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JP4673231B2 - Insulating resin plate processing method and wiring board inspection jig provided with the insulating resin plate - Google Patents
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JP4673231B2 - Insulating resin plate processing method and wiring board inspection jig provided with the insulating resin plate - Google Patents

Insulating resin plate processing method and wiring board inspection jig provided with the insulating resin plate Download PDF

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JP4673231B2
JP4673231B2 JP2006025200A JP2006025200A JP4673231B2 JP 4673231 B2 JP4673231 B2 JP 4673231B2 JP 2006025200 A JP2006025200 A JP 2006025200A JP 2006025200 A JP2006025200 A JP 2006025200A JP 4673231 B2 JP4673231 B2 JP 4673231B2
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hole
processing
insulating resin
resin plate
wiring board
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JP2007203332A (en
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浩治 東郷
敏男 飛田
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大西電子株式会社
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Description

本発明は、配線板検査治具の保護プレート、先端保持プレートなどのような絶縁樹脂板に小さな貫通孔を形成する加工方法に関する。   The present invention relates to a processing method for forming a small through hole in an insulating resin plate such as a protective plate or a tip holding plate of a wiring board inspection jig.

例えば、プリント配線板を検査するための配線板検査治具として、プローブ自体の弾性撓みを利用したものが提案されている(例えば、特許文献1参照)。この種の検査治具は、一般に、プローブを含むプローブ構造部と、受けピンを含む受けピン構造部とから構成されている。プローブ構造部は、先端側の保護プレート及び先端保持プレートと末端側の末端保持プレートを備え、プローブの先端側が先端保持プレート及び保護プレートに保持され、その後端側が末端保持プレートに保持される。また、受けピン構造部は配線プレートを備え、配線プレートに受けピンの一端部が取り付けられ、プローブの後端部が受けピンの一端部に電気的に接触接続されるように構成されている。   For example, as a wiring board inspection jig for inspecting a printed wiring board, one utilizing an elastic deflection of the probe itself has been proposed (for example, see Patent Document 1). This type of inspection jig is generally composed of a probe structure including a probe and a receiving pin structure including a receiving pin. The probe structure part includes a protection plate on the tip side, a tip holding plate, and a terminal holding plate on the end side, the tip side of the probe is held by the tip holding plate and the protection plate, and the rear end side is held by the end holding plate. The receiving pin structure portion includes a wiring plate, and one end portion of the receiving pin is attached to the wiring plate, and the rear end portion of the probe is electrically connected to one end portion of the receiving pin.

このような配線板検査治具においては、プリント配線板の高密度化に伴い、プローブ及び受けピンの外径も細くなり、その外径が例えば0.08mm程度の大きさになっており、このことに関連して、プローブ及び受けピンを挿入するために形成される保持孔の内径もプローブ及び受けピンの外径とほぼ同じ大きさに形成される。   In such a wiring board inspection jig, the outer diameter of the probe and the receiving pin is reduced with the increase in the density of the printed wiring board, and the outer diameter is, for example, about 0.08 mm. In particular, the inner diameter of the holding hole formed for inserting the probe and the receiving pin is formed to be approximately the same as the outer diameter of the probe and the receiving pin.

例えば、保護プレート(及び先端保持プレート)の保持孔は、図7に示すように形成される。まず、厚さ1mm程度の保護プレート2の所定部位に、裏面(図7(a)において下面)側から例えばドリル加工を施して座グリ部4を形成し、この座グリ部4によって肉厚0.3〜0.5mm程度の薄肉厚部6を形成する。その後、保護プレート2の薄肉厚部6にその表面側から、外径が0.08mm程度のドリル刃8用いてドリル加工を施して保持孔10を形成する。   For example, the holding hole of the protection plate (and the tip holding plate) is formed as shown in FIG. First, a spot facing portion 4 is formed on a predetermined portion of the protective plate 2 having a thickness of about 1 mm by drilling, for example, from the back surface (the lower surface in FIG. 7A). A thin thick portion 6 of about 3 to 0.5 mm is formed. Thereafter, the holding hole 10 is formed by drilling the thin-walled portion 6 of the protective plate 2 from the surface side using a drill blade 8 having an outer diameter of about 0.08 mm.

上述したようにして保持孔10を形成すると、図7(a)及び(b)に示すように、ドリル刃8が座グリ部4に貫通する際に、保持孔10の開口部にバリ12が発生し易く、バリ12が発生すると、プローブ治具として組み付けたときに、プローブの挿入を阻害して所望の通りに保持することができなくなる。   When the holding hole 10 is formed as described above, the burr 12 is formed at the opening of the holding hole 10 when the drill blade 8 penetrates the counterbore part 4 as shown in FIGS. 7 (a) and 7 (b). When it is easy to occur and the burr 12 is generated, when it is assembled as a probe jig, the insertion of the probe is hindered and cannot be held as desired.

そのために、ドリル加工によって保持孔10を形成した後に、図7(b)に示すように、ドリル刃8を用いて保護プレート2の表面側及び裏面側から保持孔10の内周面のクリーニング加工を1回又は複数回行い、このクリーニング加工によりバリを除去している。   Therefore, after forming the holding hole 10 by drilling, as shown in FIG. 7B, the inner peripheral surface of the holding hole 10 is cleaned from the front surface side and the back surface side of the protective plate 2 using the drill blade 8. Is performed once or a plurality of times, and burrs are removed by this cleaning process.

特開2002−5980号公報JP 2002-5980 A

しかしながら、上述したようなドリル刃8のみを用いる加工では、バリを除去するためのクリーニング加工を繰り返し行う必要があり、それ故に、保持孔10の加工が非常に煩雑で、且つ加工時間が長くなり、製作コストが高価となる問題がある。この傾向は、加工する保持孔10の内径が小さくなる程大きくなり、近年の高密度化したプリント配線板を検査するための配線板検査治具においては、この保持孔10の加工に多くの時間を消費し、検査治具の総加工時間の約30%にも達することがある。   However, in the processing using only the drill blade 8 as described above, it is necessary to repeatedly perform the cleaning processing for removing burrs. Therefore, the processing of the holding hole 10 is very complicated and the processing time becomes long. There is a problem that the manufacturing cost becomes expensive. This tendency becomes larger as the inner diameter of the holding hole 10 to be processed becomes smaller. In a wiring board inspection jig for inspecting a printed wiring board having a high density in recent years, it takes much time to process the holding hole 10. And may reach about 30% of the total processing time of the inspection jig.

本発明の目的は、内径の小さい貫通孔をバリの発生なく加工することができ、これによって、加工時間を大幅に短縮することができる加工方法を提供することである。
本発明の他の目的は、加工時間を短縮し、これによって、製作時間、製作コストの低減を図ることができる配線板検査治具を提供することである。
An object of the present invention is to provide a machining method capable of machining a through-hole having a small inner diameter without generation of burrs, thereby greatly reducing the machining time.
Another object of the present invention is to provide a wiring board inspection jig capable of reducing the processing time and thereby reducing the manufacturing time and the manufacturing cost.

本発明の請求項1に記載の加工方法は、肉厚が0.5mm以下に加工された薄肉厚部に、肉厚に対する孔径の割合が1/3以下となる貫通孔を加工する絶縁樹脂板の加工方法において、
前記薄肉厚部にその一面側からレーザ光を照射し、前記薄肉厚部を貫通し且つ前記一面から他面に向けて先細に傾斜する座グリ部を形成し、その後、前記座グリ部の頂部に前記他面からドリル加工を施し、前記他面から前記一面に貫通する貫通孔を形成することを特徴とする。
According to a first aspect of the present invention, there is provided an insulating resin plate for processing a through hole in which a ratio of a hole diameter to a thickness is 1/3 or less in a thin thickness portion processed to a thickness of 0.5 mm or less. In the processing method of
The thin-walled portion is irradiated with laser light from one side thereof to form a spot facing portion that penetrates the thin-walled portion and tapers from the one surface toward the other surface, and then the top portion of the spot facing portion. And drilling from the other surface to form a through hole penetrating from the other surface to the one surface.

また、本発明の請求項に記載の加工方法では、前記レーザ光の照射前に、絶縁樹脂板の前記一面にドリル加工を施して所定深さの大座グリ部を形成し、前記大座グリ部を前記薄肉厚部とすることにより、段付きの貫通孔を形成することを特徴とする。 Further, in the processing method according to claim 2 of the present invention, before the laser light irradiation, the one surface of the insulating resin plate is drilled to form a large countersunk portion having a predetermined depth, and the large seat A stepped through-hole is formed by forming the groove portion as the thin-walled portion.

更に、本発明の請求項に記載の配線板検査治具は、請求項1又は2の加工方法によって加工された絶縁樹脂板を備えたことを特徴とする。 Furthermore, the wiring board inspection jig according to claim 3 of the present invention is characterized by including an insulating resin plate processed by the processing method of claim 1 or 2 .

本発明の請求項1に記載の加工方法によれば、絶縁樹脂板の薄肉厚部に一面側からレーザ光を照射して座グリ部を形成し、その後、座グリ部の頂部に他面側からドリル加工を施して貫通孔を形成する。座グリ部の加工にレーザ光を用いることによって、薄肉厚部を貫通し且つ一面から他面に向けて先細に傾斜する座グリ部が形成され、この座グリ部の表面は凹凸の非常に少ないきれいな面となる。その後、他面側からドリル加工を施すことによって、座グリ部の頂部に所定内径の貫通孔が形成され、この貫通孔を形成する際にも、座グリ部側の開口部にバリが発生することがなく、精度の高く且つきれいな貫通孔を形成することができる。 According to the processing method of the first aspect of the present invention, the countersunk portion is formed by irradiating the thin-walled portion of the insulating resin plate with a laser beam from one side, and then the other side on the top of the spot facing. A through hole is formed by drilling. By using a laser beam for the processing of the spot facing portion, a spot facing portion that penetrates the thin-walled portion and inclines in a tapered manner from one surface to the other surface is formed. It will be a clean surface. After that, by drilling from the other surface side, a through hole with a predetermined inner diameter is formed at the top of the spot facing portion , and when this through hole is formed, burrs are generated at the opening on the spot facing portion side. And a precise and clean through-hole can be formed.

特に、プリント配線板を検査する検査装置に用いる各種プレートは、電気的に絶縁性の樹脂板が用いられ、このような樹脂板に内径の非常に小さい精度の高い貫通孔を加工する場合、加工時に発生するバリが大きな問題となり、その後のバリ取りに多大な時間を要していたが、本発明の加工方法を採用することにより、バリが発生せず、加工時間の大幅な短縮を図ることができ、肉厚が0.5mm以下(例えば、0.3〜0.5mm程度)に加工された絶縁樹脂板の薄肉厚部に、肉厚に対する孔径の割合が1/3以下(例えば、0.07〜0.1mm程度)の貫通孔を加工するときに非常に有用となる。   In particular, various plates used in inspection devices for inspecting printed wiring boards use electrically insulating resin plates. When processing through holes with very small inner diameters on such resin plates, Burr that occurs sometimes becomes a big problem, and it takes a lot of time to deburr after that. By adopting the processing method of the present invention, burrs are not generated and the processing time is greatly reduced. The ratio of the hole diameter to the thickness is 1/3 or less (for example, 0) in the thin thickness portion of the insulating resin plate processed to have a thickness of 0.5 mm or less (for example, about 0.3 to 0.5 mm). .About 0.07 to 0.1 mm) is very useful when machining through-holes.

また、本発明の請求項に記載の加工方法によれば、レーザ光の照射前に、絶縁樹脂板の一面にドリル加工を施して所定深さの大座グリ部を形成し、この大座グリ部が貫通孔を形成する薄肉厚部となる。このように大座グリ部を形成することによって、板厚さ0.8〜1.0mm程度の絶縁樹脂板にも所望の貫通孔を形成することができ、その貫通孔は段付きの貫通孔となり、プリント配線板の各種プレートの加工に好都合なものとなる。 According to the processing method of claim 2 of the present invention, before the laser light irradiation, a large counterbore portion having a predetermined depth is formed by drilling one surface of the insulating resin plate. The corner portion becomes a thin-walled portion that forms a through hole. By forming the large spotted portion in this manner, a desired through hole can be formed in an insulating resin plate having a thickness of about 0.8 to 1.0 mm, and the through hole is a stepped through hole. Thus, it is convenient for processing various plates of the printed wiring board.

更に、本発明の請求項に記載の配線板検査治具によれば、請求項1又は2に記載の加工方法によって加工された絶縁樹脂板を用いるので、絶縁樹脂板の加工作業を簡単に、また加工時間を大幅に短縮することができ、配線板検査治具の製作時間、製作コストの低減を図ることができる。
Furthermore, according to the wiring board inspection jig according to claim 3 of the present invention, since the insulating resin plate processed by the processing method according to claim 1 or 2 is used, the processing operation of the insulating resin plate is simplified. In addition, the processing time can be greatly shortened, and the manufacturing time and manufacturing cost of the wiring board inspection jig can be reduced.

以下、添付図面を参照して、本発明に従う加工方法及びこの加工方法により加工された絶縁樹脂板を備えた配線板検査治具の実施形態について説明する。
配線板検査治具の構成
まず、図1〜図3を参照して、配線板検査治具の一実施形態について説明する。図1は、一実施形態の配線板検査治具の要部を示す断面図であり、図2は、図1の配線板検査治具を、プリント配線板を検査する状態で示す断面図であり、図3は、図1の配線板検査治具のプローブの先端部及びその近傍を拡大して示す部分拡大断面図である。
Hereinafter, with reference to the attached drawings, an embodiment of a processing method according to the present invention and a wiring board inspection jig provided with an insulating resin plate processed by this processing method will be described.
Configuration of Wiring Board Inspection Jig First, an embodiment of the wiring board inspection jig will be described with reference to FIGS. FIG. 1 is a cross-sectional view illustrating a main part of a wiring board inspection jig according to an embodiment. FIG. 2 is a cross-sectional view illustrating the wiring board inspection jig of FIG. 1 in a state in which a printed wiring board is inspected. FIG. 3 is a partially enlarged cross-sectional view showing the tip end portion of the probe of the wiring board inspection jig of FIG.

図1及び図2において、図示の配線板検査治具は、プローブ構造部32及び受けピン構造部34から構成されている。プローブ構造部32は、保護プレート36、先端保持プレート38、第1末端保持プレート40及び第2末端保持プレート42を備え、先端側(図1及び図2において上側)に保護プレート36及び先端保持プレート38が配設され、末端側(図1及び図2において下側)に第1末端保持プレート40及び第2末端保持プレート42が配設され、内側に配置されて相互に対向する先端保持プレート38と第1末端保持プレート40との間に撓み空間46が設けられている。これらプレート36,38,40,42は、電気的絶縁特性を有する樹脂板、例えばポリフェニレンサルファイド製の板などから形成することができる。   1 and 2, the illustrated wiring board inspection jig includes a probe structure portion 32 and a receiving pin structure portion 34. The probe structure 32 includes a protection plate 36, a tip holding plate 38, a first end holding plate 40, and a second end holding plate 42, and the protection plate 36 and the tip holding plate on the tip side (the upper side in FIGS. 1 and 2). 38, and a first end holding plate 40 and a second end holding plate 42 are provided on the end side (the lower side in FIGS. 1 and 2), and the end holding plates 38 are disposed on the inner side and face each other. And a first end holding plate 40 is provided with a bending space 46. These plates 36, 38, 40, and 42 can be formed from a resin plate having electrical insulation characteristics, such as a plate made of polyphenylene sulfide.

このプローブ構造部32は、更に、検査すべき配線板48の端子部50に電気的に接続されるプローブ52を備えている。このプローブ52は金属ワイヤ54から構成され、その両端部を除く他の部位が電気的絶縁層56(例えば、アクリル樹脂によるコーティング)により覆われている。このプローブ52の一端部(先端部)は保護プレート36及び先端保持プレート38に軸線方向(図1及び図2において上下方向)に移動自在に保持され、その他端部は第1及び第2末端保持プレート40,42に移動自在に保持されている。   The probe structure portion 32 further includes a probe 52 that is electrically connected to the terminal portion 50 of the wiring board 48 to be inspected. The probe 52 is composed of a metal wire 54, and other portions except for both ends thereof are covered with an electrically insulating layer 56 (for example, coating with acrylic resin). One end (tip) of the probe 52 is held by the protective plate 36 and the tip holding plate 38 so as to be movable in the axial direction (vertical direction in FIGS. 1 and 2), and the other ends are held by the first and second ends. The plates 40 and 42 are held movably.

この実施形態では、図3に拡大して示すように、保護プレート36の所定部位には座グリ部58が設けられ、かかる座グリ部58によって薄肉厚部59が設けられ、この薄肉厚部59に貫通孔60が設けられ、この貫通孔60が保持孔として機能する。また、先端保持プレート38には段付き貫通孔62が設けられ、かかる段付き貫通孔62が保持孔として機能する。プローブ52としての金属ワイヤ54の一端部(絶縁層56から露出する部位)は、先端保持プレート38の段付き貫通孔62の小内径部64並びに保護プレート36の座グリ部58及び貫通孔60を通して外部(図1において上方)に突出し、絶縁層56の一端部は先端保持プレート38の段付き貫通孔62の大内径部66内に位置している。従って、このプローブ52は貫通孔60及び段付き貫通孔62に沿って下方に移動することができるが、絶縁層56の一端面が段付き貫通孔62の段部に当接することによって、プローブ52の上方への移動が阻止され、プローブ52の抜けが防止される。 In this embodiment, as shown in an enlarged view in FIG. 3, a spot facing portion 58 is provided at a predetermined portion of the protective plate 36, and a thin thickness portion 59 is provided by the spot facing portion 58, and this thin thickness portion 59. Is provided with a through hole 60, and this through hole 60 functions as a holding hole. The tip holding plate 38 is provided with a stepped through hole 62, and the stepped through hole 62 functions as a holding hole. One end of the metal wire 54 serving as the probe 52 (a portion exposed from the insulating layer 56) passes through the small inner diameter portion 64 of the stepped through hole 62 of the tip holding plate 38 and the counterbore portion 58 and the through hole 60 of the protective plate 36. Projecting outward (upward in FIG. 1), one end portion of the insulating layer 56 is located in the large inner diameter portion 66 of the stepped through hole 62 of the tip holding plate 38. Accordingly, the probe 52 can move downward along the through hole 60 and the stepped through hole 62, but the probe 52 is brought into contact with the stepped portion of the stepped through hole 62 by one end surface of the insulating layer 56 contacting the stepped through hole 62. Is prevented from moving upward, and the probe 52 is prevented from coming off.

また、受けピン構造部34は配線プレート44を備え、配線プレート44に受けピン68の一端部が取り付けられている。受けピン68は金属ワイヤ70から構成され、この金属ワイヤ70の両端部を除く他の部位が電気的絶縁層72により覆われ、プローブ52の他端部(末端部)と受けピン68の一端部とが電気的に接触している。配線プレート44も電気的絶縁特性を有する樹脂板から形成される。   The receiving pin structure portion 34 includes a wiring plate 44, and one end portion of a receiving pin 68 is attached to the wiring plate 44. The receiving pin 68 is composed of a metal wire 70, and other portions except for both ends of the metal wire 70 are covered with an electrically insulating layer 72, and the other end portion (terminal portion) of the probe 52 and one end portion of the receiving pin 68. And are in electrical contact. The wiring plate 44 is also formed from a resin plate having electrical insulation characteristics.

この配線板検査治具においては、図2に示すように、検査すべきプリント配線板48が保護プレート36の上面の所定位置に位置付けられる。かくすると、配線板48によってプローブ52の一端部(先端部)が押圧され、プローブ52の中間部が撓み空間46において弾性的に幾分変形し、プローブ52の弾性復元力を利用して、その一端部がプリント配線板48の所定の端子部50に弾性的に接触し、その他端部が受けピン68の一端部に弾性的に接触し、プリント配線板48、プローブ52及び受けピン68が電気的に確実にコンタクトされ、かくして、受けピン68及びプローブ52を介して電流を印加することによって、プリント配線板48の電気抵抗値などを計測することができる。
In this wiring board inspection jig, the printed wiring board 48 to be inspected is positioned at a predetermined position on the upper surface of the protection plate 36 as shown in FIG. As a result, one end portion (tip portion) of the probe 52 is pressed by the wiring board 48 and the intermediate portion of the probe 52 is elastically deformed somewhat in the bending space 46, and the elastic restoring force of the probe 52 is used to One end elastically contacts a predetermined terminal portion 50 of the printed wiring board 48, the other end elastically contacts one end of the receiving pin 68 , and the printed wiring board 48, the probe 52, and the receiving pin 68 are electrically connected. Thus, the electrical resistance value of the printed wiring board 48 can be measured by applying a current through the receiving pin 68 and the probe 52.

このような配線板検査治具においては、保護プレート36の肉厚T1が例えば1.5mm程度で、その薄肉厚部59の肉厚が例えば0.3mm程度で、その座グリ部58の深さt2が例えば1.2mm程度であり、また薄肉厚部59の貫通孔60の内径が例えば0.06mm程度である。また、先端保持プレート38の肉厚が例えば0.5mm程度で、その段付き貫通孔66の小内径部64(先端保持プレート38の薄肉厚部を構成する)の肉厚t3が例えば0.2mm程度で、その段付き貫通孔66の大内径部66の肉厚t4が例えば0.3mm程度であり、またこの段付き貫通孔60の小内径部64の内径が例えば0.06mmで、その大内径部66の内径が例えば0.08mm程度である。   In such a wiring board inspection jig, the thickness T1 of the protective plate 36 is, for example, about 1.5 mm, the thickness of the thin-walled portion 59 is, for example, about 0.3 mm, and the depth of the spot facing portion 58. t2 is, for example, about 1.2 mm, and the inner diameter of the through hole 60 of the thin-walled portion 59 is, for example, about 0.06 mm. Further, the thickness of the tip holding plate 38 is about 0.5 mm, for example, and the thickness t3 of the small inner diameter portion 64 (which constitutes the thin thickness portion of the tip holding plate 38) of the stepped through hole 66 is 0.2 mm, for example. The thickness t4 of the large inner diameter portion 66 of the stepped through hole 66 is, for example, about 0.3 mm, and the inner diameter of the small inner diameter portion 64 of the stepped through hole 60 is, for example, 0.06 mm. The inner diameter of the inner diameter portion 66 is, for example, about 0.08 mm.

第1の実施形態の加工方法
例えば、保護プレート36の薄肉厚部59に上述した貫通孔60を形成する場合、図4に示す加工方法を用いることによって、高精度に且つきれいに加工することができる。図4(a)は、保護プレートにレーザ加工を施す状態を簡略的に示す断面図であり、図4(b)は、保護プレートにドリル加工を施す状態を簡略的に示す図である。
Processing method of the first embodiment For example, when the above-described through hole 60 is formed in the thin-walled portion 59 of the protection plate 36, the processing method shown in FIG. . FIG. 4A is a cross-sectional view schematically illustrating a state in which laser processing is performed on the protection plate, and FIG. 4B is a diagram schematically illustrating a state in which drilling is performed on the protection plate.

保護プレート36に貫通孔60を形成するには、例えばドリル加工を施して座グリ部58を形成し、このように座グリ加工を行うことによって、保護プレート36の所定部位に薄肉厚部59を形成する。そして、この薄肉厚部59の一面側(図3において下面側、図4(a)において上面側)から他面側(図3において上面側、図4(a)において下面側)にレーザ光72を照射してレーザ加工を施す(第1工程)。このようにレーザ加工を施すと、レーザ光72が照射された領域が溶融して加工が施され、一面から他面に向けて先細にテーパ状に傾斜する座グリ部74が形成される。このレーザ光72による加工は、レーザ光72が他面側に到達する(換言すると、薄肉厚部59を貫通する)まで行われ、このように加工することにより、座グリ部74の内周面に凹凸がほとんど存在せず、きれいに加工することができる。レーザとしては、例えばYAGレーザやCOレーザを用いることができる。 In order to form the through-hole 60 in the protection plate 36, for example, drilling is performed to form the spot facing 58, and the spot facing is thus performed, whereby the thin-thick portion 59 is formed at a predetermined portion of the protection plate 36. Form. Then, the laser beam 72 extends from one surface side (the lower surface side in FIG. 3, the upper surface side in FIG. 4A) to the other surface side (the upper surface side in FIG. 3 and the lower surface side in FIG. 4A). To perform laser processing (first step). When laser processing is performed in this manner, the region irradiated with the laser beam 72 is melted and processed, and a spot facing portion 74 that is tapered from one surface to the other surface is tapered. The processing with the laser beam 72 is performed until the laser beam 72 reaches the other surface side (in other words, penetrates the thin-walled portion 59), and by processing in this way, the inner peripheral surface of the spot facing portion 74 is obtained. There is almost no unevenness on the surface, and it can be processed neatly. For example, a YAG laser or a CO 2 laser can be used as the laser.

その後、薄肉厚部59に形成された座グリ部74に対応する部位(即ち、座グリ部74の頂部であって、レーザ光によって穴が形成された部位)に、他面側(図3において上面側、図4(b)において上面側)から一面側(図3において下面側、図4(b)において下面側)にドリル刃76を用いてドリル加工を施す(第2工程)。このようにドリル加工を施すと、ドリル刃76が座グリ部74の頂部を切削して加工が施され、他面から一面に向けて内径が等しい孔78が形成される。ドリル加工に用いるドリル刃76の外径は、レーザ加工によって形成された座グリ部74の頂部側の内径d1よりも大きく、その開口側の内径d2よりも小さく、このようなドリル刃76を用いて加工することによって、座グリ部74と孔78の境界部にバリなどが発生することがなく、薄肉厚部59に高精度のきれいな貫通孔60を形成することができる。   Thereafter, on the other surface side (in FIG. 3), a portion corresponding to the spot facing portion 74 formed in the thin-walled thick portion 59 (that is, the top portion of the spot facing portion 74 and the hole is formed by the laser beam). Drilling is performed using the drill blade 76 from the upper surface side, the upper surface side in FIG. 4B to the one surface side (the lower surface side in FIG. 3 and the lower surface side in FIG. 4B) (second step). When drilling is performed in this way, the drill blade 76 cuts the top portion of the counterbore portion 74 to perform processing, and a hole 78 having the same inner diameter is formed from the other surface to one surface. The outer diameter of the drill blade 76 used for drilling is larger than the inner diameter d1 on the top side of the spot facing 74 formed by laser processing, and smaller than the inner diameter d2 on the opening side, and such a drill blade 76 is used. As a result of this processing, no burrs or the like are generated at the boundary between the spot facing portion 74 and the hole 78, and the highly accurate clean through-hole 60 can be formed in the thin-walled portion 59.

上述した加工方法は、特に、電気的絶縁樹脂板の薄肉厚部に、肉厚に対する孔径の割合が小さい孔を形成する場合、具体的には、薄肉厚部の肉厚が0.5mm以下であり、このような薄肉厚部に肉厚に対する孔径の割合が1/3以下の貫通孔(例えば、肉厚0.5mmの薄肉厚部に例えば0.16mm又はそれ以下の内径の貫通孔)を形成する場合に非常に有用な加工方法である。内径が0.16mm以下の穴をドリル刃を用いて加工する場合、穴径が非常に小さい故に、刃部の長さが小さい特殊なドリル刃を用いて加工するようになり、このようなドリル刃を用いての加工では、絶縁樹脂板の粘性などによってバリが発生し易いという問題がある。これに対して、上述した加工方法では、ドリル加工の前に、レーザ加工によって座グリ部を形成するので、この座グリ部の内周面は凹凸のないきれいな状態に保たれており、このような座グリ部にその頂部側からドリル加工を施すので、ドリル刃により形成される孔と座グリ部との境界部にバリが発生することがない。従って、バリ取りのためのクリーニング加工を行う必要がなく、これによって、加工工数を少なくすることができ、加工時間の短縮、加工コストの低減を図ることができる。   In the processing method described above, in particular, when a hole having a small ratio of the hole diameter to the wall thickness is formed in the thin wall portion of the electrically insulating resin plate, specifically, the wall thickness of the thin wall portion is 0.5 mm or less. There is a through hole having a ratio of the hole diameter to the thickness of 1/3 or less (for example, a through hole having an inner diameter of 0.16 mm or less in the thin wall portion having a thickness of 0.5 mm) in such a thin wall portion. It is a very useful processing method when forming. When processing a hole with an inner diameter of 0.16 mm or less using a drill blade, the hole diameter is very small, so a special drill blade with a small blade length is used for processing. In processing using a blade, there is a problem that burrs are likely to occur due to the viscosity of the insulating resin plate. On the other hand, in the above-described processing method, the spot facing is formed by laser processing before drilling, so that the inner peripheral surface of the spot facing is kept clean with no irregularities. Since the drilling is applied to the counterbore part from the top side, no burr is generated at the boundary between the hole formed by the drill blade and the counterbore part. Therefore, it is not necessary to perform a cleaning process for deburring, whereby the number of processing steps can be reduced, and the processing time can be shortened and the processing cost can be reduced.

第2の実施形態の加工方法
上述した第1の実施形態の加工方法では、第1工程でレーザ加工を施し、その後、第2工程でドリル加工を施しているが、第2工程もレーザ加工を施すようにしてもよい。図5(a)は、第2の実施形態の加工方法における第1工程の加工を簡略的に示す断面図であり、図5(b)は、第2の実施形態の加工方法における第2工程の加工を簡略的に示す図である。
Processing method of the second embodiment In the processing method of the first embodiment described above, laser processing is performed in the first step and then drill processing is performed in the second step, but laser processing is also performed in the second step. You may make it give. FIG. 5A is a cross-sectional view schematically showing the first process in the processing method of the second embodiment, and FIG. 5B is the second process in the processing method of the second embodiment. FIG.

この加工方法では、保護プレート36の薄肉厚部59(上述したと同様にしてドリル加工により形成される)の一面側(図5(a)において上面側)から他面側(図5(a)において下面側)にレーザ光72を照射してレーザ加工を施す(第1工程)。この第1工程のレーザ加工は、図4(a)と同様にして行うことができる。   In this processing method, the thin-walled portion 59 of the protective plate 36 (formed by drilling in the same manner as described above) from the one surface side (the upper surface side in FIG. 5A) to the other surface side (FIG. 5A). In FIG. 2, laser processing is performed by irradiating the laser beam 72 to the lower surface side (first step). The laser processing in the first step can be performed in the same manner as in FIG.

その後、薄肉厚部59に形成された座グリ部74に対応する部位(即ち、座グリ部74の頂部であって、レーザ光によって穴が形成された部位)に、他面側(図5(b)において上面側)から一面側(図5(b)において下面側)にレーザ光80を照射してレーザ加工を施す(第2工程)。このように第2工程においてレーザ加工を施すと、座グリ部74の頂部側からレーザ加工が施され、ドリル刃を用いて加工したと略同様に、薄肉厚部59の他面から一面に向けて内径が等しい孔82が形成され、座グリ部74と孔82の境界部にバリなどが発生することがなく、上述した実施形態と同様に、保護プレート36の薄肉厚部59に高精度のきれいに加工された貫通孔60aを形成することができる。   Thereafter, on the other surface side (FIG. 5 (FIG. 5 ()), the portion corresponding to the spot facing portion 74 formed in the thin-walled thick portion 59 (that is, the top portion of the spot facing portion 74 and the hole is formed by the laser beam). Laser processing is performed by irradiating laser light 80 from the upper surface side in b) to the one surface side (lower surface side in FIG. 5B) (second step). In this way, when laser processing is performed in the second step, laser processing is performed from the top side of the counterbore portion 74, and the surface from the other surface of the thin-thickness portion 59 is directed to one surface in substantially the same manner as when processing using a drill blade. Thus, a hole 82 having the same inner diameter is formed, and no burr or the like is generated at the boundary portion between the spot facing portion 74 and the hole 82, and the thin-walled portion 59 of the protective plate 36 has a high accuracy as in the above-described embodiment. The finely processed through hole 60a can be formed.

上述した実施形態では、絶縁樹脂板に座グリ加工を施して薄肉厚部59を形成し、このように形成した薄肉厚部59に貫通孔60(60a)を形成しているが、絶縁樹脂板自体が薄い場合、この座グリ加工を省略し、第1工程及び第2工程の加工を施して直接的に貫通孔60(60a)を形成するようにしてもよい。   In the above-described embodiment, the insulating resin plate is subjected to spot facing to form the thin wall portion 59, and the through hole 60 (60a) is formed in the thin wall portion 59 thus formed. In the case where it is thin, the spot facing process may be omitted, and the through hole 60 (60a) may be formed directly by performing the processes of the first step and the second step.

第3の実施形態の加工方法
また、先端保持プレート38に上述した段付き貫通孔62を形成する場合、図6に示す加工方法を用いることによって、高精度に且つきれいに加工することができる。図6(a)は、先端保持プレートに第1工程のドリル加工を施す状態を簡略的に示す断面図であり、図6(b)は、先端保持プレートに第2工程のレーザ加工を施す状態を簡略的に示す図であり、図6(b)は、先端保持プレートに第3工程のドリル加工を施す状態を簡略的に示す図である。
Processing Method of Third Embodiment Also, when the above-described stepped through hole 62 is formed in the tip holding plate 38, the processing method shown in FIG. 6 can be used to perform high-precision and clean processing. FIG. 6A is a cross-sectional view schematically showing a state where the tip holding plate is subjected to drilling in the first step, and FIG. 6B is a state where the tip holding plate is subjected to laser processing in the second step. FIG. 6B is a diagram simply showing a state where the tip holding plate is subjected to the drilling process in the third step.

先端保持プレート38に段付き貫通孔62を形成するには、図6(a)に示すように、ドリル刃84を用いて先端保持プレート38の一面(図3において下面、図6において上面)にドリル加工を施して大座グリ部86を形成し、かく大座グリ部86を形成することによって、先端保持プレート38の所定部位に薄肉厚部88を形成する(第1工程)。この大座グリ部86の深さh1は、先端保持プレート38の肉厚T2が例えば0.5mmである場合に、例えば0.3mm程度となり、この大座グリ部86の深さh1が段付き貫通孔62の大内径部66の肉厚t4に対応する(図3も参照)。   In order to form the stepped through hole 62 in the tip holding plate 38, as shown in FIG. 6A, a drill blade 84 is used to form one surface of the tip holding plate 38 (the lower surface in FIG. 3 and the upper surface in FIG. 6). The large counterbore part 86 is formed by drilling, and the large counterbore part 86 is formed, thereby forming a thin-walled part 88 at a predetermined portion of the tip holding plate 38 (first step). The depth h1 of the large counterbore portion 86 is, for example, about 0.3 mm when the thickness T2 of the tip holding plate 38 is 0.5 mm, for example, and the depth h1 of the large counterbore portion 86 is stepped. This corresponds to the wall thickness t4 of the large inner diameter portion 66 of the through hole 62 (see also FIG. 3).

次いで、図6(b)に示すように、先端保持プレート38の薄肉厚部88の一面側(大座グリ部86が形成された側であって、図6(a)において上面側)から他面側(図6(a)において下面側)にレーザ光72を照射してレーザ加工を施す(第2工程)。このレーザ加工は、図4(a)と同様に行われ、かくレーザ加工を施すことによって、大座グリ部86の底面、即ち薄肉厚部88の一面から他面に向けて先細にテーパ状に傾斜する座グリ部90が形成される。このレーザ光72による加工は、上述したと同様に、レーザ光72が他面側に到達する(換言すると、薄肉厚部88を貫通する)まで行われ、このように加工することにより、大座グリ部90の内周面に凹凸がほとんど存在せず、きれいに加工することができる。レーザ加工による座グリ部90は、図6(b)に示すように、大座グリ部86に続いて延びるように形成され、この座グリ部90の開口部が段付き貫通孔62の段部92となる。   Next, as shown in FIG. 6 (b), the other side from the one surface side (the side on which the large counterbore portion 86 is formed and the upper surface side in FIG. 6 (a)) of the thin portion 88 of the tip holding plate Laser processing is performed by irradiating the laser beam 72 on the surface side (the lower surface side in FIG. 6A) (second step). This laser processing is performed in the same manner as in FIG. 4A, and by performing laser processing in this way, the bottom face of the large counterbore part 86, that is, from one side of the thin-walled part 88 to a taper shape tapering from the other side. An inclined spot facing 90 is formed. The processing with the laser beam 72 is performed until the laser beam 72 reaches the other surface side (in other words, penetrates the thin-walled portion 88), as described above. There is almost no unevenness on the inner peripheral surface of the corner portion 90, and it can be processed neatly. As shown in FIG. 6B, the spot facing 90 formed by laser processing is formed to extend following the large spot facing 86, and the opening of the spot facing 90 is the step of the stepped through hole 62. 92.

その後、薄肉厚部88に形成された座グリ部90に対応する部位(即ち、座グリ部90の頂部であって、レーザ光によって穴が形成された部位)に、他面側(図3において上面側、図6(c)において上面側)から一面側(図3において下面側、図6(c)において下面側)にドリル刃94を用いてドリル加工を施す(第3工程)。このようにドリル加工を施すと、ドリル刃94が座グリ部90の頂部を切削し、他面から一面に向けて内径が等しい孔96が形成され、この孔96が段付き貫通孔62の小内径部64となる。ドリル加工に用いるドリル刃94の外径は、第2工程のレーザ加工によって形成された座グリ部90の頂部側の内径よりも大きく、その開口側の内径よりも小さく、このようなドリル刃94を用いて加工することによって、座グリ部90と孔96の境界部にバリなどが発生することがなく、先端保持プレート38に高精度のきれいに加工された段付き貫通孔62を形成することができる。   Thereafter, on the other side (in FIG. 3), a portion corresponding to the spot facing 90 formed in the thin wall portion 88 (that is, the top of the spot facing 90 where a hole is formed by laser light). Drilling is performed from the upper surface side, the upper surface side in FIG. 6C, to one surface side (the lower surface side in FIG. 3 and the lower surface side in FIG. 6C) using the drill blade 94 (third step). When drilling is performed in this way, the drill blade 94 cuts the top of the counterbore 90, and a hole 96 having the same inner diameter is formed from the other surface to one surface. The inner diameter portion 64 is obtained. The outer diameter of the drill blade 94 used for drilling is larger than the inner diameter on the top side of the spot facing 90 formed by the laser processing in the second step, and smaller than the inner diameter on the opening side. By using this, no burr or the like is generated at the boundary between the spot facing portion 90 and the hole 96, and the stepped through-hole 62 processed with high precision can be formed in the tip holding plate 38. it can.

この第3の実施形態の加工方法では、第2工程のレーザ加工の後に第3工程のドリル加工を施しているが、第2の実施形態と同様に、第2工程のレーザ加工の後に第3工程のレーザ光を施すようにしてもよい。   In the processing method of the third embodiment, the drilling of the third step is performed after the laser processing of the second step. However, as in the second embodiment, the third processing is performed after the laser processing of the second step. You may make it give the laser beam of a process.

上述した実施形態では、本発明に従う加工方法を配線板検査治具の保護プレート36及び先端保持プレート38の加工に適用して説明したが、これらプレート36,38の加工に限定されず、配線板検査治具のその他のプレートの加工にも適用することができ、更に配線板検査治具以外の一般的な絶縁樹脂板の加工にも同様に適用することができる。   In the above-described embodiments, the processing method according to the present invention has been described by applying to the processing of the protection plate 36 and the tip holding plate 38 of the wiring board inspection jig. However, the processing method is not limited to the processing of these plates 36 and 38, and the wiring board The present invention can be applied to the processing of other plates of the inspection jig, and can also be applied to the processing of general insulating resin plates other than the wiring board inspection jig.

実施例
本発明の効果を確認するために、第1の実施形態の加工方法を用いて次の通りの加工実験を行った。絶縁樹脂板として肉厚0.5mmにスライス加工したテクトロンPPS(ポリフェニレン・サルファイド)(日本ポリペンコ株式会社製)を用いた。第1工程において、加工用にYAGレーザ(波長:532nm)を用い、絶縁樹脂板の裏面からレーザ光を照射して座グリ部を形成した。照射したレーザ光は、平均出力が8.0Wで、Qスイッチの繰返し周波数が10KHzで、パルス幅が100nsであった。このレーザ光を約100回照射し、このような条件で照射して、開口側(レーザ光が照射される裏面側)の内径が0.09mmで、頂部側(レーザ光が照射される側と反対の表面側)の内径が0.04mmである先細にテーパ状に傾斜した座グリ部を形成した。
Example In order to confirm the effect of the present invention, the following processing experiment was performed using the processing method of the first embodiment. As an insulating resin plate, Tektron PPS (polyphenylene sulfide) (manufactured by Nippon Polypenco Co., Ltd.) sliced to a thickness of 0.5 mm was used. In the first step, a spot facing portion was formed by irradiating laser light from the back surface of the insulating resin plate using a YAG laser (wavelength: 532 nm) for processing. The irradiated laser light had an average output of 8.0 W, a Q-switch repetition frequency of 10 KHz, and a pulse width of 100 ns. This laser beam is irradiated about 100 times and irradiated under such conditions. The inner diameter of the opening side (the back side where the laser beam is irradiated) is 0.09 mm, and the top side (the side where the laser beam is irradiated) A counterbore part inclined in a tapered shape having an inner diameter of 0.04 mm on the opposite surface side was formed.

その後、第2加工において、ドリル刃を用いて切削加工を行った。用いたドリル刃の刃長が0.8mmで、外径が0.06mmであり、このドリル刃を用いて絶縁樹脂板の表面から裏面に切削加工を行い、このようにして絶縁樹脂板に貫通孔を形成した。   Thereafter, in the second processing, cutting was performed using a drill blade. The drill blade used has a cutting length of 0.8 mm and an outer diameter of 0.06 mm. Using this drill blade, cutting is performed from the front surface to the back surface of the insulating resin plate, thus penetrating the insulating resin plate. A hole was formed.

この第2工程のドリル加工後に、形成した貫通孔の内周面及びその周縁部を調べたところ、バリなどの発生が見られず、きれいな表面であった。このことから、第2加工後にクリーニング加工を必要とせず、第1及び第2加工でもってきれいな貫通孔を形成することが可能であることが確認できた。   After the drilling in the second step, the inner peripheral surface of the formed through-hole and the peripheral portion thereof were examined. As a result, no burrs were observed and the surface was clean. From this, it was confirmed that it is possible to form a clean through hole by the first and second processes without the need for a cleaning process after the second process.

一実施形態の配線板検査治具の要部を示す断面図である。It is sectional drawing which shows the principal part of the wiring board inspection jig | tool of one Embodiment. 図1の配線板検査治具を、プリント配線板を検査する状態で示す断面図である。It is sectional drawing which shows the wiring board inspection jig of FIG. 1 in the state which test | inspects a printed wiring board. 図1の配線板検査治具のプローブの先端部及びその近傍を拡大して示す部分拡大断面図である。It is the elements on larger scale which expand and show the front-end | tip part of the probe of the wiring board inspection jig | tool of FIG. 1, and its vicinity. 図4(a)は、第1の実施形態の加工方法における第1工程のレーザ加工を説明するための断面図であり、図4(b)は、その第2工程のドリル加工を説明するための断面図である。FIG. 4A is a cross-sectional view for explaining laser processing in the first step in the processing method of the first embodiment, and FIG. 4B is for explaining drill processing in the second step. FIG. 図5(a)は、第2実施形態の加工方法における第1工程のレーザ加工を説明するための断面図であり、図5(b)は、その加工方法における第2工程のレーザ加工を説明するための断面図である。FIG. 5A is a cross-sectional view for explaining the laser processing in the first step in the processing method of the second embodiment, and FIG. 5B shows the laser processing in the second step in the processing method. It is sectional drawing for doing. 図6(a)は、第3実施形態の加工方法における第1工程のドリル加工を説明するための断面図であり、図6(b)は、その加工方法における第2工程のレーザ加工を説明するための断面図であり、図6(c)は、その加工方法における第3工程のドリル加工を説明するための断面図である。FIG. 6A is a cross-sectional view for explaining the drilling process in the first step in the machining method of the third embodiment, and FIG. 6B shows the laser machining in the second step in the machining method. FIG. 6C is a cross-sectional view for explaining the drilling process in the third step in the processing method. 図7(a)は、従来の加工方法におけるドリル加工を説明するための断面図であり、図7(b)は、ドリル加工後に行われるクリーニング加工を説明するための断面図である。FIG. 7A is a cross-sectional view for explaining drilling in a conventional processing method, and FIG. 7B is a cross-sectional view for explaining cleaning processing performed after the drilling.

符号の説明Explanation of symbols

32 プローブ構造部
34 受けピン構造部
36 保護プレート
38 先端保持プレート
48 プリント配線板
52 プローブ
58,74,94 座グリ部
59,88 薄肉厚部
60,60a 貫通孔
62 段付き貫通孔
68 受けピン
72,80 レーザ光
76,84,94 ドリル刃
78,96 孔
86 大座グリ部
92 段部
32 Probe structure part 34 Receiving pin structure part 36 Protection plate 38 Tip holding plate 48 Printed wiring board 52 Probe 58, 74, 94 Spot facing part 59,88 Thin wall part 60, 60a Through hole 62 Stepped through hole 68 Receiving pin 72 , 80 Laser beam 76, 84, 94 Drill blade 78, 96 hole 86 Large counterbore part 92 Step part

Claims (3)

肉厚が0.5mm以下に加工された薄肉厚部に、肉厚に対する孔径の割合が1/3以下となる貫通孔を加工する絶縁樹脂板の加工方法において、
前記薄肉厚部にその一面側からレーザ光を照射し、前記薄肉厚部を貫通し且つ前記一面から他面に向けて先細に傾斜する座グリ部を形成し、その後、前記座グリ部の頂部に前記他面からドリル加工を施し、前記他面から前記一面に貫通する貫通孔を形成することを特徴とする絶縁樹脂板の加工方法。
In the processing method of the insulating resin plate for processing the through hole in which the ratio of the hole diameter to the thickness is 1/3 or less in the thin thickness portion processed to the thickness of 0.5 mm or less,
The thin-walled thick portion is irradiated with laser light from one side thereof, and a counterbore portion that penetrates the thin-walled portion and tapers from the one surface toward the other surface is formed. And drilling from the other surface to form a through hole penetrating from the other surface to the one surface.
前記レーザ光の照射前に、絶縁樹脂板の前記一面にドリル加工を施して所定深さの大座グリ部を形成し、前記大座グリ部を前記薄肉厚部とすることにより、段付きの貫通孔を形成することを特徴とする請求項に記載の絶縁樹脂板の加工方法。 Before the laser light irradiation, the one surface of the insulating resin plate is drilled to form a large countersunk portion having a predetermined depth, and the large countersunk portion is formed into the thin-walled portion. The method for processing an insulating resin plate according to claim 1 , wherein a through hole is formed. 請求項1又は2に記載の加工方法によって加工された絶縁樹脂板を備えたことを特徴とする配線板検査治具。 A wiring board inspection jig comprising an insulating resin plate processed by the processing method according to claim 1 .
JP2006025200A 2006-02-02 2006-02-02 Insulating resin plate processing method and wiring board inspection jig provided with the insulating resin plate Expired - Fee Related JP4673231B2 (en)

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