JP4660960B2 - Thermostatic device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a thermostatic device, and in particular, by performing heat transfer to an object by heat conduction between metals from a heating unit and / or a cooling unit having a tunnel structure, temperature control of the object can be performed at high speed and high speed. The present invention relates to a thermostat capable of being performed with accuracy.
[0002]
[Prior art]
Among electronic components, for example, there are electronic components such as crystal resonators and thermistors that can be assured in quality by setting the electronic components to a predetermined temperature and measuring temperature characteristics at the predetermined temperature.
In addition, when performing measurement or inspection related to such temperature characteristics, depending on the target object, temperature control of the target object (the target temperature must be set by heating and cooling the target object) must be accurately performed. It may not be possible. In such a case, for example, even if the object is placed directly on a heater and heated to control the temperature, the temperature of the object is accurately controlled for heat radiation from the upper surface or side surface of the object. It is not possible.
[0003]
For this reason, conventionally, an object that needs to be measured or inspected with respect to temperature characteristics is generally placed in a thermostatic device composed of a thermostatic chamber, and temperature control has been performed.
This constant temperature bath is usually configured such that a fluid in a bath such as gas or liquid is used as a heat medium, the fluid is stabilized at a set temperature, and the temperature of the object is controlled by convective heat transfer from the fluid.
In addition, constant temperature baths that utilize convective heat transfer from the fluid are considered to stabilize the temperature of the object at a constant temperature if the temperature of the heat medium in the bath stabilizes at a constant temperature. (Allowable error is about ± 0.5 ° C).
[0004]
[Problems to be solved by the invention]
However, in the case of an air bath type thermostatic device using gas, there is a problem that it takes time to stabilize the temperature of the gas inside the thermostatic bath.
For example, an air bath type thermostatic device cools the internal temperature from room temperature to −35 ° C. when the temperature is lowered from room temperature in order to insert an object to be subjected to a temperature characteristic test at about −35 ° C., for example. It takes about an hour to do.
[0005]
In addition, the air bath type thermostatic bath has a problem that it takes time to transfer heat from the gas as the heat medium to the object.
In addition, although the time of heat transfer to the object is shortened, the liquid bath type thermostatic bath requires a washing step for washing away the liquid, or the object cannot be immersed in the liquid, so-called, In the case of non-cleanable parts, there is a restriction that a liquid bath type thermostatic bath cannot be used.
[0006]
In addition, the temperature stability of an air bath type thermostatic chamber is usually about ± 0.5 ° C, so the temperature must be measured up to the first decimal place with a thermometer, and a characteristic test must be performed with that value. There was a problem that the accuracy of temperature control was low.
In general, in order to keep the temperature distribution in the thermostatic chamber within ± 0.5 ° C, it is necessary to perform an evaluation test on the temperature distribution by adjusting the arrangement of the object, the air volume and direction of the fan. There has been a problem that much labor is required for the adjustment work and the evaluation test.
[0007]
In addition, when the thermostat used for the temperature characteristic test measures the characteristics at a plurality of measurement temperatures, if one thermostat type thermostat is used, as described above, the gas inside the tank It takes time to stabilize the temperature. For this reason, as shown in FIG. 16, a thermostatic device 100 having a structure in which an air bath type thermostatic chamber 101 is connected by the number of measurement temperatures and inlined by a line conveyor 102 or the like has been used.
However, since the thermostatic apparatus 100 is configured such that each thermostatic chamber 101 performs temperature control of an object by convection heat transfer from gas, it takes approximately 10 minutes or more for the object to reach a target temperature, There was a problem that the nature was bad. In addition, if the number of objects to be input is increased, there is a problem that the thermostat 100 is increased in size.
[0008]
The present invention has been made to solve the above problems, and by controlling the temperature of an object using heat conduction between metals with high heat transfer efficiency, the temperature control of the object can be performed at high speed and with high accuracy. It is intended to provide a thermostatic apparatus that can perform the above-described process and has excellent productivity.
[0009]
In JP-A-60-107117, a thermal conductor that substantially surrounds the periphery of the temperature controlled body, a thermal buffer that is provided between the temperature controlled body and the thermal conductor, and has a lower thermal conductivity than the thermal conductor. , And a technique of a thermostatic device provided with a heat insulator provided on the outer periphery of the heat conductor is disclosed, and although this technique is a technique capable of controlling the temperature of an object at high speed by heat conduction by surface contact, the above problem Cannot be resolved.
Japanese Patent Laid-Open No. 03-006475 discloses a technique for attaching a temperature sensor to the object to be measured, and this technique is capable of accurately controlling the temperature of the object, but solves the above problems. I can't.
[0010]
[Means for Solving the Problems]
To achieve this object, the present invention No Heng The temperature device is a thermostatic device including a transport unit for transporting an object whose temperature is controlled, and a heating unit and / or a cooling unit having a tunnel structure in which the target object is transported by the transport unit. , By heat conduction when the object is in contact with the heating means and / or cooling means, or by heat conduction when the object is in contact with the conveying means in contact with the heating means and / or cooling means, The object is configured to be temperature-controlled.
In this way, the temperature of the object can be controlled at high speed and with high accuracy by heat conduction by contact, and further, since the object is conveyed in the tunnel, continuous conveyance is possible and productivity is improved. be able to.
[0011]
In this specification, “heat conduction” refers to a phenomenon in which heat is transferred from one part to the other part in contact with the inside of the object by molecular motion, and if the object is in contact, It also includes the phenomenon of heat transfer between different objects.
[0012]
Also, The thermostat of the present invention is The heat conduction is configured to be heat conduction between metals.
If it does in this way, the temperature control of a target object can be performed more rapidly and with high precision by the high thermal conductivity of a metal.
[0013]
Also, The thermostat of the present invention is The gap between the heating unit and / or the cooling unit and the heat insulating cover covering the heating unit and / or the cooling unit is a minimum gap, and The thermostat of the present invention is The surface of the heat insulating cover is configured as a mirror surface or a state close to a mirror surface, The thermostat of the present invention is The gap between the tunnel structure and the transport means is configured as a minimum gap.
As described above, by setting the gap from the heating means and / or the cooling means to the target as the minimum gap, it is possible to prevent a problem that the temperature control becomes unstable due to the gas in the gap. Moreover, the radiant heat from a surface can be reduced by making the surface of a heat insulation cover into a mirror surface or a state close | similar to a mirror surface.
[0014]
Also, The thermostat of the present invention is A plurality of heating means and / or cooling means are provided.
In this way, a plurality of temperature regions can be secured in the constant temperature device, and temperature changes can be set gently, or temperature characteristics at a plurality of set temperatures can be measured with a single constant temperature device. it can.
[0015]
Also, The thermostat of the present invention is The carrier means stores the object and moves in the tunnel structure, and a carrier carrier device that carries the carrier Na The configuration is as follows.
In this way, since the object is thermally conducted through the carrier, high-speed and high-precision temperature control can be performed, and the production capacity of the thermostatic device can be increased by continuously feeding the carrier. Can do.
[0016]
Also, The thermostat of the present invention is The carrier is pitch-fed when the carrier pins of the carrier carrier device are inserted and moved into feed pin holes formed in the carrier.
In this way, the object mounted on the carrier is also pitch-fed, and the object moves sequentially to the same position. Therefore, the measurement probe can be controlled easily by linking the measurement probe with the operation of the carrier. Can be done.
[0017]
Also, The thermostat of the present invention is An air shut-off device for shielding the opening formed in the heating means and / or the cooling means, to which the transfer pin moves, is provided.
If it does in this way, since the air between a heating means and / or a cooling means and a carrier is not replaced with outside air, the accuracy of temperature control of a subject can be raised more.
[0018]
Also, The thermostat of the present invention is The heating means and / or the cooling means are configured as Peltier elements.
If it does in this way, when cooling especially, it can cool to predetermined cooling temperature in a short time.
[0019]
Also, The thermostat of the present invention is The measuring probe for measuring the temperature characteristics of the object is provided.
In this way, the temperature characteristics can be measured without removing the object that has reached the measurement temperature from the thermostat, so that productivity can be increased.
[0020]
Also, The thermostat of the present invention is An air chamber cut off from outside air is formed at the insertion port of the measurement probe formed in the heating means and / or cooling means.
In this way, the temperature-controlled object does not directly touch the outside air, so the temperature control accuracy can be further improved.
[0021]
Also, The thermostat of the present invention is A plurality of measurement probes are arranged.
If it does in this way, even if it is a case where a subject has a plurality of measurement temperature, it can measure sequentially with a measurement probe corresponding to measurement temperature.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, each embodiment of the thermostatic device of the present invention will be described with reference to the drawings.
[First embodiment]
FIG. 1: has shown the schematic perspective view for demonstrating the basic composition of the thermostat which concerns on 1st embodiment of this invention.
2 shows a schematic front view of the thermostat according to the present embodiment, and FIG. 3 shows a schematic plan view of the thermostat according to the present embodiment.
[0023]
1, 2, and 3, a thermostatic device 1 includes a thermostatic chamber 10 having a tunnel structure, a carrier 20 mounted with an object (quartz crystal resonator) and moving in the tunnel of the thermostatic chamber 10, A carrier transport device 30 that moves the carrier 20, a slide device 41 that is supported so as to be movable in the vertical direction, a measurement probe 40 that measures the frequency characteristics of the crystal resonator, and a thermostat 10. It comprises a cooling unit 50 for cooling the heating surface of the Peltier element, and pedestals 60 disposed on both sides of the constant temperature bath 10.
[0024]
Here, the thermostatic device 1 uses a crystal oscillator as a temperature-controlled object, and cools the crystal oscillator to a temperature of −35 ° C. or lower in order to perform a temperature characteristic test.
In the case of cooling in this way, the thermostatic device 1 is not shown in the figure, but covers the entire device with a cover and fills with dry air to prevent condensation.
In addition, the thermostatic device according to the present invention does not limit the object to a crystal resonator, but may be one that requires a temperature characteristic test of a capacitor, an optical semiconductor element, etc., and the measurement object is also limited to a frequency characteristic. Needless to say, the object can be appropriately changed within the scope of the technical idea of the present invention.
[0025]
Next, the thermostat 10 and the cooling unit 50 will be described with reference to the drawings.
4 shows a schematic side sectional view along line AA in FIG. 3, and FIG. 5 shows a schematic enlarged view of the thermostatic chamber 10 in FIG.
Moreover, FIG. 6 has shown the schematic exploded view of the thermostat and the cooling unit.
[0026]
In FIG. 4, the cooling unit 50 disposed under the thermostatic bath 10 circulates cooling water from the outside to the water cooling jacket 51 disposed in contact with the lower surface of the Peltier element 81 and the water cooling jacket 51. The heat insulating hose 52 and the heat insulating material 53 covering the water cooling jacket 51 and the heat insulating hose 52 are provided.
The cooling unit 50 has a water cooling jacket method in which cooling water flows inside, and the cooling water is cooled and circulated outside.
A heat insulating material 76 is inserted between the lower surface of the tunnel structure 83 and the water cooling unit 50 in order to prevent natural convection of air.
[0027]
In addition, as shown in FIG. 6, the three water cooling jackets 51 are arranged side by side in the transport direction, and the cooling performance can be adjusted by changing the water temperature and flow rate of each water cooling jacket 51. In this way, the thermostatic chamber 10 adjusts the cooling performance of each water cooling jacket 51 when setting different positions in the transport direction, for example, positions such as the vicinity of the inlet, the center, and the vicinity of the outlet, to different temperatures. The temperature can be set easily. The number of water cooling jackets 51 is not limited to three, and can be increased or decreased depending on the cooling conditions.
The cooling unit 50 is in surface contact with the lower surface of the Peltier element 81 whose upper surface is cooled and whose lower surface is heated, and forcibly cools the lower surface of the Peltier element 81.
[0028]
In FIG. 5, the thermostatic chamber 10 includes a heat insulating cover 70 and a cooling means 80.
Here, the cooling means 80 is in contact with the Peltier element 81 whose upper surface is cooled and its lower surface is heated by energization, and the cooling surface (upper surface) of the Peltier element 81, and the tunnel structure 83 in which the tunnel 82 is formed. It is made up of.
In this way, the object is in heat transfer with gas as a heat medium by heat conduction caused by surface contact with the carrier 20 (not shown) as the conveying means, which is in contact with the tunnel structure 83 as the cooling means. As a result, the temperature of the object can be controlled at high speed and with high accuracy. Moreover, since the target object mounted in the carrier 20 is conveyed in the thermostat 1 in the tunnel 82, the target object can be continuously put in and the productivity can be improved.
[0029]
The tunnel structure 83 includes a lower tunnel structure 84 having a flat upper surface and an upper tunnel structure 85 having a tunnel 82 (groove-shaped recess) into which the carrier 20 is fitted on the lower surface. The structure allows easy maintenance and the like.
The tunnel 82 is not limited to the case where it is formed in the upper tunnel structure 85, and it goes without saying that the tunnel 82 may be formed in the lower tunnel structure 84. Further, the tunnel 82 may be formed in both the upper tunnel structure 85 and the lower tunnel structure 84, and the upper tunnel structure 85 and the lower tunnel structure 84 may of course be integrated. .
[0030]
In the present embodiment, the object is in contact with the tunnel structure 83 via the carrier 20 as a conveying means, but is in contact with the tunnel structure 83 or not partially through the carrier 20. May be configured to be in contact with the tunnel structure 83 and partially in contact with the conveying means. In this case, the temperature control of the object can be performed faster and more accurately than the heat conduction through the carrier 20. It can be performed.
[0031]
Here, preferably, the tunnel structure 83 and the carrier 20 are made of metal, and the heat conduction to the object is an inter-metal heat conduction. In this way, the temperature of the object is controlled at higher speed and with higher accuracy. be able to.
In addition, the contact surface related to the heat conduction between metals may be increased by reducing the surface roughness and increasing the contact area, or by applying grease having excellent heat conductivity such as silicon grease. The heat conduction efficiency due to the contact is increased, and the temperature of the object can be controlled with high speed and high accuracy.
[0032]
Preferably, the tunnel structure 83 and the carrier 20 are made of a metal material having a high thermal conductivity such as an aluminum alloy or copper, and wear resistance due to conveyance is taken into account. It is advisable to apply a hardening treatment such as.
[0033]
In addition, the heat capacity of the tunnel structure 83 may be larger than the heat capacity of the carrier 20. Thus, if the heat capacity of the tunnel structure 83 is increased, the temperature change of the tunnel structure 83 is small even if heat is transferred to the carrier 20. Thus, the temperature control of the tunnel structure 83 can be easily performed.
[0034]
In addition, the tunnel structure 83 may have a mirror-finished outer surface, and in this way, radiant heat from the surface can be reduced and the temperature of the tunnel structure 83 can be further stabilized.
[0035]
Furthermore, the cross-sectional shape of the tunnel 82 is similar to the side shape of the carrier 20 in the transport direction, and the size of the tunnel 82 is to reduce the air in the gap with the carrier 20 transported in the tunnel 82 as much as possible. The minimum clearance required for the movement of the carrier 20 may be set, and in this way, the tunnel structure 83 is obtained by replacing the air in the tunnel 82 with the surrounding air (outside air) from the tunnel entrance, exit and other gaps. Temperature change can be minimized.
[0036]
Further, the carrier 20 to be transported may be configured to be continuously transported without interruption so that there is no gap between the carriers 20, and in this way, air cannot be interposed between the carriers 20. The air in the tunnel 82 can be prevented from being replaced with the outside air, and the temperature change in the air in the tunnel 82 and the tunnel structure 83 can be suppressed.
[0037]
The tunnel structure 83 has a configuration in which an upper surface and side surfaces are covered with a heat insulating cover 70 that prevents heat dissipation to the surroundings and heat absorption from the surroundings.
The heat insulating cover 70 includes a heat insulating cover outer wall 71, a heat insulating material 72, and a heat insulating cover inner wall 73.
[0038]
Here, the heat insulating cover outer wall 71 and the heat insulating cover inner wall 73 are mirror-finished stainless steel plates, and both the wall surfaces 71 and 73 serve as heat reflecting plates to suppress radiant heat.
The heat insulating material 72 is a rubber foam material having a low thermal conductivity, and has a structure sandwiched between the heat insulating cover outer wall 71 and the heat insulating cover inner wall 73.
[0039]
In addition, the heat insulating cover 70 can be opened and closed by a hinge 74 at the top, and can be operated with the top opened during maintenance or the like. In addition, this upper part is fixed by the retainer 75 during operation.
[0040]
Further, the gap between the heat insulation cover inner wall 73 and the tunnel structure 83 is set to the minimum gap. (Predetermined gap) In this case, almost no air exists between the heat insulating cover inner wall 73 and the tunnel structure 83. Therefore, the temperature of the thermostatic chamber 10 is low as well as high. Heat transfer due to natural convection can be ignored, and the temperature of the tunnel structure 83 can be stabilized.
[0041]
The above minimum clearance (Predetermined gap) Is preferably 0.5 mm or more and 3 mm or less because the tunnel structure 83 is in contact with the inner wall 73 of the heat insulating cover even when the tunnel structure 83 is thermally expanded by being 0.5 mm or more. In addition to being able to prevent heat transfer due to natural convection of air, the effect as a labyrinth that prevents outside air from entering can be exhibited.
[0042]
As shown in FIG. 6, the Peltier element 81 is controlled by measuring the temperature of the tunnel structure 83 with a temperature measuring element 86 embedded in the lower tunnel structure 84 and feeding it back.
In the present embodiment, six Peltier elements 81 are arranged on the lower surface of the tunnel structure 83 in a row from the inlet toward the outlet, and the inlet serving as the inlet is used to prevent a temperature drop at the inlet. It is divided into two Peltier elements 81 on the side, and four Peltier elements 81 on the central part and outlet side as the measurement part, and the Peltier elements 81 of the introduction part and the measurement part are controlled separately.
[0043]
One temperature measuring element 86 is provided for two Peltier elements 81. For example, when the target set temperature is set to -35 ° C., the temperature difference between the inlet and the outlet of the tunnel structure 83 is reduced. It can be controlled within 2 ° C.
If a temperature measuring element 86 is provided for each Peltier element 81 and the temperature is controlled for each Peltier element 81, the temperature distribution of the tunnel structure 83 can be made more accurate and constant.
[0044]
As for temperature stability at measurement points that are important in the temperature characteristic test, the temperature indicated by the temperature measuring element 86 for feedback control and the actual tunnel structure 83 are used. Temperature The difference from the degree is about 0.3 ° C. on the upper surface of the tunnel 82, about 0.1 ° C. or less on the lower surface (conveying surface) of the tunnel 82, and the object mounted on the carrier 20 placed in the tunnel 82 Even in a product, the temperature is about 0.1 ° C. or less, and temperature control can be performed with very high accuracy. This high accuracy is not limited to the case where the target set temperature is set to −35 ° C., and the same high accuracy temperature control is performed for the target set temperature in a range from about −40 ° C. to about 100 ° C. It can be performed.
[0045]
Further, the temperature measuring element 87 for guaranteeing absolute temperature in the temperature characteristic test is embedded in the lower tunnel structure 84 one pitch before the side fixed point. That is, since the object is measured immediately after being transported by one pitch, it is necessary to guarantee the absolute temperature one pitch before the side fixed point.
[0046]
Next, the carrier transport apparatus 30 will be described with reference to the drawings.
FIG. 7 is a schematic perspective view for explaining the structure of the carrier according to the present embodiment.
FIG. 8 is a schematic perspective view of a main part for explaining the carrier conveyance device according to the present embodiment.
[0047]
As shown in FIG. 7, the carrier 20 has a rectangular flat plate shape, and work pockets 21 in which objects are stored are formed at 10 × 2 steps at an equal pitch in the loading direction. In addition, ten feed pin holes 22 are formed at the same pitch as the work pocket 21 in the carry-in direction.
Accordingly, 20 objects are mounted on one carrier 20 and mounted side by side in two stages. Therefore, when measuring the object, two measuring probes 40 are arranged in two rows, so that two objects are mounted. Individual objects can be measured simultaneously.
[0048]
The work pocket 21 is formed with a recess so as to accommodate a rectangular flat plate-like object, and the bottom surface of the recess is in thermal contact with the lower surface of the object.
[0049]
In addition, the side surface of the recess has a shape and a size that enable positioning of the object, whereby the measurement probe 40 can easily come into contact with the measurement point of the object.
Further, the carrier 20 reduces the gap between the side surface of the recess and the side surface of the object, and the gap from the upper surface of the object to the upper surface of the carrier 20 when the thickness of the object is smaller than the depth of the recess. In this configuration, excess air cannot be present. By doing so, natural convection due to the excess air is suppressed, and the temperature of the object is stabilized.
[0050]
Note that the carrier 20 is not limited to the above shape, and may have various shapes depending on the shape of the object, the number of mounted objects, and the like. Of course, the arrangement of the work pockets 21 is not limited to 10 × 2 rows. In this embodiment, the number of columns is two, but it may be one or more than three.
[0051]
As shown in FIG. 8, the carrier 20 has a pair of two conveyance pins 33 arranged in six locations, such as an air cylinder and other horizontal drive source 31 and a vertical drive source 32 (see FIG. 3). Thus, when the operation of lowering and inserting into the feed pin hole 22, moving by one pitch in the transport direction, rising and exiting from the feed pin hole 22 and moving by one pitch in the direction opposite to the transport direction is repeated, The carrier 20 is pitch-fed.
In FIG. 8, the upper tunnel structure 85 and the heat insulating cover 70 are not shown for easy understanding.
[0052]
Here, the carrier 20 is set around the entrance of the tunnel structure 83 in parallel with the transport direction, and this carrier 20 (the next carrier in the figure) is a cylinder that operates in conjunction with the transport pin 33 (see FIG. To the entrance of the tunnel structure 83. Then, the carrier 20 is carried into the tunnel 82 with the conveying pin 33 fitted in the feed pin hole 22 in the insertion direction.
[0053]
Further, six carriers 20 enter the tunnel 82, and one carrier 20 is set at the entrance of the tunnel 82. Six sets of transport pins 33 are arranged at almost equal intervals. is there. In this way, the fifth carrier 20 from the entrance side in the tunnel 82 is accurately moved by the distance that the transfer pin 33 moves.
As described above, the conveyance pins 33 are not limited to the case where they are arranged at six locations in pairs, and one or a plurality of conveyance pins 33 are set as one set, and are arranged at one location or a plurality of locations. It is good also as a structure to install.
[0054]
That is, as shown in FIG. 9, only one set of the transport pins 33 can be arranged around the entrance of the tunnel structure 83. That is, the positioning of each carrier 20 is not performed, and the inner dimension of the tunnel 82 and the outer dimension of the carrier 20 are managed, so that a plurality of continuous conveyance pins 33 are not used without using the intermediate conveyance pins 33. The carrier 20 is conveyed. In this case, when the positioning accuracy of the probe is rough, the structure of the carrier transport device can be simplified.
Although not shown, a structure in which the carrier 20 is moved from the lateral side surface of the carrier 20 instead of the transfer pin 33 can be used. Moreover, it is also possible to use direct conveyance in which an object is placed on a belt and conveyed without using the carrier 20.
[0055]
8 and 10, the probe head 42 is disposed between the fourth and fifth application pins 33 from the entrance side of the tunnel 82, and in particular, the fourth and fifth applications. The eye transfer pin 33 can also function as a positioning pin for the measurement probe 40.
[0056]
Next, the air blocking device 90 disposed in the upper tunnel structure 85 will be described with reference to the drawings.
FIG. 11 is a schematic enlarged cross-sectional view for explaining the air blocking device.
FIG. 12 is a schematic enlarged perspective view for explaining the air blocking device.
[0057]
In FIG. 11, since the transfer pin 33 moves in the transfer direction, the counter-transfer direction, and the vertical direction, the heat insulating cover 70 and the upper tunnel structure 85 are provided with elongated holes for moving the transfer pin 33. ing.
[0058]
The air blocking device 90 covers the elongated hole of the upper tunnel structure 85 from above, and is fitted into the shielding member 91 formed with an elongated hole and reciprocally movable in the loading direction, and the conveying pin 33 passes therethrough. And an air blocking member 92 having a through-hole formed therein.
[0059]
Further, as shown in FIG. 12, the shielding member 91 is formed with a groove into which the air shielding member 92 is inserted, and a shielding member main body 93 in which an elongated hole for moving the transfer pin 33 is formed on the bottom surface of the groove. And an upper cover 94 which is disposed on the upper surface of the shielding member main body 93 and has an elongated hole for the transfer pin 33 to move.
[0060]
In the air blocking device 90 configured as described above, the long hole formed in the upper tunnel structure 85 is blocked from external air by the bottom surface of the shielding member main body 93, and the long hole formed in the bottom surface of the shielding member main body 93 is The air is blocked by the air blocking member 92.
Therefore, the air blocking device 90 always has the transfer pin 33 penetrating through the through hole of the air blocking member 92. Therefore, even if the transfer pin 33 moves in the transfer direction, the counter-transfer direction, and the up-down direction, The outside air and the air in the tunnel 82 can be cut off almost completely, and the temperature control of the portion of the upper tunnel structure 85 where the elongate hole for the transfer pin 33 is moved is performed with high accuracy. Can do.
[0061]
Next, the air chamber 96 of the measurement probe 40 will be described with reference to the drawings.
FIG. 13: has shown the schematic enlarged view for demonstrating the air chamber of a measurement probe, (a) is sectional drawing when not forming an air chamber, (b) is the case where an air chamber is formed, A sectional view in a state where the measuring probe is not measuring is shown, and (c) is a sectional view in a state where the measuring probe is measuring when an air chamber is formed.
[0062]
In FIG. 6A, the insertion port 95 of the measurement probe 40 opened on the upper surface of the upper tunnel structure 85 and the heat insulating cover 70 is configured not to contact the measurement probe 40. A gap of 0.5 mm is formed.
With such a configuration, when the measurement probe 40 moves in the vertical direction, the insertion port 95 acts as a cylinder and the measurement probe 40 acts as a piston, and the air in the tunnel 82 is discharged outside the tunnel structure 83, In addition, air outside the tunnel structure 83 is blown into the tunnel 82, which is one of the factors that make the temperature control of the object unstable.
[0063]
On the other hand, as shown in FIGS. 2B and 2C, the measurement probe 40 moves in the vertical direction by extending the insertion port 95 into the upper tunnel structure 85 and providing the air chamber 96. Even so, the air in the tunnel 82 is replaced with the air in the air chamber 96, and the air temperature in the air chamber 96 is substantially equal to the air temperature in the tunnel 82. It can be performed with higher accuracy. Furthermore, the gap between the outer periphery of the main body of the measurement probe 40 and the insertion port 95a is narrowed, and the above-described gap may be secured even when the measurement probe 40 moves upward. In this way, the labyrinth Due to the effect of the seal, the replacement of the air in the air chamber 96 with the outside air can be reduced.
That is, by forming the air chamber 96, the air in the air chamber 96 is replaced with the outside air, but the outside air is not directly replaced with the air in the tunnel 82.
[0064]
Next, the operation of the thermostatic device 1 having the above configuration will be described.
When the thermostatic device 1 energizes each Peltier element 81, the metal tunnel structure 83 in surface contact with the upper surface of the Peltier element 81 is cooled, while the lower surface of the Peltier element 81 that rises in temperature is cooled by the cooling unit 50. The
Here, the tunnel structure 83 is subjected to high-speed and high-accuracy temperature control by heat conduction between metals from the Peltier element 81.
[0065]
When the tunnel structure 83 is lowered to a predetermined temperature by each Peltier element 81, the carrier 20 carrying the object is carried to the entrance of the tunnel 82.
The carrier 20 placed at the entrance of the tunnel 82 is moved by the transport pin 33 of the carrier transport device 30 being lowered and fitted into the feed pin hole 22, and then moving by the pitch length in the transport direction. In the tunnel 82, it is conveyed by the pitch length. Subsequently, the transfer pin 33 moves up in the direction opposite to the transfer direction after the transfer pin 33 rises and comes out of the feed pin hole 22, and waits until the next transfer time.
When this operation is repeated, the objects mounted on the carrier 20 are sequentially conveyed to the tunnel 82.
[0066]
The temperature of the conveyed object is first controlled by the carrier 20 by heat conduction between the metals from the tunnel structure 83, and then the temperature of the object is controlled by heat conduction by the metal from the carrier 20.
Thus, since the temperature of the object is controlled by heat conduction between metals, high-speed and highly accurate temperature control is performed.
[0067]
In addition, the thermostatic device 1 makes the gap between the tunnel structure 83 and the carrier 20 and the gap between the tunnel structure 83 and the heat insulating cover 70 the minimum gap, or by providing an air shut-off device 90, that is, thoroughly eliminates the adverse effects of outside air. This configuration is excluded.
In addition, since the thermostatic device 1 is an in-line system by providing the tunnel structure 83, it is not necessary to perform a wasteful operation such as placing an object, and productivity can be improved.
[0068]
When the carrier 20 is transported directly below the measurement probe 40, the thermostat 1 moves down the measurement probe 40 and measures the temperature characteristics of the object. That is, the object in the carrier 20 is configured to reach the target set temperature before starting to cool from the entrance of the tunnel 82 and reaching just below the measurement probe 40. Therefore, the production capacity of the thermostatic device 1 is determined by the conveyance speed, the time required for temperature control of the object, and the length of the thermostatic bath 10.
[0069]
In addition, since the thermostatic device 1 has the measurement probes 40 arranged in two rows and the objects are mounted on the carrier 20 in two rows, two objects can be measured simultaneously. Since the carrier 20 can be continuously introduced into the tunnel 82, the temperature characteristics of the object can be measured in a short time without interruption.
[0070]
As described above, according to the thermostatic device 1 according to the first embodiment, a tunnel structure using an aluminum alloy or the like having high thermal conductivity can be used without blocking heat conduction and radiant heat and causing natural convection as much as possible. By covering with an insulating cover that efficiently insulates the surroundings, the object can be rapidly heated and cooled, and highly accurate temperature control can be performed. Further, by using a Peltier element as a heating / cooling source, more accurate temperature control can be performed.
[0071]
[Second Embodiment]
Next, a second embodiment of the thermostatic device according to the present invention will be described with reference to the drawings.
FIG. 14: has shown the schematic perspective view for demonstrating the basic composition of the thermostat which concerns on 2nd embodiment of this invention.
In the figure, the thermostat is an air cooling system in which a fin type heat sink 34 is blown by a fan 35 or the like instead of a water cooling jacket as a cooling unit, and the other structures and operations are the thermostat of the first embodiment. Same as 1.
[0072]
That is, the thermostatic device 1 of the first embodiment has a low temperature of about −40 ° C. or lower or a high temperature of about 100 ° C. or higher as long as the target set temperature is within the temperature allowed by the Peltier element. However, if the target set temperature is not low enough to require a water cooling jacket, the thermostat of the second embodiment shown in the figure is a fin type heat sink instead of the water cooling jacket as a radiator. 34 is used to blow air with a fan 35 or the like for air cooling.
[0073]
In addition, the cooling method is not limited to the above method and is not shown, but a generally known cooling method such as a method of cooling by increasing the heat radiation area using a heat pipe or the like is sufficiently effective. It is. Furthermore, a method of efficiently cooling the heat sink using a heat separator or the like is also effective.
[0074]
Further, in the above embodiment, in the case of heating, the same effect can be obtained even if an electric heater such as a ceramic heater or a cartridge heater is used instead of the Peltier element.
That is, it is impossible or difficult to stabilize the temperature with the heater in the region from room temperature to low temperature, but it can function sufficiently in the high temperature region.
In the low temperature region, the same effect can be obtained by installing a heat medium such as cooling water or cooling gas on the lower surface or side surface of the tunnel. In this case, although the responsiveness and temperature stability are inferior to those of the Peltier element, the thermostatic device itself can be simplified.
[0075]
In the thermostat of the above embodiment, the number of measurement points is one in the thermostat. However, as shown in FIG. 15, the number of measurement points in the thermostat is increased and the measurement probes 40 are arranged at a plurality of measurement points. By providing, it is possible to perform measurement under different measurement conditions at the same temperature, for example, resistance measurement in a normal temperature inspection, reference frequency measurement, and the like in a crystal resonator.
Further, this thermostatic device can measure characteristics at different temperatures by increasing the number of Peltier elements and controlling each Peltier element.
Further, this thermostatic device has a temperature gradient in the tunnel, and a plurality of measurement points are provided, so that measurement with a temperature difference and measurement under different measurement conditions as described above are possible.
[0076]
In the said embodiment, although the heat insulation cover was made non-contact with a tunnel type thermostat, the same effect can be acquired even if it inserts a heat insulating material.
Further, if vacuum insulation is used instead of the insulation, the effect is further increased.
In the present invention, the metal is finished to have a mirror surface in order to block radiant heat, but instead of this, it is also effective to use a glass or resin mirror or a heat insulating sheet in which aluminum is deposited on a polyester film.
[0077]
In the thermostat according to the present invention, the thermostat using metal-to-metal heat conduction, the thermostat having a minimum gap between the heating means and / or the cooling means and the heat insulating cover, the gap between the tunnel structure and the conveying means is also provided. A constant temperature device having a minimum gap, a constant temperature device having a plurality of heating means and / or cooling means, a constant temperature device having a carrier means as a carrier conveyance device, a constant temperature device in which a carrier is pitch-fed, a constant temperature device having an air shut-off device, A thermostat using a Peltier element, a thermostat provided with a measurement probe, a thermostat provided with an air chamber, and a thermostat provided with a plurality of measurement probes can be implemented independently, and combinations thereof. As a matter of course, each of the effects can be exhibited.
[0078]
【The invention's effect】
As described above, the constant temperature device according to the present invention can perform high-speed and high-precision temperature control by using heat conduction between metals with high heat transfer efficiency, and has a tunnel structure. And by using a cooling means and controlling temperature while conveying a target object, productivity can be improved.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view for explaining a basic configuration of a thermostatic device according to a first embodiment of the present invention.
FIG. 2 is a schematic front view for explaining the basic configuration of the thermostatic device according to the first embodiment of the present invention.
FIG. 3 is a schematic plan view for explaining the basic configuration of the thermostatic device according to the first embodiment of the present invention.
FIG. 4 is a schematic side sectional view taken along line AA in FIG. 3;
FIG. 5 shows a schematic enlarged view of the thermostatic chamber of FIG. 4;
FIG. 6 is a schematic exploded view of a thermostatic chamber and a cooling unit of the thermostatic device according to the first embodiment of the present invention.
FIG. 7 is a schematic perspective view for explaining the structure of the carrier of the thermostatic device according to the first embodiment of the present invention.
FIG. 8 is a schematic perspective view of a main part for explaining the carrier transport device of the thermostatic device according to the first embodiment of the present invention.
FIG. 9 is a schematic perspective view of a main part for explaining an application example of the carrier conveying device of the thermostatic device according to the first embodiment of the present invention.
FIG. 10 is a schematic enlarged perspective view of a main part for explaining the positioning effect of the conveying pin of the thermostatic device according to the first embodiment of the present invention.
FIG. 11 is a schematic enlarged cross-sectional view taken along the line BB in FIG. 3;
FIG. 12 is a schematic enlarged perspective view for explaining the air shutoff device according to the first embodiment of the present invention.
13A and 13B are schematic enlarged views for explaining an air chamber of a measurement probe. FIG. 13A is a cross-sectional view when no air chamber is formed, and FIG. 13B is an air chamber. FIG. 6C is a cross-sectional view of a state where the measurement probe is not measuring, and FIG. 5C is a cross-sectional view of the state where the measurement probe is measuring when an air chamber is formed.
FIG. 14 is a schematic perspective view for explaining a basic configuration of a thermostatic device according to a second embodiment of the present invention.
FIG. 15 is a schematic perspective view for explaining an application example of the thermostatic device according to the present invention.
FIG. 16 is a schematic view for explaining a thermostatic device according to a conventional example.
[Explanation of symbols]
1 constant temperature device
10 Thermostatic bath
11 Peltier elements
20 Career
21 Work pocket
22 Feed pin hole
30 Carrier transport device
31 Horizontal drive source
32 Vertical drive source
33 Transport pin
34 Fin type heat sink
35 fans
40 Probe for measurement
41 Slide device
42 Probe head
50 Cooling unit
51 water cooling jacket
52 Insulated hose
53 Thermal insulation
60 pedestal
70 Insulation cover
71 Heat insulation cover outer wall
72 Thermal insulation
73 Insulation cover inner wall
74 Hinge
75 Cage
76 Insulation
80 Cooling means
81 Peltier element
82 Tunnel
83 Tunnel structure
84 Lower tunnel structure
85 Upper tunnel structure
86,87 RTD
90 Air shut-off device
91 Shielding member
92 Air blocking member
93 Shield member body
94 Top cover
95, 95a insertion slot
96 Air chamber
100 constant temperature device
101 Thermostatic bath
102 Line conveyor

Claims (9)

Transport means for transporting a temperature controlled object;
Heating means and / or cooling means having a tunnel structure in which the object is conveyed by the conveying means ;
A heat insulating cover that covers the heating means and / or cooling means and has a heat reflecting plate;
A measuring probe for measuring temperature characteristics of the object;
With
The transport means comprises a carrier that stores the object and moves in the tunnel structure, and a carrier transport device that transports the carrier,
The cross-sectional shape of the tunnel of the tunnel structure is similar to the side shape in the transport direction of the carrier,
A gap between the heating means and / or the cooling means and the heat insulating cover covering the heating means and / or the cooling means is a predetermined gap,
An air chamber cut off from outside air is formed at the insertion port of the measurement probe formed in the heating means and / or cooling means,
The heat conduction by contact of the object with the heating means and / or cooling means, or the heat conduction by contact of the object with the conveying means in contact with the heating means and / or cooling means, A constant temperature device in which the temperature of an object is controlled.   The thermostatic device according to claim 1, wherein the heat conduction is heat conduction between metals. The thermostat according to claim 1 or 2 , wherein the predetermined gap is 0.5 mm to 3 mm . The thermostatic device according to any one of claims 1 to 3, wherein a surface of the heat insulating cover is set to a mirror surface or a state close to a mirror surface. The thermostat according to any one of claims 1 to 4, comprising a plurality of the heating means and / or cooling means. Transport pins of the carrier transport device, by moving inserted into drilled feed pin hole in the carrier, any one of the preceding claims, wherein the carrier is a pitch feed The thermostat described in the item . 7. The thermostatic device according to claim 6, further comprising an air shut-off device for shielding an opening formed in the heating unit and / or the cooling unit, to which the transfer pin moves. The thermostat according to any one of claims 1 to 7, wherein the heating means and / or the cooling means are Peltier elements. The thermostat according to any one of claims 1 to 8, wherein a plurality of the measurement probes are arranged.

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