coated part in the cylinder with which the conventional barrel is equipped, and is rotating.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Barrel 2 Cylindrical body 2a Opening part 2b Trunk part 2-1, 2-2, 2-3 Small cylindrical body 3 Rotating shaft 6 Coated part 7 Strut 8 Vacuum vapor deposition apparatus A, B Raw material substance J Deposition tank

Claims (1)

A plurality of cylinders that house a part to be coated and a rotary shaft that rotates the cylindrical body, and the longitudinal direction of the cylinder is substantially parallel to the rotary axis on a substantially circumference around the rotary axis; A barrel in which a cylindrical body is disposed, in which a part to be coated is stored in the cylindrical body, while rotating the cylindrical body in a vacuum deposition tank, on the surface of the coated part, In a barrel used in a vapor deposition coating apparatus for vapor-depositing a raw material material for forming a coating film and polymerizing the material to form a coating film, a plurality of components arranged on a substantially circumference around the rotation axis A barrel for a vapor deposition coating apparatus, wherein each cylindrical body is formed by a combination of a plurality of small cylindrical bodies that are divided in a direction parallel to the rotation axis and are separable.

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