JP4699345B2 - Part joining method, part joining apparatus, droplet discharge head manufacturing method, and droplet discharge head manufacturing apparatus - Google Patents

Description

  The present invention relates to a high-precision position adjustment technique for inkjet printhead components.

  Conventionally, a joining method and a joining apparatus for parts are known (see, for example, Patent Document 1).

  As a panel laminating method in which two panels are pressed and bonded in a state where they are overlapped with an adhesive, two sheets are pressed until the predetermined pressure is reached. At least one of the panels is moved in parallel to the panel surface by a movement distance corresponding to a preset predicted displacement amount, and when the predetermined pressure is reached, the two panels are added while being aligned. End pressure.

In addition to this, a method and apparatus for assembling fine parts have been proposed by the applicant himself (see Patent Document 2).
JP 2004-212987 A JP 2004-98248 A

  An increasing number of image equipment devices, such as printers, facsimiles, and copiers, record images using ink jet print heads that eject ink and print on paper. Ink jet heads of various structures are known, and a plurality of nozzles for ejecting ink droplets, electromechanical conversion elements provided corresponding to each nozzle, actuators such as heating resistors, and the like When the actuator corresponding to each nozzle is selectively driven, ink droplets corresponding to the recording signal are ejected from the nozzle to form an image.

  As an example of an ink jet head, a plurality of piezoelectric elements are provided on a substrate, a displacement portion of a diaphragm is joined to the piezoelectric element, and a flow path plate for forming the diaphragm and a liquid chamber is joined. The nozzle plate is joined on the flow path plate so that each nozzle corresponds to the displacement portion of the vibration plate, and the piezoelectric element is driven to pressurize the ink in the liquid chamber via the vibration plate, There is one in which ink is ejected from a nozzle. In order to perform high-density and high-quality recording in such an inkjet head, it is necessary to assemble each component that constitutes the inkjet head, each minute component such as a nozzle plate, a flow path plate, a vibration plate, and a piezoelectric element with high accuracy. There is.

  In order to realize such high-precision assembly, not only an inkjet head but various assembling apparatuses have been proposed.

  For example, regarding a liquid crystal panel manufacturing apparatus, in Patent Document 1 “Panel Bonding Method and Apparatus”, a vertical pressing operation is performed with respect to a positional deviation when two parts are pressed through an adhesive. A method of realizing high-precision positioning by alternately or simultaneously repeating horizontal alignment operations, and moving the horizontal direction relative to the horizontal direction by a preset movement distance corresponding to the pressurization operation Has been proposed.

  Further, Patent Document 2 detects the position detection reference marks of the two types of components again during the pressure bonding of the first component and the second component, and determines the positional deviation amount of the two types of components after the bonding. It is a method for assembling a fine part characterized by comprising a joining inspection process for performing re-calculation and performing a joining inspection based on the result of the computation. The amount of positional deviation of the finished product after pressure joining is inspected, and the inspection result is obtained. There has been proposed a method for preventing the outflow of defective products to a subsequent process by adding to a finished product.

  In the above Patent Document 1 and Patent Document 2, the system is based on the premise that the alignment mark used for component alignment can be detected even after pressurization after alignment. However, in recent years, miniaturization of parts has progressed, and it has become difficult to secure a sufficient area for the alignment mark, and the adhesive area and the alignment mark area have become much narrower than conventional ones. However, a situation has occurred in which the alignment mark cannot be detected because it protrudes into the alignment mark region. For this reason, in the said patent document 1 and patent document 2, there exists a problem that the positional accuracy of the components after pressurization cannot be detected.

  In view of these problems, an object of the present invention is to provide a bonding apparatus that can ensure alignment accuracy and bonding quality of a component even when the alignment mark of the component cannot be detected after pressing.

In order to achieve the above object, the invention described in claim 1 includes a component supplying step of setting the first component and the second component so as to face the upper stage surface and the lower stage surface, respectively. the first component position reference marks and the second component position reference mark and said first part position reference mark upward detection by the mark detecting means from above the first component and the second component of the of an alignment step, and the first part and the lower stage surface and the second component and the upper stage surface in contact through the adhesive relatively approach for performing relative alignment of the a method of bonding parts with a pressurizing step of pressurizing the first component and the second component in the direction, and after the alignment step, the mark detecting means, provided on said stage Position reference mark and A stage reference position moving step of horizontally moving to a position directly above the position reference mark provided on the lower stage, and the position of the upper stage provided at substantially the same height as the position reference mark of the first component A stage in which a reference mark and a position reference mark of the lower stage provided at substantially the same height as the position reference mark of the second part are detected from above the position reference mark of the upper stage by the mark detection means. a detecting step, a first relative position calculation step of calculating the relative position between the position reference mark of the first component position reference mark and the upper stage, before Symbol the lower the position reference mark of the second part a second relative position calculation step of calculating the relative position between the position reference mark of the stage, and positional information of the obtained vertical stage before kissing stage detection step, the first, second relative position First, based on the second relative position information, the first piece with determining the position of said second component, said second component and said first component obtained respectively calculated step And a relative position between the first component and the second component calculated from the position calculation step during pressurization in the pressurization step. And a position correcting step of correcting the deviation amount within a specified value .

According to a second aspect of the present invention, there is provided a part joining method according to the first aspect, further comprising a joining completion judging step for judging the joining completion based on the result of the position judging step .

In the invention described in claim 3, in the joining completion determining step, a specified pressure is obtained from relative position information of the first component and the second component and pressure information in the pressurizing step. The part joining method according to claim 2, wherein it is determined that the specified position accuracy is obtained .

Furthermore, in the invention described in claim 4, the first component and the second component are any one of the vibration plate, the flow channel plate, and the nozzle plate as the first component and the second component. Each of the first component position reference mark and the second component position reference mark of the first component. An alignment step of detecting the position reference mark from above the position reference mark and performing relative alignment between the first component and the second component; and bonding the first component and the second component together A liquid droplet ejection head comprising: a pressurizing step of pressurizing the first component and the second component in a direction in which the upper stage surface and the lower stage surface are relatively close to each other through an agent The method of manufacturing, wherein the alignment step A stage reference position moving step for horizontally moving the mark detection means to a position directly above a position reference mark provided on the upper stage and a position reference mark provided on the lower stage; and the first component. The position reference mark of the upper stage provided at substantially the same height as the position reference mark of the second stage and the position reference mark of the lower stage provided at substantially the same height as the position reference mark of the second part A stage detection step of detecting from above the position reference mark of the upper stage by the mark detection means, and a first position for calculating a relative position between the position reference mark of the first part and the position reference mark of the upper stage. A relative position calculating step; a second relative position calculating step for calculating a relative position between the position reference mark of the second component and the position reference mark of the lower stage; And the first and second relative position information obtained in the first and second relative position calculation steps, respectively. A position determining step having a position calculating step of calculating a relative position between the first component and the second component while determining a position with respect to the second component; A method for manufacturing a droplet discharge head, comprising: a position correction step for correcting a shift amount of a relative position between the first component and the second component calculated from a position calculation step within a specified value . .

According to a fifth aspect of the present invention, there is provided the component supply means for setting the first component and the second component so as to face the upper stage surface and the lower stage surface, respectively, and the first component. The position reference mark of the second part and the position reference mark of the second part are detected by the mark detection means from above the position reference mark of the first part, and the relative relation between the first part and the second part is detected. Alignment means for positioning, the first component and the second component are brought into contact with each other via an adhesive, and the first stage surface and the lower stage surface are relatively close to each other. A pressurizing unit that pressurizes the component and the second component, wherein after the alignment unit, the mark detection unit includes a position reference mark provided on the upper stage, and On the lower stage A stage reference position moving means that horizontally moves to a position directly above the position reference mark, the position reference mark of the upper stage provided at substantially the same height as the position reference mark of the first component, Stage detection means for detecting the position reference mark of the lower stage provided at substantially the same height as the position reference mark of the second component from above the position reference mark of the upper stage by the mark detection means; A first relative position calculating means for calculating a relative position between the position reference mark of the first part and the position reference mark of the upper stage; the position reference mark of the second part; and the position reference mark of the lower stage The second relative position calculating means for calculating the relative position of the upper and lower stages, the position information of the upper and lower stages obtained by the stage detecting means, and the first and second relative position calculating means, respectively. Based on the obtained first and second relative position information, the position of the first part and the second part is determined, and the relative position between the first part and the second part is determined. A position determination means having a position calculation means for calculating the position of the relative position between the first part and the second part calculated from the position calculation means when the pressure is applied by the pressure means; It is characterized by a component joining apparatus comprising position correction means for correcting within a value .

According to a sixth aspect of the present invention, there is provided the component joining apparatus according to the fifth aspect, further comprising a joining completion judging unit that judges the joining completion based on the result of the position judging unit .

Furthermore, the invention described in claim 7 is characterized in that the joining completion determining unit is configured to use a specified pressure based on relative position information between the first part and the second part and pressure information in the pressurizing unit. 7. The component joining apparatus according to claim 6, wherein it is judged that the specified position accuracy is achieved .

In the invention described in claim 8, the first component and the second component are any one of the vibration plate, the flow path plate, and the nozzle plate as the first component and the second component. Component supply means for setting the upper part surface and the lower stage surface to be vertically opposed to each other, and the position reference mark of the first part and the position reference mark of the second part are Alignment means for detecting relative position between the first part and the second part detected by a mark detection means from above the position reference mark, and bonding the first part and the second part together A liquid droplet ejection head comprising: a pressurizing unit that pressurizes the first component and the second component in a direction in which the upper stage surface and the lower stage surface are relatively close to each other through an agent. A manufacturing apparatus of the above, wherein the alignment means A stage reference position moving means for horizontally moving the mark detection means to a position directly above a position reference mark provided on the upper stage and a position reference mark provided on the lower stage; and the first component. The position reference mark of the upper stage provided at substantially the same height as the position reference mark of the second stage and the position reference mark of the lower stage provided at substantially the same height as the position reference mark of the second part A first stage for calculating a relative position between the position reference mark of the first part and the position reference mark of the upper stage by stage detection means for detecting from above the position reference mark of the upper stage by the mark detection means. A relative position calculating means; a second relative position calculating means for calculating a relative position between the position reference mark of the second part and the position reference mark of the lower stage; And the first and second relative position information obtained by the first and second relative position calculation means, respectively, based on the position information of the upper and lower stages obtained by the first detection means and the first and second relative position information obtained by the first and second relative position calculation means, respectively. A position determining means having a position calculating means for calculating a relative position between the first part and the second part while determining a position with respect to the second part; A droplet discharge head manufacturing apparatus comprising: a position correction unit that corrects a deviation amount of a relative position between the first component and the second component calculated from a position calculation unit within a specified value. Yes.

According to the first aspect of the present invention, there is provided a component supply step for setting the first component and the second component so as to face the upper stage surface and the lower stage surface, respectively, and the position reference of the first component. A mark detection means detects the mark and the position reference mark of the second component from above the position reference mark of the first component, and performs relative alignment between the first component and the second component. An alignment step to be performed; and the first component and the second component are brought into contact with each other via an adhesive so that the upper stage surface and the lower stage surface are relatively close to each other. A pressurizing step for pressurizing the second component, wherein after the alignment step, the mark detection means is applied to the position reference mark provided on the upper stage and the lower stage. Provided A stage reference position moving step horizontally moving to a position directly above the position reference mark, the position reference mark of the upper stage provided at substantially the same height as the position reference mark of the first component, and the second A stage detecting step of detecting the position reference mark of the lower stage provided at substantially the same height as the position reference mark of the component from above the position reference mark of the upper stage by the mark detecting means; A first relative position calculation step of calculating a relative position between the position reference mark of the part and the position reference mark of the upper stage, and the relative position of the position reference mark of the second part and the position reference mark of the lower stage The second relative position calculation step for calculating the position, the position information of the upper and lower stages obtained in the stage detection step, and the first and second relative position calculation steps, respectively. 1. A position for determining a position between the first part and the second part based on the second relative position information and calculating a relative position between the first part and the second part. At the time of pressurization in the position determination step having the calculation step and the pressurization step, the deviation amount of the relative position between the first component and the second component calculated from the position calculation step is corrected within a specified value. And a position correction step to ensure the component alignment accuracy and bonding quality.

Then, in the invention according to claim 2, based on the results of the position determination step, by having a joining completion determining step of determining the completion of bonding, Ru can be ensured positioning accuracy and welding quality components.

In the invention according to claim 3 , the joining completion determining step is performed at a specified pressure from relative position information between the first component and the second component and pressure information in the pressurizing step. By determining that the position accuracy is the specified position, it is possible to ensure the alignment accuracy and joining quality of the parts.

In the invention according to claim 4 , the first component and the second component may be defined by using any two of the vibration plate, the flow channel plate, and the nozzle plate as the first component and the second component. A component supplying step for setting the upper stage surface and the lower stage surface so as to face each other vertically, and a position reference mark for the first component and a position reference mark for the second component are positioned on the first component. An alignment step for detecting relative positions of the first component and the second component detected by a mark detection means from above the reference mark, and an adhesive for the first component and the second component And a pressurizing step of pressurizing the first component and the second component in a direction in which the upper stage surface and the lower stage surface are relatively close to each other via A manufacturing method after the alignment step A stage reference position moving step of horizontally moving the mark detection means to a position directly above a position reference mark provided on the upper stage and a position reference mark provided on the lower stage; and A position reference mark of the upper stage provided at substantially the same height as the position reference mark and a position reference mark of the lower stage provided at substantially the same height as the position reference mark of the second component, A stage detection step of detecting from above the position reference mark of the upper stage by the mark detection means, and a first relative for calculating a relative position between the position reference mark of the first component and the position reference mark of the upper stage A position calculating step, a second relative position calculating step for calculating a relative position between the position reference mark of the second component and the position reference mark of the lower stage, and the stage Based on the position information of the upper and lower stages obtained in the exiting process and the first and second relative position information obtained in the first and second relative position calculating processes, respectively, the first component and the first stage A position determination step having a position calculation step of calculating a relative position between the first component and the second component and determining the position with respect to the second component; A position correction step of correcting a deviation amount of the relative position between the first component and the second component calculated from the calculation step within a specified value, thereby improving the alignment accuracy and joining quality of the component. It can be secured .

According to a fifth aspect of the present invention, there is provided a component supply means for setting the first component and the second component so as to face the upper stage surface and the lower stage surface, respectively, and the first component. The position reference mark and the position reference mark of the second part are detected from above the position reference mark of the first part by the mark detection means, and the relative positions of the first part and the second part are detected. Alignment means for performing alignment, the first component and the second component are brought into contact with each other via an adhesive, and the first stage surface and the lower stage surface are relatively close to each other. And a pressurizing unit that pressurizes the component and the second component, wherein the mark detection unit is connected to the position reference mark provided on the upper stage and the lower part after the alignment unit. Provided on stage Stage reference position moving means horizontally moving to a position directly above the position reference mark, the position reference mark of the upper stage provided at substantially the same height as the position reference mark of the first component, and the first Stage detection means for detecting the position reference mark of the lower stage provided at substantially the same height as the position reference mark of the part 2 from above the position reference mark of the upper stage by the mark detection means; A first relative position calculating means for calculating a relative position between the position reference mark of the first part and the position reference mark of the upper stage; a position reference mark of the second part; and a position reference mark of the lower stage; Obtained by the second relative position computing means, the position information of the upper and lower stages obtained by the stage detecting means, and the first and second relative position computing means, respectively. Based on the first and second relative position information, the positions of the first component and the second component are determined, and the relative positions of the first component and the second component are determined. A position determination unit having a position calculation unit for calculating, and a displacement amount of a relative position between the first component and the second component calculated from the position calculation unit at the time of pressurization by the pressurization unit. By providing the position correction means for correcting the position inside, it is possible to ensure the positioning accuracy and joining quality of the parts .

According to the sixth aspect of the present invention, it is possible to ensure the positioning accuracy and the bonding quality of the parts by providing the bonding completion determining means for determining the bonding completion based on the result of the position determining means .

According to the seventh aspect of the present invention, the joining completion determining unit is configured to use a specified pressure based on information on a relative position between the first component and the second component and pressure information on the pressing unit. By determining that the position accuracy is the specified position, it is possible to ensure the alignment accuracy and joining quality of the parts .

According to the eighth aspect of the present invention, any two of the diaphragm, the flow path plate, and the nozzle plate are used as the first component and the second component, and the first component and the second component are used. The component supply means for setting the upper stage surface and the lower stage surface so as to face each other vertically, and the position reference mark of the first component and the position reference mark of the second component are positioned at the position of the first component. Alignment means for detecting relative position between the first part and the second part detected by mark detection means from above the reference mark, and the first part and the second part as an adhesive And a pressurizing unit that pressurizes the first component and the second component in a direction in which the upper stage surface and the lower stage surface are relatively close to each other through a liquid ejection head. A manufacturing apparatus, after the alignment means Stage reference position moving means for horizontally moving the mark detection means to a position directly above a position reference mark provided on the upper stage and a position reference mark provided on the lower stage, and the position of the first component The position reference mark of the upper stage provided at substantially the same height as the reference mark and the position reference mark of the lower stage provided at substantially the same height as the position reference mark of the second part, Stage detection means for detecting from above the position reference mark of the upper stage by a mark detection means, and a first relative position for calculating a relative position between the position reference mark of the first component and the position reference mark of the upper stage Computing means; second relative position computing means for computing a relative position between the position reference mark of the second part and the position reference mark of the lower stage; and the stage detection And the second relative position information obtained by the first and second relative position calculation means, respectively, and the first component and the second stage. A position determination means having a position calculation means for calculating a relative position between the first part and the second part, and at the time of pressurization by the pressurization means, the position calculation Position correction means for correcting a deviation amount of the relative position between the first part and the second part calculated from the means within a specified value, thereby improving the positioning accuracy and joining quality of the parts. It can be secured .

  Hereinafter, the present invention will be described based on examples of embodiments according to the present invention.

  The general structure of the PZT type print head will be described with reference to FIGS.

  As shown in FIG. 1, the PZT type print head 1 includes a drive unit 2 and a liquid chamber unit 3 joined to the drive unit 2.

  The drive unit 2 includes a plurality of piezoelectric element drive units (hereinafter referred to as drive units) 14a and support columns 14b arranged alternately on a substrate 15, and the drive units 14a and support columns 14b are spaced apart from each other by a predetermined interval. Bonded to the substrate 15.

  The liquid chamber unit 3 includes a nozzle plate 11 having a plurality of nozzles 40 for discharging ink droplets as shown in FIG. 3, and a liquid chamber 30 corresponding to the nozzles 40 as shown in FIG. And a vibration plate (first component) 13 corresponding to the liquid chamber 30 and transmitting the vibration of the drive unit 14a of the drive unit 2 to the liquid chamber.

  The nozzle plate (second component) 11 and the flow channel plate 12, and the vibration plate 13 and the flow channel plate 12 constituting the liquid chamber unit 3 are coated with an adhesive 16 on the upper surface of the flow channel plate, and the adhesive 16 is interposed therebetween. Are joined.

  Ink is supplied to the liquid chamber unit 3 by an ink supply mechanism (not shown), and ink is supplied to the liquid chamber 30.

  Then, the liquid chamber unit 3 is bonded and bonded to the upper surfaces of the piezoelectric element driving portions 14 a and the column portions 14 b of the driving unit 2 with an adhesive 16.

  By selectively driving the piezoelectric element driving unit 14 a of the driving unit 2, ink droplets are ejected from the nozzles 40 of the liquid chamber unit 3.

  That is, in order to provide a high-quality print head, the nozzle plate 11 and the flow channel plate 12, the vibration plate 13 and the flow channel plate 12, and the liquid chamber unit 3 and the drive unit 2 that constitute the liquid chamber unit 3 are provided. It is necessary to join with high accuracy via the adhesive 16.

  Here, regarding the assembly of the print head, the position adjustment method of the nozzle plate 11 (or the vibration plate 13) and the flow path plate 12 will be described with reference to FIGS.

  Position detection reference marks 22a and 22b are formed on both sides in the thickness direction of the flow path plate 12 shown in FIG. 2, as shown in FIG.

  On the other hand, as shown in FIG. 3, position detection reference marks 21 are also formed at both ends of the nozzle plate 11 (or the vibration plate 13), which are through holes, and only through the through holes, The flow path plate 12 can be detected.

As shown in FIG. 5, in the case of the two-field detection system, the centers of the flow path plate position detection reference mark 22b and the vibration plate position detection reference mark 23 formed at both ends of the component are detected. After that, the center calculated from the marks at both ends of each part, the diaphragm center (Xs, Ys, θs), and the flow path plate center (Xr, Yr, θr) are obtained, and the diaphragm is matched so that the respective centers match. 13 and the center position error amount (ΔXu, ΔYu, Δθu) = (Xs, Ys, θs) − (Xr, Yr, θr)
And the flow path plate 12 is corrected by XYθ with reference to the diaphragm 13.

  In this embodiment, the position of the flow path plate 12 is corrected by XYθ with reference to the position of the vibration plate 13 (hereinafter, the same applies to the nozzle plate 11). A correction method may be used.

  Then, after completion of the XYθ position correction, pressure bonding is performed in the Z-axis direction.

  Here, in the case where the adhesive application area and the alignment mark area are sufficiently wide as in the prior art, as shown in FIG. It was possible to detect the position detection reference mark 22a (or the position detection reference mark 22b) of the flow path plate 12 through the position detection reference mark 21 (23) of 13).

  However, due to recent miniaturization of parts, the alignment mark area cannot be sufficiently secured, and the adhesive application area and the alignment mark area are arranged very close to each other. As shown, since the adhesive enters the alignment mark, the position detection reference mark 21 of the nozzle plate 11 (or the vibration plate 13) and the position detection reference mark 22a of the flow path plate 12 (or position detection). Both reference marks 22b) for use have become undetectable.

  Therefore, in addition to the component alignment marks, the upper stage position reference mark 84 is provided on the upper joint stage 80 on which the nozzle plate 11 (or the diaphragm 13) is held, as shown in FIG. A lower stage position reference mark 86 is provided on the bonded lower stage 87 on which the road plate 12 is held.

  Accordingly, the position detection reference mark 21 (23) of the nozzle plate 11 (or the vibration plate 13) and the upper stage position reference mark 84 are detected by the movement of the mark detection means 70, and the nozzle plate 11 (or vibration) is detected. The relative position relationship between the position detection reference mark 21 of the plate 13) and the upper stage position reference mark 84 is calculated.

  Similarly, the position detection reference mark 22a (or the position detection reference mark 22b) of the flow path plate 12 and the lower stage position reference mark 86 are detected by the movement of the mark detection means 70, and the flow path plate 12 is detected. The relative positional relationship between the position detection reference mark 22a (22b) and the lower stage position reference mark 86 is calculated.

  Thereby, by detecting the upper stage position reference mark 84 and the lower stage position reference mark 86, the positional accuracy of the nozzle plate 11 (or the vibration plate 13) and the flow path plate 12 can be obtained by calculation.

  The alignment method of the upper stage position reference mark 84 and the lower stage position reference mark 86 is the same as the alignment method of the diaphragm 13 and the flow path plate 12 shown in FIG. The position reference mark center is aligned with a position where the positional error amount between the diaphragm 13 and the flow path plate 12 is within a specified value.

  Furthermore, as shown in FIG. 7, the detection system with two fields of view 20 will be described in detail. The diaphragm position detection reference marks 23 formed at both ends of the diaphragm 13 are detected, and the diaphragm center coordinates (Xs , Ys, θs).

  Next, the mark detection means 70 is moved to the detection position of the upper stage position reference mark by a moving means (not shown), set according to the position reference mark 23 of the diaphragm 13, and the upper stage position reference mark 84 is detected. Upper stage center coordinates (Xk, Yk, θk) are calculated.

After detecting each center, the first relative positional relationship (ΔXj, ΔYj, Δθj) between the center coordinates of the upper part and the upper joint stage 80 is:
(ΔXj, ΔYj, Δθj) = (Xs, Ys, θs) − (Xk, Yk, θk)
Thus, the relative positional relationship between the diaphragm 13 and the upper stage position reference mark 84 is defined.

Similarly, the second relative positional relationship (ΔXm, ΔYm, Δθm) between all the center coordinates (Xr, Yr, θr) of the flow path plate 12 and the center coordinates (Xn, Yn, θn) of the lower stage position reference mark 86. )
(ΔXm, ΔYm, Δθm) = (Xr, Yr, θr) − (Xn, Yn, θn)
It becomes.

This and the positional error amount of the component between the diaphragm 13 and the center of the flow path plate 12 detected first are
(ΔXu, ΔYu, Δθu) = (Xs, Ys, θs) − (Xr, Yr, θr)
And the current position error amount (ΔXi, ΔYi, Δθi) of the upper stage position reference mark 84 and the lower stage position reference mark 86, the first relative position, the second relative position, and the position error amount of the component. Relationship
(ΔXi, ΔYi, Δθi) = (ΔXj−ΔXm−ΔXu, ΔYj−ΔYm−ΔYu, Δθj−Δθm−Δθu)
Thus, by detecting the position error amounts (ΔXi, ΔYi, Δθi) of the upper stage position reference mark 84 and the lower stage position reference mark 86, the position error amount (ΔXu) between the diaphragm 13 and the center of the flow path plate 12 is determined. , ΔYu, Δθu) can be calculated.

  In other words, the position error amount (upper position position mark 84 and lower stage position reference mark 86) where the position error amount (ΔXu, ΔYu, Δθu) between the vibration plate 13 and the center of the flow path plate 12 is within a specified value ( By correcting the position to [Delta] Xi, [Delta] Yi, [Delta] [theta] i), it is possible to adjust the position of the diaphragm 13 and the flow path plate 12 within a specified value.

  Further, during the pressurizing operation, the position error amount (ΔXu) between the diaphragm 13 and the center of the flow path plate 12 is calculated from the position error amounts (ΔXi, ΔYi, Δθi) of the position reference mark 84 and the lower stage position reference mark 86. , ΔYu, Δθu) is calculated, the upper stage position reference mark 84 is set so that the positional error amount (ΔXu, ΔYu, Δθu) between the diaphragm 13 and the center of the flow path plate 12 is within a specified value. The position correction means (alignment means 94) corrects the position error amount (ΔXi, ΔYi, Δθi) of the lower stage position reference mark 86.

  As described above, by providing the stage position reference mark, the position accuracy of the component can be calculated even when the alignment mark of the component cannot be detected.

  Completion of the joining process is defined as completion of the joining process when the position error amount is within a specified value (for example, 1 μm or less) and the applied pressure is a specified value (for example, 100 N).

  What is necessary is just to determine suitably about the frequency | count of position correction in pressurization according to a required precision and a required tact. In this example, alignment was performed using the part mark before pressurization. However, if the position error information of the part is acquired after position detection, the stage reference mark can be obtained without performing alignment by part. It is also possible to perform alignment and position correction operations.

  Further, the moving means of the mark detection means 70 requires high positioning accuracy because the position accuracy of the mark detection means 70 affects the mark detection accuracy.

  In this example, since the position detection reference marks 22a and 21 are set so as to be concentrically arranged, the nozzle plate position detection reference mark 21 is used as the position detection reference mark 22a of the flow path plate 12. It has a larger diameter.

  However, the detection reference mark 22a and the detection reference mark 21 do not necessarily have to be arranged concentrically, and are arranged at positions that can be detected when the image is taken by a camera (imaging means) from above. It is sufficient that the positional relationship (offset) between them is clear.

  The mark pitch of the upper stage position reference mark 84 and the lower stage position reference mark 86 is equal to the mark pitch of the part.

  However, if the camera moving means is a two-axis moving configuration, it is not necessary to define the mark pitch.

  The flow path plate 12 and the vibration plate 13 have the same mark configuration as the nozzle plate 11 and the flow path plate 12, and the position adjustment method is also the same.

  The joining apparatus 100 of the present invention detects the position detection reference provided on each of the diaphragm 13 and the flow path plate 12 and the position reference marks 84 and 86 provided on the upper and lower stages 80 and 81, and the detection result is obtained. 8 to 9, the present apparatus is arranged on a first station to which a diaphragm 13 is supplied, and above the first station, as shown in FIGS. A second station for adsorbing and holding 13, and a third station for adjusting the position of the flow path plate 12 based on the position of the diaphragm 13 transferred from the second station by the second transfer means (index table). And control means for controlling the whole.

  The second transfer means transfers the diaphragm 13 which is the upper part, and reversely moves the second station and the third station in units of 180 degrees.

  While the n-th component is joined at the third station, the (n + 1) -th component is transferred to the second station.

  The first station is disposed in the second station, the first component supply means for supplying the diaphragm 13 to the first temporary placement section 52, the first temporary placement section 52 for temporarily placing the diaphragm 13, and the diaphragm 13 in the second station. And a first transfer means for transferring to the upper joining stage 80.

  The first temporary placement unit includes a temporary placement base for the diaphragm 13, a temporary positioning mechanism for temporarily positioning the diaphragm 13 on the temporary placement base, and a holding mechanism for attracting and holding the diaphragm 13.

  The second station includes a bonding upper stage 80 that holds the diaphragm 13 by suction and an upper stage position reference component 83.

  The joint upper stage 80 has two see-through windows 88 (four in total) at the center, one for detecting the position reference mark 23 of the diaphragm 13, and the other for the upper stage position reference. This is for detecting the part 83.

  The diaphragm 13 transferred just below the bonding upper stage 80 is suction-fixed by the first transfer means 51.

  The upper stage position reference component 83 may be selected in accordance with accuracy, such as a machined metal or a glass substrate with a mark.

  The position in the height direction of the upper stage position reference mark 84 is set in accordance with the actual workpiece imaging surface height.

The third station discharges the finished product, and supplies and discharges the flow path plate 12 to the second temporary placement section 72 on the alignment means 94 arranged at the third station. Discharging means;
The position reference mark 23 of the diaphragm 13, the mark detection means 70 for measuring the position of the flow path plate 12 through the position reference mark 23 of the diaphragm 13, the moving means of the mark detection means 70 (not shown), the diaphragm 13, Based on the position detection result of the flow path plate 12, position correction is performed based on the alignment of the flow path plate 12 with respect to the diaphragm 13 and the position detection results of the upper stage position reference mark 84 and the lower stage position reference mark 86. Based on the results of the alignment means 94 and the mark detection means 70, the first relative position calculation means 90 for calculating the relative positional relationship between the diaphragm 13 and the upper stage reference position, the flow path plate 12 and the lower stage reference position. A second relative position calculating means 91 for calculating the relative positional relationship; a position determining means 92 for determining the positions of the diaphragm 13 and the flow path plate 12; and a contact for determining the completion of joining. Comprising a completion determining means 95.

  The alignment means 94 includes a lower joining stage 87 constituted by a driving mechanism having an XYθ axis that is a horizontal direction and a Z axis that is a vertical direction, a second temporary placement portion 72 provided on the upper surface of the driving mechanism, a flow path plate 12 temporary positioning mechanisms for temporarily positioning, and a lower stage position reference component 85.

  The second temporary placement section 72 disposed on the upper portion of the pressurizing means 82 includes a temporary placement base for the flow path plate 12, a temporary positioning mechanism for temporarily positioning the flow path plate 12 on the temporary placement base, The holding mechanism holds the flow path plate 12 by suction.

  The lower stage position reference component 85 may be selected in accordance with accuracy, such as a machined metal or a glass substrate with a mark.

  The position determination means 92 includes upper and lower stage mark detection means 70 for detecting an upper stage position reference mark 84 and a lower stage position reference mark 86, upper and lower stage detection position information, and first and second relative positions. Based on the information and the position error information of the initial part, the position calculation means 93 for calculating the position error amount of the first part and the second part, and the first calculation calculated from the position calculation means (position calculation step) 93 Position correction means 94 for correcting the position error amount of the second part and the second part within a specified value is provided.

  The pressurizing means 82 is preferably an air bearing actuator that can generate a continuous load by an electropneumatic regulator and requires a stroke of several mm.

  When a detection means of a load detection means (for example, a load cell) (not shown) is permanently installed, feedback control can be performed from the detection result of the load detection means.

  In addition, when no detection means such as a load detection means (not shown) is permanently installed, the correlation between the pressure of the air bearing actuator and the control voltage of the electropneumatic regulator is measured, and the load value is indirectly determined from the control voltage of the electropneumatic regulator. May be set.

  The joining completion judging means judges the joining completion from the load information obtained from the pressurizing means and the position information of the position judging means.

  The mark detection means 70 is disposed above the joint upper stage 80 and the second transfer means in the third station with two or more visual fields, and the vibration plate position detection reference mark 23 and the flow path plate position detection reference mark 22 are added. A state in which a slight gap before pressure bonding, a state in which a slight gap before pressure bonding is opened, and the upper and lower stage position reference marks during pressurization can be detected through a moving means (not shown). ing.

  The upper joining stage 80 has two see-through windows 88 at the center, and the diaphragm 13 and the flow path plate 12 that are adsorbed and fixed immediately below the upper joining stage are arranged with a slight gap between them. The mark detection means 70 can detect the position detection reference mark 22 b of the flow path plate 12 through the position detection reference mark 23 of the vibration plate 13 and the position detection reference mark 23 of the vibration plate 13.

  Further, an upper stage position reference mark 84 and a lower stage position reference mark 86 can be detected through another fluoroscopic window 88.

  The operation of adjusting the positions of the diaphragm 13 and the flow path plate 12 in the joining apparatus 100 will be described with reference to FIGS.

  FIG. 10 shows a flowchart of the first station diaphragm supply process.

  First, the presence or absence of the diaphragm 13 is confirmed in the first temporary placement portion 52 (S.1).

  And when there is no diaphragm 13, it is transferred by the 1st component supply means on the temporary placement stand of the 1st temporary placement part 52 (S.2).

  The transferred diaphragm 13 is abutted and positioned in the X and Y directions by the temporary positioning mechanism of the first temporary placement section (S.3), and is held by suction by the holding mechanism after the temporary positioning is completed (S.4). .

  The diaphragm 13 that has been sucked and held issues a diaphragm 13 transfer request to the second station (S.5), and the diaphragm transfer completion signal after completion of the diaphragm transfer completes the nth operation. To do.

  Next, the presence or absence of the diaphragm 13 is confirmed again (S.6), and if not, the (n + 1) th diaphragm is set.

  Thus, in the first station diaphragm supply process, the next diaphragm 13 is always prepared.

  FIG. 11 shows a flowchart of the diaphragm transfer process of the second station.

  As shown in FIG. 11, first, the diaphragm transfer request signal of the first station is received (S.10), and the first transfer means 51 (Z axis) is raised (S.11).

  The first transfer means 51 and the upper joining stage 80 are positioned with a slight gap, and the diaphragm 13 is transferred from the first temporary placement section 52 to the upper joining stage 80 by switching the suction mechanism (S.12). 1 transfer means 51 descends (S.13).

  After the first transfer means descends, a diaphragm transfer completion signal is output to the first station (S.14).

  Then, when the second transfer means 61 becomes rotatable (S.15), the second transfer means 61 rotates (S.16), and the diaphragm 13 is transferred to the third station.

  FIG. 12 shows a flowchart of the position adjustment process of the third station.

  In the third station, the diaphragm 13 and the flow path plate 12 are arranged to face each other with a slight gap.

  First, the mark detection means 70 detects the position detection reference mark 23 of the diaphragm 13 and calculates diaphragm center coordinates (Xs, Ys, θs) (S.20).

  With respect to the calculated diaphragm center coordinates (Xs, Ys, θs), the flow path plate 12 is changed to the position where it can be reliably detected through the through hole of the diaphragm 13 by changing the initial charging position of the flow path plate 12. 12 is roughly adjusted (S.21).

  Next, the position reference mark 22b of the flow path plate 12 is detected through the position detection reference mark 23 of the diaphragm 13 (S.22), and the flow path plate center coordinates (Xr, Yr, θr) are calculated.

  Next, it is determined whether or not the positional deviation is a specified value (S.23). If the positional error amounts (ΔXu, ΔYu, Δθu) between the centers are outside the specified values, the alignment means 94 adjusts the alignment of the flow path plate 12 in the XYθ direction (S.22a).

  In this example, the alignment is performed on the component, but the alignment operation on the component is not essential, and if the position error amount (ΔXu, ΔYu, Δθu) between the centers of each component can be obtained, the alignment with the stage reference mark is performed. It is also possible to perform a position correction operation.

  Next, the mark detection means 70 is moved to the imaging position of the upper stage position reference mark 84 and the lower stage position reference mark 86 by a moving means (not shown) (S.24).

  The mark detection means 70 calculates the center coordinates (Xk, Yk, θk) of the upper stage position reference mark 84 and the center coordinates (Xn, Yn, θn) of the lower stage position reference mark 86 (S.25).

Next, the first relative positional relationship (ΔXj, ΔYj, Δθj) between the center coordinates of the diaphragm center coordinates (Xs, Ys, θs) and the center coordinates (Xk, Yk, θk) of the upper stage position reference mark 84. Is
(ΔXj, ΔYj, Δθj) = (Xs, Ys, θs) − (Xk, Yk, θk)
Thus, the relative positional relationship between the diaphragm 13 and the upper stage position reference mark 84 is defined (S.26).

Similarly, the second relative positional relationship (ΔXm, ΔYm, Δθm) between all the center coordinates (Xr, Yr, θr) of the flow path plate 12 and the center coordinates (Xn, Yn, θn) of the lower stage position reference mark 86. )
(ΔXm, ΔYm, Δθm) = (Xr, Yr, θr) − (Xn, Yn, θn)
(S.27).

This and the position error amount between the vibration plate 13 detected first and the center of the flow path plate 12 (ΔXu, ΔYu, Δθu) = (Xs, Ys, θs) − (Xr, Yr, θr)
And the current positional error amounts (ΔXi, ΔYi, Δθi) of the upper stage position reference mark 84 and the lower stage position reference mark 86 are:
(ΔXi, ΔYi, Δθi) = (ΔXj−ΔXm−ΔXu, ΔYj−ΔYm−ΔYu, Δθj−Δθm−Δθi)
Thus, by detecting the position error amounts (ΔXi, ΔYi, Δθi) of the upper stage position reference mark 84 and the lower stage position reference mark 86, the position error amount (ΔXu) between the diaphragm 13 and the center of the flow path plate 12 is determined. , ΔYu, Δθu) can be calculated (S.28).

  When the calculation of the positional relationship is completed, the diaphragm 13 and the flow path plate 12 are brought into contact with each other through an adhesive.

  As a method of pressurization, there are both a step pressurization that pressurizes stepwise and a continuous pressurization that pressurizes continuously, and an optimal method may be selected as appropriate from the relationship between target accuracy and tact.

  In order to shorten the tact time, the number of steps may be reduced to correct the position, or the continuous load change speed may be increased.

  In addition, when aiming for high accuracy, the number of stepwise pressurization and position correction may be increased, or the position may be corrected so that there is no correction delay by slowing the rate of continuous load change. This time, as an example, a step pressurization method will be described.

  First, the diaphragm 13 and the flow path plate 12 are brought into contact with each other with a weak load (for example, 2N) (S. 29).

  At this time, the mark detection means 70 detects the position error amounts (ΔXi1, ΔYi1, Δθi1) of the upper stage position reference mark 84 and the lower stage position reference mark 86 (S.30).

  The center position error amounts (ΔXu1, ΔYu1, Δθu1) of the diaphragm 13 and the flow path plate 12 at this time are calculated (S.31). Next, it is determined whether or not the positional deviation is a specified value (S.32). If this position error amount is larger than a specified value (for example, 1 μm), it is determined whether the load is a specified load (S.33), and the center position error amounts (ΔXu, ΔYu, Δθu) of the diaphragm 13 and the flow path plate 12 are determined. In order to adjust the positional error amounts (ΔXi, ΔYi, Δθi) of the upper stage position reference mark 84 and the lower stage position reference mark 86 so as to fall within the specified value, the position of the bonding lower stage 87 is adjusted (S. 34). S. In 32, when the positional deviation is within the prescribed value, it is determined whether or not the deviation change amount is the prescribed value (S.35).

  After the position adjustment is completed, stepwise pressurization and position correction are performed when a position shift occurs, pressurization is performed until the load reaches a specified load (for example, 100 N), and when the specified load is reached, a determination flag OK is set. (S.37).

  If the specified load has been reached but the position accuracy deviates from the specified value, an NG flag is assigned (S.38), and the position adjustment is completed.

  In addition, as shown in FIG. 13, for the NG product, the position correction process may be performed again by reducing the pressure once to a level at which the adhesive does not peel or divide (S.38 ').

  After the position adjustment is completed, the pressure is released after temporary bonding by a temporary bonding means (not shown) (S.39).

  The ink jet head that can be used in the present invention may be a so-called piezo method in which ink is ejected by applying a voltage to the electrostrictive element and deforming the electrostrictive element. A so-called thermal method may be used in which heat is generated by flowing the ink and ink is ejected by foaming the ink by heat generation.

  When using the piezo method, ink droplets of various sizes can be ejected by adjusting the drive waveform by enlarging or reducing the size of the piezo element or adjusting the deformation amount of the piezo element. .

  Therefore, it is advantageous for forming an image with good gradation.

  On the other hand, the thermal method is suitable for manufacturing a multi-nozzle head because it is easy to highly integrate nozzles.

  Therefore, it is advantageous for printing an image with high resolution at high speed.

  The inkjet head that can be used in the present invention may be an edge shooter system in which the shape from the ink flow path to the ejection port is linear, or a side shooter system in which the direction of the ink flow path and the direction of the ejection port are different. It may be.

  An example of an edge shooter type recording head is shown in FIG.

  This recording head includes a flow path 104 on a substrate 101 having a discharge energy generator 107 (electrodes for applying a discharge signal to the generator and a protective layer provided on the generator if necessary) are omitted. The side wall and the wall member 102 constituting the orifice 105 and the top plate 103 constituting the cover of the flow path 104 are laminated.

  In this recording head, when a recording signal is applied to the ejection energy generator 107 via an electrode (not shown) in a state in which the flow path 104 is filled with ink from a liquid chamber (not shown) in which ink is stored, The discharge energy generated from the generator acts on the ink in the flow path 104 above the discharge energy generator 107 (discharge energy operation portion), and as a result, the ink is discharged as a droplet from the orifice 105 as indicated by a broken line 114b. The The ejected ink droplets are attached to a recording material such as paper fed in front of the orifice 105.

  The edge shooter type recording head as shown in FIG. 14 has the advantages that each part can be miniaturized with high precision, the number of orifices can be reduced, or can be miniaturized very easily, and the mass productivity can be enhanced.

  On the other hand, there is a limit to the response frequency and ink droplet flight speed when ejecting ink droplets.

  In addition, bubbles are generated in the ink due to the heat generated by the electrothermal conversion element. The bubbles contract due to a decrease in temperature, and the discharge energy generator 107 is gradually destroyed by an impact when the bubbles disappear in the vicinity of the discharge energy generator 107. Is done.

  This phenomenon is called a cavitation phenomenon and is remarkable in the edge shooter system. Therefore, the life of the edge shooter type recording head is relatively short.

  An example of a side shooter type recording head is shown in FIG.

  In this recording head, an orifice is provided on the top plate 103, and as indicated by a broken line 114c, the flow direction of ink to the ejection energy acting portion in the flow path 104 and the opening central axis of the orifice 105 are perpendicular to each other. Have

  With such a configuration, the energy from the ejection energy generator 107 can be more efficiently converted into the formation of ink droplets and the kinetic energy of the flight, and the meniscus can be quickly restored by supplying ink. This is advantageous and is particularly effective when a heating element is used as the discharge energy generator.

  Also, the side shooter can avoid the so-called cavitation phenomenon in which the ejection energy generator 107 is gradually destroyed by the impact when the bubbles that cause problems in the edge shooter disappear.

  That is, when bubbles grow in the side shooter and the bubbles reach the orifice 105, the bubbles are brought into the atmosphere, and the bubbles do not contract due to a decrease in temperature.

  Therefore, there is an advantage that the life of the recording head is long.

  As described above, the present invention has been described in detail based on the embodiments. However, the present invention is not limited to this specific configuration, and design changes that do not depart from the spirit of the present invention are included in the technical scope of the present invention.

It is a typical explanatory view in one example of a PZT system print head. It is a top view of a channel board in one example of a PZT system print head. It is a top view of the nozzle unit in one Example of a PZT system print head. It is a top view after joining of a channel board and a nozzle board in one example of a PZT system print head. It is a figure which shows the position adjustment of the diaphragm of 2 views of this invention, and a flow-path board. It is a figure which shows the diaphragm alignment mark before and behind pressurization, and a flow-path board alignment mark relationship, (a) is a top view of the mark in case a slight gap is opened, (b) is the mark of the mark after pressurization. It is a top view. It is a figure which shows the positional relationship of the diaphragm of 2 visual fields of this invention, and an upper stage reference | standard mark. It is sectional drawing of the joining apparatus in one Example concerning the joining apparatus of this invention. It is a top view of the joining apparatus in one Example concerning the joining apparatus of this invention. It is a figure which shows the procedure of the 1st station in one Example concerning the joining apparatus of this invention. It is a figure which shows the procedure of the 2nd station in one Example concerning the joining apparatus of this invention. It is a figure which shows the joining procedure 1 of the 3rd station in one Example concerning the joining apparatus of this invention. It is a figure which shows the joining procedure 2 of the 3rd station in one Example concerning the joining apparatus of this invention. FIG. 4 is a cross-sectional view illustrating an ejection port of an edge shooter type inkjet recording head. It is sectional drawing which shows the discharge outlet of a side shooter system inkjet recording head.

Explanation of symbols

11 ... Nozzle plate (first part)
12 ... Channel plate (second part)
13 ... Diaphragm (first part)
22b ... Position detection reference mark (position reference mark of the second part)
23 ... Reference mark for position detection (position reference mark of the first part)
70 ... Mark detection means, stage detection means 80 ... Bonding upper stage (upper stage)
82 ... Pressurizing means 8 4 ... Upper stage position reference mark ( position reference mark provided on the upper stage)
86 ... Lower stage position reference mark ( position reference mark provided on the lower stage)
87 ... Lower stage (lower stage)
90. First relative position calculation means
91 ... Second relative position calculating means
92: Position judging means
93 ... Position calculation means
94: Position correction means (alignment means)
95: Joining completion judging means

Claims (8)

A component supplying step of setting the first component and the second component so as to face the upper stage surface and the lower stage surface, respectively, vertically;
The first component position reference marks and the second component position reference mark and said first part position reference mark upward detection by the mark detecting means from above the first component and the second component of the of An alignment step for performing relative alignment with
Said first component and said second of said the component in the direction in which the on stage surface in contact with an adhesive and said lower stage surface are relatively close first component and said second component A pressurizing step for pressurizing ,
A method for joining parts having
A stage reference position moving step for horizontally moving the mark detection means to a position directly above the position reference mark provided on the upper stage and the position reference mark provided on the lower stage after the alignment step;
The position reference mark of the upper stage provided at substantially the same height as the position reference mark of the first part and the position of the lower stage provided at substantially the same height as the position reference mark of the second part. A stage detection step of detecting a position reference mark from above the position reference mark of the upper stage by the mark detection means;
A first relative position calculating step of calculating a relative position between the position reference mark of the first component and the position reference mark of the upper stage ;
A second relative position calculation step of calculating the relative position between the position reference marks before Symbol the lower stage and the position reference mark of the second part,
Before the position information of the obtained vertical stage kiss stage detection step, the first, first respectively obtained at the second relative position calculation step, based on the second relative position information, the first together to determine the position of the component and the second component, and a position determination step to have the position calculation step of calculating a relative position between the second component and the first component,
A position correction step of correcting a shift amount of a relative position between the first component and the second component calculated from the position calculation step within a predetermined value at the time of pressurization in the pressurization step;
A method for joining parts, comprising:   2. The method for joining parts according to claim 1, further comprising a joining completion judging step for judging the joining completion based on the result of the position judging step. The joining completion determination step, the relative position information between the second component and the first component, and a pressure information in said pressurizing step, to determine that the specified pressure is defined positional accuracy The method for joining parts according to claim 2 , wherein the parts are joined together. Any two of the diaphragm, channel plate, and nozzle plate are used as the first component and the second component ,
A component feed step of setting to the vertical face of said first component and said second component, respectively on the stage surface and the lower stage surface,
The first component position reference marks and the second component position reference mark and said first part position reference mark upward detection by the mark detecting means from above the first component and the second component of the of An alignment step for performing relative alignment with
Said first component and said second of said the component in the direction in which the on stage surface in contact with an adhesive and said lower stage surface are relatively close first component and said second component A pressurizing step for pressurizing ,
A method of manufacturing a droplet discharge head having
A stage reference position moving step for horizontally moving the mark detection means to a position directly above the position reference mark provided on the upper stage and the position reference mark provided on the lower stage after the alignment step;
The position reference mark of the upper stage provided at substantially the same height as the position reference mark of the first part and the position of the lower stage provided at substantially the same height as the position reference mark of the second part. A stage detection step of detecting a position reference mark from above the position reference mark of the upper stage by the mark detection means;
A first relative position calculating step of calculating a relative position between the position reference mark of the first component and the position reference mark of the upper stage ;
A second relative position calculation step of calculating the relative position between the position reference marks before Symbol the lower stage and the position reference mark of the second part,
Before the position information of the obtained vertical stage kiss stage detection step, the first, first respectively obtained at the second relative position calculation step, based on the second relative position information, the first together to determine the position of the component and the second component, and a position determination step to have the position calculation step of calculating a relative position between the second component and the first component,
A position correction step of correcting a shift amount of a relative position between the first component and the second component calculated from the position calculation step within a predetermined value at the time of pressurization in the pressurization step;
A method of manufacturing a droplet discharge head, comprising: Component supply means for setting the first component and the second component so as to face the upper stage surface and the lower stage surface, respectively, up and down;
The first component position reference marks and the second component position reference mark and said first part position reference mark upward detection by the mark detecting means from above the first component and the second component of the of an alignment means for performing relative positioning between,
Said first component and said second of said the component in the direction in which the on stage surface in contact with an adhesive and said lower stage surface are relatively close first component and said second component Pressurizing means for pressurizing ,
An apparatus for joining parts having
Stage reference position moving means for horizontally moving the mark detection means after the alignment means to a position directly above the position reference mark provided on the upper stage and the position reference mark provided on the lower stage;
The position reference mark of the upper stage provided at substantially the same height as the position reference mark of the first part and the position of the lower stage provided at substantially the same height as the position reference mark of the second part. Stage detection means for detecting a position reference mark from above the position reference mark of the upper stage by the mark detection means;
First relative position calculating means for calculating a relative position between the position reference mark of the first component and the position reference mark of the upper stage ;
A second relative position calculating means for calculating the position reference marks before Symbol second part the relative position between the position reference mark of the lower stage,
Before the position information of the obtained vertical stage kiss stage detecting means, the first, first respectively obtained at the second relative position calculating means, based on the second relative position information, the first together to determine the position of the component and the second component, the position determining means having a position calculating means for calculating a relative position between the second component and the first component,
Position correcting means for correcting a deviation amount of the relative position between the first part and the second part calculated from the position calculating means within a specified value when the pressure is applied by the pressure means;
An apparatus for joining parts, comprising: 6. The component joining apparatus according to claim 5 , further comprising joining completion judging means for judging the completion of joining based on the result of the position judging means. The joint completion determination means, the relative position information between the second component and the first component, and a pressure information in said pressing means, to determine that a defined positional accuracy in the specified pressure 7. The component joining apparatus according to claim 6 , wherein Any two of the diaphragm, channel plate, and nozzle plate are used as the first component and the second component ,
A component supply means for setting so as to vertically face the first component and the second component respectively on the stage surface and the lower stage surface,
The first component position reference marks and the second component position reference mark and said first part position reference mark upward detection by the mark detecting means from above the first component and the second component of the of an alignment means for performing relative positioning between,
Said first component and said second of said the component in the direction in which the on stage surface in contact with an adhesive and said lower stage surface are relatively close first component and said second component Pressurizing means for pressurizing ,
An apparatus for manufacturing a droplet discharge head having
Stage reference position moving means for horizontally moving the mark detection means after the alignment means to a position directly above the position reference mark provided on the upper stage and the position reference mark provided on the lower stage;
The position reference mark of the upper stage provided at substantially the same height as the position reference mark of the first part and the position of the lower stage provided at substantially the same height as the position reference mark of the second part. Stage detection means for detecting a position reference mark from above the position reference mark of the upper stage by the mark detection means;
First relative position calculating means for calculating a relative position between the position reference mark of the first component and the position reference mark of the upper stage ;
A second relative position calculating means for calculating the position reference marks before Symbol second part the relative position between the position reference mark of the lower stage,
Before the position information of the obtained vertical stage kiss stage detecting means, the first, first respectively obtained at the second relative position calculating means, based on the second relative position information, the first together to determine the position of the component and the second component, the position determining means having a position calculating means for calculating a relative position between the second component and the first component,
Position correcting means for correcting a deviation amount of the relative position between the first part and the second part calculated from the position calculating means within a specified value when the pressure is applied by the pressure means;
An apparatus for manufacturing a droplet discharge head, comprising:

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