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JP4746903B2 - Ultrasonic flow meter - Google Patents
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JP4746903B2 - Ultrasonic flow meter - Google Patents

Ultrasonic flow meter Download PDF

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JP4746903B2
JP4746903B2 JP2005109570A JP2005109570A JP4746903B2 JP 4746903 B2 JP4746903 B2 JP 4746903B2 JP 2005109570 A JP2005109570 A JP 2005109570A JP 2005109570 A JP2005109570 A JP 2005109570A JP 4746903 B2 JP4746903 B2 JP 4746903B2
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ultrasonic
transmitting
ultrasonic beam
transducer
receiving
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JP2006292406A (en
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清 小谷野
時夫 杉
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Tokyo Keiso Co Ltd
Izumi Giken KK
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Tokyo Keiso Co Ltd
Izumi Giken KK
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Description

本発明は、管体内を流れる流体の流量を測定する超音波流量計に関するものである。   The present invention relates to an ultrasonic flowmeter that measures the flow rate of a fluid flowing through a tubular body.

管体内を流れる流体の流量を計測する超音波流量計において、最も広く使用されている原理は時間差法である。例えば、非特許文献1に記載されているように、この時間差法は流体の流速Vを、流体中の超音波の伝播速度の変化、即ち伝播時間差Δtとして計測し、管体の既知の断面積Sと乗算することにより流量Qを測定する。   The most widely used principle in the ultrasonic flowmeter for measuring the flow rate of the fluid flowing through the pipe is the time difference method. For example, as described in Non-Patent Document 1, this time difference method measures the flow velocity V of a fluid as a change in the propagation speed of ultrasonic waves in the fluid, that is, a propagation time difference Δt, and the known cross-sectional area of the tube body. The flow rate Q is measured by multiplying by S.

この原理を用いた超音波振動子の配置には、V字型、Z字型、N字型・W字型等が知られている。   V-shaped, Z-shaped, N-shaped, W-shaped, and the like are known for the arrangement of ultrasonic transducers using this principle.

有限会社工業新聞社発行 社団法人日本計量機器工業連合会「流量計測AtoZ」第121頁〜第142頁Issued by Kogyo Shimbun Co., Ltd. Japan Measuring Instruments Industry Federation “Flow Measurement AtoZ”, pages 121-142

送波振動子から送波される超音波ビームは、通常の平板状圧電セラミック振動子を用いた場合には、平板振動子の面上の中心軸上に超音波ビームが形成される。管体の材質と内部の流体との間で両者の音速が著しく異なる場合が多いため、超音波ビームの屈折を考慮してクサビ等の中間媒質で補償することが通常実施されている。   The ultrasonic beam transmitted from the transmission oscillator is formed on the central axis on the plane of the flat plate vibrator when a normal flat plate piezoelectric ceramic vibrator is used. In many cases, the sound speed of the pipe body material and the internal fluid are remarkably different from each other. Therefore, compensation with an intermediate medium such as a wedge is generally performed in consideration of refraction of the ultrasonic beam.

管体の外周面に取り付けた送波振動子と受波振動子の位置関係は、上述の対策を施して最適な位置が得られるように固定されるが、なお流体が予測と異なる音速を有していたり、音速の温度依存性が高かったり、或いは低流速域から極めて高流速域まで広範囲で変化する場合等には、送波振動子からの超音波ビームが必ずしも受波振動子で最適ビーム方位で受波できるとは限らず、むしろ所定の方位から外れてしまうことが多い。   The positional relationship between the transmitting and receiving transducers attached to the outer peripheral surface of the tube is fixed so that an optimal position can be obtained by taking the above measures, but the fluid still has a different sound velocity than expected. The ultrasonic beam from the transmitting transducer is not necessarily the optimum beam in the receiving transducer, when the temperature dependence of the speed of sound is high, or when it changes over a wide range from a low flow velocity range to an extremely high flow velocity range. It is not always possible to receive a wave in a direction, but rather, it often deviates from a predetermined direction.

本発明の目的は、上述の課題を解決し、超音波の方位を制御して最適な方位で超音波ビームを送受波できる超音波流量計を提供することにある。   An object of the present invention is to solve the above-described problems and to provide an ultrasonic flowmeter capable of transmitting and receiving an ultrasonic beam with an optimal direction by controlling the direction of ultrasonic waves.

上記目的を達成するための本発明に係る超音波流量計は、計測すべき流体を流す管体と、該管体の外周面に取り付け流体を介して超音波ビームを送受波する送波用振動子群、受波用振動子群とを備え、これらの振動子群はそれぞれ複数の超音波振動子で構成し、それぞれの超音波振動子間に所定の電気的位相制御を施すことにより超音波ビームの送波方位及び受波方位をそれぞれ制御可能とし、前記送波用振動子群、受波用振動子群において前記複数の超音波振動子は一列に配列し、前記送波用振動子群による超音波ビームの送波方位の制御は、前記配列した超音波振動子に個々に位相差を与えて励起することにより波面を揃え、該波面と垂直方向に合成した超音波ビームを送波することにより行い、前記受波用振動子群による超音波ビームの受波方位の制御は、前記配列した超音波振動子に個々に位相差を与えることにより波面を揃え、該波面と垂直方向からの超音波ビームを受波することにより行い、前記送波用振動子群による超音波ビームの送波方位に前記受波用振動子群による超音波ビームの受波方位を一致させるようにしたことを特徴とする。
In order to achieve the above object, an ultrasonic flowmeter according to the present invention includes a tubular body for flowing a fluid to be measured, and a vibration for transmitting and receiving an ultrasonic beam via a fluid attached to an outer peripheral surface of the tubular body. Each of the transducer groups is composed of a plurality of ultrasonic transducers, and ultrasonic waves are applied by performing predetermined electrical phase control between the ultrasonic transducers. The transmission direction and the reception direction of the beam can be controlled, and the plurality of ultrasonic transducers are arranged in a line in the transmission transducer group and the reception transducer group, and the transmission transducer group The ultrasonic beam transmission azimuth is controlled by applying a phase difference to each of the arranged ultrasonic transducers and aligning the wavefronts, and transmitting the ultrasonic beam synthesized in the direction perpendicular to the wavefront. The ultrasonic beam by the receiving transducer group Control of reception orientation aligns the wavefront by providing a phase difference to individual ultrasonic transducers and the sequence was carried out by reception ultrasonic beam from the wave face and vertically vibrating the transmitting It is characterized in that the receiving direction of the ultrasonic beam by the receiving transducer group coincides with the transmitting direction of the ultrasonic beam by the child group.

本発明に係る超音波流量計によれば、振動子群を機械的に位置をずらして調整することなく、電気的に超音波ビームの方位を制御することにより、最適な方位で超音波ビームの送受波ができる。   According to the ultrasonic flowmeter of the present invention, it is possible to electrically control the direction of the ultrasonic beam without adjusting the transducer group by mechanically shifting the position of the transducer group. Can send and receive waves.

本発明を図示の実施例に基づいて詳細に説明する。   The present invention will be described in detail based on the embodiments shown in the drawings.

図1は構成図であり、管体1の流体Fを介して対向する位置に、距離Lを隔てて第1、第2の振動子群2、3が配置されている。第1の振動子群2及び第2の振動子群3はそれぞれ複数個ずつの振動子2a、2b、2c、・・・、2n、及び振動子3a、3b、・・・、3nを有している。   FIG. 1 is a configuration diagram, in which first and second transducer groups 2 and 3 are arranged at a distance L at positions facing each other through a fluid F of a tube body 1. Each of the first vibrator group 2 and the second vibrator group 3 includes a plurality of vibrators 2a, 2b, 2c,..., 2n and vibrators 3a, 3b,. ing.

第1の振動子群2について説明すると、図2に示すように第1の振動子群2の複数個の振動子2a、2b、2c、・・・、2nには移相回路4a、4b、・・・、4nがそれぞれ接続され、スイッチ回路5を介して信号源6に接続されている。   The first vibrator group 2 will be described. As shown in FIG. 2, the plurality of vibrators 2a, 2b, 2c,..., 2n of the first vibrator group 2 include phase shift circuits 4a, 4b, .. 4n are connected to each other and connected to the signal source 6 through the switch circuit 5.

この図2において、振動子2a、2b、2c、・・・、2nに線分a〜a’に対応した位相差つまり遅延時間を移相回路4a、4b、・・・、4nから与えながら繰り返し励振させると、各振動子2a、2b、2c、・・・、2nからの超音波ビームは干渉し合い位相合成されて、線分A〜A’において波面が揃い、波面A〜A’と垂直方向のθ方向に超音波ビームの主軸が偏向して放射される。   In FIG. 2, the vibrators 2a, 2b, 2c,..., 2n are repeatedly given phase differences, that is, delay times corresponding to the line segments a to a ′, from the phase shift circuits 4a, 4b,. When excited, the ultrasonic beams from the respective vibrators 2a, 2b, 2c,..., 2n interfere with each other and are phase-synthesized so that the wave fronts are aligned in line segments A to A ′ and perpendicular to the wave fronts A to A ′. The main axis of the ultrasonic beam is deflected and emitted in the θ direction.

この方位θに超音波ビームを偏向するには、振動子2a、2b、・・・、2nの間隔をd、λを超音波の波長とすると、i番目の振動子に次の式による位相量を与えればよい。
φn=(n−1)(2πd/λ)sinθ
In order to deflect the ultrasonic beam in this azimuth θ, if the distance between the transducers 2a, 2b,..., 2n is d and λ is the wavelength of the ultrasonic wave, Should be given.
φ n = (n−1) (2πd / λ) sin θ

従って、外部から移相回路4a、4b、・・・、4nの位相量を制御することによって、超音波ビームの送波方位を任意に制御することができる。   Therefore, the transmission direction of the ultrasonic beam can be arbitrarily controlled by controlling the phase amount of the phase shift circuits 4a, 4b,.

図3は周波数f=1MHzで、振動子群2、3を水中で距離L=10mmを隔てた場合の方位θと位相差の関係のグラフ図を示し、方位θ=10度の方向に超音波ビームの主軸を形成させる場合には、各振動子間に位相差φ=7.3度を与えればよい。   FIG. 3 is a graph showing the relationship between the azimuth θ and the phase difference when the frequency f = 1 MHz and the transducer groups 2 and 3 are separated by a distance L = 10 mm in water. When the main axis of the beam is formed, a phase difference φ = 7.3 degrees may be given between the vibrators.

このことは、第2の振動子群3が受波側となる場合においても同様であり、図4に示すように、第1の振動子群2から送波され各振動子3a、3b、・・・、3nに方位θの方向から到達する超音波ビームが、振動子3a、3b、・・・、3nに達するには位相差がある。従って、各振動子3a、3b、・・・、3nに線分b−b’に対応した位相差、つまり遅延時間を移相回路7a、7b、・・・、7nからスイッチ回路8を切換えることにより与え、早く到達した超音波ビームほど位相差を大きくして、線分B−B’において波面が揃うようにすれば、θ方向からの超音波ビームを効率良く受波できるようになる。   The same applies to the case where the second transducer group 3 is on the receiving side. As shown in FIG. 4, each transducer 3a, 3b,. ... There is a phase difference for the ultrasonic beam that reaches 3n from the direction of the azimuth θ to reach the transducers 3a, 3b,. Accordingly, the phase difference corresponding to the line segment bb ′, that is, the delay time, is switched from the phase shift circuits 7a, 7b,..., 7n to the transducers 3a, 3b,. If the phase difference of the ultrasonic beam that arrives earlier is increased and the wave fronts are aligned in the line segment BB ′, the ultrasonic beam from the θ direction can be received efficiently.

なお、超音波流量計においては、流体Fの流れ方向に対して、順、逆方向に交互に超音波ビームを送波し、超音波到達時間差を用いることが通常であるので、第1、第2の振動子群2、3は送波、受波を切換えて相互に送受波を行うようにする。   In an ultrasonic flowmeter, since it is usual to transmit ultrasonic beams alternately in the forward and reverse directions with respect to the flow direction of the fluid F and use the difference in ultrasonic arrival time, the first and first The two transducer groups 2 and 3 perform transmission and reception by switching between transmission and reception.

このようにして、管体1の外周に第1、第2の振動子群2、3を配置し、所定の周波数で振動子に位相差を与えて励振すると、第1の振動子群2の前方の選定した方位に超音波ビームの主軸を得ることができ、第2の振動子群3ではこの方向から主軸を受波することができる。   In this way, when the first and second vibrator groups 2 and 3 are arranged on the outer periphery of the tubular body 1 and the vibrator is excited by giving a phase difference at a predetermined frequency, the first vibrator group 2 The main axis of the ultrasonic beam can be obtained in the selected front direction, and the second transducer group 3 can receive the main axis from this direction.

従って、第1、第2の振動子群2、3の超音波ビームの主軸が、共に相手側の第2、第1の振動子群3、2に向かうようにすれば、最短距離で超音波が伝達されることになり、信号のSN比も向上し、超音波流量計として高い精度が得られる。   Therefore, if the principal axes of the ultrasonic beams of the first and second transducer groups 2 and 3 are both directed toward the second and first transducer groups 3 and 2 on the counterpart side, the ultrasonic wave is transmitted at the shortest distance. Is transmitted, the signal-to-noise ratio of the signal is improved, and high accuracy is obtained as an ultrasonic flowmeter.

構成図である。It is a block diagram. 超音波ビームの送波における原理的説明図である。It is a principle explanatory drawing in transmission of an ultrasonic beam. 方位に対応した位相量の関係のグラフ図である。It is a graph figure of the relationship of the phase amount corresponding to an azimuth | direction. 超音波ビームの受波における原理的説明図である。It is a principle explanatory drawing in reception of an ultrasonic beam.

符号の説明Explanation of symbols

1 管体
2、3 振動子群
2a、2b、・・・、2n、3a、3b、・・・、3n 振動子
4a、4b、・・・、4n、7a、7b、・・・、7n 移相回路
5、8 スイッチ回路
6 信号源
1 Tubular body 2, 3 vibrator group 2a, 2b, ... 2n, 3a, 3b, ..., 3n vibrator 4a, 4b, ..., 4n, 7a, 7b, ..., 7n Phase circuit 5, 8 Switch circuit 6 Signal source

Claims (2)

計測すべき流体を流す管体と、該管体の外周面に取り付け流体を介して超音波ビームを送受波する送波用振動子群、受波用振動子群とを備え、これらの振動子群はそれぞれ複数の超音波振動子で構成し、それぞれの超音波振動子間に所定の電気的位相制御を施すことにより超音波ビームの送波方位及び受波方位をそれぞれ制御可能とし、前記送波用振動子群、受波用振動子群において前記複数の超音波振動子は一列に配列し、前記送波用振動子群による超音波ビームの送波方位の制御は、前記配列した超音波振動子に個々に位相差を与えて励起することにより波面を揃え、該波面と垂直方向に合成した超音波ビームを送波することにより行い、前記受波用振動子群による超音波ビームの受波方位の制御は、前記配列した超音波振動子に個々に位相差を与えることにより波面を揃え、該波面と垂直方向からの超音波ビームを受波することにより行い、前記送波用振動子群による超音波ビームの送波方位に前記受波用振動子群による超音波ビームの受波方位を一致させるようにしたことを特徴とする超音波流量計。 These vibrators are provided with a tubular body through which a fluid to be measured flows, a transmitting transducer group for transmitting and receiving an ultrasonic beam via a fluid attached to the outer peripheral surface of the tubular body, and a receiving transducer group. each group composed of a plurality of ultrasonic transducers, and can control the transmit direction and reception direction of the ultrasonic beam, respectively, by subjecting each of a predetermined electrical phase control between the ultrasonic transducers, said feeding In the transducer group for wave and the transducer group for reception, the plurality of ultrasonic transducers are arranged in a line, and the transmission direction of the ultrasonic beam by the transducer group for transmission is controlled by the arranged ultrasonic wave The transducer is excited by giving a phase difference to each other, aligning the wavefront, transmitting an ultrasonic beam synthesized in a direction perpendicular to the wavefront, and receiving the ultrasonic beam by the receiving transducer group. Wave direction control is performed individually on the arranged ultrasonic transducers. Align the wavefront by providing phase difference, said corrugated surface and carried by reception ultrasonic beam from the vertical direction, the reception for the transducer groups to transmitting direction of ultrasonic beam by the transmitting for transducer groups The ultrasonic flowmeter is characterized in that the receiving direction of the ultrasonic beam is matched. 前記送波用振動子群と前記受波用振動子群は交互に送波、受波の機能を切換えるようにした請求項1に記載に記載の超音波流量計。   The ultrasonic flowmeter according to claim 1, wherein the transmitting transducer group and the receiving transducer group are alternately switched between transmitting and receiving functions.
JP2005109570A 2005-04-06 2005-04-06 Ultrasonic flow meter Expired - Fee Related JP4746903B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS638515A (en) * 1986-06-30 1988-01-14 Tokyo Keiki Co Ltd Ultrasonic flow rate measuring instrument
JPH02113125A (en) * 1988-10-19 1990-04-25 Kayseven Co Ltd Flexible shaft coupling
JPH0926342A (en) * 1995-07-13 1997-01-28 Matsushita Electric Ind Co Ltd Ultrasonic transducer and ultrasonic flowmeter using the same

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