JP4664265B2 - X-ray analyzer - Google Patents

Description

  The present invention relates to an X-ray analyzer that analyzes a sample by using an X-ray, and more particularly to an X-ray analyzer that can capture measurement data as accurate as possible.

Irradiating the white X-rays in the sample, energy dispersive X-ray diffraction and spectrometer for analyzing a sample by detecting the diffraction line and the fluorescent X-ray at the irradiation position at the same time has been proposed (see Patent Document 1). This X-ray diffraction / spectroscopy apparatus moves white X-ray generation means and X-ray detection means to first and second discrete positions different from each other, and the X-ray for each energy is obtained by the X-ray detection means at each position. The intensity is obtained, and the obtained data is subjected to a predetermined process to obtain data relating to diffraction X-rays and fluorescence X-ray data.

  In this X-ray diffraction / spectroscopy apparatus, the X-ray generation means and the X-ray detection means can be moved to the first position and the second position for measurement, so that the apparatus has excellent portability. It can be done. Since it has good portability, it has the advantage that it can be carried in the place where the measurement object is installed and measured.

  Further, the applicant of the present application has proposed an X-ray analysis apparatus that can always perform the movement of the X-ray generation means and the X-ray detection means in a predetermined relationship (see Patent Document 2). The X-ray analyzer moves the X-ray generation means and the X-ray detection means along the same arc, and guides the irradiation direction of the X-ray generation means and the detection direction of the X-ray detection means to intersect at the center of the arc. And a detecting means moving device for moving the X-ray generating means and the X-ray detecting means along the guiding means, respectively, and the position to be measured at the center of the circular arc. It is configured to be set to a certain planned measurement position.

International publication WO 2005/005969 A1 Japanese Patent Application No. 2005-359017

  As described above, the X-ray analyzer disclosed in Patent Document 1 can carry out the measurement by carrying the X-ray analyzer to the installation location of the measurement object, thereby providing a highly versatile X-ray analyzer. .

  In the measurement by the X-ray analyzer, the measurement is performed at the first position and then at the second position. At this time, the positional relationship between the X-ray generation means and the X-ray detection means is also maintained in a predetermined relationship. There must be. That is, it is necessary to adjust the irradiation angle of the X-ray generated by the X-ray generation means to the measurement target and the detection angle by the X-ray detection means so as to be equal at the first position and the second position, respectively. In addition, it is necessary to match the measurement position in the measurement object at the time of measurement at the first position and at the second position, that is, before and after the movement of the X-ray generation means and the X-ray detection means. For this reason, high accuracy is required for the movement and stop positions of these X-ray generation means and X-ray detection means, the direction of incidence and detection, and the like.

  Moreover, in the X-ray analyzer described in Patent Document 2, the first position and the second position can be reliably moved, and the position to be measured can be easily changed between the first position and the second position. Can be matched. However, in order to increase the operation accuracy of the X-ray generation means and the X-ray detection means, the structure of the X-ray analyzer becomes strong and the weight increases. Further, there is a possibility that the first position and the second position, which are caused by the change in the center of gravity position of the X-ray analyzer due to the movement of the X-ray generation means and the X-ray detection means, are displaced from the measured position.

  Therefore, the present invention provides an X-ray analyzer that can move the X-ray generation means and the X-ray detection means with high accuracy and can reliably match the positions to be measured before and after the movement. It is aimed.

For the above purpose, an X-ray analyzer according to the present invention includes an X-ray generating means for irradiating a measurement target position with a white X-ray, and an X-ray detecting the energy and intensity of the X-ray emitted from the measurement position. The X-ray generation means and the X-ray detection means are respectively moved while maintaining the irradiation angle and the detection angle in a predetermined relationship, and based on the energy and intensity of the X-rays acquired by the X-ray detection means. In an X-ray analyzer that performs diffraction X-ray analysis and fluorescent X-ray analysis, movement of the X-ray generation means and X-ray detection formed by a guide rail having a shape along an arc centered on a measurement planned position for positioning the measurement position Common guiding means for guiding the movement of the means, and the guiding means, Each of the X-ray generation means and the X-ray detection means is connected to each other, and the X-ray generation means and the X-ray detection means are guided by the guide means and moved separately from each other. The X-ray generation means and the X-ray detection means can be moved in an irradiation direction and a detection direction, respectively, and both end portions of the guide rail are on the side of the guide rail laid out from the planned measurement position, and the X-ray generation The X-ray generation means and the X-ray detection means are arranged at a position where the irradiation direction and the detection direction are in a straight line when the angle with respect to the planned measurement position is the widest angle in the movement range of the X-ray detection means and the X-ray detection means. Can be moved to a position protruding from each end of the guide rail. It is characterized in that.

  That is, the X-ray generating means and the X-ray detecting means are moved separately. When the X-ray generation means and the X-ray detection means are moved, the positional relationship can be easily maintained by synchronizing them. For example, the X-ray generation means and the X-ray detection means are connected to the moving member, and a mechanism in which each of these means moves in accordance with the movement of the moving member is used to keep the positional relationship constant during movement. be able to. However, in order to increase the movement range of the X-ray generation device and the X-ray detection device, the movement range of the moving member becomes large, and the two means need to be moved. For this reason, the moving member may be positioned at a position protruding outside the X-ray analyzer, which may increase the installation space of the X-ray analyzer. For this reason, by moving the X-ray generation means and the X-ray detection means separately, the members that guide these movements are fixed at fixed positions, so that the members protruding from the X-ray analyzer are eliminated. .

  In the range of movement of the X-ray generator and X-ray detector, The position where the angle to the widest angle is the state where the irradiation direction and the detection direction are in a straight line It is a position close to. At this time, if the object to be measured is close to a plane such as a wall surface In the state of being at the widest position, the X-ray generation means and the X-ray detection means There is a case where some of the positions are in contact with the wall surface and these positions cannot be adjusted. For this reason In the widest position, these X-ray generation means and X-ray detection means are measured. By moving to the position farthest from the position, contact with the wall surface during adjustment Avoid it. After adjustment, move these means to the position to be measured to determine the X-ray irradiation distance and Adjust the detection distance. Further, the X-ray generating means and the X-ray detecting means are connected to the guide rail. In the state of being located at the end of the cable, the driving means for driving these is the X-ray generating means. It suffices if it is at a position sufficient to move the X-ray detection means. For this reason, Position the raw means and X-ray detection means so that they protrude beyond the end of the guide rail. The end of this guide rail is placed closer to the laying side than the planned measurement position. It is a thing.

  Further, the X-ray analyzer according to the invention of claim 2 is characterized in that the generating means driving means and the detecting means. The driving means includes a rack arranged in a predetermined positional relationship with the guide means, and a pin meshing with the rack. A drive motor for generating means and a drive motor for detecting means having a nonion gear, and the pinion gear. It is characterized by comprising

  That is, the movement of the X-ray generation means and the X-ray detection means is changed to a rack-pinion mechanism. The drive motor with the pinion fitted on the output shaft This drive motor is connected to the X-ray generation means and the X-ray detection means separately from each other. Each of these means moves each of these means relative to the rack. It is a thing.

  In addition, the X-ray analyzer according to the invention of claim 3 includes the drive motor for the generating means and the detection. The means drive motor comprises a stepping motor.

That is, a stepping motor is used as the driving motor.

According to a fourth aspect of the present invention, there is provided an X-ray analysis apparatus, wherein a base plate laid with the guide rail is formed in a shape along an arc similar to the guide rail, and both ends of the guide rail are formed at both ends of the base plate. A protruding portion that protrudes from the portion is provided, and the protruding portion is supported by a support bracket so as to be movable.

  Since the X-ray analyzer is advantageous in terms of ensuring portability, it is advantageous to make the base plate large enough to lay the guide rail. Therefore, the shape of the base plate is the same as that of the guide rail. Are formed in an arc shape. The base plate is supported by a holding plate or the like. The base plate protrudes from the holding plate or the like, and the protruding portion is movably supported by a support bracket. The support bracket is fixed to the gantry of the X-ray analyzer.

According to a fifth aspect of the present invention, the X-ray analyzer has a structure in which the guard rail is divided into an appropriate number, and a receiving groove for receiving the guide rail of the base plate is formed, and the guide rail is received in the receiving groove and installed. It is characterized by that.

  The guide rail needs to guide the movement of the X-ray generation means and the X-ray detection means with high accuracy, and is formed in an arc shape, so when it is formed in an integral arc shape, for example, it is inadvertent when fixing to the base plate If an excessive force is applied, an initial stress is generated and there is a risk of deformation due to aging. By increasing the processing accuracy, the initial stress generated at the time of fixing can be reduced. However, the manufacturing cost for processing increases, and there is a possibility that distortion may be caused by a slight temperature change. Even with this slight distortion, the guiding accuracy of the X-ray generating means and the X-ray detecting means is lowered, and the measurement efficiency may be lowered. For this reason, the guard rail has a split structure, and an accommodation groove for accommodating the guide rail is formed in the base plate.

In addition, the X-ray analyzer according to the invention of claim 6 attaches a maintenance plate having an arc surface equal to the arc surface inside the guide rail to the base plate, and maintains the arc shape of the guide rail by the maintenance plate. It is characterized by letting.

  As described above, it is inconvenient if the guide rail is deformed, and in order to prevent the deformation more reliably, a maintenance plate for maintaining the shape of the guide rail is provided.

  According to the X-ray analysis apparatus according to the present invention, it is not necessary to provide a moving member or the like for moving the X-ray generating means and the X-ray detecting means in synchronization by moving them separately. For this reason, unlike the case where a moving member etc. are provided, the part which protrudes outside an X-ray analyzer at the time of operation does not exist, and it can suppress that an X-ray analyzer enlarges. Therefore, the advantage excellent in portability is not impaired.

  In addition, the guide rail is formed in an arc shape, and the irradiation direction of the X-ray generation means and the X-ray inspection are performed. By adjusting the detection direction of the exit means so that it passes through the center of this arc, these are surely covered. The measurement position can be maintained in the oriented state. It should be movable in the irradiation direction and detection direction. Therefore, depending on the position of the X-ray generator and X-ray detector, If they are in contact with the measurement object, move them back to the position where they do not contact the measurement object. Adjustment of the irradiation angle and detection angle with respect to the position to be measured. I can. In addition, X-rays are generated to the point where they protrude beyond the end of the guide rail. Since the step and the X-ray detection means can be positioned, the irradiation angle with respect to the object to be measured And the detection angle can be set as wide as possible.

  Further, according to the X-ray analyzer according to the invention of claim 2, the X-ray emission can be achieved with a simple structure. The raw means and the X-ray detection means can be driven separately. And these are common Since the amount of movement can be made equal by carrying it to the rack of However, it is possible to easily adjust the position during movement.

  According to the X-ray analysis apparatus of the invention of claim 3, the X-ray generation means and the edge Because the movement of the X-ray detection means can be controlled with high accuracy, the measurement efficiency can be further increased. Can do.

Further, according to the X-ray analysis apparatus of the invention of claim 4 , since the base plate is formed in an arc shape in accordance with the guide rail, the measurement target is three-dimensional and the measurement position is a concave portion of this solid. Since the part ahead of the position to be measured can be positioned in the arcuate inner part, measurement can be performed without any trouble. Even if the X-ray generating means and the X-ray detecting means are located at the end of the guide rail, the base plate protrudes from the end of the guide rail and is supported by the support bracket so as to be movable. Since the base plate can be moved without bending, there is no problem in positioning the X-ray generation means and the X-ray detection means.

In addition, according to the X-ray analyzer according to the invention of claim 5 , it is not necessary to increase the processing accuracy of the guide rail, and it is possible to prevent distortion due to temperature change.

In addition, according to the X-ray analysis apparatus of the sixth aspect of the invention, the guide rail can be reliably prevented from being deformed, and the movement accuracy of the X-ray generation means and the X-ray detection means can be kept constant.

  The X-ray analyzer according to the present invention will be specifically described below based on the preferred embodiments shown in the drawings.

  FIG. 1 is a perspective view from the front of the X-ray analyzer 1 according to this embodiment, FIG. 2 is a plan view partially showing an operation for measurement, and FIG. 3 is a plan view illustrating the structure. A front view is shown in FIG. The X-ray analyzer 1 includes a generator 2 which is an X-ray generator that generates white X-rays, and a position (measurement position) where the white X-ray generated by the generator 2 irradiates the measurement object O to be measured. The X-ray reflected by the detector and detecting the X-ray energy and intensity at the position, the detecting device 3 is an X-ray detecting means, and the guide rail is a guiding means for guiding the movement of the generating device 2 and the detecting device 3 4 etc. The white X-ray generated from the generating means 2 is emitted from the tip of the generating means 2 through the capillary 12 extended in the irradiation direction, and is captured through the capillary 13 extended from the tip of the detecting means 3 in the detection direction.

The generating device 2 and the detecting device 3 are attached to and held by sliding plates 21 and 31, respectively. The sliding plates 21 and 31 are respectively directed to the holding plates 22 and 32 in the irradiation direction and the detection direction. It is possible to slide. Sliding of slide plates 21 and 31, as shown in FIG. 4, so as to be guided by the linear guide device G ₁₂ which is interposed between the sliding plate 21, 31 and the retaining plate 22, 32 It is. The sliding plates 21 and 31 are provided with engaging brackets 23a and 33a as shown in FIGS. 2 and 3 so as to protrude to the side of the generator 2 and the detector 3. On the other hand, each of the holding plates 22 and 32 is provided with a drive screw 23b, which is rotatable on support brackets 24a, 24b, 34a and 34b provided at both ends on the irradiation direction side and both ends on the detection direction side, 33b is stretched, and nut portions formed on the engagement brackets 23a and 33a are screwed onto the drive screws 23b and 33b, respectively. These drive screws 23b and 33b are protruded further to the back side than the support bracket 24a on the counter-exit side, that is, the back side of the generator 2, and the support bracket 34a on the counter-incident side, that is, the back side of the detector 3. The operation knobs 25 and 35 are fitted to the protruding portions, and when the operator picks and rotates the operation knobs 25 and 35, the drive screws 23b and 33b rotate. Further, on the surface of the holding plates 22 and 32 and along the drive screws 23b and 33b, scales 26 and 36 are engraved so that the positions of the engagement brackets 23a and 33a can be grasped. These holding plates 22 and 32 are connected to the guide rail 4 and are movable by being guided by the guide rail 4.

  The guide rail 4 is formed in an arc shape as shown in FIGS. As shown in FIGS. 2 and 3, the center of the arc of the guide rail 4 is an intersection C between the irradiation direction Do of the generator 2 and the detection direction Di of the detector 3, and this intersection C is a planned measurement position. Then, the measurement is performed in a state in which the position to be measured, which is the position for measuring the composition material of the measuring object O, coincides with the planned measurement position.

  As shown in FIG. 4, the guide rail 4 is formed in a cross-sectional dovetail shape, and the holding plates 22 and 32 are formed with connecting grooves 22 a and 32 a having a shape matching the cross-sectional shape, and the connecting grooves 22 a and 32 a The longitudinal direction is curved in an arc shape with a curvature equal to the curvature of the guide rail 4, and the holding plates 22 and 32 are connected to the guide rail 4 via the connecting grooves 22 a and 32 a. Therefore, the irradiation direction of the generator 2 and the detection direction of the detector 3 can be moved while maintaining the intersection C, that is, the planned measurement position. The guide rail 4 is divided and formed. In this embodiment, it is formed in three parts and is fixed to the base plate 5 by a set screw 4a. On the other hand, as shown in FIG. 4, a receiving groove 4b is formed in the base plate 5 at a position where the guide rail 4 is attached, and the lower end portion of the guide rail 4 is received in the receiving groove 4b. The arc shape of the rail 4 is maintained. Further, as shown in FIGS. 1 to 3, the base plate 5 is attached with a maintenance plate 5 a that is located inside the guide rail 4 and has a maintenance surface that has a shape matching the arc inside the guide rail 4. ing. That is, the guide rail 4 is accommodated and restrained in the accommodation groove 4b, and the maintenance plate 5a is fixed to the base plate 5 with the maintenance surface pressed against the inner surface of the guide rail 4, whereby the guide rail 4 is Prevents distortion. As described above, when the guide rail 4 guides the movement of the generating device 2 and the detecting device 3, a high accuracy is required for the positional relationship when the generating device 2 and the detecting device 3 are stopped. This is because if the guide rail 4 is distorted, the accuracy may not be maintained.

  An arcuate rack 6 having teeth 6a formed on the outer side along an arc concentric with the arc along which the guide rail 4 extends is disposed outside the guide rail 4. On the other hand, the holding plates 22 and 32 are respectively driven by generating means for moving the generator 2 and the detector 3 to the opposite sides of the generator 2 and the detector 3 with the drive screws 23b and 33b interposed therebetween. A generating means driving motor 27 as a means and a detecting means driving motor 37 as a detecting means driving means are respectively attached. Stepping motors are used as the drive motors 27 and 37 so that the movement of the generator 2 and the detector 3 can be controlled with high accuracy. Pinions 27 a and 37 a that mesh with the rack 6 are fitted on the output shafts of the drive motors 27 and 37. The pinions 27a and 37a are formed by overlapping two identically shaped gears in the axial direction and fitting them to the output shaft by slightly shifting the positions of the teeth of the two gears in the circumferential direction. The backlash generated between the teeth of the rack 6 is removed by the displacement of the teeth. That is, the generator 2 is moved along the guide rail 4 by the rack 6 and the pinion 27a and the drive motor 27 for generating means, and the detector 3 is moved along the guide rail 4 by the rack 6 and the pinion 37a and the drive motor 37 for detecting means. The generating device 2 and the detecting device 3 are driven separately so that they are moved. In FIGS. 2 and 3, the rack 6 and the pinions 27a and 37a are indicated by pitch circles.

  The base plate 5 has the guide rail 4 and the rack 6 laid thereon, and a base part 5b having a substantially arc shape sufficient for mounting the maintenance plate 5a, and a base part extended to the back of the base part 5b It is integrated with 5c. A control box 7 is attached to the base plate portion 5c, and drive circuits for the drive motors 27 and 37 are accommodated in the control box 7. A control circuit for outputting a control signal such as a drive signal to the drive circuit is disposed in a main box (not shown) disposed at a position appropriately separated from a measurement place by the X-ray analyzer 1. .

A support plate 8 is disposed below the base plate 5, and the base plate 5 and the support plate 8 are arranged in the Y direction which is the radial direction of the guide rail 4 in FIGS. 2 and 3 with respect to the support plate 8. movably in, they are allowed to interlocking through the linear motion guide device G _58. Further, the support plate 8 is disposed above the gantry plate 9, and the support plate 8 and the gantry plate 9 are arranged such that the support plate 8 is in the radial direction of the guide rail 4 in FIGS. 2 and 3 with respect to the gantry plate 9. movably to become X direction径直angle direction perpendicular to, are allowed to interlocking through the linear motion guide device G _89. The movement of the base plate 5 with respect to the support plate 8 is performed by the operation of the radial direction drive motor 51, and the movement of the support plate 8 with respect to the gantry plate 9 is performed by the radial direction drive motor 81. The moving mechanism has a structure in which a drive screw is rotated by the output rotation of the drive motors 51 and 81, and a nut portion screwed with the drive screw is provided in each of the base plate 5 and the support plate 8 and the like. can do.

  As described above, the base plate 5 is formed in a shape having a gantry portion 5b because it is necessary to form at least an arc shape. However, the support plate 8 and the gantry plate 9 are moved in the X direction and the Y direction. Any shape can be used as long as the mechanism to be performed can be incorporated. On the other hand, a reduction in size and weight of the X-ray analyzer 1 is preferable in order to ensure good portability. Also, if the base plate 5 has an arc shape, when the object to be measured O is three-dimensional and the measurement position is a concave portion of the solid, the portion in front of the measurement position is the inner side of the arc shape. Since it can be located in a part, a measurement can be performed without trouble and it is preferable. For this reason, it is preferable that the base plate 5 is formed in an arc shape, and the support plate 8 and the gantry plate 9 have a shape that does not have a protruding portion inside the arc shape. Therefore, in this embodiment, in order to support the base plate 5 and the support plate 8, the gantry plate 9 is formed in an arc shape having substantially the same shape as the gantry portion 5 b of the base plate 5, and the support plate 8 is attached to the gantry plate 9. On the other hand, it is possible to move in the X direction, and the base plate 5 is formed in a rectangular shape large enough to guide the movement of the base plate 5 in the Y direction. Since the support plate 8 is rectangular, the end of the base plate 5 on the measurement object O side, that is, the front side, is located away from the support plate 8. On the other hand, the generating device 2 and the detecting device 3 move to the end portion of the base plate 5, but when moved to the end portion, the base plate 5 may be bent due to the weight of the generating device 2 and the detecting device 3. There is. In order to prevent this, as shown in FIG. 5, a support bracket 10 fixed to the gantry plate 9 is disposed below the end of the base plate 5. The support bracket 10 is provided such that the support portion 10b can be moved up and down on a pedestal portion 10a fixed to the gantry plate 9 so that the height can be freely adjusted, and can be rolled on the upper surface of the support portion 10b. A support ball 10c is held on the surface. The base plate 5 is supported with its lower surface in contact with the support ball 10c. The lifting and lowering of the support portion 10b is performed by providing a screw portion 10d at the lower portion of the support portion 10b, and providing a pedestal portion 10a with a nut portion that engages with the screw portion 10d and rotating the screw portion 10d. be able to.

  The irradiation X-ray emitted from the generator 2 is guided to irradiate the capillary 12 with the measurement position, and the detection X-ray reflected at the measurement position is guided by the capillary 13 and enters the detection apparatus 3. The capillaries 12 and 13 are attached via covers 14 and 15 which are respectively placed on the generator 2 and the detector 3. The capillaries 12 and 13 are formed of hollow cylinders, and it is preferable that the capillaries 12 and 13 have the same shape because there is compatibility between the generator 2 and the detector 3. A capillary holder 16 is attached to the covers 14 and 15, and the capillaries 12 and 13 are held in the capillary holder 16. When the capillaries 12 and 13 have the same shape, it is preferable that the capillary holder 16 has a common shape for the generator 2 and the detector 3.

  FIG. 6 is a cross-sectional view showing a state in which the capillary 12 is held by the capillary holder 16. A capillary chuck 16a is inserted into the opening at the tip of the capillary holder 16, and the capillary 12 is inserted through the opening at the tip of the capillary chuck 16a. The capillary chuck 16a is formed with an enlarged diameter portion 16d having a diameter larger than that of the tip portion at the intermediate portion, and the tip opening portion of the capillary holder 16 has an annular shape whose inner diameter is smaller than that of the enlarged diameter portion 16d. The locking ring 16e is fixed. The outer diameter of the tip of the capillary chuck 16a is smaller than the inner diameter of the locking ring 16e. For this reason, the capillary chuck 16a is inserted from the proximal end side of the capillary holder 16 and arranged so that the stepped portion of the enlarged diameter portion 16d is in contact with the locking ring 16e. On the other hand, a lock nut 16b is loosely fitted to the capillary 12, and this lock nut 16b is screwed with a male screw formed on the outer peripheral surface of the tip end portion of the capillary chuck 16a. The tip of the capillary chuck 16a is slightly expanded outward, and when the lock nut 16b is tightened, the tip is bent inward. Further, a throat portion 16c having a diameter reduced so as to come into contact with the capillary 12 is formed on the inner peripheral surface of the capillary chuck 16a, and the throat portion 16c is further deformed by bending of the tip portion by tightening the lock nut 16b. The capillary 12 is reduced in diameter so as to hold the capillary 12 with an appropriate force. On the other hand, an adjustment screw 17 is screwed near the tip of the capillary holder 16. The adjustment screws 17 are provided at four positions at approximately equal intervals in the circumferential direction, and the tip is brought into contact with the capillary chuck 16a. The orientation direction of the capillary 12 can be adjusted by appropriately tightening the adjusting screws 17, and the capillary chuck 16a is held by the capillary holder 16.

  The cover 2 is attached to the generator 2, and the capillary holder 16 is attached to the tip of the cover 14. The tip of the generator 2 from which the X-rays are emitted is formed in a truncated cone shape, and the cover 14 is placed on the truncated cone portion. A cylindrical body 2a is continuous with the truncated cone base, and an annular holding frame 18 is fitted to the body 2a, and the cover 14 is fixed to the holding frame 18. As shown in FIG. 4, the cover 14 and the holding frame 18 are joined by a so-called in-row type by fitting the cover 14 into a recess formed on the front surface of the holding frame 18. Further, a flange portion 2b formed on the base portion of the body portion 2a of the generator 2 is fitted into a recess formed on the back surface of the holding frame 18, and is joined by a so-called in-row type. The flange portion 2b The fixing plate 18a is brought into contact with the back side of the plate, and the fixing plate 18a is screwed to the holding frame 18 so that the flange portion 2b is held between the holding frame 18 and the fixing plate 18a, and the generator 2 holds the holding plate 18a. It is fixed to the frame 18. The holding frame 18 is fixed to the sliding plate 21, and the generator 2 is attached to the sliding plate 21.

  On the other hand, a holding frame 19 is fitted to the detection device 3, and the cover 15 is fixedly attached to the holding frame 19. Further, the holding frame 19 is fixed to the sliding plate 31, and the detection device 3 is attached to the sliding plate 31.

  A pipe joint 20a is attached to the covers 14, 15, and the inside and outside of the cover 14 are communicated with each other via the pipe joint 20a, and the inside of the capillaries 12, 13 is communicated with the inside. As shown in FIG. 1, the tube 20 is connected to the pipe joint 20a. A helium gas supply device (not shown) is connected to the tube 20 so that helium gas is supplied from the inside of the cover 14 to the inside of the capillaries 12 and 13 as a seal gas. The supply amount of the sealing gas to the capillaries 12 and 13 can be adjusted by interposing a flow meter or the like in the middle of the tube 20.

  As shown in FIGS. 1 to 3, the guide rail 4 is provided on the base plate 5 along an arc centered on the intersection C. A distance measuring device 30 as a distance measuring means is provided on the intersection C side of the guide rail 4 of the base plate 5. The distance measuring device 30 includes a laser light source 31 that emits a laser beam, and a light receiving unit 32 that reflects the reflected laser beam on a measurement target and receives the reflected beam. Further, it is preferable that the laser beam has a traveling direction passing through the intersection C and has a diameter as small as possible. Further, the range to be measured by the distance measuring device 30 is a position in the radial direction including the intersection C, and may be a range of several millimeters before and after the intersection C. In particular, the distance to the intersection C is accurately measured. If possible, it is preferable. A driving circuit for the distance measuring device 30 and a processing circuit for the detected distance information are also accommodated in the control box 7.

  FIG. 7 is a diagram showing the configuration of a system for performing analysis by this X-ray analyzer, and the generation means 2 of the X-ray analyzer 1 is controlled to generate X-rays by an X-ray controller 101. On the other hand, the detection signal of the detection device 3 is sent to the computer 104 via the amplifier 102 and the multichannel analyzer 103. An output signal sent from the computer 104 is sent to the radial drive motor 51 and the radial drive motor 81 via the drive circuit in the control box 7 as a drive signal for the base plate 5 and the gantry plate 8. It has been sent out.

  The storage device of the computer 104 stores, as a database, so-called ICDD PDF data including data on the diffraction angle and intensity of diffraction X-rays of the substance for each simple substance. The composition material to be measured is identified by comparing with the X-ray intensity of the measurement data based on the detection signal of the detection device 3. FIG. 8 exemplifies a state in which the pattern of the X-ray intensity data obtained from the measurement object and the pattern provided in the database are compared on the display device 104a of the computer 104, and the X-ray intensity related to the measurement data. And the pattern included in the database are visually matched to identify the substance contained in the composition to be measured. That is, in FIG. 8, the data obtained from the measurement target is shown by continuous waveforms, and the ICDD PDF data is shown by a bar, and the peak of the measurement target data and the ICDD data is shown in FIG. By matching, the substance is identified by visually confirming on the display device 104a that the substance composition of the measurement object matches the data pattern of the substance read from the ICDD database.

  The operation of the X-ray analyzer 1 according to the embodiment of the present invention configured as described above will be described below.

  In this X-ray analyzer 1, white X-rays are emitted from the generator 2 toward the measurement object O, the X-rays reflected by the measurement object O are captured by the detection device 3, and the X-ray intensity is measured to measure the measurement object. Detect O composition material. In this measurement, the generation device 2 and the detection device 3 are moved, and the angle of the measurement object O with respect to the measurement position is, for example, a wide-angle position shown in FIG. 3 and a narrow-angle position shown by an imaginary line in FIG. For each of the cases. For this reason, it is necessary to reliably irradiate the measurement position with the X-rays emitted from the generator 2, and to reliably capture the X-rays reflected at the measurement position with the detection device 3. The measured position must be the same before and after the movement. First, an operation for matching the irradiation position of the generation device 2 with the detection position of the detection device 3 at this measurement position will be described.

  The directivity directions of the capillaries 12 and 13 of the generator 2 and the detector 3 are adjusted so as to intersect at the intersection C. The capillaries 12 and 13 are inserted into the capillary holder 16 in advance, and are inserted from the lock nut 16b side into the capillary chuck 16a in which the lock nut 16b is screwed to the tip. At this time, the lock nut 16b is loosened so that the capillaries 12 and 13 can be inserted smoothly. On the other hand, it is screwed into the capillary holder 16 and the adjusting screw 17 is appropriately tightened so that the capillary holder 16 holds the capillary chuck 16a. With the capillaries 12 and 13 inserted in the capillary chuck 16a, the lock nut 16b is tightened. As a result, the tip end portion of the capillary chuck 16a bends inward and the throat portion 16c presses the capillaries 12 and 13, so that the capillaries 12 and 13 are held by the capillary chuck 16a. Then, the posture of the capillary chuck 16a with respect to the capillary holder 16 is changed by tightening or loosening the adjustment screw 17. That is, since the adjustment screws 17 are provided at four positions at approximately equal intervals in the circumferential direction, the capillary chuck 16a is tightened by tightening one of the pair of adjustment screws 17 at the opposed positions and loosening the other. The adjustment screw 17 is inclined according to the direction of the pressing force. Therefore, the posture of the capillary chuck 16a can be changed according to the tightening state of the four adjusting screws 17, and the directivity directions of the capillaries 12 and 13 held by the capillary chuck 16a can be changed. The tightening state of each of the adjusting screws 17 is adjusted so that the directivity directions of the capillaries 12 and 13 pass through the intersection C.

And it installs so that the to-be-measured position in the measuring object O which is a sample may coincide with the intersection C. In this state, if the distance to the measurement position is measured by the distance measuring device 30, it can be determined whether or not the measurement position is on the intersection C. If the position to be measured does not coincide with the intersection C, the radial drive motor 51 and the radial direction drive motor 81 are operated as necessary. That is, when operating the径直angle direction drive motor 81, since the support plate 8 is moved is guided in the X direction perpendicular to the radial direction of the guide rail 4 relative to the mount plate 9 to the linear motion guide device G _89, Adjustment is performed so that the laser beam emitted from the distance measuring device 30 is incident on the measurement object O. When the distance obtained by the distance measuring device 30 is different from the distance between the reference point (not shown) set on the base plate 5 and the intersection C, the radial drive motor 51 is operated to 5 is moved in the Y direction with respect to the support plate 8. Thereby, the distance from the reference point (not shown) to the intersection C can be made equal to the distance from the measurement target O to the measurement position. As a result of these adjustments, the position to be measured is located at the intersection C. Therefore, a white X-ray is generated from the generator 2 and the energy and intensity of the X-ray at the position to be measured are detected by the detector 3. Moreover, although the edge part of the front part side of the base plate 5 is made into the state which removed from the said support plate 8, since this edge part is supported by the said support bracket 10 so that a movement is possible, the base plate 5 moves without trouble. Thus, the measurement position can be adjusted smoothly.

  The generation of the white X-ray from the generator 2 cannot be performed unless the distance measuring device 30 confirms that the position to be measured is located at the intersection C. For example, the output signal of the distance measuring device 30 is sent to the X-ray controller 101, and this output signal indicates that the measured position and the intersection C coincide with each other, that is, the distance information obtained by the distance measuring device 30 is a predetermined value. The operation of the generating device 2 is permitted by indicating the state where the distance has been reached. This is because the operator may need to work around the measurement object O during the operation of positioning the measurement position at a predetermined position, and an X-ray is generated during the operation. Since the irradiation direction is indefinite, the operator may be exposed, so that the generator 2 cannot be operated unless it is in a measurable state.

  A part of the X-rays emitted from the generator 2 is guided to the capillary 12 and irradiates the position to be measured, but a portion that does not enter the capillary 12 is generated. The portion of the X-ray that does not enter the capillary 12 is reflected within the cover 14. Since the cover 14 is fixed to the holding frame 18 and the holding frame 18 is attached to the generator 2 in a state of being connected to the fixing plate 18a, the reflected X-ray does not leak from the inside of the cover 14 to the surroundings. In particular, as in this embodiment, the cover 14 and the holding frame 18 are coupled by the in-row method by coupling the cover 14 and the holding frame 18 and the flange 2b of the generator 2 respectively. The gap formed between the fixed plates 18a and between the cover 14 and the generator 2 is formed in a labyrinth, so that X-ray leakage can be reliably prevented.

  On the other hand, since helium gas is supplied as a sealing gas to the capillary 12 of the generating device 2 and the capillary 13 of the detecting device 3, helium gas is ejected from the tips of the capillaries 12 and 13. The X-rays emitted from the generator 2 are guided to the capillary 12 and concentratedly irradiated to the measurement position, and a part of the X-rays reflected at the measurement position is guided to the capillary 13 and enters the detection apparatus 3. For this reason, these X-rays travel in the atmosphere of helium gas, and are prevented from being attenuated as much as possible in comparison with traveling in the atmosphere. Moreover, since the helium gas reaches the position to be measured, the X-rays are irradiated with the measuring object O without being in contact with the atmosphere at all, and are captured by the detection device 3. For example, when the object to be measured O is a part of a wall surface, as shown in FIG. 3, when the gap between the generator 2 and the detector 3 becomes a wide angle, the generator 2 or detection is performed. There is a risk that a part of the device 3 comes into contact with the wall surface. In such a case, the sliding plates 21 and 31 are moved with respect to the holding plates 22 and 32 while maintaining a wide angle state to prevent contact with the wall surface. At this time, the generation device 2 and the detection device 3 move in a direction away from the measurement position, and the distance from the capillaries 12 and 13 to the measurement position increases. Even in this case, since the helium gas is ejected from the capillaries 12 and 13 toward the measurement position, the X-rays surely travel in the helium gas atmosphere, and good detection efficiency can be maintained.

  Next, the generation device 2 and the detection device 3 are moved to change the irradiation angle and the detection angle. The generators 2 and 3 are moved by operating the drive motors 27 and 37, respectively. When the drive motors 27 and 37 are operated, the pinions 27a and 37a fitted to these output shafts are rotated, and the pinions 27a and 37a are brought into the rack 6 by the meshing of the pinions 27a and 37a with the rack 6. Roll along. As a result, the holding plates 22 and 32 that support the drive motors 27 and 37 are moved while being guided by the guide rails 4, and are attached to the holding plates 22 and 32 via the sliding plates 21 and 31. The generating device 2 and the detecting device 3 are moved along an arc centered on the intersection C. Moreover, the irradiation direction and the detection direction of the generator 2 and the detection device 3 are both maintained in a state where the intersection C is pointed.

  Measurement data relating to X-rays captured by the detection device 3 is input to the computer 104 via the amplifier 102 and the multichannel analyzer 103. The input measurement data is compared with data such as X-ray intensity for each substance in the database stored in the computer 104, and a substance showing the X-ray intensity included in the measurement data is identified. Prior to measurement, an index is created for the comparison data for the substance that is supposed to compose the measurement target, and the substance data corresponding to this index is read from the database stored in the computer 104 and compared with the measurement data. You can also

  According to the X-ray analyzer according to the present invention, the X-ray starting means and the X-ray detecting means can be moved with high accuracy, so that the measurement accuracy can be improved and the apparatus can be reduced in weight as much as possible. This contributes to making the X-ray analyzer more versatile.

The schematic structure is shown by the perspective view from the front of the X-ray analyzer which concerns on embodiment of this invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view for explaining a schematic structure and an operation for measurement of an X-ray analyzer according to an embodiment of the present invention, and a part thereof is shown by imaginary lines. It is a top view explaining the structure of the X-ray analyzer which concerns on embodiment of this invention. It is a front view of the X-ray analyzer which concerns on embodiment of this invention. It is a left view of the X-ray analyzer shown in FIG. It is sectional drawing explaining the attachment structure of the capillary of the X-ray analyzer which concerns on embodiment of this invention. It is a figure which shows the structure of the system which analyzes with the X-ray analyzer which concerns on this invention. It is a figure explaining the process which identifies a substance by the X-ray analyzer which concerns on this invention, and has shown the display content of the display apparatus of a computer.

Explanation of symbols

1 X-ray analyzer 2 Generator (X-ray generating means)
27 Drive motor 3 Detector (X-ray detector)
37 Drive motor 4 Guide rail 5 Base plate
51 Radial drive motor 6 Rack 7 Control box 8 Support plate
81 diameter right angle drive motor 9 Mounting plate
10 Support bracket
12 Capillary
13 Capillary
30 Ranging device
101 X-ray controller O Measurement object Do Irradiation direction Di Detection direction

Claims (6)

X-ray generation means for irradiating white X-rays to the measurement target position and X-ray detection means for detecting the energy and intensity of the X-rays emitted from the measurement position, and the irradiation angle and detection angle are predetermined. In the X-ray analyzer for performing diffraction X-ray analysis and fluorescence X-ray analysis based on the energy and intensity of X-rays acquired by the X-ray detection means, respectively moving the X-ray generation means and the X-ray detection means while maintaining the relationship of
A common guide means for guiding the movement of the X-ray generation means and the movement of the X-ray detection means, which is formed by a guide rail having a shape along an arc centered on a measurement planned position for positioning the measurement position;
The X-ray generating means and the X-ray detecting means are connected to the guiding means separately, and the X-ray generating means and the X-ray detecting means are guided by the guiding means and moved separately. Consisting of means,
The X-ray generation means and the X-ray detection means can be moved in an irradiation direction and a detection direction, respectively.
Both ends of the guide rail are on the side where the guide rail is laid out from the planned measurement position, and the angle with respect to these planned measurement positions becomes the widest angle in the movement range of the X-ray generation means and the X-ray detection means. Sometimes the irradiation direction and the detection direction are arranged in a straight line ,
An X-ray analyzing apparatus characterized in that the X-ray generating means and the X-ray detecting means can be moved to positions protruding from respective end portions of the guide rail.   The generating means driving means and the detecting means driving means have a rack arranged in a predetermined positional relationship with the guide means, a pinion gear meshing with the rack, and a driving motor for generating means and a driving motor for detecting means, each having the pinion gear. The X-ray analyzer according to claim 1, comprising: The X-ray analyzer according to claim 2, wherein the generation unit drive motor and the detection unit drive motor are stepping motors. The base plate on which the guide rail is laid is formed in a shape that is similar to the guide rail along a circular arc, and protrusions that protrude from both ends of the guide rail are provided at both ends of the base plate. The X-ray analyzer according to any one of claims 1 to 3 , wherein the protrusion is movably supported by a support bracket. A structure obtained by dividing the guard rail to the appropriate number, to form a receiving groove for accommodating the base plate of the guide rail, claims 1 to 4, characterized in that laid by accommodating the guide rail to the receiving groove X-ray analyzer according to any one of the above. And Installing the sustain board having an arc surface equal arcuate surface of the inside of the guide rails to the base plate, claims 1 to 5, characterized in that to maintain the arc shape of the guide rail by the sustain board X-ray analyzer according to any one of the above.

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