JP4716264B2 - Probe card - Google Patents

Description

  The present invention relates to a probe card.

Conventionally, in an inspection of a magnetic sensor, a magnetic sensor after package is placed in a magnetic field generated by a Helmholtz coil or the like, and an output signal output from the magnetic sensor is measured (for example, Patent Document 1).
However, in the inspection method described in Patent Document 1, since the magnetic sensor is inspected after the package is sealed, there is a problem that the assembly cost of the magnetic sensor determined to be abnormal in the inspection is wasted. Further, since it takes a long time to manufacture the magnetic sensor chip wafer and to inspect it, there is a problem that it takes time to feed back the inspection result to the wafer manufacturing process.

On the other hand, Patent Document 2 discloses a method of inspecting a magnetic sensor with an inspection apparatus having a coil prober as a magnetism generating means. In this inspection method, a magnetic field is applied to the magnetic sensor by bringing the tip of the coil prober close to the magnetic sensor in the wafer state, and an output signal output from the magnetic sensor is measured with a probe. Therefore, the magnetic sensor can be inspected in the state of a wafer.
However, since the magnetic field that can be generated from the tip of the coil prober is unidirectional, in order to inspect the output of the magnetic sensor against external magnetic fields in multiple directions, the coil prober and the magnetoresistive sensor rotate relatively. It is necessary to let
Japanese Patent Laid-Open No. 9-50601 JP-A-62-55977

  The present invention has been made in view of the above-described problems. The inspection of the output of the magnetic sensor with respect to the external magnetic field is performed in the state of the wafer, and the inspection of the output of the magnetic sensor with respect to the external magnetic field in a plurality of directions is performed with the magnetic sensor. It is an object of the present invention to provide a probe card that can be performed without changing the relative position of the card.

A probe card for achieving the above object includes a plurality of coils for applying a magnetic field to a magnetic sensor in a variable direction, a probe group for detecting an output signal of the magnetic sensor, the plurality of coils, and the probe. groups possess together, and a base end of the probe group is vertically protruding from the surface, said plurality of coils, in a plan view of the base portion, first imaginary straight line passing through the center of the probe group Two first coils that are arranged on the upper side of the probe group, are electrically connected in series so as to generate magnetic fields opposite to each other on the inside, and are fitted and fixed to the base , and the probe has a second coil surrounding the outer periphery of the group and the first coil, the first coil is parallel in the vicinity of the distal end of the probe group to the surface of the base Forming a magnetic field SF1, the second coil forms a magnetic field SF3 in the direction perpendicular to the surface of the base portion, and the magnetic field SF1 generated by two of said first coil, generated by the second coil By controlling the magnetic field SF3, an arbitrary combined magnetic field CF2 parallel to a virtual plane perpendicular to the surface of the base is formed.

Hereinafter, embodiments of the present invention will be described based on a plurality of examples.
(First Example)
FIG. 1 is a schematic diagram for explaining a probe card 1 according to a first embodiment of the present invention.
The probe card 1 is attached to an inspection device (prober) for inspecting electrical characteristics such as an integrated circuit formed on a wafer. According to the prober to which the probe card 1 is attached, an output signal with respect to the external magnetic field of the magnetic sensor chip 6 formed on the wafer 4 can be measured (see FIG. 2). Since the probe card 1 can arbitrarily control the direction of the magnetic field in the vicinity of the tip of the probe 2 as will be described later, it is particularly useful for inspection of a magnetic sensor whose output signal changes with respect to the direction of an external magnetic field such as an orientation sensor. is there. The probe card 1 includes a probe head 8, a printed wiring board 10, and coils 21, 22, 23, and 24.

The printed wiring board 10 electrically connects the prober main body inspection circuit and the probe 2.
The probe head 8 is fixed to the printed wiring board 10. The probe head 8 has a base 12 and a large number of probes 2 as a probe group. The probe 2 is disposed at the center of the base 12. One end of the probe 2 protrudes vertically from the surface of the base 12 opposite to the printed wiring board 10. The tip of the portion protruding from the base 12 of the probe 2 is in contact with the electrode of the magnetic sensor chip 6 formed on the wafer 4. The arrangement of the probe 2 is not limited to the central portion of the base portion 12.

  The coils 21, 22, 23 and 24 penetrate the printed wiring board 10 and are fixed by being fitted into recesses 31, 32, 33 and 34 having bottoms formed in the base 12. The coil 21 and the coil 22 are arranged point-symmetrically with respect to the center of the base 12 with the probe 2 interposed therebetween. Similarly, the coil 23 and the coil 24 are arranged point-symmetrically with respect to the center of the base 12 with the probe 2 interposed therebetween. The coil 21 and the coil 22 are arranged at positions where the coil 23 and the coil 24 are rotated 90 degrees with the center of the base 12 as the rotation center, respectively. Hereinafter, the direction from the coil 21 toward the coil 22 is referred to as the X direction (see arrow X), and the direction from the coil 23 toward the coil 24 is referred to as the Y direction (see arrow Y). The structure in which the coils 21, 22, 23, and 24 are fitted is not limited to the illustrated shape. Moreover, although the example which fixes by fitting the coils 21, 22, 23, and 24 in the recessed parts 31, 32, 33, and 34 was demonstrated, the fixing method of the coils 21, 22, 23, and 24 is not limited to this. Further, a magnetic material or a core material made of ferrite, permalloy, or the like may be arranged at the center of the coils 21, 22, 23, 24. In this way, a large magnetic field can be generated even with a small current.

FIG. 2 is a schematic diagram for explaining the magnetic field SF1 generated by the coils 21 and 22. FIG. FIG. 3 is a schematic diagram for explaining the magnetic field SF1, the magnetic field SF2 generated by the coils 23 and 24, and their combined magnetic field CF1.
The coil 21 and the coil 22 are electrically connected in series so that opposite magnetic fields are generated inside the coil. Therefore, when a current is supplied to the coils 21 and 22, a magnetic field SF1 is generated in the direction near the tip of the probe 2 in the X direction (or the direction opposite to the X direction). Similarly, the coils 23 and 24 are electrically connected in series so that opposite magnetic fields are generated inside the coil. Therefore, when a current is supplied to the coils 23 and 24, a magnetic field SF2 is generated in the direction near the tip of the probe 2 in the Y direction (or the direction opposite to the Y direction). That is, by supplying current to the coils 21, 22, 23, and 24, the magnetic field SF <b> 1 and the magnetic field SF <b> 2 in which the directions of the magnetic fields near the tip of the probe 2 are orthogonal to each other can be generated.

As shown in FIG. 3, in a state where the magnetic field SF1 and the magnetic field SF2 are generated, a combined magnetic field CF1 is formed by the magnetic field SF1 and the magnetic field SF2. The magnitude of the combined magnetic field CF1 and the direction in the vicinity of the tip of the probe 2 can be arbitrarily controlled by controlling the magnitude and direction of the magnetic field SF1 and the magnetic field SF2. The magnitude of the magnetic field SF1 can be controlled by controlling the magnitude of the current supplied to the coils 21 and 22, and the direction of the magnetic field SF1 can be controlled by controlling the direction of the current supplied to the coils 21 and 22. Similarly, the magnitude and direction of the magnetic field SF2 can be controlled by controlling the magnitude and direction of the current supplied to the coil 23 and the coil 24.
Specifically, in order to generate the combined magnetic field CF1 in which the direction of the magnetic field in the vicinity of the tip of the probe 2 forms an angle θ with the X direction, a current represented by the following formula (1) (I1: see FIG. 4A) Is supplied to the coils 21 and 22, and the current (I2: see FIG. 4B) shown in the following equation (2) may be supplied to the coils 23 and 24. Here, in the following expressions (1) and (2), the absolute value of I1 and the absolute value of I2 represent the magnitudes of currents supplied to the coil 21 (coil 22) and the coil 23 (coil 24), respectively. The symbols I2 and I2 indicate the directions of current supplied to the coil 21 (coil 22) and the coil 23 (coil 24), respectively. Hereinafter, the direction of the synthetic magnetic field CF1 is represented by an angle formed with the X direction (see arrow X).

I1 = aCOSθ (1)
I2 = aSINθ (2)

  Thus, the direction of the magnetic field in the vicinity of the tip of the probe 2 can generate an arbitrary composite magnetic field CF1 (see FIG. 4C). Here, the magnitude (m) of the composite magnetic field CF1 correlates with the maximum current value (a), and the relationship is determined by the number of windings of the coils 21, 22, 23, and 24. Since the magnetic field SF1 and the magnetic field SF2 are orthogonal to each other, as described above, the magnitude and direction of the current supplied to the coils 21, 22, 23, and 24 are determined from the direction and magnitude of the combined magnetic field CF1 near the tip of the probe 2. It can be easily obtained. Therefore, it is desirable that the coils 21, 22, 23, and 24 be arranged as described above. However, the coils 21, 22, 23, and 24 are arranged as long as the magnetic field SF1 and the magnetic field SF2 are not parallel to each other. Arrangement is also acceptable.

  FIG. 5 is a flowchart of the inspection of the magnetic sensor chip 6 by the prober to which the probe card 1 is attached. This flowchart shows a flow of processing for measuring an output signal with respect to an external magnetic field of the magnetic sensor chip 6 formed on one wafer 4. In this inspection, a synthetic magnetic field CF1 is applied as an external magnetic field to the magnetic sensor chip 6 as a magnetic sensor. The magnetic sensor may be a Hall element or a magnetoresistive element.

First, the tip of the probe 2 is brought into contact with the electrode of the unmeasured magnetic sensor chip 6 (see step S100).
Next, an external magnetic field in an unmeasured direction is applied to the magnetic sensor chip 6 (see step S101). Specifically, the current supplied to the coil 21 (coil 22) and the coil 23 (coil 24) is controlled to generate a synthetic magnetic field CF1 in which the direction of the magnetic field near the tip of the probe 2 is an unmeasured direction. . For example, in the test for measuring an output signal for an external magnetic field of 360 degrees at intervals of 22.5 degrees, the direction of the magnetic field in the vicinity of the tip of the probe 2 is 0 degree, 22.5 degrees, 45.0 degrees,. The combined magnetic field CF1 that is 337.5 degrees may be generated in this order.
Here, the magnitude of the external magnetic field applied to the magnetic sensor chip 6 is determined according to the purpose of the inspection. Therefore, it is desirable that the probe card 1 can form a synthetic magnetic field CF1 having a predetermined range of magnitude. If the composite magnetic field CF1 having a magnitude within a predetermined range can be formed, for example, the composite magnetic field CF1 having a different magnitude can be applied to the magnetic sensor chip 6 to perform a multi-purpose inspection in a single inspection. Specifically, the size of the predetermined range is a range from 0.4 A / m to 4000 A / m. 0.4 A / m is a lower limit value considering the resolution of the current magnetic sensor, and 4000 A / m is an upper limit value calculated based on the magnitude of geomagnetism. The probe card 1 may be capable of forming a synthetic magnetic field CF1 having a magnitude of 0.4 A / m or less, or may be capable of forming a synthetic magnetic field CF1 having a magnitude of 4000 A / m or more.

Next, the output signal of the magnetic sensor chip 6 is measured (see step S102). Specifically, the output signal of the magnetic sensor chip 6 is read by the probe 2 that is in contact with the electrode of the magnetic sensor chip 6.
Next, it is determined whether or not an output signal is output from the magnetic sensor chip 6 (see step S103). When there is an output from the magnetic sensor chip 6, the process proceeds to step S104. When there is no output from the magnetic sensor chip 6, it is considered that the magnetic sensor chip 6 has failed, and even if there is an external magnetic field in an unmeasured direction, the measurement of the magnetic sensor chip 6 is stopped, and the unmeasured It moves to the inspection of the magnetic sensor chip 6. Specifically, the process proceeds to step 106. Note that the processing of step 103 may not be executed, and the measurement may be continued without any output from the magnetic sensor chip 6.

In step S104, the measurement result is recorded. Specifically, data correlated with the output signal of the measurement result is stored in a storage medium such as a memory.
Next, it is determined whether or not output signals for external magnetic fields in all directions in which the inspection is performed are measured (see step S105). If there is an external magnetic field in an unmeasured direction, the process returns to step S101. If the measurement has been completed for external magnetic fields in all directions, the process proceeds to step S106.

  In step S106, it is determined whether or not the magnetic sensor chip 6 has output an appropriate output signal with respect to the external magnetic fields measured in all directions, and the result is recorded as an inspection result. Specifically, for example, an error is calculated from the ideal output signal of the magnetic sensor chip 6 with respect to the direction of the external magnetic field to be applied and the measurement result in step S104, and the external magnetic field in all directions in which the error is measured is determined in advance. It is determined whether or not it is within the specified range. Note that the criteria for determination in step S106 can be determined as appropriate.

Next, it is determined whether or not the inspection has been completed for all the magnetic sensor chips 6 formed on the wafer 4 (step S107). If there is an uninspected magnetic sensor chip 6, the process returns to step S100. If all the magnetic sensor chips 6 have been inspected, the process proceeds to step S108.
Next, a mark corresponding to the inspection result is put on the magnetic sensor chip 6 (step S108). Specifically, for example, a predetermined mark indicating a defective product is printed at a predetermined location of the defective magnetic sensor chip 6. Note that the method of marking according to the inspection result is not limited to this. For example, a predetermined portion of the defective magnetic sensor chip 6 may be scratched, or a predetermined mark indicating that the magnetic sensor chip 6 is a normal product may be printed on the normal magnetic sensor chip 6. Further, the process of step S108 may be performed after the inspection of a predetermined number of wafers 4 is completed. In that case, the inspection results of a predetermined number of wafers 4 may be recorded in a memory or the like.

According to the probe card 1 according to the first embodiment of the present invention described above, the composite magnetic field CF1 is formed when current is supplied to the coils 21, 22, 23, and 24. When the synthesized magnetic field CF1 is applied as an external magnetic field to the magnetic sensor chip 6, the output signal for the external magnetic field of the magnetic sensor chip 6 formed on the wafer 4 can be measured. Since the magnetic sensor chip 6 can be inspected before being enclosed in the package, the assembly cost of the magnetic sensor is not wasted. Moreover, the inspection result can be immediately fed back to the wafer manufacturing process.
In addition, by controlling the magnitude and direction of the current supplied to the coils 21, 22, 23, 24, the direction of the synthetic magnetic field CF 1 in the vicinity of the tip of the probe 2 can be controlled. Therefore, the output signal of the magnetic sensor chip 6 with respect to external magnetic fields in a plurality of directions can be measured without changing the relative position between the probe card 1 and the wafer 4.

  Although the coils 21, 22, 23 and 24 having a circular cross section have been illustrated and described, the shape of the coils is not limited to this. For example, the probe card 51 shown in FIG. 6 may have coils 21, 22, 23, and 24 having a rectangular cross section, or may have a coil having an elliptical cross section.

(Second embodiment)
The probe card 52 according to the second embodiment has two coils on both sides with the probe 2 interposed therebetween. In the second embodiment, parts that are substantially the same as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.
FIG. 7 is a schematic diagram for explaining the probe card 52.
The probe card 52 has eight coils 21a, 22a, 23a, 24a, 21b, 22b, 23b, and 24b. Coils 21a, 22a, 23a, 24a, 21b, 22b, 23b, 24b are provided with recesses 31a, 32a, 33a, 34a, 31b having substantially the same shape as the recesses 31, 32, 33, 34 according to the first embodiment. 32b, 33b, and 34b are respectively fitted and fixed. The coil 21 a and the coil 22 a are arranged with the probe 2 interposed therebetween in line symmetry with a virtual straight line L <b> 1 passing through the center of the base 12. The coils 21b and 22b are similarly arranged. In addition, the coil 23a and the coil 24a are disposed so as to be symmetrical with respect to a virtual straight line that passes through the center of the base portion 12 and is orthogonal to the virtual straight line L1. The coil 23b and the coil 24b are similarly arranged. Although two coils are arranged on both sides of the probe 2 in between, three or more coils may be arranged.

  Similarly to the coil 21 and the coil 22 according to the first embodiment, the coil 21a and the coil 22a are electrically connected, and the coil 21b and the coil 22b are electrically connected. Similarly to the coil 23 and the coil 24 according to the first embodiment, the coil 23a and the coil 24a are electrically connected, and the coil 23b and the coil 24b are electrically connected.

  The directions of the magnetic fields generated by the coil 21a (coil 22a) and the coil 21b (coil 22b) in the vicinity of the tip of the probe 2 are the same. The directions of the magnetic fields generated by the coil 23a (coil 24a) and the coil 23b (coil 24b) in the vicinity of the tip of the probe 2 are the same. That is, in the state where the tip of the probe 2 is in contact with the electrode of the magnetic sensor chip 6, magnetic fluxes parallel to each other pass through the magnetic sensor chip 6, so that the output of the magnetic sensor chip 6 with respect to the external magnetic field can be accurately inspected.

(Third embodiment)
The probe card 53 according to the third embodiment has a coil 25 that generates a magnetic field SF3 in a direction perpendicular to the surface of the base 12. In the third embodiment, parts substantially the same as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.
FIG. 8 is a schematic diagram for explaining a probe card 53 according to the third embodiment. FIG. 9 is a schematic diagram for explaining the magnetic field SF <b> 3 generated by the coil 25.
A coil 25 is fixed to the base 12 of the probe card 53. When a current is supplied to the coil 25, a magnetic field SF3 in the Z direction (see arrow Z in FIG. 9) is generated near the tip of the probe 2. As shown in FIGS. 10 and 11, the coil 26 may also be provided in the inspection table 40 on which the wafer 4 is placed. At that time, the coil 25 and the coil 26 are electrically connected in series so that a magnetic field in the same direction is generated inside the coil.

  By controlling the magnetic field SF1 generated by the coil 21 and the coil 22 and the magnetic field SF3 generated by the coil 25, a combined magnetic field CF2 in an arbitrary direction parallel to a virtual plane perpendicular to the surface of the base 12 can be formed.

  In the above embodiments, the probe 2 has been described as projecting vertically from the base portion 12, but the shape of the probe 2 is not limited to this. For example, like the probe card 55 shown in FIG. 12, the probe 2 may protrude from the base 12 in a posture inclined with respect to the base 12.

It is a schematic diagram for demonstrating the probe card by a 1st Example. (A) is a top view, (B) is an A1-A1 sectional view taken on the line. It is a schematic diagram for demonstrating the magnetic field which generate | occur | produces with the coil of the probe card by a 1st Example. It is a schematic diagram for demonstrating the magnetic field and synthetic | combination magnetic field which are generated with the coil of the probe card by a 1st Example. (A) and (B) are graphs showing the relationship between the direction of the composite magnetic field and the current supplied to the coil according to the first embodiment, and (C) is a graph showing the relationship between the direction of the composite magnetic field and the magnitude of the composite magnetic field. It is. It is a flowchart of the test | inspection of the magnetic sensor chip which concerns on a 1st Example. It is a schematic diagram for demonstrating the probe card by a 1st Example. It is a schematic diagram for demonstrating the probe card by a 2nd Example. It is a schematic diagram for demonstrating the probe card by a 3rd Example. It is a schematic diagram for demonstrating the magnetic field which generate | occur | produces with the coil of the probe card by a 3rd Example. It is a schematic diagram for demonstrating the probe card by a 3rd Example. It is a schematic diagram for demonstrating the magnetic field which generate | occur | produces with the coil of the probe card by a 3rd Example. It is a schematic diagram for demonstrating the probe card by several Examples. (A) is a top view, (B) is A2-A2 sectional view taken on the line.

Explanation of symbols

  1, 51, 52, 53, 54, 55: probe card, 2: probe, 4: wafer, 6: magnetic sensor chip (magnetic sensor), 12: base, 21, 21a, 21b, 22, 22a, 22b, 23 , 23a, 23b, 24, 24a, 24b, 25: coil, CF1, CF2: composite magnetic field (magnetic field)

Claims (1)

A plurality of coils for applying a magnetic field to the magnetic sensor in a variable direction;
A group of probes for detecting an output signal of the magnetic sensor;
A base possess integral one end of the probe group is vertically protruding from the surface of said plurality of coils and said probe group,
With
The plurality of coils are arranged so as to sandwich the probe group on a first imaginary straight line passing through the center of the probe group in plan view of the base , and are electrically generated so that magnetic fields opposite to each other are generated inside. Two first coils connected in series and fitted and fixed to the base , and a second coil surrounding an outer peripheral side of the probe group and the first coil;
The first coil forms a magnetic field SF1 whose direction near the tip of the probe group is parallel to the surface of the base,
The second coil forms a magnetic field SF3 in a direction perpendicular to the surface of the base,
By controlling said magnetic field SF3 generated by the magnetic field SF1 and the second coil generated by two of said first coil, form any combined magnetic field CF2 parallel to a virtual plane perpendicular to the surface of the base A probe card characterized by:

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