JP4728866B2 - Resonant circuit, filter circuit, and oscillation circuit - Google Patents

Description

  The present invention relates to a resonance circuit used in a wireless communication device, and a filter circuit and an oscillation circuit using the resonance circuit.

Conventionally, the resonant circuit needs to be half or ¼ the length of the oscillating wavelength, and various methods such as “RF MEMS and its applications” (by Konishi, Owada, Kei Labo Publishing, ISBN4-89808-064-2), etc. Has been reported. When a MEMS (MicroElectroMechanical System) resonator is used, it is expected that a resonant circuit having a variable frequency function can be made small (JP 2001-119257 A, S. Roundy, et al, “Toward self-tuning adaptive vibration based micro -generators ”, SPIE vol. 5649, 2005). In order to apply the MEMS resonator to the resonance circuit, the degree of coupling (degree of coupling between the resonant element and the input / output line) when an electric signal passes through the MEMS resonator is important. However, in the conventional resonance circuit to which the MEMS resonator is applied, there is a problem that if the frequency of the resonance circuit (resonance frequency) is made variable, the degree of coupling is changed and desired characteristics cannot be obtained. For this reason, the conventional resonance circuit has a problem that it cannot provide a free variable function to an actual desired band.
JP 2001-119257 JP

  The present invention provides a resonance circuit, a filter circuit, and an oscillation circuit that can obtain desired characteristics while making the resonance frequency variable.

A resonant circuit as one embodiment of the present invention is:
A substrate,
A strip electrode;
A plurality of support members for supporting the strip electrode at a predetermined height from the substrate surface at both ends of the strip electrode;
A plurality of protrusions disposed on the substrate surface along the length direction of the strip electrode, directly below the strip electrode,
A plurality of pressing portions for pressing a part of the strip electrode;
A moving mechanism that moves each of the pressing portions in a different movement range in the length direction of the belt-like electrode, and moves the pressing portion directly above the protruding portion ;
An input signal received from the first end is transmitted to the first other end, and the first other end is close to the portion between the movement ranges on one side surface in the length direction of the strip electrode. Tracks,
An output signal received from the second end is transmitted to the second other end. The second end is located at a portion between the moving ranges of the other side surface on the side opposite to the one side surface of the strip electrode. And an adjacent output line,
The strip electrode resonates with a signal having a resonance frequency corresponding to a length of the strip electrode portion between the plurality of holding portions included in the input signal, and a signal having the resonance frequency is output as the output signal. Give to one end of the track.
A resonant circuit as another aspect of the present invention is:
A substrate,
A strip electrode;
A plurality of support members for supporting the strip electrode at a predetermined height from the substrate surface at both ends of the strip electrode;
A plurality of pressing portions for pressing a part of the strip electrode;
A moving mechanism for moving each of the pressing portions in a different moving range in the length direction of the strip electrode;
An input signal received from the first end is transmitted to the first other end, and the first other end is close to the portion between the movement ranges on one side surface in the length direction of the strip electrode. Tracks,
An output signal received from the second end is transmitted to the second other end. The second end is located at a portion between the moving ranges of the other side surface on the side opposite to the one side surface of the strip electrode. Adjacent output lines,
A resonance prevention mechanism ,
The strip electrode resonates with a signal having a resonance frequency corresponding to a length of the strip electrode portion between the plurality of holding portions included in the input signal, and a signal having the resonance frequency is output as the output signal. Given to one end of the track,
The resonance prevention mechanism suppresses resonance of the belt-like electrode by pressing a substantial center of the belt-like electrode portion between the plurality of support members in response to an external control signal .

  A resonance circuit as one embodiment of the present invention receives a substrate, a strip electrode, a plurality of support members that support the strip electrode at a predetermined height from the substrate surface at both ends of the strip electrode, and a first end. An input signal is transmitted to the first other end. The first other end receives an input line adjacent to one side surface in the length direction of the strip electrode and an output signal received from the second one end. The second end is transmitted to an end, an output line adjacent to the other side surface on the side opposite to the one side surface of the band electrode, and a band electrode portion between the plurality of support members in response to an external control signal And a resonance preventing mechanism that prevents resonance of the belt-like electrode, and the belt-like electrode is included in the input signal when not being pushed by the resonance prevention mechanism. The length of the part Flip resonated by the signal of the resonance frequency, it provides a signal having said resonance frequency to said second end as said output signal.

  According to the present invention, desired characteristics can be obtained while making the resonance frequency variable.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a plan view showing a first embodiment of a resonance circuit according to the present invention. 2 is a cross-sectional view taken along line AA of the resonance circuit of FIG.

  The resonant circuit includes a semiconductor substrate 106, a resonant element 101, support members 102 (1) and 102 (2), horizontal adjustment units 103 (1) and 103 (2), an input line 104 (1), and an output line 104 ( 2) The moving mechanism 100 (1), 100 (2) is provided. The semiconductor substrate 106 is an example of a substrate. This resonance circuit is connected to the external control device 105. Hereinafter, this resonance circuit will be described in detail.

  On the semiconductor substrate 106, the resonant element 101, which is a strip electrode, is supported at a predetermined height H from the substrate surface by the supporting members 102 (1) and 102 (2) at both ends thereof. The resonant element 101 is made of a conductive material such as aluminum, copper, or polysilicon. The support members 102 (1) and 102 (2) are made of a conductive material such as polysilicon or an insulating material. The space between the resonant element 101 and the substrate surface is hollow. The support members 102 (1) and 102 (2) and the substrate 106 are electrically separated.

  On the resonance element 101, horizontal adjustment units (pressing units) 103 (1) and 103 (2) are provided. The horizontal direction adjustment units 103 (1) and 103 (2) press a part (contact portion) of the resonance element 101 in a direction perpendicular to the substrate surface by, for example, its own weight. The resonant element 101 may bend due to the weight of the horizontal adjustment units 103 (1) and 103 (2) depending on its strength. The horizontal adjustment units 103 (1) and 103 (2) and the resonance element 101 are electrically separated. The horizontal direction adjustment units 103 (1) and 103 (2) are configured by a combination of, for example, a conductive member and an insulating member. Specific configuration examples of the horizontal adjustment units 103 (1) and 103 (2) will be described later.

  The moving mechanisms 100 (1) and 100 (2) move the horizontal adjustment units 103 (1) and 103 (2) on the resonance element 101 in the direction of the arrow in FIG. 1 in response to an external control signal from the external control device 105. Move to. The moving mechanisms 100 (1) and 100 (2) move the horizontal adjustment units 103 (1) and 103 (2) in different moving ranges K (1) and K (2), respectively. The moving mechanism 100 (1) includes a driving pad 100a and a driving pad 100b, and the moving mechanism 100 (2) includes a driving pad 100c and a driving pad 100d. Details of the moving mechanisms 100 (1) and 100 (2) will be described later.

  The external control device 105 controls the moving mechanisms 100 (1) and 100 (2) by an external control signal. Although the external control device 105 may be provided outside the substrate 106 or on the substrate 106, it is assumed that the external control device 105 is provided outside the substrate 106 in this embodiment.

  The input line 104 (1) and the output line 104 (2) are arranged close to the resonance element 101 so as to sandwich the resonance element 101.

  The input line 104 (1) transmits an input signal received at one end to the other end. The other end is close to a portion between the movement ranges K (1) and K (2) of one side surface S1 in the length direction of the resonance element 101. In operation, the other end of the input line 104 (1) is capacitively coupled to the resonant element 101.

  The output line 104 (2) transmits an output signal received from one end to the other end. One end of the output line 104 (2) is close to a portion between the movement ranges K (1) and K (2) in the other side S2 of the resonance element 101 opposite to the one side S1. In operation, one end of the output line 104 (2) is capacitively coupled to the resonant element 101.

  The input line 104 (1) and the output line 104 (2) are made of a conductive material such as aluminum, and are formed in the same layer as the resonant element 101, for example. In the drawing, a form in which the other end of the input line 104 (1) and one end of the output line 104 (2) are opposed to each other is shown as an example, and the movement ranges K (1), K ( 2) If it is between, it will not be restrict | limited to the position of illustration.

  In operation, the resonance element 101 resonates (causes mechanical vibration) by a signal having a resonance frequency included in the input signal from the other end of the input line 104 (1), and outputs a signal having this resonance frequency to the output line 104 (2 ) At one end. The resonance frequency of the resonance element 101 is determined by the length of the resonance element portion (resonance element length) sandwiched between the horizontal adjustment units 103 (1) and 103 (2). Therefore, the resonance frequency can be set to a desired value by changing the positions of the horizontal direction adjustment units 103 (1) and 103 (2) using the moving mechanisms 100 (1) and 100 (2). Further, by changing the positions of the horizontal direction adjustment units 103 (1) and 103 (2), the coupling degree between the resonant element 101, the input line 104 (1), and the output line 104 (2) is also set to a desired value. Is possible. These will be described in more detail below.

  FIG. 3 and FIG. 4 each show a state in which the resonance circuit is viewed from the plane. However, the two horizontal adjustment units 103 (1) and 103 (2) are in different positions in FIGS. Further, other elements are not shown for easy viewing of the drawings. 3 and 4, hatched portions (resonant portions) K1 and K2 of the resonant element 101 are sandwiched between two horizontal adjustment units 103 (1) and 103 (2) (see FIG. 1). Part. L1 and L2 are the lengths of the resonant portions K1 and K2, and correspond to the lengths of the respective resonant elements. Since L1 is longer than L2, the resonance circuit of FIG. 3 has a resonance frequency lower than that of the resonance circuit of FIG. In this way, the resonance frequency can be set to an arbitrary value by changing the positions of the two horizontal adjustment units 103 (1) and 103 (2).

  FIG. 5 is a graph showing the relationship between the position of the input / output lines 104 (1) and 104 (2) and the degree of coupling as seen from the resonance portion (K 1 and K 2 in FIGS. 3 and 4) of the resonance element 101. The degree of coupling is expressed as (output power from the resonant element 101 to the output line 104 (2)) / (input power from the input line 104 (1) to the resonant element 101). The position C indicates the center of the resonance part, and the coupling degree M is the coupling degree when the input / output lines 104 (1) and 104 (2) are located at the position C when viewed from the resonance part. As understood from the graph, the coupling is strongest when the excitation is performed at the center of the resonance length (the coupling degree is high), and the coupling degree becomes weaker as the excitation is performed at a position away from the center. In FIG. 3, since the input / output lines 104 (1) and 104 (2) are located at the center of the resonance length, the highest degree of coupling can be obtained. On the other hand, in FIG. 4, since the input / output lines 104 (1) and 104 (2) are located at positions displaced from the center of the resonance length, the degree of coupling is weaker than in FIG. In this way, by changing the positions of the two horizontal adjustment units 103 (1) and 103 (2), it is possible to set the coupling degree to an arbitrary value.

  As described above, the resonance frequency and the degree of coupling can be adjusted simultaneously by changing the positions of the two horizontal direction adjustment units 103 (1) and 103 (2). The resonance circuit described above can be applied to other circuits in combination with a transistor or the like. This resonant circuit is an effective technique for realizing a system-on-chip (SOP) / system-in-chip (SIP), such as when a wireless device is configured by a single IC (Integrated Circuit). .

  FIG. 6 is a diagram illustrating details of the moving mechanism of FIG. However, the scale of each element shown in FIG. 6 is different from FIG. Moreover, the structure of the moving mechanism shown in FIG. 6 is an example to the last, and this invention is not limited to this structure. The horizontal direction adjustment unit 103 shown in FIG. 6 indicates the horizontal direction adjustment unit 103 (1) or the horizontal direction adjustment unit 103 (2) in FIG. 1, and the movement mechanism 100 in FIG. 1) or moving mechanism 100 (2).

  The moving mechanism 100 includes drive pads 401a and 401b. The driving pad 401a corresponds to the moving mechanism 100a or 100c in FIG. 1, and the driving pad 401b corresponds to the moving mechanism 100b or 100d in FIG. The external control device 105 includes voltage sources 402a and 402b and a control unit 406 that controls the voltage sources 402a and 402b. The voltage source 402 a is connected to the drive pad 401 a and the horizontal direction adjustment unit 103, and the voltage source 402 b is connected to the drive pad 401 b and the horizontal direction adjustment unit 103. The drive pads 401 a and 401 b are arranged on the same layer as the horizontal direction adjustment unit 103 or on different layers on both sides of the horizontal direction adjustment unit 103. The control unit 406 controls the voltage sources 402a and 402b so as to generate a voltage between the drive pad and the horizontal adjustment unit 103 from either one of the voltage sources 402a and 402b. The moving direction of the horizontal adjustment unit 103 is determined according to which voltage source generates the voltage. In addition, the control unit 406 can control the voltage value generated in the voltage source, and change the amount of movement of the horizontal adjustment unit 103 by changing the voltage value.

  FIG. 7 is a cross-sectional view taken along the line BB when the horizontal adjustment unit 103 in FIG. 6 is in an initial position (a position when no voltage is applied from any of the voltage sources 402a and 402b).

  The horizontal adjustment unit 103 includes a metal member 407 and an insulating element 403 provided at a lower end of one end (tip) of the metal member 407. The other end of the horizontal adjustment unit 103 is supported by a support member 404 called an anchor. An insulating element 403 at the tip of the horizontal adjustment unit 103 holds the resonant element 101 from above. Another configuration example of the horizontal adjustment unit is shown in FIG. The horizontal adjustment unit 113 includes an insulator portion 121 and a short metal electrode 122. It is assumed that the length Wi of the insulating portion 121 and the length Wm of the electrode 122 in a direction perpendicular to the paper surface have a relationship of Wi ≦ Wm.

  By the way, in the resonance circuit described above, in order to enable a large change in the resonance frequency, the horizontal direction adjustment units 103 (1) and 103 (103) (up to the vicinity of the input / output lines 104 (1) and 104 (2) are provided. 2) The movement must be variable. However, since the input / output lines 104 (1) and 104 (2) and the horizontal direction adjustment units 103 (1) and 103 (2) have the same length direction, large capacitive coupling occurs when the distance between them is too close. May occur. When the capacitive coupling between the two increases, a part of the signal passing from the input line 104 (1) to the output line 104 (2) leaks to the other, so that the passage loss increases, and the other signal flows in another circuit. May be adversely affected. Therefore, as a countermeasure, as shown in FIG. 9, in the horizontal direction adjustment portions 111 (1) and 111 (2), the portions other than the portion in contact with the resonance element 101 are bent to the opposite side to the resonance element 101, thereby 104 (1) and 104 (2) are separated from each other. By doing so, it is possible to suppress the capacitive coupling between the input / output lines 104 (1) and 104 (2) and the horizontal adjustment units 111 (1) and 111 (2). In FIG. 9, other elements are not shown for easy viewing of the drawing.

  Further, as a method for reliably obtaining a desired resonance frequency in the resonance circuit, a protrusion 107a may be provided on the semiconductor substrate 106 below the resonance element 101 as shown in FIG. The protrusions 107a are arranged so that the vertices thereof have a predetermined interval. In this configuration, the horizontal direction adjustment units 103 (1) and 103 (2) are moved directly above the protrusions 107. Although not shown, in this example, the resonant element 101 bends due to the weight of the horizontal adjustment units 103 (1) and 103 (2). The part of the resonant element 101 pressed from above by the horizontal adjustment units 103 (1) and 103 (2) is supported by the protrusion 107 a from below, and as a result, the resonant element 101 is strongly pressed and the desired resonant frequency is obtained. Can be definitely obtained. Note that the portion of the resonant element 101 sandwiched between the horizontal adjustment units 103 (1) and 103 (2) is also in contact with the protruding portion 107a. However, since the pressing force of this portion is weak, the obtained resonant frequency is affected. It is difficult and does not cause any problems. In FIG. 10, the protrusions 107a are arranged at equal intervals. However, as shown in FIG. 11, the protrusions 107b may be arranged at unequal intervals in accordance with a desired fixed resonance frequency. In FIGS. 10 and 11, the tips of the protrusion 107a and the protrusion 107b are sharp, but it is not always necessary to be sharp. The same effect can be obtained even in a flat or rounded shape.

  FIG. 12 is a plan view showing a second embodiment of the resonance circuit according to the present invention. 13 is a cross-sectional view taken along line CC of the resonance circuit of FIG. Parts equivalent to those in FIGS. 1 and 2 are denoted by the same reference numerals. Unlike FIG. 1, this resonance circuit does not include a horizontal adjustment unit and a moving mechanism, but instead includes a vertical adjustment unit 108. The resonance frequency of this resonance circuit is determined by the length of the portion of the resonance element 101 sandwiched between the support members 102 (1) and 102 (2).

  As shown in FIG. 12, a vertical adjustment unit 108 is provided substantially at the center of the portion of the resonant element 101 sandwiched between the support members 102 (1) and 102 (2). A protrusion 108 a is provided on the lower surface of the vertical adjustment unit 108. As shown in FIG. 13, the vertical direction adjustment unit 108 is configured to be movable in a direction perpendicular to the substrate surface by a displacement mechanism described later. The combination of the vertical adjustment unit 108 and the displacement mechanism corresponds to a resonance prevention mechanism. When the vertical adjustment portion 108 is displaced toward the substrate surface by the displacement mechanism, the center of the resonance element 101 portion sandwiched between the support members 102 (1) and 102 (2) is pushed by the projection portion 108a, and thus the insertion is performed. The function due to the electrostatic force from the output line 104 is stopped. This makes it possible to create a state in which the resonance element 101 does not resonate at the resonance frequency. That is, since the signal of the resonance frequency does not pass from the input line 104 (1) to the output line 104 (2), the same state as the switch OFF state can be created. Here, the center of the resonance element 101 sandwiched between the support members 102 (1) and 102 (2) is pressed. However, the above effect can be obtained if the center is not completely the center but is approximately the center. Note that the protrusion 108a is not essential, and the present invention is effective even when the protrusion 108a is not provided (see FIG. 14 described later). However, in this case, the force pushing the resonant element 101 may be weak depending on the design. However, when creating a stop state when resonating with weak coupling, the force is sufficient to stop the resonance, which is an effective method for simplifying the process. In FIG. 13, the tip of the protrusion 108a is sharp, but it is not always necessary to be sharp. In the present embodiment, in a state where the vertical adjustment unit 108 presses the resonant element 101, the vertical adjustment unit 108 does not touch the input / output lines 104 (1) and 104 (2). 1) and 104 (2) are arranged. However, even when the vertical adjustment unit 108 touches the input / output lines 104 (1) and 104 (2), the resonance at the resonance frequency is stopped, and the present invention is effective also in this case.

  FIG. 14 is a cross-sectional view illustrating a specific example of the displacement mechanism and the vertical adjustment unit. However, here, for the sake of simplicity of illustration, a cross section of a resonance circuit having a configuration different from those in FIGS. 12 and 13 is shown. However, in the case of FIGS. 12 and 13 as well, the displacement mechanism and the vertical adjustment unit can be configured with the same or similar configuration.

  As shown in FIG. 14, the vertical adjustment unit 108 includes an insulator portion 405a, a metal electrode 405b, and an insulating element 405c provided at the lower end of the metal electrode 405b. The drive pad 401 provided below the metal electrode 405b corresponds to a displacement mechanism. A combination of the insulator portion 405a, the metal electrode 405b, the metal electrode 405b, and the drive pad 401 corresponds to a resonance prevention mechanism. A voltage can be applied between the drive pad 401 and the metal electrode 405b from the external control device 105 via a voltage source (not shown). By applying a voltage between the drive pad 401 and the metal electrode 405b, the tip of the vertical adjustment unit 108 can be moved in the direction of the arrow in the figure. That is, one end of the vertical adjustment unit 108 is supported by a support member 404 called an anchor, and the other end (tip) is displaced with the one end serving as a fulcrum. When the tip is displaced and comes into contact with the resonance element 101, this becomes a resistance of mechanical vibration of the resonance element 101, and a state in which resonance does not occur is realized. In other words, the resonance prevention mechanism realizes a state in which resonance does not occur by pressing the center or substantially the center of the portion of the resonance element 101 sandwiched between the support members in response to an external control signal from the external control device.

  15 is a plan view showing a resonance circuit in which the moving mechanism (not shown) and the horizontal adjustment unit in FIG. 9 are provided in the resonance circuit shown in FIGS. 16 is a cross-sectional view taken along the line DD of FIG. However, unlike FIG. 13, a protrusion 107 is provided on the substrate 106 below the resonant element 101. The protrusion 107 is provided at a position corresponding to the protrusion 108a. The resonance element 101 can be strongly pressed by pressing the resonance element 101 from above with the protrusion 108 a and supporting the resonance element 101 with the protrusion 107 from below. According to the configuration of FIGS. 15 and 16, the adjustment of the resonance frequency and the adjustment of the degree of coupling including the degree of coupling of 0 (non-resonant state) can be performed simultaneously. Here, referring to FIG. 16, the protrusion 108a ideally pushes the center of the resonance element 101 portion between the horizontal adjustment portions 111 (1) and 111 (2), but is supported as in this example. Even if the substantial center (fixed position) of the resonance element 101 portion between the members 102 (1) and 102 (2) is pressed, a state in which resonance does not occur to an extent that does not cause a problem can be obtained.

  FIG. 17 shows a first specific example of the filter circuit according to the present invention.

  This filter circuit simply includes two resonance circuits shown in FIG. 1 and a MIM (Metal-Insulator-Metal) capacitor. More specifically, the first resonance circuit and the second resonance circuit are connected via the MIM capacitor 109. The first resonant circuit includes an input line 104 (1), horizontal adjustment units 103 (1) -X, 103 (2) -X, a resonant element 101-X, and a moving mechanism (not shown) for simplicity of drawings. Includes other elements. The second resonance circuit includes a horizontal adjustment unit 103 (1) -Y, 103 (2) -Y, a resonance element 101-Y, an output line 104 (2), and a moving mechanism not shown for the sake of simplicity. Includes other elements. The two metal parts (M) in the MIM capacitor 109 are the output line of the first resonance circuit (the metal part M on the left side as viewed in the drawing) and the input line (the metal on the right side as viewed in the figure) of the second resonance circuit. It also corresponds to part M). A MIM capacitor is an example of an impedance circuit. That is, one end of the impedance circuit is connected to the other end of the output line in the first resonance circuit, and the other end of the impedance circuit is connected to one end of the input line in the second resonance circuit.

  The degree of coupling between the two resonance circuits includes the capacitance value of the MIM capacitor 109, the capacitance value between the first resonance circuit and the MIM capacitor 109, and the capacitance value between the second resonance circuit and the MIM capacitor 109. It is the sum. With this filter circuit, the degeneration of the two resonance circuits can be solved and the filter characteristics can be realized.

  Further, the coupling degree in this filter circuit (the coupling degree between the resonant element 101-X and the input line 104 (1) and the MIM capacitor 109, the coupling degree between the two resonant circuits, the resonant element 101-Y and the output line 104 (2 ) And at least one of the coupling degrees with the MIM capacitor 109), the bandwidth of the filter can be adjusted. In addition, a filter circuit may be configured using a resonator having a vertical adjustment unit that realizes a degree of coupling of 0 (a state in which resonance does not occur at a desired resonance frequency). In this case, a filter circuit having a switch circuit is also realized. can do.

  FIG. 18 is a diagram showing an example of an oscillation circuit using a resonance circuit according to the present invention.

  The oscillation circuit includes a resonance circuit 201, an amplifier circuit 202, and a load resistor 203. The resonance circuit 201 includes other elements such as a moving mechanism in addition to the resonance element 101, the input / output lines 104 (1) and 104 (2), and the horizontal direction adjustment units 103 (1) and 103 (2). Here, illustration is omitted for simplification of the drawings. The load resistor 203 is an example of an impedance circuit including one or more passive elements among a load resistor, an inductor, and a capacitor. The output terminal 204 and one end of the load resistor 203 are connected in parallel to the other end of the output line 104 (2) in the resonance circuit 201. The other end of the load resistor 203 is connected to the input of the amplifier circuit 202. The output of the amplifier circuit 202 is connected to one end of the input line 104 (1) in the resonance circuit 201. Oscillation can be caused by setting the negative resistance of the amplifier 202 to be larger than the value of the load resistance 203. Further, it is possible to change the oscillation frequency by changing the resonance frequency of the resonance circuit.

  FIG. 19 shows an example of the amplifier circuit 202. The amplifier circuit 202 includes an input terminal 301, a capacitor 302, a bias terminal 303, an inductor 304, a transistor 305, a bias terminal 306, an inductor 307, a capacitor 308, and an output terminal 309. A signal from the input terminal 301 is input to the base of the transistor 305 through the capacitor 302, and a signal amplified by the transistor 305 is output to the output terminal 309 through the capacitor 308. A bias voltage is applied from the bias terminal 303 to the base of the transistor 305 via the inductor 304, and a bias voltage is applied to the collector of the transistor 305 from the bias terminal 306 via the inductor 307.

It is a block diagram which shows one Embodiment of the resonance circuit of this invention. FIG. 2 is a cross-sectional view of the embodiment shown in FIG. It is a block diagram which shows the principle of the resonance circuit of this invention. It is a block diagram at the time of changing coupling | bonding from the block diagram shown in FIG. It is a figure showing the relationship of the coupling change by the relationship between an input / output line position and the position on a resonant element. It is planar which shows the structural example of a moving mechanism. It is sectional drawing in the BB line of FIG. It is a figure which shows the other structural example of a horizontal direction adjustment part. It is a block diagram which shows one Embodiment of the resonance circuit of this invention. It is sectional drawing which shows one Embodiment of the resonance circuit of this invention. It is sectional drawing which shows one Embodiment of the resonance circuit of this invention. It is a block diagram which shows one Embodiment of the resonance circuit of this invention. It is sectional drawing in the CC line | wire of FIG. It is sectional drawing which shows the specific example of a displacement mechanism. It is a block diagram which shows one Embodiment of the resonance circuit of this invention. It is sectional drawing in the DD line | wire of FIG. It is a block diagram which shows one Embodiment of the filter circuit using the resonance circuit of this invention. It is a block diagram which shows one Embodiment of the oscillation circuit using the resonance circuit of this invention. It is a circuit diagram which shows an example of an amplifier circuit.

Explanation of symbols

100 (1), 100 (2) ... Moving mechanism 101 ... Resonant element (band electrode)
102: Support members 103 (1), 103 (2) ... Horizontal adjustment section (pressing section)
104 (1) ... input line 104 (2) ... output line 105 ... external control device 106 ... semiconductor substrate (substrate)
107a, 107b... Projection portion 108... Vertical adjustment portion 108 a... Projection portion 109... MIM capacitor 121 ... Insulator portion 122 ... Short metal electrode 201 ... Resonance circuit 202 ... Amplifier 203. 302 ... capacitor 303 ... bias terminal 304 ... inductor 305 ... transistor 306 ... bias terminal 307 ... inductor 308 ... capacitor 309 ... output terminals 401a, 401b ... drive pads 402a, 402b ... voltage source 403 ... insulating element 404 ... support member 405a ... insulation Body part 405b ... Metal electrode 405c ... Insulating element 406 ... Control unit 407 ... Metal member

Claims (6)

A substrate,
A strip electrode;
A plurality of support members for supporting the strip electrode at a predetermined height from the substrate surface at both ends of the strip electrode;
An input signal received from the first end is transmitted to the first other end, and the first other end is close to one side surface in the length direction of the strip electrode,
An output signal received from the second end is transmitted to the second other end, the second end is an output line adjacent to the other side surface on the opposite side of the one side surface of the strip electrode,
A resonance blocking mechanism that suppresses the resonance of the band electrode by pressing the approximate center of the band electrode portion between the plurality of support members in response to an external control signal;
The band-shaped electrode resonates with a signal having a resonance frequency corresponding to the length of the band-shaped electrode portion included in the input signal in a state where the band-shaped electrode is not suppressed by the resonance prevention mechanism, and a signal having the resonance frequency is A resonance circuit which is provided as an output signal to the second end. A substrate,
A strip electrode;
A plurality of support members for supporting the strip electrode at a predetermined height from the substrate surface at both ends of the strip electrode;
A plurality of protrusions disposed on the substrate surface along the length direction of the strip electrode, directly below the strip electrode,
A plurality of pressing portions for pressing a part of the strip electrode;
A moving mechanism that moves each of the pressing portions in a different movement range in the length direction of the belt-like electrode, and moves the pressing portion directly above the protruding portion ;
An input signal received from the first end is transmitted to the first other end, and the first other end is close to the portion between the movement ranges on one side surface in the length direction of the strip electrode. Tracks,
An output signal received from the second end is transmitted to the second other end. The second end is located at a portion between the moving ranges of the other side surface on the side opposite to the one side surface of the strip electrode. And an adjacent output line,
The strip electrode resonates with a signal having a resonance frequency corresponding to a length of the strip electrode portion between the plurality of holding portions included in the input signal, and a signal having the resonance frequency is output as the output signal. A resonant circuit applied to one end of the line. 3. The resonance prevention mechanism according to claim 2 , further comprising a resonance prevention mechanism that suppresses resonance of the belt-like electrode by pressing a substantial center of the belt-like electrode portion between the plurality of support members in response to an external control signal. Resonant circuit. A substrate,
A strip electrode;
A plurality of support members for supporting the strip electrode at a predetermined height from the substrate surface at both ends of the strip electrode;
A plurality of pressing portions for pressing a part of the strip electrode;
A moving mechanism for moving each of the pressing portions in a different moving range in the length direction of the strip electrode;
An input signal received from the first end is transmitted to the first other end, and the first other end is close to the portion between the movement ranges on one side surface in the length direction of the strip electrode. Tracks,
An output signal received from the second end is transmitted to the second other end. The second end is located at a portion between the moving ranges of the other side surface on the side opposite to the one side surface of the strip electrode. Adjacent output lines,
A resonance prevention mechanism ,
The strip electrode resonates with a signal having a resonance frequency corresponding to a length of the strip electrode portion between the plurality of holding portions included in the input signal, and a signal having the resonance frequency is output as the output signal. Given to one end of the track,
The resonance prevention mechanism is a resonance circuit that suppresses resonance of the strip electrode by pressing a substantially center of the strip electrode portion between the plurality of support members in response to an external control signal . The first and second resonance circuits according to any one of claims 1 to 4,
An impedance circuit having one end connected to the other end of the output line in the first resonant circuit and the other end connected to the one end of the input line in the second resonant circuit;
Filter circuit with Resonant circuit according to any one of claims 1 to 4,
An output terminal connected to the other end of the output line in the resonant circuit;
An impedance circuit having one end connected to the other end of the output line;
An amplifier circuit having one end connected to the other end of the impedance circuit and the other end connected to one end of an input line in the resonant circuit;
Oscillator circuit with

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