JP4805286B2 - Transport device - Google Patents

Description

  The present invention relates to a transport device that travels and transports an object to be transported along an extending direction of a transport rail.

  For example, Patent Document 1 discloses a transport device that transports a transport table by causing a transport table, which is an object to be transported, to travel along the extending direction of the transport rail. FIG. 9 is a diagram illustrating a state in which the base plate 52 is supported by the conveyance rail 53 and travels along the extending direction of the conveyance rail 53 in the conventional conveyance device 51. The transfer device 51 is an application of the transfer device disclosed in Patent Document 1.

  In the transport device 51, the base plate 52 is formed in a plate shape, and the transport rail 53 supports one surface in the thickness direction of the base plate 52 from the lower side to the upper side in the vertical direction. In this state, with the base plate 52 supported by the transport rail 53, the base plate 52 travels along the extending direction indicated by the arrow A of the transport rail 53 and transports toward the predetermined delivery section 54. . The base plate 52 transported while being supported by the transport rail 53 wears the surface supported by the transport rail 53 due to friction generated between the base plate 52 and the transport rail 53 during travel. When the surface of the base plate 52 supported by the transport rail 53 is worn, the base plate 52 is supported by the transport rail 53 at a position shifted downward in the vertical direction by a length Y corresponding to the wear amount. It will be. If it does so, the baseplate 52 will not be correctly conveyed to the predetermined position of the delivery part 54. FIG.

  For example, Patent Document 2 discloses a transport device that solves the problem of positional deviation as described above. In the transport apparatus disclosed in Patent Document 2, the detection unit detects a positional deviation between a transport unit that transports the transported object and a portion where the transported object is delivered. And based on the detection result which a detection means outputs, a conveyance part and a delivery site | part move relatively so that position shift may be eliminated.

JP 2003-332404 A JP 2006-32529 A

  When the surface of the base plate 52 supported by the transport rail 53 is worn and the base plate 52 is supported by the transport rail 53 at a position shifted downward in the vertical direction by a length Y corresponding to the wear amount. Even so, by applying the detection means disclosed in Patent Document 2, it is possible to eliminate the positional deviation. However, there is a problem that the detection unit for detecting the positional deviation and a control mechanism configured to perform control that eliminates the positional deviation based on the detection result are required, and the conveyance device becomes complicated.

  Accordingly, an object of the present invention is when the transported object is worn and transported along the extending direction of the transport rail, and the position shift corresponding to the wear amount occurs. However, it is an object of the present invention to provide a transport apparatus that can eliminate a positional shift with a simple configuration and transport a transported object to a predetermined position.

The present invention, receiving Passing a base plate which is formed in a plate shape, a transport rail which supports the thickness direction one side of the base plate, while supporting the base plate in the transport rail, Ru delivery of the underlying plate is performed and a section, a transfer device for transferring by traveling base plate along the extending direction of the transport rail,
The transport rail is disposed on the upstream side in the transport direction for transporting the base plate and on the downstream side in the transport direction, and in the width direction of the base plate with respect to the first transport rail. is composed of a Ru supported configured to be able to base plate at a position displaced a second transfer rail,
The second transport rail is
A slope portion having an inclined surface that is low at a connection position connected to the first transport rail and extends in a predetermined length to a position equivalent to a support surface that supports a base plate of the first transport rail in the transport direction;
A flat portion having a flat surface extending in a predetermined length at a position equivalent to a support surface supporting the base plate of the first transport rail from the inclined upper end portion of the slope portion toward the transport direction;
The delivery unit
The support surface that supports the base plate is arranged without being shifted in the vertical direction that is perpendicular to the extending direction of the transport rail with respect to the support surface that supports the base plate of the flat portion of the second transport rail. is a conveying apparatus according to claim Rukoto.

  Further, the present invention is characterized in that the width of the support surface that supports the base plate of the second transport rail is larger than the width of the support surface that supports the base plate of the first transport rail.

The present invention includes a base plate which is formed in a plate shape, a transport rail which supports the thickness direction one side of the base plate, while supporting the base plate in the transport rail, Ru delivery of the underlying plate is made received A transfer device having a transfer section and transporting the base plate along the extending direction of the transfer rail,
The transport rail is positioned in a region on the upstream side in the transport direction for transporting the base plate and in a region on the downstream side in the transport direction, and the width of the base plate with respect to the first transport rail portion It is composed of a second transport rail portion configured to be able to support the base plate at a position shifted in the hand direction ,
The second transport rail portion is
A slope portion having an inclined surface that is low at a connection position connected to the first transport rail portion and extends by a predetermined length to a position equivalent to a support surface that supports a base plate of the first transport rail portion in the transport direction. When,
A flat portion having a flat surface extending at a predetermined length at a position equivalent to a support surface supporting the base plate of the first transport rail portion from the inclined upper end portion of the slope portion toward the transport direction;
The delivery unit
The support surface that supports the base plate does not deviate in the vertical direction, which is a direction orthogonal to the extending direction of the transport rail, with respect to the support surface that supports the base plate of the flat portion of the second transport rail portion. It arranged a conveying apparatus according to claim Rukoto.

According to the present invention, in a state where the base plate formed in a plate shape is supported by the transport rail, the base plate is caused to travel along the extending direction of the transport rail toward the delivery portion where the base plate is delivered. Transport. At this time, the transport rail is divided into a first transport rail disposed on the upstream side in the transport direction for transporting the base plate and a second transport rail disposed on the downstream side in the transport direction. The second transport rail is configured to be able to support the base plate at a position shifted in the width direction of the base plate with respect to the first transport rail. Even when the base plate is worn and transported along the extending direction of the first transport rail and the base plate is worn and a positional shift corresponding to the wear amount occurs, the second transport rail is The base plate can be supported at a position shifted in the width direction of the base plate with respect to the first transport rail and not worn. Therefore, with a simple configuration that does not use a complicated control mechanism, the position shift corresponding to the wear amount is eliminated, and the support surface that supports the base plate is the support surface that supports the base plate of the flat portion of the second transport rail. The base plate can be transported to the delivery section that is arranged without being displaced in the vertical direction .
Moreover, the 2nd conveyance rail is comprised including a slope part and a flat part. The slope portion is low at a connection position where the first transport rail and the second transport rail are connected, and extends in a predetermined length in the transport direction to a position equivalent to a support surface that supports the base plate of the first transport rail. Has an inclined surface. Therefore, even when the base plate is worn and transported along the extending direction of the first transport rail and the base plate is worn, and the position shift corresponding to the wear amount occurs, the base plate is Guided by the inclined surface of the slope portion, it can move smoothly from the first transport rail toward the second transport rail.
The flat portion has a flat surface extending from the inclined upper end portion of the slope portion toward the transport direction by a predetermined length at a position equivalent to a support surface that supports the base plate of the first transport rail. Therefore, the base plate guided to the slope portion and moved to the flat portion is supported by the flat portion at the same position as the support surface of the first transport rail. Therefore, the base plate can move smoothly from the flat portion toward the delivery portion.

  Moreover, according to this invention, the width | variety of the support surface which supports the base plate of a 2nd conveyance rail is larger than the width of the support surface which supports the base plate of a 1st conveyance rail. Therefore, the second transport rail can support the base plate at a position shifted in the width direction of the base plate with respect to the first transport rail. Therefore, even when the base plate is worn and transported along the extending direction of the first transport rail and the base plate is worn and a positional shift corresponding to the wear amount occurs, the second transport is performed. The rail is a position shifted in the width direction of the base plate with respect to the first transport rail, and can support the base plate at a position where it is not worn.

Further, according to the present invention, the base plate travels along the extending direction of the transport rail toward the delivery portion where the base plate is delivered with the base plate formed in a plate shape supported by the transport rail. Then transport. At this time, as for the conveyance rail, the 1st conveyance rail part located in the area | region of the conveyance direction upstream which conveys a base plate, and the 2nd conveyance rail part located in the area | region of the conveyance direction downstream are continuing. And the 2nd conveyance rail part is comprised so that a base plate can be supported in the position shifted in the width direction of the base plate with respect to the 1st conveyance rail part. Even when the base plate is worn and transported along the extending direction of the first transport rail portion, the second transport rail is worn even if the base plate is worn and a position shift corresponding to the wear amount occurs. The portion is a position shifted in the width direction of the base plate with respect to the first transport rail portion, and can support the base plate at a position where it is not worn. Therefore, with a simple configuration that does not use a complicated control mechanism, the displacement corresponding to the amount of wear is eliminated, and the support surface that supports the base plate supports the base plate of the flat portion of the second transport rail portion. The base plate can be transported to a delivery unit that is arranged without being displaced in the vertical direction with respect to the surface .
The second transport rail portion includes a slope portion and a flat portion. The slope portion is low at the connection position where the first transport rail portion and the second transport rail portion are connected, and has a predetermined length to the same position as the support surface that supports the base plate of the first transport rail portion in the transport direction. It has an inclined surface extending at the height. The flat portion has a flat surface extending from the inclined upper end portion of the slope portion toward the conveyance direction by a predetermined length at a position equivalent to a support surface that supports the base plate of the first conveyance rail portion.

Figure 1 is a diagram showing a configuration of a conveyance device 1. FIG. 1A is a top view showing the configuration of the transport apparatus 1, and FIG. 1B is a side view. The transfer device 1 is used in a substrate manufacturing apparatus that manufactures a thin plate-like substrate from a melt obtained by melting a solid material made of metal or semiconductor. In the substrate manufacturing apparatus, the base plate 2 transported by the transport device 1 is immersed in the melt, and crystals are solidified and grown on the surface of the base plate 2 to manufacture a thin plate-like substrate. In such a substrate manufacturing apparatus, it is a high-purity inert gas having a very low content of impurity components such as moisture in order to grow high-quality crystals in a high-temperature atmosphere and in purity and crystallinity. The inside of the device is filled with argon gas. Therefore, also in the transfer apparatus 1 used for the substrate manufacturing apparatus, the installation environment is an environment filled with high-purity argon gas or the like while being a high temperature atmosphere of 200 to 250 ° C.

  The transport device 1 includes a base plate 2, a transport rail 3, and a delivery unit 4. In the state where the base plate 2 is supported by the transport rail 3, the transport device 1 transports the base plate 2 by traveling along the extending direction of the transport rail 3 extending in the horizontal direction toward the delivery unit 4.

As described above, the base plate 2 serves as a base for manufacturing a thin plate substrate made of solidified and grown crystals. The base plate 2 includes a plate-like portion 2a formed in a plate shape and a protruding portion 2b whose cross section is formed in a trapezoidal shape. The base plate 2 has a structure in which the protruding portion 2b is connected to one surface in the thickness direction of the plate-like portion 2a. Of the both surfaces in the thickness direction of the plate-like portion 2a, the lower surface, which is the surface to which the protruding portion 2b is connected, is a surface that is supported by the transport rail 3 to be described later, and the other surface is the surface on which the crystal is solidified and grown. . The protruding portion 2b is a portion that fits into a dovetail groove portion 4b of the delivery portion 4 described later. Moreover, the material which comprises the base plate 2 needs to be selected from the material which prevents the contamination mixed with the melt mentioned above, and carbon is selected in the conveying apparatus 1. FIG. The base plate 2 is transported by traveling along the extending direction of the transport rail 3 toward the predetermined delivery section 4 while being supported by the transport rail 3.

  The delivery unit 4 is a part where delivery of the base plate 2 that is transported in a state supported by a later-described transport rail 3 is performed. The delivery unit 4 transports the base plate 2 that has been transported while being supported by the transport rail 3, moving in the horizontal and vertical directions to a processing unit that performs crystal growth processing, which is a subsequent process. The delivery part 4 has a support part 4a and a dovetail part 4b. The support portion 4a supports the lower surface of the base plate 2 that is transported while traveling on the transport rail 3. The delivery unit 4 is arranged such that the support surface that supports the base plate 2 of the support unit 4 a does not shift in the vertical direction with respect to the support surface that supports the base plate 2 of the transport rail 3. The dovetail groove portion 4 b is a recess that is recessed with respect to the support surface that supports the base plate 2 of the support portion 4 a, and is formed so as to be able to fit into the protruding portion 2 b of the base plate 2.

The transport rails 3 are a pair of rails extending in the horizontal direction toward the delivery unit 4 and guide the transported base plate 2 to the delivery unit 4 while supporting one surface in the thickness direction of the base plate 2. As with the base plate 2 described above, the material constituting the transport rail 3 needs to be selected from materials that prevent contamination mixed with the melt. In the transport device 1 , carbon is selected. The transport rail 3 includes a first transport rail 31 and a second transport rail 32. The 1st conveyance rail 31 is arrange | positioned so that the support surface which supports the base plate 2 may not shift | deviate to a perpendicular direction with respect to the support surface which supports the base plate 2 of the support part 4a of the delivery part 4. FIG. . The first transport rail 31 is disposed on the upstream side in the transport direction A in which the base plate 2 is transported, and the base plate 2 to be transported is directed toward the second transport rail 32 while supporting the base plate 2. invite.

  FIG. 2 is a diagram illustrating a state in which the base plate 2 is supported by the transport rail 3 and travels along the extending direction of the transport rail 3 in the transport device 1. FIG. 2A is a view of the base plate 2 traveling from the side, and FIG. 2B is a view from the front. The bottom surface of the base plate 2 that is transported while being supported by the first transport rail 31 is worn at the contact position with the first transport rail 31 due to friction generated between the base plate 2 and the first transport rail 31 during traveling. The wear part 2c is formed. At this time, as described above, the installation environment of the transfer apparatus 1 is an environment filled with high-purity argon gas or the like having a high temperature atmosphere and a low water content, and thus is more easily worn. Thus, when the lower surface of the base plate 2 is worn at the contact position with the first transport rail 31 to form the wear portion 2c, the base plate 2 is vertically lowered by a length Y corresponding to the wear amount. The first transport rail 31 is supported at a position deviated. The base plate 2 on which the wear part 2 c is formed in this way is transported toward the second transport rail 32.

  The second transport rail 32 is disposed on the downstream side in the transport direction A in which the base plate 2 is transported with respect to the first transport rail 31 and extends toward the delivery unit 4. In the transport device 1, the width W2 of the support surface that supports the base plate 2 of the second transport rail 32 is set to be larger than the width W1 of the support surface that supports the base plate 2 of the first transport rail 31. ing. Thus, the second transport rail 32 can support the base plate 2 at a position shifted in the width direction of the base plate 2 with respect to the first transport rail 31. Therefore, the second transport rail 32 can support the base plate 2 on which the wear portion 2c is formed when traveling on the first transport rail 31 at a position different from the wear portion 2c, and a position corresponding to the wear amount. Displacement can be eliminated and transported. At this time, the second transport rail 32 may be disposed at a position shifted in the width direction of the base plate 2 with respect to the first transport rail 31 or may be disposed at a position not shifted.

  Moreover, the 2nd conveyance rail 32 has the slope part 32a and the flat part 32b. The inclined surface portion 32a is low at the connection position where the first transport rail 31 and the second transport rail 32 are connected, and extends in the transport direction A to the same position as the support surface that supports the base plate 2 of the first transport rail 31. It is formed so as to have an inclined surface extending with a predetermined length. In the slope portion 32a, the ratio (L2 / L1) of the length L2 to the length L1 in the horizontal length L1 from the lower end to the upper end and the vertical length L2 is 1/2. Hereinafter, it is preferably set to be in a range of 1/200 to 1/2. Accordingly, the base plate 2 on which the wear portion 2c is formed when traveling on the first transport rail 31 is guided while being supported by the slope portion 32a at a position shifted in the width direction with respect to the wear portion 2c. The two transport rails 32 can move smoothly toward the flat portion 32b.

  The flat portion 32b is formed to have a flat surface extending from the inclined upper end portion of the inclined surface portion 32a toward the transport direction A at a position equivalent to the support surface that supports the base plate 2 of the first transport rail 31 by a predetermined length. Is done. The flat portion 32b supports the base plate 2 guided while being supported by the slope portion 32a at a position shifted in the width direction with respect to the wear portion 2c. Further, the support surface that supports the base plate 2 of the flat portion 32b does not shift in the vertical direction with respect to the support surface that supports the base plate 2 of the support portion 4a of the first transport rail 31 and the delivery unit 4. Are arranged as follows. Therefore, the base plate 2 supported by the flat part 32b is conveyed toward the delivery part 4 in a state in which the positional deviation in the vertical direction corresponding to the wear amount is eliminated. As described above, when the base plate 2 is transported to the delivery unit 4 in a state in which the positional deviation is eliminated, the protruding portion 2b of the base plate 2 and the groove portion 4b of the delivery unit 4 can be accurately fitted. it can.

  As described above, the transport device 1 eliminates misalignment with a simple configuration that does not use a complicated control mechanism that eliminates misalignment corresponding to the amount of wear. Further, in the transport device 1, even when the base plate 2 is repeatedly traveled on the transport rail 3, every time the base plate 2 travels on the transport rail 3 and is transported, the positional deviation is resolved each time. Thus, it is not necessary to perform control, and it is possible to suppress a decrease in conveyance efficiency.

Further, by traveling on the second conveyance rail 32 toward the delivery unit 4, the lower surface of the base plate 2 is worn at the contact position with the second conveyance rail 32, and also on the second conveyance rail 32 in the vertical direction. May be misaligned. In order to prevent such a position shift on the second transport rail 32, the length X <b> 3 extending in the transport direction A of the second transport rail 32 is made longer than the length X <b> 2 extending in the transport direction A of the first transport rail 31. Also, the wear by the second transport rail 32 is reduced. At this time, considering the wear of the base plate 2, the length X3 of the second transport rail 32 is preferably set as short as possible. However, in the transport device 1 , the length X1 extending in the transport direction A of the base plate 2 Set to be almost the same. This is to ensure that the base plate 2 that has been guided and moved while being supported by the slope portion 32a is supported in a state parallel to the horizontal direction at the flat portion 32b.

Figure 3 is a diagram showing a configuration of a conveyance device 10. The transfer device 10 is similar to the transfer device 1 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted. In the conveyance apparatus 10, the 2nd conveyance rail 33 which the conveyance rail 30 has is characteristic. Similarly to the second transport rail 32 included in the transport device 1, the second transport rail 33 includes a slope portion 33 a and a flat portion 33 b, but the second transport rail 33 has a base plate 2 for the second transport rail 33. The width of the support surface that supports is set to be the same as the width of the support surface that supports the base plate 2 of the first transport rail 31. The second transport rail 33 is disposed at a position shifted from the first transport rail 31 in the width direction of the base plate 2. Therefore, the second transport rail 33 can support the base plate 2 at a position shifted from the first transport rail 31 in the width direction of the base plate 2. Therefore, even when the base plate 2 is worn and transported along the extending direction of the first transport rail 31, the base plate 2 is worn and a positional shift corresponding to the wear amount occurs. The second transport rail 33 is a position shifted in the width direction of the base plate 2 with respect to the first transport rail 31 and can support the base plate 2 at a position where it is not worn.

Figure 4 is a diagram showing a configuration of a conveyance device 11. The transport device 11 is similar to the transport device 1 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted. In the conveying apparatus 11, the 2nd conveyance rail 38 which the conveyance rail 34 has is characteristic. The 2nd conveyance rail 38 does not have a slope part like the 2nd conveyance rail 32 which the conveyance apparatus 1 has. The width of the support surface that supports the base plate 2 is equal to the width of the support surface that supports the base plate 2 of the first transport rail 31 at the connection position connected to the first transport rail 31. It has the width change part 38a formed so that it may change with respect to the width | variety of the support surface which supports the base plate 2 of the 1st conveyance rail 31 toward the conveyance direction A similarly. In the transport device 11 , the width changing portion 38 a is formed to continuously increase in the transport direction A with respect to the width of the support surface that supports the base plate 2 of the first transport rail 31.

  For this reason, even when the base plate 2 is worn and transported along the extending direction of the first transport rail 31, the base plate 2 is worn and a positional shift corresponding to the wear amount occurs. The base plate 2 traveling on the width changing portion 38a of the second transport rail 38 moves while being supported at a position that is continuously and smoothly shifted in the width direction of the base plate 2 with respect to the first transport rail 31. Can do.

Figure 5 is a diagram showing a configuration of a conveyance device 12. The transport device 12 is similar to the transport device 10 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted. The transport device 12 is characterized by the second transport rail 39 included in the transport rail 35. The 2nd conveyance rail 39 does not have a slope part like the 2nd conveyance rail 33 which conveyance device 10 has. The second transport rail 39 is formed such that the width of the support surface that supports the base plate 2 is the same as the width of the support surface that supports the base plate 2 of the first transport rail 31. 31 has a position changing portion 39 a formed so as to be continuously shifted in the width direction of the base plate 2.

  For this reason, even when the base plate 2 is worn and transported along the extending direction of the first transport rail 31, the base plate 2 is worn and a positional shift corresponding to the wear amount occurs. The base plate 2 traveling on the position changing portion 39a of the second transport rail 39 moves while being supported at a position that is continuously and smoothly shifted in the width direction of the base plate 2 with respect to the first transport rail 31. Can do.

Figure 6 is a diagram showing a configuration of a conveyance device 13. The transport device 13 is similar to the transport device 1 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted. The transport device 13 is characterized by the second transport rail 40 and the base plate 20 that the transport rail 36 has. The 2nd conveyance rail 40 is the same as that of the 2nd conveyance rail 32 which the conveying apparatus 1 has except having no slope part. And the base plate 20 has the plate-shaped part 20a formed in plate shape, and the protrusion part 20b in which a cross section is formed in a trapezoid. Here, the base plate 20 is the same as the base plate 2 of the transport device 1 except that the inclined portion 20c is formed in the plate-like portion 20a. The inclination part 20c is a part located in the conveyance direction front-end | tip part among the peripheral parts of the plate-shaped part 20a. The inclined portion 20c is formed such that the support surface supported by the first conveyance rail 31 and the second conveyance rail 40 is inclined upward. At this time, in the inclined portion 20c, the horizontal length from the inclined lower end portion to the inclined upper end portion and the vertical length are set in the same manner as the inclined portion 32a of the second conveying rail 32 included in the conveying device 1. The

  Therefore, when the base plate 20 is worn and transported along the extending direction of the first transport rail 31, the base plate 20 is worn, and even when a positional shift corresponding to the amount of wear occurs, The base plate 20 can be smoothly moved from the first transport rail 31 toward the second transport rail 40 while being guided by the inclined portion 20c.

Figure 7 is a diagram showing a configuration of a conveyance device 14. The transport device 14 is similar to the transport device 1 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted. The 2nd conveyance rail 40 of the conveying apparatus 14 is the same as the 2nd conveying rail 32 which the conveying apparatus 1 has except having no slope part. In the transport device 14, a guide for guiding the base plate 2 from the first transport rail 31 toward the second transport rail 40 at a connection position where the first transport rail 31 and the second transport rail 40 are connected. A member 41 is arranged. The guide member 41 is disposed at a position shifted in the width direction of the base plate 2 with respect to the first transport rail 31, extends in the transport direction A, and is connected to the second transport rail 40. And the guide member 41 has the member slope part 41a and the member flat part 41b.

  The member slope portion 41a is formed so as to have an inclined surface that is low at the rear end portion in the transport direction and extends in a predetermined length to a position equivalent to the support surface that supports the base plate 2 of the second transport rail 40 in the transport direction. Is done. At this time, in the member inclined surface portion 41a, the horizontal length and the vertical length from the inclined lower end portion to the inclined upper end portion are set in the same manner as the inclined surface portion 32a of the second conveying rail 32 included in the conveying device 1. Is done. For this reason, even when the base plate 2 is worn and transported along the extending direction of the first transport rail 31, the base plate 2 is worn and a positional shift corresponding to the wear amount occurs. The base plate 2 is guided by the inclined surface of the member inclined surface portion 41a and can move smoothly toward the member flat portion 41b.

  The member flat portion 41b has a flat surface extending from the inclined upper end portion of the member inclined surface portion 41a toward the transport direction by a predetermined length at a position equivalent to the support surface that supports the base plate 2 of the second transport rail 40. It is formed and connected to the second transport rail 40. Therefore, the base plate 2 guided to the member inclined surface portion 41 a and moved to the member flat portion 41 b is supported by the member flat portion 41 b at the same position as the support surface of the second transport rail 40. Therefore, the base plate 2 can smoothly move from the member flat portion 41 b toward the second transport rail 40 and can smoothly move from the second transport rail 40 toward the predetermined delivery portion 4.

Figure 8 is a diagram showing a configuration of a conveyance device 15. The transport device 15 is similar to the transport device 11 described above, and corresponding portions are denoted by the same reference numerals and description thereof is omitted. In the transport device 15, the transport rail 42 is characteristic. The transport rail 42 is not divided into two transport rails like the transport rail 34 of the transport device 11. The transport rail 42 includes a first transport rail portion 43 located in a region upstream in the transport direction A, and a second transport rail portion 44 located in a region downstream in the transport direction A. And the 2nd conveyance rail part 44 is comprised so that the base plate 2 can be supported in the position which shifted | deviated to the width direction of the base plate 2 with respect to the 1st conveyance rail part 43. FIG. In the transport device 15, the first transport rail unit 43 serves as the first transport rail 31 in the transport device 11, and the second transport rail unit 44 serves as the second transport rail 38 in the transport device 11.

In the transport device 15 , the second transport rail unit 44 supports the base plate 2 of the first transport rail unit 43 at a connection position where the width of the support surface that supports the base plate 2 is connected to the first transport rail unit 43. A width changing portion 44a formed so as to be continuously larger than the width of the support surface supporting the base plate 2 of the first transport rail portion 43 in the transport direction A. Have. For this reason, even when the base plate 2 is worn and transported along the extending direction of the first transport rail portion 43, the base plate 2 is worn, and a position shift corresponding to the wear amount occurs. The base plate 2 traveling on the width changing portion 44a of the second transport rail portion 44 is supported at a position that is continuously and smoothly shifted in the width direction of the base plate 2 with respect to the first transport rail portion 43. Can move.

  The present embodiment as described above is merely an example of the invention, and the configuration can be changed within the scope of the invention. For example, the shape of the transport rail at the tip portion supporting the base plate is configured such that the support surfaces supporting the base plate of the first transport rail and the second transport rail have different shapes, and the second transport rail However, the base plate may be configured to be supported at a position shifted in the width direction of the base plate with respect to the first transport rail.

  Moreover, although the example which provides a slope part in a 2nd conveyance rail in the connection position where a 1st conveyance rail and a 2nd conveyance rail are connected was shown, for example, a 2nd conveyance rail and a delivery part are shown. A slope portion may be provided in the vicinity of the connection position.

It is a diagram showing a configuration of a conveyance device 1. FIG. 3 is a diagram showing a state in which the base plate 2 is supported by the transport rail 3 and travels along the extending direction of the transport rail 3 in the transport device 1. It is a diagram showing a configuration of a conveyance device 10. It is a diagram showing a configuration of a conveyance device 11. It is a diagram showing a configuration of a conveyance device 12. It is a diagram showing a configuration of a conveyance device 13. It is a diagram showing a configuration of a conveyance device 14. It is a diagram showing a configuration of a conveyance device 15. FIG. 6 is a diagram illustrating a state in which the base plate 52 is supported by the transport rail 53 and travels along the extending direction of the transport rail 53 in the transport device 51 of the conventional technology.

Explanation of symbols

1, 10, 11, 12, 13, 14, 15, 51 Transport device 2, 20, 52 Base plate 3, 30, 34, 35, 36, 37, 42, 53 Transport rail 31 First transport rail 32, 33, 38, 39, 40 Second transport rail 41 Guide member

Claims (3)

Yes and base plate which is formed in a plate shape, a transport rail which supports the thickness direction one side of the base plate, while supporting the base plate in the transport rail, and a receiving passing portion passing underlying plate Ru performed And a transport device that transports the base plate along the extending direction of the transport rail,
The transport rail is disposed on the upstream side in the transport direction for transporting the base plate and on the downstream side in the transport direction, and in the width direction of the base plate with respect to the first transport rail. is composed of a Ru supported configured to be able to base plate at a position displaced a second transfer rail,
The second transport rail is
A slope portion having an inclined surface that is low at a connection position connected to the first transport rail and extends in a predetermined length to a position equivalent to a support surface that supports a base plate of the first transport rail in the transport direction;
A flat portion having a flat surface extending in a predetermined length at a position equivalent to a support surface supporting the base plate of the first transport rail from the inclined upper end portion of the slope portion toward the transport direction;
The delivery unit
The support surface that supports the base plate is arranged without being shifted in the vertical direction that is perpendicular to the extending direction of the transport rail with respect to the support surface that supports the base plate of the flat portion of the second transport rail. It is conveyed and wherein the Rukoto.   The transport apparatus according to claim 1, wherein a width of a support surface that supports the base plate of the second transport rail is larger than a width of a support surface that supports the base plate of the first transport rail. Yes and base plate which is formed in a plate shape, a transport rail which supports the thickness direction one side of the base plate, while supporting the base plate in the transport rail, and a receiving passing portion passing underlying plate Ru performed And a transport device that transports the base plate along the extending direction of the transport rail,
The transport rail is positioned in a region on the upstream side in the transport direction for transporting the base plate and in a region on the downstream side in the transport direction, and the width of the base plate with respect to the first transport rail portion It is composed of a second transport rail portion configured to be able to support the base plate at a position shifted in the hand direction ,
The second transport rail portion is
A slope portion having an inclined surface that is low at a connection position connected to the first transport rail portion and extends by a predetermined length to a position equivalent to a support surface that supports a base plate of the first transport rail portion in the transport direction. When,
A flat portion having a flat surface extending at a predetermined length at a position equivalent to a support surface supporting the base plate of the first transport rail portion from the inclined upper end portion of the slope portion toward the transport direction;
The delivery unit
The support surface that supports the base plate does not deviate in the vertical direction, which is a direction orthogonal to the extending direction of the transport rail, with respect to the support surface that supports the base plate of the flat portion of the second transport rail portion. disposed conveying apparatus according to claim Rukoto.

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