JP4778643B2 - Work table - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a workpiece mounting table on which a workpiece is placed and supported in order to process a workpiece made of a wafer or the like, or to measure flatness.
[0002]
[Prior art]
For example, when a work having a low surface flatness is placed on a flat work placing table, the surface of the work partially rises from the work placing table. Therefore, for example, if the workpiece is to be machined, the machining accuracy for the workpiece may be lowered, the workpiece may be deformed, or the workpiece may be damaged.
[0003]
[Problems to be solved by the invention]
In order to cope with this, there is a work mounting table in which a large number of pins that can be moved up and down are closely arranged, and the tips of these pins come and go along the surface of the work so that they are supported by the entire surface of the work. It has been materialized.
[0004]
However, in the workpiece mounting table configured as described above, a very small gap is formed between the pins to allow the pins to move up and down. For this reason, even if one pin is slightly inclined, the entire gap between the pins is narrowed, and not only the inclined pin but also other pins cannot be raised or lowered, and the entire surface of the workpiece may not be supported. was there.
[0005]
The present invention has been made paying attention to the problems existing in the above prior art, and its purpose is to accurately support the workpiece according to the shape of the surface of the workpiece even when the workpiece support pin is inclined. An object of the present invention is to provide a work table that can be mounted.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, in the invention described in claim 1, the workpiece is supported by the pin support base and the pin support base, and the work placement surface is formed by the tip, and is moved in the axial direction. A plurality of work support pins arranged at positions projecting from the pin support base and at positions immersing into the pin support base, biasing means for biasing the work support pins in the projecting direction, and each work support pin A workpiece mounting table provided with a fixing means for shifting the state of the workpiece from an axially movable state to a fixed state, and a vibration applying means for applying vibration to the work support pin in a non-operating state of the fixing means. provided, each workpiece support pin has a large diameter portion in the longitudinal direction intermediate portion, and configured to move in the axial direction is allowed by the action of a small gap between the large diameter portion, a gap Closed The workpiece support pins are shifted to a fixed state, and the vibration applying means is a cylinder drive, and there are a plurality of vibration applying means, and they are located at a position sandwiching the work support pin group. It is arrange | positioned and it is characterized by vibrating with an antiphase mutually .
[0007]
The workpiece is placed on a workpiece placement surface constituted by the tips of a plurality of workpiece support pins. Here, the amount of movement of each workpiece support pin depends on the degree of unevenness on the surface of the workpiece. In this state, by fixing the work support pin by the fixing means, the work support pin is fixed in a state where the work placement surface is along the surface shape of the work. Therefore, the work is supported uniformly by the work placement surface. Moreover, if vibration is applied to the work support pin by the vibration applying means before the work support pin is fixed, the tilted work support pin is corrected to stand upright. For this reason, the front-end | tip of a workpiece | work support pin is arranged reliably along the surface of a workpiece | work.
[0008]
Then, the vibrating means for constituting a cylinder drive can be effectively vibrate the workpiece support pins with a large amplitude.
[0009]
Further, since the plurality of vibration applying means are arranged at positions sandwiching the workpiece support pin group, and each vibration applying means is configured to vibrate in mutually opposite phases, the entire work support pin Are vibrated as if they are largely shaken integrally, and the upright correction can be effectively performed.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
The following describes implementation embodying the present invention.
[0011]
Now, in the implementation form, as shown in FIGS. 1 to 4, pin support table 2 of the work table 1, the base plate 3, the frame 4 and the cover plate 5 is formed by polymerizing fixed in this order from below. A pin housing space 6 having a polygonal shape such as a regular dodecagon in cross section or a circular shape is formed at the center of the frame body 4. A large number of pin support holes 7 are formed through the base plate 3 at positions corresponding to the pin accommodating spaces 6. A large number of pin projecting holes 7 are formed through the cover plate 5 so as to face the pin support holes 7 respectively.
[0012]
The multiple workpiece support pins 9 integrally have a workpiece support portion 9a, a large-diameter portion 9b, and an insertion portion 9c whose tips are hemispherical in order from the upper side. The workpiece supporting pins 9, on the insertion portion 9c pin support hole 7, and the work supporting portion 9a is inserted movably, respectively in the axial direction of the pin projection hole 7. For this reason, the work support pins 9 are arranged at a position in a direction protruding from the pin support base 2 and a position in a direction of immersing in the pin support base 2. A coil spring 10 as an urging means is interposed between the large-diameter portion 9b and the upper surface of the base plate 3, and urges the workpiece support pin 9 in the upward projecting direction. The upper end of the workpiece support portion 9a constitutes the workpiece placement surface M.
[0013]
And each workpiece | work support pin 9 is making the workpiece | work support part 9a protrude the upper part outward through the pin protrusion hole 7 of the cover board 5 always. Note that the upper limit of the workpiece support pin 9 is restricted by the large diameter portion 9 b coming into contact with the lower surface of the cover plate 5. Further, the work support portion 9a and the insertion portion 9c of the work support pin 9 can be moved slightly in the pin protruding hole 7 and the pin support hole 7, respectively.
[0014]
A small gap (not shown) is secured between the large diameter portions 9b of the work support pins 9, and the work support pins 9 are allowed to move up and down in the axial direction.
[0015]
Three of the workpiece support pins 9 on the outer peripheral side cannot be moved up and down by inserting caps 19 into the protruding portions from the pin protruding holes 7, and form height reference pins 9. The three height reference pins 9 are arranged at positions substantially corresponding to the vertices of the equilateral triangle.
[0016]
As shown in FIG. 3, the two contact plates 13 and the two pressing plates 11 are arranged at equal intervals along the outer peripheral edge of the pin housing space 6 on the upper surface of the frame body 4. The two push plates 11 are movable in the direction of the contact plate 13 facing each other and the opposite direction by adjusting the rotation of the screws. Accordingly, by moving and adjusting the position of the push plate 11, the push plate 11 presses the corresponding large-diameter portion 9b toward the abutting plate 13 with its leading edge, or conversely separates it. For this reason, the density of the work support pins 9 in the pin accommodating space 6, that is, the gap between the large diameter portions 9b can be adjusted.
[0017]
Two workpiece contact plates 14 and one workpiece pressing plate 15 as workpiece fixing means are disposed on the upper surface of the cover plate 5. The two workpiece contact plates 14 define the placement position of the workpiece W on the workpiece placement surface M. The work pressing plate 15 is moved by adjusting the knob 26 so as to press the work W against the work abutting plate 14.
[0018]
The accommodating recess 16 is formed on the accommodating space 6 side of the frame body 4, and a clamp fitting 17 is accommodated in the accommodating recess 16. The clamp fitting 17 can be projected and retracted from the side of the pin accommodating space 6 by an air cylinder 18. The clamp fitting 17 and the air cylinder 18 constitute a fixing means. The clamp fitting 17 presses the large-diameter portion 9b of the workpiece support pin 9 group by causing the air fitting 18 to project the clamp fitting 17 into the pin accommodating space 6. Accordingly, the large-diameter portion 9b has a high degree of density in the pin accommodating space 6, and a minute gap between the large-diameter portions 9b is eliminated. As a result, the sliding contact resistance between the large-diameter portions 9b is increased, and the work support pins 9 are fixed so that they cannot be raised and lowered.
[0019]
A vibration imparting body 21 is arranged on the frame body 4 with the group of work support pins 9 interposed therebetween. A pair of air cylinders is used as the vibration imparting body 21. And the block 30 connected with the front-end | tip of the piston rod 21a of an air cylinder pushes the workpiece | work support pin 9, or leaves | separates from the workpiece | work support pin 9 by expansion / contraction of the piston rod 21a. Control is performed so that the expansion and contraction phases of the vibration imparting bodies 21 are reversed. That is, when one block 30 pushes the work support pin 9, the operations of the vibration imparting bodies 21 are controlled so that the other block 30 is separated from the work support pin 9. For this reason, force is applied to the work support pin 9 group so that the work support pin 9 group is swung to the left and right as a whole.
[0020]
Next, the usage method of the said workpiece mounting base 1 is demonstrated. First, the workpiece W is placed on the workpiece placement surface M so that its circumference follows the workpiece abutting plate 14. When the workpiece W is placed on the workpiece placement surface M, each workpiece support pin 9 is lowered by its weight.
[0021]
At this time, the placement surface (surface) of the workpiece W may not be flat due to distortion or unevenness. In such a case, the descending amount of each work support pin 9 is changed according to the degree of unevenness of the placement surface, and the work placement surface M that has been flat when the workpiece is not placed becomes the same. The surface shape is changed according to the mounting surface shape of the workpiece W. Since the workpiece support pins 9 can be moved up and down, the shape of the workpiece placement surface M differs depending on how the workpiece W is placed on the workpiece placement surface M. However, since the three height reference pins 9 that cannot be raised and lowered support the workpiece W by the three points, the unevenness of the workpiece support pins 9 is eliminated, and the workpiece W is moved at three points by the height reference pins 9. It can be arranged at a prescribed predetermined mounting height.
[0022]
The workpiece W on the workpiece placement surface M is lightly pressed downward by a pressing tool (not shown).
By the way, if one or a plurality of workpiece support pins 9 are inclined, a slight gap between the workpiece support pins 9 may disappear, and the entire workpiece support pins 9 may not be lowered. Therefore, the vibration imparting body 21 is operated before or after placing the workpiece W on the workpiece support pin 9. If it does in this way, vibration will be given to each work support pin 9, the inclination state of work support pin 9 will be corrected, and it will be in an upright state. Accordingly, the workpiece support pins 9 can move in the axial direction thereof, and the workpiece W can be reliably placed and supported.
[0023]
Then, the workpiece support pin 9 is fixed by the clamp fitting 17, and the workpiece mounting surface M is held and fixed in a state corresponding to the mounting surface shape of the workpiece W. Then, after removing the workpiece pressing tool from the workpiece mounting table 1, the workpiece W is subjected to measurement, processing, and the like.
[0024]
Accordingly, in the implementation form of this, it exhibits the following effects.
-By providing the vibration imparting body 21 for imparting vibration to the work support pin 9 in the non-operating state of the clamp fitting 17, the tilted work support pin 9 is corrected to stand upright. Therefore, the workpiece support pins 9 can be moved up and down, and the tips of the workpiece support pins 9 can be reliably arranged along the surface of the workpiece W.
[0029]
Since the vibration applying body 21 is configured by cylinder driving, the work support pin 9 can be vibrated effectively with a large amplitude, and the work support pin 9 can be reliably moved up and down. .
[0030]
The plurality of vibration imparting bodies 21 are arranged at positions sandwiching the group of workpiece support pins 9 and are configured to vibrate in mutually opposite phases, so that the workpiece support pins 9 as a whole are integrated. Therefore, the workpiece support pins 9 can be effectively rectified upright.
[0040]
(Example of change)
In addition, this invention is not limited to the said embodiment, It is also possible to embody in the following aspects.
[0041]
That is, in each of the embodiments described above, the present invention is embodied in a work mounting table of a type in which the work support pins 9 are moved up and down, that is, a horizontal type. On the other hand, the workpiece support pins 9 may be embodied in a horizontal or horizontal type workpiece mounting table in which the workpiece support pins 9 are horizontally arranged with the axis thereof horizontal .
[0043]
【The invention's effect】
As described above in the embodiment, in the present invention, even when the work support pin is inclined, the work support pin can be accurately supported by the work support pin according to the shape of the surface of the work. In particular, in the present invention, since the vibration imparting body is configured by cylinder driving, the work support pin can be effectively vibrated with a large amplitude, and the work support pin can be reliably moved up and down. In addition, since the plurality of vibration imparting bodies are arranged at positions sandwiching the workpiece support pin group and are vibrated in mutually opposite phases, the entire workpiece support pin is integrated. Therefore, the workpiece support pin can be effectively rectified upright.
[Brief description of the drawings]
Figure 1 is a plan view of the workpiece mounting table in the implementation form.
FIG. 2 is a side view of the same.
3 is a cross-sectional view taken along line AA in FIG.
4 is a cross-sectional view taken along line BB in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Work mounting base, 2 ... Pin support base, 9 ... Work support pin, 9b ... Large diameter part, 10 ... Coil spring as biasing means, 17 ... Clamp metal fitting as fixing means, 18 ... Air cylinder as fixing means , 21 ... Vibration imparting body as vibration imparting means.

Claims (1)

A pin support,
The workpiece support surface is supported by the pin support base and has a tip, and is moved in the axial direction, and is disposed at a position protruding from the pin support base and a position immersing into the pin support base. A plurality of workpiece support pins;
A biasing means for biasing the workpiece support pin in the protruding direction;
In a workpiece mounting table provided with a fixing means for shifting each workpiece support pin from a movable state in an axial direction to a fixed state,
Providing a vibration applying means for applying vibration to the work support pin in an inoperative state of the fixing means ;
Each work support pin has a large diameter portion in the middle in the length direction, and is configured to allow movement in the axial direction by the action of a slight gap between the large diameter portions, and the gap is closed. Configured so that the workpiece support pin is moved to a fixed state by
The vibration applying means is a cylinder drive,
A work mounting table comprising a plurality of vibration applying means, which are arranged at positions sandwiching a work support pin group, and are vibrated in mutually opposite phases .

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