JP4801540B2 - Valve device and diaphragm vacuum pump - Google Patents

Description

  The present invention relates to a valve device including a check valve body that limits the flow direction of a fluid to one direction, and a diaphragm vacuum pump including the check valve body.

  Conventionally, various configurations have been proposed for vacuum pumps. For example, there is an oil rotary pump, a roots pump, a diaphragm pump, or the like (for example, see Patent Document 1). Further, a check valve (so-called check valve) is generally used in the vacuum pump, and various types of check valves have been proposed. For example, a ball valve body type, a conical poppet type, a poppet type, a nozzle flapper type, a swing type, and an umbrella type have already been proposed. These conventional check valves open or shield the flow path through which the fluid passes, and limit the flow direction to one direction. A known spring is attached to the open position and the shield position in the flow path. The position is repeatedly converted to.

  Further, for example, in a production line in an automobile manufacturing factory, a suction system combining the vacuum pump and a suction pad may be employed as a configuration for transferring a work such as a window glass of an automobile in the factory. That is well known. Specifically, the tip of the truncated conical suction pad made of an elastic material is pressure-bonded to the workpiece, and the workpiece is held at the tip of the suction pad by evacuating the suction pad with a vacuum pump. . By setting it as this structure, a workpiece | work can be rapidly transferred to a desired location, without damaging the surface. As such an adsorption system, for example, as shown in FIG. 18, a plurality of air pipes are branched from a large vacuum pump in the factory to reach each production line, and the tip of each air pipe A configuration has been proposed in which a suction pad is attached to each to enable work on each production line. As described above, by arranging a large number of air pipes in the factory, the work can be transferred on a plurality of production lines in the factory. As another example, as shown in FIG. 19, a large number of air pipes are arranged in a branched manner from a large air compressor in the factory, and each air pipe is composed of an air valve, a vacuum ejector, and the like. There is also a configuration for forming a vacuum ejector unit. Even in such a configuration, the workpiece can be appropriately transferred using suction pads on a plurality of production lines.

JP 2006-112378 A

  However, in the vacuum pump having the check valve having the above-described configuration, the load is large when the check valve is opened against the spring force, so that the structure for opening the check valve is large. There was a problem of becoming. In particular, when a coil spring is used, there is a problem that the spring force is not stable. Moreover, in the adsorption system having the above-described configuration, a large number of air pipes are disposed in the factory, so that the labor and cost related to the installation of the air pipes have been problems. In addition, there are problems that maintenance and maintenance of a large number of air pipes provided in the factory are troublesome, the work space in the factory or around the suction pad becomes complicated, and wasteful space is easily generated. Furthermore, when the total length of the air pipe is increased, energy loss at the tip of the suction pad cannot be ignored, and there is a concern about the problem of energy efficiency.

  Therefore, the present inventor has found a configuration that can solve the above problem. An object of this invention is to provide the valve apparatus and diaphragm type pump which can solve the said problem.

The present invention
The first cavity is formed by sitting on a valve seat formed at a first cavity side opening end of a communication path provided in a partition wall that divides the first cavity and the second cavity and communicating both the voids. A valve device provided with a check valve body that covers the communication path on the part side and restricts the flow direction of the fluid flowing through the first empty portion and the second empty portion in one direction,
The check valve body is
It has a bottomed container shape and shields the communication path, a thin-walled cylindrical slanted flexure that is continuous upward from the periphery of the shield plate, and is connected to the upper end of the slanted flexure. It is composed of a communication top portion that is internally provided with a communication hole portion communicating with the inside,
A check valve body holding means for holding the communication valve top of the check valve body and seating the shielding plate portion of the check valve body on the valve seat;
When the first empty part becomes higher pressure than the second empty part, the shielding plate part of the check valve body is biased by the valve seat by the differential pressure, and the communication path is shielded,
When the first empty part becomes a lower pressure than the second empty part, the fluid in the second empty part presses the shielding plate part of the check valve body due to the differential pressure, and the inclined bent part is bent. The valve device is characterized in that the shielding plate portion and the valve seat flow into the first empty portion via a communication path that is separated and opened.

  In such a configuration, the check valve body has a shape in which the inner space portion communicates with the outside via the communication hole portion as described above. Therefore, when the first empty portion in which the check valve body is disposed has a higher pressure than the second empty portion, the internal pressure of the check valve body also becomes higher. If it does so, the shielding board part of the said non-return valve will be pressed outward from the inside, and will be urged | biased by a valve seat, and a shielding board part and a valve seat will closely_contact | adhere. As a result, the communication path is shielded, and the fluid cannot pass through the communication path, and movement of the fluid is prevented between the first empty portion and the second empty portion. On the other hand, when the first empty portion is at a lower pressure than the second empty portion, the fluid in the second empty portion tends to flow to the first empty portion due to the differential pressure. Here, the fluid in the second empty portion presses the shielding plate portion covering the communication path from the outside. Then, due to the flow pressure, the inclined bent portion of the check valve body is bent, the check valve body is elastically contracted, and the shielding plate portion is separated from the valve seat. And the fluid in a 2nd empty part will flow in into a 1st empty part from the clearance gap between the shielding board part and valve seat which arises by this. In this way, the flow direction of the fluid is limited to one direction by changing the position of the shielding plate portion of the check valve body to the shield position where the check valve body is biased to the valve seat or the open position separated from the valve seat. Will be. In addition, both the 1st empty part and 2nd empty part which concern on this invention may be the structure formed in predetermined indoor space, and one empty part may be an external field. In addition, it is not necessary that the shielding plate portion and the valve seat are separated from each other physically, and it is sufficient that the fluid is separated to the extent that the fluid can flow through the communication path.

The following configuration is proposed as the shape of the check valve body.
In other words, the check valve body has a bottomed container shape, shields the communication path, a cylindrical standing body standing up from the periphery of the shielding plate, and continues from the upper end of the standing body. A thin-walled cylindrical inclined bent portion that is formed and reduced in diameter, and an annular top portion that is continuously connected upward from the inclined bent portion and has a communication hole portion that communicates with the inside.

  Moreover, the structure which arrange | positioned the pressure-receiving member harder than the said shielding board part in contact form on the shielding board part inside the check valve body is proposed.

  In such a configuration, when the internal pressure of the check valve body becomes high and the pressure receiving member disposed inside receives the internal pressure applied on the surface thereof, the shielding plate is in a state where the pressure receiving member is in surface contact with the shielding plate portion. The part is pressed outward and pressed against the valve seat. Here, since the pressure receiving member is made of a material harder than the shielding plate portion, when the shielding plate portion is urged to the valve seat, buckling of the check valve body and bending of the shielding plate portion are prevented. Thus, the shielding plate portion is uniformly crimped to the valve seat, and the accuracy of shielding the communication path is improved.

  Further, a configuration is proposed in which an annular ridge that is in line contact with the shielding plate portion of the check valve body is formed on the valve seat so as to surround the open end of the communication path.

  In this way, the contact plate portion and the valve seat are brought into contact with each other in line contact, and the mutual contact area is reduced compared to the configuration in which the shield plate portion and the valve seat are in surface contact with each other. And the shielding plate portion and the valve seat can be more closely attached. Therefore, the accuracy of shielding the communication passage can be improved.

The present invention also provides:
A cylindrical pump housing through which gas flows;
A thin film diaphragm that is disposed in the pump housing and divides the pump housing into a first pump chamber and a second pump chamber;
An inner cylinder that is disposed in the first pump chamber so as to be capable of advancing and retreating, and whose inner space communicates with the second pump chamber via a central communication passage that vertically cuts through the diaphragm; and one end connected to the diaphragm;
An inner cylinder advancing / retreating means for bending the diaphragm by advancing and retracting the inner cylinder in the first pump chamber in the cylinder direction;
A first series passage that is provided in a partition wall that is divided into an outside air communication space that communicates with outside air and an intermediate space where a central communication path is arranged, and communicates both the spaces in the inner space of the inner cylinder;
A first check valve body seated on a first valve seat formed at the open end of the first air passage in the outside air communication space side;
First check valve body holding means for holding the first check valve body and seating the first check valve body on the first valve seat;
A second communication passage provided in a partition partitioning the second pump chamber into an intermediate empty portion and a suction empty portion, and communicating both empty portions;
A second check valve body seated on a second valve seat formed at an opening end on the intermediate space side of the second communication path;
A second check valve body holding means for holding the second check valve body and seating the second check valve body on the second valve seat;
The first check valve body and / or the second check valve body
A shielding plate portion that has a bottomed container shape and shields the open end of the communication passage in each valve seat, a thin cylindrical inclined bending portion that is continuous upward from the peripheral edge of the shielding plate portion, and the inclination Consisting of the upper end of the flexure part, it is constituted by a communication top part having an internal communication hole part communicating with the inside,
When the inner cylinder advancing / retreating means retracts the inner cylinder and the intermediate empty part becomes lower pressure than the suction empty part, the gas in the suction empty part is transferred to the intermediate empty part via the second communication path by the differential pressure. Inflow,
When the inner cylinder advancing / retreating means advances the inner cylinder and the intermediate space becomes higher than the outside air, the second communication passage is shielded, and the gas in the intermediate space is caused to flow by the differential pressure. The diaphragm type vacuum pump is characterized in that it flows into the outside air communication space through the passage.

  In such a configuration, for example, when the first check valve body is a configuration according to the present invention in the shape of a bottomed container, when the inner cylinder is retracted in the pump housing, the volume of the intermediate empty portion is increased, The intermediate space is at a lower pressure than the suction space. Then, the gas in the suction space flows (sucks) into the intermediate space due to the differential pressure generated between the intermediate space and the suction space. At the same time, the gas in the outside air communication space tends to flow to the intermediate space through the first series passage due to the differential pressure generated between the intermediate space and the outside air communication space. Here, since the first check valve body in the first valve seat has a shape in which the inside and the outside communicate with each other through the communication hole portion, the internal pressure of the first check valve body is caused by the flow pressure in the intermediate cavity direction. It will rise and will press the shielding board part from the inside to the outside. If it does so, a shielding board part will be urged | biased by a 1st valve seat, a 1st series channel | path will be shielded, and passage of gas will become impossible. Therefore, in such a case, the outside air does not flow into the intermediate empty portion, and the gas in the suction empty portion is reliably sucked. On the other hand, when the inner cylinder advances in the pump housing, the volume of the intermediate empty portion decreases, the intermediate empty portion becomes higher in pressure than the outside air communicating empty portion, and the gas in the intermediate empty portion becomes the outside air communicating empty portion. Try to flow. Here, the gas which is going to flow from the intermediate space to the outside air communication space presses the shielding plate portion of the first check valve body from the outside. If it does so, an inclination bending part will bend by this fluid pressure, the said 1st non-return valve body will be elastically contracted, and a shielding board part and a 1st valve seat will separate. Then, the first series passage is opened by this gap, and the gas in the intermediate space is exhausted to the outside through the first series passage. Here, as the second check valve body, a known check valve body that appropriately opens or shields the second communication passage may be suitably employed.

  Further, for example, when the second check valve body has the configuration according to the present invention, when the inner cylinder is retracted in the pump housing, the suction empty portion is caused by the differential pressure generated between the intermediate empty portion and the suction empty portion. A certain gas will press the shielding board part of the 2nd non-return valve body on a 2nd communicating path from the outside. Here, when the shielding plate portion is pressed from the outside, the inclined bent portion of the second check valve body seated on the second valve seat is bent, and the second check valve body is elastic. By contracting, the shielding plate portion and the second valve seat are separated. That is, the second communication passage is opened, and the gas in the suction empty portion that is the suction target flows (sucks) to the intermediate empty portion through the second communication passage. On the other hand, when the inner cylinder advances in the pump housing, the gas that is about to flow from the intermediate empty portion to the suction empty portion increases the internal pressure of the second check valve body and urges the shielding plate portion to the second valve seat. To do. Therefore, the second communication passage is shielded, and eventually the air outflow from the intermediate empty portion to the suction empty portion is prevented. Here, as the first check valve body, a known check valve body that appropriately opens or shields the first series passage may be suitably employed.

  Further, in the case where the first check valve body and the second check valve body are configured according to the present invention, when the inner cylinder body is retracted in the pump housing, the volume of the intermediate empty portion is increased, and the intermediate empty portion is Becomes a lower pressure than the suction empty space. Then, the gas in the suction cavity due to the differential pressure generated between the intermediate cavity and the suction cavity tends to flow toward the intermediate cavity via the second communication path, and the second gas on the second communication path. The shielding plate part of the check valve body is pressed from the outside. Here, when the shielding plate portion is pressed from the outside, the inclined bent portion of the second check valve body seated on the second valve seat is bent, and the second check valve body is elastic. By contracting, the shielding plate portion and the second valve seat are separated. That is, the second communication passage is opened, and the gas in the suction empty portion that is the suction target flows (sucks) to the intermediate empty portion through the second communication passage. At the same time, the gas in the outside air communication space tends to flow to the intermediate space through the first series passage due to the differential pressure generated between the intermediate space and the outside air communication space. Here, since the first check valve body in the first valve seat has a shape in which the inside and the outside communicate with each other through the communication hole portion, the internal pressure of the first check valve body is caused by the flow pressure in the intermediate cavity direction. It will rise and will press the shielding board part from the inside to the outside. If it does so, a shielding board part will be urged | biased by a 1st valve seat, a 1st series channel | path will be shielded, and passage of gas will become impossible. Therefore, in such a case, the outside air does not flow into the intermediate empty portion, and the gas in the suction empty portion is reliably sucked. On the other hand, when the inner cylinder advances in the pump housing, the volume of the intermediate empty portion decreases, the intermediate empty portion becomes higher in pressure than the other empty portions, and the gas in the intermediate empty portion enters the other empty portion. Try to flow. Here, the gas which is going to flow from the intermediate empty portion to the suction empty portion increases the internal pressure of the second check valve body and biases the shielding plate portion to the second valve seat. Therefore, the second communication passage is shielded, and eventually the air outflow from the intermediate empty portion to the suction empty portion is prevented. Further, the gas that is about to flow from the intermediate space to the outside air communication space is opened by pressing the shielding plate portion of the first check valve body from the outside to separate the shielding plate portion from the first valve seat. The air is exhausted to the outside through the first series passage.

  As described above, when the inner cylinder is repeatedly advanced and retracted in the pump casing, the air in the suction air space is sequentially exhausted to the outside while the air inflow to the suction air space is blocked. Will be reached.

Further, in one end of the pump housing, a frustoconical suction pad that is in contact with the workpiece surface and holds the workpiece in a transferable manner is disposed,
The suction pad is arranged so that the inner space and the suction chamber communicate with each other, and the inner cylinder advancing / retreating unit moves the inner cylinder to move the inner cylinder, and the gas in the suction chamber is sucked. May hold the workpiece.

  By adopting such a configuration, as the inner cylindrical body repeatedly advances and retracts and the suction empty part becomes a vacuum state, the suction pad also becomes a vacuum state, and the suction pad can suitably hold the workpiece. .

  In addition, a configuration is proposed in which the inner cylinder advancing / retreating means includes a drive source for advancing and retracting the inner cylinder, and the drive source is a power source.

  With this configuration, the inner cylinder can be advanced and retracted in the pump housing using the power source, and the suction empty portion can be brought into a vacuum state. In other words, it is not necessary to separately connect an air pipe connected to a large vacuum pump to the suction empty portion in order to make the suction empty portion into a vacuum state.

  Since the present invention is a valve device provided with a check valve body formed of a molded body having a simple structure, the check valve body can be integrated, and the overall design of the device can be facilitated as compared with the prior art. In addition, since a spring force is generated by bending the flexible inclined bending portion, there is an effect that a constant spring force is stably generated. In addition, there is an advantage that the communication path can be controlled to open and close with a weak external force as compared with the prior art.

  Further, in the above configuration, when the pressure receiving member is disposed on the shielding plate portion, when the internal pressure of the check valve body becomes high and the pressure receiving member receives pressure on the surface, the check valve body This prevents the buckling or the bending of the shielding plate portion and allows the shielding plate portion to be uniformly crimped to the valve seat. Therefore, there is an effect of improving the accuracy of shielding the communication path.

  Further, when the annular ridge is provided on the valve seat and the shielding plate portion and the annular ridge are in line contact with each other, the mutual arrangement is smaller than the configuration in which the shielding plate portion and the valve seat are in surface contact. It is possible to increase the contact pressure by reducing the contact area, and to improve the accuracy of shielding the communication path.

  Further, since the present invention is a diaphragm type pump having at least a check valve body made of a molded body having a simple structure, there is an advantage that the overall configuration becomes a simple structure as compared with the conventional structure. In addition, the check valve body can control the opening and closing of the communication path with a weak external force compared to the conventional one, so that the response to pressure fluctuations in the pump is improved and the advance / retreat stroke length of the inner cylinder body is improved. There is an effect that can be shortened compared to the conventional. This also reduces the overall size of the pump.

  Moreover, in the above configuration, when the suction pad is provided, the inside of the suction pad can be suitably evacuated, and a smooth operation using the suction pad can be realized.

  In addition, when the drive source is a power source, it is not necessary to install a separate air pipe to generate a vacuum state, so the labor and maintenance of installing the air pipe can be saved and the work space around the vacuum pump is effective. There are advantages available. Further, since there is no air pipe, there is an advantage that it is not necessary to consider energy loss in the process of vacuuming the suction empty part.

  An embodiment of a diaphragm type vacuum pump 1 (hereinafter referred to as a vacuum pump 1) according to the present invention will be described with reference to the accompanying drawings. The vacuum pump 1 is used in a general factory, and air (fluid) flows inside the vacuum pump 1.

  First, the external configuration of the vacuum pump 1 will be described. In the following description of the vacuum pump 1, the vertical direction is defined for convenience. However, it is naturally predicted that the vacuum pump 1 itself is used in various directions or modes, and the present invention is not limited to the following examples in the vertical direction.

  As shown in FIG. 1, the vacuum pump 1 includes a driving device 7 at the top. The drive device 7 is configured by a known rotary motor 8 using a drive source as a power source. Further, a metallic auxiliary support plate 9 is attached to the front surface of the rotary motor 8, and the lower end of the auxiliary support plate 9 and the end of the metal plate motor plate 6 are hexagon socket bolts 12. It is consolidated into an L shape via A rotating shaft 15 is provided in a protruding manner on the front surface of the rotary motor 8, and the rotating shaft 15 faces the upper surface of the motor plate 6.

  Furthermore, as shown in FIG. 1, FIG. 2, or FIG. 4, a link portion 2 that is connected to the rotary shaft 15 of the rotary motor 8 is disposed on the upper surface of the motor plate 6. On the other hand, a cylindrical guide case 3 is disposed on the lower surface of the motor plate 6, and a rectangular tubular pump body 4 is disposed below the guide case 3. These guide case 3 and pump body 4 constitute the main external shape of the vacuum pump 1. Here, the pump case according to the present invention is constituted by the guide case 3 and the pump body 4.

  Further, as shown in FIG. 1, FIG. 3, or FIG. 4, a cylindrical projecting coupling portion 18 projects from the lower end of the pump body 4. A known suction pad 100 is attached to the projecting coupling portion 18 of the pump body 4. Specifically, the suction pad 100 includes a substantially frustoconical pad body 102 made of an elastic material, and is airtightly fixed to the projecting connection portion 18 by a connector 101. Then, when the vacuum pump 1 is driven, the inside of the suction pad 100 is in a vacuum state, and the workpiece W such as a glass plate is sucked to the tip of the pad main body 102, and the workpiece W can be transferred without damaging the surface. It becomes.

Next, the internal structures of the link portion 2 and the guide case 3 will be described in detail.
As shown in FIG. 2 or FIG. 4, the motor plate 6 is provided with a circular through hole 10 penetrating vertically, and the link portion 2 and the guide case 3 are connected around the through hole 10. ing.

  The link portion 2 includes a single advance / retreat member 30 (see FIG. 5), and has a function of repeatedly advancing / retreating (up / down) the advance / retreat member 30 in the up-down direction within the through hole 10. More specifically, as shown in FIG. 4, a cylindrical spacer 28 is axially aligned with the thick shaft portion 15a on the thick shaft portion 15a whose diameter is increased by the rotating shaft 15 of the rotary motor 8 described above. Are attached so as to coincide with each other, and the spacer 28 is fixed to the thick shaft portion 15 a by a set screw 38 orthogonal to the rotation shaft 15. Here, in the relationship between the spacer 28 and the thick shaft portion 15a, as shown in FIG. 5, the thick shaft portion 15a is provided at a position displaced from the axial center of the spacer 28 to one side (upward). The rotary shaft 15 is designed to be an eccentric shaft. Further, the advance / retreat member 30 is attached to the outer periphery of the spacer 28. Specifically, the spacer 28 is inserted through a bearing 31 into an insertion hole 32 that penetrates in the left-right direction and is formed in the upper part of the vertically long advance / retreat member 30.

  The thick shaft portion 15a of the rotating shaft 15 is rotated by two bearing holders 21 disposed on both sides of the through hole 10 on the upper surface of the motor plate 6 as shown in FIG. 2 or FIG. Supported as possible. Each bearing holder 21 includes a bearing 26 that rotatably supports the rotary shaft 15 (thick shaft portion 15a). In addition, a cylindrical coupling 14 having a spring property is mounted between the rotary motor 8 and the link portion 2 of the rotary shaft 15. In the present embodiment, the rotary shaft 15 is divided into left and right substantially in the middle, and a coupling 14 is attached to the divided portions to connect them. By setting it as this structure, the bending of the rotating shaft 15, a twist, etc. can be relieved.

  Further, an insertion hole 34 parallel to the insertion hole 32 is formed in the lower portion of the advance / retreat member 30, and a connecting shaft 35 described later is inserted into the insertion hole 34. A bearing 36 is interposed between the connecting shaft 35 and the insertion hole 34 so that the advance / retreat member 30 can rotate with respect to the connecting shaft 35.

Next, the guide case 3 will be described.
As shown in FIG. 4, the vertically long cylindrical guide case 3 has an open upper end and a lower end, and an upper end edge thereof is fixed to the lower surface of the motor plate 6 via a hexagon socket bolt 17. In this fixed state, the inner space 13 of the guide case 3 communicates with the through hole 10 of the motor plate 6, and the lower half of the advance / retreat member 30 is disposed in the inner space 13 of the guide case 3. ing.

  Further, a thin film-like flexible diaphragm 5 is interposed between the lower end of the guide case 3 and the upper end of the pump body 4. Here, an O-ring storage groove 52 is formed on the upper end surface of the pump body 4, and a single O-ring 51 is stored in the O-ring storage groove 52, and the diaphragm 5, the pump body 4, Airtightness is ensured between. In the vacuum pump 1, the upper inner space with respect to the diaphragm 5 is a first pump chamber 92, and the lower inner space is a second pump chamber 93.

  Further, an oil-free bush 37 is provided around the inner peripheral surface of the guide case 3 along the peripheral surface, and a cylindrical piston 33 is arranged on the oil-free bush 37 so that it can be moved up and down. It is installed.

  A shaft hole 48 is provided at the upper end of the piston 33 so as to penetrate in the radial direction, and a round bar-like connecting shaft 35 is inserted into the shaft hole 48 and is attached downward by a hexagon socket set screw 39. It is fixed in the shaft hole 48. Further, the connecting shaft 35 is connected to the lower end of the advance / retreat member 30 via the bearing 36 as described above. An inner space 40 in the vertical direction is formed in the piston 33, and the lower end of the advance / retreat member 30 is inserted into the inner space 40 from above.

  Further, a substantially cylindrical second body 45 disposed directly above the diaphragm 5 is fitted into the lower end of the piston 33 from below. The second body 45 is formed with an inner space portion 46 penetrating in the vertical direction, and in particular, a lower inner peripheral surface of the inner space portion 46 is formed with a female screw into which a cylindrical projection 66 described later is screwed. Yes.

  Further, a flange pressing member 65 having a substantially inverted T-shaped longitudinal section disposed directly below the diaphragm 5 is connected to the lower end of the second body 45. The flange pressing member 65 is provided with a central communication passage 67 in the vertical direction at the center thereof, and a cylindrical projection 66 having a male screw formed on the peripheral surface thereof is projected upward from the upper surface. The cylindrical protrusion 66 is inserted into the through hole 11 formed at the center of the diaphragm 5 from below and is screwed into the inner space 46 of the second body 45. Note that a thin plate ring-shaped lower flange 61 is interposed between the diaphragm 5 and the flange pressing member 65 immediately below the diaphragm 5, so that the second body 45 and the diaphragm 5 can be stably connected. ing. In such a connected state, the second pump chamber 93, the central communication passage 67 of the flange pressing member 65, the inner space 46 of the second body 45, and the guide case 3 are arranged so as to cut through the diaphragm 5. The empty portions 40 communicate with each other vertically.

  In the configuration described so far, when the rotary motor 8 is driven and the rotary shaft 15 rotates, the spacer 28 rotates integrally with the rotary shaft 15 (thick shaft portion 15a). Here, as described above, the rotary shaft 15 is an eccentric shaft with respect to the spacer 28, and the piston 33 is connected to the lower end of the advance / retreat member 30 fitted on the spacer 28 via the connecting shaft 35. Since they are connected, the advance / retreat member 30 repeatedly moves up and down in the through hole 10 as the rotary shaft 15 rotates, and the piston 33 repeatedly moves in the guide case 3 as the advance / retreat member 30 moves up and down. It becomes. Furthermore, since the diaphragm 5 is connected to the lower end of the second body 45 fixed to the piston 33 as described above, the thin-film diaphragm 5 repeatedly moves up and down due to the drive of the rotary motor 8 after all. Will be bent. The piston 33 and the second body 45 constitute an inner cylinder according to the present invention. Moreover, the above-mentioned drive device 7 and the link part 2 which raise and lower the piston 33 and the second body 45 constitute an inner cylinder advancing / retreating unit according to the present invention.

Next, the inside of the piston 33 and the second body 45 will be described.
As shown in FIG. 4, FIG. 6, or FIG. 13, a first valve seat 81 that is circular in plan view and horizontal is formed on the upper end surface of the substantially cylindrical second body 45. More specifically, an inward partition 45 a is provided at the upper end of the second body 45, and a first series passage 46 a having a small diameter and a vertical direction is formed in the inner space 46 of the second body 45. And the part orthogonal to the cylinder direction (up-down direction) of the piston 33 is used as the first valve seat 81 at the open end of the first series passage 46a on the outside air communication space 40a, 40b side. Furthermore, a bottomed container-shaped first check valve body 54 is disposed on the first valve seat 81. As a result, the first check valve body 54 covers the first series passage 46a from above. In this way, in the inner space 40 of the piston 33, the partition 45a causes the outside air communication spaces 40a and 40b disposed just above the first valve seat 81, the lower portion of the first valve seat 81, and the center. It will be partitioned into an intermediate empty space 47 that includes the communication passage 67. Here, as shown in FIG. 6, the first outside air communication air space 40 a is located immediately above the first check valve body 54, and the second outside air communication air space 40 b is the first check valve body 54. Located on the side circumference.

  Further, as shown in FIG. 7, an upper and lower exhaust air passage 44 is provided in the upper half of the piston 33. More specifically, two exhaust air passages 44 are provided on both sides of the inner air space 40 disposed in the center, and lower ends thereof are located on the side periphery of the first check valve body 54. The two open air communicating air spaces 40b communicate with each other, and the upper end of the two air holes opens upward just below the advance / retreat member 30 and communicates with the outside world to which the vacuum pump 1 belongs.

  As will be described later, the first check valve body 54 constitutes the valve device 50 that allows air to flow only from the intermediate empty portion 47 to the outside air communicating empty portions 40a and 40b. Further, as will be described in detail later, the first check valve body 54 has a bottomed container shape opened upward as a whole (see FIGS. 6, 10, and 11), specifically, the valve member 55. , And a valve seat 80.

Next, the inside of the pump body 4 will be described.
As shown in FIG. 4 or FIG. 8, an inward partition wall 84 is formed almost in the middle of the second pump chamber 93 inside the pump body 4. The partition wall 84 is divided into an upper intermediate space 47 and a lower suction space 78 in the second pump chamber 93. In addition, a vertical second communication passage 87 is formed in the partition wall 84, and the intermediate empty portion 47 and the suction empty portion 78 communicate with each other through the second communication passage 87. A second valve seat 85 having the same shape as the first valve seat 81 is formed at the opening end of the second communication passage 87 on the side of the intermediate cavity 47. A second check valve body 75 having the same shape as the first check valve body 54 is disposed on the second valve seat 85. The second check valve body 75 shields the second communication passage 87.

  Further, a substantially wide cylindrical valve support 70 (see FIG. 9) is mounted on the inner wall of the pump body 4 immediately above the second check valve body 75. In this configuration, the vacuum pump 1 is provided with the valve device 60 also in the pump body 4. The second check valve body 75 is also composed of a valve member 76 and a valve seat 86.

  Further, as shown in FIG. 4, an O-ring storage groove 22 is formed at the tip of the projecting coupling portion 18 formed at the lower end of the pump body 4, and an O-ring 19 is formed in the O-ring storage groove 22. Is arranged. The O-ring 19 ensures airtightness between the projecting coupling portion 18 and the coupling tool 101 of the suction pad 100 coupled thereto. In this connection state, the inner space of the suction pad 100 communicates with the suction empty portion 78.

Next, the structure of the check valve bodies 54 and 75 according to the main part of the present invention will be described.
As shown in FIG. 6, the first check valve body 54 includes a prone valve member 55 and a thin-film valve seat 80. Here, the valve seat 80 is mounted on the first valve seat 81 while being adhered to the lower edge of the valve member 55. More specifically, as shown in FIG. 13, the valve seat 80 is made of a synthetic rubber material with a substantially thin circular shape, and a plurality of semicircular cutouts 88 are provided on the periphery thereof. The valve seat 80 is disposed on the first valve seat 81 so that the outermost peripheral edge thereof is in close contact with the standing wall surrounding the first valve seat 81.

  On the other hand, as shown in FIG. 6, FIG. 10 or FIG. 11, the valve member 55 is made of synthetic resin (plastic rubber) and is flexible, and rises vertically from substantially the periphery on the bonded valve seat 80. A cylindrical upright body 55c, a thin cylindrical inclined bent portion 55b continuous in a reduced diameter from the upper end of the upright body 55c, and an upwardly extending vertically from the inclined bent portion 55b. It is comprised with the formed communication top part 55a. In addition, a communication hole portion 55f that communicates the inside and the outside of the valve member 55 is provided inside the communication top portion 55a.

  Further, a part of the inclined bending portion 55b inclined upward and the outer peripheral surfaces of the communication top portion 55a are surrounded by a pressing surface portion 33a having a tapered portion provided on the inner surface of the piston 33, and the pressing surface portion 33a is inclined upward. The first check valve body 54 is positioned and seated on the first valve seat 81 by supporting a part of the inclined bending portion 55b and the communication top portion 55a from the side. The valve seat 80 constitutes a shielding plate portion 55d according to the present invention. Further, the first check valve body holding means according to the present invention is configured by the pressing surface portion 33a on the inner surface of the piston 33.

  In addition, a cylindrical metal pressure receiving member 95 shown in FIG. 6 or 12 is disposed in an adhesive manner on the upper surface of the valve seat 80 inside the valve member 55. The outer shape of the pressure receiving member 95 is set to be the same as the inner diameter of the upright body portion 55c. The pressure receiving member 95 employs a metal material that is harder than the flexible synthetic resin material constituting the valve seat 80.

  As shown in FIG. 14, the first valve seat 81 has an annular ridge 82 that swells upward so as to surround the open end of the first series passage 46 a. The valve seat 80 is arranged on the first valve seat 81 so that the annular top portion of the annular ridge 82 is in line contact with the valve seat 80.

  4 or 8, the second check valve body 75 includes a valve member 76 having the same shape as the valve member 55 and a valve seat 86 having the same shape as the valve seat 80. ing. More specifically, the valve member 76 and the valve seat 86 are bonded and integrated, and the valve seat 86 is mounted on the second valve seat 85. Further, the valve member 76 includes a standing trunk portion 76c that rises from substantially the periphery of the valve seat 86 (shielding plate portion 76d), an inclined bending portion 76b, and a communication top portion 76a that has a communication hole portion 76f inside. It is configured. Furthermore, in the second check valve body 75, as described above, the single valve support 70 (see FIG. 9) that surrounds and holds the outer periphery of the communication top portion 76a is disposed. The valve support 70 is formed with a central hole 74 through which the communication top portion 76a is inserted and a communication hole 73 penetrating vertically. And while supporting the communication top part 76a inserted in the center hole 74 from the lower part from the side, the 2nd non-return valve body 75 on the 2nd valve seat 85 is fixed by fixing the upper end of the inclination bending part 76b. Sit down. The pressure receiving member 95 is also disposed inside the valve member 76.

Next, the valve device 50 will be described with reference to FIG.
FIG. 15 schematically shows the valve device 50. In the valve device 50, the first check valve body 54 including the valve seat 80 and the valve member 55 is disposed on the first valve seat 81. The outside air communication spaces 40a and 40b are arranged above the first valve seat 81, and the first series passage 46a is arranged below the first air valve seat 81.

  In such a configuration, the first series passage 46a (that is, the intermediate air space 47) is lower in pressure than the outside air communication air spaces 40a and 40b (that is, the outside air communication air spaces 40a and 40b are relatively lower than the intermediate air space 47). The internal pressure of the valve member 55 is also increased through the communication hole 55f in the communication top portion 55a. That is, when the upper surface of the pressure receiving member 95 receives the internal pressure, the valve seat 80 is strongly urged to the first valve seat 81 below. Then, the valve seat 80 and the first valve seat 81 (or the annular ridge 82) are in close contact with each other, and the valve seat 80 shields the first series passage 46a in an airtight manner. As a result, the flow of air is blocked between the outside air communication spaces 40a and 40b and the first series passage 46a (that is, the intermediate space 47). Therefore, even if the first series passage 46a (that is, the intermediate air space 47) has a lower pressure than the outside air communication air spaces 40a and 40b, the air flows from the outside air communication air space 40a and 40b to the intermediate air space 47. There is nothing. Since the annular ridge 82 is doubly formed on the first valve seat 81, even if dust or the like adheres to one annular ridge 82 and airtightness is insufficient, the other annular The ridge 82 can block the air flow in a backup manner.

  On the other hand, the first series passage 46 a (that is, the intermediate air space 47) is higher in pressure than the outside air communication air spaces 40 a and 40 b (that is, the outside air communication air spaces 40 a and 40 b are relatively higher than the intermediate air space 47. When the pressure is low, the air in the first series passage 46a (intermediate empty space 47) presses the valve seat 80 from below toward above from the outside due to the differential pressure. If it does so, the inclination bending part 55b of the valve member 55 will be bent outward due to the press, and the valve member 55 will be slightly elastically contracted in the vertical direction. Thereby, a clearance gap arises between the valve seat 80 and the 1st valve seat 81, airtightness is released, and air is opened so that flow is possible. That is, the air in the first series passage 46 a (intermediate empty portion 47) passes upward through the notch 88 of the valve seat 80, flows into the second outside air communication empty portion 40 b, and passes through the exhaust air passage 44. Exhausted to the outside world.

  As described above, the valve device 50 has a check valve function that limits the flow direction between the outside air communication empty portions 40a and 40b and the first series passage 46a (intermediate empty portion 47) to one direction. In addition, the said 1st empty part which concerns on this invention is comprised by the said external air communication empty part 40a, 40b, and the 2nd empty part which concerns on this invention is comprised by the said intermediate | middle empty part 47. FIG. By the way, description is abbreviate | omitted about the valve apparatus 60 which has the same effect by the same structure.

Next, the drive mode of the vacuum pump 1 will be described with reference to FIG.
When the rotary shaft 15 rotates and the piston 33 rises, the volume of the intermediate cavity 47 increases, and the internal pressure of the intermediate cavity 47 becomes lower than that of the suction cavity 78. As a result, the air in the suction cavity 78 tends to flow into the intermediate cavity 47 due to the differential pressure. The fluid pressure generated by this differential pressure presses the valve seat 86 of the second check valve body 75 from below. When the valve seat 86 is pressed from below, the inclined check portion 76b related to the valve member 76 on the valve seat 86 is bent outward, whereby the second check valve body 75 is elastically compressed in the vertical direction. A slight gap is generated between the seat 86 and the second valve seat 85. Then, the air in the suction cavity 78 passes through the gap, and further flows through the communication hole 73 of the valve support 70 and flows into the intermediate cavity 47. At the same time, the intermediate space 47 is at a low pressure relative to the outside air communication spaces 40a and 40b. Then, the air (outside air) in the outside air communication air spaces 40 a and 40 b tends to flow into the intermediate air space 47 due to the differential pressure. At this time, the internal pressure of the first check valve body 54 is increased by the flow pressure generated between the outside air communication empty portions 40 a and 40 b and the intermediate empty portion 47, and the valve seat 80 is biased to the first valve seat 81. Thus, the first series passage 46a is shielded, and the inflow of air from the outside air communication spaces 40a, 40b to the intermediate space 47 is prevented.

  On the other hand, when the piston 33 descends, the volume of the intermediate empty portion 47 decreases, and the intermediate empty portion 47 becomes higher in pressure than the suction empty portion 78. If it does so, the valve seat 86 of the 2nd non-return valve body 75 in which the internal pressure increased will be urged | biased by the 2nd valve seat 85, and the 2nd communicating path 87 will be shielded. For this reason, the inflow of air from the intermediate cavity 47 to the suction cavity 78 is prevented. At the same time, the intermediate air space 47 also has a high pressure relative to the outside air communication air spaces 40a and 40b. If it does so, the air in the intermediate | middle empty part 47 will press the valve seat 80 of the 1st non-return valve body 54 from the downward direction. Then, the inclined deflecting portion 55b of the valve member 55 is bent outward, the first check valve body 54 is elastically compressed, and the intermediate empty portion 47 is formed from the gap generated between the valve seat 80 and the first valve seat 81. The air flows into the second outside air communication space 40 b and is exhausted to the outside through the exhaust air passage 44.

  Thus, when the piston 33 repeatedly moves up and down at a high speed (rotary motor 8: 1800 revolutions per minute), the air in the suction cavity 78 is sequentially sucked and the suction pad 100 connected to the suction cavity 78 is obtained. The inside finally becomes a vacuum state, and the workpiece W can be appropriately held by the negative pressure.

  As in the present embodiment, the first check valve body 54 and the second check valve body 75 are provided with the inclined bending portions 55b and 75b according to the present invention, so that the first check valve body 54 and the second check valve body 75 are weaker than in the prior art. Since the communication paths 46a and 87 can be controlled to open and close with a simple spring force, the response to pressure fluctuations in the pump can be improved, and the volume change in the pump can be reduced. Thereby, the advancing / retreating stroke length of the piston 33 can be shortened compared with the conventional one, and the entire structure is downsized.

Specifically, the vacuum pump 1 can set the spring force in a range of approximately 0.1N to 0.5N. If the orifice diameter (communication path diameter) is 4 mm and the spring force is 0.1 N,
^{ΔP = W / (π · d} 2/4)
ΔP: Pressure increase by spring (kPa), W: Spring force, d: Orifice diameter, the pressure increase by spring is 8.0 kPa. Then, when the ultimate vacuum pressure of the suction empty portion 78 is calculated from the value and the following equation,
P ₀ = P ₂ '(Vmin / Vmax)
P ₀ : Ultimate vacuum pressure, P ₂ ′: Check valve body opening pressure, Vmin: Intermediate empty space minimum volume (1.4 cc in this embodiment), Vmax: Intermediate empty space maximum volume (2.7 cc in this embodiment) )
Ultimate vacuum pressure _{P 0} becomes 56.7KPa. If this is calculated | required with the gauge pressure of atmospheric pressure reference, it will be -44.6kPa.

  On the other hand, if it is attempted to realize the spring force with a conventionally known coil spring, there is a problem that the coil spring needs to be precisely processed and becomes expensive.

Next, an example of the usage mode of the vacuum pump 1 with the suction pad 100 described above will be described.
A suction system 103 shown in FIG. 16 is a system provided in a general factory, and includes a plurality of the vacuum pumps 1 with the suction pads 100 described above. More specifically, a plurality of control units 109 are connected to a power source 108 arranged in the factory, and the vacuum pump 1 with the suction pad 100 is connected to each control unit 109. Specifically, the control unit 109 and the rotary motor 8 of the drive device 7 are connected, and the rotary motor 8 is driven and controlled in a required manner by a program built in the control unit 109. Each control unit 109 is connected to a vacuum break valve 106 and a pressure switch 105. Here, a well-known vacuum break valve 106 is preferably used, and the vacuum in the suction pad 100 is released to bring the suction pad 100 to atmospheric pressure. Further, the pressure switch 105 has a sensor function for confirming the degree of vacuum in the suction pad 100, and when it is confirmed that the degree of vacuum in the suction pad 100 is appropriate, the relay or the like is turned on to proceed to the next process. It is possible to progress.

  As described above, when the vacuum pump 1 according to the present invention is adopted in the adsorption system 103 provided in the factory, the air piping that has been conventionally required is not necessary. That is, it is not necessary to provide an air pipe for using the suction pad 100 in the factory, and there is an effect that labor and cost for constructing the system are reduced. In addition, since no air piping is required, it is possible to save space in the factory.

The first check valve body 54 described so far may be configured as follows.
FIG. 17 shows a modified pressure receiving member 96. The pressure receiving member 96 is made of metal (aluminum) and has a low-profile, substantially cylindrical shape, and a flange 97 extending laterally is formed at the lower end thereof. The lower end of the valve member 55 is in contact with the upper surface of the flange 97. Here, the flange 97 functions to receive the spring force generated by the valve member 55. Thereby, the pressure receiving member 96 can press the valve seat 80 uniformly. Here, this configuration does not require the valve member 55 and the flange 97 to be bonded. Therefore, it becomes a simple structure. Of course, the pressure receiving member 96 described above may be employed in the second check valve body 75.

  Of course, the vacuum pump 1 may be used in another mode other than the mode in which the suction pad 100 is mounted. Moreover, although the structure described so far is the structure which both the 1st non-return valve body 54 and the 2nd non-return valve body 75 concern on this invention, Even if only any one is a structure which concerns on this invention, good. In that case, the conventional structure is suitably applied to the other check valve body.

  Various known techniques are suitably employed as the mechanism for moving the piston 33 up and down.

  Further, the valve devices 50 and 60 have a function of limiting the flow direction of air (gas) to one direction, and can be adopted for configurations other than the vacuum pump. The valve devices 50 and 60 can also be applied to fluids other than air (for example, liquid).

2 is a side view of the vacuum pump 1. FIG. 2 is a partial plan view of the vacuum pump 1. FIG. 2 is a partial bottom view of the vacuum pump 1. FIG. 1 is a partial longitudinal sectional view of a vacuum pump 1. FIG. It is the sectional view on the AA line of FIG. FIG. 3 is an enlarged longitudinal sectional view showing a first check valve body 54. It is the BB sectional view taken on the line of FIG. FIG. 6 is an enlarged longitudinal sectional view showing a second check valve body 75. 3 is a plan view of the valve support 70. FIG. It is a top view of valve members 55 and 76. It is a side view of valve members 55 and 76. 3 is a plan view of a pressure receiving member 95. FIG. It is explanatory drawing which shows the arrangement | positioning aspect of the valve seats 80 and 86. FIG. It is a top view of the 1st valve seat 81 (2nd valve seat 85). It is explanatory drawing of the valve apparatus 50, (a) shows the shielding state which shields the 1st series passage 46a, (b) has shown the open state which opens the 1st series passage 46a. It is a block diagram which shows the adsorption system 103. It is a longitudinal cross-sectional view which shows the pressure receiving member 96 of another form. It is a block diagram which shows the adsorption system of a conventional structure. It is a block diagram which shows the adsorption system of the conventional structure of another form.

Explanation of symbols

1 Diaphragm vacuum pump 2 Link part (inner cylinder advance / retreat means)
3 Guide case (pump housing)
4 Pump body (pump housing)
5 Diaphragm 7 Drive device (Inner cylinder advance / retreat means)
33 Piston (inner cylinder)
33a Presser surface (first check valve body holding means)
40a, 40b Open air communication space (first space)
45 Second body (inner cylinder)
45a, 84 Partition 46a First series passage 47 Intermediate empty part (second empty part)
50, 60 Valve device 54 First check valve body 55a, 76a Communication top portion 55b, 76b Inclined flexure portion 55c, 76c Standing trunk portion 55d, 76d Shield plate portion 55f, 76f Communication hole portion 67 Central communication passage 70 Valve support (first (Two check valve body holding means)
75 Second check valve body 78 Suction empty portion 80, 86 Valve seat 81 First valve seat 82 Annular ridge 85 Second valve seat 87 Second communication passage 92 First pump chamber 93 Second pump chamber 95, 96 Pressure receiving member 100 Suction pad W Work

Claims (6)

The first cavity is formed by sitting on a valve seat formed at a first cavity side opening end of a communication path provided in a partition wall that divides the first cavity and the second cavity and communicating both the voids. A valve device provided with a check valve body that covers the communication path on the part side and restricts the flow direction of the fluid flowing through the first empty portion and the second empty portion in one direction,
The check valve body is
It has a bottomed container shape and shields the communication path, a thin-walled cylindrical slanted flexure that is continuous upward from the periphery of the shield plate, and is connected to the upper end of the slanted flexure. It is composed of a communication top portion that is internally provided with a communication hole portion communicating with the inside,
A check valve body holding means for holding the communication valve top of the check valve body and seating the shielding plate portion of the check valve body on the valve seat;
When the first empty part becomes higher pressure than the second empty part, the shielding plate part of the check valve body is biased by the valve seat by the differential pressure, and the communication path is shielded,
When the first empty part becomes a lower pressure than the second empty part, the fluid in the second empty part presses the shielding plate part of the check valve body due to the differential pressure, and the inclined bent part is bent. A valve device, wherein the shielding plate portion and the valve seat flow into the first empty portion via a communication path opened apart from each other.   2. The valve device according to claim 1, wherein the check valve body is configured such that a pressure receiving member harder than the shielding plate portion is disposed in contact on the shielding plate portion therein.   An annular ridge that is in line contact with the shielding plate portion of the check valve body is formed on the valve seat so as to surround the open end of the communication passage. 2. The valve device according to 2. A cylindrical pump housing through which gas flows;
A thin film diaphragm that is disposed in the pump housing and divides the pump housing into a first pump chamber and a second pump chamber;
An inner cylinder that is disposed in the first pump chamber so as to be capable of advancing and retreating, and whose inner space communicates with the second pump chamber via a central communication passage that vertically cuts through the diaphragm; and one end connected to the diaphragm;
An inner cylinder advancing / retreating means for bending the diaphragm by advancing and retracting the inner cylinder in the first pump chamber in the cylinder direction;
A first series passage that is provided in a partition wall that is divided into an outside air communication space that communicates with outside air and an intermediate space where a central communication path is arranged, and communicates both the spaces in the inner space of the inner cylinder;
A first check valve body seated on a first valve seat formed at the open end of the first air passage in the outside air communication space side;
First check valve body holding means for holding the first check valve body and seating the first check valve body on the first valve seat;
A second communication passage provided in a partition partitioning the second pump chamber into an intermediate empty portion and a suction empty portion, and communicating both empty portions;
A second check valve body seated on a second valve seat formed at an opening end on the intermediate space side of the second communication path;
A second check valve body holding means for holding the second check valve body and seating the second check valve body on the second valve seat;
The first check valve body and / or the second check valve body
A shielding plate portion that has a bottomed container shape and shields the open end of the communication passage in each valve seat, a thin cylindrical inclined bending portion that is continuous upward from the peripheral edge of the shielding plate portion, and the inclination Consisting of the upper end of the flexure part, it is constituted by a communication top part having an internal communication hole part communicating with the inside,
When the inner cylinder advancing / retreating means retracts the inner cylinder and the intermediate empty part becomes lower pressure than the suction empty part, the gas in the suction empty part is transferred to the intermediate empty part via the second communication path by the differential pressure. Inflow,
When the inner cylinder advancing / retreating means advances the inner cylinder and the intermediate space becomes higher than the outside air, the second communication passage is shielded, and the gas in the intermediate space is caused to flow by the differential pressure. A diaphragm type vacuum pump, wherein the diaphragm type vacuum pump flows into an outside air communicating air through a passage. In one end of the pump housing, a frustoconical suction pad that contacts the workpiece surface and holds the workpiece so as to be transportable is disposed,
The suction pad is arranged so that the inner space and the suction chamber communicate with each other, and the inner cylinder advancing / retreating unit moves the inner cylinder to move the inner cylinder, and the gas in the suction chamber is sucked. The diaphragm type vacuum pump according to claim 4, wherein the diaphragm holds a workpiece.   6. The diaphragm type vacuum pump according to claim 4, wherein the inner cylinder advancing / retreating means includes a drive source for advancing and retracting the inner cylinder, and the drive source is a power source.

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