JP4763247B2

JP4763247B2 - High frequency power supply output power control method and high frequency power supply apparatus

Info

Publication number: JP4763247B2
Application number: JP2004101766A
Authority: JP
Inventors: 弘幸小谷
Original assignee: Daihen Corp
Current assignee: Daihen Corp
Priority date: 2004-03-31
Filing date: 2004-03-31
Publication date: 2011-08-31
Anticipated expiration: 2024-03-31
Also published as: JP2005286936A

Description

本発明は、例えばプラズマエッチング、プラズマＣＶＤを行うプラズマ処理装置等の負荷に整合器を介して電力を供給する高周波電源装置に関するものである。 The present invention relates to a high-frequency power supply apparatus that supplies power to a load such as a plasma processing apparatus that performs plasma etching and plasma CVD, for example, via a matching unit.

整合器を介して高周波電力を負荷に供給する高周波電源装置として、従来は高周波電源装置が出力する進行波電力あるいは進行波電力から反射波電力を減じた負荷側電力を一定に制御する方法が用いられてきた。 As a high-frequency power supply device that supplies high-frequency power to a load via a matching unit, conventionally, a traveling wave power output from the high-frequency power supply device or a method of constantly controlling load-side power obtained by subtracting reflected wave power from traveling wave power is used. Has been.

図５は、従来の高周波電源装置１ｐの構成、整合器３ｐの構成及び高周波電源装置１ｐと整合器３ｐと負荷５との接続関係を示すブロック図である。
従来の高周波電源装置１ｐは、伝送線路２及び整合器３ｐ及び負荷接続部４を介して、負荷５に高周波電力を供給するための電源装置であり、発振部１１から出力した高周波信号を増幅部１２で増幅し電力検出部１３を介して高周波電力を出力する。なお、高周波電源装置１ｐの増幅部１２から出力されて負荷５に向かう高周波電力を進行波電力という。
電力検出部１３によって検出された進行波電力ＰＦおよび反射波電力ＰＲは、電力制御部１６ｐにフィードバックされ、進行波電力ＰＦあるいは負荷側電力（進行波電力−反射波電力）が、出力電力設定部１５で設定された出力電力設定値の大きさになるように電力制御部１６ｐで制御される。 FIG. 5 is a block diagram showing the configuration of the conventional high-frequency power supply device 1p, the configuration of the matching device 3p, and the connection relationship between the high-frequency power supply device 1p, the matching device 3p, and the load 5.
The conventional high frequency power supply device 1p is a power supply device for supplying high frequency power to the load 5 through the transmission line 2, the matching unit 3p, and the load connection unit 4, and amplifies the high frequency signal output from the oscillation unit 11 Amplified at 12 and outputs high-frequency power via the power detector 13. The high frequency power output from the amplifying unit 12 of the high frequency power supply device 1p and directed to the load 5 is referred to as traveling wave power.
The traveling wave power PF and the reflected wave power PR detected by the power detection unit 13 are fed back to the power control unit 16p, and the traveling wave power PF or the load side power (traveling wave power−reflected wave power) is output power setting unit. 15 is controlled by the power control unit 16p so that the output power set value set at 15 is the same.

伝送線路２は、電力を伝送するための線路であり、例えば、同軸ケーブル、導波管、同軸管等が用いられる。負荷接続部４は、例えば電磁波が漏れないように遮蔽された銅板からなり、負荷接続部４を介して整合器３ｐと負荷５とが接続される。 The transmission line 2 is a line for transmitting electric power. For example, a coaxial cable, a waveguide, a coaxial tube, or the like is used. The load connection portion 4 is made of, for example, a copper plate shielded so that electromagnetic waves do not leak, and the matching unit 3p and the load 5 are connected via the load connection portion 4.

整合器３ｐは、整合器３ｐの入力端から伝送線路２を経由し高周波電源装置側を見た電源側インピーダンスＺｏ（通常は５０Ωにしていることが多い）と、整合器３ｐの入力端から負荷側を見た負荷側インピーダンスＺＬ（整合器３ｐ及び負荷接続部４及び負荷５のインピーダンス）とを整合させることによって、高周波電源装置１ｐと負荷５との間をインピーダンス整合させる目的で用いられる装置である。 The matching unit 3p has a power source side impedance Zo (usually 50Ω in many cases) viewed from the input end of the matching unit 3p via the transmission line 2 and a load from the input end of the matching unit 3p. This is a device used for the purpose of impedance matching between the high frequency power supply device 1p and the load 5 by matching the load side impedance ZL (impedance of the matching device 3p and the load connecting portion 4 and the load 5) as viewed from the side. is there.

この整合器３ｐは、主に整合部３２と整合器制御部３１とで構成される。
整合部３２は、可変インピーダンス素子（例えば、可変コンデンサ、可変インダクタ等）及び固定インピーダンス素子（例えば、固定コンデンサ、固定インダクタ等）によって構成され、可変インピーダンス素子のインピーダンスを変化させることによって高周波電源装置１ｐと負荷５との間をインピーダンス整合させることができる。この例では、可変コンデンサＣ１、Ｃ２と固定インダクタＬ１によって整合部３２が構成されている。
整合器制御部３１は、図示しない高周波電力検出器を備え、高周波電力の電圧成分、電流成分および電圧成分と電流成分との位相差を検出し、検出した情報に基づいて高周波電源装置１ｐと負荷５との間がインピーダンス整合するように整合部のインピーダンス値を制御する機能を有する。この例の場合、整合器制御部３１は、可変コンデンサＣ１、Ｃ２のキャパシタンス値を制御する。 The matching unit 3p is mainly composed of a matching unit 32 and a matching unit control unit 31.
The matching unit 32 is configured by a variable impedance element (for example, a variable capacitor, a variable inductor, etc.) and a fixed impedance element (for example, a fixed capacitor, a fixed inductor, etc.), and by changing the impedance of the variable impedance element, the high frequency power supply device 1p And the load 5 can be impedance-matched. In this example, the matching unit 32 is configured by the variable capacitors C1 and C2 and the fixed inductor L1.
The matching unit controller 31 includes a high-frequency power detector (not shown), detects a voltage component, a current component, and a phase difference between the voltage component and the current component of the high-frequency power, and the high-frequency power supply device 1p and the load based on the detected information 5 has a function of controlling the impedance value of the matching section so that impedance matching is achieved. In this example, the matching unit controller 31 controls the capacitance values of the variable capacitors C1 and C2.

負荷５は、加工部を備え、その加工部の内部に搬入したウエハ、液晶基板等の被加工物を加工（エッチング、ＣＶＤ等）するための装置である。この負荷５は、被加工物を加工するために、加工部にプラズマ放電用ガスを導入し、そのプラズマ放電用ガスに高周波電源装置から供給された高周波電力（電圧）を印加することによって、上記のプラズマ放電用ガスを放電（以下、プラズマ放電という）させて非プラズマ状態からプラズマ状態にしている。そして、プラズマ状態になったガスを利用して被加工物を加工している。なお、このような放電を伴う負荷を放電負荷という。また、放電負荷においては、放電開始前と放電開始後で負荷インピーダンスが急変する特性がある。 The load 5 is an apparatus for processing (etching, CVD, etc.) a workpiece such as a wafer and a liquid crystal substrate that is provided with a processing unit and is carried into the processing unit. In order to process the workpiece, the load 5 introduces a plasma discharge gas into the processing portion, and applies high-frequency power (voltage) supplied from a high-frequency power supply device to the plasma discharge gas. The plasma discharge gas is discharged (hereinafter referred to as plasma discharge) to change from a non-plasma state to a plasma state. And the workpiece is processed using the gas which became the plasma state. Such a load accompanied by discharge is called a discharge load. In addition, the discharge load has a characteristic that the load impedance changes suddenly before and after the start of discharge.

ところで、高周波電源装置１ｐと負荷５との間がインピーダンス整合しているときは、高周波電源装置１ｐから出力された高周波電力が効率よく負荷５に供給される。
しかし、負荷５の内部インピーダンスがプラズマ放電の状態によって変動するために、負荷のインピーダンスは整合時に比べて、高インピーダンス又は低インピーダンスに変動する。
そうなると、高周波電源装置１ｐと負荷５との間がインピーダンス整合していない状態になって、整合器の入力端３０１での反射係数が増加するために、高周波電源装置１ｐから出力されて負荷５に向かう進行波電力の一部又は全部が反射して整合器３ｐから高周波電源装置に向かう反射波電力ＰＲが発生するので、高周波電力が効率よく負荷５に供給されない。 By the way, when impedance matching is performed between the high frequency power supply device 1p and the load 5, the high frequency power output from the high frequency power supply device 1p is efficiently supplied to the load 5.
However, since the internal impedance of the load 5 varies depending on the state of the plasma discharge, the impedance of the load varies to a high impedance or a low impedance as compared with the matching.
As a result, impedance matching between the high frequency power supply device 1p and the load 5 is not achieved, and the reflection coefficient at the input terminal 301 of the matching device increases, so that the high frequency power supply device 1p outputs to the load 5. Since a part or all of the traveling wave power that travels is reflected to generate reflected wave power PR that travels from the matching unit 3p to the high-frequency power supply device, the high-frequency power is not efficiently supplied to the load 5.

通常は、整合器３ｐによってインピーダンス整合をさせるために、整合状態に戻るが、不整合状態から整合状態になるまでの間は、反射波電力が発生することになる。また、整合器３ｐの調整が最適でない場合等は、不整合状態が続くこともある。上記のような理由で発生した反射波電力ＰＲは、高周波電源装置内に戻る。
特開２００１−１９７７４９号公報特開２００３−１４３８６１号公報 Usually, the impedance matching is performed by the matching device 3p to return to the matching state, but reflected wave power is generated until the matching state is changed to the matching state. Further, when the matching unit 3p is not optimally adjusted, the mismatching state may continue. The reflected wave power PR generated for the above reason returns into the high frequency power supply device.
JP 2001-197749 A JP 2003-143861 A

前述したような整合器を介して高周波電力を負荷に供給する高周波電源装置において、放電負荷のように放電開始前と放電開始後の負荷インピーダンスが急変する負荷が接続されたとき、高周波電源装置１ｐから出力する進行波電力あるいは負荷側電力（進行波電力−反射波電力）を一定に制御する場合について説明をする。 In a high-frequency power supply apparatus that supplies high-frequency power to a load via the matching unit as described above, when a load whose load impedance changes suddenly before and after the start of discharge, such as a discharge load, is connected, the high-frequency power supply apparatus 1p The case where the traveling wave power or the load side power (traveling wave power-reflected wave power) output from the terminal is controlled to be constant will be described.

高周波電源装置１ｐが進行波電力の出力を開始して放電負荷が放電すると、整合器は負荷インピーダンスの急変に対応するために、整合部３２の可変コンデンサＣ１，Ｃ２のキャパシタンス値を変化させて整合動作を行う。 When the high frequency power supply device 1p starts to output traveling wave power and the discharge load discharges, the matching unit changes the capacitance values of the variable capacitors C1 and C2 of the matching unit 32 in order to cope with a sudden change in load impedance. Perform the action.

この整合動作の過程において、整合器内の可変コンデンサＣ１，Ｃ２のインピーダンスが変化しているために、高周波電源装置が進行波電力あるいは負荷側電力を一定に制御するように動作していても、整合器３ｐの出力端３０２の電圧や出力電流の大きさは変化している。したがって整合過程においては、負荷にかかる電圧や負荷を流れる電流値が変化する。 In the process of this matching operation, since the impedances of the variable capacitors C1 and C2 in the matching unit are changed, even if the high frequency power supply device operates to control the traveling wave power or the load side power to be constant, The voltage at the output terminal 302 of the matching unit 3p and the magnitude of the output current are changing. Therefore, in the matching process, the voltage applied to the load and the current value flowing through the load change.

上記整合過程において、放電負荷の電圧が放電を維持できない大きさまで低下したり、放電負荷を流れる電流値が放電を維持できない大きさまで低下すると、放電が消滅する。放電が消滅すると、整合器の入力端での反射係数が増加するために、整合器は反射係数が小さくなるように整合動作を行う。この過程において負荷にかかる電圧が放電開始電圧に達しないと再び放電を行うことができない。放電開始電圧に達し再放電を行った場合には、整合動作を続ける。その後、放電負荷の電圧が放電維持電圧未満の大きさになると放電は再び消滅するが、放電維持電圧よりも下がらなければ放電を維持して整合動作を続ける。 In the matching process, the discharge disappears when the voltage of the discharge load decreases to a level at which the discharge cannot be maintained, or the current value flowing through the discharge load decreases to a level at which the discharge cannot be maintained. When the discharge is extinguished, the reflection coefficient at the input terminal of the matching device increases, so that the matching device performs a matching operation so that the reflection coefficient becomes small. In this process, discharge cannot be performed again unless the voltage applied to the load reaches the discharge start voltage. When the discharge start voltage is reached and re-discharge is performed, the matching operation is continued. Thereafter, when the voltage of the discharge load becomes smaller than the discharge sustain voltage, the discharge disappears again, but if the voltage does not fall below the discharge sustain voltage, the discharge is maintained and the matching operation is continued.

負荷を流れる電流値が放電を維持できない大きさまで低下して放電が消滅した場合も同様であり、負荷を流れる電流値が放電開始電流に達しないと再び放電を行うことができない。放電開始電流に達し再放電を行った場合には、整合動作を続ける。その後、負荷を流れる電流値が放電維持電流未満の大きさになると放電は再び消滅するが、放電維持電流よりも下がらなければ放電を維持して整合動作を続ける。 The same applies to the case where the current value flowing through the load decreases to a level at which the discharge cannot be maintained and the discharge disappears. If the current value flowing through the load does not reach the discharge start current, the discharge cannot be performed again. When the discharge start current is reached and re-discharge is performed, the matching operation is continued. Thereafter, when the value of the current flowing through the load becomes smaller than the discharge sustaining current, the discharge disappears again, but if the current value does not fall below the discharge sustaining current, the discharge is maintained and the matching operation is continued.

このように従来の高周波電源装置では、接続する負荷が放電負荷の場合には、放電開始から整合するまでの間に放電が消滅する場合があり、放電を利用するエッチング装置やＣＶＤ装置の加工プロセスに悪影響を与えるという問題があった。
本発明は、上記問題を鑑みなされたもので、放電開始から整合過程において放電の消滅が発生しない高周波電源装置を提供することを目的としている。 As described above, in the conventional high-frequency power supply device, when the load to be connected is a discharge load, the discharge may disappear between the start of the discharge and the alignment, and the processing process of the etching apparatus and the CVD apparatus using the discharge There was a problem of adversely affecting
The present invention has been made in view of the above problems, and an object of the present invention is to provide a high-frequency power supply device in which the disappearance of discharge does not occur in the matching process from the start of discharge.

本願発明によって提供される高周波電源の出力電力制御方法は、例えば図２に示すように、
整合器を介して高周波電力を負荷に供給する高周波電源の出力電力制御方法において、
前記負荷の電流が放電を維持することのできる最小の電流であるときの整合器の整合部よりも負荷側における電流検出値よりも大きい電流設定値を予め設定しておき、
前記電流検出値が前記電流設定値以上の場合は、前記電力検出値が予め設定された電力設定値に等しくなるように出力する高周波電力を制御し、
前記電流検出値が前記電流設定値未満の場合は、前記電流設定値から前記電流検出値を減じた値に応じて変化するプラスの指令値を前記電力設定値に加え、前記指令値を前記電力設定値に加算した値と前記電力検出値とが等しくなるように出力する高周波電力を制御することを特徴としている。 Output power control method of the high-frequency power that is provided by the present invention, for example as shown in FIG. 2,
In an output power control method of a high frequency power source that supplies high frequency power to a load via a matching unit,
A current setting value larger than the current detection value on the load side than the matching unit of the matching device when the current of the load is the minimum current that can maintain discharge is set in advance,
If the current detection value is greater than or equal to the current setting value, control the high-frequency power output so that the power detection value is equal to a preset power setting value,
When the detected current value is less than the current set value, a positive command value that changes according to a value obtained by subtracting the current detected value from the current set value is added to the power set value, and the command value is added to the power set value. The high frequency power output is controlled so that the value added to the set value is equal to the detected power value.

本願発明によって提供される他の高周波電源の出力電力制御方法は、例えば図４に示すように、
整合器を介して高周波電力を負荷に供給する高周波電源の出力電力制御方法において、
前記負荷の電流が放電を維持することのできる最小の電流であるときの整合器の整合部よりも負荷側における電流検出値よりも大きい電流設定値を予め設定しておき、
前記電流検出値が前記電流設定値以上の場合は、前記電力検出値が予め設定された電力設定値に等しくなるように出力する高周波電力を制御し、
前記電流検出値が前記電流設定値未満の場合は、前記電流設定値から前記電流検出値を減じた値に応じて変化する指令値と前記電力検出値とが等しくなるように出力する高周波電力を制御し、前記指令値は出力する高周波電力を増加させるための値であることを特徴としている。 For example, as shown in FIG. 4, the output power control method of another high-frequency power supply provided by the present invention is as follows.
In an output power control method of a high frequency power source that supplies high frequency power to a load via a matching unit,
A current setting value larger than the current detection value on the load side than the matching unit of the matching device when the current of the load is the minimum current that can maintain discharge is set in advance,
When the current detection value is equal to or greater than the current set value, it controls the high frequency power the power detection value is outputted so as to be equal to a preset power set value,
If the current detection value is less than the current setting value, a high frequency power outputted from the current set value so that said power detection value and the command value that changes equal according to the value obtained by subtracting the current detection value And the command value is a value for increasing the output high-frequency power .

本願発明によって提供される他の高周波電源装置は、例えば図２に示すように、
整合器を介して高周波電力を負荷に供給する高周波電源装置において、
前記整合器の整合部よりも負荷側の電流を検出する電流検出部と、
前記負荷の電流が放電を維持することのできる最小の電流であるときの整合器の整合部よりも負荷側における電流検出値よりも大きい電流設定値を予め設定する出力電流設定部と、
前記電流検出部で検出した電流検出値と前記電流設定値とを比較し、前記電流検出値が前記電流設定値以上の場合は高周波電力の出力を増加させるための指令値を出力せず、前記電流検出値が電流設定値未満の場合は前記電流設定値から前記電流検出値を減じた値に応じて変化する値であって高周波電力の出力を増加させるためのプラスの指令値を出力する電流制御部と、
高周波電源装置から出力され負荷に向かう進行波電力を検出するか、進行波電力および負荷側から反射される反射波電力を検出する電力検出部と、
前記電力検出部で検出した進行波電力の検出値または進行波電力の検出値から反射波電力の検出値を減じた負荷側電力の検出値が、予め設定された電力設定値に前記電流制御部から出力する指令値を加えた値に等しくなるように制御するための電力制御信号を出力する電力制御部と、
前記電力制御部から出力される電力制御信号に応じて出力値を増減させた高周波電力を出力する増幅部とを備えたことを特徴としている。 Another high frequency power supply device provided by the present invention is, for example, as shown in FIG.
In a high-frequency power supply device that supplies high-frequency power to a load via a matching unit,
A current detector for detecting a current of the load side of the matching portion of the matching unit,
An output current setting unit that presets a current setting value larger than the current detection value on the load side of the matching unit of the matching unit when the current of the load is the minimum current that can maintain discharge;
The comparison current detection value detected by the current detecting unit and the current setting value, if the current detection value is equal to or greater than the current set value does not output a command value for increasing the output of the high frequency power, the When the detected current value is less than the current set value, a current that changes according to a value obtained by subtracting the detected current value from the current set value and outputs a positive command value for increasing the output of the high-frequency power A control unit;
A power detection unit that detects traveling wave power output from the high-frequency power supply device toward the load, or detects traveling wave power and reflected wave power reflected from the load side;
The detected value of the load-side power obtained by subtracting the detected value of the reflected power from the detection value or the detected value of the forward power of the traveling wave power detected by the power detection unit, the current control unit to a preset power set value A power control unit that outputs a power control signal for controlling to be equal to a value obtained by adding the command value output from
And an amplifying unit that outputs high-frequency power whose output value is increased or decreased according to a power control signal output from the power control unit.

本願発明によって提供される他の高周波電源装置は、例えば図４に示すように、
整合器を介して高周波電力を負荷に供給する高周波電源装置において、
前記整合器の整合部よりも負荷側の電流を検出する電流検出部と、
前記負荷の電流が放電を維持することのできる最小の電流であるときの整合器の整合部よりも負荷側における電流検出値よりも大きい電流設定値を予め設定する出力電流設定部と、
前記電流検出部で検出した電流検出値と前記電流設定値とを比較し、前記電流検出値が前記電流設定値以上の場合は高周波電力の出力を増加させるための指令値を出力せず、前記電流検出値が電流設定値未満の場合は前記電流設定値から前記電流検出値を減じた値に応じて変化する値であって高周波電力の出力を増加させるための指令値を出力する電流制御部と、
高周波電源装置から出力され負荷に向かう進行波電力を検出するか、進行波電力および負荷側から反射される反射波電力を検出する電力検出部と、
前記電流検出値が前記電流設定値以上の場合は、前記電力検出部で検出した進行波電力の検出値または進行波電力の検出値から反射波電力の検出値を減じた負荷側電力の検出値が、予め設定された電力設定値に等しくなるように出力する高周波電力を制御するための電力制御信号を出力し、前記電流検出値が前記電流設定値未満の場合は、前記電力検出部で検出した進行波電力の検出値または進行波電力の検出値から反射波電力の検出値を減じた負荷側電力の検出値が、前記電流制御部から出力する指令値に等しくなるように出力する高周波電力を制御するための電力制御信号を出力する電力制御部と、
前記電力制御部から出力される電力制御信号に応じて出力値を増減させた高周波電力を出力する増幅部とを備えたことを特徴としている。 Another high frequency power supply device provided by the present invention is, for example, as shown in FIG.
In a high-frequency power supply device that supplies high-frequency power to a load via a matching unit,
A current detector for detecting a current of the load side of the matching portion of the matching unit,
An output current setting unit that presets a current setting value larger than the current detection value on the load side of the matching unit of the matching unit when the current of the load is the minimum current that can maintain discharge;
The comparison current detection value detected by the current detecting unit and the current setting value, if the current detection value is equal to or greater than the current set value does not output a command value for increasing the output of the high frequency power, the A current control unit that outputs a command value for increasing the output of high-frequency power , which is a value that changes according to a value obtained by subtracting the current detection value from the current setting value when the current detection value is less than the current setting value When,
A power detection unit that detects traveling wave power output from the high-frequency power supply device toward the load, or detects traveling wave power and reflected wave power reflected from the load side;
Wherein when the current detection value is equal to or greater than the current set value, the power detector in the detection value of the load-side power obtained by subtracting the detected value of the reflected power from the detection value or the detected value of the forward power of the traveling wave power detected but outputs a power control signal for controlling the high frequency power output to be equal to a preset power set value, if the current detection value is less than the current setting value is detected by the power detector high frequency power from the detected value or the detected value of the forward power of the traveling wave power detected value of the load-side power obtained by subtracting the detected value of the reflected wave power, and outputs to be equal to the command value output from the current controller a power control unit for outputting a power control signal for controlling the,
And an amplifying unit that outputs high-frequency power whose output value is increased or decreased according to a power control signal output from the power control unit.

従来では、接続する負荷が放電負荷の場合には、放電開始から整合するまでの間に放電が消滅する場合があり、放電を利用するエッチング装置やＣＶＤ装置の加工プロセスに悪影響を与えるという問題があった。
しかし、本発明では、整合器の整合部よりも負荷側の電流検出値が電流設定値未満の場合に、電力設定値よりも高周波出力を増加させることによって、整合器の整合部よりも負荷側の電流検出値が電流設定値よりも小さくならないように制御するので、放電開始してから整合状態になるまでに放電が消滅することはない。
そのために、従来に生じていた加工プロセスでの問題を解消できる。 Conventionally, when the load to be connected is a discharge load, the discharge may disappear between the start of discharge and the alignment, and there is a problem of adversely affecting the processing process of the etching apparatus and the CVD apparatus using the discharge. there were.
However, in the present invention, when the current detection value of the load side of the matching portion of the integer engager is less than the current setting value by than the power set value to increase the high-frequency output, than matching portion matching unit Since control is performed so that the current detection value on the load side does not become smaller than the current setting value, the discharge does not disappear from the start of discharge until the matching state is reached.
For this reason, problems in processing processes that have occurred in the past can be solved.

以下、本発明の詳細を図面を参照して説明する。 Hereinafter, details of the present invention will be described with reference to the drawings.

［第１の実施の形態］
図１は、第１の実施形態に係る高周波電源装置１ａの構成、整合器３ａの構成及び高周波電源装置１ａと整合器３ａと負荷５との接続関係を示すブロック図である。 [First Embodiment]
FIG. 1 is a block diagram illustrating the configuration of the high-frequency power supply device 1a according to the first embodiment, the configuration of the matching device 3a, and the connection relationship between the high-frequency power supply device 1a, the matching device 3a, and the load 5.

（整合器の説明）
第１の実施形態に係る整合器３ａは、従来技術の整合器３ｐに比べて、整合器の整合部３２よりも負荷側の出力電圧を検出する電圧検出部３３を有する点が異なるが、他は従来の整合器３ｐと同様であり、高周波電源装置１ａと負荷５との間をインピーダンス整合させる目的で用いられる装置である。この電圧検出部３３は、整合器の整合部よりも負荷側の出力電圧を検出し、出力電圧に対応した電圧検出信号Ｖｖを出力する。 (Description of matcher)
The matching device 3a according to the first embodiment is different from the matching device 3p of the prior art in that it includes a voltage detection unit 33 that detects an output voltage on the load side of the matching unit 32 of the matching device. Is the same as the conventional matching device 3p, and is a device used for impedance matching between the high frequency power supply device 1a and the load 5. The voltage detection unit 33 detects an output voltage on the load side of the matching unit of the matching unit, and outputs a voltage detection signal Vv corresponding to the output voltage.

（高周波電源装置の説明）
第１の実施形態に係る高周波電源装置１ａは、伝送線路２及び整合器３及び負荷接続部４を介して、負荷５に高周波電力を供給するための電源装置である。また、一般にこの種の高周波電源装置では、数百ｋＨｚ以上の周波数の高周波電力を出力している。 (Description of high frequency power supply)
A high frequency power supply device 1 a according to the first embodiment is a power supply device for supplying high frequency power to a load 5 via a transmission line 2, a matching unit 3, and a load connection unit 4. In general, this type of high frequency power supply device outputs high frequency power having a frequency of several hundred kHz or more.

（高周波電源装置の内部構成についての説明）
発振部１１は、所定の周波数の高周波信号Ｖｏｓを出力する。なお、ここで言う高周波信号とは、正弦波信号に限らず、例えば、矩形波信号、三角波信号等も含む。 (Description of internal configuration of high frequency power supply device)
The oscillating unit 11 outputs a high-frequency signal Vos having a predetermined frequency. The high-frequency signal referred to here is not limited to a sine wave signal, and includes, for example, a rectangular wave signal, a triangular wave signal, and the like.

増幅部１２は、後述する電力制御部１６ａの出力信号を指示値として発振部１１から出力する高周波信号を増幅して進行波電力ＰＦを出力する。
なお、増幅部１２から出力された進行波電力は、高周波電源装置の出力端としての高周波電力出力コネクタ１０１に接続された伝送線路２を介して、高周波電源装置の外部に出力される。 The amplifying unit 12 amplifies a high-frequency signal output from the oscillating unit 11 using an output signal of a power control unit 16a described later as an instruction value, and outputs traveling wave power PF.
The traveling wave power output from the amplifying unit 12 is output to the outside of the high frequency power supply device via the transmission line 2 connected to the high frequency power output connector 101 as an output end of the high frequency power supply device.

電力検出部１３は、増幅部１２から出力される進行波電力ＰＦ及び高周波電源装置の外部から戻ってくる反射波電力ＰＲを検出するとともに、進行波電力値に対応した進行波電力信号Ｖｐｆ及び反射波電力値に対応した反射波電力信号Ｖｐｒを出力する。この電力検出部１３には、例えば、方向性結合器等が用いられる。 The power detector 13 detects the traveling wave power PF output from the amplifying unit 12 and the reflected wave power PR returning from the outside of the high frequency power supply device, and the traveling wave power signal Vpf corresponding to the traveling wave power value and the reflected wave A reflected wave power signal Vpr corresponding to the wave power value is output. For example, a directional coupler is used for the power detection unit 13.

出力電圧設定部１７は、整合器の出力電圧設定値を定める出力電圧設定信号Ｖｖｓを出力する。出力電圧設定値は、放電負荷の場合、負荷電圧が放電維持電圧のときの整合器の出力電圧よりも大きくするとよい。なお、出力電圧設定信号Ｖｖｓは、高周波電源装置の外部にある他の装置から入力してもよい。 The output voltage setting unit 17 outputs an output voltage setting signal Vvs that determines the output voltage setting value of the matching unit. In the case of a discharge load, the output voltage set value is preferably larger than the output voltage of the matching device when the load voltage is the discharge sustain voltage. The output voltage setting signal Vvs may be input from another device outside the high frequency power supply device.

電圧制御部１８は、電圧検出部３３から出力される電圧検出信号Ｖｖと出力電圧設定部１７から出力される出力電圧設定信号Ｖｖｓとを入力し、電圧制御信号Ｖｖｃを電力制御部１６ａに出力する。電圧制御信号Ｖｖｃは、電圧検出信号Ｖｖの大きさが出力電圧設定信号Ｖｖｓの大きさ以上のときには０Ｖの電圧信号であり、電圧検出信号Ｖｖの大きさが出力電圧設定信号Ｖｖｓの大きさ未満のときにはプラスの電圧信号である。このプラスの電圧信号の大きさは電圧検出信号Ｖｖの大きさを出力電圧設定信号Ｖｖｓの大きさにするための電圧値に相当する。なお、電圧検出信号Ｖｖは、整合器の出力端子３０４および高周波電源装置の入力端子１０２を介して電圧制御部１８に入力される。 The voltage control unit 18 receives the voltage detection signal Vv output from the voltage detection unit 33 and the output voltage setting signal Vvs output from the output voltage setting unit 17, and outputs the voltage control signal Vvc to the power control unit 16a. . The voltage control signal Vvc is a 0V voltage signal when the magnitude of the voltage detection signal Vv is greater than or equal to the magnitude of the output voltage setting signal Vvs, and the magnitude of the voltage detection signal Vv is less than the magnitude of the output voltage setting signal Vvs. Sometimes it is a positive voltage signal. The magnitude of the positive voltage signal corresponds to a voltage value for setting the magnitude of the voltage detection signal Vv to the magnitude of the output voltage setting signal Vvs. The voltage detection signal Vv is input to the voltage control unit 18 via the output terminal 304 of the matching unit and the input terminal 102 of the high frequency power supply device.

出力電力設定部１５は、高周波電源装置から出力する進行波電力ＰＦの出力設定値あるいは負荷側電力の設定値を定める出力電力設定信号Ｖｐｓを出力する。なお、出力電力設定信号Ｖｐｓは、高周波電源装置の外部にある他の装置から入力してもよい。 The output power setting unit 15 outputs an output power setting signal Vps that determines the output setting value of the traveling wave power PF output from the high frequency power supply device or the setting value of the load side power. The output power setting signal Vps may be input from another device outside the high frequency power supply device.

電力制御部１６ａは、電力検出部１３から出力される進行波電力信号Ｖｐｆ及び反射波電力信号Ｖｐｒ、出力電力設定部１５から出力される出力電力設定信号Ｖｐｓ及び電圧制御部１８から出力される電圧制御信号Ｖｖｃを入力する。また、進行波電力を一定に制御する場合には、進行波電力値に対応した進行波電力信号Ｖｐｆを電力検出信号Ｖｐとし、負荷側電力一定に制御する場合には、進行波電力から反射波電力を減じた負荷側電力に対応した負荷側電力信号Ｖｐｌを演算し、この負荷側電力信号Ｖｐｌを電力検出信号Ｖｐとする。進行波電力信号Ｖｐｆと負荷側電力信号Ｖｐｌのどちらを電力検出信号Ｖｐとするかは予め定めておく。そして、電力検出信号Ｖｐの大きさが、出力電力設定信号Ｖｐｓに電圧制御信号Ｖｖｃを加えた大きさと等しくなるように増幅部に指示値となる電力制御信号Ｖｐｃ１を出力する。
上記の関係を演算式で表すと式（１）となる。
Ｖｐｃ１∝（Ｖｐｓ＋Ｖｖｃ−Ｖｐ）・・・・・（１） The power control unit 16a includes a traveling wave power signal Vpf and a reflected wave power signal Vpr output from the power detection unit 13, an output power setting signal Vps output from the output power setting unit 15, and a voltage output from the voltage control unit 18. A control signal Vvc is input. Further, when the traveling wave power is controlled to be constant, the traveling wave power signal Vpf corresponding to the traveling wave power value is used as the power detection signal Vp, and when the load side power is controlled to be constant, the reflected wave from the traveling wave power is reflected. A load-side power signal Vpl corresponding to the load-side power with reduced power is calculated, and this load-side power signal Vpl is set as a power detection signal Vp. It is determined in advance which of the traveling wave power signal Vpf and the load side power signal Vpl is the power detection signal Vp. Then, the power control signal Vpc1 serving as an instruction value is output to the amplifier so that the magnitude of the power detection signal Vp is equal to the magnitude of the output power setting signal Vps plus the voltage control signal Vvc.
When the above relationship is expressed by an arithmetic expression, Expression (1) is obtained.
Vpc1∝ (Vps + Vvc−Vp) (1)

すなわち、整合器の整合部よりも負荷側の電圧検出値が電圧設定値以上の場合は、電力検出値が、電力設定値に等しくなるように制御する。
一方、整合器の整合部よりも負荷側の電圧検出値が電圧設定値未満の場合は、電力検出値が、電力設定値に不足分（電圧設定値−電圧検出値）に応じて変化する高周波電力の出力を増加させるための指令値を加えた値に等しくなるように制御して、整合器の整合部よりも負荷側の電圧検出値が電圧設定値よりも小さくならないように制御する。 That is, when the voltage detection value on the load side of the matching unit of the matching unit is equal to or higher than the voltage setting value, the power detection value is controlled to be equal to the power setting value.
On the other hand, when the voltage detection value on the load side of the matching unit of the matching unit is less than the voltage setting value, the power detection value changes to the power setting value according to the shortage (voltage setting value−voltage detection value). Control is performed so as to be equal to a value obtained by adding a command value for increasing the output of power, and control is performed so that the voltage detection value on the load side relative to the matching unit of the matching unit does not become smaller than the voltage setting value.

また、放電を利用するエッチング装置やＣＶＤ装置の場合、放電中に放電条件（放電ガスの種類、ガス流量、圧力等）を変更する場合がある。そのために、各放電条件のときの放電維持電圧以上の安定電圧と加工プロセスに必要な電力をそれぞれ出力電圧設定値、出力電力設定値として取り込むことで、最適な加工プロセスを行うことが可能となる。 In the case of an etching apparatus or a CVD apparatus that uses discharge, there are cases where discharge conditions (type of discharge gas, gas flow rate, pressure, etc.) are changed during discharge. For this reason, an optimum machining process can be performed by taking in a stable voltage that is equal to or higher than the discharge sustaining voltage under each discharge condition and the power required for the machining process as an output voltage set value and an output power set value, respectively. .

［第２の実施の形態］
図２は、第２の実施形態に係る高周波電源装置１ｂの構成、整合器３ｂの構成及び高周波電源装置１ｂと整合器３ｂと負荷５との接続関係を示すブロック図である。 [Second Embodiment]
FIG. 2 is a block diagram showing the configuration of the high-frequency power supply device 1b according to the second embodiment, the configuration of the matching device 3b, and the connection relationship between the high-frequency power supply device 1b, the matching device 3b, and the load 5.

（整合器の説明）
第２の実施形態に係る整合器３ｂは、従来技術の整合器３ｐに比べて、整合部３２と負荷５との間に流れる出力電流を検出する電流検出部３４を有する点が異なるが、他は従来の整合器３ｐと同様であり、高周波電源装置１ｂと負荷５との間をインピーダンス整合させる目的で用いられる装置である。この電流検出部３４は、整合器の整合部３２よりも負荷側に流れる出力電流を検出し、出力電流に対応した電流検出信号Ｖｉを出力する。 (Description of matcher)
The matching device 3b according to the second embodiment is different from the matching device 3p of the prior art in that the matching device 3b includes a current detection unit 34 that detects an output current flowing between the matching unit 32 and the load 5. Is the same as the conventional matching device 3p, and is a device used for impedance matching between the high frequency power supply device 1b and the load 5. The current detection unit 34 detects an output current that flows to the load side of the matching unit 32 of the matching unit, and outputs a current detection signal Vi corresponding to the output current.

（高周波電源装置の説明）
第２の実施形態に係る高周波電源装置１ｂは、伝送線路２及び整合器３及び負荷接続部４を介して、負荷５に高周波電力を供給するための電源装置である。また、一般にこの種の高周波電源装置では、数百ｋＨｚ以上の周波数の高周波電力を出力している。 (Description of high frequency power supply)
The high frequency power supply device 1 b according to the second embodiment is a power supply device for supplying high frequency power to the load 5 through the transmission line 2, the matching unit 3, and the load connection unit 4. In general, this type of high frequency power supply device outputs high frequency power having a frequency of several hundred kHz or more.

（高周波電源装置の内部構成についての説明）
発振部１１、増幅部１２、電力検出部１３および出力電力設定部１５は、第１の実施形態で説明した図１の高周波電源装置と同様であるので、説明を省略する。 (Description of internal configuration of high frequency power supply device)
The oscillating unit 11, the amplifying unit 12, the power detecting unit 13, and the output power setting unit 15 are the same as those of the high-frequency power supply device of FIG. 1 described in the first embodiment, and thus description thereof is omitted.

出力電流設定部２０は、整合器の出力電流設定値を定める出力電流設定信号Ｖｉｓを出力する。出力電流設定値は、放電負荷の場合、負荷電流が放電維持電流のときの整合器の出力電流よりも大きくするとよい。なお、出力電流設定信号Ｖｉｓは、高周波電源装置の外部にある他の装置から入力してもよい。 The output current setting unit 20 outputs an output current setting signal Vis that determines the output current setting value of the matching unit. In the case of a discharge load, the output current set value is preferably larger than the output current of the matching device when the load current is the discharge sustaining current. The output current setting signal Vis may be input from another device outside the high frequency power supply device.

電流制御部２１は、電流検出部３４から出力される電流検出信号Ｖｉと出力電流設定部２０から出力される出力電流設定信号Ｖｉｓとを入力し、電流制御信号Ｖｉｃを電力制御部１６ｂに出力する。電流制御信号Ｖｉｃは、電流検出信号Ｖｉの大きさが出力電流設定信号Ｖｉｓの大きさ以上のときには０Ｖの電圧信号であり、電流検出信号Ｖｉの大きさが出力電流設定信号Ｖｉｓの大きさ未満のときにはプラスの電圧信号である。このプラスの電圧信号の大きさは電流検出信号Ｖｉの大きさを出力電流設定信号Ｖｉｓの大きさにするための電圧値に相当する。なお、電流検出信号Ｖｉは、整合器の出力端子３０５および高周波電源装置の入力端子１０３介して電流制御部２１に入力される。 The current control unit 21 receives the current detection signal Vi output from the current detection unit 34 and the output current setting signal Vis output from the output current setting unit 20, and outputs the current control signal Vic to the power control unit 16b. . The current control signal Vic is a voltage signal of 0V when the magnitude of the current detection signal Vi is greater than or equal to the magnitude of the output current setting signal Vis, and the magnitude of the current detection signal Vi is less than the magnitude of the output current setting signal Vis. Sometimes it is a positive voltage signal. The magnitude of the positive voltage signal corresponds to a voltage value for setting the magnitude of the current detection signal Vi to the magnitude of the output current setting signal Vis. The current detection signal Vi is input to the current control unit 21 via the output terminal 305 of the matching unit and the input terminal 103 of the high frequency power supply device.

電力制御部１６ｂは、電力検出部１３から出力される進行波電力信号Ｖｐｆ及び反射波電力信号Ｖｐｒ、出力電力設定部１５から出力される出力電力設定信号Ｖｐｓ及び電流制御部２１から出力される電流制御信号Ｖｉｃを入力する。また、進行波電力を一定に制御する場合には、進行波電力値に対応した進行波電力信号Ｖｐｆを電力検出信号Ｖｐとし、負荷側電力一定に制御する場合には、進行波電力から反射波電力を減じた負荷側電力に対応した負荷側電力信号Ｖｐｌを演算し、この負荷側電力信号Ｖｐｌを電力検出信号Ｖｐとする。進行波電力信号Ｖｐｆと負荷側電力信号Ｖｐｌのどちらを電力検出信号Ｖｐとするかは予め定めておく。そして、電力検出信号Ｖｐの大きさが、出力電力設定信号Ｖｐｓに電流制御信号Ｖｉｃを加えた大きさと等しくなるように増幅部に指示値となる電力制御信号Ｖｐｃ２を出力する。
上記の関係を演算式で表すと式（２）となる。
Ｖｐｃ２∝（Ｖｐｓ＋Ｖｉｃ−Ｖｐ）・・・・・（２） The power control unit 16b includes a traveling wave power signal Vpf and a reflected wave power signal Vpr output from the power detection unit 13, an output power setting signal Vps output from the output power setting unit 15, and a current output from the current control unit 21. The control signal Vic is input. Further, when the traveling wave power is controlled to be constant, the traveling wave power signal Vpf corresponding to the traveling wave power value is used as the power detection signal Vp, and when the load side power is controlled to be constant, the reflected wave from the traveling wave power is reflected. A load-side power signal Vpl corresponding to the load-side power with reduced power is calculated, and this load-side power signal Vpl is set as a power detection signal Vp. It is determined in advance which of the traveling wave power signal Vpf and the load side power signal Vpl is the power detection signal Vp. Then, the power control signal Vpc2 serving as an instruction value is output to the amplifier so that the magnitude of the power detection signal Vp is equal to the magnitude obtained by adding the current control signal Vic to the output power setting signal Vps.
When the above relationship is expressed by an arithmetic expression, Expression (2) is obtained.
Vpc2∝ (Vps + Vic−Vp) (2)

すなわち、整合器の整合部よりも負荷側の電流検出値が電流設定値以上の場合は、電力検出値が、電力設定値に等しくなるように制御する。
一方、整合器の整合部よりも負荷側の電流検出値が電流設定値未満の場合は、電力検出値が、電力設定値に不足分（電流設定値−電流検出値）に応じて変化する高周波電力の出力を増加させるための指令値を加えた値に等しくなるように制御して、整合器の整合部よりも負荷側の電流検出値が電流設定値よりも小さくならないように制御する。 That is, when the current detection value on the load side of the matching unit of the matching unit is equal to or greater than the current set value, control is performed so that the power detected value is equal to the power set value.
On the other hand, when the current detection value on the load side of the matching unit of the matching unit is less than the current setting value, the power detection value changes to the power setting value in accordance with the shortage (current setting value−current detection value). Control is performed so as to be equal to a value obtained by adding a command value for increasing the output of electric power, and control is performed so that the current detection value on the load side of the matching unit of the matching unit does not become smaller than the current set value.

また、放電を利用するエッチング装置やＣＶＤ装置の場合、放電中に放電条件（放電ガスの種類、ガス流量、圧力等）を変更する場合がある。そのために、各放電条件のときの放電維持電流以上の安定電流と加工プロセスに必要な電力をそれぞれ出力電流設定値、出力電力設定値として取り込むことで、最適な加工プロセスを行うことが可能となる。 In the case of an etching apparatus or a CVD apparatus that uses discharge, there are cases where discharge conditions (type of discharge gas, gas flow rate, pressure, etc.) are changed during discharge. For this reason, an optimum machining process can be performed by taking in a stable current that is equal to or greater than the discharge sustaining current under each discharge condition and the power required for the machining process as an output current set value and an output power set value, respectively. .

［第３の実施の形態］
図３は、第３の実施形態に係る高周波電源装置１ｃの構成、整合器３ａの構成及び高周波電源装置１ｃと整合器３ａと負荷５との接続関係を示すブロック図である。 [Third Embodiment]
FIG. 3 is a block diagram illustrating the configuration of the high-frequency power supply device 1c according to the third embodiment, the configuration of the matching device 3a, and the connection relationship between the high-frequency power supply device 1c, the matching device 3a, and the load 5.

（整合器の説明）
整合器３ａは、図１と同様であるので説明を省略する。 (Description of matcher)
The matching unit 3a is the same as that shown in FIG.

（高周波電源装置の説明）
第３の実施形態に係る高周波電源装置１ｃは、図１で説明した第１の実施形態に係る高周波電源装置１ａに比べて、電力制御部１６ａが電力制御部１６ｃに変更されている点が異なる。そのために、電力制御部１６ｃについて説明する。その他は、図１の高周波電源装置と同様であるので、説明を省略する。 (Description of high frequency power supply)
The high frequency power supply device 1c according to the third embodiment is different from the high frequency power supply device 1a according to the first embodiment described in FIG. 1 in that the power control unit 16a is changed to a power control unit 16c. . Therefore, the power control unit 16c will be described. The rest of the configuration is the same as that of the high frequency power supply device of FIG.

電力制御部１６ｃは、電力検出部１３から出力される進行波電力信号Ｖｐｆ及び反射波電力信号Ｖｐｒ、出力電力設定部１５から出力される出力電力設定信号Ｖｐｓ及び電圧制御部１８から出力される電圧制御信号Ｖｖｃを入力する。また、進行波電力を一定に制御する場合には、進行波電力値に対応した進行波電力信号Ｖｐｆを電力検出信号Ｖｐとし、負荷側電力一定に制御する場合には、進行波電力から反射波電力を減じた負荷側電力に対応した負荷側電力信号Ｖｐｌを演算し、この負荷側電力信号Ｖｐｌを電力検出信号Ｖｐとする。進行波電力信号Ｖｐｆと負荷側電力信号Ｖｐｌのどちらを電力検出信号Ｖｐとするかは予め定めておく。
そして、電圧制御信号Ｖｖｃが０Ｖの電圧信号のときには、電力検出信号Ｖｐの大きさが、出力電力設定信号Ｖｐｓの大きさと等しくなるように増幅部に指示値となる電力制御信号Ｖｐｃ３を出力する。また、電圧制御信号Ｖｖｃがプラスの電圧信号のときには、電力検出信号Ｖｐの大きさが、電圧制御信号Ｖｖｃの大きさと等しくなるように増幅部に指示値となる電力制御信号Ｖｐｃ３を出力する。
上記の関係を演算式で表すと、整合器３ａの出力電圧が電圧設定値以上の場合は式（３）となり、整合器３ａの出力電圧が電圧設定値未満の場合は式（４）となる。
Ｖｐｃ３∝（Ｖｐｓ−Ｖｐ）・・・・・（３）
Ｖｐｃ３∝（Ｖｖｃ−Ｖｐ）・・・・・（４） The power control unit 16 c includes a traveling wave power signal Vpf and a reflected wave power signal Vpr output from the power detection unit 13, an output power setting signal Vps output from the output power setting unit 15, and a voltage output from the voltage control unit 18. A control signal Vvc is input. Further, when the traveling wave power is controlled to be constant, the traveling wave power signal Vpf corresponding to the traveling wave power value is used as the power detection signal Vp, and when the load side power is controlled to be constant, the reflected wave from the traveling wave power is reflected. A load-side power signal Vpl corresponding to the load-side power with reduced power is calculated, and this load-side power signal Vpl is set as a power detection signal Vp. It is determined in advance which of the traveling wave power signal Vpf and the load side power signal Vpl is the power detection signal Vp.
When the voltage control signal Vvc is a voltage signal of 0 V, the power control signal Vpc3 serving as an instruction value is output to the amplifier so that the magnitude of the power detection signal Vp is equal to the magnitude of the output power setting signal Vps. When the voltage control signal Vvc is a positive voltage signal, the power control signal Vpc3 serving as an instruction value is output to the amplifier so that the magnitude of the power detection signal Vp is equal to the magnitude of the voltage control signal Vvc.
When the above relationship is expressed by an arithmetic expression, Expression (3) is obtained when the output voltage of the matching device 3a is equal to or higher than the voltage setting value, and Expression (4) is obtained when the output voltage of the matching device 3a is less than the voltage setting value. .
Vpc3∝ (Vps-Vp) (3)
Vpc3∝ (Vvc−Vp) (4)

すなわち、整合器の整合部よりも負荷側の電圧検出値が電圧設定値以上の場合は、電力検出値が、電力設定値に等しくなるように制御する。
一方、整合器の整合部よりも負荷側の電圧検出値が電圧設定値未満の場合は、電力検出値が、不足分（電圧設定値−電圧検出値）に応じて変化する高周波電力の出力を増加させるための指令値に等しくなるように制御して、整合器の整合部よりも負荷側の電圧検出値が電圧設定値よりも小さくならないように制御する。 That is, when the voltage detection value on the load side of the matching unit of the matching unit is equal to or higher than the voltage setting value, the power detection value is controlled to be equal to the power setting value.
On the other hand, when the voltage detection value on the load side of the matching unit of the matching unit is less than the voltage setting value, the power detection value is an output of high-frequency power that changes according to the shortage (voltage setting value−voltage detection value). Control is performed so as to be equal to the command value for increase, and control is performed so that the voltage detection value on the load side of the matching unit of the matching unit does not become smaller than the voltage setting value.

［第４の実施の形態］
図４は、第４の実施形態に係る高周波電源装置１ｄの構成、整合器３ｂの構成及び高周波電源装置１ｄと整合器３ｂと負荷５との接続関係を示すブロック図である。 [Fourth Embodiment]
FIG. 4 is a block diagram showing the configuration of the high frequency power supply device 1d according to the fourth embodiment, the configuration of the matching device 3b, and the connection relationship between the high frequency power supply device 1d, the matching device 3b, and the load 5.

（整合器の説明）
整合器３ｂは、図２と同様であるので説明を省略する。 (Description of matcher)
The matching unit 3b is the same as that shown in FIG.

（高周波電源装置の説明）
第４の実施形態に係る高周波電源装置１ｄは、図２で説明した第２の実施形態に係る高周波電源装置１ｂに比べて、電力制御部１６ｂが電力制御部１６ｄに変更されている点が異なる。そのために、電力制御部１６ｄについて説明する。その他は、図１の高周波電源装置と同様であるので、説明を省略する。 (Description of high frequency power supply)
The high frequency power supply device 1d according to the fourth embodiment is different from the high frequency power supply device 1b according to the second embodiment described in FIG. 2 in that the power control unit 16b is changed to the power control unit 16d. . Therefore, the power control unit 16d will be described. The rest of the configuration is the same as that of the high frequency power supply device of FIG.

電力制御部１６ｄは、電力検出部１３から出力される進行波電力信号Ｖｐｆ及び反射波電力信号Ｖｐｒ、出力電力設定部１５から出力される出力電力設定信号Ｖｐｓ及び電流制御部２１から出力される電流制御信号Ｖｉｃを入力する。また、進行波電力を一定に制御する場合には、進行波電力値に対応した進行波電力信号Ｖｐｆを電力検出信号Ｖｐとし、負荷側電力一定に制御する場合には、進行波電力から反射波電力を減じた負荷側電力に対応した負荷側電力信号Ｖｐｌを演算し、この負荷側電力信号Ｖｐｌを電力検出信号Ｖｐとする。進行波電力信号Ｖｐｆと負荷側電力信号Ｖｐｌのどちらを電力検出信号Ｖｐとするかは予め定めておく。
そして、電流制御信号Ｖｉｃが０Ｖの電圧信号のときには、電力検出信号Ｖｐの大きさが、出力電力設定信号Ｖｐｓの大きさと等しくなるように増幅部に指示値となる電力制御信号Ｖｐｃ４を出力する。また、電流制御信号Ｖｉｃがプラスの電圧信号のときには、電力検出信号Ｖｐの大きさが、電流制御信号Ｖｉｃの大きさと等しくなるように増幅部に指示値となる電力制御信号Ｖｐｃ４を出力する。
上記の関係を演算式で表すと、整合器３ｂの出力電流が電流設定値以上の場合は式（５）となり、整合器３ｂの出力電流が電流設定値未満の場合は式（６）となる。
Ｖｐｃ４∝（Ｖｐｓ−Ｖｐ）・・・・・（５）
Ｖｐｃ４∝（Ｖｉｃ−Ｖｐ）・・・・・（６） The power control unit 16d is a traveling wave power signal Vpf and a reflected wave power signal Vpr output from the power detection unit 13, an output power setting signal Vps output from the output power setting unit 15, and a current output from the current control unit 21. The control signal Vic is input. Further, when the traveling wave power is controlled to be constant, the traveling wave power signal Vpf corresponding to the traveling wave power value is used as the power detection signal Vp, and when the load side power is controlled to be constant, the reflected wave from the traveling wave power is reflected. A load-side power signal Vpl corresponding to the load-side power with reduced power is calculated, and this load-side power signal Vpl is set as a power detection signal Vp. It is determined in advance which of the traveling wave power signal Vpf and the load side power signal Vpl is the power detection signal Vp.
When the current control signal Vic is a voltage signal of 0V, the power control signal Vpc4 serving as an instruction value is output to the amplifying unit so that the magnitude of the power detection signal Vp is equal to the magnitude of the output power setting signal Vps. When the current control signal Vic is a positive voltage signal, the power control signal Vpc4 serving as an instruction value is output to the amplifier so that the magnitude of the power detection signal Vp is equal to the magnitude of the current control signal Vic.
When the above relationship is expressed by an arithmetic expression, Expression (5) is obtained when the output current of the matching unit 3b is equal to or greater than the current set value, and Expression (6) is obtained when the output current of the matching unit 3b is less than the current set value. .
Vpc4∝ (Vps-Vp) (5)
Vpc4∝ (Vic-Vp) (6)

すなわち、整合器の整合部よりも負荷側の電流検出値が電流設定値以上の場合は、電力検出値が、電力設定値に等しくなるように制御する。
一方、整合器の整合部よりも負荷側の電流検出値が電流設定値未満の場合は、電力検出値が、不足分（電流設定値−電流検出値）に応じて変化する高周波電力の出力を増加させるための指令値に等しくなるように制御して、整合器の整合部よりも負荷側の電流検出値が電流設定値よりも小さくならないように制御する。 That is, when the current detection value on the load side of the matching unit of the matching unit is equal to or greater than the current set value, control is performed so that the power detected value is equal to the power set value.
On the other hand, when the current detection value on the load side of the matching unit of the matching unit is less than the current setting value, the power detection value is an output of high-frequency power that changes according to the shortage (current setting value−current detection value). Control is performed so as to be equal to the command value for increase, and control is performed so that the current detection value on the load side relative to the matching unit of the matching unit does not become smaller than the current set value.

なお、図１、図３では、整合器の内部に電圧検出部を設けて整合器の出力電圧を検出しているが、負荷の両端の電圧を検出するようにしてもよい。また、図２、図４では、整合器の内部に電流検出部を設けて整合器の出力電流を検出しているが、負荷に流れる電流を検出してもよい。 In FIG. 1 and FIG. 3, the voltage detector is provided inside the matching unit to detect the output voltage of the matching unit, but the voltage at both ends of the load may be detected. 2 and 4, the current detector is provided inside the matching unit to detect the output current of the matching unit. However, the current flowing through the load may be detected.

図１は、第１の実施形態に係る高周波電源装置１ａの構成、整合器３ａの構成及び高周波電源装置１ａと整合器３ａと負荷５との接続関係を示すブロック図である。FIG. 1 is a block diagram illustrating the configuration of the high-frequency power supply device 1a according to the first embodiment, the configuration of the matching device 3a, and the connection relationship between the high-frequency power supply device 1a, the matching device 3a, and the load 5. 図２は、第２の実施形態に係る高周波電源装置１ｂの構成、整合器３ｂの構成及び高周波電源装置１ｂと整合器３ｂと負荷５との接続関係を示すブロック図である。FIG. 2 is a block diagram showing the configuration of the high-frequency power supply device 1b according to the second embodiment, the configuration of the matching device 3b, and the connection relationship between the high-frequency power supply device 1b, the matching device 3b, and the load 5. 図３は、第３の実施形態に係る高周波電源装置１ｃの構成、整合器３ａの構成及び高周波電源装置１ｃと整合器３ａと負荷５との接続関係を示すブロック図である。FIG. 3 is a block diagram illustrating the configuration of the high-frequency power supply device 1c according to the third embodiment, the configuration of the matching device 3a, and the connection relationship between the high-frequency power supply device 1c, the matching device 3a, and the load 5. 図４は、第４の実施形態に係る高周波電源装置１ｄの構成、整合器３ｂの構成及び高周波電源装置１ｄと整合器３ｂと負荷５との接続関係を示すブロック図である。FIG. 4 is a block diagram showing the configuration of the high frequency power supply device 1d according to the fourth embodiment, the configuration of the matching device 3b, and the connection relationship between the high frequency power supply device 1d, the matching device 3b, and the load 5. 図５は、従来の高周波電源装置１ｐの構成、整合器３ｐの構成及び高周波電源装置１ｐと整合器３ｐと負荷５との接続関係を示すブロック図である。FIG. 5 is a block diagram showing the configuration of the conventional high-frequency power supply device 1p, the configuration of the matching device 3p, and the connection relationship between the high-frequency power supply device 1p, the matching device 3p, and the load 5.

１ａ第１の実施形態に係る高周波電源装置
１ｂ第２の実施形態に係る高周波電源装置
１ｃ第３の実施形態に係る高周波電源装置
１ｄ第４の実施形態に係る高周波電源装置
１ｐ従来の高周波電源装置
２伝送線路
３ａ第１、第３の実施形態に係る整合器
３ｂ第２、第４の実施形態に係る整合器
３ｐ従来の整合器
４負荷接続部
５負荷
１１発振部
１２増幅部
１３電力検出部
１５出力電力設定部
１６電力制御部
１７出力電圧設定部
１８電圧制御部
２０出力電流設定部
２１電流制御部
２２電圧電流選択部
３１整合器制御部
３２整合部
３３電圧検出部
３４電流検出部

High-frequency power supply device 1p conventional high-frequency power supply device according to 1a first embodiment the high-frequency power supply device 1d fourth of the high-frequency power supply device 1c a third embodiment of the high-frequency power supply device 1b a second embodiment according to the embodiment 2 transmission line 3a first, third matching unit 3b second according to the embodiment, the matching unit 3p conventional matching unit 4 load connection portion 5 a load 11 oscillation unit 12 amplifying section 13 power detector according to the fourth embodiment DESCRIPTION OF SYMBOLS 15 Output power setting part 16 Power control part 17 Output voltage setting part 18 Voltage control part 20 Output current setting part 21 Current control part 22 Voltage current selection part 31 Matching device control part 32 Matching part 33 Voltage detection part 34 Current detection part

Claims

In an output power control method of a high frequency power source that supplies high frequency power to a load via a matching unit,
A current setting value larger than the current detection value on the load side than the matching unit of the matching device when the current of the load is the minimum current that can maintain discharge is set in advance,
If the current detection value is greater than or equal to the current setting value, control the high-frequency power output so that the power detection value is equal to a preset power setting value,
When the detected current value is less than the current set value, a positive command value that changes according to a value obtained by subtracting the current detected value from the current set value is added to the power set value, and the command value is added to the power set value. An output power control method for a high frequency power source, comprising: controlling high frequency power output so that a value added to a set value is equal to the detected power value.

In an output power control method of a high frequency power source that supplies high frequency power to a load via a matching unit,
A current setting value larger than the current detection value on the load side than the matching unit of the matching device when the current of the load is the minimum current that can maintain discharge is set in advance,
If the current detection value is greater than or equal to the current setting value, control the high-frequency power output so that the power detection value is equal to a preset power setting value,
When the detected current value is less than the set current value, high-frequency power that is output so that the detected power value becomes equal to the command value that changes in accordance with a value obtained by subtracting the detected current value from the set current value. An output power control method for a high frequency power supply, characterized in that the command value is a value for increasing the output high frequency power.

In a high-frequency power supply device that supplies high-frequency power to a load via a matching unit,
A current detection unit for detecting a current on the load side of the matching unit of the matching unit;
An output current setting unit that presets a current setting value larger than the current detection value on the load side of the matching unit of the matching unit when the current of the load is the minimum current that can maintain discharge;
The current detection value detected by the current detection unit is compared with the current setting value, and if the current detection value is equal to or greater than the current setting value, a command value for increasing the output of high-frequency power is not output, When the detected current value is less than the current set value, a current that changes according to a value obtained by subtracting the detected current value from the current set value and outputs a positive command value for increasing the output of the high-frequency power A control unit;
A power detection unit that detects traveling wave power output from the high-frequency power supply device toward the load, or detects traveling wave power and reflected wave power reflected from the load side;
The detected value of the traveling wave power detected by the power detection unit or the detected value of the load side power obtained by subtracting the detected value of the reflected wave power from the detected value of the traveling wave power is set to a preset power setting value. A power control unit that outputs a power control signal for controlling to be equal to a value obtained by adding the command value output from
A high-frequency power supply apparatus comprising: an amplifying unit that outputs high-frequency power whose output value is increased or decreased according to a power control signal output from the power control unit.

In a high-frequency power supply device that supplies high-frequency power to a load via a matching unit,
A current detection unit for detecting a current on the load side of the matching unit of the matching unit;
An output current setting unit that presets a current setting value larger than the current detection value on the load side of the matching unit of the matching unit when the current of the load is the minimum current that can maintain discharge;
The current detection value detected by the current detection unit is compared with the current setting value, and if the current detection value is equal to or greater than the current setting value, a command value for increasing the output of high-frequency power is not output, A current control unit that outputs a command value for increasing the output of high-frequency power, which is a value that changes according to a value obtained by subtracting the current detection value from the current setting value when the current detection value is less than the current setting value When,
A power detection unit that detects traveling wave power output from the high-frequency power supply device toward the load, or detects traveling wave power and reflected wave power reflected from the load side;
When the current detection value is equal to or greater than the current setting value, the detection value of the traveling wave power detected by the power detection unit or the detection value of the load side power obtained by subtracting the detection value of the reflected wave power from the detection value of the traveling wave power Outputs a power control signal for controlling high-frequency power to be output so as to be equal to a preset power setting value, and when the current detection value is less than the current setting value, it is detected by the power detection unit High-frequency power that is output so that the detected value of the traveling wave power or the detected value of the load-side power obtained by subtracting the detected value of the reflected wave power from the detected value of the traveling wave power is equal to the command value output from the current control unit A power control unit that outputs a power control signal for controlling
A high-frequency power supply apparatus comprising: an amplifying unit that outputs high-frequency power whose output value is increased or decreased according to a power control signal output from the power control unit.