JP4657247B2 - Gas introduction structure and environmental test apparatus - Google Patents

Description

  The present invention relates to a gas introduction structure for introducing a gas from one of two spaces partitioned by a partition wall into the other space.

  2. Description of the Related Art Conventionally, an environmental test apparatus is known as an apparatus for performing temperature characteristic tests and heat treatment of electronic components and the like. Some environmental test equipment can perform temperature characteristic tests and heat treatment by filling the thermostatic chamber in which the test and heat treatment are performed with an inert gas such as carbon dioxide and nitrogen, and bringing the thermostatic chamber close to a non-oxidizing atmosphere. .

As a structure for introducing an inert gas into a thermostat, a structure in which an inert gas is introduced into the thermostat using a fan is known. For example, the following Patent Document 1 discloses a nitrogen gas replacement introduction structure that introduces nitrogen gas into the inner tank of an environmental test apparatus.
JP-A-9-222388

  An electric motor is used to rotate the fan. However, in a general electric motor, airtightness is not ensured. Therefore, in the conventional gas introduction structure, outside air flows from the electric motor side, and outside air is mixed in the gas introduced into the thermostatic chamber in addition to the inert gas. As a result, it has been difficult to reduce the oxygen concentration in the thermostat to a certain oxygen concentration or less.

  With respect to such a problem, the nitrogen gas replacement introduction structure of Patent Document 1 uses a block-shaped seal member to prevent the outside air from entering. However, the nitrogen gas replacement introduction structure of Patent Document 1 requires a seal member with a complicated configuration.

  In addition, the seal member of Patent Document 1 must be provided with two oil seal mounting portions and an auxiliary nitrogen gas inlet in the axial direction of the rotating shaft. Therefore, it is necessary to take a considerable space for the seal member in the axial direction of the rotating shaft, and the length of the rotating shaft has to be increased. Further, when the length of the rotating shaft is increased, the load applied to the bearing is increased, and there is a problem that the bearing and the electric motor become large.

  Then, this invention makes it a subject to provide the gas introduction structure which can prevent mixing of the external air with respect to introduction gas by simple structure.

  In order to solve the above problems, the invention of claim 1 includes a partition wall that partitions the first space and the second space, and a first through hole that penetrates the partition wall so as to connect the first space and the second space. An electric motor disposed in the first space, a fan disposed in the second space, a rotating shaft that is inserted into the first through hole and transmits the rotation of the electric motor to the fan, and a gas introduction pipe having a blower outlet A gas introduction space is formed between the opening of the first through hole and the electric motor, and the partition wall and the electric motor are sealed by a sealing means, and the outlet is located in the gas introduction space. The gas introduction pipe is arranged so that the outlet blowing direction faces the electric motor side, and an air flow is generated in which the gas in the gas introduction space moves toward the second space by the rotation of the fan, and the introduced gas blown out from the outlet Is introduced into the second space through the gas introduction space.

  The gas introduction structure according to claim 1 moves the gas in the gas introduction space toward the second space by rotating the fan. Therefore, the introduced gas blown into the gas introduction space is efficiently introduced into the second space. At this time, the gas introduction space is in a negative pressure state that is lower than the outside air.

  Generally, airtightness is not ensured for an electric motor. Therefore, in the conventional gas introduction structure, there is a possibility that outside air may enter the low pressure gas introduction space from a portion where the electric motor is not airtight, and the outside air may be mixed into the introduction gas.

  However, in the gas introduction structure of the first aspect, the gas introduction pipe is arranged so that the blowing direction of the blowout port faces the motor side, and the introduced gas blown out from the blowout port is blown out toward the motor side. Therefore, the atmospheric pressure in the region from the air outlet to the electric motor side in the gas introduction space is increased by the flow of the introduced gas, and the negative pressure state with respect to the outside air is eliminated. As a result, in the gas introduction structure according to claim 1, it is possible to prevent the outside air from entering the gas introduction space and to prevent the outside air from being mixed into the introduction gas.

  Further, the configuration for preventing the outside air from being mixed into the introduced gas in the gas introducing structure according to claim 1 is merely by arranging the gas introducing pipe in the gas introducing space so that the blowing direction of the blowing port faces the motor side. There is simple.

Here, in a general electric motor, a constant gap is formed between the frame and the rotation shaft so that the rotation shaft does not contact the frame of the motor when the rotation shaft is rotated. In addition to the gap, the electric motor has a gap between the power line and the frame, and outside air can enter and exit the motor through these gaps.
In addition, a bearing that supports the rotating shaft is accommodated in the frame of the electric motor, but the bearing is generally not airtight. Therefore, the gas in the electric motor can move in the electric motor through the bearing.

  Even in the conventional gas introduction structure, the gas entering and exiting between the electric motor and the partition wall is prevented by the sealing means. However, as described above, the motor has a non-hermetic portion that allows outside air to enter and exit from the frame and the like. For this reason, in the conventional gas introduction structure, the outside air flows into these air introduction spaces that have become negative pressure due to the rotation of the fan.

  The gas introduction structure according to claim 2 proposed based on such knowledge is the invention according to claim 1, wherein the frame of the motor has an insertion port into which the rotating shaft is inserted, and the introduction gas blown out from the blowout port. The blowing direction is directed to the gap between the rotating shaft inserted into the insertion port and the frame body.

  According to the gas introduction structure of the second aspect, the introduction gas can be blown from the air outlet into the gap between the rotating shaft and the frame of the electric motor. Therefore, it is possible to intensively increase the pressure around the gap, which is an entrance of outside air into the gas introduction space, and to make it equal to or higher than the outside pressure. As a result, it is possible to reliably prevent the outside air from entering the gas introduction space.

  The invention of claim 3 is the invention of claim 1 or 2, wherein a part of the gas introduction pipe is arranged in the gas introduction space, and the gas introduction pipe in the gas introduction space is bent to the motor side in the middle. It was characterized.

  The gas introduction structure according to claim 3 can adjust the blowing direction of the introduced gas with a simple configuration by simply bending the gas introduction tube.

  According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, the sealing means is a cylindrical member having a second through hole through which the rotating shaft passes, and penetrates the inside and outside of the sealing means. The gas introduction pipe is disposed in the pipe insertion hole so as to have a pipe insertion hole and the outlet is located in the second through hole, and is sandwiched between the electric motor and the partition wall.

  Thereby, the distance from a blower outlet to an electric motor can be shortened compared with the case where a blower outlet is located in a 2nd through-hole and a blower outlet is arrange | positioned in a 1st through-hole. Therefore, in the gas introduction structure according to the fourth aspect, most of the introduced gas blown out from the outlet can be reliably blown to a predetermined region. In addition, since the distance from the blowout port to the predetermined region is short, the introduced gas can be blown to the predetermined region before the momentum of the introduced gas blown out from the blowout port is lost. As a result, the atmospheric pressure in the predetermined region can be intensively increased by spraying a small amount of introduced gas on the predetermined region.

  The invention of claim 5 is characterized in that in the invention of claim 4, the inner diameter of the second through hole of the sealing means is larger than the inner diameter of the first through hole.

  Thereby, a fixed space can be generated between the rotating shaft and the second through hole. This space has a longer distance from the wall surface of the through hole to the rotation shaft than the space formed between the rotation shaft and the first through hole. Therefore, it is possible to adjust the blowing direction of the introduced gas without bringing the gas introduction tube into contact with the rotating shaft.

  The invention of claim 6 is an environmental test apparatus to which the gas introduction structure according to any one of claims 1 to 5 is attached, wherein the inside of the thermostatic bath is the second space, and the outside of the thermostatic bath is the first space. As described above, the introduction gas is introduced into the thermostatic chamber.

  Thereby, the introduction gas which does not mix external air in a thermostat can be introduce | transduced.

  The present invention can prevent the outside air from being mixed with the introduced gas with a simple configuration.

Hereinafter, a gas introduction structure according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view showing an attached state of the gas introduction structure of the present embodiment.
The gas introduction structure 1 of this embodiment includes a manufacturing process of an FPD (Flat Panel Display) such as LTPS (Low-Temperature Poly-Silicon), organic EL (organic electroluminescence), FED (Field Emission Display), It can be used for an environmental test apparatus used in temperature characteristic tests and heat treatments of electronic parts.
By using the gas introduction structure 1 of the present embodiment in the environmental test apparatus, an inert gas such as carbon dioxide or nitrogen is introduced into the thermostat 3 of the environmental test apparatus, and the thermostat 3 is brought close to a non-oxidizing atmosphere. Testing and heat treatment can be performed.

The gas introduction structure 1 is installed at a predetermined position of the partition wall 5 that partitions the interior (second space) and the exterior (first space) of the thermostatic chamber 3. A first through hole 11 having a predetermined inner diameter is passed through a predetermined position of the partition wall 5. The first through hole 11 is a through hole that connects the inside and the outside of the thermostatic chamber 3. The inside of the constant temperature bath 3 of the first through hole 11 is an open portion 9 from which gas flows out.
As shown in FIG. 1, the gas introduction structure 1 includes an electric motor 6, a rotating shaft 7, a fan 8, a sealing means 10, and a gas introduction pipe 12.

  The periphery of the electric motor 6 is covered with a frame body 20. The frame body 20 of the electric motor 6 of the present embodiment includes a cylindrical frame body 21 and blocking members 22 and 23 that respectively close both ends of the frame body 21. The closing member 22 on the fan 8 side of the closing members 22 and 23 has an insertion port 25 for inserting the rotating shaft 7. The inner diameter of the insertion port 25 is larger than the outer diameter of the rotating shaft 7. Therefore, when the rotating shaft 7 is inserted into the insertion port 25 and attached to the electric motor 6, a certain gap 27 is formed between the closing member 22 provided with the insertion port 25 and the rotating shaft 7. Due to the clearance 27, the rotating shaft 7 can smoothly rotate without contacting the frame body 20.

  A plurality of bearings 26 that support the rotary shaft 7 are accommodated inside the frame body 20. At least one of the plurality of bearings 26 is disposed in the vicinity of the insertion port 25 in order to reduce the stress applied to the rotary shaft 7 and the bearing 26. The electric motor 6 is connected to a power supply line (not shown) for supplying electric power to the electric motor 6, and the frame body 20 has an introduction port (not shown) for guiding the power supply line to the inside of the frame body 20. Is provided. A gap (not shown) is also generated between the frame 20 and the power line.

  As the electric motor 6 and the fan 8, known ones can be used. In this embodiment, an electric motor and a centrifugal fan are used. In general, the airtightness of the bearing 26 in the electric motor 6 is not ensured.

  As shown in FIG. 2, the sealing means 10 is a cylindrical member having a second through hole 15 at the center. The sealing means 10 is provided with a tube insertion hole 16. The tube insertion hole 16 is a through hole that penetrates the peripheral wall 30 of the sealing means 10 and communicates with the second through hole 15. The gas introduction tube 12 is fitted into the tube insertion hole 16.

  The sealing means 10 may be formed of resin, rubber, silicon, metal, glass fiber, carbon, or the like as long as the sealing property between the partition wall 5 of the thermostatic chamber 3 and the electric motor 6 can be secured. it can.

  The gas introduction pipe 12 is a pipe through which an introduction gas such as nitrogen introduced into the constant temperature bath 3 flows. One end of the gas introduction pipe 12 is connected to a gas supply device (not shown) that supplies gas to the gas introduction pipe 12. The other end of the gas introduction pipe 12 functions as a blowout port 17 that blows out the gas supplied from the gas supply device.

  Hereinafter, the positional relationship of each component in the gas introduction structure 1 of this embodiment is demonstrated. As shown in FIG. 1, the electric motor 6 and the fan 8 are arranged to face each other with a first through hole 11 provided in the partition wall 5 interposed therebetween. At this time, the electric motor 6 is disposed outside the thermostat 3 and fixed to the partition wall 5. On the other hand, the fan 8 is disposed inside the thermostatic chamber 3.

  When fixing the electric motor 6 to the partition wall 5, a sealing means 10 is disposed between the electric motor 6 and the partition wall 5. At this time, the first through-hole 11 of the partition wall 5 and the second through-hole 15 of the sealing means 10 have the centers of the respective cross-sections coincided with each other in the hole penetration direction, and connect the inside and the outside of the thermostat 3. One continuous through hole 18 is formed.

  The rotating shaft 7 is inserted into the through hole 18 in order to connect the electric motor 6 and the fan 8. A fan 8 is attached to one end of the rotating shaft 7, and an electric motor 6 is attached to the other end. Thereby, the rotation of the electric motor 6 is transmitted to the fan 8 through the rotating shaft 7. At this time, the rotating shaft 7 is pivotally supported by a bearing 26 accommodated in the frame 20 of the electric motor 6.

  As shown in FIG. 2, when the rotary shaft 7 is inserted into the first through hole 11 of the partition wall 5, the outer diameter of the rotary shaft 7 is smaller than the inner diameter of the first through hole 11. A fixed space is formed between the inner wall of one through-hole 11 (hereinafter referred to as “first gas introduction space 31”). The fan 8 side of the first gas introduction space 31 is an open portion 9 into which gas flows into the thermostat 3.

  Further, the inner diameter of the second through hole 15 of the sealing means 10 is larger than the inner diameter of the first through hole 11 of the partition wall 5. Therefore, the inner diameter of the second through hole 15 is larger than the outer diameter of the rotating shaft 7. Accordingly, when the rotary shaft 7 is inserted into the second through hole 15, a certain space is formed between the rotary shaft 7 and the inner wall of the second through hole 15 (hereinafter, “second gas introduction space 32”). Called).

  The first gas introduction space 31 and the second gas introduction space 32 are continuous spaces, and a gas introduction space 33 is formed by both. As shown in FIG. 1, the motor 6 side of the gas introduction space 33 is closed by the frame body 20 (blocking member 22) of the motor 6, and the fan 8 side is an open portion 9 and is open. That is, the gas introduction space 33 is formed by the first through hole 11, the second through hole 15, and the electric motor 6. At this time, the gap 27 between the frame 20 of the electric motor 6 and the rotating shaft 7 faces the gas introduction space 33 (second gas introduction space 32).

  As shown in FIG. 2, the gas introduction pipe 12 is fitted into the sealing means 10 by being fitted into the tube insertion hole 16 of the sealing means 10 without a gap. At this time, the distal end region 13 which is a part of the distal end side of the gas introduction tube 12 is disposed inside the second gas introduction space 32. For this reason, when the sealing means 10 is attached between the partition wall 5 and the electric motor 6, the distal end region 13 of the gas introduction tube 12 is placed in the gas introduction space 33 (second gas introduction region 32).

  In the present embodiment, the air outlet 17 through which the introduced gas introduced into the thermostatic chamber 3 is blown out is at the distal end of the distal end region 13 of the gas introducing pipe 12. Therefore, the blower outlet 17 is disposed in the second gas introduction space 32 in the gas introduction space 33. When the sealing means 10 is attached between the partition wall 5 and the electric motor 6, the gas introduction pipe 12 is attached to the sealing means 10 so that the air outlet 17 faces the electric motor 6 side.

  More specifically, the tip region 13 of the gas introduction tube 12 is bent toward the electric motor 6 in the middle as shown in FIG. When the central axis is virtually extended with respect to the distal end side portion including the air outlet 17 in the bent distal end region 13, the central axis reaches the gap 27 between the frame body 20 of the electric motor 6 and the rotating shaft 7. . That is, the gas introduction tube 12 is bent so that the blowing direction of the introduced gas blown from the blowout port 17 of the gas introduction tube 12 is directed toward the gap 27.

Next, the operation and effect of the gas introduction structure 1 of the present embodiment will be described.
In order to introduce gas into the thermostat 3, the electric motor 6 is driven, and the introduced gas is supplied to the gas supply pipe 12 from a gas supply device (not shown). In this embodiment, nitrogen is used as the introduction gas. When the electric motor 6 is driven, the rotation of the electric motor 6 is transmitted to the fan 8 through the rotating shaft 7. When the fan 8 rotates, the gas existing in the gas introduction space 33 is sucked out to the thermostat 3 side. For this reason, the inside of the gas introduction space 33 becomes a negative pressure with respect to the outside air. Nitrogen is blown out from the blowout port 17 of the gas introduction pipe 12 into the gas introduction space 33 which has become a negative pressure. Nitrogen blown into the gas introduction space 33 is sucked out from the gas introduction space 33 to the thermostat 3 by the fan 8 and introduced into the thermostat 3. If it does so, the density | concentration of nitrogen which is the introduction gas in the thermostat 3 will rise, and oxygen concentration will fall.

  In the gas introduction structure 1 of the present embodiment, the sealing means 10 is sandwiched between the partition wall 5 and the electric motor 6. This prevents outside air from entering the gas introduction space 33 from the joint between the partition wall 5 and the electric motor 6.

  Further, in a general electric motor, the gap between the power line and the frame body 20, the bearing 26 accommodated in the frame body 20, etc. are not airtight. Therefore, even when the frame 20 itself has a sealed structure, the outside air can move inside and outside the electric motor 6 through the gap between the power line and the frame 20 and the bearing 26.

  That is, in the conventional gas introduction structure, outside air has entered the electric motor 6 through a gap (not shown) between the power line and the frame body 20. And when the fan 8 was rotated and the gas introduction space 33 became a negative pressure, this outside air flowed into the gas introduction space 33 which became a negative pressure through the bearing 26 and the gap 27.

  Therefore, when the conventional gas introduction structure is used for an environmental test apparatus, the gas introduced into the thermostat 3 includes outside air, and the oxygen concentration in the thermostat 3 is set to a certain oxygen concentration (400 to 500 ppm) or less. It was difficult to reduce to

  However, in the gas introduction structure 1 of the present embodiment, the blowout port 17 of the gas introduction pipe 12 is directed to the electric motor 6 side, and the blowing direction of the introduced gas is in the gap 27 between the frame body 20 of the electric motor 6 and the rotary shaft 7. Is directed. Therefore, the introduced gas blown from the blowout port 17 is blown against the gap 27 between the frame body 20 and the rotary shaft 7. Thereby, the atmospheric pressure in the vicinity of the gap 27 is increased. Further, the flow of the introduced gas entering the gap 27 also raises the pressure around the bearing 26 arranged in the vicinity of the gap 27. As a result, it is possible to prevent outside air from entering the gas introduction space 33 from the inside of the electric motor 6 through the bearing 26 and the gap 27.

  Therefore, in the gas introduction structure 1 of the present embodiment, the gas sucked out from the gas introduction space 33 and introduced into the thermostatic chamber 3 includes almost the outside air other than the introduction gas blown out from the outlet 17 of the gas introduction pipe 12. I can't. Therefore, if the gas introduction structure 1 of this embodiment is used for an environmental test apparatus, only nitrogen (introduction gas) blown out from the gas introduction pipe 12 can be introduced into the thermostat 3 and is introduced into the thermostat 3. Even if the amount of nitrogen introduced is the same as that of the conventional gas introduction structure, the inside of the thermostatic chamber 3 can be made closer to a non-oxidizing atmosphere.

3 and 4 are graphs of experiments in which the effect of bending the gas introduction pipe 12 toward the electric motor 6 and directing the blowing direction of the introduced gas toward the electric motor 6 is confirmed.
FIG. 3 shows a gas introduction structure in which the blowing direction of the introduced gas is not directed to the electric motor 6 side, and heat treatment is performed at 500 ° C. in an environmental test apparatus in which the internal volume of the thermostat 3 is 500 l. It is the graph showing the change in the temperature in the thermostat 3 and oxygen concentration at the time of introduce | transducing nitrogen with the introduction amount of 420 l / min from an inlet tube. In addition, the gas introduction structure used here is the same as the gas introduction structure 1 of this embodiment except the structure of the gas introduction pipe | tube 12 bent to the electric motor 6 side.

  FIG. 4 shows the same experiment as the graph of FIG. 3 in the environmental test apparatus employing the gas introduction structure 1 of the present embodiment in which the direction of the introduced gas is directed toward the electric motor 6 as shown in FIG. It is the graph showing the temperature in the thermostat 3 and the change of oxygen concentration on condition.

  As shown in the graph of FIG. 3, when the gas introduction structure in which the blowing direction of the introduced gas is not directed toward the electric motor 6 is used, the oxygen concentration in the thermostat 3 cannot be reduced to 400 ppm or less. On the other hand, according to the gas introduction structure 1 of the present embodiment, as shown in the graph of FIG. 4, the oxygen concentration in the thermostatic chamber 3 could be reduced to 1 ppm or less without increasing the nitrogen introduction amount.

  In the gas introduction structure 1 of the present embodiment, the second gas introduction space 32 provided in the sealing means 10 is from the inner wall of the through hole to the rotating shaft 7 as compared with the first gas introduction space 31 provided in the partition wall 5. The distance is long. Therefore, in the gas introduction structure 1 of the present embodiment, the protrusion 13 of the gas introduction pipe 12 is less likely to come into contact with the rotating shaft 7 than when the blowout port 17 is disposed in the first gas introduction space 31. As a result, the length and shape of the protruding portion 13 of the gas introduction pipe 12 can be given flexibility, and the adjustment of the blowing direction of the introduced gas blown from the blowout port 17 is easy.

  In addition, by arranging the blowout port 17 in the second gas introduction space 32, the distance from the blowout port 17 to the gap 27 of the electric motor 6 can be increased as compared with the case where the blowout port 17 is arranged in the first gas introduction space 31. Can be shortened.

  Therefore, most of the introduced gas blown out from the blowout port 17 can be blown into the gap 27 of the electric motor 6 which is an entrance port for outside air. Further, it is possible to blow the introduced gas against the gap 27 of the electric motor 6 while maintaining the momentum of the introduced gas blown from the blower outlet 17. As a result, the gas introduction structure 1 of the present embodiment increases the pressure in the vicinity of the gap 27 intensively just by blowing a small amount of introduced gas against the gap 27 of the electric motor 6, and the outside air enters the gas introduction space 33. Can be prevented.

  Further, the gas introduction structure 1 of the present embodiment does not require a particularly complicated configuration for the sealing means 10 and can be implemented with a simple configuration in which the gas introduction pipe 12 is bent in a predetermined direction. Therefore, the sealing means 10 only needs to have a thickness that allows the gas introduction pipe 12 to be attached, and the space for the sealing means 10 required in the axial direction of the rotary shaft 7 may be small. Therefore, it is not particularly necessary to lengthen the rotating shaft 7, and the load applied to the bearing 26 is not increased.

  In the gas introduction structure 1 of the above embodiment, the gas introduction pipe 12 is attached to the sealing means 10, but the present invention is not limited to such a configuration. For example, it is good also as a structure which attaches the gas introduction pipe | tube 12 to the 1st through-hole 11 of the partition wall 5, and directs the blowing direction of introduction gas to the electric motor 6 side.

  If this configuration is adopted, it is not necessary to attach the gas introduction pipe 12 to the sealing means 10, so that it is not necessary to sandwich the sealing means 10 between the partition wall 5 and the electric motor 6. In this case, a sealing property between the partition wall 5 and the electric motor 6 can be secured by using a caulking material or the like as the sealing means 10 and applying a treatment such as coking to the boundary portion between the partition wall 5 and the electric motor 6. . Therefore, the space for the sealing means 10 required in the above embodiment is not necessary. As a result, the length of the rotating shaft 7 can be shortened, and the load applied to the bearing 26 can be reduced.

  In the said embodiment, although the gas introduction structure 1 was used in order to introduce | transduce introduction gas in the thermostat 3 and to reduce the oxygen concentration in the thermostat 3, this invention is limited to such an application. Do not mean. For example, it can be used to circulate the gas in the thermostat 3.

  Moreover, although nitrogen was used for the introduction gas blown out from the gas introduction tube 12 in the said embodiment, this invention is not limited to such a structure. It is also possible to use an inert gas other than nitrogen, such as carbon dioxide, or another gas as the introduction gas.

It is sectional drawing which shows the attachment state of the gas introduction structure of this invention. It is a partial expanded sectional view of the gas introduction structure shown in FIG. It is the graph showing the change in the temperature in a thermostat and oxygen concentration in the environmental test apparatus by which the gas introduction structure where the blowing direction of the introduction gas was not directed to the electric motor side was adopted. It is the graph showing the change in the temperature in a thermostat and oxygen concentration in the environmental test apparatus by which the gas introduction structure where the blowing direction of the introduction gas was turned to the electric motor side was adopted.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Gas introduction structure 3 Constant temperature bath 5 Partition wall 6 Electric motor 7 Rotating shaft 8 Fan 9 Opening part 10 Sealing means 11 First through-hole 12 Gas introduction pipe 15 Second through-hole 17 Air outlet 20 Frame 27 Gap 33 Gas introduction space

Claims (6)

A partition wall that partitions the first space and the second space;
A first through hole penetrating the partition wall so as to connect the first space and the second space;
An electric motor disposed in the first space;
A fan arranged in the second space;
A rotating shaft inserted into the first through hole and transmitting the rotation of the electric motor to the fan;
A gas inlet pipe with a blowout outlet,
Between the opening part of the first through hole and the electric motor, a gas introduction space is formed in which the partition wall and the electric motor are sealed by a sealing means,
The gas inlet pipe is arranged so that the outlet is located in the gas introduction space, and the outlet direction of the outlet is directed to the electric motor side,
An air flow is generated in which the gas in the gas introduction space moves toward the second space by the rotation of the fan, and the introduced gas blown out from the outlet is introduced into the second space through the gas introduction space. Gas introduction structure.   The frame of the electric motor has an insertion port into which the rotation shaft is inserted, and the blowing direction of the introduced gas blown out from the outlet is directed toward the gap between the rotation shaft inserted into the insertion port and the frame. The gas introduction structure according to claim 1, wherein the gas introduction structure is provided.   3. The gas introduction structure according to claim 1, wherein a part of the gas introduction pipe is disposed in the gas introduction space, and the gas introduction pipe in the gas introduction space is bent toward the electric motor side in the middle.   The sealing means is a cylindrical member having a second through hole through which the rotating shaft passes, and has a tube insertion hole that penetrates the inside and outside of the sealing means, and the outlet is located in the second through hole. The gas introduction structure according to claim 1, wherein a gas introduction pipe is disposed in the pipe insertion hole and is sandwiched between the electric motor and the partition wall.   The gas introduction structure according to claim 4, wherein an inner diameter of the second through hole of the sealing means is larger than an inner diameter of the first through hole. An environmental test apparatus to which the gas introduction structure according to claim 1 is attached,
An environmental test apparatus, wherein the introduction gas is introduced into the thermostat bath, with the inside of the thermostat bath as the second space and the outside of the thermostat bath as the first space.

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