JP4704074B2 - Air conditioner for precision temperature control - Google Patents

Description

  The present invention relates to a precision temperature control air conditioner installed in a clean room or the like of a semiconductor manufacturing factory, and more particularly to a precision temperature control air conditioner capable of controlling the blown air temperature with high accuracy.

  Conventionally, a constant temperature air conditioner that accurately maintains a room temperature at a preset constant temperature is known from, for example, Patent Documents 1 and 2. The constant temperature air conditioner of Patent Document 1 is arranged in the order of a cooler (evaporator), an electric heater, and a fan, controls the amount of heat generated by the electric heater based on a signal from the indoor temperature detector, and supplies conditioned air to the room. A supply air temperature detector is provided in the supply air duct for supplying, and the capacity of the compressor is controlled based on the detection signal to maintain the room temperature at a constant temperature. Further, in Patent Document 2, an air cooler composed of a heat-conducting cooling cave, a thermoelectric conversion element, and a cooling water circulation radiator is arranged in the order of an electric heater and a fan. There is disclosed a constant temperature air conditioner in which a first temperature detector for detecting a temperature is disposed at an outlet of a cooling tunnel and a second temperature detector for detecting a temperature of supply air is disposed downstream of a fan. And the airflow dispersion plate which consists of a perforated plate is arrange | positioned between the 1st temperature detector and the electric heater. Furthermore, Patent Document 2 discloses another constant temperature air conditioner in which a fan is disposed upstream of an air cooler and baffle plates are provided in two stages between an electric heater and a flow path leading to an air supply port. Yes.

As described above, in order to control the temperature of the blown air, in the conventional constant temperature air conditioner, a temperature sensor is disposed downstream of the fan, and the air temperature agitated and averaged by the fan is measured. The calorific value is controlled. However, since there is a spatial temperature distribution downstream of the air cooler and the electric heater, it is difficult to measure the air temperature with high accuracy.
For example, in the constant temperature air conditioner of Patent Document 2, since the first temperature detector that controls the temperature of the air cooler via the controller is arranged upstream of the airflow dispersion plate, the air downstream of the airflow dispersion plate Even if the temperature is made uniform, the airflow distribution plate does not contribute to accurately measuring the air temperature at the cooler outlet. Also, in the constant temperature air conditioner provided with a baffle plate downstream of the electric heater, since the fan is disposed upstream of the air cooler, there is a temperature distribution in the downstream air of the cooler, and the first temperature detector cools the cooler. It is difficult to measure the average air temperature at the outlet.
Japanese Patent No. 2599632 JP-A-10-325567

In general, a spatial temperature distribution of several degrees Celsius occurs downstream of the heat exchanger because of the temperature distribution on the surface of a heat exchanger such as an evaporator arranged in the air conditioner and the imbalance of the passing air volume. Although the spatial temperature distribution is eliminated by stirring through the fan, there is usually only one fan for the air conditioner. For example, if the fan is installed downstream of the heat exchanger for heating, it can only be used for controlling the heating amount and cooling. If it is installed downstream of the heat exchanger, it can only be used to control the amount of cold heat. In order to control both, it is necessary to measure the average value of the downstream air temperature of the heat exchanger with high accuracy without using a fan.
In order to stir the air downstream of the heat exchange part (heat exchanger) without using a fan, it is conceivable to provide an air mixing box or the like. However, in order to increase the size of the air conditioner and the pressure loss inside the machine, the above means is used. There is a limit to the provision. On the other hand, it is conceivable to install a plurality of temperature sensors to obtain an average value of the spatial temperature distribution, but the cost increases as the number of sensors increases. In addition, since a commercially available temperature controller normally outputs a control signal with the input value of one sensor, an expensive sequencer or the like must be used to control with a temperature average value at multiple points.

  Accordingly, an object of the present invention is to eliminate the above-mentioned problems of the prior art, and the air temperature at the outlet of the heat exchanger for cooling is made uniform and the amount of cooling heat is controlled without increasing the size of the air conditioner. It is an object of the present invention to provide a precision temperature control air conditioner that can detect the air temperature downstream of the cooling heat exchange section with high accuracy without increasing the number of temperature sensors.

In order to achieve the above object, the present invention provides a cooling heat exchanging section, a heating heat exchanging section, and an air circulation fan for supplying air exchanged in the cooling heat exchanging section from an outlet. A first temperature sensor and a second temperature sensor are arranged sequentially from the upstream and the bottom of the flow path, and are arranged between the cooling heat exchange section and the heating heat exchange section and downstream of the air circulation fan, respectively. And controlling the cooling heat amount of the cooling heat exchange unit based on the air temperature detected by the first temperature sensor, and the heating amount of the heating heat exchange unit based on the air temperature detected by the second temperature sensor In the precision temperature control air conditioner that controls the temperature sensor, a baffle plate is disposed in the air flow path between the cooling heat exchange section and the first temperature sensor, and the temperature measuring resistor in which the first temperature sensor is dispersed at a plurality of points is provided. comprising a series-connected resistor, said baffle plate is disposed in a horizontal direction, cooling The air heat-exchanged in the exchange part bypasses the front end of the baffle plate and travels toward the first temperature sensor, and is inclined upward from the front end portion of the baffle plate toward the base end portion above the baffle plate. The heating heat exchanger is provided .
In this invention, the evaporator of the compression-type refrigerant circuit which consists of a compressor, a condenser, an expansion valve, and an evaporator can be made into the said heat exchange part for cooling. In that case, an electric heater is used as the heating heat exchanger, and the amount of cold heat of the evaporator is controlled by controlling the capacity of the compressor of the refrigerant circuit based on the air temperature detected by the first temperature sensor. The heating amount of the electric heater is controlled based on the air temperature detected by the two temperature sensor.

  In the precision temperature control air conditioner of the present invention, the baffle plate is disposed in the air flow path between the cooling heat exchange unit and the first temperature sensor, so that the air at the cooling heat exchange unit outlet is sufficiently absorbed by the baffle plate. Stirring causes the spatial temperature distribution to be significantly reduced. In addition, the first temperature sensor that detects the air temperature at which the spatial temperature distribution has become smaller is a series of temperature measuring resistors distributed in a plurality of points, so the average of the air temperature at the outlet of the cooling heat exchange section It is possible to obtain a value. Therefore, the amount of cooling heat in the cooling heat exchange unit is controlled based on this air temperature, so that the air temperature downstream of the cooling heat exchange unit can be controlled with high accuracy even in an environment where the intake air temperature fluctuates severely. It becomes possible to do. As a result, it is possible to control the blown air temperature with high accuracy by controlling the heating amount of the heat exchange unit for heating based on the air temperature downstream of the air circulation fan.

Hereinafter, the present invention will be described in detail.
First, with reference to FIG. 1, the outline | summary of the 1st precision temperature control air conditioner of this invention is demonstrated. The air conditioner main body is formed of an airtight housing and is partitioned into a suction chamber B, a cooling heat exchange section storage chamber C, an air flow path chamber D, and an electrical component storage chamber E in which mainly electrical components are arranged. Chamber E forms an exhaust system separate from chambers B, C, and D.
A cooling heat exchange section storage chamber (hereinafter referred to as a cooling chamber) C includes a compressor 1, a condenser 2, an expansion valve 3, an evaporator 4 constituting a heat exchange section for cooling, and a refrigerant pipe connecting them. A compression refrigerant circuit and a water-cooled heat exchanger 5 for cooling the condenser 2 with water are incorporated. The heat exchanger 5 may be an air-cooled type that is cooled by air instead of the water-cooled type. Further, the evaporator 4 portion of the cooling chamber C and the air flow path chamber D are formed of a heat insulating and airtight wall body.
In the air flow path chamber D, a baffle plate 6, an electric heater 7 as a heating heat exchange unit, and an air circulation fan 8 are sequentially arranged from the upstream side. A first temperature sensor 9 is disposed in the air flow path between the baffle plate 6 and the electric heater 7, and a second temperature sensor 10 is disposed downstream of the fan 8.
In the electrical component storage chamber E, the motor unit 11 of the fan 8, the first temperature sensor 9, the compressor control unit 12 connected to the compressor 1, the second temperature sensor 10 and the electric heater control connected to the electric heater 7. Part 13 is installed. An exhaust fan 14 is provided at one end opening of the chamber E, and various electrical components such as the motor unit 11 and the control boards of the control units 12 and 13 are cooled by indoor air sucked into the chamber E. ing.

FIG. 2 is a schematic configuration diagram of the precision temperature control air conditioner of the present invention.
As described above, the inside of the airtight housing 17 of the precision temperature control air conditioner is divided into the suction chamber B, the cooling chamber C, the air flow path chamber D, and the electrical component storage chamber E. More specifically, the chamber E is disposed in the upper part on the front side of the air conditioner A. Behind chamber E, chamber D is disposed on one side and chamber B is disposed on the other side. A cooling chamber C is disposed below these chambers B, D, and E. Further, the upstream side of the chamber B and the chamber C has no partition and communicates as it is. Further, the chamber C and the chamber D communicate with each other in an airtight state.
The indoor air sucked from the suction port 15 of the suction chamber B flows into the inside from the other side of the cooling chamber C and is cooled through the evaporator 4. Next, the air flowed out from the opening 18 provided in one side portion of the rear portion of the cooling chamber C, and while colliding with the baffle plate 6 disposed in the horizontal direction, the liquid flow chamber D was raised and stirred. After that, it goes to the first temperature sensor 9 by bypassing between the partition wall partitioning the chamber D and the chamber E and the front end of the baffle plate 6. After that, it passes through the first temperature sensor 9, moves upward above the baffle plate 6 base, reverses again, and passes through the electric heater 7. At that time, after being reheated by the electric heater 7 and sucked into the fan 8 from the suction surface of the air circulation fan 8 located above the front end portion of the baffle plate 6, the air is then discharged from the outlet 16 of the air channel chamber D. Air is supplied indoors.
In the precision temperature control air conditioner of the present invention, as shown in FIG. 2, the air flow path from the downstream side of the evaporator 4 to the air outlet 16 of the air flow path chamber D is twisted so that the downstream side of the evaporator 4 Spatial temperature distribution is made as small as possible.

Next, the first precision temperature control air conditioner of the present invention will be specifically described.
In the precision temperature control air conditioner A shown in FIGS. 3 to 5, the cooling chamber C, which will be described in detail later, has a meandering refrigerant on a thin box-shaped thermally conductive metal plate 19 in which a large number of ventilation holes are formed. The refrigerant circuit including the evaporator 4 to which the pipe is fixed, and the water pipe 20 constituting the water-cooled heat exchanger 5 are incorporated. In the cooling chamber C, an opening 18a that communicates with the opening of the air channel chamber D is formed on one side of the rear portion of the upper surface, and a substantially trapezoidal opening that communicates with the opening of the suction chamber B on the front side. 18b is formed.
The upper surface opening (18a) of the cooling chamber C and the lower surface opening of the air flow channel chamber D communicate with each other via the connection duct 21, and between the upper surface opening periphery of the cooling chamber C and the lower surface opening periphery of the connection duct 21. A packing 22 made of an elastic member is interposed. The connecting duct 21 has a flange 21a (see FIGS. 7 and 8) attached to the periphery of the lower end opening of the chamber D. Further, the packing 22 is fixed to one or both of the chamber C and the connecting duct 21.
A baffle plate 6 is attached substantially horizontally at a lower portion of the rear portion of the air flow path chamber D with a space from the partition wall 17a to the electrical component storage chamber E. A fan casing 23 that houses the air circulation fan 8 is provided at the upper front of the chamber D and supported by the partition wall 17a. A first temperature sensor 9 is disposed between the lower end of the suction surface of the casing 23 and the tip of the baffle plate 6. The first temperature sensor 9 is fixed to the upper surface of the sheet metal gate-type base 24. A second temperature sensor 10 is disposed on the casing 23 blowing surface between the fan 8 and the blowout port 16 of the chamber D. Further, an electric heater 7 in which a resistance heating body such as a nichrome wire and a plurality of sheathed heaters arranged in parallel is attached to the support member 25 and is inclined upward from the lower end portion of the suction surface is disposed.

The attachment structure of the electric heater 7 whose resistance heating body is a nichrome wire is shown in FIG. The support member 25 includes a rectangular metal plate frame 26 having a U-shaped cross section and a plurality of SUS support plates 28 that support the nichrome wire 27. The support plate 28 is fixed between the long sides of the frame 26 with a space for ventilation, and a plurality of insulator holes 29 are formed in the support plate 28. A cylindrical insulator (not shown) having a hole through which the nichrome wire 27 is inserted at the center is inserted into the insulator hole 29.
Two pairs of insulator holes 26 a and 26 b are formed in the lower part of one side of the frame body 26. In addition, a bent piece 30 that bends outward from the inside of the upper side of the frame body 26 is provided, and a pair of large and small holes 30 a and 30 b are perforated in the bent piece 30. A lead wire 31a extending from both ends of the nichrome wire 27 is inserted into a center hole and a hole 30a formed in a cylindrical insulator penetrating into the insulator hole 26a and connected in series with the fuse. A lead wire 31b extending from a thermostat that maintains the heat generation temperature of the nichrome wire 27 within a predetermined range is inserted into the center hole and the hole 30b formed in the cylindrical insulator that penetrates the insulator hole 26b. Such a support member 25 is drilled in the upper and lower long sides of the frame body 26, and is attached to the lower end portion of the suction surface of the fan casing 23 and the upper end portion of the rear portion of the chamber D through the screw hole 26c.

Referring to FIG. 3A, the front upper portion of the electrical component storage chamber E is covered with a detachable upper panel 32 to facilitate inspection of electrical components such as the motor unit 11 and the control board. . The upper panel 32 is coupled to the main body of the air conditioner A with a retaining screw, and a handle 33 is provided on one side thereof. Further, the upper panel 32 displays the target room temperature, the room temperature during operation, the on / off state of switches, the date / time, etc., a liquid crystal touch panel 34 for operating the switches, an indicator lamp 35 that is lit during operation, an electronic An earth leakage breaker 36 that cuts off the power supply when an electric leakage occurs in an electrical component and an emergency cut-off switch 37 that shuts off the power supply when an emergency occurs are provided.
The lower front portion of the chamber E is also covered with a detachable side panel 38 to facilitate inspection of a cooling fan motor and the like which will be described later. The side panel 38 is coupled to the air conditioner A main body with a retaining screw, and a handle 39 is provided on one side thereof.

A flange 40a of a cylindrical connecting portion 40 connected to the indoor air suction duct is provided on the upper surface of the main body of the precision temperature control air conditioner A so as to cover the suction port 15 of the suction chamber B and the blowout port 16 of the air channel chamber D. And the flange 41a of the cylindrical connection part 41 connected to an air supply duct is each fixed. Such an air flow path system is exclusively for maintaining the semiconductor manufacturing apparatus and the like at a constant temperature, and the air conditioner A is integrally provided with an electrical component storage chamber E that constitutes a separate air flow path system. It has been. In this air flow path system, the indoor air sucked through the filter 42 cools electrical parts such as the motor part 11 of the fan 8 and the control plates of the control parts 12 and 13 protruding into the chamber E, The air is exhausted indoors by the cooling fan 43.
Furthermore, casters 45 are attached to the lower four corners of the air conditioner A main body.

Next, the cooling chamber C will be specifically described with reference to FIGS.
The refrigerant circuit includes a two-cylinder rotary compressor 1, a condenser 2, an electronic expansion valve 3, an evaporator 4 fixed to the metal plate 19, and an accumulator 46, and refrigerant pipes 47a to 47e that sequentially connect them. Is done. Among them, one end of the refrigerant pipe 47 e is located in the upper gas phase portion in the accumulator 46, and the other end is connected to each cylinder portion in the compressor 1.
In the compressor 1, a receiving plate 48 provided integrally at the bottom thereof is fixed to a support base 49 by a long screw 50. The refrigerant pipe constituting the condenser 2 has a substantially U shape or a substantially U shape rotated by 90 °, and the water pipe 20 penetrates the inside thereof. That is, the water-cooled heat exchanger 5 includes a double pipe having the refrigerant pipe as an outer pipe and the water pipe 20 as an inner pipe. The upper pipe of the condenser 2 (water-cooled heat exchanger 5) is supported by a fixture 51 fixed to the cooling chamber C main body, and the refrigerant condensed by the cooling water sent into the water pipe 20 is downstream. It is easy to flow into. Therefore, it is preferable to incline the upper pipe of the condenser 2 so as to descend toward the downstream side. A stepping motor 52 is incorporated in the electronic expansion valve 3, and the opening degree of the expansion valve 3 is adjusted so that the refrigerant pipe surface temperature difference at the inlet / outlet of the evaporator 4 is constant.

Below the evaporator 4, a drain pan 53 that receives drain water that is condensed when the indoor air undergoes heat exchange is disposed. The bottom of the drain pan 53 is inclined, and a drain pipe 54 is connected to the deepest part thereof.
One side surface of the cooling chamber C is covered with an inspection plate 55, and the inspection plate 55 is screwed into a screw fixing bracket 56 having an L-shaped cross section fixed to four locations on the front side and the back side of the cooling chamber C main body. Are perforated and removably attached to the cooling chamber C main body using a stop screw. The inlet part 57 and the outlet part 58 of the water pipe 20 are formed with threaded parts so as to be connectable to the cooling water forward pipe and the return pipe via the connecting members 57a and 58a. Similarly, a screw part that can be connected to the drain water discharge pipe via the connection member 59a is also formed in the discharge port part 59 of the drain pipe 54. In addition, the inlet part 57, the outlet part 58, and the discharge port part 59 can be connected to the forward pipe, the return pipe, and the drain water discharge pipe in a one-touch manner.

By the way, it is desirable to unitize the cooling chamber C so that only parts of the refrigerant circuit can be replaced in the event that a part incorporated in the refrigerant circuit such as the compressor 1 or the expansion valve 3 breaks down. When the cooling chamber C is unitized, as shown in FIG. 7, a tapered portion 60 that increases in the direction of one side surface covered with the inspection plate 55 is provided around the upper surface opening of the cooling chamber C, and the connecting duct It is preferable to provide a tapered portion that matches the periphery of the upper surface opening of the cooling chamber C also in the periphery of the lower surface opening of 21.
Here, if there is a gap in the space on the outlet side of the evaporator 4, there is a possibility that air whose temperature is not controlled is mixed into the upstream air of the electric heater 7 by bypassing the evaporator 4. However, if the taper 60 is provided, the packing 22 is interposed between the periphery of the upper surface opening of the cooling chamber C and the periphery of the lower surface opening of the connecting duct 21, so that the cooling chamber C is placed at a predetermined position of the air conditioner body. Since the packing 22 is automatically compressed when being set, the separation of the cooling chamber C and its airtightness are ensured. At the same time, the cooling chamber C is easily pulled out.
Furthermore, for example, if a handle is attached to the left and right of the inspection plate 55, the cooling chamber C can be easily put in and out.

In the precision temperature control air conditioner A of the present invention, in order to perform precise temperature control at the target temperature ± 0.1 ° C. level, it is necessary to control the air in front of the electric heater 7 within a range of ± 0.3 ° C. of the set temperature. Therefore, high-accuracy capacity control of the compression refrigerator is performed. In order to control the capacity of the refrigerator with high accuracy, the measured temperature of the first temperature sensor (compressor frequency control sensor) 9 needs to be equal to the average temperature of the air cooled by the evaporator 4. However, since the refrigerant temperature in the evaporator 4 and the amount of passing air vary, the air downstream of the evaporator 4 usually has a temperature distribution of several degrees Celsius. Therefore, the baffle plate 6 is provided to mix the outlet air of the evaporator 4 to reduce the variation in temperature distribution.
The air temperature is not sufficiently uniformed only by providing the baffle plate 6, and as the number of baffle plates 6 increases, the air pressure loss increases and the power of the fan 8 also increases. One temperature sensor 9 is used. This first temperature sensor 9 is made up of a resistor (Pt100Ω: 20Ω × 5) in which platinum temperature measuring resistors 9b are dispersed in series at a plurality of points in the film 9a, that is, five points in this embodiment. This is a ribbon sensor. Reference numeral 61 denotes a conducting wire connected to the compressor control unit 12. According to the first temperature sensor 9, a resistance value obtained by averaging the temperatures at the respective points is output from the first temperature sensor 9. Therefore, even if there is a temperature distribution at each measurement point, a measurement value close to the average value is output.

In addition, in order to perform precise temperature control at a level of ± 0.1 ° C., the measured temperature of the second temperature sensor (electric heater control sensor) 10 needs to be equal to the average temperature of the blown air within a range of ± 0.1 ° C. is there. For this purpose, the air temperature after being mixed by the air circulation fan 8 is measured by the second temperature sensor 10. In general, since the air temperature of the fan 8 blowout surface has a temperature distribution of about ± 0.1 ° C., in the present invention, the air temperature in the vicinity of the fan 8 blowout surface or its downstream side is measured, and the average value is obtained regardless of the air volume. The second temperature sensor 10 is disposed at a point where a measured value close to is obtained.
As shown in FIGS. 10A and 10B, the second temperature sensor 10 includes a rod-shaped L-shaped platinum resistance temperature detector (Pt100Ω) 10a. The resistance temperature detector 10a is fixed to the fixing bracket 62 whose vertical base is attached to the fan casing 23 via the electrical insulating member 10b so that the longitudinal direction thereof is orthogonal to the airflow.

Explaining the operation of the precision temperature control air conditioner A of the present invention, indoor air sucked from the suction port 15 of the suction chamber B is cooled through the evaporator 4 in the cooling chamber C and reheated by the electric heater 7. Then, the air is supplied into the room from the air outlet 16 of the air channel chamber D.
Meanwhile, the air at the outlet of the evaporator 4 is sufficiently agitated by the baffle plate 6 arranged downstream of the evaporator 4, and the spatial temperature distribution becomes extremely small. Based on the air temperature detected by the first temperature sensor 9 disposed downstream of the baffle plate 6, the capacity of the compressor 1 is controlled by a signal from the compressor controller 12.
In addition, the first temperature sensor 9 that detects the air temperature at which the spatial temperature distribution is reduced is a series connection of the temperature measuring resistors 9b dispersed at a plurality of points, so that the average of the air temperature at the outlet of the evaporator 4 is averaged. It is possible to obtain a value. Therefore, the refrigerating capacity of the compressor 1 is controlled with high accuracy based on the averaged air temperature. As a result, the amount of cold heat of the evaporator 4 is controlled, so that the downstream air temperature of the evaporator 4 can be controlled with high accuracy (for example, 22 ± 0.3 ° C.) even in an environment where the intake air temperature varies greatly. Is possible. Further, the heating amount of the electric heater 7 is controlled based on the downstream air temperature of the air circulation fan 8 detected by the second temperature sensor 10. As a result, the supply air temperature can be controlled with high accuracy (for example, 23 ± 0.1 ° C.).

Furthermore, with reference to FIG. 11, the outline | summary of the 2nd air conditioner for precision temperature control of this invention is demonstrated. The same components as those shown in FIG. 1 are denoted by the same reference numerals, and redundant description will be avoided as much as possible.
In the precision temperature control air conditioner shown in FIG. 11, the refrigerant circuit including the evaporator 4 in the air conditioner A is replaced with a fan coil type cooling heat exchanger 70, and the electric heater 7 is replaced with a fan coil type heat exchanger. It is replaced with the device 71. Further, the cooling chamber C and the air flow path chamber D are formed of a heat insulating and airtight wall body.
The cooling heat exchanger 70 is incorporated in the cooling chamber C, and a cooling medium such as cooling water circulates between the heat exchanger 70 and a cooling heat source 72 installed outside by driving the pump P1. A heating medium circulates in the heat exchanger 71 for heating between the heat source 73 installed outside by driving the pump P2. Solenoid valves 74 and 75 are interposed in the circulation circuit connecting the cooling heat exchanger 70 and the cooling heat source 72 and in the circulation circuit connecting the heating heat exchanger 71 and the heat source 73, respectively. The electromagnetic valves 74 and 75 adjust the flow rates per unit time of the cooling medium and the heating medium, respectively, by controlling the opening degree of each valve. When the heat source 73 is a steam boiler, a blower is used instead of the pump P2.
In the electrical component storage chamber E, in addition to the motor unit 11 of the fan 8, the first flow rate control unit 76 connected to the first temperature sensor 9 and the electromagnetic valve 74, the second temperature sensor 10, and the first connected to the electromagnetic valve 75. A dual flow rate control unit 77 is installed.

Briefly describing the operation of the second precision temperature control air conditioner of the present invention, the indoor air sucked from the suction port 15 of the suction chamber B is cooled through the cooling heat exchanger 70 in the cooling chamber C. After being heated by the heating heat exchanger 71, the air is supplied into the room from the outlet 16 of the air channel chamber D. Meanwhile, the air at the outlet of the heat exchanger 70 is sufficiently agitated by the baffle plate 6 arranged downstream of the cooling heat exchanger 70, and the spatial temperature distribution becomes extremely small. Based on the air temperature detected by the first temperature sensor 9 disposed downstream of the baffle plate 6, the flow rate of the cooling water circulating through the cooling heat exchanger 70 is controlled by a signal from the first flow rate control unit 76. Is done.
When the air temperature is lower than the set value, the cooling capacity of the heat exchanger 70 is reduced. When the air temperature is higher than the set value, the cooling capacity is increased and the air temperature at the outlet of the heat exchanger 70 is maintained within a predetermined set range. The indoor air thus maintained in a predetermined temperature range is reheated by the heat exchanger 71 for heating. At this time, based on the air temperature detected by the second temperature sensor 10, the flow rate of the heating medium circulating through the heat exchanger 71 is controlled by a signal from the second flow rate control unit 77, and the heating amount of the heat exchanger 71 is controlled. Is controlled, and air adjusted to a room temperature target temperature of ± 0.1 ° C. is supplied into the room.

In the air conditioner A for precise temperature control, a baffle plate may be further arranged in the air flow path between the electric heater 7 and the air circulation fan 8. By using a further baffle plate, the stirring of the air downstream of the electric heater 7 is promoted, and a more averaged air temperature can be detected by the second temperature sensor 10.
Further, the refrigerant circuit including the evaporator 4 in the air conditioner A may be the cooling heat exchanger 70, or the electric heater 7 may be the heating heat exchanger 71.
In the second air conditioner, the solenoid valves 74 and 75 may be omitted, and variable pumps may be used as the pumps P1 and P2. In that case, the first flow rate control unit 76 is connected to the first temperature sensor 9 and the pump P1, and the second flow rate control unit 77 is connected to the second temperature sensor 10 and the pump P2. Thus, by controlling the number of revolutions using a variable pump, the cooling medium and the heating medium per unit time based on the air temperature detected by the first temperature sensor 9 and the second temperature sensor 10. The flow rate can be adjusted.

It is a conceptual diagram of the 1st precision temperature control air conditioner of this invention. It is a schematic block diagram of the precision temperature control air conditioner of this invention. (A) is a front view of an air conditioner for precise temperature control showing one embodiment of the present invention, and (B) is a partially cutaway view of (A). It is a partially broken side view of FIG. FIG. 4 is a top view of FIG. (A) is a front view of the support member showing the mounting structure of the electric heater. (B), (C), and (D) are drawings of FIG. 6A viewed from the top, bottom, and side surfaces, respectively. (E) is a plan view of a support plate of the electric heater. FIG. 4 is an enlarged view of a cooling heat exchange unit storage chamber with a connecting duct in the precision temperature control air conditioner shown in FIG. It is a partially broken side view of FIG. It is a top view of a 1st temperature sensor. (A) is a side view of a 2nd temperature sensor, (B) is a BB arrow directional view of (A). It is a conceptual diagram of the 2nd air conditioning machine for precision temperature control of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Compressor, 4 ... Evaporator (heat exchange part for cooling), 6 ... Baffle plate, 7 ... Electric heater (heat exchange part for heating), 8 ... Fan for air circulation , 9 ... 1st temperature sensor, 9b ... Resistance temperature detector, 10 ... 2nd temperature sensor, 15 ... Suction inlet, 16 ... Air outlet, 70 ... Heat exchange for cooling (Heat exchanger for cooling), 71 ... Heat exchanger for heating (heat exchanger for heating), A ... Air conditioner for precise temperature control.

Claims (3)

A cooling heat exchanging section, a heating heat exchanging section, and an air circulation fan for supplying air exchanged by the cooling heat exchanging section from the outlet are sequentially arranged from the upstream and the lower side of the air flow path. The first temperature sensor and the second temperature sensor are disposed between the cooling heat exchange unit and the heating heat exchange unit and in the air flow path downstream of the air circulation fan, respectively, and are detected by the first temperature sensor. In a precision temperature control air conditioner that controls the amount of cooling in the heat exchanger for cooling based on the air temperature and controls the amount of heat in the heat exchanger based on the air temperature detected by the second temperature sensor. The baffle plate includes a baffle plate disposed in an air flow path between the heat exchanger for heat and the first temperature sensor, and the first temperature sensor includes a resistance body connected in series with temperature measuring resistors distributed at a plurality of points. Are arranged horizontally, and the air exchanged by the cooling heat exchanger is in the way Tip bypassing as toward the first temperature sensor, to the provision of the heating heat exchange portion inclined upward toward the proximal portion from the distal portion of the baffle plate above the said baffle plate A precision temperature control air conditioner. The heating heat exchanging section is provided with a plurality of support plates with a space for ventilation between long sides of a rectangular sheet metal frame, and the support plate is provided with a plurality of holes, place a resistive heating element between the long sides of the frame, through a hole provided in the long side of the sheet metal frame, according to claim 1, characterized in that attaching the heating heat exchanger unit Air conditioner for precision temperature control. The cooling heat exchanging unit is an evaporator of a compression refrigerant circuit, the heating heat exchanging unit is an electric heater, and the compressor of the refrigerant circuit is provided based on the air temperature detected by the first temperature sensor. 3. The precision according to claim 1 , wherein the amount of cold heat of the evaporator is controlled by controlling the capacity, and the amount of heating of the electric heater is controlled based on the air temperature detected by the second temperature sensor. Temperature control air conditioner.

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