JP4702702B2 - Work and stage equipment - Google Patents

Description

  The present invention relates to a positioning structure and a guide structure that can position a workpiece or the like in a non-contact manner, for example, in a vacuum.

Conventionally, a positioning pin method is often used as a positioning method for two parts such as a workpiece and a stage. FIG. 6 shows an explanatory diagram of a conventional positioning pin.
In FIG. 6, 1 is a pin, 2 is an insertion hole, 3 is a workpiece, and 4 is a stage.
The workpiece 3 is provided with either the pin 1 or the insertion hole 2, and the stage 4 is provided with the pin 1 or the insertion hole 2 that is not provided in the workpiece 3. Then, the workpiece 3 and the stage 4 are positioned by fitting the convex portions of the pins 1 provided on the workpiece 3 and the stage 4 with the concave portions of the insertion hole 2.
As described above, since the positioning method using the positioning pin is very simple and inexpensive, it is used in various places. However, when the convex portion and the concave portion are fitted, the mechanical relationship between the pin 1 and the insertion hole 2 is used. Therefore, the generation of particles becomes a problem in a clean environment or a vacuum environment. As a positioning method without mechanical contact, as shown in FIG. 7, an ejection hole 7 for ejecting gas to the work 3 is provided on the stage 4 side, and the work 3 is removed by the flow of gas from the ejection hole 7. A positioning device having a mechanism for holding it in contact has also been devised (see, for example, Patent Document 1).
JP 2004-31799 A

However, the above-described method for maintaining the gas flow in a non-contact state requires a pump for supplying the gas, a device for controlling the flow rate, and the like, which requires a large mechanism, and is used in a vacuum environment. Have difficulty.
Therefore, an object of the present invention is to provide a non-contact positioning structure and a guide structure that can simplify the positioning mechanism and can be used even in a vacuum.

In order to solve the above problem, the present invention is configured as follows.
The invention according to claim 1 is a workpiece and stage apparatus provided with a positioning structure for positioning the workpiece on the stage by providing either a pin or an insertion hole for inserting the pin in both the workpiece and the stage .
The pin may include compositions that are placed bind to so the magnetic pin made of magnet pins and the magnetic body comprising a permanent magnet magnetized in the axial direction from the side closer to the insertion hole magnetic pin, the order of the magnet pins age,
The insertion hole includes a magnet hole member made of a ring-shaped permanent magnet magnetized in the axial direction therein and a magnetic hole member made of a ring-shaped magnetic body from the side close to the pin, the magnetic body hole member, the magnet with a configuration which is placed coupled to such that the order of the perforated member, the magnetization direction of the magnet pin and the magnet hole member in which are arranged to run in opposite to each other.
A second aspect of the present invention is provided with a ring-shaped auxiliary magnets surrounding the pin to a fixed part of the pin, the second auxiliary magnet ring of the opening portion of the insertion hole is provided, said auxiliary magnets and the magnet pin The magnetization directions of the magnet hole member and the second auxiliary magnet are the same.
The invention according to claim 3 is a guide between the work and the stage, in which either a work or a stage relatively movable in one direction is provided with either a tooth or an insertion groove into which the tooth is inserted. In workpiece and stage equipment with structure,
The teeth, the insertion groove depth direction magnetized permanent magnetic teeth and magnetics teeth ing a magnet teeth and the magnetic body consisting magnet from the side closer to the insertion hole, the order of the magnet teeth combine to form configured so that,
The insertion groove, magnetic groove thereof consisting of both walls into the insertion groove magnet groove member and parallel to the length I磁 material element in a groove consisting of parallel lengths Korenaga permanent magnet in the groove while being magnetized in the depth direction of the A structure in which the magnetic material groove member and the magnet groove member are joined in order from the side close to the teeth, and the magnet teeth and the magnet groove member are arranged so that the magnetization directions thereof are opposite to each other. It is.
The invention according to claim 4, the two auxiliary magnets sandwiching the teeth to the fixing portion of the tooth provided, parallel to the length in the auxiliary magnet portion facing the groove in the respective openings on both sides of the insertion groove A second auxiliary magnet is provided so that the magnet teeth and the auxiliary magnet have the same magnetization direction, and the magnet groove member and the second auxiliary magnet have the same magnetization direction.

According to the first and second aspects of the present invention, it is possible to provide a workpiece and a stage apparatus having a positioning structure in which the positioning mechanism can be easily configured and can be used even in a vacuum.
According to invention of Claim 3 , 4 , the workpiece | work and stage apparatus provided with the non-contact guide structure which can be used also in a vacuum can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1A and 1B are diagrams of a positioning structure showing a first embodiment of the present invention, in which FIG. 1A is a perspective view and FIG. 1B is a partial cross-sectional view.
In FIG. 1, 1 is a pin, 2 is an insertion hole for inserting the pin 1, 3 is a work, 4 is a stage, and 20 is a hole member. The pin 1 includes a magnet pin 1 a made of a columnar permanent magnet and a magnetic pin 1 b made of a columnar magnetic body, and is fixed to the work 3. The hole member 20 includes a magnet hole member 20 a made of a ring-shaped permanent magnet and a magnetic hole member 20 b made of a ring-shaped magnetic body, and is inscribed inside the insertion hole 2 of the stage 4. Note that G indicates a gap between the outer diameter of the pin 1 and the inner diameter of the insertion hole 2, and the black arrows drawn on the magnet pin 1a and the magnet hole member 20a indicate the respective magnetization directions. The magnet pin 1a and the magnet hole member 20a are magnetized in the axial direction so that the magnetization directions are opposite to each other and the magnitude of the magnetomotive force is substantially equal.
The difference between this embodiment and the conventional example is as follows. That is, the configuration of the pin 1 is a two-stage configuration in which the magnet pin 1a and the magnetic pin 1b magnetized in the axial direction are stacked in the order of the magnetic pin 1b and the magnet pin 1a from the side close to the insertion hole 2. In addition, the ring-shaped magnet hole member 20a and the ring-shaped magnetic hole member 20b magnetized in the axial direction inside the insertion hole 2 are connected from the side close to the pin 1 to the magnetic hole member 20b and the magnet hole member 20a. It is the point which made it the structure made into the two-stage stack | stacking which becomes order of these, and made the magnetization direction mutually reverse.

Next, the operation principle of this embodiment will be described with reference to FIG.
In FIG. 2, white arrows represent the direction of force generation.
First, in a state where the pin 1 is outside the insertion hole 2 (FIG. 2A), the pin 1 has a magnetic force interaction between the pin 1 and the magnet hole 1a constituting the insertion hole 2 and the magnet hole member 20a. An axial suction force to be drawn into the insertion hole 2 and a radial repulsion force toward the axial center of the insertion hole 2 work. At this time, if the pin 1 tries to approach the outside of the insertion hole 2, the repulsive force on the approaching side increases, and as a result, the pin 1 is returned to the axial center of the insertion hole 2.
When the pin 1 enters the inner portion of the insertion hole 2 (FIG. 2B), the axial suction force to be drawn into the insertion hole 2 applied to the pin 1 and the axial center of the insertion hole 2 Both of the radial repulsive forces toward the surface are further increased, and the pin 1 stably advances along the axial center of the insertion hole 2.
Further, when the insertion proceeds until the axial positions of the magnetic pin 1b and the magnetic hole member 20b overlap (FIG. 2 (c)), the attraction force to be drawn into the insertion hole 2 applied to the pin 1 is further increased. Thus, the repulsive force toward the axial center of the insertion hole 2 becomes small, but when the pin 1 tries to approach the inner wall of the insertion hole 2, the repulsive force of the closer one increases and is returned to the axial center of the insertion hole 2. Remains stably at the axial center of the insertion hole 2.
In this way, while the pin 1 is inserted into the insertion hole 2, the pin 1 is pulled toward the insertion hole 2 while applying a force that stays at the axial center of the insertion hole 2 due to the magnetic force interaction between the magnet pin 1a and the magnet hole member 20a. Therefore, the pin 1 can be stably and smoothly inserted in a non-contact state, and the pin 1 can remain stably at the axial center position of the insertion hole 2 even after insertion.

3A and 3B are diagrams of a positioning structure showing Embodiment 2 of the present invention, in which FIG. 3A is a perspective view and FIG. 3B is a partial cross-sectional view.
In FIG. 3, 5 is an auxiliary magnet made of a ring-shaped permanent magnet provided on the workpiece 3 side, and 6 is a second auxiliary magnet made of a ring-shaped permanent magnet provided on the stage 4 side. The other reference numerals are the same as those in the first embodiment, and thus description thereof is omitted.
The difference between the present embodiment and the first embodiment is as follows. That is, in Example 1, the pin 1 between the workpiece 3 and the stage 4 is drawn into the insertion hole 2 when the axial positions of the magnetic pin 1b and the magnetic hole member 20b overlap. The ring-shaped auxiliary magnet 5 surrounding the pin 1 is provided at the fixing portion of the pin 1 on the work 3 side and the insertion on the stage 4 side so that the force that cancels the resultant force of the force to be applied and the gravity applied to the work 3 is generated. A ring-shaped second auxiliary magnet 6 is provided in a portion of the opening of the hole 2 facing the auxiliary magnet 5 so that the magnet pins 1a and the auxiliary magnet 5 have the same magnetization direction, and the magnet hole member 20a and the second auxiliary magnet. 6 is a portion to which a configuration in which the magnetization directions of 6 are the same is added.
By adding this structure, when the pin 1 is inserted into the insertion hole 2, the pin applied between the workpiece 3 and the stage 4 due to the repulsive force generated between the auxiliary magnet 5 and the second auxiliary magnet 6. The resultant force of the force that 1 is about to be pulled into the insertion hole 2 and the gravitational force applied to the workpiece 3 can be canceled, and the workpiece 3 and the stage 4 can be brought into full contact with each other. In addition, since the magnetization directions of the magnet pin 1a and the auxiliary magnet 5 are the same, and the magnetization directions of the magnet member 20a and the second auxiliary magnet 6 are the same, the magnet pin 1a and the auxiliary magnet 5 and the magnet hole are arranged. The member 20a and the second auxiliary magnet 6 repel each other, and the pin 1 is not pulled out of the insertion hole 2.

4A and 4B are diagrams of a guide structure showing Embodiment 3 of the present invention, in which FIG. 4A is a perspective view and FIG. 4B is a partial cross-sectional view.
In FIG. 4, 8 is a tooth, 9 is an insertion groove for inserting the tooth 8, 3 is a workpiece, 4 is a stage, and 90 is a groove member. The tooth 8 includes a magnet tooth 8 a made of a rectangular parallelepiped permanent magnet and a magnetic tooth 8 b made of a rectangular parallelepiped magnetic body, and is fixed to the work 3. The groove member 90 includes a magnet groove member 90a composed of two rectangular parallelepiped permanent magnets that are long in parallel with the grooves that constitute both wall surfaces of the U-shaped groove, and grooves that also constitute both wall surfaces of the U-shaped groove. The magnetic groove member 90b is formed of two rectangular parallelepiped magnetic bodies that are long in parallel to each other, and each one is provided in contact with both wall surfaces of the insertion groove 9 of the stage 4 respectively. G indicates a gap between the side surface of the tooth 8 and the inner wall of the insertion groove 9, and black arrows drawn on the magnet tooth 8a and the magnet groove member 90a indicate the respective magnetization directions. The magnet teeth 8a and the magnet groove member 90a are magnetized in the depth direction of the grooves so that the magnetization directions are opposite to each other and the magnitudes of the magnetomotive forces in the opposing portions are substantially equal.

The difference between the present embodiment and the first embodiment is as follows. In other words, the portion that was a pin shape is a tooth 8 and the portion that was an insertion hole is an insertion groove 9, so that the workpiece 3 and the stage 4 can move relatively along the groove. is there. Teeth 8 includes magnet teeth 8a made of a cuboid permanent magnet magnetized in the depth direction of the groove, and magnetic teeth 8b of a cuboid made of a magnetic material in order of magnetic teeth 8b and magnet teeth 8a from the side closer to the insertion groove 9. The insertion groove 9 is magnetized in the depth direction of the groove on both wall surfaces thereof, and a magnet groove member 90a made of a long rectangular parallelepiped magnet in parallel with the groove. A magnetic groove member 90b made of a rectangular parallelepiped magnetic body parallel to the groove is arranged in a two-tiered structure such that the magnetic groove member 90b and the magnet groove member 90a are arranged in this order from the side close to the tooth 8. The magnetization directions of the magnet teeth 8a and the magnet groove members 90a are opposite to each other.
The operating principle of the present embodiment is basically the same as that of the first embodiment, and a force is applied to the teeth 8 so as to remain at the center of the width direction axis of the insertion groove 9 when inserted in an arbitrary position of the insertion groove 9. Therefore, the workpiece 3 and the stage 4 can move relatively along the insertion groove 9 while the teeth 8 remain stably at the center position in the width direction of the insertion groove 9.

5A and 5B are diagrams of a guide structure showing Embodiment 4 of the present invention, in which FIG. 5A is a perspective view and FIG. 5B is a partial cross-sectional view.
In FIG. 5, 5 is an auxiliary magnet composed of two rectangular parallelepiped permanent magnets provided on the workpiece 3 side, and 6 is a second auxiliary magnet composed of two long rectangular parallelepiped permanent magnets provided on the stage 4 side. . The other reference numerals are the same as those in the third embodiment, and thus the description thereof is omitted.
The difference between the present embodiment and the third embodiment is as follows. That is, in Example 3, when the magnetic tooth 8b and the magnetic groove member 90b are inserted so that the position in the depth direction of the groove overlaps, the tooth 8 applied between the workpiece 3 and the stage 4 is drawn into the insertion groove 9. In addition to providing two rectangular parallelepiped auxiliary magnets 5 with the teeth 8 sandwiched between the fixing portions of the teeth 8 on the work 3 side so that a force that cancels the resultant force of the force to be applied and the gravity applied to the work 3 is generated. A second rectangular parallelepiped second auxiliary magnet 6 is provided in each of the portions facing the auxiliary magnets 5 on both sides of the opening of the insertion groove 9 on the stage 4 side, and the magnetization directions of the magnet teeth 8a and the auxiliary magnets 5 are aligned. It is the part which added the structure which becomes the same, and the magnetizing direction of the magnet groove member 90a and the 2nd auxiliary magnet 6 becomes the same.
By adding this structure, the teeth applied between the workpiece 3 and the stage 4 due to the repulsive force generated between the auxiliary magnet 5 and the second auxiliary magnet 6 when the teeth 8 are inserted into the insertion grooves 9. 8 can cancel the resultant force of the force to be pulled into the insertion groove 9 and the gravitational force applied to the workpiece 3, and is driven by a linear motor (not shown) having a magnet on the workpiece 3 side and a coil on the stage 4 side. As a result, the workpiece 3 and the stage 4 can be moved relative to each other in a completely non-contact state. In addition, since the magnet teeth 8a and the auxiliary magnet 5 have the same magnetization direction and the magnet groove member 90a and the second auxiliary magnet 6 have the same magnetization direction, the magnet teeth 8a and the auxiliary magnet 5 and the magnet are magnetized. The groove member 90 a and the second auxiliary magnet 6 repel each other, and when the tooth 8 is inserted into an arbitrary position of the insertion groove 9, the tooth 8 is not attracted to the outside of the insertion groove 9.

  As described above, according to the present invention, either the pin 1 or the insertion hole 2 is provided on the work 3, and one of the pins 1 or the insertion hole 2 that is not provided on the work 3 is provided on the stage 4. In the positioning structure, the configuration of the pin 1 includes a cylindrical magnet pin 1a and a cylindrical magnetic pin 1b magnetized in the axial direction from the side closer to the insertion hole 2 in the order of the magnetic pin 1b and the magnet pin 1a. In addition, the structure of the insertion hole 2 is similar to the pin 1 with the ring-shaped magnet hole member 20a and the ring-shaped magnetic hole member 20b magnetized in the axial direction therein. The magnet hole member 20b and the magnet hole member 20a are arranged in a two-tiered structure from the side, and the magnetomotive force of the magnet pin 1a and the magnet hole member 20a is the same and the magnetization directions are opposite to each other. And Since the outer diameter of 1 and the inner diameter of the insertion hole 2 have a predetermined gap, the mechanical relationship between the pin 1 and the insertion hole 2 when the convex part and the concave part are fitted in the conventional example. The contact occurred because the pin 1 is pulled into the insertion hole 2 while applying a force that stays at the center of the insertion hole 2 in a non-contact state due to the interaction of the magnetic force between the magnet pin 1a and the magnet hole member 20a. In addition, since it can be inserted stably and smoothly and it is made of a permanent magnet, a non-contact positioning structure that can be used even in a vacuum can be provided.

  Further, when the axial position of the magnetic pin 1b and the magnetic hole member 20b overlap each other, the force and the work that causes the pin 1 between the work 3 and the stage 4 to be drawn into the insertion hole 2 A ring-shaped auxiliary magnet 5 surrounding the pin 1 is provided on the fixed portion side of the pin 1 on the work 3 side and an opening of the insertion hole 2 of the stage 4 is generated so that a force that cancels the resultant force with the gravity applied to the work 3 is generated. The ring-shaped second auxiliary magnet 6 is provided in a portion facing the auxiliary magnet 5, and the magnetization directions of the magnet pin 1 a and the auxiliary magnet 5 are the same, and the magnetization direction of the magnet hole member 20 a and the second auxiliary magnet 6 When the pin 1 is inserted into the insertion hole 2 without the pin 1 being pulled out of the insertion hole 2, the auxiliary magnet 5 and the second auxiliary magnet 6 are The repulsive force generated between It is possible to cancel the resultant force between the force that the pin 1 applied between the clamp 3 and the stage 4 is pulled into the insertion hole 2 and the gravity applied to the workpiece 3, so that the workpiece 3 and the stage 4 are not in contact with each other. Can do.

  Further, the work 3 and the stage 4 can be relatively moved in one direction, and the work 8 and the stage 4 are provided with either the tooth 8 or the insertion groove 9 parallel to the moving direction. In the guide structure, the teeth 8 are composed of a magnet tooth 8a made of a cuboid permanent magnet magnetized in the depth direction of the groove and a cuboid magnetic tooth 8b made of a magnetic material from the side closer to the insertion groove 9. 8b and magnet teeth 8a are arranged in a two-tiered structure, and the structure of the insertion groove 9 is composed of a rectangular parallelepiped permanent magnet that is magnetized on both wall surfaces in the depth direction of the groove and parallel to the groove. The magnetic groove member 90a and the magnetic groove member 90b made of a rectangular parallelepiped magnetic body that is long in parallel with the groove are arranged from the side close to the teeth 8 to the magnetic groove member 90b and the magnet groove member 9. The magnets 8a and the magnet groove member 90a have the same magnetomotive force in the opposite portions of the magnet teeth 8a and the magnet groove members 90a, and the magnetization directions are opposite to each other. Since the side surface of the insertion groove 9 and the inner wall surface of the insertion groove 9 have a predetermined gap, the tooth 8 has a center in the width direction axis of the insertion groove 9 when inserted in an arbitrary position of the insertion groove 9. By providing a force that stays at the center, the guide 8 can stably move at the center position in the width direction of the insertion groove 9 while the work 3 and the stage 4 can move relatively along the groove. it can.

  Further, when the magnetic teeth 8b and the magnetic groove member 90b are inserted so that the positions in the depth direction of the grooves overlap with each other, the teeth 8 between the workpiece 3 and the stage 4 tend to be drawn into the insertion grooves 9. Two rectangular parallelepiped auxiliary magnets 5 sandwiching the teeth 8 are provided at the fixing portion of the teeth 8 on the work 3 side so that a force that cancels the resultant force of the force and the gravity applied to the work 3 is generated. A second rectangular parallelepiped second auxiliary magnet 6 is provided in each of the portions facing the auxiliary magnets 5 on both sides of the opening of the insertion groove 9 so that the magnet teeth 8a and the auxiliary magnets 5 have the same magnetization direction. By adding a configuration in which the magnetization directions of the magnet groove member 90a and the second auxiliary magnet 6 are the same, the teeth 8 can be inserted into the insertion grooves 9 without the teeth 8 being drawn out of the insertion grooves 9. When inserted, the force that the tooth 8 applied between the workpiece 3 and the stage 4 is pulled into the insertion groove 9 by the repulsive force generated between the auxiliary magnet 5 and the second auxiliary magnet 6 and the workpiece 3. The workpiece 3 and the stage 4 are in the groove while the teeth 8 are stably kept at the center position in the width direction of the insertion groove 9 with the work 3 and the stage 4 being completely in non-contact with each other. It is possible to provide a guide structure that is relatively movable along the guide.

  The present invention has exemplified the case where the workpiece is positioned with respect to the stage as an embodiment, but can be applied to a configuration in which two general structures are positioned. For example, in a semiconductor exposure apparatus, when a reticle or the like is transported over a lens barrel (optical axis), the cover may be transported to a predetermined position and positioned in order to prevent particles from entering the lens barrel. In this case, the lens barrel can be replaced with a stage and the cover can be replaced with a workpiece.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure of the positioning structure which shows Example 1 of this invention, (a) is a perspective view, (b) is a fragmentary sectional view. The partial perspective view which shows the operation | movement of Example 1 of this invention. It is a figure of the positioning structure which shows Example 2 of this invention, (a) is a perspective view, (b) is a fragmentary sectional view. It is a figure of the guide positioning structure which shows Example 3 of this invention, (a) is a perspective view, (b) is a fragmentary sectional view. It is a figure of the guide positioning structure which shows Example 4 of this invention, (a) is a perspective view, (b) is a fragmentary sectional view. The perspective view which shows the positioning structure of a prior art example The perspective view which shows the other positioning structure of a prior art example

Explanation of symbols

1 pin 1a magnet pin 1b magnetic pin 2 insertion hole 20 hole member 20a magnet hole member 20b magnetic hole member 3 work 4 stage 5 auxiliary magnet 6 second auxiliary magnet 7 ejection hole 8 teeth 8a magnet teeth 8b magnetic teeth 9 insertion Groove 90 Groove member 90a Magnet groove member 90b Magnetic groove member G Gap between pin outer diameter and insertion hole inner diameter Black arrow Permanent magnet magnetization direction White arrow Force generation direction

Claims (4)

In both the workpiece and the stage device provided with a positioning structure for positioning the workpiece on the stage by providing either a pin or an insertion hole for inserting the pin in both the workpiece and the stage ,
The pin may include compositions that are placed bind to so the magnetic pin made of magnet pins and the magnetic body comprising a permanent magnet magnetized in the axial direction from the side closer to the insertion hole magnetic pin, the order of the magnet pins age,
The insertion hole includes a magnet hole member made of a ring-shaped permanent magnet magnetized in the axial direction therein and a magnetic hole member made of a ring-shaped magnetic body from the side close to the pin, the magnetic body hole member, the magnet with a configuration which is placed coupled to such that the order of the perforated member, a work and a stage apparatus characterized by the magnetization direction of the magnet pin and the magnet hole member is arranged so as to be opposite to each other. The ring-shaped auxiliary magnets surrounding the pin to a fixed part of the pin is provided, the opening portion of the insertion hole to provide a ring-shaped second auxiliary magnet, so that the magnetization directions of the auxiliary magnets and the magnet pins is the same The workpiece and stage device according to claim 1, wherein the magnet hole member and the second auxiliary magnet have the same magnetization direction. In a workpiece and a stage apparatus provided with a guide structure between the workpiece and the stage , in which either a tooth or an insertion groove into which the tooth is inserted is provided in both of the workpiece and the stage that are relatively movable in one direction. ,
The teeth, the insertion groove depth direction magnetized permanent magnetic teeth and magnetics teeth ing a magnet teeth and the magnetic body consisting magnet from the side closer to the insertion hole, the order of the magnet teeth combine to form configured so that,
The insertion groove, magnetic groove thereof consisting of both walls into the insertion groove magnet groove member and parallel to the length I磁 material element in a groove consisting of parallel lengths Korenaga permanent magnet in the groove while being magnetized in the depth direction of the magnetic channel member from the side near the member on the teeth, as well as to bound configured such that the order of the magnet groove member, the magnetization direction of the magnet teeth and the magnet groove member is arranged to be opposite to each other Work and stage equipment characterized by The two auxiliary magnets sandwiching the teeth on the fixed part of the tooth is provided, provided the second auxiliary magnet parallel to have a length in the groove in the insertion groove, respectively the auxiliary magnet portion opposite to the opening sides of the 4. The workpiece and stage according to claim 3 , wherein the magnet teeth and the auxiliary magnet have the same magnetization direction, and the magnet groove member and the second auxiliary magnet have the same magnetization direction. apparatus.

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