JP4776068B2 - Fine vibration control frame - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microvibration control frame employed in a production facility accompanied with microfabrication of a semiconductor or the like.
[0002]
[Prior art]
In facilities that produce semiconductors, small vibrations interfere with production because fine processing and precision inspection are performed. Therefore, in order to minimize the vibration with respect to the building frame, conventionally, the frame has been solidified, or a finite excitation source has been dealt with by increasing the weight of the frame. On the other hand, the layout of production equipment often requires a space with as few pillars as possible, and the floor below the floor where the main production line is located is a space for auxiliary equipment to support production equipment. A pair of upper and lower floors functions as a production factory. Furthermore, so-called multi-layering is required in which such a pair of upper and lower floors is further placed on the upper floor.
[0003]
In this way, facilities such as semiconductors are required to have long-span frames with high rigidity, but in general, in order to suppress vertical vibrations, as shown in FIG. Large steel truss structures a and b or steel reinforced concrete beams (not shown) are arranged on the upper and lower floors to secure the necessary rigidity. The steel truss structures a and b or steel reinforced concrete beams are used to produce Each concrete floor c, d in the machine space is individually received. In FIG. 7, the symbol e is a ceiling.
[0004]
[Problems to be solved by the invention]
However, in such a conventional building frame, when the steel truss beam structures a and b are adopted, the steel frame has poor damping performance against vibration, and the truss steel has a very large cross-sectional area in order to increase the rigidity accordingly. A large size is required, and moreover, a large number of materials are required to construct truss beam structures on the upper and lower floors, which is uneconomical.
[0005]
On the other hand, when a steel-framed reinforced concrete truss beam is used, the damping performance against vibration due to concrete can be improved, but the cost of the beam itself is high, and the time required for transportation and construction is heavy. Since it becomes long, there is a disadvantage that the construction period is long and the construction cost is high.
The present invention has been made to eliminate such inconveniences, and an object of the present invention is to provide a fine vibration control frame capable of realizing improvement of rigidity and reduction of vibration at a low cost.
[0006]
[Means for Solving the Problems]
In order to achieve this object, a fine vibration control frame according to claim 1 is a fine vibration control frame comprising a plurality of vertical members and a horizontal member joined between the vertical members. The horizontal member is a steel truss beam structure having the entire height of the beam as a beam, and the steel truss beam structure is not provided on the lower floor of the steel truss beam structure. At least one of the chord members is opened at the top, and the steel truss beam structure is constructed, and then the steel is filled with concrete that is placed simultaneously with the concrete floor to suppress vibration in the vertical direction. It is characterized by.
[0007]
Here, concepts and the truss of the present invention, the other end of the Judges is linked usual truss oblique member and Tababashira also include modified truss diagonal member is connected so as to intersect the beam column It is. In the fine vibration control frame of the present invention, a steel frame having a substantially U-shaped cross section is used for at least one of the upper chord member side and the lower chord member side, and the steel frame is filled with post-cast concrete .
[0008]
Micro vibration control Frames of the present invention is to provided a semiconductor manufacturing equipment before Kiuekai bed were provided with accessory of the production device to the lower floor.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an example of an embodiment of the present invention will be described with reference to the drawings. 1 is an explanatory schematic diagram for explaining a microvibration control frame as an example of an embodiment of the present invention, FIG. 2 is a schematic perspective view of a truss beam structure, and FIG. 3 is a cross-sectional view taken along line aa in FIG. 4 is a cross-sectional view taken along the line bb of FIG. 1, and FIGS. 5 and 6 are explanatory cross-sectional views for explaining a fine vibration control frame according to another embodiment of the present invention. In this embodiment, a fine vibration control frame used in a semiconductor production facility is taken as an example.
[0010]
Referring to FIGS. 1 to 4, this micro-vibration control frame includes a truss beam structure 1 made of a steel frame or the like having a beam as a whole, and above the upper chord member 2 of the truss beam structure 1. The floor (upper floor) is a production area (clean room) 3 in which semiconductor production equipment and the like are arranged, and the floor (lower floor) between the upper chord material 2 and the lower chord material 4 supports the production equipment. Is an auxiliary machine space 5 in which is arranged.
[0011]
A small beam 2a is connected to the upper chord material 2, and a concrete floor (upper floor) 6 on which production equipment and the like are installed is attached to the upper surface side of the upper chord material 2 and the small beam 2a to form an integral structure. Yes.
Here, in this embodiment, as the upper chord member 2 of the truss beam structure 1, a steel frame 10 having a substantially U-shaped cross section with an upper opening is used, and a substantially U-shaped cross section with an upper opening also formed on the small beam 2 a. Steel frames 10a are used, and post-cast concrete 11 is filled in the steel frames 10 and 10a. In addition, the placement of the post-cast concrete 11 is performed simultaneously with the placement of the concrete floor 6.
[0012]
In addition, a plurality of grandchild beams 2c are connected to a part between the small beams 2a at substantially equal intervals, and the concrete floor 6 is not placed in this part and is used as a blow-off part. The grandchild beam 2c is made of precast concrete, and concrete is filled in a steel frame having a substantially U-shaped cross section.
On the other hand, a small beam 4a is connected to the lower chord material 4, and H-shaped steel is used for both the lower chord material 4 and the small beam 4a. A concrete floor (lower floor) 7 on which auxiliary machines are installed is attached to the upper surface side of the lower chord member 4 and the small beam 4a. The concrete floor 7 and the lower chord member 4 are connected by a connecting tool such as a stud (not shown). Combined together to form a composite structure. In addition, although the diagonal members 8 and the bundle pillars 9 of the truss beam structure 1 are arranged on the floor of the auxiliary machine space 5, there is no problem in terms of the function as the auxiliary machine space 5. The diagonal member 8 is made of H-shaped steel in which concrete is filled in the central portion in the axial direction.
[0013]
As apparent from the above description, in this embodiment, it is possible to directly RyoNaru the floor height, the rigidity of Frames 0.00 large RyoNaru increases, as a result, vertical vibration It can be suppressed well. Moreover, since the number of truss steel frames can be reduced as compared with the case where the truss beam structures a and b are respectively arranged on the upper and lower floors as in the prior art, the resource can be saved and the cost can be reduced. Can do.
[0014]
Further, as the upper chord member 2 of the truss beam structure 1, a steel frame 10 having a substantially U-shaped cross section filled with concrete 11 is used and the small beam 2 a is also incorporated in the steel frame 10 a having a substantially U-shaped cross section. Since the concrete 11 is integrated and used, the rigidity improvement effect and the excellent vibration damping performance of the concrete 11 can be obtained at low cost. As a result, the effect of suppressing the vibration in the vertical direction is further improved. It can be excellent.
[0015]
Furthermore, since the concrete floor 6 and the upper chord member 2 and the small beam 2a are integrally combined to form a composite structure, the concrete floor 7 and the lower chord member 4 and the small beam 4a are integrally combined to form a combined structure. The rigidity of the floors (slabs) 6 and 7 is added to the axial rigidity of the upper and lower chord members 2 and 4, and as a result, the axial rigidity of the upper and lower chord members 2 and 4 and the beam rigidity are greatly increased as a whole. It can suppress more effectively.
[0016]
Further, since the post-cast concrete 11 filled in the steel frame 10a of the upper chord material 2 and the steel beam 10a of the small beam 2a is placed after the truss beam structure 1 is constructed, the upper chord material 2 (steel frame 10) and the small beam 2a When transporting or building (steel frame 10a), it becomes light and easy to handle. As a result, the time required for transporting and building is shortened, and the construction period can be shortened and thus the construction cost can be reduced. Furthermore, since the steel frames 10 and 10a having a substantially U-shaped cross section are arranged with the openings facing upward, it is possible to easily place the post-cast concrete 11 into the steel frames 10 and 10a.
[0017]
Further, there is no truss member in the ceiling 12 of the production area 3a on the lower floor of the truss beam structure 1, and there are truss members in the ceiling 13 of the accessory space 5, but the number of truss members is small. Effective use can be achieved.
In the above embodiment, the upper chord member 2 and the small beam 2a are the steel frames 10 and 10a having a substantially U-shaped cross section, and the steel frames 10 and 10a are filled with the post-cast concrete 11 and integrated. However, instead of or in addition to this, referring to FIGS. 5 and 6, the lower chord member 4 and the small beam 4a on the lower chord member 4 side also have the steel frames 10 and 10a having a substantially U-shaped cross section. The post-cast concrete 11 may be filled into the steel frames 10 and 10a. In this case as well, the placement of the post-cast concrete 11 is performed simultaneously with the placement of the concrete floor 7.
[0018]
【The invention's effect】
As is apparent from the above description, according to the present invention, it is possible to achieve the effect of improving the rigidity and reducing the vibration at a low cost.
[Brief description of the drawings]
FIG. 1 is an explanatory schematic diagram for explaining a fine vibration control frame as an example of an embodiment of the present invention.
FIG. 2 is a schematic perspective view of a truss beam structure.
3 is a cross-sectional view taken along the line aa in FIG. 1. FIG.
4 is a cross-sectional view taken along the line bb in FIG. 1. FIG.
FIG. 5 is an explanatory cross-sectional view for explaining a micro-vibration control frame that is another embodiment of the present invention.
FIG. 6 is an explanatory sectional view for explaining a fine vibration control frame according to another embodiment of the present invention.
FIG. 7 is an explanatory schematic diagram for explaining a conventional microvibration control frame.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Truss beam structure 2 ... Upper chord material 3 ... Production area 4 ... Lower chord material 5 ... Auxiliary machine space 2a ... Small beam 6 ... Concrete floor (upper floor)
7… Concrete floor (lower floor)
10 ... Steel frame 10a ... Steel frame 11 ... Post-cast concrete

Claims (1)

In the fine vibration control frame comprising a plurality of vertical members and a horizontal member joined between the vertical members,
The horizontal member has a steel truss beam structure in which a horizontal member on a predetermined floor has a beam as a whole, and the steel truss beam structure is not provided on the lower floor. At least one of the upper chord material and the lower chord material is opened at the top, and the steel truss beam structure is constructed, and then the steel chord is filled with concrete that is placed simultaneously with the concrete floor. A micro-vibration control frame characterized by suppressing vibration in the direction.

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