JP4780132B2 - Multilayer ceramic electronic component manufacturing apparatus and method - Google Patents

Description

  The present invention relates to a manufacturing apparatus and manufacturing method for a multilayer ceramic electronic component, and more particularly to a manufacturing apparatus for a multilayer ceramic electronic component that can stack ceramic green sheets with high accuracy.

  2. Description of the Related Art In recent years, in order to manufacture a small electronic component having good electrical characteristics, a manufacturing apparatus for a multilayer ceramic electronic component capable of highly accurately stacking ceramic green sheets constituting a multilayer body is required.

  As a manufacturing apparatus for laminating green sheets, for example, a camera for measuring a reference hole provided in the green sheet, a means for obtaining a deviation amount of the green sheet from the position of the measured reference hole, and correcting the deviation amount In addition, a manufacturing apparatus having a means for correcting the green sheet is known (see Patent Document 1, etc.).

However, in the manufacturing apparatus according to the related art, after the correction operation is performed, the green sheet is transported directly above the stacking mold by moving the transport head or picking and placing the green sheet. In this case, the position of the green sheet may be shifted again due to the placement error of the transport head, the placement error at the time of pick and place, and the like, causing a reduction in green sheet stacking accuracy. In addition, in the manufacturing apparatus according to the related art, it is difficult to monitor the position where the green sheets are actually stacked and the amount of misalignment between the green sheets generated when the green sheets are actually stacked. .
JP-A-10-32457

  The objective of this invention is providing the manufacturing apparatus and manufacturing method of a multilayer ceramic electronic component which can laminate | stack a ceramic green sheet with high precision.

In order to solve the above object, a multilayer ceramic electronic component manufacturing apparatus according to the present invention includes:
A laminated table in which one ceramic green sheet is placed on top of the other ceramic green sheet already installed;
An observation through hole is formed and has a holding surface for holding the one ceramic green sheet, and a holding part capable of moving up and down relatively with respect to the laminated table;
Moving means for moving the holding part;
Imaging means for imaging the positioning mark of the one green sheet held on the holding surface through the observation through hole;
Control means for controlling the moving means so as to adjust a relative position between the holding unit and the stacking table based on an image picked up by the image pickup means.

Further, for example, the holding surface and the laminated table are opposed to each other,
The one ceramic green sheet held on the holding surface may be opposed to the other ceramic green sheet installed on the lamination table.

  Further, for example, the control unit may control the moving unit so that a positioning mark of the one ceramic green sheet held on the holding surface is in a predetermined positional relationship with respect to the stacking table. .

  Also, for example, the control means moves the one ceramic green sheet held on the holding surface so as to be in a predetermined positional relationship with respect to the other ceramic green sheet held on the stacking table. The means may be controlled.

  Further, for example, the moving means may cause the holding portion to translate and rotate in a direction along the holding surface.

  The manufacturing apparatus according to the present invention includes an imaging unit that images the positioning mark of the green sheet held on the holding surface through the observation through hole formed on the holding surface. Since the manufacturing apparatus according to the present invention can image the green sheet positioning mark from the holding surface side with respect to the green sheet held on the holding surface, for example, the green sheet with the holding surface facing the laminated table Position correction can be performed. That is, the manufacturing apparatus according to the present invention avoids the laminated table as in the conventional technique for imaging the green sheet positioning mark from the side opposite to the holding surface side with respect to the green sheet held on the holding surface. There is no need to correct the position of the green sheet. Therefore, since the operation of moving the green sheet after the green sheet position is corrected and before the green sheet is stacked can be reduced, the positional deviation caused by the movement can be reduced and the ceramic green sheets can be stacked with high accuracy.

  Further, for example, the imaging unit may be installed on the opposite side of the stacking table with the holding surface interposed therebetween.

  In addition, the manufacturing apparatus according to the present invention may further include holding force generating means for holding the one ceramic green sheet on the front holding surface.

Further, in the manufacturing apparatus according to the present invention, the holding force generating means is a negative pressure generating means,
The holding surface may attract the surface of the one ceramic green sheet on which the positioning mark is formed by the negative pressure generated by the negative pressure generating means.

  Moreover, the manufacturing apparatus according to the present invention may further include lifting means for moving the laminated table in a direction substantially perpendicular to the holding surface of the holding unit. If the green sheets are overlapped by raising and lowering the stacking table, it is possible to further reduce the operation of moving the green sheets after the green sheets are corrected and before the green sheets are stacked.

  In addition, the manufacturing apparatus according to the present invention may further include a supply unit that supplies the one ceramic green sheet to the holding unit.

Moreover, the manufacturing apparatus according to the present invention has two or more stacked tables,
The one laminated table and the other laminated table are a laminated position facing the holding surface of the holding portion and a position different from the laminated position, and the one ceramic green sheet and the other ceramic green sheet And may be arranged while being switched to a press position for pressing.

  In addition, for example, the holding portion further includes a porous material that transmits the negative pressure generated by the negative pressure generating means to the holding surface, and a wall portion that prevents the negative pressure from being transmitted to the observation through hole. You may have. The manufacturing apparatus having such a holding part prevents the phenomenon of negative pressure leaking from the observation through hole or the deformation of the green sheet by being pulled into the through hole, and more reliably and accurately the ceramic green sheet. Can be laminated.

Further, for example, the control means controls the moving means to move the one ceramic green sheet to a stacking position where the one ceramic green sheet and the other ceramic green sheet are overlapped,
The imaging unit may be capable of imaging the positioning mark of the one green sheet that has been moved to the stacking position.

  In the manufacturing apparatus according to the third aspect of the present invention, since the imaging unit can image the positioning mark of the green sheet at the stacking position, the control unit corrects the position immediately before the green sheets are overlaid, for example. It can be carried out. Alternatively, the imaging unit can monitor that the green sheet is correctly arranged at the stacking position until just before the green sheets are overlaid. Therefore, the manufacturing apparatus according to the third aspect of the present invention can effectively prevent the green sheet from being displaced again after the position correction, and can stack the ceramic green sheets with high accuracy.

Further, for example, the elevating means moves the stacking table so that the one ceramic green sheet moved to the stacking position is superposed on the other ceramic green sheet installed on the stacking table. Let
The imaging means may image the positioning mark of the one green sheet that is superimposed on the other ceramic green sheet and installed on the stacking table.

  In the manufacturing apparatus according to the fourth aspect of the present invention, the imaging means can detect the position of the green sheet after stacking by imaging the positioning mark of the green sheet after the green sheets are overlaid and installed. it can. Therefore, the manufacturing apparatus according to the fourth aspect of the present invention can monitor the amount of misalignment between the green sheets generated when the green sheets are actually stacked, and stack the green sheets with higher accuracy.

A method for producing a multilayer ceramic electronic component according to the present invention includes:
Using the multilayer ceramic electronic component manufacturing apparatus according to any one of the above, a step of obtaining a ceramic green sheet laminate in which the one ceramic green sheet and the other ceramic green sheet are laminated,
Cutting the ceramic green sheet laminate to obtain a green chip;
Firing the green chip.

  According to the method for manufacturing a multilayer ceramic electronic component according to the present invention, an electronic component is manufactured using a multilayer body in which ceramic green sheets are stacked with high accuracy, and thus a small electronic component having good electrical characteristics can be obtained. it can.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the present invention will be described based on embodiments shown in the drawings.
FIG. 1 is a schematic cross-sectional view showing an example of a ceramic capacitor manufactured using a multilayer ceramic electronic component manufacturing apparatus according to an embodiment of the present invention.
FIG. 2 is a schematic view of a main part of a multilayer ceramic electronic component manufacturing apparatus according to an embodiment of the present invention.
FIG. 3 is a schematic cross-sectional view showing a supply unit of the manufacturing apparatus for the multilayer ceramic electronic component shown in FIG. 2, and mainly shows a process of peeling the carrier film.
FIG. 4 is a schematic cross-sectional view illustrating a supply unit of the multilayer ceramic electronic component manufacturing apparatus illustrated in FIG. 2, a diagram mainly illustrating a process of cutting a green sheet;
FIG. 5 is a plan view showing a long upper green sheet to be cut by the supply unit shown in FIG.
FIG. 6 is a plan view showing card-like green sheets stacked in the stacking section shown in FIG.
FIG. 7 is a schematic cross-sectional view showing the laminated portion of the multilayer ceramic electronic component manufacturing apparatus shown in FIG. 2, and is a state before the card-like green sheet held on the holding surface and the card-like green sheet of the laminated table are overlaid. A diagram representing
7A is a partial cross-sectional view of the holding portion shown in FIG.
FIG. 8 is a schematic cross-sectional view showing a state in which the card-like green sheet held on the holding surface and the card-like green sheet of the lamination table are overlaid in the lamination portion shown in FIG.
FIG. 9 is a schematic cross-sectional view showing a state after the card-like green sheet held on the holding surface and the card-like green sheet of the stacking table are overlapped in the stacking portion shown in FIG.
FIG. 10 is a cross-sectional view illustrating an example of a multilayer body manufactured using the multilayer ceramic electronic component manufacturing apparatus illustrated in FIG.
FIG. 11 is a flowchart showing a series of operations of the stacking unit when the card-like green sheets are stacked on the stacking table.
First embodiment

  FIG. 1 is a schematic cross-sectional view showing an example of a ceramic capacitor 2 manufactured using a multilayer ceramic electronic component manufacturing apparatus according to an embodiment of the present invention. However, the multilayer ceramic electronic component manufactured using the manufacturing apparatus according to the embodiment is not limited to the capacitor, and may be another electronic component such as an inductor, a varistor, or a filter.

  As shown in FIG. 1, the multilayer ceramic capacitor 2 according to this embodiment includes a capacitor body 4, a first terminal electrode 6, and a second terminal electrode 8. The capacitor body 4 includes dielectric layers 10 and internal electrode layers 12, and the internal electrode layers 12 are alternately stacked between the dielectric layers 10. One internal electrode layer 12 that is alternately stacked is electrically connected to the inside of the first or second terminal electrode 6, 8 formed outside the capacitor body 4.

  FIG. 2 is a schematic diagram of a main part of a multilayer ceramic electronic component manufacturing apparatus according to an embodiment of the present invention. FIG. 2 shows a multilayer ceramic electronic component manufacturing apparatus including a supply unit 30 for supplying a ceramic green sheet to a lamination unit 32, a lamination unit 32 for laminating ceramic green sheets, and a press for pressing the laminated ceramic green sheets. Part 34.

  As shown in FIG. 3A, which is an enlarged sectional view, the supply unit 30 includes a peeling suction plate 38 including a cutter 60, a support base 36, a transport table 40, and a take-up roller 39. As shown in the partial enlarged view of the lower part of FIG. 3A, on the support base 36, the long green sheet 20 installed on the carrier film 28 is transported to the transport table 40 side.

  As shown in FIG. 5, first and second electrode pattern groups 26 a and 26 b and a positioning mark 18 are formed on the surface of the long green sheet 20. The dielectric paste for forming the long green sheet 20 is composed of, for example, an organic solvent-based paste or an aqueous paste obtained by kneading ceramic powder and an organic vehicle.

  The organic vehicle is obtained by dissolving a binder in an organic solvent. The binder used for the organic vehicle is not particularly limited, and may be appropriately selected from usual various binders such as ethyl cellulose and polyvinyl butyral.

  The internal electrode paste for forming the first and second electrode pattern groups 26a, 26b is a conductive material made of various conductive metals or alloys, or various oxides, organometallic compounds, resinates, etc. that become conductive materials after firing. And the above-mentioned organic vehicle are kneaded and prepared.

  The long green sheet 20 is formed by a doctor blade method using the above dielectric paste. In order to form the electrode pattern groups 26a and 26b on each surface of the green sheet 20, screen printing or the like may be performed using the internal electrode paste.

  The positioning mark 18 according to the present embodiment is formed by screen-printing the same electrode paste as the internal electrode paste for forming the first and second electrode pattern groups 26a and 26b. However, the method of forming the positioning mark 18 is not limited to this. For example, the positioning mark 18 may be formed by printing printing ink on the green sheet 20 or irradiating the green sheet 20 with a laser.

  The long green sheet 20 is finally a portion that becomes the dielectric layer 10 shown in FIG. 1, and the first and second electrode pattern groups 26a and 26b are finally the internal electrode layers shown in FIG. 12 is a part.

  The long green sheet 20 installed on the carrier film 28 is for peeling the long green sheet 20 and the first and second electrode pattern groups 26a and 26b as shown in the partial enlarged view of FIG. It is conveyed in a state directed toward the suction plate 38 side. First, the peeling suction plate 38 sucks the long green sheet 20 and starts moving toward the transfer table 40 as indicated by an arrow 91 in FIG.

  At the same time as the peeling suction plate 38 moves, a part of the take-up roller 39 moves in the direction shown by the arrow 92 (FIG. 3B) to wind up the carrier film 28. Is peeled off from the carrier film 28. A part of the long green sheet 20 adsorbed by the peeling suction plate 38 is peeled off from the carrier film 28 and then transported to a position facing the transporting table 40.

  Next, the conveying table 40 moves up as indicated by an arrow 93 in FIG. 4A, and adsorbs a part of the long green sheet 20 conveyed by the peeling suction plate 38. On the other hand, after the adsorption plate 38 for peeling stops the adsorption of the long green sheet 20, it rises as shown by the arrow 94 and moves away from the long green sheet 20 (FIG. 4A). In this way, the long green sheet 20 is peeled off from the carrier film 28 and then transferred from the peeling suction plate 38 to the transport table 40.

  Next, the peeling suction plate 38 moves in a direction away from the transfer table 40 as indicated by an arrow 95 in FIG. 4B, and then descends as indicated by an arrow 96 to form the long green sheet 20. Contact with. Further, the cutter 60 provided on the peeling suction plate 38 descends as indicated by an arrow 97 to cut the long green sheet 20.

  Under the present circumstances, the cutter 60 is arrange | positioned so that the boundary part of the part installed on the carrier film 28 and the part peeled from the carrier film 28 among the elongate green sheets 20 may be cut | disconnected. A part of the long green sheet 20 adsorbed by the transfer table 40 is cut from the long green sheet 20 and separated, and the first and second card-like green sheets 24a and 24b shown in FIG. It becomes.

  In the present embodiment, the first card-like green sheet 24a (FIG. 6A) and the second card-like green sheet 24b (FIG. 6B) shown in FIG. 6 are applied to the stacking part 32 from the supply unit 30 shown in FIG. Card-like green sheets are supplied. A first electrode pattern group 26a is formed on the surface of the first card-like green sheet 24a, and a second electrode pattern group 26b is formed on the surface of the second card-like green sheet 24b.

  The first electrode pattern group 26a and the second electrode pattern group 26b are displaced by approximately a half pattern along the direction indicated by the arrow 97 with respect to the positioning marks 18 formed on the respective card-like green sheets 24a and 24b. Placed in position. Further, the first electrode pattern groups 26a and the second electrode pattern groups 26b are alternately formed on the long green sheet 20 shown in FIG. Accordingly, the first card-like green sheet 24a (FIG. 6A) and the second card-like green sheet 24b (FIG. 6B) are alternately supplied from the supply unit 30 shown in FIG.

  FIG. 7 is a schematic cross-sectional view showing the laminated portion 32 of the production apparatus for the laminated ceramic electronic component shown in FIG. The multilayer unit 32 of the multilayer ceramic electronic component manufacturing apparatus according to this embodiment includes an XYθ driving unit 44, a holding unit 48 having a holding surface 66, a camera 46, a first multilayer table 50a, a position correction control unit 41, and the like. . The position correction control unit 41 controls the XYθ drive unit 44 based on the image from the camera 46, and can adjust the position of the holding surface 66 holding the second card-like green sheet 24b in FIG.

  Further, the first stacked table 50a can be moved toward the holding portion 48 as indicated by an arrow 98 in FIG. The second card-like green sheet 24b held on the holding surface 66 is installed by the stacking unit 32 so as to overlap the first card-like green sheet 24a already installed on the first stacking table 50a.

  The XYθ drive unit 44 illustrated in FIG. 7 can move the holding unit 48 in accordance with control from the position correction control unit 41. The XYθ drive unit 44 includes a drive main body 44a and a shaft 44b. One end portion of the shaft portion 44b is movably held by the drive main body portion 44a, and a holding portion 48 is fixed to the other end portion of the shaft portion 44b. The drive main body 44a moves one end of the shaft 44b to move the holding 48 fixed to the other end of the shaft 44b in a direction along the holding surface 66 (direction along the XY plane). ) Can be translated and rotated. In the present embodiment, description will be made by defining the XYZ axes as shown in FIG.

  The holding part 48 shown in FIG. 7 has a holding surface 66 that faces the first stacked table 50a. The holding surface 66 sucks and holds the card-like green sheets 24a and 24b delivered from the transfer table 40 shown in FIG. In the present embodiment, the card-like green sheets 24a and 24b are formed on the holding surface 66 in a state where the surface on which the positioning mark 18 and the electrode pattern groups 26a and 26b shown in FIG. 6 are formed faces the holding surface 66. Retained.

  The holding part 48 has a porous material 70 that transmits a negative pressure generated by a negative pressure generating means (not shown) to the holding surface 66. A part of the surface of the porous material 70 constitutes at least a part of the holding surface 66, and the card-like green sheets 24 a and 24 b are adsorbed to the holding surface 66 by the negative pressure transmitted by the porous material 70. The Note that the porous material 70 is substantially the same as the card-like green sheets 24a and 24b in order to ensure that the card-like green sheets 24a and 24b are adsorbed to the holding surface 66 with less deformation of the green sheets 24a and 24b. It is preferable to have an area of

  As shown in FIG. 7, an observation through hole 68 is formed in the holding surface 66 of the holding portion 48. The observation through hole 68 is formed so as to penetrate the holding portion 48 from the holding surface 66 to the surface opposite to the holding surface 66. The observation through holes 68 are provided corresponding to the positions of the positioning marks 18 (FIG. 6) of the card-like green sheets 24a and 24b.

  That is, as shown in FIG. 7, when the card-like green sheets 24a, 24b are held on the holding surface 66, the positions of the positioning marks 18 (FIG. 6) of the card-like green sheets 24a, 24b and the observation through holes 68 positions overlap (FIG. 7A). Although only two observation through holes 68 are shown in FIG. 7, four observation through holes 68 are formed on the holding surface 66 so as to correspond to the positioning marks 18 of the card-like green sheets 24 a and 24 b. Is formed.

  As shown in FIG. 7A, in the manufacturing apparatus according to this embodiment, the holding portion 48 has a wall portion 72 that constitutes the inner wall of the observation through hole 68. The wall portion 72 blocks the air flow between the space inside the porous material 70 and the observation through hole 68, and the negative pressure transmitted to the holding surface 66 by the porous material 70 escapes from the through hole 68. Can be prevented. Further, when a negative pressure is transmitted to the observation through hole 68, there may occur a problem that the card-like green sheets 24a and 24b adsorbed to the holding surface 66 are drawn into the observation through hole 68 and deformed. The part 72 can prevent this problem.

  A camera 46 that images the positioning marks 18 of the card-like green sheets 24a and 24b held on the holding surface 66 is disposed on the opposite side of the first stacking table 50a across the holding surface 66 shown in FIG. Yes. In the holding portion 48, one opening of the observation through hole 68 is formed in the holding surface 66, and the other opening of the observation through hole 68 is on a side different from the holding surface 66 (in this embodiment, the holding surface 66 and Is formed on the opposite side. The camera 46 can image the positioning marks 18 of the card-like green sheets 24 a and 24 b held on the holding surface 66 through the observation through hole 68 from the side where the other opening of the observation through hole 68 is formed.

  In the present embodiment, the camera 46 puts the positioning marks 18 formed on the surfaces of the card-like green sheets 24a and 24b from the side opposite to the holding surface 66 side of the holding unit 48 through the observation through hole 68. Take an image. As shown in FIG. 7, a mirror 62 is disposed immediately above each observation through hole 68, and the mirror 62 transmits light from the positioning mark 18 from the shaft portion 44 b of the XYθ driving unit 44. Reflect in the direction away. The camera 46 can image the positioning mark 18 because the mirror 62 is arranged in a direction in which the light from the positioning mark 18 is reflected.

  By disposing the mirror 62, the camera 46 can be disposed away from the XYθ driving unit 44 and the holding unit 48. Therefore, it is possible to easily avoid the camera 46 from interfering with movable parts such as the shaft portion 44b and the holding portion 48. Further, the length of the shaft portion 44b can be shortened, and the stacked portion 32 can be reduced in size.

  In the manufacturing apparatus according to the present embodiment, an illumination 64 that illuminates the positioning marks 18 of the card-like ceramic green sheets 24a and 24b held on the holding surface 66 through the observation through holes 68 may be arranged. In the laminated portion 32, four cameras 46, mirrors 62, and illuminations 64 are provided corresponding to the positioning marks 18 of the card-like green sheets 24a and 24b, similarly to the observation through holes 68.

  The first laminated table 50a shown in FIG. 7 has a lower mold 74 in which a suction surface 80 is formed on the surface facing the holding surface 66 of the holding unit 48. At least a part of the suction surface 80 is constituted by a lower porous material 78 that transmits a negative pressure from a negative pressure generating means (not shown). The adsorption surface 80 adsorbs and holds the card-like green sheets 24a and 24b delivered from the holding surface 66 or the intermediate laminated body 24c on which the card-like green sheets 24a and 24b are laminated.

  The first lifting / lowering means 52 shown in FIG. 2 moves the first stacked table 50a in a direction substantially perpendicular to the holding surface 66 of the holding unit 48. The first laminated table 50a sandwiches the card-like green sheets 24a, 24b and the like between the suction surface 80 and the holding surface 66 by the first lifting means 52 between the position shown in FIG. The position shown in FIG. 8 can be moved.

  The position correction control unit 41 illustrated in FIG. 7 is electrically connected to the camera 46 and the XYθ driving unit 44. The position correction control unit 41 recognizes the positions of the card-like green sheets 24a and 24b held on the holding surface 66 based on the image from the camera 46, and the relative position between the holding unit 48 and the first stacked table 50a. The XYθ table 44 is controlled so as to adjust.

  In the present embodiment, the position correction control unit 41 drives XYθ so that the positioning marks 18 of the card-like green sheets 24a and 24b held on the holding surface 66 are in a predetermined positional relationship with respect to the first stacked table 50a. The unit 44 is controlled. Thus, the green sheets 24a and 24b held on the holding surface 66 are separated from the green sheets 24a and 24b or the intermediate stacked body 24c already installed on the first stacking table 50a from the stacking direction (Z-axis direction). The positioning marks 18 are overlapped with each other as seen.

  FIG. 11 is a flowchart showing a series of operations of the stacking unit 32 when the first and second card-like green sheets 24a and 24b are stacked on the first stacking table 50a. In step S001 shown in FIG. 11, the card-like green sheets 24a and 24b produced by the supply unit 30 are held on the holding surface 66 of the holding unit 48 in the stacked unit 32.

  The card-like green sheets 24 a and 24 b produced by the supply unit 30 illustrated in FIG. 2 are conveyed to the stacking unit 32 by the conveyance table 40. The transfer table 40 moves to a position immediately below the holding surface 66 of the holding unit 48 in the stacking unit 32, and delivers the first or second card-like green sheets 24a, 24b to the holding surface 66. FIG. 7 shows a state in which the holding surface 66 of the holding unit 48 holds the second card-like green sheet 24 b delivered from the transfer table 40.

  In step S002 shown in FIG. 11, the stacking unit 32 images the positioning mark 18 of the second card-like green sheet 24b held on the holding surface 66 shown in FIG. Each camera 46 images each positioning mark 18 (FIG. 6B) formed at the four corners of the second card-like green sheet 24 b through each observation through hole 68 of the holding unit 48.

  In step S003 shown in FIG. 11, the position correction control unit 41 shown in FIG. 7 controls the XYθ driving unit 44 to move the holding unit 48 by a predetermined amount, and the second card-like green sheet held on the holding surface 66. 24b position correction is performed. First, the position correction control unit 41 recognizes the position of the second card-like green sheet 24 b held on the holding surface 66 based on the image data of the positioning mark 18 imaged by each camera 46.

  The second card-like green sheet 24b held on the holding surface 66 may be held at a position shifted from the design center position due to the influence of a shift or the like that occurs during conveyance or delivery. In the present embodiment, the design center position where the second card-like green sheet 24b held on the holding surface 66 is to be held is correctly overlapped with the intermediate stacked body 24c installed on the first stacking table 50a at the same position. It is a stacking position to be matched. In the position correction control unit 41, the positioning mark 18 of the second card-like green sheet 24b held on the holding surface 66 is not in a predetermined positional relationship with respect to the first stacked table 50a (that is, the second card-like green sheet 24b). Is not at the stacking position), control is performed so that a predetermined positional relationship is obtained.

  Since the position correction control unit 41 corrects the positioning marks 18 to have a predetermined positional relationship with respect to the first stacking table 50a, the green sheets 24a and 24b have the positioning marks 18 in the stacking direction (Z-axis direction). ) So that they overlap exactly as seen from.

In step S004 shown in FIG. 11, the second card-like green sheet 24b held on the holding surface 66 shown in FIG. 7 is placed on the intermediate laminate 24c already placed on the first laminate table 50a. . In the state shown in FIG. 7, the first card-like green sheet 24a is laminated on the uppermost layer of the intermediate laminate 24c. After the position correction shown in step S003 of FIG. 11 is performed, the first stacked table 50a is in a direction substantially perpendicular to the holding surface 66 of the holding unit 48, as indicated by an arrow 98 in FIG. It is moved in the direction close to the holding surface 66 (Z-axis positive direction).

  As shown in FIG. 8, the first stacked table 50a is formed by the first elevating means 52 shown in FIG. 2, and the second card-like green held on the holding surface 66 and the intermediate laminated body 24c installed on the suction surface 80. The sheet 24b is moved to a position where it is overlapped. In the state shown in FIG. 8, the second card-like green sheet 24b is pressed between the first laminated table 50a and the holding portion 48 and pressed against the intermediate laminated body 24c with an appropriate pressure and laminated. The

  Here, the camera 46 can also intermittently or continuously image the positioning mark 18 of the green sheet 24b until the second card-like green sheet 24b held on the holding surface 66 is stacked. Accordingly, the position correction control unit 41 can perform position correction until just before the second card-like green sheet 24b is superimposed on the intermediate laminate 24c. Further, the position correction control unit 41 can monitor that the green sheet 24b is not displaced again after correcting the position of the second card-like green sheet 24b held on the holding surface 66.

  After the intermediate laminate 24c installed on the suction surface 80 and the second card-like green sheet 24b held on the holding surface 66 are overlapped, the holding surface 66 stops the suction of the second card-like green sheet 24b. . Thereafter, the first stacked table 50a is moved by the first lifting means 52 shown in FIG. 2 in a direction substantially perpendicular to the holding surface 66 of the holding portion 48 as shown by an arrow 99 in FIG. It is moved in a direction away from 66 (Z-axis negative direction).

As shown in FIG. 9, the camera 46 has a positioning mark 18 on the second card-like green sheet 24 b in a state where the second card-like green sheet 24 b held on the holding surface 66 is slightly separated from the holding surface 66. May be imaged. Position control unit 41, by the this recognizes the position of the positioning mark 18 of the second card-like green sheet 24b after lamination, can be second card-like green sheet 24b is confirmed to be accurately stacked.

  At this time, if the position of the positioning mark 18 of the second card-like green sheet 24b after the stacking is deviated from a predetermined position exceeding a certain threshold, the position correction control unit 41 determines that the stacked body being stacked is defective. May be determined. Further, the positions of the stacked green sheets 24 a and 24 b may be backed by position correction by the position correction control unit 41. Thereby, the manufacturing apparatus according to the present embodiment can stack the ceramic green sheets with higher accuracy.

  The first stacked table 50a is further lowered from the state shown in FIG. 9, and is installed again on the turning table 56 shown in FIG. As a result, the series of operations shown in FIG. 11 ends. The stacking unit 32 repeats Steps S001 to S004 of FIG. 11 to alternately stack the first and second card-like green sheets 24a and 24b to produce a stacked body. FIG. 10A is a cross-sectional view of a main part of a laminated body 82 in which the first and second card-like green sheets 24a and 24b are alternately laminated.

  As the electrode pattern group formed on the surface of the card-like green sheet, the first and second electrode pattern groups 26a and 26b formed on the first and second card-like green sheets 24a and 24b shown in FIG. It is not limited. Even if the card-like green sheets on which the electrode patterns and the positioning marks 18 are formed are laminated so that the electrode patterns are slightly shifted and laminated, a laminated body 82a as shown in FIG. Good.

  In addition, the card-like green sheet held by the holding surface 66 and stacked on the first stacking table 50a may be an outer layer green sheet or the like on which no metal electrode layer is formed. Further, the types of green sheets to be laminated are not limited to the two types of first and second card-like green sheets 24a and 24b, and any number of green sheets may be laminated, and between the green sheets. You may laminate | stack on another sheet | seat.

  The press unit 34 shown in FIG. 2 includes a stack press 58, a second stacking table 50b, and a second lifting / lowering means 54. The second laminated table 50b is provided with a laminated body formed by laminating the first and second card-like green sheets 24a and 24b in the laminated portion 32. The second lifting / lowering means 54 raises the second laminated table 50b toward the stack press 58, and presses the laminated body between the second laminated table 50b and the stack press 58.

  After the pressing, the second elevating means 54 lowers the second stacked table 50b and re-installs it on the turning table 56 shown in FIG. The pressed laminate is transported to the present press apparatus (second press unit) (not shown) or the like separate from the press unit 34 by pick and place or the like.

  In the manufacturing apparatus according to the present embodiment, the first laminated table 50 a and the second laminated table 50 b are installed at one end and the other end of the turning table 56. The turning table 56 rotates around the turning shaft 56a, and the position of the first stacked table 50a and the position of the second stacked table 50b can be switched. That is, the first stacked table 50a and the second stacked table 50b are positioned at a position facing the holding surface 66 of the holding portion 48 and a position pressing the card-like green sheets 24a and 24b facing the stack press 58. , Can be placed while switching. Even when the second laminated table 50b is arranged at a position facing the holding surface 66 of the holding unit 48, the card-like green sheets 24a, 24b, etc. are placed on the second laminated table 50b, similarly to the first laminated table 50a. Laminated.

  In the manufacturing apparatus according to the present embodiment, the positions of the two stacking tables 50a and 50b can be switched by rotating the turning table 56. Therefore, the stacked body stacked by the stacking unit 32 can be easily pressed. Can be moved to. In addition, since the manufacturing apparatus according to the present embodiment includes the two stacked tables 50a and 50b, the process of manufacturing the stacked body by overlapping the card-like green sheets 24a and 24b and the process of pressing the stacked body are performed in parallel. Can be done. Therefore, the manufacturing apparatus according to this embodiment has high manufacturing efficiency.

  The laminates 82a and 82b shown in FIG. 10A and FIG. 10B are not pressed after being pressed with a pressure larger than the pressure in the press part 34 in, for example, a not-shown press apparatus (second press part). It is conveyed to the illustrated cutting section. In the cutting part, the stacked bodies 82a and 82b are cut along the cutting lines 86 and 86a shown in FIGS. 10A and 10B to produce the green chips 84 and 84a. After the green chips 84 and 84a are fired in a firing portion (not shown), terminal electrodes 6, 8 and the like are attached to form the ceramic capacitor 2 shown in FIG. Note that the manufacturing apparatus according to the present embodiment may include a polishing unit that performs polishing of a green chip, a binder removal unit that performs binder removal processing, and the like.

  In the manufacturing apparatus according to the present embodiment, the positioning marks of the green sheets 24 a and 24 b held on the holding surface 66 through the observation through holes 68 formed on the holding surface 66 of the holding unit 48 moved by the XYθ driving unit 44. The camera 46 which images 18 is included. Therefore, the manufacturing apparatus according to the present embodiment can image the positioning marks 18 of the green sheets 24a and 24b from the holding surface 66 side with respect to the green sheets 24a and 24b held on the holding surface 66.

  The manufacturing apparatus according to the present embodiment can correct the positions of the green sheets 24a and 24b in a state where the holding surface 66 and the stacked tables 50a and 50b face each other, for example. Therefore, the green sheets 24a, 24b are not moved after the position correction, moved by pick and place, or the holding portion 48 is moved in the correction direction (direction along the holding surface 66) or the like. 24b can be superimposed on another green sheet or the like. Thereby, the manufacturing apparatus according to the present embodiment can reduce the positional deviation caused by moving the green sheets 24a and 24b after the position correction, and can stack the ceramic green sheets with high accuracy.

  The manufacturing apparatus according to this embodiment uses green sheets 24a and 24b held on the holding surface 66 by, for example, a camera 46, and other green sheets 24a on which the green sheets 24a and 24b are installed on the first stacking table 50a. , 24b, etc., can be monitored until just before being overlaid. Therefore, the manufacturing apparatus according to the present embodiment can effectively prevent the green sheets 24a and 24b from being displaced again after the position correction, and can stack the ceramic green sheets with high accuracy.

  The manufacturing apparatus according to the present embodiment images the positioning marks 18 of the green sheets 24a and 24b immediately after the green sheets 24a and 24b held on the holding surface 66 are overlapped and installed by the camera 46, for example. be able to. Therefore, the positions of the green sheets 24a and 24 after being stacked can be detected to confirm that the green sheets are stacked with high accuracy. Further, the positions of the stacked green sheets 24 a and 24 b may be backed by position correction by the position correction control unit 41. Thereby, the manufacturing apparatus according to the present embodiment can stack the ceramic green sheets with higher accuracy.

  In the manufacturing apparatus according to the present embodiment, the holding portion 48 has a porous material 70 that transmits the negative pressure generated by the negative pressure generating means to the holding surface 66. Therefore, the manufacturing apparatus according to this embodiment can adsorb the card-like green sheets 24a and 24b to the holding surface 66 in a state where the deformation of the green sheets 24a and 24b is small.

  In the manufacturing apparatus according to the present embodiment, the holding portion 48 includes a wall portion 72 that constitutes the inner wall of the observation through hole 68. The wall 72 blocks the air flow between the space inside the porous material 70 and the observation through hole 68, and the negative pressure transmitted to the holding surface 66 by the porous material 70 is applied to the observation through hole 68. Can prevent you from escaping. In addition, the wall 72 can prevent the card-like green sheets 24 a and 24 b attracted to the holding surface 66 from being drawn into the observation through hole 68 by the negative pressure being transmitted to the observation through hole 68.

FIG. 1 is a schematic cross-sectional view illustrating an example of a ceramic capacitor manufactured using a multilayer ceramic electronic component manufacturing apparatus according to an embodiment of the present invention. FIG. 2 is a schematic diagram of a main part of a multilayer ceramic electronic component manufacturing apparatus according to an embodiment of the present invention. FIG. 3 is a schematic cross-sectional view showing a supply unit of the manufacturing apparatus for the multilayer ceramic electronic component shown in FIG. 2, and is a view mainly showing a process of peeling the carrier film. FIG. 4 is a schematic cross-sectional view illustrating a supply unit of the manufacturing apparatus for the multilayer ceramic electronic component illustrated in FIG. 2, and is a diagram mainly illustrating a process of cutting the green sheet. FIG. 5 is a plan view illustrating a long upper green sheet in the supply unit illustrated in FIG. 4. FIG. 6 is a plan view showing card-like green sheets stacked in the stacking section shown in FIG. FIG. 7 is a schematic cross-sectional view showing the laminated portion of the multilayer ceramic electronic component manufacturing apparatus shown in FIG. 2, and is a state before the card-like green sheet held on the holding surface and the card-like green sheet of the laminated table are overlaid. FIG. 7A is a partial cross-sectional view of the holding portion shown in FIG. FIG. 8 is a schematic cross-sectional view showing a state in which the card-like green sheet held on the holding surface and the card-like green sheet of the stacking table are overlapped in the stacking portion shown in FIG. FIG. 9 is a schematic cross-sectional view showing a state after the card-like green sheet held on the holding surface and the card-like green sheet of the stacking table are overlapped in the stacking portion shown in FIG. FIG. 10 is a cross-sectional view illustrating an example of a multilayer body manufactured using the multilayer ceramic electronic component manufacturing apparatus illustrated in FIG. FIG. 11 is a flowchart showing a series of operations of the stacking unit when the card-like green sheets are stacked on the stacking table.

Explanation of symbols

18 ... Positioning mark 20 ... Long green sheet 24a, 24b ... Card-like green sheet 24c ... Intermediate laminated body 30 ... Supply part 32 ... Laminating part 34 ... Press part 41 ... Position correction control part 44 ... XYθ drive part 46 ... Camera 48 ... Holding part 50a, 50 ... Laminating table 52, 54 ... Elevating means 66 ... Holding surface 68 ... Observation through hole 70 ... Porous material 74 ... Lower mold 82, 82a ... Laminated body 84, 84a ... Green chip

Claims (14)

A laminated table in which one ceramic green sheet is placed on top of the other ceramic green sheet already installed;
An observation through hole is formed and has a holding surface for holding the one ceramic green sheet, and a holding part capable of moving up and down relatively with respect to the laminated table;
Moving means for moving the holding part;
Imaging means for imaging the positioning mark of the one green sheet held on the holding surface through the observation through hole;
Control means for controlling the moving means so as to adjust the relative position between the holding unit and the stacking table based on the image picked up by the image pickup means;
Holding force generating means for holding the one ceramic green sheet on the holding surface;
The holding force generating means is a negative pressure generating means,
The holding surface is caused to adsorb the surface on which the positioning mark is formed on the one ceramic green sheet by the negative pressure generated by the negative pressure generating means,
The holding portion includes a porous material that transmits the negative pressure generated by the negative pressure generating means to the holding surface, and a hollow portion of the observation through hole continuously from the opposite surface of the holding surface to the holding surface. An apparatus for manufacturing a multilayer ceramic electronic component, further comprising a wall portion that constitutes an inner wall and prevents the negative pressure from being transmitted to the observation through hole. An apparatus for manufacturing a ceramic electronic component according to claim 1 ,
The holding surface and the laminated table are opposed to each other,
The manufacturing apparatus for a multilayer ceramic electronic component, wherein the one ceramic green sheet held on the holding surface and the other ceramic green sheet installed on the multilayer table face each other. A manufacturing apparatus for a ceramic electronic component according to claim 1 or 2 ,
The control means controls the moving means so that a positioning mark of the one ceramic green sheet held on the holding surface has a predetermined positional relationship with respect to the stacking table. Parts manufacturing equipment. A manufacturing apparatus for a ceramic electronic component according to claim 1 or 2 ,
The control means controls the moving means so that the one ceramic green sheet held on the holding surface is in a predetermined positional relationship with the other ceramic green sheet held on the lamination table. An apparatus for manufacturing a ceramic electronic component. A manufacturing apparatus for a ceramic electronic component according to any one of claims 1 to 4 ,
The apparatus for manufacturing a multilayer ceramic electronic component, wherein the moving means translates and rotates the holding portion in a direction along the holding surface. A manufacturing apparatus for a ceramic electronic component according to any one of claims 1 to 5 ,
2. The multilayer ceramic electronic component manufacturing apparatus according to claim 1, wherein the imaging means is disposed on the opposite side of the multilayer table across the holding surface. A manufacturing apparatus for a ceramic electronic component according to any one of claims 1 to 6 ,
An apparatus for manufacturing a multilayer ceramic electronic component, further comprising elevating means for moving the multilayer table in a direction substantially perpendicular to the holding surface of the holding portion. A manufacturing apparatus for a ceramic electronic component according to any one of claims 1 to 7 ,
The apparatus for manufacturing a multilayer ceramic electronic component, further comprising supply means for supplying the one ceramic green sheet to the holding portion. A manufacturing apparatus for a ceramic electronic component according to any one of claims 1 to 8 ,
Having two or more of the laminated tables,
The one laminated table and the other laminated table are located at a position facing the holding surface of the holding portion, a position different from the laminated position, and the one ceramic green sheet and the other ceramic green sheet An apparatus for manufacturing a multilayer ceramic electronic component, wherein the apparatus is arranged while being switched to a position where the material is pressed. An apparatus for manufacturing a ceramic electronic component according to claim 9 ,
An apparatus for producing a multilayer ceramic electronic component, wherein the multilayer table is provided at each of both end portions, and has a swivel table that rotates around a swivel shaft attached between the both end portions. A manufacturing apparatus for a ceramic electronic component according to any one of claims 1 to 10 ,
The control means controls the moving means to move the one ceramic green sheet to a stacking position where the one ceramic green sheet and the other ceramic green sheet are overlapped,
2. The multilayer ceramic electronic component manufacturing apparatus according to claim 1, wherein the imaging unit is capable of imaging the positioning mark of the one green sheet moved to the stacking position. An apparatus for manufacturing a ceramic electronic component according to claim 7 ,
The elevating means moves the lamination table so that the other ceramic green sheet installed on the lamination table is superimposed on the one ceramic green sheet moved to the lamination position,
2. The multilayer ceramic electronic component manufacturing apparatus according to claim 1, wherein the imaging unit images the positioning mark of the one green sheet placed on the multilayer table so as to overlap the other ceramic green sheet. An apparatus for manufacturing a ceramic electronic component according to claim 1 ,
Elevating means for moving the stacking table in a direction substantially perpendicular to the holding surface of the holding unit;
The imaging means is installed on the opposite side of the stacking table across the holding surface,
The control means controls the moving means to move the one ceramic green sheet to a stacking position where the one ceramic green sheet and the other ceramic green sheet are overlapped,
The elevating means moves the lamination table so that the other ceramic green sheet installed on the lamination table is superimposed on the one ceramic green sheet moved to the lamination position,
The imaging means is configured to superimpose the positioning mark of the one green sheet that is superposed on the other ceramic green sheet and installed on the lamination table, and the one green sheet is formed on the lamination table by the elevating means. In a state slightly separated from the holding surface by movement, image through the observation through hole,
The control means recognizes the position of the positioning mark of the one green sheet in a state after being superimposed on the other ceramic green sheet, and whether or not the one ceramic green sheet is accurately stacked. An apparatus for manufacturing a multilayer ceramic electronic component, wherein: A ceramic green sheet laminate in which the one ceramic green sheet and the other ceramic green sheet are laminated is obtained by using the multilayer ceramic electronic component manufacturing apparatus according to any one of claims 1 to 13. Process,
Cutting the ceramic green sheet laminate to obtain a green chip;
And a step of firing the green chip. A method for producing a multilayer ceramic electronic component, comprising:

Images