JP4736035B2 - Object transporter - Google Patents

Description

  The present invention relates to a transporter that transports an object on a plate with discharge holes by fluid pressure mainly composed of compressed air.

In general, it is known to transport an object on a table with fluid pressure. And as the most relevant to the present application, there is a public utility model of a wafer transfer mechanism according to the following patent document . The contents are as follows: “A fluororesin plate having a predetermined thickness is provided on the upper surface of a metal base allowing an aluminum plate provided with gas introduction means at predetermined intervals, and the gas A configuration characterized in that a metal member having a through oblique hole communicating with the gas introduction means is embedded at the same interval as the introduction means ”.
Device described in Japanese Utility Model Publication No. 64-523

However, the invention of Patent Document 1, the base is an aluminum plate, is disposed a fluororesin on its upper surface, but are embedded metal member spaced 45 degrees position of the swash holes thereto, the metal It is technically difficult to perforate the manufactured member at an angle of about 45 degrees.
Further, since the oblique hole has a very small diameter of 0.4 to 0.1 mm, it is practically impossible and practical to implement this device. Even if drilling is possible, cleaning and maintenance when the small-diameter hole is clogged are difficult. Furthermore, since there is no shielding plate in the air supply chamber, uniform discharge from the oblique holes cannot be performed, and there is a possibility that a large amount of air is discharged from some small-diameter holes and smooth conveyance cannot be achieved.

  Therefore, the present invention is provided in order to solve the conventional problems and achieve the object of the invention.

According to a first aspect of the present invention, in the object transporter, a transport object placing plate is disposed on the upper opening surface of the hermetically sealed box, and the plate is formed in close contact with a plurality of divided plates, and before the close contact. An inclined concave groove is formed in each of the divided plates, and each divided plate is attached to form an inclined hole for fluid discharge directed in the same direction, and a fluid supply port is provided in the box.

According to a second aspect of the present invention, in the object transporter, a transport object placing plate is disposed on the upper opening surface of the hermetically sealed box, and the plate is formed by closely contacting a plurality of divided plates, and before the contact. An inclined groove groove is formed on each of the divided plate pieces, and the inclined plate groove is alternately directed in the forward direction and the backward direction to closely contact the divided plate, and the inside of the box is partitioned by a partition body for forward movement. A compartment and a backward compartment are formed, and a fluid supply port is provided in each compartment.

  A third aspect of the present invention is that in the object transporter, a transport object placing plate is disposed on the upper opening surface of the hermetic box, and the plurality of sheets are inclined along a direction perpendicular to the transport direction of the transport object. Forming the divided divided plates in close contact with each other, forming an inclined groove groove on each divided plate before the close contact, forming a fluid discharge inclined hole facing in the same direction by attaching each divided plate, A box is provided with a fluid supply port.

  According to a fourth aspect of the present invention, in the object transporter, a transport object placing plate is disposed on the upper opening surface of the hermetically sealed box, and the plate is formed in close contact with a plurality of divided plates. An inclined groove groove or a vertical groove groove is formed on each of the divided plates, and the divided plates are adhered to form inclined holes for fluid discharge or vertical small holes for fluid discharge directed in the same direction. Guide bodies are provided on both sides of the object placement plate, and fluid discharge inclined holes are provided in the guide bodies.

  According to a fifth aspect of the present invention, in the object transporter according to the first aspect, the second aspect, the third aspect, or the fourth aspect of the present invention, an equal supply for uniformly feeding a fluid into each of the fluid discharge inclined holes. A plate-like non-hole shielding plate is used as the member, or a shielding plate with a small hole is formed, or an ejection cap having ejection holes in the horizontal direction.

Since the present invention is configured as described above, the following effects can be obtained. That is, the plate and the fluid ejection inclined holes that close contact of the adjacent divided plates provided on the plate, up to 1 in diameter from a minimum 0.1 mm. It can be set up to about 0 mm, and the fluid discharge inclined hole for fluid discharge can be processed into the introduction route shape such as straight, circular, corrugated, etc., and the cross-sectional shape such as circular, ellipse, polygon, etc. The interval (pitch) can be easily and reliably processed within a range of about 1.5 to 3.0 mm.

  Next, when the fluid discharge inclined hole is clogged, cleaning and washing are facilitated by separating the close contact of the divided plates forming the plate. Subsequently, by processing the dividing plate forming the plate by plastic molding, the fluid introduction path can be freely processed such as a curve and a waveform in addition to a straight line.

Furthermore, by providing a shielding plate in the box, the fluid supplied to the box collides with the shielding plate and then fills the box with an equal pressure and is discharged from each inclined pore with a uniform pressure. Can do.
The direction of the fluid discharge inclined hole provided in the plate is combined in the forward direction and the backward direction, and the air supply port is divided into a plurality of compartments to make the air supply forward or backward. By being switched, it becomes possible to reciprocate the conveyed product.

According to the present invention, in an object transporter, a box is manufactured in a hermetically sealed manner, and a plate on which a transported object is placed is provided on an upper opening surface of the box. The plate is formed in close contact with a divided plate divided into a plurality of sheets along the conveying direction of the conveyed product. And before attaching the division | segmentation plate for forming a plate closely, an inclined groove groove is shape | molded in the side surface of each division | segmentation plate. In this case, when the dividing plate is made of plastic resin, the concave groove is simultaneously processed at the time of molding.
Moreover, when manufacturing a division | segmentation plate with a metal material, it carries out by electrical discharge machining, stamping, and etching (corrosion) processing.

And the inclined hole for fluid discharge is formed by closely contacting the dividing plate adjacent to the side surface of the dividing plate on the groove side.
The fluid supply chamber of the box is provided with a fluid supply port that allows compressed air at the bottom, and an equal fluid supply member is disposed immediately above the supply port.

Next, examples of the present invention will be described. In FIG, 1 is closed box body, 2 plate placed on the opening surface 1 ₁ of the closed box body, 2 ₁ to 2n are divided plates forming the plate 2, in the FIGS. 1 and 9 Is divided along the direction in the transport direction (arrow in the figure) . 6, 7, and 10 are divided in a direction that is orthogonal to the transport direction (the arrow direction in FIG. 10) and that is inclined. 3 is a plate shaped frame provided around the opening surface 1 ₁ of the plate 2.

Reference numeral 4 denotes a plurality of fluid discharge inclined holes formed in the plate 2, which are formed by providing concave grooves 5 on the side surfaces of the divided plates 2 _{1 to} 2 n and closely adjoining the divided plates.

9 and 10, the linear inclined groove 5 is simultaneously formed when the divided plates 2 _{1 to} 2 n or 2 ₁ ′ to 2 n ′ are formed of plastic resin. Further, as shown in FIG. 8, a curved or corrugated concave groove 5 is formed. The cross-sectional shape of the groove can be arbitrarily processed, such as a circle, a semicircle, an ellipse, a square, a triangle, and other polygons as shown in FIG. In the case of a circular shape, the semicircular concave groove 5 is formed on a pair of two split plates, and these are opposed to each other (FIG. 15 (a)).

9 and 10, when the divided plates 2 ₁ to 2 n are formed of a metal material, the groove 5 in the transport direction (arrow direction) is provided by electric discharge machining, stamping, and etching (corrosion).

In the case where the concave groove 5 is provided on the divided plates 2 ₁ to 2 n divided in the conveying direction, the groove 5 is inclined at a predetermined angle so as to be appropriate in relation to the conveyed product W and the fluid supply pressure .

In the case of providing the concave groove 5 the dividing plates 2 ₁ 'to 2n' divided in a direction perpendicular to the (arrow direction in FIG. 10) the conveying direction as shown in FIG. 6 and FIG. 7 and FIG 10, the divided plate Since the plate 2 is formed by closely adhering the adjacent divided plates at a predetermined angle, the groove 5 is processed along the vertical direction of the plate surface of the divided plate.

6 is a fluid uniform supply member, an example of which is a non-porous plate-shaped shielding plate, which is arranged directly above the fluid supply port 7 in the box 1 to equalize the compressed fluid and discharge the fluid. It is comprised so that it may discharge uniformly from the inclined hole 4 for an operation. Further, the shielding plate 6 in FIG. 4 ', a plurality of small holes 6n are spaced on the plate surface. In FIG. 5, 6 ″ is a fluid ejection cap, and the compressed fluid is ejected from a horizontal ejection port 6 ₁ ″ of the cap.
In FIGS. 2 to 5 and FIGS. 12 to 14, reference numeral 7 denotes a supply port for sending a fluid into the fluid supply chamber of the hermetic box 1 and is provided at the bottom of the box 1. 8 is a fluid supply chamber of the box 1, and 8 ₁ and 8 ₂ are compartments in which the fluid supply chamber 8 is partitioned by a partition.

  In the figure, 9 is a guide body provided on both sides of the plate 2 in the transport direction, 10 is a fluid discharge inclined hole provided in the guide body 9, and the discharge port is opened in the transport direction.

12 is a partition member which is divided into a plurality of fluid supply chamber 8 of the box 1, the supply port of the compressed air to half of the compartment ₈₁ to the forward of the transfer object, and for retracting the compartment ₈₂ of the other half 7 is provided. In this case, to form the plate 2 this in combination as appropriate to the backward and the forward of conveyed W the outlet of the orientation of a fluid ejection inclined holes 4 provided in the dividing plate, as shown in FIG. 11 and FIG 12.

“Specific Work Example (1) (FIGS. 1 to 3 and FIGS. 4 and 5)” (1) The plate 2 is formed by closely contacting the divided plates 2 ₁ to 2 n divided along the transport direction. (2) a split plate 2 ₁ to 2n positioned on the opening surface 1 ₁ of the box body, to and set on one of the plates 2 in close contact with the molding frame 3 it. (3) In FIG. 2, the conveyed product W is placed on the plate 2. (4) Compressed air is supplied from the fluid supply port 7 of the box 1 to the fluid supply chamber 8 of the box 1. (5) the compressed air supplied to the fluid supply chamber 8 of the box 1 is a fluid supply of the box 1 while flowing outward along the lower surface of the shield against the closure plate 6 or a small perforated shield 6 ₁ Ascend in the chamber 8. Alternatively, in FIG. 5, the fluid supply chamber 8 of the box 1 is raised while hitting the fluid ejection cap 6 ′ and flowing outward from the horizontal ejection holes 6 ₁ ′. (6) The compressed air that has risen in the fluid supply chamber 8 of the box 1 is discharged from the plate 2 in the transport direction with a uniform pressure through the plurality of fluid discharge inclined holes 4. (7) The transported object W on the plate 2 is transported forward while applying a pressure that causes the compressed air from the fluid discharge inclined hole 4 to float from the plate surface. In this case, the conveyed product W is prevented from deviating from the path by the guide bodies 9 on both sides of the plate plane.

"Specific work example (2) (Figs. 6, 7 , 10 )"
(1) The plate 2 is formed by closely contacting the divided plates 2 ₁ ′, 2 ₂ ′ to ₂ n ′ divided into a plurality along the direction orthogonal to the conveying direction.
(2) Same as the steps (2) to (7) in the above paragraph “0024”.

“Specific work example (3): Structure in which sloping fine pores for discharging fluid are combined for forward movement and backward movement (FIGS. 13 and 14)” (1) Divided plates 2 _{1 to} 2 n divided along the conveying direction The plate 2 is formed in close contact with each other so that every other groove 5 provided in is directed in the forward and backward directions of the conveyed product W. That is, communicating with the compartment ₈₁ inclined concave groove 5 provided in the 2 _1, 2 _3, 2 _5, 2 ₇ division plate (see plan view of the arrangement of the inclined concave groove 5 is FIG. 1) for the forward is doing. The inclination concave groove 5 provided in the dividing plates _{2 2 · 2 4 · 2 5} · 2 6 · 2n ( arrangement of the inclined concave groove 5 is reference to the plan view of FIG. 1) to the compartment 8 ₂ for the retreat Communicate. Concave Anamizo 5 of said discharge gradient hole 4 of the compressed fluid is formed by adhering the respective divided plates 2 ₁ to 2n. (2) Compressed air is supplied to the forward compartment 8 ₁ and the backward compartment 8 ₂ of the conveyed product W obtained by partitioning the fluid supply chamber 8 in the box 1 with the partition 12. (3) The conveyed forward fluid ejection inclined holes 4 in compartment 8 ₁ while placing, placing the conveyed backward fluid ejection inclined holes 4 in the other compartment 8 _2. (4) the division plates 2 disposed on the opening surface 1 ₁ of the box, to Se Tsu preparative the single plates in the molding frame 3. (5) Place the conveyed product W on the plate 2. (6) supplying compressed air from the fluid supply port 7 of the box 1 to compartment 8 ₁ for forward. (7) compressed air supplied to the box body 1, the flow while compartment 8 ₁ outward from the ejection hole ₆₁ in the horizontal direction against the 'likewise the fluid jetting cap 6 and' fluid ejection cap 6 of FIG. 5 To rise. (8) The compressed air rising in the box 1 is discharged from the plate 2 with a uniform pressure through the plurality of fluid discharge inclined holes 4. (9) The transport object W on the plate 2 is transported forward while applying a pressure that causes the air to float by the compressed air from the fluid discharge inclined hole 4. (10) supplies in the above (6), by a known switching mechanism (not shown), the compressed air in the compartment ₈₂ for retraction from the fluid supply port 7 of the box 1. (11) The compressed air supplied to the fluid supply chamber 8 of the box 1 rises in the box 1 while flowing outwardly along the lower surface of the shielding plate 6 on the shielding plate 6. (12) The compressed air rising in the box 1 is discharged from the plate 2 with a uniform pressure through the plurality of fluid discharge inclined holes 4. (13) The conveyed product W on the plate 2 is conveyed in the backward direction while applying a pressure that causes the air to float by the compressed air from the fluid discharge inclined hole 4.

"Specific work example (4): structure in which inclined holes 4 for fluid discharge are provided in the guide bodies 9 on both sides of the plate" (FIGS. 11 and 12)
(1) The steps (1) to (7) in the above paragraph “0024” are the same.
(8) The compressed air injected from the injection mechanism such as the nozzle N is sent to the chambers of the guide bodies 9 on both sides in the plane of the plate 2 and is discharged from the fluid discharge inclined hole 10. As a result, the conveyed product W is brought into a state of floating from the plate 2, and the conveyed product W is conveyed forward by compressed air on both the left and right sides. In this case, the fluid discharge hole provided in the plate 2 can be the vertical hole 4 'in addition to the inclined hole 4 (FIGS. 11 and 12).

  The present invention is realized by changing the diameter of the inclined hole for discharging the fluid as necessary and adjusting the pressure of the compressed air, from a very light thing such as a wafer to a three-dimensional object such as a small baggage. it can.

The top view of the object conveyance machine concerning the present invention. Sectional drawing which follows the 2-2 line of FIG. Sectional drawing which follows the 3-3 line of FIG. Sectional drawing of the modification of FIG. Sectional drawing of the other modification in FIG. FIG. 2 is a plan view of a modification of FIG. Sectional drawing in alignment with line 7-7 in FIG. The side view of the division plate which shape | molded the curved groove groove | channel on the division plate. The perspective view of the division | segmentation plate divided | segmented into the conveyance direction of a plate. The perspective view of the division | segmentation plate divided | segmented into the short side direction of the plate. The top view which provided the fluid discharge inclined hole in the both sides of the plate. FIG. 12 is a longitudinal side view of FIG. 11. The longitudinal side view of a forward movement mechanism among the mechanisms which reciprocate a conveyed product. The vertical side view of a reverse movement mechanism among the mechanisms which reciprocate a conveyed product. (a)-(e) is sectional drawing of the Example of the fluid discharge inclined hole.

Explanation of symbols

1 ... box body 2 ... plate 2 ₁ to 2n ... with dividing plate 3 ... molded plate frame 4 ... fluid ejection inclined hole 5 ... concave groove 6 ... shield plate like fluid uniformly supplying member 6 ₁ ... pores of (6n) fluid delivery inclined holes of the shield plate 6 '... fluid jetting cap 7 ... fluid supply port 8 ... fluid supply chamber 8 _1, 8 ₂ ... compartment of the fluid supply chamber 9 ... guide body 10 ... guide body

Claims (4)

A transport object mounting plate (2) is arranged on the upper opening surface (1 ₁ ) of the sealed box (1), and the plate (2) is in close contact with a plurality of divided plates (2 ₁ ) to (2n). And forming the inclined groove (5) in the conveying direction of each of the divided plates (2 ₁ ) to (2n) before the close contact, and closely contacting each of the divided plates Provided with a fluid discharge inclined hole (4) facing in the same direction between the groove (5) and the contact surface of the adjacent divided plate, and for evenly feeding the fluid into each fluid discharge inclined hole (4) The supply member (6) is a non-perforated shield plate, or a shield plate (6 ₁ ) with a plurality of small holes (6n), or a jet cap (6 ') having a jet hole (6 ₁ ') in the horizontal direction An object transporting machine characterized in that a fluid supply port (7) is provided at the bottom of the box. A plate (2) for placing a transport object is placed on the upper opening surface (1 ₁ ) of the sealed box (1), and the plate (2) is closely attached to a plurality of divided plates (2 ₁ ) to (2n). and by molding, and the adhesion before the split plates (2 ₁₎ was molded-inclined concave groove (5) in the transport direction of the (2n), and the inclined concave by close contact with the respective division plates An inclined hole for fluid discharge (4) is provided in the same direction between the groove (5) and the contact surface of the adjacent divided plate, and the inclined groove (5) is directed alternately in the forward and backward directions. The partition plates (2 ₁ ) to (2n) are brought into close contact with each other, and the interior of the box (1) is partitioned by a partition (12) to form a forward compartment (8 ₁ ) and a backward compartment (8 ₂ ). An object transporter characterized in that a fluid supply port (7) is provided at the bottom of each of the compartments (8 ₁ ) and (8 ₂ ) . The transport object mounting plate (2) is disposed on the upper opening surface (1 ₁ ) of the hermetic box (1), and is inclined and divided into a plurality of sheets along a direction perpendicular to the transport direction of the transport object. division plate _{(2 1 ') ~ (2n} ' molded by close contact with) the inclined concave groove (5 in a plane perpendicular to the conveying direction of the divided plate before the contact _{(2 1 ') ~ (2n} ' ) ), And by intimately contacting each of the divided plates, the inclined groove (4) for fluid discharge directed in the same direction is provided between the inclined groove and the surface of the adjacent divided plate in contact , and The uniform supply member (6) for evenly feeding the fluid discharge inclined holes (4) is a non-perforated shield plate, or a shield plate (6 ') with a plurality of small holes (6n), or in the horizontal direction. An object transporting machine characterized in that a jet cap (6 ') having a jet hole (6 ₁ ') is provided, and a fluid supply port (7) is provided at the bottom of the box. A transport object mounting plate (2) is arranged on the upper opening surface (1 ₁ ) of the sealed box (1), and the plate (2) is in close contact with a plurality of divided plates (2 ₁ ) to (2n). And forming the inclined concave groove (5) or the vertical concave groove (5 ') on each of the divided plates (2 ₁ ) to (2n) before the close contact, and closely attaching the respective split plates Provides a slanted hole for fluid discharge (4) or a small vertical hole for fluid discharge (4 ') facing in the same direction between the inclined groove and the contact surface of the adjacent divided plate. The uniform supply member (6) for evenly feeding into the inclined holes (4) or the vertical small holes (4 ') is a non-porous shielding plate or a shielding plate (6') with a plurality of small holes (6n) and then, or a horizontally ejection hole ₍₆₁ ') ejecting the cap (6 having a'), a fluid supply port (7) provided at the bottom of the box body, the transferred object mounting plate (2) Provide guide bodies (9) on both sides and Object conveyor, characterized in that the discharge inclined holes (10) provided in the conveyance direction.