JP4718239B2 - Manufacturing method of deposition prevention plate - Google Patents

Description

  The present invention relates to a multiple metal saw in which a plurality of metal saws are attached to a rotary shaft, and more specifically, to a multiple metal saw in which a plurality of metal saws are attached to a rotary shaft by shifting the position of a blade, and a multiple metal saw The present invention relates to a method of manufacturing a deposition preventing plate to be grooved.

  Conventionally, when a thin film is formed on a target substrate in a film forming apparatus such as a CVD method or a sputtering method, a film forming material adheres to the inner surface of the film forming apparatus other than the substrate. For this reason, an aluminum deposition plate is provided around the substrate to adhere the film forming material and not to the inner surface of the film forming apparatus, thereby facilitating the maintenance work of the film forming apparatus. Yes. However, the substrate is replaced when a thin film having a predetermined thickness is formed, whereas the deposition plate, which is a component of the apparatus, is used continuously. Will increase. As the thickness increases, the deposits will peel off and fall off at some point, causing troubles in the film formation process. Or cleaning is performed. In order to increase the operating rate of the film forming apparatus by increasing the interval between replacement or cleaning of the deposition plates as much as possible, that is, to delay the separation and removal of deposits from the deposition plates as much as possible. In addition, it is possible to form irregularities by a large number of grooves on the surface of the deposition preventing plate.

  There is electrical discharge machining as one method for forming grooves on the surface of the adhesion-preventing plate, but electrical discharge machining is slow in machining speed and requires a dedicated electrode, so that the machining cost is high. As a method that does not require a processing cost, there is a method in which a groove is formed on the surface of the deposition preventing plate by an end mill (see, for example, Patent Document 1). One example thereof is a method of grooving by a ball end mill 53 of a cutting tool attached to a rotary shaft 50 of a vertical milling machine as shown in a perspective view of FIG. When only 42a can be processed one by one, and a lattice-like groove 42 composed of a large number of grooves 42a and grooves 42b is formed on almost the entire surface of a large-area deposition preventing plate, groove processing is performed. Takes a long time. 12B shows an enlarged view of the tip of the ball end mill 53. Since the rotational center of the tip of the ball end mill 53 has a remarkably low peripheral speed and is difficult to dissipate heat, the aluminum of the adhesion preventing plate 41 can be used. Since the material is easily welded and its life as a blade is short, frequent replacement is required, and grooving with an end mill does not sufficiently reduce the manufacturing cost of the deposition preventing plate.

  The target of grooving is a method of grooving, which is a flat electrode material, but a plurality of disk-shaped blades having the same outer diameter are rotated with spacers interposed between the blades. A processing method is disclosed in which grooves are formed at a predetermined pitch on the surface of an electrode material by attaching to a shaft and rotating the plurality of blades (see, for example, Patent Document 2). And in the blade part 1 shown by FIG. 2 of the patent document, it is said that about 10-200 blades (metal saw) marketed are used. According to such a multiple metal saw, since a groove is formed by a plurality of disk-shaped blades, a plurality of grooves can be processed simultaneously. A spacer smaller than the outer diameter of the blade is interposed between the metal saws in order to completely discharge chips generated during the groove processing by the multiple metal saws as described above. In addition, the squeeze prevention lubricant is sprayed on the multiple metal saws during grooving, but there is no way to spread the squeeze prevention lubricant evenly on all the multiple metal saws that make up the multiple metal saws. It is not described. However, it is estimated that a large amount of anti-squeeze lubricant is used, including anti-squeeze lubricant that is discharged without being effectively used in the spacer portion.

JP-A-8-277460 JP 2003-340630 A

  The present invention has been made in view of the above-mentioned problems, wherein a plurality of metal saws are attached to the rotating shaft of a drive system so that a plurality of grooves can be cut at the same time, and all of the cutting oil sprayed at the time of groove processing is all A multi-layer metal saw that spreads efficiently and evenly on the blade of the metal, and chips generated at the time of grooving are efficiently and smoothly discharged, and a method of manufacturing a deposition plate that forms a groove on the surface with such a multi-layer metal saw It is an issue to provide.

It is as shown below when describing the solution to the above problems.

The multiple metal saws used in the present invention have a plurality of metal saws of equal outer diameter, each having a plurality of blades arranged at equal intervals on the outer peripheral edge of a disk-shaped base, and are attached to a rotating shaft of a drive system. A multiple metal saw that is rotated at the same time, wherein each of the plurality of metal saws is attached to the rotary shaft by shifting the position of the blade in the circumferential direction.
In such multiple metal saws, the cutting oil sprayed during grooving flows along the blades shifted in position and spreads evenly over all the blades of the multiple metal saws. It is smoothly discharged with oil.

In the multiple metal saw used in the present invention , each metal saw sequentially shifts the position of the blade in the same circumferential direction from the metal saw on one end side to the metal saw on the other end side in the multiple metal saw. It is attached to the rotating shaft.
Such a multiple metal saw is formed on the peripheral surface thereof in a straight line in which the blade row by the tip of the shifted blade is slanted from one end side to the other end side of the multiple metal saw. The cutting oil sprayed to the multiple metal saws sometimes flows along the blade rows of the blades shifted in position and spreads to all the blades, and the chips generated during grooving are smoothly discharged together with the cutting oil.

In the multiple metal saw used in the present invention, between the metal saw on one end side and the metal saw on the other end side in the multiple metal saw, the metal saw from the metal saw on the one end side to the almost half of the metal saw is the The blade positions are sequentially shifted in the same circumferential direction and attached to the rotary shaft, and the remaining half of the metal saws are attached to the rotary shaft by sequentially shifting the blade positions in the reverse circumferential direction. It is what.
In such a multiple metal saw, a blade row formed by the tip portion of the blade shifted in position on the peripheral surface thereof is formed into a V-shape having a large opening angle, and is sprayed from the V-shaped bending point side during grooving. Cutting oil is divided into left and right at the bending point, and each divided flow flows along the blade rows of the shifted blades and spreads to all the blades, and the chips generated during grooving are smoothly discharged together with the cutting oil. The

In the multiple metal saws used in the present invention, in each of the plurality of metal saws, the relative positions of the key groove on the periphery of the insertion hole for fitting with the key provided on the rotating shaft and the blade are different from each other. It is what.
In such a multiple metal saw, a plurality of metal saw insertion holes are inserted into the rotating shaft, and the metal saw key groove is fitted to the key of the rotating shaft, and the metal saw is attached to the rotating shaft, so that the blades are automatically cut between each metal saw. Can be displaced.

In the multiple metal saw used in the present invention, a plurality of the metal saws all have the same number of blades.
Such a multiple metal saw is easy to shift in the circumferential direction so that the positions of the blades do not overlap between the metal saws.

In the multiple metal saw used in the present invention, a plurality of blade rows in which a large number of blades are arranged at equal intervals in the circumferential direction are provided on the peripheral surface of a cylindrical or columnar base, and a plurality of each The blade row is arranged by shifting the position of the blade in the circumferential direction.
In such a multiple metal saw, the attachment of the blade to the rotating shaft is a single operation, and the setup operation of the grooving equipment is facilitated.

The method of manufacturing the deposition plate using the multiple metal saws used in the present invention is to drive a plurality of metal saws having the same outer diameter when a groove is formed on almost the entire deposition plate used in the film forming apparatus. A plurality of metal saws attached to a rotating shaft of a plurality of metal saws simultaneously cutting a plurality of grooves at a predetermined interval, wherein each of the plurality of metal saws positions a blade in a circumferential direction. This is a method of grooving with a multiple metal saw attached to the rotary shaft by shifting.
Such a method of manufacturing a deposition plate using a multiple metal saw can simultaneously cut a plurality of grooves on the deposition plate, greatly reducing the time required for grooving and improving the efficiency of the grooving. In addition, compared to using multiple metal saws where the blades are not misaligned, the cutting oil sprayed during grooving flows along the misaligned blades and is supplied to all the blades, and The generated chips are smoothly discharged together with the cutting oil, whereby the grooving proceeds smoothly.

The method for manufacturing an adhesion-preventing plate according to the present invention is a method in which grooves are formed in a lattice pattern at a predetermined pitch on substantially the entire surface of the adhesion-prevention plate by the multiple metal saw.
Such a method for manufacturing a deposition plate can cut a plurality of grooves on the deposition plate at the same time, greatly reducing the time required for grooving, and adheres during deposition in a deposition system. It is possible to manufacture a deposition preventing plate that does not peel or drop off the film forming material for a long time.

According to the present invention , since a plurality of parallel grooves can be simultaneously processed with respect to the workpiece by the misaligned metal saw blade, the time required for grooving can be shortened and the grooving cost can be reduced. In addition, the cutting oil sprayed during grooving flows along all the blades of the metal saw and spreads evenly, and the generated chips are smoothly discharged together with the cutting oil, so the grooving of work material is efficient. Make progress. Moreover, increase in cutting resistance of the multiple metal saws can be suppressed by smoothly discharging the chips.

According to the present invention , the cutting oil sprayed to the multiple metal saws at the time of grooving flows along the blades shifted in position and spreads evenly to all the blades, and the chips generated at the time of grooving are surely contained together with the cutting oil. And since it is discharged smoothly, grooving progresses efficiently and the cost of grooving is reduced.

According to the present invention , the cutting oil sprayed from the outside of the V-shaped blade row at the time of grooving is diverted to the left and right at the bending point portion, and each of the diverted flows along the blade row by the shifted blades. Since it flows to both ends of the metal saw and spreads evenly to all blades, the chips generated during grooving are reliably and smoothly discharged together with the cutting oil, so that grooving progresses efficiently and reduces grooving costs. .

According to the present invention , by attaching metal saws having different relative positions to the key grooves as the blades to the rotation shaft, the blade positions are shifted in the circumferential direction naturally between the metal saws. Simplifies the work of attaching a single metal saw to the rotating shaft, reducing the cost of grooving.

According to the present invention , since each of the plurality of metal saws has the same number of blades, the operation of attaching the blades to the rotating shaft by shifting the position of the blades in the circumferential direction so that the blades do not overlap between the metal saws. It is easy, improves the assembly work of multiple metal saws, and reduces the cost of grooving.

According to the present invention, it is not necessary to attach a plurality of metal saws to the rotating shaft one by one, and it is only necessary to attach a cylindrical or columnar substrate having a plurality of blade rows to the rotating shaft. The setup work of the processing equipment is simplified and the cost of grooving is reduced.

According to the present invention, it is possible to simultaneously cut a plurality of grooves parallel to the adhesion-preventing plate with a multiple metal saw, so that the time required for the groove processing is greatly shortened and the manufacturing cost of the adhesion-preventing plate is markedly increased. In addition to reducing, the cutting oil sprayed during grooving flows without loss along the shifted blades and is supplied to all the blades, and the generated chips are smoothly discharged together with the cutting oil. The production of the grooved anti-adhesion plate proceeds smoothly.

According to the present invention , a plurality of grooves are formed in a grid shape on the deposition preventive plate, and such deposition preventive plate peels off and removes the deposition material that adheres during actual use in the deposition apparatus. Therefore, the operation time from when the film forming apparatus is started to when it is stopped to when the deposition preventing plate is replaced or cleaned is lengthened, and the operation rate of the film forming apparatus is increased.

  As described above, the multiple metal saw of the present invention is a metal saw in which a plurality of disk-shaped metal saws having the same outer diameter are attached to a rotating shaft with the position of the blade shifted in the circumferential direction. The shape and configuration of the multiple metal saws are shown as multiple metal saws M in FIGS.

  The plurality of metal saws constituting the multiple metal saw of the present invention need to have the same outer diameter, and the size of the outer diameter is not particularly limited. Although it is desirable that the number of the plurality of blades arranged on the outer peripheral edge of the base of the metal saw is the same, it is not necessarily required to be the same. To attach the metal saw to the rotating shaft, the rotating shaft is inserted into the insertion hole at the center of the metal saw, and the key groove on the periphery of the insertion hole of the metal saw is inserted into the key provided on the rotating shaft in the same way as in the normal method. It is done by fitting. In a normal metal saw, the relative positional relationship between the blade and the keyway is manufactured to be constant, and even if such a metal saw is attached to the rotating shaft, the position of the blade is shifted in the circumferential direction between the metal saws. However, by attaching a metal saw having a different relative positional relationship between the blade and the keyway to the rotating shaft, the positions of the blades can be shifted between the metal saws. The maximum number of metal saws in a plurality of metal saws depends on the rated output of the motor provided in the drive system of the rotating shaft.

  The position of the blades of each of the multiple metal saws that make up the multiple metal saws is shifted in the circumferential direction along the blade rows of the blades where the cutting oil sprayed during groove cutting with the multiple metal saws is shifted in position. This is to allow the flow and cutting oil to spread evenly to all the blades and to smoothly discharge the chips generated during the cutting of the groove together with the cutting oil. In this case, in order to avoid the cutting oil being discharged without being effectively used in the spacer portion, it is preferable not to interpose the spacer between the metal saws.

  That is, in order to ensure a constant interval between the grooves to be formed, the multiple metal saw of the present invention is preferably a disc-shaped substrate in one metal saw without interposing a spacer between the metal saws. The thickness of the base and the effective thickness of the blade are set so that a certain interval can be secured between the grooves by the difference between the thickness of the blade and the effective thickness of the blade that determines the width of the processed groove. However, even when the groove formation pitch is increased, the spacers are not excluded.

  Blade misalignment between metal saws is not an essential requirement that the blades be misaligned between all metal saws, and the cutting oil sprayed during grooving spreads evenly to all blades and during grooving. If the generated chips are smoothly discharged together with the cutting oil, the blades of a small number of metal saws out of a plurality of metal saws do not have to be displaced.

If the positional deviation of the blade is described in detail, in a multiple metal saw N composed of n metal saws, when one metal saw has, for example, m blades 3 on the outer peripheral edge of a disk-shaped base (in this case, m >> n), the central angle of two adjacent blades is (360 / m) degrees, but this central angle is equally divided into n and another (n−1) sheets are equally divided. By shifting the position of the blade 3 so that the blades 3 of the respective metal saws are sequentially positioned, all the blades of the _n metal saws ₁₁ to 1n can be displaced in the circumferential direction. In order to cause the above-described position shift, as described above, the n metal saws 1 ₁ to 1 _n have different key groove positions with respect to the blades. That is, there are n metal saws that are provided with different key groove positions with respect to the blade so that the above-described positional displacement of the blade occurs when the key groove of the metal saw is fitted to the key of the rotary shaft 10. . Such a metal saw having a different relative position between the blade and the keyway can be easily obtained by custom-ordering.

The direction in which the blade is displaced in the circumferential direction will be described with reference to FIG. 1 showing the multiple metal saw N composed of the n metal saws. Figure 1-A is a front view showing an enlarged part of the peripheral surface of the multiple-metal saw N consisting of n sheets of metal saw 1 ₁ to 1 _n, Figure 1-B is shown in FIG. 1-A [B] - [B] It is a partial side view of a line direction. In FIG. 1-B, the leader line r and the leader line r ′ are shown as lines toward the center O of the multiple metal saws N. That is, the leader line r and the leader line r ′ in FIG. 1-B omit the intermediate part and are divided and shown vertically, and the * mark in the lower figure follows the position of the * mark in the upper figure. Further, as shown in FIG. 1-A, the rotary shaft 10 is inserted through the metal saws 1 ₁ to 1 _n , but the portions above and below the rotary shaft 10 are not shown. . Although in the left side of the metal saw 1 ₁ nut 8 and the washer 7 shown in FIG. 8 to be described later is attached to the threaded portion 10s of the rotary shaft 10, shown in the nut 8 and the washer 7 is omitted, the screw portion 10s A part of is shown by a one-dot chain line. 1A, referring to FIG. 3 to be described later, the cutting edge of the blade 3 is narrower than the thickness d of the base 2 in order to show that the thickness of the cutting portion is narrowed at the cutting edge of the blade 3. Shown as rectangular. The abbreviations as described above are also followed in FIGS.

As shown in FIG. 1-A, On the peripheral surface of the array type metal saw from N, metal saw 1 ₁ blade array L by tip at one end of the blade 3 that is shifted a position to the metal saw 1 _n at the other end A plurality of such blade rows L are formed in parallel on the entire circumferential surface. In FIG. 1-B, the other metal saws 1 ₁ , 1 ₂ , 1 ₃ ,... 1 displaced between the two adjacent blades 3 of the metal saw 1 _n on the other end side of the multiple metal saws N. _n blade 3 can be seen. That is, referring to FIG. 1-A and FIG. 1-B, the metal saw 1 ₁ is the first piece, the circumferential direction from the blade 3 of the _first metal saw 11 ₁ , upward in FIG. The blade 3 of the _second metal saw 12 is arranged at a position shifted by an angle equal to (n-1) equal to the central angle (which is equivalent), and then the same is displaced, and finally (n- 1) The blade 3 of the _{n- th} metal saw 1 _n is arranged at a position shifted upward from the blade 3 of the _first metal saw 1 _{(n-1) by} a similar angle.

  The above is a case where all n blades by n metal saws are sequentially displaced in the circumferential direction so as not to overlap in the central angle position, but as described above, the cutting oil spreads evenly, If the chips are smoothly discharged together with the cutting oil, it is not always necessary to shift all the blades. For comparison, FIG. 2-A is a front view showing a part of the peripheral surface of a multiple metal saw N ′ composed of n metal saws 1 that do not shift the position of the blade, and [B] in FIG. 2-A. A partial side view in the [B] line direction is shown in FIG.

  The direction in which the blade is displaced is not only shifted in the same circumferential direction, but the metal saw blades from the first to the (n / 2) th are shifted in one circumferential direction as described above. The blade of the {(n / 2) +1} -th metal saw is the same position as the blade of the (n / 2) -th metal saw, and the subsequent {(n / 2) +2} -th to n-th The metal saw blade may be displaced in the opposite direction to the one direction. When the blade is displaced as described above, the two blades overlap at the same central angle position, but the (n / 2) th metal saw blade and the {(n / 2) +1} th blade The metal saw blade and {(n / 2) +1} pieces from the first to the (n / 2) th, shifting the position with the metal saw blade by (1/2) (360 / m) degrees by the central angle The blades of the metal saw from the eyes to the nth sheet may not overlap.

Has been described with the assumption that all the metal saw 1 ₁ to 1 _n of the n sheets constituting the array type metal slitting saws are those having a blade m number, and each metal saw is not necessarily the number of blades is the same Also good. If two types of metal saws with different numbers of blades are attached to the rotary shaft, there may be cases where all the blades cannot be displaced between the two types of metal saws. As long as the powder can be smoothly discharged together with the cutting oil, a multiple metal saw in which two types of metal saws having different numbers of blades are attached to the rotating shaft may be used.

  A multiple metal saw composed of a plurality of metal saws attached to a rotating shaft by shifting the position of the blade is attached to, for example, a machining center, and groove processing is performed on almost the entire surface of a flat deposition preventing plate as a workpiece. The groove to be formed on the adhesion-preventing plate may be a round rod-shaped groove having a semicircular cross-sectional shape or a square rod-shaped groove, and the opening width is larger than the width of the bottom surface. A trapezoidal groove may be used. As shown in FIG. 9 to be described later, the grooves are preferably formed in a lattice shape. For this purpose, first, a longitudinal groove 42 a is formed on almost the entire surface of the deposition preventing plate 41. Subsequently, the direction of the multiple metal saws is changed by 90 degrees to form a lateral groove 42b orthogonal to the formed groove 42a to form a lattice-like groove 42. The width and depth of the grooves 42a and 42b, and the pitch of the grooves are determined so that the film deposition material that adheres during actual use in the film deposition apparatus does not peel off or fall off as long as possible. It is set as appropriate according to the ease of peeling and the ease of dropping off depending on the type of. In the above description, it is desirable to provide the grooves in a vertical and horizontal grid pattern. However, if the film deposition material adhering to the deposition prevention plate is unlikely to peel off or drop off, the vertical grid pattern or horizontal grid pattern is used. It can be a groove.

  FIG. 3 is a cross-sectional view showing two grooves 42a in one-way grooves 42a formed on almost the entire surface of the flat plate-shaped adhesion-preventing plate 41 together with a plane portion 43 therebetween, and these grooves 42a. The outline of the blades 3 of the two adjacent metal saws 1 in the multiple metal saw M that cuts is shown by a one-dot chain line. That is, the thickness of the root portion of the blade 3 is 3 mm, but the tip portion is narrowed at an angle of 60 degrees from both surfaces of the metal saw, and the blade tip is formed in a semicircular shape of R1. That is, the 60-degree inclined line is a tangent to the semicircular portion. Therefore, the straight groove 42a processed in the deposition preventing plate 41 is a semicircular groove having a cross section of R1 and a rounded groove having a maximum width of 2 mm. The groove 42a is formed at a pitch of 3 mm and is not cut. , That is, the interval between the two grooves 32a is 1 mm. If the groove 42a shown in FIG. 3 is a vertical groove, the horizontal groove 42b intersects the groove 42a at a substantially right angle and is cut.

  FIG. 4 is a view showing one metal saw 1 that is a constituent element of a multiple metal saw M composed of eight metal saws for simultaneously cutting the eight grooves 42a, and FIG. FIG. 4-B is a diagram showing a side surface and a cross section in the [B]-[B] line direction in FIG. 4-A. Referring to FIG. 4-A, the outer diameter of the metal saw 1 including the blade 3 is 100 mm, and 44 blades 3 are equiangular on the outer periphery of the base 2 having a disk shape and a thickness of 3 mm. Arranged at intervals. In FIG. 4-A, the side surface of the blade 3 is simplified and shown in a shape approximate to a triangle. Between the two adjacent blades 3, it is a part called chip | tip pocket 4, and is a location where chips are easy to accumulate. An insertion hole 5 for inserting the rotation shaft 10 of the drive system is formed at the center, and a key 9 provided on the rotation shaft 10 (see FIG. ) Is formed.

In the multiple metal saws M, all of the _eight metal saws 1 ₁ to 1 ₈ are attached to the rotary shaft 10 by shifting the position of the blade 3 in the same circumferential direction. That is, since each metal saw 1 has 44 blades 3, the central angle of two adjacent blades 3 is about 8.2 degrees, but this central angle is divided into eight equal parts every 1 degree. The other seven metal saws 1 are attached to the rotary shaft 10 so that the blades 3 of the other seven metal saws 1 are positioned at the respective angular positions. Therefore, each of the eight metal saw 1 ₁ to 1 _8, are created such that the relative position of the key groove 6 for the blade 3 is different by about 1 degree in the central angle, the insertion hole 5 of the metal saw 1 to the rotary shaft 10 When the key groove 6 of the metal saw 1 is fitted to the key 9 of the rotary shaft 10, the positions of the blades 3 of the _eight metal saws 1 ₁ to 1 ₈ are displaced by about 1 degree each. Yes. Therefore, it is very easy to attach the eight metal saws 1 while shifting the position of the blade 3 with respect to the rotary shaft 10.

FIG. 5 is a view showing a multiple metal saw M composed of the above eight metal saws ₁₁ to ₁₈ with the blade 3 displaced by about 1 degree at the central angle. FIG. It is a front view which expands and shows a part of peripheral surface of the multiple metal saw M to which the sheet metal saw 1 was attached, and FIG. 5-B is the partial side surface of the [B]-[B] line direction in FIG. 5-A. It is a figure and shows the state where all the blades 3 of the eight metal saws 1 are displaced. Namely, FIG. 5-A, with reference to FIG. 5-B, array type metal saw M has circumferential positions of all metal saw 1 of the blade 3 from the metal saw 1 ₁ at one end to a metal saw 1 ₈ at the other end It is attached to the rotary shaft 10 so as to be sequentially shifted by about 1 degree at the center angle.

  When attaching each metal saw 1 to the rotating shaft 10, no spacer is interposed between the metal saws 1, but as described in FIG. 3, the thickness of the base 12 of the metal saw 1 is 3 mm, and cutting is performed. Since the maximum width of the groove 42a is 2 mm, even if a spacer is not used, a flat portion 43 having a width of 1 mm that does not cut the deposition preventing plate 41 remains, and a gap of 1 mm width is provided between two adjacent grooves 42a. be able to.

  In FIG. 6, a multiple metal saw M composed of eight metal saws 1 is set in the horizontal machining center 21, and eight vertical grooves 42 a are simultaneously processed on the surface of the adhesion preventing plate 41 in a vertical posture. It is a perspective view which shows a state. The horizontal machining center 21 can move in the Y direction on the X direction moving base 22, the Y direction moving pillar 23 that moves in the X direction on the surface of the X direction moving base 22, and the side surface of the Y direction moving pillar 23. A drive unit 24 having a mechanism capable of moving the tool 31 with the multiple metal saws M attached thereto in the Z direction is provided with an ATC (automatic tool changer) 25 attached thereto. The adhesion prevention plate 41 which is a workpiece is fixed to the surface plate 26 having a 90 ° angle confrontation.

  FIG. 7 is a diagram showing the types of tools 31 depending on the direction of the multiple metal saws M. 7A shows that the angle head 33 is attached to the angle head main body 32 so that the vertical 42-side groove 42a can be processed by the multiple metal saws M on the surface of the adhesion preventing plate 41 in a vertical posture. A tool 31P is shown. 7B shows a tool 31Q in which the angle head 33 is mounted on the angle head main body 32 so that the groove 42b in the lateral (X) direction can be processed on the surface of the deposition preventing plate 41 by the multiple metal saw M. FIG. The angle head main body 32 of the tool 31P and the tool 31Q is provided with a detent 11 for the angle head 33. 7C shows the angle head main body 32 and the angle head so that the multiple metal saw M can process the groove 42c in the X direction on the ceiling surface of the deposition preventing plate 41 and the groove 42d in the Y direction on the side surface. This is a tool 31R in which 33 is removed and an extension arbor 34 is attached.

FIG. 8 is an exploded perspective view showing the periphery of the multiple metal saws M and the angle head 33. That is, in the multiple metal saw M, the insertion holes 5 of the metal saws 1 ₁ to ₁₈ are inserted into the rotation shaft 10 of the angle head 33, and the key grooves 6 of the metal saws ₁₁ to ₁₈ are inserted into the keys 9 provided on the rotation shaft 10. Are fitted and attached to the screw portion 10s on the distal end side of the rotary shaft 10. A nut 8 is screwed and tightened through a washer 7.

  FIG. 9 is a diagram showing the proper use of the three types of tools 31P, 31Q, and 31R shown in FIG. 7 when grooving the main surface and the end surface of the deposition preventing plate 41 in a vertical posture. That is, the tool 31P is moved in the Y direction to process the Y (vertical) direction groove 42a on the main surface of the deposition preventing plate 41, and the tool 31Q is moved in the X direction to process the X (lateral) direction groove 42b. Done. Further, the tool 31R is moved in the X direction for machining the X-direction groove 42c on the ceiling surface, and the tool 31R is moved in the Y direction for machining the Y-direction groove 42d on the side surface. In addition, the tool 31P is moved in the Z direction for machining the Z direction groove 42e on the ceiling surface, and the tool 31R is moved in the Z direction for machining the Z direction groove 42f on the side surface.

  Then, referring to FIG. 6, on one end side of the main surface of the deposition preventing plate 41 in a vertical posture, the tool 31 </ b> P is moved in the Y direction, so that the eight vertical grooves 42 a are simultaneously formed by the multiple metal saws M. Is processed. Subsequently, the tool 31P is moved in the Y direction at the position where the vertical movement column 23 is stepped in the X direction by eight grooves, and the eight grooves 42a are similarly processed. By repeating, the longitudinal groove 42 a is formed on the entire main surface of the deposition preventing plate 41. When the processing of the vertical groove 42a is completed, the tool 31P is replaced with the tool 31Q, and this is moved in the X direction, so that eight horizontal grooves 42b are processed at the same time. Further, as described above, the tools 31P, 31Q, and 31R are selectively used to process the X-direction and Z-direction grooves on the ceiling surface of the deposition preventing plate 41, and the Y-direction and Z-direction grooves on the side surfaces. Furthermore, the surface of the adhesion-preventing plate 41 hidden in FIG. 6 is similarly grooved by selecting a tool in which the orientation of the multiple metal saws M is matched.

  When simultaneously processing the eight grooves 42a parallel to the surface of the deposition preventing plate 41 by the above-described multiple metal saws M, the multiple shafts rotated by the rotary shaft 10 rotating in the direction of the arrow in FIG. When cutting oil is sprayed onto the metal saw M from the front side (front side), the cutting oil flows along the blade row L as indicated by the white arrow, and is supplied to each blade 3 without deviation. Since no spacers are interposed between the metal saws, there is no loss due to the flowing cutting oil being discharged from the spacer portion, and the cutting oil is supplied to each blade 3 without being disturbed and discharged. The In addition, the chips generated during grooving are reliably and smoothly discharged from the end face side of the multiple metal saws M along with the cutting oil. Therefore, the multiple metal saw M of Example 1 increases the efficiency of grooving and shortens the time required for grooving. Further, since the chips are discharged smoothly, the cutting resistance due to the multiple metal saws M is not increased.

  On the other hand, when grooving with a multiple metal saw that does not shift the position of the blade 3, the cutting oil sprayed against the multiple metal saw N ′ is a horizontal linear shape with the aid of FIG. Since it is easy to collide with the eight blades 3 rotated in the direction of the arrows and scattered, and it is difficult to produce a steady flow of cutting oil under the influence of the eight blades 3. It is inferior in feedability, and therefore inferior in chip discharge.

In the multiple metal saw M of Example 1, the inclined straight blade row L formed by the tip of the blade 3 is formed on the peripheral surface, but the multiple metal saw of Example 2 shown in FIG. M ′ is to form the blade row L ′ formed by the tips of the blades 3 of the eight metal saws 1 in a V shape having a large opening angle on the circumferential surface. That is, FIG. 10-A is a front view showing a part of the peripheral surface of the multiple metal saw M ′ as in FIG. 1-A. FIG. 10-B is a partial side view in the [B]-[B] line direction in FIG. 10-A and shows the state of positional deviation of the blade 3 as in FIG. 1-B. Figure 10-A and with reference to FIG. 10-B, shifted in order from the metal saw 1 ₁ Each blade 3 to a metal slitting saw 1 ₄ downwards a circumferential direction by about one degree in the central angle in FIG. 10-A, metal saw 1 ₅ as the blade 3 of the same central angle located between the rake 3 of metal saw 1 _4, metal saw 1 edge 3 of ₆ shifted about 1 degree from the blade 3 of metal saw 1 ₅ circumferential upward, since, metal saw 1 _7, 1 ₈ The blade 3 is also shifted upward by about 1 degree in order.

When the blade 3 of the metal saw 1 ₁ to 1 ₈ was allowed displaced position, as described above, FIG as shown in 10-A, On the peripheral surface of the array type metal saw M ', the blade 3 that shifting the position The V-shaped blade row L ′ having a large opening angle is formed between the metal saw 11 on _one end and the metal saw ₁₈ on the other end, and the V-shaped blade is formed on the entire peripheral surface. Column L ′ is repeated. Therefore, the cutting oil sprayed from the near side to the multiple metal saw M ′ that rotates and grooves in the direction of the arrow in FIG. 10-A is the V-shaped blade row L as shown by the white arrow. On the outside of ', the flow is divided from the central portion to the left and right, and the respective divided flows flow along the blade row L' and are discharged from the spacer portion and supplied to the blades 3 without any loss. Further, chips generated by the grooving are surely removed along with the discharged cutting oil. Therefore, the multiple metal saw M ′ of the second embodiment increases the efficiency of the grooving work and shortens the required time. In addition, since the chips are discharged smoothly, the cutting resistance due to the multiple metal saws M ′ is not increased.

  However, assuming that the rotation direction of the multiple metal saws M ′ is the same, when a chevron shaped blade row is formed on the peripheral surface of the multiple metal saws M ′ that is upside down from the V shape, the cutting oil to be sprayed is Such a combination of the rotation direction and the blade row should be avoided, because it will not be possible to expect an even supply of cutting oil to all the blades 3 and a smooth discharge of the chips. . Of course, even in the case of a mountain-shaped blade row, the rotation direction of the multiple metal saws M ′ is the same as in the second embodiment.

  The multiple metal saw M of Example 1 was composed of 8 pieces of the metal saw 1 in which 44 blades 3 were arranged on the outer peripheral edge of the disc-shaped base 2. As shown in FIG. 11, M ″ is a circumferential direction in which 44 blades 3 are arranged at equal intervals in the circumferential direction on the circumferential surface of the cylindrical base 12 having the insertion hole 14 of the rotating shaft 10. The blade rows 13 are arranged in 8 rows, and the blades 3 of the 8 rows of blade rows 13 are arranged so as to be shifted in one circumferential direction, and are formed into a block shape as a whole. A blade row L ″ is formed on the peripheral surface of the substrate 12 in a straight line inclined from one end side to the other end side by the tip of the blade 3 shifted in position. Such a multiple metal saw M ″ does not require the work of attaching eight metal saws 1 to the rotating shaft 10 one by one, and simplifies the setup work of the tool for grooving.

  And at the time of the process of the groove | channel 42 to the adhesion prevention board 41, supply of the cutting oil to all the blades 3 is equalized similarly to the multiple metal saw M of Example 1, and discharge | emission of a chip is ensured. The In this embodiment, the base 12 has a cylindrical shape having the insertion hole 15 of the rotary shaft 10, but this is a columnar base and the rotary shaft is connected to both end faces of the columnar base. It is also possible to do.

  As described above, the multiple metal saw of the present invention has been described with reference to the embodiments. Of course, the present invention is not limited thereto, and various modifications can be made based on the technical idea of the present invention.

  For example, in the first embodiment, the blades 3 of each metal saw 1 are displaced at equal angular intervals of about 1 degree at the central angle, but are not necessarily displaced at equal angles, and are not necessarily spaced at non-equal angular intervals. It may be misaligned.

  In the first embodiment, the horizontal machining center 21 is used. However, the same groove processing can be performed by a vertical machining center or a vertical milling machine. Further, when the groove 42a is cut in the deposition plate using the horizontal machining center 21, the tool 31P is mounted on the drive unit 24, and the groove 42b that intersects the groove 42a at a right angle is cut. The tool 31P is replaced with the tool 31P, and the tool 31Q is mounted on the driving unit 24. However, both the tool 31P and the tool 31Q can be mounted on the driving unit of a machining center having two driving units, and grooves can be formed by each. It is.

It is a figure which shows the multiple metal saw N which consists of n metal saws which shifted the position of the blade, A is a figure which shows a part of peripheral surface of the multiple metal saw N, B is a [B]-[B] line in A It is a partial side view of a direction, and shows position shift of a blade. It is a figure which shows the multiple metal saw N 'which consists of n metal saws which do not shift the position of a blade, A is a figure which shows a part of surrounding surface of multiple metal saw N', B is [B]-[B in A ] It is a partial side view in the line direction, showing the positional deviation of the blade. It is sectional drawing of two groove | channels of one direction among the grooves | channels formed in a deposition prevention board. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows one piece of the metal saw 1 which comprises the multiple metal saw used in Example 1, A is a top view, B is a figure which shows the side surface and cross section of the [B]-[B] line direction in A. It is. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the multiple metal saw used in Example 1, A is a figure which shows a part of the surrounding surface, B is a side view of the [B]-[B] line direction in A, Indicates misalignment. It is a figure which shows the state which is carrying out the groove process to the deposition preventing plate with the tool with the multiple metal saw set to the horizontal type machining center. It is a figure which shows the attitude | position and moving direction of a multiple metal saw at the time of carrying out the groove process to an adhesion prevention board. It is a disassembled perspective view of the angle head which attached the multiple metal saw. It is a figure which shows three types of tools used for the groove process of an adhesion prevention board. It is a figure which shows the multiple metal saw by Example 2, A is a figure which shows a part of the surrounding surface, B is a side view of the [B]-[B] line direction in A, and the position shift of a blade Indicates. FIG. 6 is a view showing a part of the peripheral surface of a multiple metal saw according to Example 3. It is a figure which shows the groove process by the ball end mill to the conventional adhesion prevention board, A is a figure which shows the state currently grooved, B is an enlarged view of the front-end | tip part of a ball end mill.

Explanation of symbols

1 metal saw, 2 base (disk shape),
3 blades, 4 chip pockets,
5 insertion hole, 6 keyway,
7 washers, 8 nuts,
9 key, 10 rotation axis,
11 Angle head detent, 12 Substrate (cylindrical),
13 blade rows, 15 insertion holes,
21 machining center, 22 X-direction moving table,
23 Y-direction moving column, 24 Drive unit equipped with Z-direction moving mechanism,
25 Automatic tool changer 26 Right angle surface plate,
31 tools, 32 angle head body,
33 Angle head, 34 Arbor for extension,
41 protective plate, 42 groove,
43 Plane portion between grooves,
L blade row, M multiple metal saw,

Claims (7)

When forming the grooves on at least a plurality of surfaces of the deposition plate having a longitudinal direction in the first direction, a transverse direction in the second direction and a thickness direction in the third direction and used in the film forming apparatus,
A plurality of metal saws having the same outer diameter are arranged so that the position of the blade is shifted in the circumferential direction and a multiple metal saw attached to the rotating shaft of the drive system is movable in the first, second and third directions. ,
A method for manufacturing a deposition preventing plate, in which a plurality of grooves are simultaneously cut at predetermined intervals while moving the multiple metal saws . Wherein the multiple-metal saw, a manufacturing method of the deposition preventing plate according to claim 1, characterized in that a groove in a lattice shape at a predetermined pitch over almost the entire surface of the deposition preventing plate. From the metal saw on one end side to the metal saw on the other end side in the multiple metal saw, each metal saw is attached to the rotating shaft by sequentially shifting the position of the blade in the same circumferential direction. The manufacturing method of the adhesion prevention board of Claim 1 to do . Between the metal saw on one end side and the metal saw on the other end side of the multiple metal saws, the metal saws from the metal saw on the one end side to the almost half of the metal saws in the same circumferential direction in order of the positions of the blades The left and right half of the metal saws are attached to the rotary shaft by shifting the positions of the blades in the reverse circumferential direction in order. The manufacturing method of the adhesion prevention board of description . In each of the plurality of metal saws, the relative positions of the key groove on the periphery of the insertion hole for fitting with the key provided on the rotating shaft and the blade are different from each other. method for manufacturing a deposition preventing plate according to any one of up to claim 4. Method for manufacturing a deposition preventing plate according to any one of claims 1 to 5 in which the plurality of the metal saw, characterized in that all have a blade of the same number. The multiple metal saw has a plurality of blade rows in which a plurality of blades are arranged at equal intervals in the circumferential direction on the circumferential surface of a cylindrical or columnar base, and each of the plurality of blade rows is formed of the blade. The method for manufacturing an adhesion-preventing plate according to any one of claims 1 to 6, wherein the position is shifted in the circumferential direction .

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