JP4700430B2 - Non-contact support device inspection method - Google Patents

Description

  The present invention relates to a non-contact support device that supports a flat thin plate-like workpiece such as a liquid crystal glass or a thin large substrate in a non-contact state (floating state), and preferably inspects the contact / non-contact state of the workpiece in the non-contact support device. It relates to technology.

  In the manufacturing process of liquid crystal glass and thin large substrate, a non-contact type conveying device is used to convey the work such as liquid crystal glass and thin large substrate. This non-contact type conveying device is configured by using a plurality of porous bodies having a large number of micropores, and workpieces can be obtained by jetting pressurized gas from the surface of each porous body at the same time. The workpiece was lifted and the workpiece was transported in the floating state. In this case, by transferring the workpiece in a non-contact manner, it is possible to obtain an advantage that the problems of dust generation and static electricity generation due to contact scratches and friction on the workpiece are eliminated as compared with the contact-type transfer device. As the prior art, for example, Patent Literature 1 and Patent Literature 2 are known.

  FIG. 6 shows a schematic configuration of the non-contact type conveying apparatus. FIG. 6 is a plan view of the conveying device 30. The workpiece W is conveyed with one side facing upward. The transport device 30 includes a floating table 31 having a flat upper surface, and a plurality of porous plates 32 are installed on the floating table 31. Pressurized gas is supplied to each porous plate 32 through a gas passage (not shown) provided in the floating table 31, and the workpiece W is floated by the pressurized gas ejected from the surface.

In the conveying device 30 as described above, when the workpiece W is floated and conveyed, if the workpiece W and the floating table 31 come into contact with each other, there is a problem that the conveyance of the workpiece W is hindered or the workpiece W is damaged. Therefore, it is necessary to confirm that the workpiece W and the floating table 31 are not in contact, and it is considered to inspect the contact state of the workpiece W by the following inspection method.
(1) Look into the side of the transfer device and visually check the gap between the workpiece W and the floating table 31.
(2) Confirm that there is no contact sound when the workpiece W is moved.
(3) The flying height of the workpiece W is measured at multiple points using a displacement meter.

  However, in the above method (1), there is a risk that the contact may be missed depending on the viewing angle and position when the floating amount of the workpiece W is small or the contact area is small. Almost no levitation can be confirmed. If contact occurs temporarily during transportation, there is a risk of overlooking it. Further, in the method (2), it is difficult to listen to minute sounds due to contact, and in addition, it is difficult to perform a reliable inspection in view of noise in the measurement environment. Further, in the method (3), since the displacement of the workpiece W is measured by a spot (point), it is difficult to develop it on the surface. In order to measure multiple points, the number of displacement types must be increased, and there is a problem that workability is poor. Furthermore, because of the point measurement, there is a possibility that contact has occurred outside the measurement location, and there is a possibility that the inspection result is uncertain.

  In addition, there is a method of confirming that there is no sliding resistance when the workpiece W is moved. However, when the contact area of the workpiece W is small and the sliding resistance is extremely small, there is a problem that a reliable determination cannot be made. There is.

If the confirmation of the floating of the workpiece W cannot be surely performed, the flying height of the workpiece W must be increased for safety. Therefore, it is forced to increase the air supply amount (air consumption amount) for rising, and problems such as increased running costs arise.
JP 2001-85496 A JP 2004-244186 A

  The main object of the present invention is to provide an inspection method for a non-contact support device capable of simply and reliably inspecting the contact / non-contact state of a workpiece supported in a non-contact manner.

  Hereinafter, effective means for solving the above-described problems will be described while showing effects and the like as necessary. In the following, in order to facilitate understanding, a corresponding configuration example in the embodiment of the invention is appropriately shown in parentheses, etc., but is not limited to the specific configuration shown in parentheses.

Means 1. A floating table (floating table 12) for ejecting gas from a surface portion that is conductive and flat is provided, and supports the plate-shaped workpiece (work W) in a non-contact state as the gas is ejected by the floating table. An inspection method used for a non-contact support device (transport device 10),
An inspection device (tester) for mounting a plate-like inspection piece (test work WT) having conductivity on at least one side thereof on the floating table with the conductive surface side down and inspecting an electrical continuity state T) One side terminal is connected to the surface portion of the floating table, the other side terminal is connected to the conductive portion of the test piece, and then the gas is blown from the floating table to bring the test piece into a floating state. And inspecting the contact state between the floating table and the test piece based on the measurement result of the inspection apparatus.

  In the non-contact support device for plate-like workpieces, in order to support the workpieces preferably in a non-contact manner, it is necessary to confirm that the workpiece is not in contact with the floating table, and if the workpiece and the floating table are in contact with each other Measures such as adjusting the surface height of the floating table are performed. In this case, in the present invention, a plate-like inspection piece having conductivity imparted to at least one surface is mounted on the floating table with the conductive surface side down, and the inspection device is mounted on the floating table and the conductive portion of the inspection piece. Is connected. In this state, the test piece is brought into a floating state, and the conductive state between the floating table and the test piece is inspected. At this time, if the test piece and the floating table are in contact with each other, the electrical path connecting the test piece and the floating table is conducted, and this can be confirmed by the inspection device.

  According to such an inspection method, it is possible to reliably determine whether or not the inspection piece is in contact with the floating table regardless of the floating amount of the inspection piece, the size of the inspection piece, the contact area of the inspection piece, the contact location, and the like. Further, even when the contact state is temporarily reached during conveyance or positioning, it can be reliably determined. The effect is remarkable as compared with the conventional inspection methods such as visual confirmation and confirmation of contact sound listening. Furthermore, since the contact / non-contact state between the test piece and the floating table is determined by the surface, the number of man-hours required for the inspection can be reduced. As a result, it is possible to easily and reliably inspect the contact / non-contact state of the workpiece supported non-contact.

  In addition, it is desirable for the test piece to have approximately the same size and weight as the workpiece that is the actual support object.

  Mean 2. A plurality of concave portions (circular concave portions 15) are formed in the floating table, and a porous body (porous plate 19) is accommodated in the concave portions so that the upper surface of the floating table and the upper surface of the porous body are flush with each other. Alternatively, the non-contact support apparatus inspection method according to claim 1, which is applied to a non-contact support apparatus in which the upper surface of the porous body is slightly lower than the upper surface of the floating table.

  According to the means 2, in the non-contact support device, the upper surface of the floating table and the upper surface of the porous body are flush with each other, or the upper surface of the porous body is slightly lower than the upper surface of the floating table. It is configured. In this case, the test piece (work) may come into contact with a part other than the porous body, which is a gas ejection part, on the floating table, but the contact / non-contact state can be suitably inspected as described above.

  Means 3. Applied to a non-contact support device having the floating table divided into a plurality and insulated from each other, the inspection device is connected to each of the plurality of floating tables, and the state of contact between each floating table and the test piece is inspected The method for inspecting a non-contact support apparatus according to the means 1 or 2, characterized in that:

  According to the means 3, it is possible to inspect the contact / non-contact state with the test piece for each of the plurality of floating tables. Therefore, a contact location can be specified easily.

Means 4. A floating table (floating table 12) whose surface is a flat surface, and a plurality of porous bodies (porous plate 19) that are provided in a state of protruding from the surface of the floating table and eject gas from the upper surface. , An inspection method used in a non-contact support device (conveyance device 10) that supports a plate-like workpiece (work W) in a non-contact state as the gas is ejected from the porous body,
An inspection device (tester) for mounting a plate-like inspection piece (test work WT) having conductivity on at least one side thereof on the floating table with the conductive surface side down and inspecting an electrical continuity state T) One side terminal is connected to the conductive part provided on at least the surface of the porous body, the other side terminal is connected to the conductive part of the test piece, and then gas is ejected from the porous body to An inspection method for a non-contact support apparatus, wherein the inspection piece is brought into a floating state, and in this state, the state of contact between the porous body and the inspection piece is inspected based on a measurement result of the inspection device.

  In the invention of the means 4, a plate-like test piece having conductivity on at least one surface is mounted on the floating table with the conductive surface side down, and the conductive material provided on at least the surface portion of the porous body. An inspection device is connected to the conductive portion and the conductive portion of the test piece. In this state, the test piece is floated by the gas ejected from the porous body, and the conductive state between the porous body and the test piece is inspected. At this time, if the test piece and the porous body are in contact with each other, the electrical path connecting the test piece and the porous body is conducted, and this can be confirmed by the inspection apparatus.

  According to such an inspection method, it is possible to reliably determine whether or not the test piece is in contact with the porous body regardless of the flying height of the test piece, the size of the test piece, the contact area of the test piece, the contact location, and the like. Further, even when the contact state is temporarily reached during conveyance or positioning, it can be reliably determined. The effect is remarkable as compared with the conventional inspection methods such as visual confirmation and confirmation of contact sound listening. Furthermore, since it is possible to detect the contact / non-contact state of all porous bodies that may be in contact with the inspection piece (workpiece) at the same time, it is possible to reduce the man-hours required for the inspection. As a result, it is possible to easily and reliably inspect the contact / non-contact state of the workpiece supported non-contact.

  In the inspection method of means 4, it is necessary to provide a conductive portion on at least the surface portion of the porous body, and as a specific configuration thereof, a conductive film may be formed on the surface of the porous body. However, at this time, it is desirable that the conductive film is a thin film so that the floating function by the porous body is not impaired. Alternatively, the porous body itself may be made of a conductive material. For example, the porous body is made of a synthetic resin material mixed with a filler made of a conductive material.

  Means 5. The non-contact support according to means 4, wherein the inspection device is connected to each of the plurality of porous bodies, and the state of contact between each porous body and the test piece is inspected. Device inspection method.

  According to the means 5, it is possible to inspect the contact / non-contact state with the test piece for each porous body. Therefore, a contact location can be specified easily.

  Means 6. Dividing the plurality of porous bodies into a plurality of groups, connecting the inspection apparatus for each of the divided groups, and inspecting the state of contact between the porous body and the test piece in each of the groups, The non-contact support device inspection method according to claim 4.

  According to the means 6, the contact / non-contact state with the test piece can be inspected for each group into which a plurality of porous bodies are divided. Therefore, a contact location can be specified easily. In this case, as compared with the case where inspection devices are connected to all the porous bodies and individually inspected, there are merits such that the labor of the operation can be reduced and the required number of inspection devices can be reduced. For example, each porous body may be divided along the workpiece conveyance direction.

Mean 7 A floating table (floating table 12) for ejecting gas from a surface portion that is conductive and flat is provided, and supports the plate-shaped workpiece (work W) in a non-contact state as the gas is ejected by the floating table. An inspection method used for a non-contact support device (transport device 10),
The plate-like inspection piece is floated by the gas ejected from the floating table, and the inspection piece is charged with a positive or negative charge in that state, and then the floating table and the inspection piece are measured by measuring the potential of the floating table. A method for inspecting a non-contact support device, wherein the state of contact with a non-contact support device is inspected.

  In the invention of means 7, gas is ejected from the floating table to bring the plate-shaped test piece into a floating state, and in this state, the test piece is charged with a positive or negative charge. Then, the contact state between the floating table and the test piece is inspected by measuring the potential of the floating table. At this time, if the floating table and the test piece are in contact with each other, the charge moves, and the potential of the floating table changes accordingly.

  According to such an inspection method, it is possible to reliably determine whether or not the inspection piece is in contact with the floating table regardless of the floating amount of the inspection piece, the size of the inspection piece, the contact area of the inspection piece, the contact location, and the like. Further, even when the contact state is temporarily reached during conveyance or positioning, it can be reliably determined. The effect is remarkable as compared with the conventional inspection methods such as visual confirmation and confirmation of contact sound listening. Furthermore, since the contact / non-contact state between the test piece and the floating table is determined by the surface, the number of man-hours required for the inspection can be reduced. As a result, it is possible to easily and reliably inspect the contact / non-contact state of the workpiece supported non-contact.

Means 8. A floating table (floating table 12) whose surface is a flat surface, and a plurality of porous bodies (porous plate 19) that are provided in a state of protruding from the surface of the floating table and eject gas from the upper surface. , An inspection method used in a non-contact support device (conveyance device 10) that supports a plate-like workpiece (work W) in a non-contact state as the gas is ejected from the porous body,
The plate-like test piece is floated by the gas ejected from the porous body, and the test piece is charged with a positive or negative charge in that state, and then a conductive portion provided on at least the surface portion of the porous body. An inspection method for a non-contact support device, wherein the state of contact between the porous body and the test piece is inspected by measuring the potential of the non-contact support device.

  In the invention of means 8, the gas is ejected from the porous body to bring the plate-shaped test piece into a floating state, and in this state, the test piece is charged with a positive or negative charge. After that, the state of contact between the porous body and the test piece is inspected by measuring the potential of the conductive portion provided on at least the surface portion of the porous body. At this time, if the porous body and the test piece are in contact with each other, charge transfer occurs, and the potential of the porous body changes accordingly.

  According to such an inspection method, it is possible to reliably determine whether or not the test piece is in contact with the porous body regardless of the flying height of the test piece, the size of the test piece, the contact area of the test piece, the contact location, and the like. Further, even when the contact state is temporarily reached during conveyance or positioning, it can be reliably determined. The effect is remarkable as compared with the conventional inspection methods such as visual confirmation and confirmation of contact sound listening. Furthermore, since it is possible to detect the contact / non-contact state of all porous bodies that may be in contact with the inspection piece (workpiece) at the same time, it is possible to reduce the man-hours required for the inspection. As a result, it is possible to easily and reliably inspect the contact / non-contact state of the workpiece supported non-contact.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS An embodiment of the invention will be described below with reference to the drawings. The levitating and conveying apparatus of the present embodiment supports (non-contact support) a flat thin plate-like workpiece such as liquid crystal glass or a thin large substrate by levitating it from the base surface with one side facing upward (non-contact support). It is an apparatus for transporting in the transport direction. FIG. 1 is a plan view showing an outline of a transfer apparatus 10 in the present embodiment, and FIG. 2 is a cross-sectional view taken along line AA in FIG. In addition, the left-right direction of FIG.

  As shown in FIGS. 1 and 2, the transfer device 10 includes a device body 11 that faces the workpiece W. The apparatus main body 11 includes a floating table 12 divided into a plurality of parts and a base 13 on which the plurality of floating tables 12 are mounted in a state where they are joined on the same horizontal plane. In the configuration shown in the figure, five floating tables 12 are provided in parallel so as to be along the conveying direction of the workpiece W.

  Each floating table 12 is made of a long metal member (for example, aluminum), and a plurality of circular recesses 15 having a circular shape in a plan view are formed on an upper surface which is a flat horizontal surface. Each circular recess 15 has the same diameter and the same depth. In each floating table 12, a passage 16 is formed on the back side of the circular recess 15, and a groove recess 17 is formed on the bottom surface side of the floating table 12 over almost the entire area. The groove recess 17 forms a gas chamber 18 for taking in pressurized gas from a gas supply source (not shown). When the pressurized gas is supplied to the gas chamber 18, the pressurized gas is distributed and supplied to each passage 16.

  A plurality of porous plates 19 each having a disk shape are fixed to the circular recess 15 of the floating table 12. The thickness dimension of the porous plate 19 is the same as the depth dimension of the circular recess 15. Therefore, in a state where the porous plate 19 is fixed to the circular recess 15, the upper surface of the floating table 12 and the upper surface of the porous plate 19 are Is the same. The porous plate 19 is made of, for example, a synthetic resin material such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, sintered carbon, sintered ceramics, or the like. In addition, it can also be comprised with metal materials, such as sintered aluminum, sintered copper, sintered stainless steel, for example.

  The porous plate 19 and its accommodating portion are not limited to a circular shape (perfect circle shape) in a plan view, and any shape such as an elliptical shape or a polygonal shape such as a quadrangle can be selected. it can. However, it is preferable that both shapes are common to each other. In addition, the porous plate 19 is not directly fixed to the floating table 12, but the porous plate is mounted on a porous support (porous plate holder) to form a porous unit, and the porous unit is attached to the floating table. The structure which adheres to 12 may be sufficient. In addition, the upper surface of the porous plate 19 can be configured to be slightly lower than the upper surface of the floating table 12.

  Moreover, the conveyance rail 21 is provided in the both sides of the apparatus main body 11 (floating table 12) along the conveyance direction of the workpiece | work W. As shown in FIG. The transport rail 21 is provided with a number of rollers (not shown), and the work W is transferred along with the rotation of the rollers while both ends of the work W are placed on the rollers. ing. Incidentally, it is assumed that the transport apparatus 10 transports a so-called G6 size work W, and the work dimensions are, for example, 1500 mm wide × 1000 mm long × 1.0 mm thick.

  In the transfer device 10 having the above-described configuration, pressurized gas is supplied to the gas chamber 18 of the floating table 12 when the workpiece W is floated and conveyed. As a result, pressurized gas is ejected from the surface of the porous plate 19 and the workpiece W rises. And the workpiece | work W is conveyed in the floating state.

  By the way, when the workpiece W contacts the floating table 12 during the floating conveyance of the workpiece W as described above, there is a concern that the smooth conveyance of the workpiece W may be hindered or the workpiece W may be damaged. The causes of the workpiece W coming into contact with the floating table 12 include a difference in height (including undulations) of the surface portion of the floating table 12 and differences in individual floating forces due to the porous plates 19 provided on the floating table 12. Can be considered. Therefore, in the conveyance apparatus 10, a contact inspection is performed as prior adjustment. Particularly in the present embodiment, a test work having a size substantially the same as that of the work W is used, and a contact inspection is performed by detecting an electrical conduction state between the test work and the floating table 12.

  The inspection method will be described with reference to FIG. FIG. 3 schematically shows the floating table 12 and the test work WT. For convenience of explanation, the thickness dimension is shown larger than the planar size of the test work WT.

  The test work WT is a thin plate-like inspection piece having substantially the same size and weight as the work W that is a transferred object, and a conductive film fi is formed on one surface thereof. Then, the test work WT is placed on the floating table 12 with the conductive film fi facing down, and the tester T is connected to the conductive film fi of the test work WT and the floating table 12. At this time, the test work WT and the floating table 12 are each provided with a conductive terminal portion, and one terminal clip of the tester T is connected to the terminal portion on the test work WT side, so that the terminal on the floating table 12 side is connected. The other terminal clip of the tester T is connected to the part.

  Then, in this state, air is jetted upward from the porous plate 19 of the floating table 12 to float the test work WT. Further, the test work WT is moved in a predetermined transport direction as necessary. At this time, if the test work WT is completely lifted from the floating table 12 without coming into contact with the floating table 12, an electric path connecting the test work WT and the floating table 12 is not formed, and the test work WT is not formed. And the floating table 12 have a maximum (∞) conductive resistance. Therefore, no current flows between the test work WT and the floating table 12, and this is detected by the tester T. On the other hand, if the test work WT and the floating table 12 are in contact, an electrical path connecting the test work WT and the floating table 12 is formed. Therefore, a current flows through the electrical path, which is detected by the tester T.

  When it is confirmed that the test work WT comes into contact with the floating table 12, the contact portion is specified, and adjustment of the surface height of the floating table 12, adjustment of the air ejection amount from each porous plate 19, and the like are performed. Thereby, the contact state between the test workpiece WT and the floating table 12 is avoided, and the contact of the workpiece during actual workpiece conveyance can be suppressed. The tester T may be connected to a computer device or the like, and the state of the test work WT may be recorded when the test work WT comes into contact, or a warning may be given by a lamp device or a speaker device.

  When conducting the continuity test as described above, it is necessary to insulate the test work WT and the transport rail 21, and the rollers of the transport rail 21 are preferably made of an insulating material. Or the structure which does not form the electroconductive film fi only in the part which contacts the conveyance rail 21 in the test work WT may be sufficient.

  According to the present embodiment described in detail above, the test work WT contacts the floating table 12 regardless of the flying height of the test work WT, the size of the test work WT, the contact area of the test work WT, the contact location, and the like. It is possible to reliably determine whether or not Further, even when a contact state is temporarily (momentarily) during conveyance or positioning, it can be reliably determined. The effect is remarkable as compared with the conventional inspection methods such as visual confirmation and confirmation of contact sound listening. Since it is not an inspection based on the operator's sense, uncertainty due to individual differences is also eliminated. Furthermore, since the contact / non-contact state between the test work WT and the floating table 12 is determined by the surface, it is possible to reduce the man-hour required for the inspection. This is considered significant in reducing the cost required for inspection. As described above, the contact / non-contact state of the workpiece W levitated and conveyed can be easily and reliably inspected.

  After inspecting the contact / non-contact state of the workpiece W as described above, it is possible to realize suitable floating conveyance of the workpiece W by eliminating the factor of the contact. Further, since it is not necessary to excessively increase the flying height of the workpiece W, the air supply amount (air consumption amount) can be minimized, and the running cost can be reduced.

  In addition, this invention is not limited to the content of description of the said embodiment, For example, you may implement as follows.

  You may make it implement a contact test | inspection for every several floating table 12. FIG. Specifically, as shown in FIG. 4, an insulating member 25 is interposed between the floating tables 12 to insulate the floating tables 12. Then, a tester T is connected to each floating table 12, and the state of contact between each floating table 12 and the test work WT is inspected. In this case, if the test work WT and the floating table 12 are in contact with each other, an electrical path is formed between the floating table 12 and the test work WT at the contacted portion. Therefore, a current flows through the electrical path, which is detected by the tester T. According to this inspection method, it is possible to inspect the contact / non-contact state with the test work WT for each of the plurality of floating tables 12. Therefore, a contact location can be specified easily.

  It is also possible to provide a structure in which the floating table 12 is further subdivided. For example, the floating table 12 may be divided into a vertical direction and a horizontal direction, and a contact test may be performed by connecting a tester.

  In the above embodiment, since the metal floating table 12 is used, the floating table 12 itself has conductivity, but the floating table 12 is made of a non-conductive material (for example, a synthetic resin material). It can also be considered. In such a case, a conductive film may be formed on the upper surface of the floating table 12.

  In the above embodiment, the conveying device 10 is configured such that the upper surface of the floating table 12 and the upper surface of the porous plate 19 are flush with each other. However, this is changed to protrude upward from the upper surface of the floating table 12. It is also possible to provide the porous plate 19 in such a state. In such a case, the porous plate 19 and the workpiece W may come into contact with each other when the workpiece W is levitated and conveyed. Therefore, the contact / non-contact state between the porous plate 19 and the workpiece W is inspected. The inspection method will be described with reference to FIG.

  In FIG. 5, as in the above embodiment, the test work WT having the conductive film fi formed on one side is used, and the test work WT is placed on the floating table 12 with the conductive film fi on the lower side. The Then, the test work WT is held in a floating state on the floating table 12 as the air is ejected from the porous plate 19. In this embodiment, in particular, a conductive film 19a is formed on the surface portion of each porous plate 19, and testers T are respectively provided on the conductive film 19a of each porous plate 19 and the conductive film fi of the test work WT. Connected. In this case, if the test work WT is completely lifted from the porous plate 19 without coming into contact with each porous plate 19, an electric path connecting the test work WT and the porous plate 19 is not formed. The conductive resistance between the test work WT and the porous plate 19 becomes a maximum (∞). Therefore, no current flows between the test work WT and the porous plate 19, which is detected by the tester T. On the other hand, if the test work WT and the porous plate 19 are in contact, an electrical path connecting the test work WT and the porous plate 19 is formed. Therefore, a current flows through the electrical path, which is detected by the tester T.

  According to the above inspection method, the test work WT can be lifted regardless of the flying height of the test work WT, the size of the test work WT, the contact area of the test work WT, the contact location, etc., as in the above embodiment. 12 can be reliably determined. Further, even when a contact state is temporarily (momentarily) during conveyance or positioning, it can be reliably determined. The effect is remarkable as compared with the conventional inspection methods such as visual confirmation and confirmation of contact sound listening. Since it is not an inspection based on the operator's sense, uncertainty due to individual differences is also eliminated. As described above, the contact / non-contact state of the workpiece W levitated and conveyed can be easily and reliably inspected.

  In the above inspection method, the conductive film 19a needs to have a thickness (for example, about 1 μm) that does not increase the flow resistance because it is necessary not to impair the floating function due to air ejection. For example, the conductive film 19a is formed by gold plating. Alternatively, the porous plate 19 itself may be made of a conductive material. For example, the porous plate 19 is made of a synthetic resin material mixed with a filler made of a conductive material.

  As described above, when the porous plate 19 is provided in a state of protruding from the upper surface of the floating table 12, a seal layer is formed on the outer peripheral edge of the porous plate 19, and a pressurized gas ( When pressurized air) is supplied, the pressurized gas may be prevented from leaking from the outer peripheral surface of the porous plate 19. The seal layer is formed by applying or injecting synthetic resin to the outer peripheral surface.

  Instead of the configuration in which the tester T is connected to each porous plate 19, a plurality of porous plates 19 may be divided into a plurality of groups, and the tester T may be connected to each of the divided groups. Thereby, the state of contact between the porous plate 19 and the test work WT is inspected for each group. In this case, as compared with the case where the testers T are connected to all the porous plates 19 and individually inspected, it is possible to reduce the labor of the work and to obtain the merits of reducing the required number of testers T. For example, the porous plates 19 may be divided along the workpiece W conveyance direction (in this case, the inspection result is substantially the same as the inspection shown in FIG. 4).

  In the above embodiment, the test work WT in which the conductive film is formed on one side is used as the test piece. However, this may be changed and a test work made of a conductive material may be used.

  Moreover, you may make it test | inspect a floating conveyance apparatus (non-contact support apparatus) with the following test | inspection method.

  (1) In a levitation transport apparatus (see the configuration of FIG. 3) in which a porous plate 19 is provided flush with the upper surface of the levitation table 12, the test work WT is levitated with respect to the levitation table 12 by the air blown from the porous plate In this state, the test work WT is charged with positive or negative charges by a charge generator electrically connected to the test work WT. Then, the contact state between the floating table 12 and the test work WT is inspected by measuring the potential of the floating table 12. At this time, if the floating table 12 and the test work WT are in contact with each other, the movement of charges occurs, and the potential of the floating table 12 changes accordingly. Therefore, the contact / non-contact state of the test work WT can be inspected.

  (2) In a levitating and conveying apparatus (see the configuration of FIG. 5) provided with a porous plate 19 so as to protrude from the upper surface of the levitating table 12, a test work is performed on the porous plate 19 by the air blown from the porous plate 19 In this state, the test work WT is charged with a positive or negative charge by a charge generator electrically connected to the test work WT. Then, the state of contact between the porous plate 19 and the test work WT is inspected by measuring the potential of the conductive film 19a of the porous plate 19. At this time, if the porous plate 19 and the test work WT are in contact with each other, charge transfer occurs, and the potential on the porous plate 19 side changes accordingly. Therefore, the contact / non-contact state of the test work WT can be inspected.

  According to the inspection methods (1) and (2), as in the above embodiment, the flying height of the test work WT, the size of the test work WT, the contact area of the test work WT, the contact location, etc. It can be reliably determined whether or not the test work WT is in contact with the floating table 12. Further, even when a contact state is temporarily (momentarily) during conveyance or positioning, it can be reliably determined. As described above, the contact / non-contact state of the workpiece W levitated and conveyed can be easily and reliably inspected. In particular, in comparison with the above-described inspection method in which the tester T is connected to the test work WT and the floating table 12 (or the porous plate 19), the connection with the test work WT is not required, so that the inspection work is further simplified. It is thought that it becomes.

  In the above-described embodiment, the present invention is embodied as an inspection method for the floating conveyance device of the workpiece W. However, the present invention can also be embodied as an inspection method for other non-contact support devices. For example, the present invention may be embodied as an inspection method for a handling arm of a robot apparatus used for semiconductor manufacturing or the like. In this case, in the configuration in which the workpiece is supported in a non-contact manner by the handling arm, the contact / non-contact state of the workpiece with respect to the handling arm can be easily and reliably inspected.

It is a top view which shows the outline of the levitation conveyance apparatus in embodiment of invention. It is the sectional view on the AA line of FIG. It is a figure for demonstrating the contact inspection method of a workpiece | work. It is a figure for demonstrating the contact inspection method of a workpiece | work. It is a figure for demonstrating the contact inspection method of a workpiece | work. It is a top view which shows the conveying apparatus in a prior art.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Conveying device, 12 ... Floating table, 15 ... Circular recessed part, 19 ... Porous board, 21 ... Conveying rail, T ... Tester, W ... Work, WT ... Test work.

Claims (8)

An inspection method used in a non-contact support device that includes a floating table that ejects gas from a surface portion that is conductive and has a flat surface, and supports a plate-shaped workpiece in a non-contact state as the gas is ejected by the floating table. Because
A plate-like inspection piece having conductivity on at least one surface is mounted on the floating table with the conductive surface side down, and one side terminal of an inspection device for inspecting an electrical conduction state is levitated. On the surface of the table, the other terminal is connected to the conductive portion of the test piece, and then the gas is ejected from the floating table to bring the test piece into a floating state. In this state, based on the measurement result by the inspection device An inspection method for a non-contact support device, wherein the state of contact between the floating table and the test piece is inspected.   A plurality of concave portions are formed in the floating table, and a porous body is accommodated in the concave portions so that the upper surface of the floating table and the upper surface of the porous body are flush with each other, or the porous surface is higher than the upper surface of the floating table. The inspection method for a non-contact support apparatus according to claim 1, wherein the inspection method is applied to a non-contact support apparatus having a slightly lower upper surface of the body.   Applied to a non-contact support device having the floating table divided into a plurality and insulated from each other, the inspection device is connected to each of the plurality of floating tables, and the state of contact between each floating table and the test piece is inspected The non-contact support apparatus inspection method according to claim 1, wherein: A floating table whose surface is a flat surface, and a plurality of porous bodies that are provided in a state of protruding from the surface of the floating table and eject gas from the upper surface, and accompanying the ejection of gas by the porous body An inspection method used in a non-contact support device that supports a plate-like workpiece in a non-contact state,
A plate-like inspection piece having conductivity on at least one side is mounted on the floating table with the conductive surface side down, and one side terminal of an inspection device for inspecting an electrical conduction state is provided in the porous Connect the other terminal to the conductive part of the test piece to the conductive part provided on at least the surface part of the material, and then eject the gas from the porous body to bring the test piece into a floating state. And inspecting the contact state between the porous body and the test piece based on the measurement result of the inspection apparatus.   The non-contact according to claim 4, wherein the inspection device is connected to each of the plurality of porous bodies, and the state of contact between each of the porous bodies and the inspection piece is inspected. Support device inspection method.   Dividing the plurality of porous bodies into a plurality of groups, connecting the inspection apparatus for each of the divided groups, and inspecting the state of contact between the porous body and the test piece in each of the groups, An inspection method for a non-contact support device according to claim 4. An inspection method used in a non-contact support device that includes a floating table that ejects gas from a surface portion that is conductive and has a flat surface, and supports a plate-shaped workpiece in a non-contact state as the gas is ejected by the floating table. Because
The plate-like inspection piece is floated by the gas ejected from the floating table, and the inspection piece is charged with a positive or negative charge in that state, and then the floating table and the inspection piece are measured by measuring the potential of the floating table. A method for inspecting a non-contact support device, wherein the state of contact with a non-contact support device is inspected. A floating table whose surface is a flat surface, and a plurality of porous bodies that are provided in a state of protruding from the surface of the floating table and eject gas from the upper surface, and accompanying the ejection of gas by the porous body An inspection method used in a non-contact support device that supports a plate-like workpiece in a non-contact state,
The plate-like test piece is floated by the gas ejected from the porous body, and the test piece is charged with a positive or negative charge in that state, and then a conductive portion provided on at least the surface portion of the porous body. An inspection method for a non-contact support device, wherein the state of contact between the porous body and the test piece is inspected by measuring the potential of the non-contact support device.

Images