JP4767878B2 - Temperature and humidity chamber - Google Patents

Description

  The present invention relates to a technical field of a constant temperature and humidity chamber that generates air having a desired temperature and humidity.

Conventionally, there are known thermo-hygrostats used for burn-in processing for reliability evaluation and screening of various semiconductor elements and electronic circuits, etc., and for testing the heat resistance and moisture resistance of various articles and materials. It has been. In Patent Document 1 below, in this type of constant temperature and humidity chamber, a heat pipe in which alcohol is sealed in a copper tube is arranged so that the heat medium evaporation side is located in the air conditioning chamber and the heat medium condensing side is located outside the air conditioning chamber. However, a technique for setting the temperature and humidity in the air-conditioned room to the target temperature and humidity by adjusting the cooling on the heat medium condensing side by the operation of the fan is disclosed.
Japanese Patent No. 2603407

  However, in Patent Document 1, the cooling on the heat medium condensing side is adjusted by the operation of the fan, that is, the heat medium condensing side is cooled using the outside air. It cannot be lowered further.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a constant temperature and humidity chamber capable of generating air having a temperature lower than the outside air temperature.

The invention according to claim 1 is a test chamber, an air-conditioning chamber provided for adjusting the temperature and humidity of the air in the test chamber to a target temperature and humidity, and air between the test chamber and the air-conditioning chamber. A constant temperature and humidity chamber comprising a circulating air blowing unit, a humidifying unit for humidifying air flowing into the air conditioning chamber from the test chamber, and a cooling unit for cooling the air, wherein the cooling unit is A heat-absorbing part disposed in the air-conditioned room, a heat-dissipating part having a first heat-dissipating part and a second heat-dissipating part, and the first heat-dissipating part and the second heat-dissipating part. A control unit capable of performing control to function, and a heat pipe phenomenon that is disposed so as to extend across the air-conditioned room and the outside of the air-conditioned room, and causing a heat pipe phenomenon in the working fluid sealed in the enclosed body, and a heat transport unit comprising a heat pipe for heat transport to the heat radiating portion from For example, the heat absorbing portion, the end portion of the heat transport part which is located the air-conditioned room and is heat-exchangeably connected to the second heat radiation member, the other end of the heat transport part located at the air conditioning outdoor The heat transport part is discharged so that the temperature of the heat transport part is lowered to a temperature lower than the outside air temperature, and the first heat radiating part is connected to the heat absorbing part. the second is connected to the heat-exchangeably said heat transporting part in an intermediate position between the heat radiating portion state, and are not to release the heat of the heat transport part outside air as the cooling medium, the control unit, the air-conditioned room When the temperature becomes lower than the outside air and when the temperature in the air-conditioned room is lowered, control for suppressing the function of the first heat radiating unit is performed .

  According to the present invention, when both the humidifying unit and the cooling unit are operated, the air flowing into the air-conditioning chamber is humidified by the humidifying unit, the air is cooled by the cooling unit, and further heating is required. Heated and this air is supplied to the test chamber.

  In such a configuration, the cooling unit is enclosed in a sealed body, a heat absorbing unit disposed in the air conditioned room, a heat radiating unit disposed outside the air conditioned room, and having a first heat radiating unit and a second heat radiating unit. A heat transport part for causing the heat pipe phenomenon to occur in the generated working fluid and transporting heat from the heat absorbing part to the heat radiating part. The heat absorbing part and the first and second heat radiating parts Is thermally connected to the heat transport section, the first heat radiating section is configured to release heat of the heat transport section using outside air as a cooling medium, and the second heat radiating section is configured to emit the heat transport section. Since the heat of the heat transporting part is released so that the temperature of the air is lowered to a temperature lower than the outside air temperature, the cooling performance is higher than when only the first heat radiating part is provided as in the prior art. Can be provided.

  That is, according to the present invention, since the air in the test chamber is cooled by the first heat radiating portion using the outside air, the temperature of the air in the test chamber can be radiated with a large heat radiation amount toward the outside air temperature. The second heat radiating portion can further cool to a temperature lower than the outside air temperature.

In addition, by disposing the first heat dissipating part away from the second heat dissipating part, it is possible to avoid the risk of the other heat dissipating part taking away the cold of one heat dissipating part, and high cooling. Efficiency can be obtained. The heat pipe phenomenon means that the working fluid at the position of the heat absorbing part evaporates due to the heat absorbed by the heat absorbing part, and the vapor of the working fluid moves to the heat radiating part. This is a phenomenon in which the vapor that reaches the position of the heat radiating portion condenses.
Moreover, since the vapor | steam movement destination (arrival site | part) will become the highest temperature except each site | part corresponded to an endothermic part among each site | part of a heat transport part, as this invention, each of a heat transport part When the second heat radiating part is installed at the above-mentioned part that has the highest temperature among the parts, it is possible to obtain a higher cooling efficiency than when the second heat radiating part is installed at another part of the heat transporting part. And lower temperatures can be reached.

According to a second aspect of the present invention, there is provided the constant temperature and humidity chamber according to the first aspect of the present invention , wherein an external air circulation unit for ventilating the outside air to the first heat radiating unit, and the first air in the external air circulation unit. A ventilation blocking unit capable of blocking the ventilation of outside air to the heat radiating unit, and the control unit stops the function of the first heat radiating unit by blocking the ventilation blocking unit .

The invention according to claim 3 is the constant temperature and humidity chamber according to claim 1, further comprising a blower that blows outside air to the first heat radiating unit, and the control unit stops the blower. Thus, the function of the first heat radiating portion is stopped.

According to a fourth aspect of the present invention, there is provided the constant temperature and humidity chamber according to any one of the first to third aspects, further comprising a temperature / humidity detection unit that detects a temperature / humidity of the air in the test chamber , and the control unit. based on the output signal of the temperature and humidity detector, it is of even that controls the operation of the humidifying part and the cooling part.

  According to this invention, air having a target temperature and humidity can be generated according to the temperature and humidity detected by the temperature and humidity detector.

Invention of Claim 5 is equipped with the heat absorption part temperature detection part which detects the temperature of the air of the area | region adjacent to the said heat absorption part in the constant temperature and humidity chamber of any one of Claim 1 thru | or 4 , The control unit causes the first heat radiating unit to function only until the temperature detected by the heat absorbing unit temperature detecting unit decreases to a predetermined temperature, and is detected by the heat absorbing unit temperature detecting unit. When the temperature drops to a predetermined temperature, the operation of the second heat radiating unit is started.

Invention according to claim 6, in a thermo-hygrostat of claim 2, comprising a heat absorbing portion temperature detection part for detecting the air temperature in the area adjacent to the heat absorbing portion, wherein the control unit, the endothermic Only until the temperature detected by the part temperature detecting unit is lowered to a predetermined temperature, the first heat radiating unit is caused to function , and the air blocking unit is opened , and the heat absorbing unit temperature detecting unit is opened. When the temperature detected by (2) decreases to a predetermined temperature, the operation of the second heat radiating section is started.

According to the fifth and sixth aspects of the present invention, the operating time of the second heat dissipating part is made possible as long as the second heat dissipating part is always operated during the period in which the air in the test chamber is to be cooled. Can be suppressed. Therefore, when the second heat radiating unit is driven by electric power, power consumption can be suppressed as much as possible.

  Further, when the second heat radiating portion is composed of a Peltier element, the first heat radiating portion is quickly cooled to the outside air temperature and then cooled to a temperature lower than the outside air temperature by the Peltier element. Therefore, in order to operate the Peltier element from a low temperature, when the air in the test chamber is hot, it is possible to avoid a situation in which a large amount of energy is required to lower the temperature of the Peltier element itself. Even in a Peltier device having a small heat dissipation capacity compared to the heat dissipation portion, the air in the test chamber can be quickly cooled.

  The blockage of air flow in the first heat radiating portion is not limited to a mode of completely blocking the flow of air, and includes a mode in which a slight air flow or air leakage remains.

The invention described in claim 7 is the constant temperature and humidity chamber according to claim 5 or 6 , further comprising an outside air temperature detection unit for detecting an outside air temperature, wherein the control unit is detected by the heat absorption unit temperature detection unit. When the temperature falls to a temperature that is higher than the temperature detected by the outside air temperature detection unit by a predetermined first temperature, the function of the first heat dissipation unit is stopped and detected by the heat absorption unit temperature detection unit. that temperature, said predetermined from the temperature detected by the outside air temperature detection unit, drops to the first temperature is greater than the second temperature is higher by a temperature, which to start the operation of the second heat radiating portion It is.

  According to the present invention, the start timing of the heat radiating operation by the second heat radiating portion is determined such that the temperature detected by the heat absorbing portion temperature sensor is predetermined from the temperature detected by the outside air temperature sensor. Therefore, the temperature of the components constituting the second heat radiating portion itself is set to the temperature before stopping the substantial heat radiating operation by the first heat radiating portion. It becomes possible to reduce to a certain temperature. Therefore, the temporary decrease in the cooling speed as described above can be prevented or suppressed.

The invention according to claim 8, in thermo-hygrostat according to any one of claims 1 to 7, wherein the second heat radiating portion is one that is configured by using a Peltier element.

  According to the present invention, it is possible to configure a thermo-hygrostat capable of lowering the air in the test chamber to a temperature lower than the outside air temperature by using a member that has been conventionally used.

The invention according to claim 9, in thermo-hygrostat according to any one of claims 1 to 8, wherein the second heat radiation member, which is disposed above said first heat radiation member It is.

  According to this invention, the working fluid can be circulated efficiently in the heat transport section.

  According to the present invention, it is possible to realize a constant temperature and humidity chamber capable of generating air having a temperature lower than the outside air temperature.

  Embodiments according to the present invention will be described below with reference to the drawings. FIG. 1 is a side view showing a mechanical configuration of an embodiment of a cooling unit provided in a thermo-hygrostat according to the present invention.

  As shown in FIG. 1, the cooling unit 1 is installed on a heat pipe 2 as an example of the heat transport unit, a heat absorbing unit 3 installed on one end of the heat pipe 2, and the other end of the heat pipe 2. The heat radiating part 4 is provided. The cooling unit 1 is partitioned by a heat insulating wall 21 described later.

  The heat pipe 2 receives the heat absorbed by the heat absorbing portion 3 at the one end portion of the heat pipe 2 and transports it to the other end side, and is made of a material having high thermal conductivity such as copper or aluminum. The pipe-shaped case 2a and a working fluid such as water or alcohol enclosed in the case 2a in a vacuum state.

  The heat absorption part 3 is for absorbing the heat of the object to be cooled (air in the test chamber to be described later) and transmitting the heat to the working fluid. For example, a base part (not shown) fitted to the case 2a; And a plurality of fins 3a erected at appropriate positions on the outer peripheral surface of the base. The base and the fins 3a are made of a material having high thermal conductivity such as copper or aluminum. The fin 3a absorbs heat from the air in the test chamber and transmits the absorbed heat to the base. The base portion is in thermal contact with the heat pipe 2 and transmits heat absorbed by the fins 3a to the working fluid via the case 2a. In addition, the structure of the heat absorption part 3 is not restricted to the above-mentioned thing, For example, you may abbreviate | omitted the fin 3a. However, since the fin 3a increases the contact area in contact with the air in the test chamber and increases the heat absorption efficiency of the heat absorption part 3 as compared with the case where the fin 3a is not provided, the fin 3a is omitted. Compared with the fin 3a, the heat absorption efficiency can be further improved.

  When the working fluid that has absorbed heat (evaporated working fluid) at the one end of the heat pipe 2 moves to the heat radiating unit 4, the heat radiating unit 4 releases the heat from the working fluid (working fluid). The first heat radiating part 5 and the second heat radiating part 6 are separated from each other by a certain distance. The second heat radiating part 6 is installed at the other end of the heat pipe 2, and the first heat radiating part 5 is installed at an intermediate position between the second heat radiating part 6 and the heat absorbing part 3.

  The first heat radiating portion 5 includes a heat sink 7 including a base portion (not shown) fitted to the case 2a and a plurality of fins 7a standing on the outer peripheral surface of the base portion. The heat sink 7 is made of a material having high thermal conductivity, such as copper or aluminum, and is in thermal contact with the heat pipe 2 to transfer heat transferred from the working fluid through the case 2a to the fins 7a. introduce. The fin 7a absorbs heat from the base and releases the absorbed heat to the outside. In addition, the structure of the heat absorption part 3 is not restricted to the above-mentioned structure, For example, you may abbreviate | omitted the fin 7a. However, the fin 7a increases the contact area where the heat sink 7 comes into contact with the outside air as compared with the case where the fin 7a is not provided, and increases the heat dissipation efficiency of the first heat radiating portion 5. The one having the fins 7a can improve the heat radiation efficiency more than the omitted one. Moreover, the 1st thermal radiation part 5 does not necessarily need to be equipped with the heat sink 7, For example, the aspect which installs the fin 7a directly in the heat pipe 2 without interposing the heat sink 7 is also employable. In addition to the heat sink 7, the first heat radiating unit 5 may be, for example, a jacket enclosing normal temperature water set by the outside air.

  The second heat radiating portion 6 is configured using, for example, a Peltier element 8. The Peltier element 8 has a well-known configuration and will not be described in detail. For example, P-type semiconductors and N-type semiconductors are alternately arranged in parallel, and one end of each semiconductor is connected to a substrate (hereinafter referred to as a first element). 1 substrate) and two adjacent semiconductors as one set, and for each set, the other end of the semiconductor is a substrate different from the first substrate (hereinafter referred to as a second substrate). And by supplying a direct current to a series circuit composed of each semiconductor and substrate, one of the first and second substrates serves as a heat generating side, and the other substrate Act as the heat absorption side. The Peltier element 8 is attached to the case 2a via a metal attachment member 9 having a relatively high thermal conductivity. In addition to the Peltier element 8, the second heat radiating unit 6 is constituted by a known water-cooled cooler using a coolant having a temperature lower than the normal temperature water as a cooling medium, or a well-known vapor compression cooler. Etc. can also be adopted.

  The fan 10 performs an air blowing operation toward the substrate on the heat dissipation side of the Peltier element 8, and is for increasing the heat dissipation efficiency by the substrate. The fan 10 is an example of the outside air circulation unit. In addition, as a thing for improving the thermal radiation efficiency by a board | substrate, not only the said fan 10 but a heat sink and a water cooling jacket are employable.

  In the cooling unit 1 having such a configuration, the working fluid located on one end side (hereinafter referred to as the heat absorption side) of the heat pipe 2 in which the heat absorption unit 3 is installed causes the heat absorption unit 3 and the case 2a of the heat pipe 2 to move. Then, heat (latent heat, heat of vaporization) is absorbed from the air in the test chamber, and the working fluid evaporates.

  Here, by installing the cooling unit 1 in an appropriate installation mode, the vapor of the working fluid that has absorbed heat on the heat absorption side moves to the heat dissipation side at a substantially sonic speed. The vapor of the working fluid that has moved to the heat radiating side is liquefied again by releasing heat by the action of the first and second heat radiating portions 5 and 6, and this liquefied working fluid recirculates to the heat absorbing side again. The cooling unit 1 moves heat by such phase change and movement of the working fluid.

  Next, the thermo-hygrostat 100 using such a cooling unit 1 will be described. FIG. 2 is a cross-sectional view showing the configuration of the constant temperature and humidity chamber 100.

  As shown in FIG. 2, the constant temperature and humidity chamber 100 includes, for example, a test chamber R1 for performing tests such as heat resistance and moisture resistance of various articles and materials, and temperature and humidity of air (atmosphere) in the test chamber R1. The air conditioning room S1 is a space for maintaining the target value, and the first heat source adjustment room S2 and the second heat source adjustment room S3 are separated from the air conditioning room S1. The test room R1 and the air-conditioning room S1 are partitioned by a partition wall 13 installed at an appropriate place in a space surrounded by a heat insulating wall 21 in a manner having upper and lower communication portions 11 and 12, respectively.

  A fan 14 that performs an air blowing operation is installed at an appropriate place in the air conditioning room S1 (for example, the upper part of the air conditioning room S1), and the fan 14 is installed in the test room R1 and the air conditioning room S1 surrounded by the heat insulating wall 21. This is for circulating air in a predetermined direction (in the direction of arrow X in FIG. 2).

  A heater 15 for heating air is installed at an appropriate location upstream of the fan 14 in the air conditioning room S1, and a humidifier 16 is installed further upstream. The humidifier 16 evaporates the contained water by heating it using the electric heater 25, and humidifies the air flowing in from the test chamber R1. Thus, saturated air can be generated, and the constant temperature and humidity controller 100 adjusts the saturated air to a desired humidity by heating the saturated air with the heater 15.

  The first and second heat source adjustment chambers S2 and S3 are formed in parallel to each other, and are formed in a form adjacent to the air conditioning chamber S1 along the outer wall surface 21a of the heat insulating wall 21, and the cooling unit described above. 1 is disposed across a plurality of air conditioning rooms S1 and first and second heat source adjustment rooms S2 and S3. That is, in FIG. 1, the case 2 a formed in a straight line has been described, but here, the case 2 a is bent at an appropriate position between the first heat radiating portion 5 and the second heat radiating portion 6. The cooling unit 1 is installed through the partition wall 17 and the heat insulating wall 21 installed at the boundary between the first and second heat source adjustment chambers S2 and S3. Moreover, while the heat absorption part 3 is arrange | positioned in the suitable place between the heater 15 and the humidifier 16 of air-conditioning room S1, the 1st, 2nd thermal radiation parts 5 and 6 are spaced apart and provided by a fixed distance. The first heat dissipating unit 5 is disposed in the first heat source adjusting chamber S2, and the second heat dissipating unit 6 is disposed in the second heat source adjusting chamber S3. The second heat dissipating part 6 is disposed above the first heat dissipating part 5, whereby the working fluid in the case 2 a is efficiently circulated. FIG. 2 shows a case where the case 2a is bent at an appropriate position between the first heat dissipating part 5 and the second heat dissipating part 6. However, the present invention is not limited to this, and the case 2a is bent at another part. It may be formed, a plurality of bent portions may exist, or may be formed linearly. Further, the first and second heat source adjustment chambers S2 and S3 are not necessarily formed in parallel to each other.

  The first heat source adjustment chamber S2 includes one outer wall surface 21a of the heat insulating wall 21, the partition wall 17 facing the outer wall surface 21a, and between each end of the partition wall 17 and the outer wall surface 21a of the heat insulating wall 21. And the filters 18 and 19 having a plurality of holes (not shown), and the first heat radiating section 5 is disposed at a substantially central position of the first heat source adjustment chamber S2. Yes. A fan 20 that performs an air blowing operation is installed at an appropriate position inside the filter 18, and a circulation structure in which air circulates between the inside and the outside of the first heat source adjustment chamber S <b> 2 is configured by the operation of the fan 20. ing. That is, when the fan 20 is operated, the air in the first heat source adjustment chamber S2 is discharged to the outside through a hole formed in the filter 18, and the first heat source adjustment is performed via the filter 19 by the negative pressure generated by the discharge. Air is circulated between the inside and the outside of the first heat source adjustment chamber S2 by the outside air being taken into the inside from the outside of the chamber S2. The fan 20 is an example of the outside air circulation unit.

In addition, in order to prevent or greatly suppress the air flowing from the outside through the filter 19 as described above from hitting the first heat radiating part 5 (heat sink 7) at appropriate positions above and below the first heat radiating part 5. The ventilation prevention plates 22 and 23 as an example of the ventilation blocker are installed in a state of being pivotally supported on the rotation shafts O ₁ and O ₂ . When the air flowing in from the outside through the filter 19 may hit the first heat radiating part 5 or is intentionally applied, the ventilation prevention plates 22 and 23 are driven to an open position indicated by a solid line, while the air is When preventing or suppressing hitting the first heat radiating portion 5, it is driven to a closed position indicated by a dotted line. The ventilation prevention plates 22 and 23 are installed for the purpose of preventing the heat radiation operation by the first heat radiation part 5 from being substantially performed by being located at the closed position.

  When the airflow prevention plates 22 and 23 are located at the open position, the air flowing in from the outside through the filter 19 passes through the first heat radiating portion 5 (heat sink 7), so that the heat radiation efficiency by the first heat radiating portion 5 is improved. Increase. In addition, when there is a ventilation space on both sides in the direction orthogonal to the paper surface of the first heat radiating portion 5, the air that flows in from the outside through the filter 19 when the ventilation prevention plates 22 and 23 are located at the closed position. Is discharged from the filter 18 through the ventilation space. The ventilation space is not necessarily provided. Further, the ventilation block is not limited to the ventilation prevention plates 22 and 23, and may be a fixed plate that is fixed when the ventilation prevention plates 22 and 23 are located at the closed position. A ventilation space may be provided on both sides in the direction orthogonal to the paper surface of the heat dissipating part 5, and the air flowing in from the outside through the filter 19 may be discharged from the filter 18 to the outside through the ventilation space. In short, it is only necessary that the first heat dissipating part 5 can be regulated or significantly suppressed from flowing air at least in the vertical direction of FIG.

  The second heat source adjustment chamber S3 includes a plurality of holes provided between the partition wall 17, the facing wall 24 facing the partition wall 17, and each end of the facing wall 24 and the partition wall 17. The second heat radiating portion 6 is installed at a position above the heat absorbing portion 3.

  A circulation structure in which air circulates between the inside and the outside of the second heat source adjustment chamber S3 is configured by the operation of the fan 10 provided in the second heat radiation unit 6. That is, when the fan 10 is operated, the air in the second heat source adjustment chamber S3 is discharged to the outside through a hole (not shown) formed in the facing wall 24, and the second heat source adjustment chamber S3 is generated by the negative pressure generated by the discharge. The outside air is taken into the second heat source adjustment chamber S3 from the outside through the filters 25 and 26, so that the air circulates between the inside and the outside of the second heat source adjustment chamber S3. The circulating air passes through the substrate on the heat dissipation side of the Peltier element 8, thereby increasing the heat dissipation efficiency of the Peltier element 8.

  FIG. 3 is a block diagram showing an electrical configuration of the constant temperature and humidity chamber 100. As shown in FIG. 3, the constant temperature and humidity chamber 100 includes a cooling unit 1 shown in FIG. 1, an ambient temperature and humidity sensor 101, an outside air temperature sensor 102, a heat absorption part temperature sensor 103, a Peltier temperature sensor 104, and an input. An operation unit 105 and a control unit 106 are provided.

  The atmosphere temperature / humidity sensor 101 detects the temperature and humidity of the air (atmosphere) in the test chamber R1, and is, for example, slightly downstream from the communication portion 11 on the side where air flows out from the air conditioning chamber S1 to the test chamber R1. (Position indicated by point A in FIG. 2). Note that the installation position of the ambient temperature / humidity sensor 101 is not limited to the above-described position. (Position shown) etc. may be installed.

  The outside air temperature sensor 102 detects the temperature of the outside air used in the heat radiation operation by the first heat radiating unit 5, and is installed, for example, at a position slightly downstream from the filter 19 (a position indicated by a point C in FIG. 2). The The heat absorption part temperature sensor 103 detects the temperature of the air in the air conditioning room S1 at a position near the heat absorption part 3. The Peltier temperature sensor 104 detects the temperature of the Peltier element 8. For example, a thermocouple or a temperature measuring low antibody that detects the surface temperature of the Peltier element 8 is employed. The Peltier temperature sensor 104 is not limited to the above-described thermocouple or temperature measurement low antibody, and may detect the surface temperature in a non-contact manner. The temperature detected by the Peltier temperature sensor 104 is provided to stop the driving of the Peltier element 8 when the temperature of the Peltier element 8 exceeds a predetermined temperature in order to prevent deterioration or failure of the Peltier element 8. Sensor.

  The input operation unit 105 includes mechanical buttons such as a start / end button for starting or ending the operation of the constant temperature and humidity chamber 100, a setting button for setting a target temperature and humidity of the air in the test chamber R1, and the like. It includes a virtual button or the like configured by a switch or a touch panel display.

  The control unit 106 is composed of, for example, a microcomputer in which a ROM for storing a control program, a RAM for temporarily storing data, and the like are built, and the first fan drive control unit 1061 and the first functionally are controlled by the control program. It has 2 fan drive control part 1062, Peltier drive control part 1063, humidification control part 1064, heating control part 1065, and ventilation control part 1066.

  The first fan drive control unit 1061 controls the drive of the fan 14 installed in the air conditioning room S1, and in this embodiment, the period during which the temperature and humidity of the air in the test room R1 needs to be adjusted is The fan 14 is always operated. The second fan drive controller 1062 controls the drive of the fan 20 installed in the first heat source adjustment chamber S2 based on the detected temperature and humidity by the temperature sensors 101 to 103 and the set temperature and humidity. The Peltier drive control unit 1063 controls the drive of the Peltier element 8 and the drive of the fan 10 constituting the second heat radiating unit 6 based on the detected temperature and humidity by the temperature sensors 101 to 104 and the set temperature and humidity. is there. The humidification control unit 1064 controls the humidification operation by the humidifier 16 based on the temperature and humidity detected by the temperature sensors 101 to 104 and the set temperature and humidity. The heating control unit 1065 controls the heating operation by the heater 15 based on the detected temperature and humidity by the temperature sensors 101 to 104 and the set temperature and humidity. The ventilation control unit 1066 controls the rotational positions of the ventilation prevention plates 22 and 23 based on the detected temperature and humidity by the temperature sensors 101 to 104 and the set temperature and humidity.

  The first fan drive control unit 1061 operates the fan 14 in the air conditioning room S1 to circulate air between the test room R1 and the air conditioning room S1. When the ambient temperature in the test chamber R1 detected by the ambient temperature / humidity sensor 101 is higher than the dew point temperature determined by the set temperature and humidity (hereinafter referred to as the set dew point temperature), the humidification control unit 1064 The humidifying operation by the device 16 is stopped, and at least one of the second fan drive control unit 1062, the ventilation control unit 1066, and the Peltier drive control unit 1063 causes the cooling unit 1 to perform a cooling operation (heat radiation operation). The contents of control performed by the second fan drive control unit 1062, the ventilation control unit 1066, and the Peltier drive control unit 1063 will be described later.

  As a result, when the amount of water vapor contained in the air before cooling by the cooling unit 1 is larger than the saturated water vapor amount corresponding to the temperature of the air after cooling, the dew condensation operation is performed by condensation of the larger amount. As a result, when the air before and after passing through the heat absorption part 3 of the cooling unit 1 is compared, the dew point temperature of the air after passing through the heat absorption part 3 is lower than the air before passing through the heat absorption part 3. It becomes.

  Thereafter, the heating control unit 1065 causes the heater 15 to perform a heating operation, and the air whose temperature is increased after dehumidification is supplied to the test chamber R1 by the operation of the fan 14. While such air circulation is performed, the temperature and humidity of the air in the test chamber R1 approaches the target temperature and humidity.

  FIG. 4 is a flowchart showing processing of the control unit 106 in the constant temperature and humidity chamber 100.

  As shown in FIG. 4, the power supply (not shown) of the constant temperature and humidity chamber 100 is turned on (YES in step # 1), and the target temperature and humidity are set by the input operation unit 105 (YES in step # 2). When a start instruction is given by the input operation unit 105 (YES in step # 3), the control unit 106 controls the temperature and humidity of the atmosphere in the test chamber R1 using the cooling unit 1, the heater 15, and the humidifier 16. Is executed (step # 4).

  Then, control unit 106 executes the process of step # 4 until an operation stop instruction is issued (NO in step # 5). When an operation stop instruction is issued (YES in step # 5), temperature and humidity control is performed. Is stopped (step # 6). Further, control unit 106 determines whether or not the power is turned off (step # 7). If it is determined that the power is not turned off (NO in step # 7), the control unit 106 returns to step # 2 to If it is determined that is turned off (YES in step # 7), the series of processes is terminated.

  Next, the temperature and humidity control in step # 4 of the flowchart shown in FIG. 4 will be described in detail. FIG. 5 is a diagram showing an operation matrix showing this temperature and humidity control. FIG. 5A is a graph showing a temperature / humidity range that can be set as a target, with temperature as the horizontal axis and humidity as the vertical axis, and the range indicated by the dotted line indicates the temperature / humidity range that can be set as the target. ing. Moreover, the range was divided into five areas: (1) high temperature and high humidity area, (2) high temperature and low humidity area, (3) medium temperature and high humidity area, (4) medium temperature and low humidity area, and (5) low temperature and high humidity area. At this time, in the present embodiment, the control unit 106 (second fan drive control unit 1062, ventilation control unit 1066 and Peltier drive control unit 1063) includes the ventilation prevention plate 22 in each temperature and humidity region (1) to (5). 23, the operation of the fan 20 and the second heat radiation part 6 is operated as shown in FIG. In FIG. 5B, “intermediate temperature” is a temperature slightly higher than the outside air temperature, and “low temperature” is a temperature lower than the outside air temperature. Further, the initial temperature of the air in the test chamber R1 is substantially the same temperature as the outside air temperature, and the initial humidity is a humidity between “high humidity” and “low humidity” in FIG. To do.

  Further, since the ventilation prevention plates 22 and 23 are located at the closed position, the ventilation prevention plates 22 and 23 are installed for the purpose of substantially not performing the heat radiation operation by the first heat radiation unit 5. When the first heat radiating unit 5 is not allowed to perform a heat radiating operation 106, the drive of the fan 20 is stopped and the ventilation prevention plates 22 and 23 are positioned at the closed position. Further, when causing the first heat radiating unit 5 to perform a heat radiating operation, the control unit 106 drives the fan 20 and positions the ventilation prevention plates 22 and 23 at the open position.

  The control unit 106 (1) places the ventilation prevention plates 22 and 23 in the closed position and stops the operation of the fan 20 and the second heat radiating unit 6 in the high temperature and high humidity region. This is because the target temperature and humidity are high, and thus it is not necessary to cause the first and second heat radiating units 5 and 6 to perform the cooling operation. (1) In the high-temperature and high-humidity region, the direction of the current supplied to the Peltier element 8 is reversed, and the substrate that functions as the heat generation side and the heat absorption side is switched, so that the second heat radiating unit 6 is heated. You may make it let.

  In addition, the control unit 106 (2) in the high temperature and low humidity region, as with the high temperature and high humidity region (1), positions the ventilation prevention plates 22 and 23 in the closed position and operates the fan 20 and the second heat radiating unit 6. Stop. In addition, you may make it make the 2nd thermal radiation part 6 perform heating operation.

  (3) In the middle temperature and high humidity region, the control unit 106 generates saturated air having a dew point temperature by the humidifier 16, and positions the ventilation prevention plates 22 and 23 in the open position and cools the fan 20 to cool the saturated air. While operating, the operation of the second heat radiating unit 6 is stopped. Further, the control unit 106 (4), in the middle temperature and low humidity region, positions the ventilation prevention plates 22 and 23 in the open position and operates the fan 20 while stopping the operation of the second heat radiating unit 6 to perform the first heat radiation. Only the part 5 performs the heat radiation operation, or the ventilation prevention plates 22 and 23 are positioned at the closed position and the operation of the fan 20 is stopped, while the second heat radiation part 6 is activated, and the first heat radiation part 5 Only let the heat dissipate. Which control is performed is determined according to the size of the target temperature and humidity and the relationship between the target temperature and the target humidity.

  Further, the control unit 106 (5) in the low temperature and high humidity region, the ventilation prevention plates 22 and 23 are positioned at the closed position and the operation of the fan 20 is stopped, while the temperature of the air in the test chamber R1 is set to be higher than the outside air temperature. The second heat dissipating part 6 is operated to lower the temperature. This is because if the first heat radiating portion 5 performs a substantial heat radiating operation in parallel with the heat radiating operation by the second heat radiating portion 6, an endothermic (evaporation) action occurs in the first heat radiating portion 5. Since the cooling performance of the heat dissipating part 6 cannot be fully utilized, the ventilation prevention plates 22 and 23 are positioned at the closed position and the operation of the fan 20 is stopped.

  The above control is based on the premise that the initial temperature of the air in the test chamber R1 is substantially the same temperature as the outside air temperature, but the initial temperature of the air in the test chamber R1 is a temperature different from the outside air temperature. In some cases, when it is necessary to cool the air in the test chamber R1, the control unit 106 may perform the following temperature and humidity control.

  That is, the control unit 106 performs different control when the target temperature is equal to or higher than the outside air temperature and when the target temperature is lower than the outside air temperature. Specifically, when cooling the air in the test chamber R1 to a target temperature equal to or higher than the outside air temperature, the control unit 106 positions the ventilation prevention plates 22 and 23 in the open position and operates the fan 20. Then, the operation of the second heat radiation part 6 is stopped. This is because the air in the test chamber R1 can be quickly cooled to the target temperature only by the heat radiation operation by the first heat radiation unit 5.

  Moreover, the control part 106 is controlled as follows, when cooling the air in test room R1 to the target temperature which is less than outside temperature. That is, as shown in FIG. 6, the second fan drive control unit 1062 is predetermined based on the temperature detected by the outside air temperature sensor 102 (hereinafter referred to as the detected outside air temperature) after the input operation unit 105 gives an instruction to start cooling. The fan 20 is operated and the ventilation prevention plates 22 and 23 are positioned at the open position until the temperature reaches a temperature higher by the temperature α (hereinafter referred to as a first determination temperature).

  Further, when both the drive stop timing of the fan 20 and the release of the airflow prevention plates 22 and 23 to the closed position and the Peltier element 8 are operated in parallel, the temperature of the heat absorbing portion 3 and the second heat radiating portion 6 is increased. The difference becomes smaller, the amount of heat transport decreases, and the temperature drop takes time. Therefore, in the present embodiment, the driving of the fan 20 is stopped at a timing before the temperature drop speed is reduced, that is, at a timing when the detected heat absorption unit temperature reaches a temperature higher than the detected outside air temperature by a predetermined temperature α, and The setting to the open position of the ventilation prevention plates 22 and 23 is canceled.

  Further, as shown in FIG. 6, the Peltier drive control unit 1063 has a temperature detected by the heat absorbing unit temperature sensor 103 (hereinafter, referred to as a detected heat absorbing unit temperature) that is decreased by the operation of the fan 20. The driving of the Peltier element 8 is waited until it reaches a temperature (hereinafter, referred to as a second determination temperature) that is higher than the temperature by a predetermined temperature β (β> α), and when the detected heat absorption part temperature reaches the second determination temperature, The element 8 is driven.

  The drive start timing of the Peltier element 8 is set to a timing at which the detected heat absorption part temperature reaches a temperature that is higher than the detected outside air temperature by a predetermined temperature β for the following reason. That is, when the detected endothermic temperature reaches the detected outside air temperature, the amount of heat absorbed by the Peltier element 8 is small, and the temperature of the component parts of the second heat radiating unit 6 including the Peltier element 8 is In some cases, it takes time to decrease to the detected outside air temperature. In this case, the cooling speed is temporarily decreased by the required time.

  Therefore, by setting the drive start timing of the Peltier element 8 to a timing at which the detected heat absorption part temperature reaches a temperature higher than the detected outside air temperature by a predetermined temperature β, the detected heat absorption part temperature is detected by the first heat radiating part 5. Before the temperature is lowered to the outside air temperature, the temperature of the component part itself of the second heat radiating unit 6 can be lowered to the detected outside air temperature, so that a temporary reduction in the cooling speed can be prevented or suppressed.

  As described above, in the present embodiment, not only the configuration for cooling the heat medium condensing side using the outside air (first heat radiating portion 5) but also the second heat radiating portion 6 described above is provided. The temperature of the air in the chamber R <b> 1 can be quickly cooled to the outside air temperature, and can be cooled to a temperature lower than the outside air temperature by the second heat radiating unit 6.

  Moreover, since the heat absorption part 3 of the cooling unit 1 can be controlled near the dew point temperature, the air flowing in from the test chamber R1 is excessively cooled like the conventional compression cooler (from the dew point temperature). (Cooling to a significantly lower temperature). As a result, the amount of water condensed on the surface of the cooling unit 1 (heat absorption part 3) is small, and corrosion of the components of the cooling unit 1 including the heat absorption part 3 can be suppressed. Since the amount of water vapor to be generated can be suppressed, the amount of water (humidification water) provided in the humidifier 16 can be reduced as compared with the prior art.

  Moreover, since the 2nd heat radiating part 6 was installed in the edge part on the opposite side to the said heat absorption part 3 used as the highest temperature among each part of case 2a, the 2nd heat radiating part 6 is made into the other site | part of a heat transport part. Higher cooling efficiency can be obtained compared to the case of installation, and a lower temperature can be achieved.

  Moreover, when the 2nd heat radiating part 6 is comprised with a Peltier element, after being cooled to the outside temperature rapidly by the 1st heat radiating part 5, it will be cooled by the Peltier element 8 to a temperature lower than outside temperature, and is low. In order to operate the Peltier element 8 from the temperature, when the air in the test chamber R1 is at a high temperature, it is possible to avoid a situation in which a large amount of energy is required to lower the temperature of the Peltier element 8 itself. Even in the Peltier element 8 having a small heat radiation capacity compared to the heat radiation part 5, the air in the test chamber R <b> 1 can be quickly cooled.

  In addition, when the air in the test chamber R1 is cooled to a target temperature that is lower than the outside air temperature, the driving of the fan 20 and the setting of the ventilating prevention plates 22 and 23 to the open position are stopped and released halfway. The cooling performance of the second heat dissipating part 6 can be fully utilized as compared with the case where the driving of the fan 20 and the setting of the ventilating prevention plates 22 and 23 to the open position are not stopped or released halfway.

  In this case, the following embodiment can also be adopted in addition to or instead of the contents of the embodiment.

  (1) Even if the current supply to the Peltier element 8 is stopped, the components of the second heat radiating unit 6 remain in a low temperature state for a while, so that the second heat radiating unit 6 cools the working fluid (heat absorption). This is considered to cause the temperature of the air in the test chamber R1 to move further to the lower temperature side than the target temperature. In view of this, when the air in the test chamber R1 reaches the target temperature, the direction of the direct current supplied to the Peltier element 8 is reversed, and the substrates functioning as the heat absorption side and the heat dissipation side are switched. It is preferable to prevent or suppress the temperature of the air in R1 from moving further to the lower temperature side than the target temperature so that the temperature of the air in the test chamber R1 is maintained at the target temperature. Further, when the operation of the cooling unit 1 is stopped, a reverse direct current may be supplied to the Peltier element 8 to return the working fluid to the outside air temperature as described above. Note that the direction of the direct current supplied to the Peltier element 8 may be switched automatically (by control) or manually by providing an operation button.

It is a figure which shows the mechanical structure of one Embodiment of the cooling unit with which the constant temperature and humidity chamber which concerns on this invention is equipped. It is sectional drawing which shows the structure of a constant temperature and humidity chamber. It is a block diagram which shows the electrical structure of a constant temperature and humidity chamber. It is a flowchart which shows the process of the control part in a cooling device. It is a figure which shows the operation | movement matrix which shows the operation | movement of a fan and a Peltier device. It is a graph which shows the operation | movement aspect of a 1st, 2nd thermal radiation part in case target temperature is lower than external temperature.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cooling unit 2 Heat pipe 2a Case 3 Heat absorption part 3a, 7a Fin 5, 6 1st, 2nd thermal radiation part 7 Heat sink 8 Peltier element 10, 20 Fan 11, 12 Communication part 13 Partition wall 14 Fan 15 Heater 16 Humidifier 17 Partition walls 18, 19, 25, 26 Filter 21 Heat insulation wall 21 a Outer wall surface 22, 23 Ventilation prevention plate 24 Opposite wall 100 Constant temperature and humidity chamber 101 Ambient temperature and humidity sensor 102 Outside temperature sensor 103 Endothermic temperature sensor 104 Peltier temperature sensor 105 Input operation unit 106 Control unit 1061, 1062 First and second fan drive control unit 1063 Peltier drive control unit 1064 Humidification control unit 1065 Heating control unit 1066 Ventilation control unit R1 Test room S1 Air conditioning room S2, S3 Heat source adjustment room

Claims (9)

A test room, an air-conditioning room provided for adjusting the temperature and humidity of the air in the test room to a target temperature and humidity, a blower unit for circulating air between the test room and the air-conditioning room, and the test room A constant temperature and humidity chamber provided with a humidifying unit for humidifying the air flowing into the air-conditioning chamber from, and a cooling unit for cooling the air,
The cooling part is
An endothermic part disposed in the air-conditioned room;
A heat dissipating part having a first heat dissipating part and a second heat dissipating part disposed outside the air-conditioning room;
A control unit capable of controlling the first heat radiating unit and the second heat radiating unit to function; and
Wherein arranged to extend across the air-conditioned room and said air-conditioning outdoor to bring about heat-pipe phenomenon in the working fluid sealed in inclusion bodies, consisting of a heat pipe for heat transport to the heat radiating portion from the heat absorbing portion A heat transport section,
The heat absorption part is connected to one end part of the heat transport part located in the air conditioning room so as to be capable of exchanging heat,
The second heat radiating section is connected to the other end of the heat transport section located outside the air-conditioning chamber so as to be capable of exchanging heat, and the heat transport is performed so that the temperature of the heat transport section falls to a lower temperature than the outside air temperature. Part of the heat,
The first heat radiating portion is connected to the heat transporting portion so as to be capable of exchanging heat at an intermediate position between the heat absorbing portion and the second heat radiating portion, and discharges heat of the heat transporting portion using outside air as a cooling medium. der is,
The controller is a thermo-hygrostat that performs control to suppress the function of the first heat radiating unit when the temperature in the air-conditioned room is lower than the outside air and when the temperature in the air-conditioned room is lowered . An outside air circulation part for venting outside air to the first heat radiation part;
A ventilation blocking part capable of blocking the ventilation of outside air to the first heat radiating part in the outside air circulation part,
The constant temperature and humidity chamber according to claim 1, wherein the control unit stops the function of the first heat radiating unit by blocking the ventilation block. A blower that blows outside air to the first heat dissipator;
The constant temperature and humidity chamber according to claim 1, wherein the control unit stops the function of the first heat radiating unit by stopping the air blowing unit. A temperature / humidity detection unit that detects the temperature / humidity of the air in the test chamber ,
The controller, on the basis of the output signal of the temperature and humidity detector, thermo-hygrostat according to any one of 請 Motomeko 1 to 3 that controls the operation of the humidifying part and the cooling part. An endothermic temperature detector that detects the temperature of the air in the region adjacent to the endothermic unit;
The control unit causes the first heat radiating unit to function only until the temperature detected by the heat absorbing unit temperature detecting unit decreases to a predetermined temperature, and is detected by the heat absorbing unit temperature detecting unit. The thermo-hygrostat according to any one of claims 1 to 4 , wherein when the temperature falls to a predetermined temperature, the operation of the second heat radiating unit is started. Comprising a heat absorbing portion temperature detection part for detecting the air temperature in the area adjacent to the heat absorbing portion,
The control unit causes the first heat radiating unit to function and opens the air blocking unit only until the temperature detected by the heat absorbing unit temperature detecting unit decreases to a predetermined temperature. the temperature detected by the heat absorbing portion temperature detection part decreases to a predetermined temperature, constant temperature and humidity of claim 2 to initiate the operation of the second heat radiation member. It has an outside temperature detector that detects the outside temperature.
The controller is
When the temperature detected by the endothermic temperature detector decreases to a temperature that is higher than the temperature detected by the outside air temperature detector by a predetermined first temperature, the function of the first radiator is stopped. ,
When the temperature detected by the endothermic temperature detector decreases to a temperature that is higher than the temperature detected by the outside air temperature detector by a second temperature higher than the first temperature, the second temperature is predetermined. The constant temperature and humidity chamber according to claim 5 or 6 , wherein the operation of the heat radiating unit is started. The second heat radiation member, thermo-hygrostat according to any one of claims 1 is formed by using a Peltier device 7. The second heat radiation member, thermo-hygrostat according to any one of the first radiating portion to more claims 1 are disposed above 8.

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