JP4766862B2 - Surface treatment equipment - Google Patents

Description

In the present invention, a flat plate-shaped object fed and transported in a vertically suspended state from the front side is carried into a treatment tank filled with a treatment liquid, and the flat plate-shaped object is subjected to surface treatment in the treatment liquid, and after the surface treatment. The present invention relates to a surface treatment apparatus for a plate-shaped object for continuously surface-treating a plurality of plate-shaped objects by discharging and conveying the plate-shaped object to the rear side.

  The surface treatment method is roughly classified into a batch treatment method and a continuous treatment method. FIG. 10 shows the former surface treatment apparatus, and FIG. 11 shows the latter surface treatment apparatus.

  In FIG. 10, among a number of processing tanks (for example, 10 PA to 10PX) arranged in the transfer (X) direction from the front side (left direction in the figure) to the rear side, the N-th processing tank 10PN and this The upstream (front side) processing tank 10PM and the downstream (rear side) processing tank 10PO will be described.

  The workpiece (object to be processed) 200 whose surface treatment has been completed in the treatment tank 10PM is conveyed (lifted and raised) in the vertical (V1) direction by the lifting means (work conveying means), and then horizontally by the horizontal conveying means (work conveying means). Then, it is transported in the (H1) direction, and then transported (lowered) in the vertical (V2) direction again by the lifting / lowering means (work transporting means) and transported into the processing tank 10PN. In addition, the workpiece (object to be processed) 200 that has been subjected to the surface treatment in the treatment tank 10PN is transported (lifted) in the vertical (V3) direction by the elevating means and is carried out of the treatment tank 10PN. After that, it is transferred to the treatment tank 10PO through horizontal (H3) transfer or the like.

  When the surface treatment time in the treatment tank 10PN is longer than that in the other tank, the workpiece 200 is continuously (constant speed) or intermittently horizontal (H2) in the treatment tank 10PN as indicated by the dotted line. ) Be transported. Or, it arrange | positions by dividing | segmenting into several (for example, four) processing tanks (10PN-1, ..., 10PN-4), and carries in / out a workpiece | work in order.

  Therefore, this batch processing method is easy to adopt when the surface treatment (for example, electrolytic treatment) time is relatively long, and has wide applicability to the workpiece form. However, since the workpiece 200 has to be raised and lowered between the treatment tanks, it is difficult to improve the productivity further, and depending on the properties of the liquid remaining on the workpiece surface, during the transfer (V1, H1, V2) on the tank. An excessive reaction is induced, oxidation due to atmospheric contact proceeds, and dust adheres to the work surface. Both are directly related to quality degradation. When divided into a plurality of treatment tanks (10PN-1,..., 10PN-4), quality variations are likely to occur due to difficulty in managing the liquid composition. Moreover, since the height of the apparatus is more than twice the height of the tank for raising and lowering the workpiece, the equipment economy is disadvantageous and dangerous work at high places is unavoidable. There are also many opportunities to pollute the surroundings.

  Next, in FIG. 11, the workpiece 200 conveyed in the X direction from the processing tank 10PM on the front side (right side) by the horizontal continuous conveyance means (work conveyance means) passes through the front opening 11PN and the Nth processing tank 10PN. The surface treatment is performed during the continuous transition in the tank, and after the treatment, the sheet is conveyed to the treatment tank 10PO on the rear side (left side) through the rear opening (not shown). The treatment liquid (Qr) leaked from each opening is collected in the collection tank 17PN and recirculated.

  Therefore, it is easy to adopt when the workpiece 200 is a continuous material (for example, a wire or a strip-like long material), and the productivity is high because continuous conveyance and continuous processing can be performed. Since the liquid composition can also be made uniform, stable quality processing can be performed. In addition, problems with the batch processing system (difficulty in liquid composition management when divided, dust adhesion, necessity of dangerous work at high places, etc.) can be eliminated. However, since the liquid amount Qr leaking from the opening 11PN is large, the recovery tank 17PN, the liquid circulation pump, and the like are increased in size. When the processing time is long (for example, 20 minutes or more), the entire length of the apparatus becomes long. In particular, there is a drawback that the adaptability to the workpiece form is very narrow.

  Here, when the workpiece 200 is a single flat plate-like object (for example, a printed circuit board), one of the methods is selected and the surface treatment apparatus is in consideration of the advantages and disadvantages of each method. It has been adopted. Regardless of which method (apparatus) is selected, due to the particularity of the workpiece (flat plate-shaped object) form, the vertical suspension in which the upper end (one side) of the flat plate-shaped object (200) is held by a jig on the workpiece transfer means side It is conveyed in a state (a state in which both sides are vertical). That is, the workpiece conveying means is formed to horizontally convey the flat plate shaped object (200) by moving the jig in the X direction in a horizontal state (a state in which the jig is held at a predetermined constant height).

  That is, in the surface treatment apparatus for a flat plate shaped object (200), the processing liquid is filled with the flat plate shaped material fed and conveyed in a vertically suspended state from the front side (upstream treatment tank) using the work conveying means. It is immersed in the treatment liquid while being carried into the treatment tank (10PN). The loaded flat plate-shaped object is surface-treated in the treatment liquid of the treatment tank, and is carried out of the treatment tank after the surface treatment and discharged to the rear side (downstream treatment tank). Thus, the surface treatment can be performed continuously or continuously on a plurality of flat plate-shaped objects.

  By the way, in the case of a conventional surface processing apparatus of a batch processing system (FIG. 10), the upper end portion is sandwiched and the lower end portion is in a free state, and a vertically suspended flat plate-shaped object as a whole is disposed in the processing tank (10PN). It is very difficult to move down into the processing solution. That is, when the lower end portion (free end) is put into the processing liquid (resistance) (conveyed downward), the workpiece 200 is shaken or vibrated, and further deformed or bent.

  In this regard, in the conventional surface treatment apparatus (see Patent Document 1), the vertical suspension state maintaining means is incorporated in each treatment tank, and the plate-shaped object in the vertical suspension state (state) is lowered while being submerged in the liquid in the treatment tank. Prior to being immersed in the plate, a large number of holding pieces are brought close to each other from both sides of the flat plate-shaped object, and the vertically suspended state is forcibly and mechanically maintained by utilizing the forced pressing force.

  However, the vertical suspension state maintaining means has a complicated structure including a frame, a movable member, a separation approach drive mechanism, a large number of clamping pieces, a drive source, and the like, and is larger than the size of the processing tank (10PN). Since it is a scale, each processing tank must be enlarged as a result, resulting in high costs. Lowering the height of the device also hinders the burden of maintenance for maintaining smooth operation.

  On the other hand, in the case of a conventional surface treatment apparatus of a continuous treatment system (see FIG. 11), in order to reduce the amount of liquid leakage Qr from the front opening 11PN, a pair of carry-in guide rollers shown in FIG. The distance S1 between 81PL and 81PR or the distance S2 between the pair of carry-in guide blades 82PL and 82PR made of an elastic material shown in FIG. 12B must be extremely small. Therefore, in a state where the liquid leakage amount Qr is constrained to a satisfactory level, the tip of the flat plate-shaped object to be introduced into the processing tank collides with the guides (81PL, 81PR, 82PL, 82PR).

  Therefore, a surface treatment apparatus is proposed in which a conveyance guide means is provided in the treatment tank, a liquid jet introduction guide means is provided on the upstream side, and a vertically suspended state maintaining means is provided on the further upstream side (front side) (see Patent Document 2). See).

  The liquid jet introduction guide means is for forcibly jetting the liquid from both sides of the flat plate-shaped object being transported to prevent the tip of the flat plate-shaped object from colliding with the transport guide. Further, the vertically suspended state maintaining means has the same structure as that of the vertically suspended state maintaining means according to Patent Document 1 described above.

In other words, the surface treatment apparatus (Patent Document 2) assumes that collision with the carry-in guide or the like is unavoidable in the pure continuous treatment method, and the vertical treatment is maintained in the liquid as in the case of the batch treatment method. It is understood that this is an eclectic configuration of both types performed by means. However, since most of the problems of each method cannot be solved, it is adopted only for limited works.
JP 2002-285398 A JP 2002-285396 A

  By the way, while the thickness of the flat plate-shaped object (work 200) is much thinner and more likely to be flexible, there is no limit to the demand for quality improvement. Therefore, in order to achieve further quality improvement, there are many items that are not allowed in the conventional method (apparatus).

  In the conventional continuous processing apparatus (FIG. 11), when the workpiece 200 is loaded (injected) into the treatment tank (10PN) against and against a large amount of leaked liquid flow (Qr), the workpiece and components (such as a loading guide). ) Cannot be avoided, but the collision itself is likely to damage the workpiece surface, leading to a reduction in quality, making it difficult to allow. This is even more so if the workpiece becomes one step thinner.

  In addition, the conventional batch processing apparatus (FIG. 10) in which the workpiece 200 is plunged into the processing liquid from the lower end (free end) side of the workpiece 200 has a complicated structure and requires careful operation and handling. Since there is a strong possibility that the workpiece 100 may be damaged due to mechanical contact with the piece, the conventional method of carrying in (injecting) into the processing tank using the vertically suspended state maintaining means is often not allowed. That is, there is an increasing tendency for workpieces (flat plate-like objects) that are inappropriate to use the conventional vertically suspended state maintaining means having a structure in which the processing surface is sandwiched by the sandwiching pieces. Note that quality assurance is difficult with the above-described conventional eclectic apparatus.

  Thus, conventionally, in the case of a workpiece made of a single flat plate, the actual situation is that a batch processing method has to be adopted although there are some disadvantages in the case of a workpiece made of a single flat plate.

  However, at the present time when higher quality of electronic parts and electronic devices is advanced, and further downsizing and cost reduction are strongly demanded, it tends to be difficult to compromise the conventional batch processing apparatus. In other words, in terms of production efficiency, not only has it been pointed out that rising / lowering (conveying) between treatment tanks can be wiped out, but also phenomena that occur during ascending / horizontal movement / descending (for example, reactions due to residual liquid, adhesion of dust in the atmosphere) It is pointed out that, in terms of quality assurance, mist adhesion from other processing tanks, contact with other structures and deformation of flat plate-like objects due to external forces and generation of scratches are not recognized.

  Furthermore, it is pointed out that the delay in the surface treatment equipment will jeopardize the international competitiveness of electronic equipment as the quality of products increases. That is, there is a strong demand for innovative device development that goes beyond the gradual improvement over conventional devices (FIGS. 10 and 11).

  An object of the present invention is to provide a surface treatment method and a surface treatment apparatus for a flat plate-like object capable of reliably performing high quality treatment.

  In light of the many production results of the conventional equipment and the actual operation, the system is partially and complementary to the basic technical matters of the system (apparatus). In the case of changes / improvements, it has been found that while the major risks (complexity and size of the structure, high cost of equipment, difficulty in maintenance, shortening of service life) occur, the degree of quality improvement is minor. .

  Therefore, conditions for the creation of a drastic and innovative third method (Condition 1: Plate-shaped objects are transported in a vertically suspended state. Condition 2: Cleaning up and down transport between treatment tanks is eliminated. Condition 3: Horizontal transport at a constant height over the entire length of the apparatus Condition 4: Do not directly enter the processing liquid from the atmosphere Condition 5: Prevent collision between the flat plate and other structures (Condition 6: Minimize the amount of processing liquid leaking from the processing tank during loading / conveying, Condition 7: Minimizing the height of the apparatus)). This condition was determined by taking advantage of the advantages of the conventional continuous processing method and batch processing method and excluding the disadvantages.

  As a result of repeated tests and research aimed at this, the shape of the workpiece (flat plate) is unique, that is, the volume of the treatment tank (treatment liquid) necessary only to accommodate the flat plate ( A large number of cases were devised with a strong recognition of the fact that the amount (accommodated) may be very small and the fact that deformation, bending, and scratches that cannot be ignored for quality assurance are caused when a workpiece enters the liquid from the atmosphere. From this idea, I was able to come up with a unique method and device with high practicality (installing tidal tanks before and after the treatment tank).

  That is, the present invention introduces a plate-shaped object fed and transported from the front side into the pre-dried tank in the dry state and then adjusts to the full state, and then horizontally moves in the processing liquid for processing. It is carried into the tank, and after the surface treatment, it is moved horizontally in the treatment liquid and led to the post-stage tidal tank in the full liquid state, then adjusted to the dry liquid state, and then discharged and transported to the rear side. Related to different ideas.

  Specifically, the invention of claim 1 includes a first step of supplying a treatment liquid after introducing a flat plate-like object into a pre-driving tank in a dry state and switching the pre-driving tank to a full state, The second step of transferring the flat plate-shaped object from the pre-dried tank to the treatment tank after switching the liquid state between the pre-drying tank and the treatment tank, and the pre-till after the previous plate-shaped object is loaded A third step of switching between the tank and the treatment tank to an isolated state and discharging the treatment liquid before the next plate-shaped object is introduced to switch the pre-tidal tank to the dry state; and after finishing the surface treatment A fourth step of transferring the flat plate-shaped object from the processing tank to the post-driving tank after switching between the processing tank and the post-treatment tidal tank in the full liquid state; The fifth step of switching the post-driving tank to the dry state by discharging the processing liquid of the post-drying tank after switching between the two And a sixth step of supplying the treatment liquid after the previous flat plate-shaped object is unloaded and before the next flat plate-shaped object is unloaded from the processing tank, and switching the post-driving tank to the full liquid state. Is the method.

  In the invention of claim 2, a pre-tidal tank is disposed on the front side of the treatment tank, and a post-tidal tank is disposed on the rear side. It can be selectively switched to either the state or the full liquid state, and either the communication state or the isolation state between the front and bottom tanks and the processing tank and the rear and bottom tanks. It can be selectively switched, and after the flat plate is introduced into the pre-driving tank in the dry state, the pre-drying tank can be switched to the full liquid state. After switching between the processing tank to the communication state, it is possible to carry the flat plate-shaped object from the pre-tidal tank to the processing tank, and after loading the flat plate object, switch between the processing tank and the pre-tidal tank to the isolated state. After the surface treatment is completed, communication is established between the treatment tank and the full tank after the surface treatment. The plate-shaped object can be carried out from the treatment tank to the post-stage tidal tank after switching to the state, and after the carry-out, the separation between the treatment tank and the post-stage tidal tank is switched to the isolated state and then the post-stage tidal tank is switched to the dry state. It is possible to form a post-driving tank in a dry state so that it can be switched to a full liquid state before the next plate-shaped object is carried out of the treatment tank. The surface is formed so that it can pass through the treatment tank in a horizontal state at a predetermined height and be discharged and conveyed to the rear side by passing the plate-shaped object that has been fed and conveyed in the front and back tidal tanks It is a processing device.

  According to a third aspect of the present invention, there is provided a pre-tidal tank having an introduction passage portion that can be opened and closed by an introduction-side gate, on the front side of the processing tank, and a loading-side gate between the pre-tidal tank and the processing tank. A post-loading tank having a discharge passage portion that can be opened and closed at the outlet side and having a discharge passage portion that can be opened and closed by a discharge-side gate is disposed on the front side of the processing tank, and the discharge side is disposed between the processing tank and the downstream tank. An unloading passage section that can be opened and closed by a gate is provided, and an introduction side gate opening / closing means, a front side liquid supply means, a front side liquid discharge means, and a loading side gate opening / closing means and a discharge side gate opening / closing for a processing tank are provided. Means, a post-side liquid supply means, a post-side liquid discharge means, and a lead-out side gate opening / closing means for the post-tidal tank, and a workpiece transfer means, an introduction side gate opening / closing means, a pre-side liquid supply means, a front side Station side liquid discharging means, loading side gate opening / closing means, unloading side gate opening Drive control means for driving and controlling the means, the post-side liquid supply means, the post-side liquid discharge means, and the outlet side gate opening / closing means according to a predetermined procedure, Introduced into the pre-tidal tank and then loaded into the treatment tank through the open loading passage from the pre-filled full tank, and the flat plate after surface treatment is removed from the treatment tank through the unloading passage. Work transfer means, introduction side gate opening / closing means so that it can be discharged to the rear side while being discharged from the post-depletion tank in the dry state through the open outlet passage section, and then discharged to the rear side , A front surface liquid supply means, a front side liquid discharge means, etc., are surface treatment devices formed so as to be drive-controllable according to a predetermined procedure.

  Further, in the invention of claim 4, each gate is slidable along the inner wall surface of the tank, and the gate opening / closing means slides the gate in the horizontal direction using the vertical force applied from the outside of the tank. The passage portion is formed to be openable and closable. Furthermore, in the invention of claim 5, each liquid supply means has a forced pressure supply structure, and each liquid discharge means has a forced open natural discharge structure for forcibly opening the lower discharge port of the tidal tank. Furthermore, the invention of claim 6 is characterized in that the work conveying means includes a pusher for introduction into the pre-tidal tank, a pusher that serves both for carrying into the treatment tank and for carrying out from the treatment tank to the post-tidal tank, A pusher for derivation from the standing tank to the rear side is included, and the pusher for introduction and the pusher for derivation are formed so as to be capable of synchronous operation.

  According to the first aspect of the invention, high quality processing can be reliably performed. According to the invention of claim 2, high quality processing can be reliably performed and implementation is easy as in the case of the invention of claim 1. Further, according to the invention of claim 3, as in the case of the invention of claim 2, high-quality processing can be performed reliably, and the structure is simple and easy to handle.

  Furthermore, according to the invention of claim 4, in addition to the effects similar to those of the invention of claim 3, the structure is further simplified. According to the invention of claim 5, in addition to being able to achieve the same effects as those of the inventions of claims 3 and 4, it is possible to supply the liquid while eliminating the adverse effects on the flat plate-shaped object and Rapid liquid discharge. Furthermore, according to the invention of claim 6, in addition to being able to achieve the same effects as those of the inventions of claims 3 to 5, adjustment of the transfer operation and the production cycle is facilitated, and the work transfer means The structure can be simplified and the cost can be reduced.

  Embodiments of the present invention will be described below with reference to the drawings.

(First embodiment)
As shown in FIGS. 1 to 7, the best surface treatment apparatus for carrying out this surface treatment method is provided with a pre-tidal tank 10NF on the front side (left side in FIG. 1) of the treatment tank (for example, 10N). 2 and 3, the introduction side gate opening / closing means 20NF, the front side liquid supply means 31NF, and the front side liquid discharge means 41NF are provided, and the rear side of the processing tank 10N is located on the rear side (right side in FIG. 1). 2, FIG. 2 and FIG. 3 are provided with a rear-side liquid supply means 31 NB, a rear-side liquid discharge means 41 NB, and a discharge-side gate opening / closing means 20 NB, and a loading-side gate opening / closing means 20 NI for the processing tank 10 N 5 is provided with a carry-out side gate opening / closing means 20NO, and the drive control means (100) of FIG. 5 is provided to drive and control these means according to a predetermined procedure, and the plate-shaped object (workpiece 200) is opened. Part 11N Is introduced into the pre-driving tank 10NF in the dry state through the liquid, and then transferred from the pre-driving tank 10NF in the full state to the processing tank 10N through the open loading passage portion 11NI, and then the flat plate shape after the surface treatment. An article is unloaded from the treatment tank 10N to the post-stage tidal tank 10NB in the full state through the unloading passage section 11NO, and then the post-side lead-out passage section in the open state from the post-stage tidal tank 10NB in the dry state. The flat plate-shaped object is formed so as to be discharged and conveyed to the rear side (right side in FIG. 1) while being led out through 11NB.

  That is, in the surface treatment apparatus, as shown in FIGS. 1 and 2, a pre-tidal tank 10NF having an introduction passage portion 11NF that can be opened and closed by an introduction side gate 12NF is disposed on the front side of the treatment tank 10N, and a discharge side gate. A post-tidal tank 10NB having a lead-out passage portion 11NB that can be opened and closed at 12NB is disposed on the rear side thereof.

  In addition, a carry-in passage portion 11NI that can be opened and closed by a carry-in gate 12NI is provided between the front tank 10NF and the treatment tank 10N, and a carry-out gate 12NO is provided between the treatment tank 10N and the rear tank 10NB. An unloadable passage portion 11NO that can be opened and closed is provided. Furthermore, each of the pre-tidal tank 10NF and the post-tidal tank 10NB can be selectively switched between a dry liquid state and a full liquid state, and between the pre-tidal tank 10NF and the processing tank 10N and the processing tank 10N. And the post-drying tank 10NB can be selectively switched between a communication state and an isolation state.

  Then, the plate-shaped object (200) fed from the front side can be introduced into the pre-tidal tank 10NF in the dry state, and after the introduction, the processing liquid is supplied to switch the pre-tidal tank to the full state. Is possible. That is, the first step can be performed on each flat plate-shaped object. Further, it is possible to switch between the pre-driving tank 10NF in the full liquid state and the processing tank 10N to the communication state, and after switching, the flat plate shaped object (200) is formed so that it can be carried into the processing tank from the pre-driving tank. The second step can be performed.

  In addition, it is possible to switch between the processing tank and the pre-tidal tank after separating the flat plate-shaped object into the processing tank 10N, and to perform surface treatment on the flat-shaped object loaded after switching. ing. Therefore, a part of the third step can be performed. Before the next flat plate-shaped object is introduced into the front tidal tank 10NF from the front side after switching to the isolation state from the processing tank, the processing liquid in the front tidal tank is discharged to the outside (17NF). It is formed so that the pre-tidal tank can be switched to the dry state. The remaining part of the third step can be carried out.

  Here, a surface treatment (chemical conversion treatment) is performed on the workpiece 200 carried into the treatment tank 10N. After this surface treatment is completed, the treatment tank 10N can be switched to the communication state between the full tank and the post-drying tank 10NB, and the plate-shaped object (200) can be carried out from the treatment tank to the post-drying tank after switching. Formed and the fourth step can be carried out.

  Furthermore, after carrying out the flat plate-shaped object to the post-stage tidal tank 10NB, the processing tank 10N and the post-stage tidal tank 10NB can be switched to an isolated state, and after switching, the processing liquid in the post-stage tidal tank 10NB is externally (17NB). ) And the post-driving tank can be switched to the dry state so that the fifth step can be carried out, and after the leading flat plate is led out to the rear side and from the processing tank 10N, the post-drying tank Before the next flat plate-shaped object is carried out into 10NB, the processing liquid is supplied so that the sixth step of switching the post-driving tank to the full liquid state can be performed.

  Thus, the inside of the treatment tank 10N is obtained by passing the flat plate-shaped object (200) fed and transported in a horizontal state with a predetermined height from the front side in a vertically suspended state through the front and rear tidal tanks 10NF and 10NB. It is possible to pass the sheet in a horizontal state at a predetermined height and discharge it to the rear side.

  To be sure, the basic configuration / function of the surface treatment apparatus (method) is vertically suspended from the front side by using the work transfer means (70N, etc.) as in the case of the conventional example (FIGS. 10 and 11). The plate-shaped object (200) that has been fed and conveyed in the process is carried into the treatment tank 10N filled with the treatment liquid, and the loaded plate-shaped object can be subjected to surface treatment in the treatment liquid and the surface-treated plate-shaped object. It is carried out from the processing tank and discharged and conveyed to the rear side, and a plurality of flat plate-shaped objects are continuously surface-treated.

  Based on this premise, the basic technical matters for constructing the surface treatment apparatus will be described. The workpiece 200 that is the surface treatment target is a flat plate-shaped object. This flat plate-shaped object will be described below as a printed circuit board that may be deformed or bent at the tip when directly loaded (introduced) into the processing liquid as in the conventional methods (apparatus). Regarding conveyance, the upper end portion of the thin and flexible printed circuit board (work 200) is vertically suspended (appearance) sandwiched by using a plurality of jigs 98 shown in FIG. Carry in / out.

  Now, before and after the treatment tank (for example, 10N) in the conveyance (X) direction, the conveyance time taken into account when adopting the new and innovative front and bottom tidal tanks 10NF and 10NB shown in FIG. It is understood as follows.

  In the conventional (batch processing method) apparatus, as shown in FIG. 10, when the workpiece 200 is transferred from the previous processing tank 10PM to the next processing tank 10PN, the workpiece 200 is lifted up by a dimension equal to or higher than the workpiece height ( V1), horizontal movement after ascending (H1), and descent (V2) until dipping in the treatment liquid are required. Ascending (V1) is controlled so as not to cause the workpiece 200 to sway or vibrate. Therefore, the ascent (V1) is slower than in the case of horizontal conveyance (H1). Further, the lowering (V2) requires that the workpiece 200 be introduced into the processing liquid from the free end (tip end ... lower end), so that it is much slower than the ascent (V1) in order to prevent deformation and bending of the workpiece. I have to make it.

  Here, the horizontal transfer (H1) speed in the atmosphere and the horizontal transfer speed for introduction into the pre-tidal tank 10NF are the same speed, and the horizontal for carrying in the liquid from the pre-tidal tank 10NF to the treatment tank 10N. Assuming that the conveyance speed is substantially the same as the introduction horizontal conveyance speed and that the feed pitch (P) is the same, the horizontal conveyance (H1) time and the introduction horizontal conveyance time are the same. The transport time is significantly shorter than the sum of the rise (V1) time and the fall (V2) time. For example, it is 1/2 or less. In other words, even if the front and rear tidal tanks are provided before and after each processing tank, the overall transfer time can be shortened, so productivity is greatly improved compared to the conventional batch processing system (equipment). it can. In addition, useless reactions and oxidation can be prevented.

  Next, even in this surface treatment apparatus, horizontal transport (transport for introduction and transport for lead-out) remains in the atmosphere, but these transports are performed in so-called empty tanks (10NF and 10NB). Therefore, the amount of dust and mist adhering to the workpiece 200 is very small as compared with the case of air transport on the tank [rising (V1), horizontal (H1), descending (V2)]. Therefore, further improvement in quality can be secured from this point.

  Further, if attention is paid to the fact that it is performed in the front and rear tidal tanks (10NF and 10NB) in the dry liquid state, the upper open portion of the tank can be formed so as to be closed by the covers 85L and 85R shown in FIG. The amount of adhesion to the workpiece 200 can be reduced extremely. That is, the problem of quality degradation due to adhesion of dust or the like can be almost completely wiped out.

  The left and right covers 85L and 85R have a double door structure, and a space for passing the holding member 95 in the X direction is secured at a position corresponding to the center of the tank (conveyance path). It is preferable to provide a slit extending in the left-right direction in FIG. 3 so as to avoid interference with the bars (23, 48, etc.).

  In addition, since the conveyance structure described later in detail is formed so as to be able to maintain a positional relationship in which the workpiece conveyance path (tank center) and the rail 90 are displaced in the left-right direction in FIG. There is no possibility that fine particles generated from the moving part (rail 90, carrier 93, etc.) are mixed into the processing tank 10N. Therefore, coupled with the installation of the cover, a dramatic improvement in quality can be expected.

  Now, in this embodiment, a large number of processing tanks 10 from the first processing tank (10A ... not shown) to the last processing tank (10X ... not shown) are arranged on the front side in the transport (X) direction in FIG. However, for convenience of explanation and simplified illustration, the Nth treatment tank (chemical conversion treatment tank) 10N and the O (= N + 1) th are shown in FIGS. Portions relating to the treatment tank (water washing treatment tank) 10O are displayed, and portions relating to other treatment tanks are not shown. Moreover, in FIG. 1, only the part regarding Nth processing tank (chemical conversion processing tank) 10N was displayed.

  FIG. 3 shows a state in which the left side (front side) is viewed from the right side (rear side) in the front tidal tank 10NF in FIG. Moreover, the code | symbol (11NF, 12NF, 20NF, 31NF, 41NF etc.) added to the pre-tidal tank 10NF of FIG. 3 is a code | cord | chord (11NB, 12NB, 20NB, 31NB, 41NB etc.) corresponding to the post-tidal tank 10NB. -If it reads in parentheses in FIG. 3, it can understand post-tidal tank 10NB which is the same structure as pre-tidal tank 10NF.

  Moreover, it can be seen that the processing tank 10N has the same structure as that of the pre-tidal tank 10NF except for the front-side liquid discharge means 41NF and the discharge port 14NFH shown in FIG. However, the tank lengths in the X direction are different as shown in FIG. Therefore, the detailed drawings corresponding to FIG. 3 are omitted for the structural portions related to the post-stage tidal tank 10NB and the processing tank 10N.

  Therefore, first, the pre-tidal tank 10NF and each means (11NF, 12NF, 20NF, 31NF, 41NF, etc.) related thereto will be described.

  In FIG. 3, the pre-tidal tank 10 NF has a bottomed and open upper rectangular tube tank structure and is formed of a chemical resistant material, and is supported by the gantry structure 1 as a whole. The pre-tidal tank 10NF, the processing tank 10N, and the post-tidal tank 10NB are integrally formed as shown in FIG. That is, paying attention to the peculiarity of the work 200 having a very small volume, and reducing the volume of the tidal tanks 10NF and 10NB for accommodating the work 200 to a very small volume, the full liquid state due to the supply of the processing liquid and the dryness due to the discharge. It is possible to introduce a new technology of switching to the liquid state.

  Note that the rear side pre-tidal tank 10OF, the processing tank 10O, and the rear side tidal tank 10OB shown in FIG. 2 are also integrally formed.

  Overflow tanks 15NF are formed on both sides of the pre-driving tank 10NF. This overflow tank 15NF supplies the processing liquid and establishes a full liquid state in which the processing liquid level Lh of the pre-driving tank 10NF is kept constant (the same as the processing liquid level of the processing tank). It has the role of recovering excess processing liquid Qo overflowing from the water. The overflow tank 15NF and the lower liquid storage tank 17NF supported in the same manner are communicated with each other through the through-hole 15NFH. The amount of liquid returning to the liquid storage tank 17NF through the through-hole 15NFH is represented by Qd.

The processing tank 10N and post置干Mitsuruso 10NB sides similarly overflow tank 15N of, 15N B are provided, these (before置側15NF and rear置側15Nb) overflow as shown in FIG. 2, FIG. 3 It is formed integrally with the tank 15N. Similarly, the liquid storage tanks (the front side 17NF and the rear side 17NB) are also formed integrally with the liquid storage tank 17N. Therefore, since the structure is simplified, the apparatus cost can be reduced, the composition management of the treatment liquid is easy, and the handling is also simple.

  The front side wall surface 10NFF of the pre-tidal tank 10NF is provided with a slit-shaped front-side introduction passage portion 11NF indicated by a dotted line in FIG. 3, and this front-side introduction passage portion 11NF is mounted inside the tank. It can be opened and closed by the introduction side gate 12NF. Therefore, the width (size) of the front-side introduction passage portion 11NF can be selected to an appropriate and relatively large value that does not contact the workpiece 200 passing therethrough.

  At least, it can be made much larger than in the case of the conventional continuous processing system (FIG. 11) (gap S1, S2). In this sense, it is possible to avoid a collision with a structure (10NFF or the like) at the time of loading into the treatment tank 10N, and therefore there is no fear of damaging the workpiece 200. These are directly linked to improvement in processing quality.

  As shown in FIG. 1, the introduction-side gate 12NF is provided inside the pre-tidal tank 10NF and is slidable (reciprocatingly slidable) along the tank inner wall surface 10NFF in FIG. If measures such as providing a high-performance and high-grade seal structure are provided between the introduction side gate 12NF and the introduction passage portion 11NF, the tank is introduced from the gap between the introduction side gate 12NF and the introduction passage portion 11NF in the closed state. It is also possible to minimize or eliminate the liquid amount Qr leaking out. However, the adoption (attachment) of a large-scale seal structure is not practical because it can go backwards to simplify the structure in the tank and make it maintenance-free, and causes a significant increase in the cost of the apparatus. However, this is not denied when the present invention is implemented.

  In this embodiment, in order to effectively use the liquid pressure difference (pressure difference between the liquid pressure inside and outside the gate and the atmospheric pressure) in the full liquid state, the introduction side gate 12NF is placed in the tank (10NF) as described above. This is why it is provided. That is, the introduction side gate 12NF is pressed against the inner wall surface 10NFF with a liquid differential pressure to improve the sealing performance. Simple structure and can be realized at low cost. However, since it is not a complete seal structure, a small amount of the processing liquid Qr leaks out from the gap between the tank wall surface 10NFF and the introduction side gate 12NF. Therefore, the leaked processing liquid Qr is recovered in the leakage recovery unit 16NF shown in FIG. 1 and returned to the liquid storage tank 17NF (17N) through the communication port 16NFH for recirculation.

  As shown in FIG. 3, the introduction side gate opening / closing means 20NF for opening and closing the introduction side gate 12NF includes a cylinder device 25, an inclined link bar 22 that can swing (rotate) around a fulcrum 21, and this The upper and lower link bars 23 are rotatably connected to the distal end side of the inclined link bar 22 and have a plurality of engaging pins 24 fixed in the longitudinal direction thereof.

  3 and 4, each engagement pin 24 is fitted (engaged) in each inclined long hole 12S provided in the introduction side gate 12NF, and can slide in the inclined long hole 12S. By the relative movement between the engagement pin 24 and the inclined elongated hole 12S, a lateral movement force (a vertical force is also generated) of the introduction side gate 12NF can be generated.

  When the cylinder device 25 is stopped (when the piston is retracted), the inclined link bar 22 is in a state where the upper and lower link bars 23 are pulled upward as shown by a two-dot chain line in FIG. It can be held in a state where it is moved to the right as shown by the dotted line, that is, the state where the introduction passage portion 11NF is opened.

  Here, when the cylinder device 25 is operated, the piston protrudes, and the inclined link bar 22 is inclined to the left downward state shown by the solid line in FIG. 3, and the upper and lower link bars 23 are pushed down (the push-down dimension is shown in FIG. H "). Then, the engaging pin 24 relatively moves from the upper left end to the lower right end in the inclined elongated hole 12S of FIG. Therefore, the introduction side gate 12NF can be moved in the left direction (the amount of movement is W) as shown by the solid line in FIG. 4, that is, the introduction passage portion 11NF can be closed. By selecting and setting the setting angle θ (inclination of the inclined oblong hole), W = 2H, and a double amplification function is provided.

  That is, the introduction-side gate opening / closing means 20NF slides the introduction-side gate 12NF in the lateral direction (left-right direction in FIG. 3) using the vertical force applied from the outside of the pre-tidal tank 10NF, thereby introducing the introduction passage portion 11NF. It is formed to be openable and closable. With such a structure, not only is the structure simple and inexpensive, it is easy to implement, but the occupied area in the pre-tidal tank 10NF can be reduced, and as a result, it is effective and contributes to downsizing of the pre-tidal tank 10NF. However, the introduction passage portion 11NF can be quickly opened and closed by the introduction side gate 12NF by a small stroke (H) operation.

  Here, the introduction side gate opening / closing means 20NF (and the derivation side gate opening / closing means 20NB) shown in FIG. 3 opens and closes when the tidal tank 10NF (10NB) is held in a dry state (ST18 in FIG. 6). ST20, ST22). That is, since the gate 12NF (12NB) is opened and closed without applying a liquid pressure differential to the inner and outer surfaces, the ability of the introduction side gate opening / closing means 20NF (and the outlet side gate opening / closing means 20NB) can be reduced. The cylinder device 25 may be of a small capacity, and the rigidity of the constituent elements (22 etc.) can be reduced, which is advantageous. Manual adjustment is light.

  Incidentally, the gates 12NI and 12NO provided in the treatment tank 10N are opened and closed (ST15 and ST17) when the tidal tanks 10NF and 10NB are held in a full liquid state (ST14 in FIG. 6). Also in this case, since the gates 12NI and 2NO are opened and closed without liquid differential pressure being applied, the capacity (capacity) of the loading / unloading side gate opening and closing means 20NI and 20NB is also the same as that of the introduction side gate opening and closing means 20NF and 20NB. As in the case, it may be small.

  Next, the pre-side liquid / dry switching means 30NF shown in FIG. 1 and FIG. 3 is a full liquid state (maximum liquid level Lh) in which the pre-dry tank 10NF in FIG. It is means for selectively switching to (minimum liquid level Ll). In this embodiment, as shown in FIG. 3, it is formed of a front side liquid supply means 31NF and a front side liquid discharge means 41NF. Yes. This is why the name of the tank is called the tidal tank.

  The front side liquid supply means 31NF includes the suction pipe 32, the supply pump 33, and the supply pipe 35 shown in FIG. 1, and the processing liquid in the liquid storage tank 17NF (17N) is forcibly pressurized by the supply pump 33 as shown in FIG. It is set as the forced pressurization supply structure which supplies to the pre-drying tank 10NF from the left side.

  As shown in FIG. 3, a rectifying plate 13NF is provided on the bottom side of the pre-tidal tank 10NF. The rectifying plate 13NF is provided with a rectifying hole group 13NFH which is divided to face the left and right. Each rectifying hole group 13NFH is composed of a large number of rectifying holes, and can generate an upward liquid flow Fp on each side of the workpiece 200 introduced. This ascending liquid flow Fp is a laminar (parallel) flow, and does not give unnecessary vibration or vibration to the vertically suspended workpiece 200 as well as large curvature and deformation. There is no risk of scratching.

  That is, in the case of a conventional batch processing apparatus (FIG. 10), a vertically suspended workpiece 200 whose lower end can be regarded as a free end is placed in the processing tank 10N with its upper end fixed. While being lowered, it had to be carried (lowered, charged, immersed) into the treatment liquid from the free end. The treatment liquid at this time functions as a resistor or an external force applying means for the workpiece 200. Thus, in order not to cause the workpiece 200 to bend or deform, it is necessary to provide a large vertical suspension state maintaining means or the like.

  However, in the case of this embodiment, while supplying the processing liquid from the lower side to the vertically suspended workpiece 200 introduced into the pre-tidal tank 10NF and held stationary, the liquid level L Is gradually raised from the lowest level Ll to the highest level Lh. First, the lower end (free end) of the workpiece 200 is fixed by the supplied processing liquid. Further, since the subsequent rising liquid flow Fp is a parallel flow, an external force in a direction orthogonal to each surface of the workpiece 200 does not occur. There is no mechanical contact.

  Thus, no bending or deformation occurs in the vertically suspended workpiece 200, and shaking and vibration can be suppressed to a small extent. Therefore, conventional problems when the workpiece 200 is introduced into the processing liquid (on the surface treated surface) Scratches and breaks). That is, even a workpiece (printed circuit board or the like) 200 having a smaller thickness, a higher flexibility, or a larger size can be surely and stably immersed in the processing liquid. That is, the adaptability with respect to the form and properties (properties) of the workpiece 200 is extremely wide.

  Due to the pressurization of the supply pump 33, the liquid level in the pre-tidal tank 10NF shown in FIG. 3 gradually rises from at least Ll and overflows from the upper part of the wall surface to the overflow tank 15NF (15N). Therefore, the liquid level is kept constant at the maximum limit Lh. This liquid level (Lh) is the same as the processing liquid level in the processing tank 10N. Therefore, it is possible to smoothly carry in the work from the pre-drying tank 10NF communicated in the full liquid state to the processing tank 10N.

  That is, as shown in FIG. 11, the workpiece is rushed from the opposite direction (conveying direction) toward the processing liquid Qr overflowing from the opening 11PN toward the upstream side (front side) and from the atmosphere. Compared with the case of the conventional apparatus of the continuous processing method that has been unavoidable, the ease and stability of the work loading are obvious. This is the same as in the case of a conventional batch processing system (FIG. 10) in which the free end of the workpiece is directly put into the stationary liquid below from the upper side in the atmosphere.

  Next, the front-side liquid discharge means 41NF includes a discharge gate 43 and a discharge gate opening / closing means 45 shown in FIG. 3, and has a discharge port 14NFH provided on the right wall surface below the pre-till tank 10NF. A forced open natural discharge structure is provided in which the treatment liquid is forcibly opened and the processing liquid is quickly discharged into the liquid storage tank 17NF.

  The discharge gate opening / closing means 45 is similar to the cylinder device 49 similar to the cylinder device 25 shown in the upper right side of FIG. 3 and the inclined link bar 22 that can swing (rotate) around the fulcrum 46 similar to the fulcrum 21. An inclined link bar (47... Is not shown) and an upper and lower link bar 48 rotatably connected to the tip end side of the inclined link bar (47). A discharge gate 43 is attached to the tip (lower end) of the vertical link bar 48. The discharge gate 43 is guided to be movable up and down on the inner wall surface provided with the discharge port 14NFH of the pre-tidal tank 10NF.

  The discharge port 14NFH has an opening area necessary and sufficient to allow the processing liquid in the pre-tidal tank 10NF to rapidly flow out to the liquid storage tank 17NF (17N). For example, the size is selected so that the liquid state can be switched to the dry state within 1 second. Accordingly, the attachment position of the discharge port 14NFH should be the inner surface of the side wall extending in the longitudinal direction (left and right direction in FIG. 1) of the pre-tidal tank 10NF and the tank bottom. However, on the form of the workpiece 200, the absolute length is short in the tank width direction (left and right direction in FIG. 3), and interference with the introduction side gate 12NF and the introduction passage portion 11NF must be avoided. In many cases, it cannot be secured.

  In addition, it is important to expect quick liquid supply and relatively quick liquid discharge from the viewpoint of extending the allowance time allowed as the introduction time and lead-out time to the pre-drying tank 10NF. However, it does not require an excessive speedup that imposes a large device sacrifice. That is, assuming that the cycle time based on the shortest surface treatment time in the arbitrary treatment tank is 30 seconds, for example, in the case of the pre-tidal tank 10NF, the time (30 seconds) from the previous carry-in to before the next introduction This is because the liquid discharge and the liquid supply should be terminated.

  Here, the post-tidal tank 10NB is the same as the case of the above-described pre-tidal tank 10NF. That is, the structure of the post-tidal tank itself and the rear-side outlet passage 11NB, the outlet-side gate opening / closing means 20NB, and the rear-side liquid tidal switching means 30NB (the rear-side liquid supply means 31NB and the rear-side tank) The side liquid discharge means 41NB) and the like include the structure of the pre-tidal tank itself and the front-side lead-out passage portion 11NF, the inlet / outlet-side gate opening / closing means 20NF, and the front-side liquid tidal switching means 30NF (pre-position). This is the same as the side liquid supply means 31NF and the front side liquid discharge means 41NF). The reference numerals of these post-side devices are shown in parentheses in FIG.

  Similarly, with regard to the processing tank 10N, the structure of the processing tank itself and the loading-side gate opening / closing means 20NI and the unloading-side gate opening / closing means 20NO related to the processing tank 10N relate to the structure of the pre-tidal tank itself and the pre-tidal tank 10NF. This is the same as the introduction side gate opening / closing means 20NF. However, the reference numerals (20NI, 20NO) of the rear side means are not shown in FIG. 3, but are written in parentheses in FIG.

  The processing tank 10N is provided with the liquid circulating means 31N shown in FIG. 1 similar to the case of the conventional example, but the front side liquid tidal switching means 30NF (the front side) necessary for the front tidal tank 10NF. There is no need to provide means corresponding to the liquid supply means 31NF and the front-side liquid discharge means 41NF).

  This liquid circulation means 31N includes a suction pipe 32, a circulation supply pump 33R, a filter (not shown) and a supply pipe 35 shown in FIG. 1, and the treatment liquid in the liquid storage tank 17N is forcibly pressurized by the circulation supply pump 33 for processing. Supply to the tank 10N for circulation. Further, the rectifying hole 13NH, the overflow tank 15N, etc. mounted in the treatment layer 10N are the same as the rectifying hole 13NFH, the overflow tank 15NF, etc. related to the pre-tidal tank 10NF, and these symbols (13NH, 15N) are written in parentheses. It is.

  Next, the workpiece conveyance means 70 is a means for horizontally conveying the workpiece 200 from the front side (first processing tank) to the rear side (final processing tank). The work conveyance means regarding the processing tank 10N is three systems required in order to implement the 6th process from the 1st process.

  The grounds for 3 systems (however, the dual-use structure described later is used, and finally 2 systems) are based on the transport requirement 1 (relationship between processing time and processing tank length in the processing tank 10N). From the above, pitch feed in the processing tank 10N is necessary.) And transport requirement 2 (pitch feed in each tidal tank is not necessary, but for overall transport smoothness with the aim of improving productivity. The purpose of introduction and the purpose of derivation are to be synchronized.)

  That is, as shown in FIGS. 7 (A) to 7 (E), the workpiece transfer means related to the processing tank 10N is used for both loading and unloading for feeding the workpiece 200 by one pitch in the processing tank 10N (B). ), A pusher 70NF for introducing the work 200 coming from the front side (the previous treatment tank 10M) into the front / end tidal tank 10NF, and a work for deriving the work from the back / end tidal tank 10NB. The lead-out pusher 70NB is formed. The pushers 70N (70NF and 70NB) have a structure in which a plurality of anti-back togs 72 are mounted on the reciprocating member 71 shown in FIG. FR, return ... BK).

  In addition, each work conveyance means regarding each other processing tank is the same structure as the case of the work conveyance means (pusher 70N, pusher 70NF, pusher 70NB) regarding the processing tank 10N (however, a processing tank that does not require pitch feed in the tank). Then, there is no 70N equivalent).

  In other words, the workpiece transfer means 70 (70N, 70NF, 70NB) is provided with a pusher 70NF for introduction from the front side to the pre-tidal tank 10NF, and from the pre-tidal tank to the processing tank 10N and from the processing tank to the post-tidal area. The pusher 70N also serves to carry out to the tank 10NB, and the pusher 70NB for derivation from the rear tidal tank to the rear side, and the introduction pusher 70NF and the derivation pusher 70NB are formed so as to be capable of synchronous operation.

  That is, the cycle time can be shortened by performing the synchronous operation of the introduction pusher 70NF and the derivation pusher 70NB, and the setting change of the time difference between introduction / derivation (70NF, 70NB) and carry-in / out (70N) is possible. By adjusting the transfer operation and the production cycle, the structure of the workpiece transfer means (whole pusher) can be simplified and integrated, and the cost can be reduced. Drive control can also be simplified.

  That is, from the viewpoint of constructing a concrete and practical facility in consideration of speeding up conveyance, improving production efficiency, reducing cost, facilitating drive control, downsizing of the apparatus, etc., in this embodiment, the functional purpose Are constructed in such a manner that the same or the same type of pushers (70NF, 70NB) are integrally formed and can be fed in synchronous operation (same timing).

  In this connection and in FIG. 7B, the outlet pusher (70NB) for the previous treatment tank (10N) and the introduction pusher (70OF) for the next treatment tank (10O) are the same pusher (70NB = 70OF). Further, in this embodiment, for all the treatment tanks, the introduction pushers for the previous treatment tanks (10N, 10O) and the extraction pushers (70MB, 70NB) for the previous treatment tanks (for example, 10M, 10N). (70NF, 70OF) are also constructed so that they can be used together and can be operated synchronously.

  Furthermore, each pusher (70M, 70N, 70O, 70P) of each processing tank (for example, 10M, 10N, 10O, 10P) has an integral structure capable of synchronous operation. Thus, finally, there are two systems: a pusher that serves both for introduction and use, and a pusher 70N that serves both for loading and unloading. In FIG. 7B, the left processing tank 10M and the right processing tank 10P are not shown.

  The work transfer means is not limited to the pusher structure. An appropriate transport method and structure can be selected. Regarding the processing tank (plating processing tank) [not shown] in this embodiment, the belt conveyor 75 shown in FIG. 3 is used, and the workpiece 200 is transported through the tank continuously at a constant speed (for example, set to 1 m / min). It is made possible. As described above, it is preferable to employ a continuous conveyance type means (such as a belt conveyor) for a processing tank having a plurality of tank lengths (for example, four or more).

  Here, the work 200 is performed via the transport structure regardless of the work transport means of any structure (pusher or belt conveyor). 3 includes a rail 90 extending in a direction perpendicular to the paper surface (X direction in FIG. 2), and a carrier 93 mounted so as to be slidable (or rollable) along the rail 90. , A holding member 95 attached to the tip of a transverse arm member 93H constituting a part of the carrier 93, and a jig 98 detachably attached to the holding member 95.

  In this embodiment, the transfer structures (90, 93) and the work transfer means (70NF, etc., 75) are arranged so as to be shifted from the outside of the processing tank (right side in FIG. 3). This is to prevent fine dust generated at the relative sliding portions of these structures and means from falling into the treatment tank (10N, etc.). It is understood that every aspect of the configuration of the present surface treatment apparatus having a first-stage high-quality treatment is considered.

  Incidentally, in the general conventional apparatus, since the rail 90 is aligned with the center line of the processing tank, it seems that there is no recognition of the influence on the quality of fine dust generated in the relative sliding portion. However, it may not be necessary if a higher quality process is not required.

  In FIG. 3, a jig (clamping tool) 98 includes a main body base 98B screwed and fixed to a holding member 95, a clamp 98C rotatable around a fulcrum, and one end (tip) of the clamp 98C attached to the main body base 98B. It is formed from a spring 98S that constantly presses and applies an urging force for always clamping, and clamps the upper end of the workpiece 200 between the tip of the clamp 98C and the main body base 98B.

  In the case of a plating tank (processing tank) (not shown), power is supplied to the workpiece 200 from the rail 90 connected to the original power source through the electrical path of the carrier 93 → the holding member 95 → the jig 98 from the rail 90 member 93H (negative electrode connection). Is done. In the plating tank, an electrode (anode connection) is provided at a position that can face the workpiece 200. Since the rail 90 constitutes a part of power supply means for supplying power to the workpiece 200, the rail 90 is made of copper-based metal.

  Next, the drive control means (100) introduces each means relating to the work conveying means [70, 70F (70B), 75], each processing tank (10), and each of the front and rear tidal tanks (10F, 10B). Side gate opening / closing means 20NF, pre-side liquid supply means 31NF, pre-side liquid discharge means 41NF, carry-in side gate open / close means 20NI, carry-out side gate open / close means 20NO, post-side liquid supply means 31NB, post-side liquid discharge means 41NB and the lead-side gate opening / closing means 20NB can be driven and controlled in accordance with a predetermined procedure, and in this embodiment, it is formed from a computer shown in FIG. In addition, you may comprise from a logic circuit etc.

  In FIG. 5, a computer 100 includes a CPU (including a clock function) 101, a ROM 102, a RAM 103, a memory (ferroelectric memory) 104, a hard disk (HDD) 105, an operation unit (PNL) 106, a display unit (IND) 107, and An operation drive control device that includes a plurality of interfaces (I / F) 108 NF and the like and has functions of setting, selection, command, drive control, and the like and that controls the operation of the entire surface treatment apparatus is formed.

  In this FIG. 5, the interface 108NF is connected to the introduction side gate opening / closing means 20NF and the like and the front side liquid tidal switching means 30NF (the front side liquid supply means 31NF and the front side liquid discharge means 41NF) related to the pretreatment tank 10NF. The interface 108N is connected to the inlet side gate opening / closing means 20NI for the treatment tank 10N, the liquid circulation means 31N and the delivery side gate opening / closing means 20NO, and the interface 108NB is connected to the outlet side gate opening / closing means 20NB for the post-treatment tank 10NB and the rear. The installation side liquid tidal switching means 30NB (the rear side liquid supply means 31NB and the rear side liquid discharge means 41NB) is connected.

  In addition, about each means regarding each other processing tank, each said pre-tidal tank, and each said post-tidal tank, the detail is abbreviate | omitted as what is connected to the interface 108OTH.

  Work conveyance means 70 (70A to 70X) constructed as common to each processing tank and work conveyance means 70F (70AF to 70XF) constructed as common to each of the preceding tidal tanks [each rear tidal tank that can also be used as this] [70B (70AB to 70XB)] and a belt conveyor (continuous conveying means) 75 dedicated to the plating tank are connected to the interface 109. Each interface is connected with various sensors necessary for the respective means, but the illustration is omitted. Also, the same device (for example, power supply device) as in the conventional example is not shown in FIG.

  Here, the drive control means (100) is mainly formed of a ROM 102 and an HDD 105 that store a drive control program, and a CPU 101 that reads and executes the drive control program. Fixed information necessary for the drive control program is stored on the ROM 102 side. In addition, information that is input or changed during execution is stored and held in the memory 104. Both are read out and expanded in the RAM 103 for use.

  The drive control program can transport each flat plate-shaped object (work 200) to the entire processing tank from the front side to the rear side, etc. (a program capable of performing at least the first to sixth steps described above) As long as the format is not limited, the format can be freely created.

  However, in actual operation, surface treatment should be performed while conveying a plurality of flat objects (workpieces 200) in order and continuously in order to further improve productivity. Therefore, in this embodiment, a program is created by devising so as to synchronize the operation timings of gate opening / closing operation, tidal switching operation, transfer operation, etc., for each processing tank as much as possible.

  That is, the drive control program can be expressed as ST (step) 10 to ST25 in FIG. Below, a program is demonstrated, referring FIG. 7 (A)-(E). In FIG. 6, some two steps in the first to sixth steps may seem to be going back and forth over time. However, if attention is paid to one flat plate-shaped object (work 20). It is clearly understood that the first to sixth steps are performed (executed) in this order.

  The program is started by the drive control command. First, it is determined whether or not the initial state has been established (OK) (ST10 in FIG. 6). If it is determined that it is not established (NO) (NO in ST10), the following two types of operations are automatically performed.

  First, all the open / close gates are closed (ST11). As for the processing tank 10N, the gate opening / closing means (20NF, 20NI, 20NO, 20NB) is driven and controlled, and the gates (12NF, 12NI, 12NO, 12NB) are driven synchronously and closed. By solenoid ON / OFF control for the cylinder device 25.

  Then, it is detected by each sensor that the closed state (“x” mark is added in the vicinity of the gate in FIG. 7) and can be visually confirmed on the display unit 107. Similarly, the open / close gate is closed in the treatment tank 10O. FIG. 7A shows a case where the initial state is established.

  In FIG. 7A and the like, a plurality of (for example, eight) flat plate-shaped objects (printed circuit boards), that is, the workpiece 200 (“A”, “B”, It is assumed that “C”, “D”, “E”, “F”, “G”, “H”) are already located at the positions as illustrated.

  Subsequently, all the front and rear tidal tanks (10NF, 10NB, etc.) are switched to the dried liquid state (ST12). Each liquid discharging means (41NF, 41NB, etc.) is driven and controlled. This is based on the ON (OFF) control of the solenoid for the cylinder device 49 of FIG. The dry liquid state [FIG. 7A] is a state in which the liquid level (level) L is at least Ll. This is also detected by each sensor and displayed on the display unit 107 for visual confirmation.

  At the same time, the respective pushers related to the front and rear tidal tank 10NF are returned to the initial state (position) (ST13). That is, regarding the processing tank 10N, the front-side pusher 70NF (also used as the rear-side pusher 70MB of the processing tank 10M) and the rear-side pusher 70NB (also used as the front-side pusher 70OF of the processing tank 10O). ) And undo. That is, the pusher 70NF and the pusher 70NB are returned to the left by one pitch from the state shown in FIG. 7E, and the state shown in FIG. It should be noted that the symbol “FD” indicated by the arrow (→) in FIG. 7 means forward (transition), and the symbol “BK” means backward (return).

  In this case, the pusher 70N related to the treatment tank 10N is already in the initial state [see FIGS. 7E and 7A], and thus does not need to be restored. However, in the state shown in FIG. 7B as a result of maintenance, adjustment, etc. immediately before, the initial state (position) in the left direction is returned as shown in FIG. 7C.

  For convenience of maintenance or adjustment, or for pre-establishing the designated state, if the automatic mode is switched to the manual mode, the guidance of the operation unit 106 is displayed while referring to the guidance displayed on the display unit 107. An operation corresponding to each step (ST) in FIG. 6 can be individually performed by manual operation using a key.

  When it can be confirmed by the detection of the sensor that the initial state has been established, each of the front and rear tidal tanks (10NF, etc.) is switched to the full liquid state. Regarding the pre-tidal tank 10NF and the post-tidal tank 10NB of the processing tank 10N, the processing is performed while driving and controlling the front-side liquid supply means 31NF and the rear-side liquid supply means 31NB (rotation control of the motor for the supply pump 33). The liquid is supplied to switch to a full liquid state (ST14). It is switched from the dried liquid state (level Ll) shown in FIG. 7 (A) to the full liquid state (level Lh) shown in FIG. 7 (B). In this state, a small amount of the processing liquid Qr leaking forward (10M) from the open / close gate 12NF is collected by the leak collection unit 16NF.

  Next, the loading-side gate opening / closing means 20NI and the unloading-side gate opening / closing means 20NO related to the processing tank 10N are driven and controlled, and the loading-side gate 12NI and the unloading-side gate 12NO are switched to the open state (ST15). From the closed state (“×”) shown in FIG. 7A to the open state (“◯”) shown in FIG. 7B. Therefore, the liquid levels (levels) of the front and rear tanks 10NF, 10N, and 10NB are all the same (Lh). That is, since it is in a communication state, it can be handled as one processing tank substantially on the conveyance. That is, the workpiece 200 can be transported horizontally in the liquid.

  Thus, the drive control means (100) moves the pusher 70N relating to the processing tank 10N from the initial position shown in FIG. 7A by one pitch (P) in the right direction as shown in FIG. 7B. That is, the workpieces “F”, “E”, “D” are simultaneously conveyed by one pitch (ST16). Regarding the processing tank 10O, the workpieces “C” and “B” are simultaneously conveyed by one pitch.

  That is, the work (“F”) is transferred from the pre-tidal tank 10NF to the processing tank 10N, the work (“E”) is transferred by one pitch in the processing tank 10N, and the post-tidal tank is transferred from the processing tank 10N. The work ("D") is carried out to 10NB at the same timing (synchronous operation).

  Here, the carrying of the workpiece (“F”) into the processing tank 10N and the unloading of the workpiece (“D”) from the processing tank 10N are the same as in the case of conveying the workpiece (“E”) in the processing tank 10N. Because it can be performed in the processing solution, it is possible to wipe out the problems in the conventional batch processing method and continuous processing method (deformation caused by direct injection from the atmosphere into the processing solution). It is. From this point as well, it is possible to further improve the quality of processing.

  Thereafter, the carry-in side gate opening / closing means 20NI and the carry-out side gate opening / closing means 20NO are driven and controlled, so that the carry-in side gate 12NI and the carry-out side gate 12NO are driven in synchronization to be in a closed state [indicated in parentheses as shown in FIG. Switch to “×”] (ST17). In this state, a small amount of the processing liquid Qr leaking from the open / close gate 12NB to the rear (10O) side is recovered by the leak recovery unit 16NB.

  After the front and rear tidal tanks 10NF, 10NB and the processing tank 10N are separated from each other, with respect to the processing tank 10N, the front side liquid discharging means 41NF and the rear side liquid discharging means 41NB are driven and controlled. The processing liquid in the post-driving tanks 10NF and 10NB is discharged to the liquid storage tank 17N (17NF and 17NB). Thereby, the full liquid state shown in FIG. 7B is switched to the dry liquid state shown in FIG. 7C (ST18).

  At the same time, the pusher 70N (70O) related to the processing tank 10N (10O) is returned from the forward position shown in FIG. 7B to the backward position (initial position) shown in FIG. 7C (ST19). At this stage [FIG. 7C], all the pushers are located at the initial positions as in FIG. 7A.

  Subsequently, the introduction-side gate opening / closing means 20NF and the derivation-side gate opening / closing means 20NB relating to the front and rear treatment tanks 10NF, 10NB are driven and controlled to switch the introduction-side gate 12NF and the derivation-side gate 12NB to the open state (ST20). That is, the closed state (“×”) shown in FIG. 7C is changed to the open state (“◯”) shown in FIG. 7D. That is, preparations for carrying out the surface-treated workpiece 200 from the treatment tank 10N and carrying in the next new processing target workpiece 200 are made.

  Further, the drive control means shifts the front-side pusher 70NF relating to the processing tank 10N from the initial position shown in FIGS. 7C and 7A by one pitch in the right direction as shown in FIG. FD), the workpieces “G” and “H” are simultaneously introduced and conveyed by one pitch, and the rear pusher 70NB is moved from the initial position shown in FIGS. 7C and 7A to FIG. As shown in FIG. 4, the workpiece is shifted (FD) rightward by one pitch, and the workpiece “D” is derived and conveyed by one pitch (ST21). Regarding the processing tank 10O, the workpieces “A” and “B” are simultaneously conveyed by one pitch. As shown in FIG. 7D, the workpiece “I” next to the workpiece “H” is carried out from the processing tank (10M) provided in front.

  After the workpiece 200 is transferred, the introduction side gate opening / closing means 20NF and the derivation side gate opening / closing means 20NB related to the processing tank 10N are driven and controlled to switch the introduction side gate 12NF and the derivation side gate 12NB to the closed state (ST22). That is, the open state (“◯”) shown in FIG. 7D is changed to the closed state (“×”) shown in FIG. That is, all the gates are returned to the initial state.

  At the same time, pushers 70NF and 70NB (70OF and 70OB) for the front and rear tidal tanks 10NF and 10NB (10OF and 10OB) of the treatment tank 10N (10O) are moved from the forward position shown in FIG. ) (BK) is controlled to return to the reverse position (initial position) shown in (ST23). At this stage [FIG. 7E], all the pushers have been returned to their initial positions.

  When proceeding to the next cycle, since it is determined that the initial state has been established (YES in ST10), the operation for switching to the initial state (ST11, ST12, ST13) is not necessary and is started from ST14. . When an operation stop command is generated (YES in ST24), stop processing (ST25) is performed and the execution of the drive control program is terminated.

  In the case of the surface treatment apparatus having such a configuration, this surface treatment method is performed as follows. Considering the case where the first flat plate-shaped object (work "F") is fed from the front side (processing tank 10M side) to the processing tank 10N, the work "F" is in a dry state (level Ll). The first step of supplying the treatment liquid and switching the pre-tidal tank 10NF to the full liquid state (level Lh) after being introduced into the pre-tidal tank 10NF in FIG. 7 is performed as (A) → (B) in FIG. Is done.

  The partial process of introducing the workpiece “F” into the pre-tidal tank 10NF in the dry liquid state (level Ll) can be obtained by replacing the workpiece “G” with the workpiece “F” (C) → (D ). After that, the pusher 70NF (also used as 70MB) is returned to the original state as shown in FIG.

  In addition, the plate-shaped object (work "F") is switched from the pre-driving tank 10NF to the processing tank after switching to the communication state (the gate 12NI is open) between the pre-driving tank 10NF and the processing tank 10N in the full liquid state. The 2nd process made to carry in to 10N is implemented by (B) of FIG. In the subsequent third step, that is, after the previous flat plate-shaped object (work "F") is carried into the treatment tank 10N, the pre-till tank 10NF and the treatment tank 10N are switched to an isolated state (the gate 12NI is closed) and After the switching, before introducing the next flat plate-shaped object (work "G"), the treatment liquid in the front tidal tank 10NF is discharged to the outside (liquid storage tank 17N), and the front tidal tank 10NF is in a dry state (level Ll). The step of switching to is performed in FIG.

  Thereafter, the workpiece “F” is subjected to a surface treatment (chemical conversion treatment) together with the workpiece “E” previously carried. After this surface treatment is completed, the processing tank 10N and the post-drying tank 10NB in the full liquid state (level Lh) are switched to the communication state (the gate 12NO is opened), and after switching, the workpiece “F” is moved from the processing tank 10N. The 4th process made to carry out to the freezing tank 10NB is implemented by (A)-> (B) of FIG. At this stage, the work “D” in the post-tidal tank 10NB shown in FIGS. 7B and 7C may be read as the work “F”. That is, in the case of the work sequence shown in FIG. 7, the work “D” and the work “E” are simultaneously carried out before the work “F” is carried out. That is, the workpiece “F” is unloaded after two transfer cycles.

  Then, after unloading, the processing tank 10N and the post-tidal tank 10NB are switched to an isolated state (the gate 12NO is closed), and after switching, the processing liquid in the post-tidal tank 10NB is discharged to the outside (liquid storage tank 17N). The fifth step of switching the standing / drying tank 10NB to the dried liquid state (level Ll) is performed by (B) → (C) in FIG. In this case, the workpiece “D” in the post-tidal tank 10NB shown in FIGS. 7B and 7C is read as the workpiece “F”.

  Finally, after derivation and transfer of the previous work “F”, before the next work “G” is unloaded, the processing liquid is supplied to the post-drying tank 10NB and the post-drying tank 10NB is filled (level). The sixth step of switching to (LH) is performed by (C) → (D) [(E), (A)] → (B) in FIG.

  Therefore, according to the surface treatment method (apparatus) according to the first embodiment, the workpiece 200 can be carried into the treatment tank (10N) by horizontally conveying (transversing) the treatment liquid. The problem with the conventional batch processing method in which workpieces are directly introduced into the processing solution from the atmosphere (vibrations and vibrations are generated on the workpieces. The workpieces are deformed or bent) can be wiped out thinly or flexibly. Even in the case of a flat plate-shaped object (200) rich in properties, high quality processing can be performed reliably. Wasted work can be avoided. In addition, it is possible to greatly contribute to the enhancement of international competitiveness by further improving the quality of electronic components and electronic devices while reducing the size and cost of the surface treatment apparatus.

  Further, since the workpiece 200 can be carried into the processing tank 10N through the relatively wide carry-in passage portion 11NI, the workpiece is processed through the introduction guide in which a pair of introduction guide rollers 81PL and 81PR are arranged narrowly. The problems of the conventional continuous processing system carried into the tank 10 (work damage or damage due to collision) can be cleared. From this point, it is possible to perform higher quality processing and improve the production yield. Moreover, the adaptability with respect to the flat plate-shaped object (work 200) which is much thinner and more flexible is high.

  Moreover, since it is possible to introduce and carry in the state where everything is immersed in the treatment liquid except that the workpiece 200 is temporarily suspended in the pre-driving tank 10NF in the dry liquid state in preparation for carrying into the treatment tank 10N. The problems (overreaction with residual liquid, progress of oxidation, dust adhesion) in the conventional batch processing method in which the transport in the atmosphere (V1, H1, V2) is longer at a position higher than the processing tank 10N are wiped out. can do. From this point as well, a significant improvement in quality can be promoted.

  In addition, since the vertically suspended work is formed so as to be transported horizontally in the liquid in the front and rear tidal tanks (10NF, 10NB) and in the processing tank (10N), conventional batch processing that requires lifting of the work is essential. Compared with the case of the system, the apparatus height can be lowered. In other words, equipment work is advantageous and dangerous work at high places can be wiped out, and the surroundings are not soiled. In addition, since the cover 85 can be provided in the upper open portion of each tank, it is possible to eliminate (or drastically drastically reduce) dust adhesion that adversely affects the quality of the workpiece 200 being transferred. So, you can expect dramatic quality processing.

  Further, since it is not necessary to divide into a plurality of treatment tanks (10N-1,..., 10N4) as in the conventional batch treatment method, the liquid composition can be easily managed and the surface treatment can be performed without variation.

  Moreover, since the workpiece | work 200 can be conveyed continuously and surface-treated continuously, productivity is high. The liquid composition is also constant. From this point, it is possible to perform higher quality processing.

  Further, compared to the conventional continuous processing method in which a large amount of processing liquid Qr leaks from the opening portion 11PN, the amount of processing liquid leaking from the introduction passage portion 11NF, the carry-in passage portion 11NI, and the like is greatly reduced. The supply pump 33R and the like can be reduced in size, which is advantageous in terms of equipment economy. It is also effective for downsizing the entire device.

  In addition, it is not necessary to add a complicated and expensive vertical suspension state maintaining means etc. used in the conventional batch processing method in which the lower end portion of the workpiece 200 in the free state is directly lowered and carried into the processing liquid, so that the cost can be reduced. In addition, it is possible to promote downsizing of the treatment tank 10N and the entire apparatus, and to reduce the maintenance burden.

  Further, the work conveying means is formed of two systems of pushers (70NF, 70NB) and (70N) and a belt conveyor 75 dedicated to the plating treatment tank. Also from this point, the apparatus can be downsized, easy to handle, and smooth and quick work transfer can be guaranteed.

  Moreover, since it is sufficient to provide the tidal tanks 10NF and 10NB before and after the processing tank 10N, the embodiment is easy to implement and the structure is simple and the handling is easy.

  Further, the gate opening / closing means (20NF, etc.) slides laterally along the inner wall surface of the tank using the vertical force applied from outside the tank (10NF, etc.). Since the passage portion (12NF or the like) is formed to be openable and closable, the structure is simple, the embodiment is easy to implement, and stable operation is possible. Moreover, since the occupation space in a tank is also small, size reduction of the said tank is not inhibited.

  Furthermore, each liquid supply means (31NF, etc.) has a forced pressure supply structure, and each liquid discharge means (41NF, etc.) forcibly opens the lower discharge port (14NFH, etc.) of the tidal tank (10NF, etc.). Since it has a natural discharge structure, the structure is much simpler, and stable supply and rapid discharge are possible. There is no adverse effect (sway or vibration) on the flat plate shaped object (200) in the tank.

  Furthermore, since each gate (12NF, etc.) can be opened and closed without being subjected to liquid differential pressure inside and outside the tank, simplification of the structure can be further promoted and smooth opening and closing can be performed with small power.

  Furthermore, the work conveying means includes a pusher that serves both for introduction on the front treatment tank side and for introduction on the rear treatment tank side, and a pusher 70N that serves both for loading into the treatment tank and for carrying out from the treatment tank. Since it is formed, the introduction operation and the derivation operation can be reliably synchronized with each other. Therefore, the adjustment between the transfer operation and the production cycle is facilitated, and the structure of the workpiece transfer means can be simplified and the cost can be reduced.

  Since the drive control means (100) is configured to drive and control each means fully automatically, handling is extremely easy and the running cost can be greatly reduced.

(Second Embodiment)
In the second embodiment, as shown in FIGS. 8 and 9, a liquid draining tank 10MN (10NO) is provided between the processing tanks 10M, 10N (10N, 10O), and the front processing tank 10M (10N) is provided. The processing liquid adhering to the workpiece 200 that has been conveyed is formed so as to be prevented from mixing into the rear processing tank 10N (10O).

  As in the case of the first embodiment, a leak recovery unit 16NF is provided immediately before the pre-tidal tank 10NF, and a leak recovery unit 16NB is provided immediately after the post-tidal tank 10NB. Therefore, the processing liquid recovered by the leak recovery units 16NF and 16NB can be reused as the processing liquid in the processing tank 10N.

  Here, the dimension (length) in the X direction of the leak recovery unit 16NF (16NB) is ¼ or less of the length of the pre-tidal tank 10NF (10NB). There is no need to make it larger. Therefore, in this embodiment, the leak recovery unit 16NF (16NB) is integrally incorporated in the liquid draining tank 10MN (10NO) (adjacent in the front-rear position in the X direction shown in FIG. 9). That is, the liquid draining tank 10MN (10NO) is substantially formed from the recovery tank 16MB (16OF), but it is sufficient that the liquid drained (spontaneously dropped) from the workpiece 200 can be recovered. There is no problem in terms of recovery area).

  In other words, if it is assumed that the leak recovery unit 16NF and the leak recovery unit 16B are provided, relatively small dimensions (length in the X direction) are provided in front of the front and bottom tidal tanks 10NF and 10NB. As a result, it is possible to secure empty tanks (that is, liquid draining tanks 10MN and 10NO) in which the workpiece 200 being transported can be temporarily held in a vertically suspended state. If these liquid draining tanks 10MN and 10NO are used, the production cycle is affected. The liquid draining process can be carried out without any problem.

  Thus, according to the second embodiment, the same operational effects as in the case of the first embodiment can be obtained, and further, an empty space between the processing tanks 10M and 10N (10N and 10O) can be provided. Since the effectively used liquid draining tank 10MN (10NO) is formed, the amount of the processing liquid brought out from the front side processing tank 10M (10N) and brought into the rear side processing tank 10N (10O) is suppressed to a very small amount. be able to. Therefore, the surface treatment in the rear side treatment tank 10N (10O) can be performed with higher quality. Moreover, the freedom degree of the adjustment range of a production cycle and a conveyance timing can be expanded, ensuring the whole production cycle.

  Composition management of each processing solution in each processing tank 10M, 10N, 10O, etc. becomes easy. Since the processing liquid collected in the liquid draining tank can be reused while preventing early deterioration of each processing liquid, the running cost can be reduced. In particular, the effective use of an expensive plating solution has a large effect, and the processing cost (production cost) can be greatly reduced.

  INDUSTRIAL APPLICABILITY The present invention is useful when a high-quality surface treatment is performed on a thin flat plate-shaped object (for example, a printed circuit board) having high flexibility without being deformed or scratched.

It is a schematic side view for demonstrating the surface treatment apparatus which concerns on the 1st Embodiment of this invention. It is an external appearance perspective view for demonstrating example of arrangement | positioning aspects similarly, such as a front-end tidal tank, a processing tank, and a back-end tidal tank. Similarly, it is a longitudinal cross-sectional front view for demonstrating the relationship between a front tidal tank (rear tidal tank), a gate opening / closing means, a liquid supply means, a liquid discharge means, and the like. Similarly, it is a figure for demonstrating the opening / closing operation | movement of a gate opening / closing means. Similarly, it is a block diagram for demonstrating a drive control apparatus. Similarly, it is a flowchart for explaining a drive control operation. Similarly, it is a timing chart for explaining a drive control operation. It is a schematic side view for demonstrating the surface treatment apparatus which concerns on the 2nd Embodiment of this invention. Similarly, it is a top view for demonstrating a liquid draining tank. It is a figure for demonstrating the prior art example of a batch processing system. It is a figure for demonstrating the prior art example of a continuous processing system. It is a figure for demonstrating the example of a guide apparatus employ | adopted in the case of a continuous processing system.

Explanation of symbols

10 NF Pre-tidal tank 10 N Processing tank 10 NB Post-tidal tank 11 NF Introductory passage part 11 NI Carry-in passage part 11 NO Carry-out passage part 11 NB Derivation passage part 12 NF Introduction-side gate 12 NI Carry-in side gate 12 NO Carry-out side gate 12 NB Derivation side gate 20 NF Means 20NI Loading-side gate opening / closing means 20NO Unloading-side gate opening / closing means 20NB Deriving-side gate opening / closing means 30NF Preliminary side liquid drip switching means 31NF Preliminary side liquid supply means 41NF Preliminary side liquid discharge means 30N Liquid circulation means 30NB Postside liquid Tidal switching means 31NB Post-side liquid supply means 41NB Post-side liquid discharge means 70NF, 70N, 70NB Pusher (work transport means)
75 Belt conveyor 85 Cover 90 Rail 93 Carrier 98 Jig 100 Computer (drive control means)

Claims (2)

A treatment tank for treating the workpiece with the treatment liquid;
A pre-tidal tank that is disposed on the front side of the processing tank and is in a tidal state by the processing liquid;
A rear tidal tank disposed on the rear side of the processing tank and being in a tidal state by the processing liquid;
A loading-side gate that opens and closes between the pre-tidal tank and the processing tank;
An unloading gate that opens and closes between the post-treatment tank and the treatment tank;
In a surface treatment apparatus having
Providing an overflow tank for recovering the treatment liquid overflowed from the treatment tank, the pre-tidal tank and the post-tidal tank ,
The overflow tank matches the liquid level of the pre-tidal tank or the post-tidal tank in the full state with the liquid level of the processing tank in a state where the carrying-in gate or the unloading gate is closed. surface treatment apparatus, characterized in that letting. In claim 1 ,
Each of the pre-tidal tank and the post-tidal tank supplies the processing liquid from the bottom of the tank through the current plate to the liquid level from the dry state to the full state where the processing liquid overflows. A surface treatment apparatus comprising liquid supply means for lifting.

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