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JP4808395B2 - Printing device - Google Patents
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JP4808395B2 - Printing device - Google Patents

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JP4808395B2
JP4808395B2 JP2004358124A JP2004358124A JP4808395B2 JP 4808395 B2 JP4808395 B2 JP 4808395B2 JP 2004358124 A JP2004358124 A JP 2004358124A JP 2004358124 A JP2004358124 A JP 2004358124A JP 4808395 B2 JP4808395 B2 JP 4808395B2
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printing
steam
printing apparatus
liquid
vapor
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JP2006159152A (en
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寛人 内田
進 崎尾
智 池田
日出夫 竹井
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Ulvac Inc
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Ulvac Inc
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Description

本発明は樹脂材料を基板に吐出し、樹脂膜を形成する印刷方法に用いる印刷装置に関する。 The present invention ejects a resin material to a substrate, to a printing device used for printing how to form a resin film.

従来より、液晶パネルの配向膜には、ポリイミド膜のような樹脂膜が用いられている。樹脂膜の形成方法は、フレキソ印刷装置やインクジェットプリンタのような印刷装置で、樹脂材料の塗布液を基板上に塗布して塗布層を形成する。   Conventionally, a resin film such as a polyimide film has been used for an alignment film of a liquid crystal panel. The resin film is formed by applying a resin material coating liquid onto a substrate with a printing apparatus such as a flexographic printing apparatus or an ink jet printer to form a coating layer.

塗布液はポリイミド樹脂である樹脂材料が有機溶剤に溶解して液状にされており、塗布層を加熱乾燥すると、塗布層中の有機溶剤が蒸発して除去される。ポリイミド樹脂は常温で固体なので、有機溶剤が除去されてもポリイミド樹脂は残り、基板上にポリイミド樹脂の樹脂膜が形成される。   The coating liquid is made liquid by dissolving a resin material, which is a polyimide resin, in an organic solvent. When the coating layer is heated and dried, the organic solvent in the coating layer is evaporated and removed. Since the polyimide resin is solid at room temperature, the polyimide resin remains even if the organic solvent is removed, and a polyimide resin film is formed on the substrate.

インクジェットプリンタは一度に塗布液を塗布可能な範囲が限られているので、大型基板に配向膜を形成する場合には、基板とプリンタヘッドとを相対的に移動させ、プリンタヘッドを基板上で走査させることで、広い領域に配向膜を形成する。   Inkjet printers have a limited range in which a coating solution can be applied at one time. Therefore, when forming an alignment film on a large substrate, the substrate and the printer head are moved relative to each other, and the printer head is scanned over the substrate. By doing so, an alignment film is formed in a wide region.

しかしながら、基板上の最初の領域に塗布液が塗布されてから、最後の領域に塗布液が塗布されるまでの間に時間がかかり、最初に塗布された塗布液は、残りの領域に塗布液が印刷されている間に有機溶剤の蒸発が始まるため、塗布の最初の領域と最後の領域との間に乾燥むらが生じる。   However, it takes time from the time when the coating solution is applied to the first region on the substrate to the time when the coating solution is applied to the last region, and the first applied coating solution is applied to the remaining region. As the organic solvent begins to evaporate while the ink is printed, uneven drying occurs between the first and last areas of the application.

また、インクジェットプリンタで一部領域毎に印刷を行う場合には、塗布領域の境界でのすじむらや配向膜の欠損が発生することがある。この問題を解決するために、塗布する領域が一部重なり合うように印刷を行う方法があるが、この重なり合った部分の塗布層の膜厚が、他の部分の塗布層の膜厚よりも厚くなってしまい、結果として樹脂膜の膜厚にむらが生じる。このように従来の印刷方法では、配向膜の乾燥むらや膜厚むらの問題が生じやすく、このような配向膜を用いると液晶ディバイス特性が悪くなるという問題があった。
特開2001−305544号公報 特開2002−90740号公報 特開2002−296593号公報 特開2004−223354号公報 特開平11−40358号公報 特開2003−225600号公報
In addition, when printing is performed for each partial area with an ink jet printer, streaks at the boundary of the application area and defects in the alignment film may occur. In order to solve this problem, there is a method of printing so that the areas to be applied partially overlap, but the film thickness of the overlapping part of the coating layer is thicker than the film thickness of the other part of the coating layer. As a result, the film thickness of the resin film becomes uneven. As described above, the conventional printing method is liable to cause problems such as uneven drying of the alignment film and uneven film thickness. When such an alignment film is used, the liquid crystal device characteristics are deteriorated.
JP 2001-305544 A JP 2002-90740 A JP 2002-296593 A JP 2004-223354 A Japanese Patent Laid-Open No. 11-40358 JP 2003-225600 A

本発明は上記従来技術の不都合を解決するために創作されたものであり、その目的は、広い領域に膜厚均一な樹脂膜を形成可能な印刷装置を提供するものである。 The present invention has been created to solve the disadvantages of the prior art, its object is to provide a formable print device a uniform resin film thickness over a wide area.

上記課題を解決するために請求項1記載の発明は、印刷対象物が配置される印刷台と、前記印刷対象物を前記印刷台上の搬送開始位置から搬送終了位置に向けて移動させる基板移動装置と、前記印刷台上に配置され、前記印刷対象物の表面に塗布液を吐出する印刷ヘッドとを有する印刷装置であって、前記印刷対象物の移動方向の前記印刷ヘッドよりも下流位置に加湿液の蒸気を放出する蒸気発生装置を有する印刷装置であって、前記蒸気発生装置は前記印刷対象物の表面と対面する蒸気放出面を有し、前記蒸気放出面には前記蒸気を放出可能な複数の小孔が設けられ、前記印刷対象物が前記蒸気放出面の真下に位置したときには、前記小孔が配置された領域の外周が、前記印刷対象物の印刷領域よりも外側に位置するように、前記小孔が配置された領域は前記印刷領域よりも広く構成され、前記印刷領域内は均一に加湿液の蒸気に晒される印刷装置である。
請求項2記載の発明は、請求項1記載の印刷装置であって、前記小孔が配置された領域は、前記移動方向の長さが前記印刷領域の前記移動方向の長さよりも長く、前記移動方向に対して直角な方向の長さが前記印刷領域の前記移動方向に対して直角な方向の長さよりも長くされた印刷装置である。
請求項記載の発明は、請求項1又は請求項のいずれか1項記載の印刷装置であって、前記蒸気発生装置は、前記印刷対象物を搬入可能な蒸気発生室内に配置され、前記蒸気発生室は前記加湿液の蒸気で充満できるように構成されたことを特徴とする印刷装置である。
請求項4記載の発明は、請求項1乃至請求項3のいずれか1項記載の印刷装置であって、前記印刷領域の先に前記塗布液が印刷された部分が前記加湿液の蒸気に晒された状態で、前記印刷ヘッドは前記印刷領域の他の部分に前記塗布液の印刷を行うことができるように構成された印刷装置である。
請求項記載の発明は、請求項1乃至請求項のいずれか1項記載の印刷装置であって、前記印刷ヘッドを前記印刷対象物の移動方向とは略垂直方向に移動させるヘッド移動装置を有することを特徴とする印刷装置である。
請求項記載の発明は、請求項記載の印刷装置であって、前記蒸気発生室には該蒸気発生室内の気体を排出するポンプが接続されたことを特徴とする印刷装置である。
請求項記載の発明は、請求項1乃至請求項のいずれか1項記載の印刷装置であって、前記蒸気発生装置は、前記蒸気放出面が一面に配置された蒸気放出部と、前記蒸気放出部を加熱する加熱手段とを有し、前記蒸気放出部には前記加湿液の小滴が供給されるように構成されたことを特徴とする印刷装置である。
請求項記載の発明は、請求項1乃至請求項のいずれか1項記載の印刷装置であって、前記蒸気発生装置は、前記蒸気放出面が一面に配置された蒸気放出部を有し、前記蒸気放出部には前記加湿液の蒸気が供給されるように構成されたことを特徴とする印刷装置である。
請求項9記載の発明は、請求項1乃至請求項8のいずれか1項記載の印刷装置であって、前記蒸気発生装置を一つ又は二つ以上有する印刷装置である。
In order to solve the above problem, the invention according to claim 1 is a printing table on which a printing object is arranged, and a substrate movement for moving the printing object from a conveyance start position on the printing table to a conveyance end position. A printing apparatus that includes an apparatus and a print head that is disposed on the printing stand and that discharges a coating liquid onto the surface of the print object, the print apparatus being at a position downstream of the print head in the moving direction of the print object. the vapor of the humidifying solution a printing apparatus that have a steam generator that emits, the steam generator includes a steam emission surface facing the surface of the printing object, the steam in the steam-emitting surface When a plurality of releasable small holes are provided and the printing object is located directly below the vapor discharge surface, the outer periphery of the area where the small holes are arranged is outside the printing area of the printing object. The small holes are arranged so that Region is constituted wider than the printing area, the printing area is exposed printing apparatus to the vapor of uniformly moisturizing liquid.
Invention of Claim 2 is the printing apparatus of Claim 1, Comprising: The area | region where the said small hole is arrange | positioned has the length of the said moving direction longer than the length of the said moving direction of the said printing area | region, In the printing apparatus, the length in the direction perpendicular to the moving direction is longer than the length in the direction perpendicular to the moving direction of the printing region.
According to a third aspect of the invention, a printing apparatus of any one of claims 1 or claim 2, wherein the steam generator is placed the object to be printed to the steam generating chamber that can carry the The steam generation chamber is a printing device configured to be filled with steam of the humidifying liquid.
A fourth aspect of the present invention is the printing apparatus according to any one of the first to third aspects, wherein a portion of the printing area where the coating liquid is printed is exposed to the vapor of the humidifying liquid. In this state, the printing head is a printing device configured to print the coating liquid on other portions of the printing area.
According to a fifth aspect of the invention, a printing apparatus according to any one of claims 1 to 4, the head moving device for moving the print head substantially vertically to the movement direction of the object to be printed It is a printing apparatus characterized by having.
A sixth aspect of the present invention is the printing apparatus according to the third aspect , wherein the vapor generating chamber is connected to a pump for discharging the gas in the vapor generating chamber.
A seventh aspect of the present invention is the printing apparatus according to any one of the first to sixth aspects, wherein the vapor generating device includes a vapor discharge portion in which the vapor discharge surface is arranged on one side, And a heating unit configured to heat the vapor discharge unit, wherein the vapor discharge unit is configured to be supplied with small droplets of the humidifying liquid.
The invention according to claim 8 is the printing apparatus according to any one of claims 1 to 6 , wherein the steam generation device has a steam discharge portion in which the steam discharge surface is arranged on one surface. The printing apparatus is configured so that the vapor of the humidifying liquid is supplied to the vapor discharge unit.
A ninth aspect of the present invention is the printing apparatus according to any one of the first to eighth aspects , wherein the printing apparatus includes one or more of the steam generators.

本発明は上記のように構成されており、印刷ヘッドの下流側には蒸気発生装置が配置されているので、印刷対象物に印刷された塗布液は加湿液の蒸気に晒される。   The present invention is configured as described above, and the steam generator is disposed on the downstream side of the print head, so that the coating liquid printed on the printing object is exposed to the steam of the humidifying liquid.

例えば、印刷対象物上の塗布液近傍に蒸気放出面を配置すれば、小孔から放出される蒸気は塗布液と蒸気放出面の間に充満するが、蒸気発生装置を蒸気発生室内に配置し、蒸気発生室内部に蒸気を充満させれば、印刷対象物がより効率的に蒸気に晒されることになる。   For example, if a vapor discharge surface is arranged in the vicinity of the coating liquid on the object to be printed, the vapor released from the small holes fills between the coating liquid and the vapor discharge surface, but the vapor generator is arranged in the vapor generation chamber. If the steam generation chamber is filled with steam, the printing object is more efficiently exposed to the steam.

本発明によれば、印刷領域の一部分に印刷を行っているときに、先に印刷された塗布液は加湿液の蒸気に晒され、乾燥しないので、印刷領域には全体が均一に濡れた状態の塗布層が形成される。また、先に印刷された塗布液を加湿液に晒さない場合であっても、印刷領域全体の印刷が終わってから、塗布液を加湿雰囲気に置けば、全体が濡れた状態になり、乾燥工程で乾燥むらが起こりにくい。また、印刷直後に塗布層の膜厚が不均一であっても、濡れた状態にすることで、塗布液が自重で広がり、膜厚が均一になる。このように、本発明によれば、膜質が良く、かつ膜厚均一な樹脂膜を形成することができる。   According to the present invention, when printing is performed on a part of the printing area, the previously printed coating liquid is exposed to the vapor of the humidifying liquid and does not dry, so that the entire printing area is uniformly wet. The coating layer is formed. In addition, even if the previously printed coating liquid is not exposed to the humidifying liquid, if the coating liquid is placed in a humidified atmosphere after the printing of the entire printing area is finished, the whole becomes wet, and the drying process It is hard to cause uneven drying. Moreover, even if the film thickness of the coating layer is not uniform immediately after printing, the coating liquid spreads by its own weight and becomes uniform by making it wet. Thus, according to the present invention, it is possible to form a resin film with good film quality and uniform film thickness.

図1、図2(a)の符号1は本発明の印刷装置を示している。印刷装置1は、印刷台3と、インクジェット部50と、蒸気発生装置20とを有している。
印刷台3は細長であって、印刷台3を真上から見たときの平面形状は長方形になっている。印刷台3はその長手方向の一端上が搬送開始位置にされ、他端上が搬送終了位置にされており、搬送開始位置と搬送終了位置の間には不図示の基板移動装置が配置され、搬送開始位置に配置された基板11(印刷対象物)は基板移動装置によって搬送終了位置まで搬送されるようになっている。
Reference numeral 1 in FIGS. 1 and 2A denotes a printing apparatus according to the present invention. The printing apparatus 1 includes a printing stand 3, an inkjet unit 50, and a steam generation device 20.
The printing table 3 is elongated, and the planar shape when the printing table 3 is viewed from directly above is a rectangle. One end of the printing table 3 in the longitudinal direction is set as a transfer start position, and the other end is set as a transfer end position. A substrate moving device (not shown) is arranged between the transfer start position and the transfer end position. The substrate 11 (printing object) placed at the transfer start position is transferred to the transfer end position by the substrate moving device.

インクジェット部50は印刷台3の上方であって、搬送開始位置の近傍に配置されている。印刷台3の上方であって、インクジェット部50よりも搬送終了位置側には、インクジェット部50と隣接して蒸気発生室26が配置されている。蒸気発生装置20は、印刷台3と所定間隔を空けた状態で蒸気発生室26内に配置されており、インクジェット部50から送られた基板11は印刷台3と蒸気発生装置20との間に挿入されることで、蒸気発生室26内に収容されるように構成されている。   The inkjet unit 50 is disposed above the printing table 3 and in the vicinity of the conveyance start position. A vapor generation chamber 26 is disposed adjacent to the ink jet unit 50 above the printing table 3 and on the transport end position side of the ink jet unit 50. The steam generator 20 is disposed in the steam generation chamber 26 at a predetermined distance from the printing table 3, and the substrate 11 sent from the inkjet unit 50 is placed between the printing table 3 and the steam generation device 20. By being inserted, it is configured to be accommodated in the steam generation chamber 26.

インクジェット部50はヘッド移動装置51と、1又は2以上の印刷ヘッド55とを有しており、ヘッド移動装置51は印刷ヘッド55を、載置台3上の位置に基板11の移動方向に対して直交方向に往復移動させるように構成されている。   The inkjet unit 50 includes a head moving device 51 and one or more print heads 55. The head moving device 51 moves the print head 55 to a position on the mounting table 3 with respect to the moving direction of the substrate 11. It is configured to reciprocate in the orthogonal direction.

印刷ヘッド55は塗布液を吐出するノズルを有している。ヘッド移動装置51によって印刷ヘッド55が移動する方向をY方向とすると、印刷ヘッド55を静止した状態で、印刷ヘッド55のノズルから塗布液を塗布した時には、最大限塗布可能な領域のY方向の長さAは、基板11の印刷されるべき領域(印刷領域)のY方向の長さBよりも短くされている。   The print head 55 has a nozzle that discharges the coating liquid. Assuming that the direction in which the print head 55 moves by the head moving device 51 is the Y direction, when the application liquid is applied from the nozzles of the print head 55 with the print head 55 stationary, the maximum application area in the Y direction can be obtained. The length A is shorter than the length B in the Y direction of the area (printing area) to be printed on the substrate 11.

従って、基板11をインクジェット部50の下方位置で静止させた状態で、印刷ヘッド55をY方向に往動又は復動させると、Y方向に沿って印刷領域の端から端まで塗布液が印刷される。   Accordingly, when the print head 55 is moved forward or backward in the Y direction while the substrate 11 is stationary at the position below the inkjet unit 50, the coating liquid is printed from end to end in the print area along the Y direction. The

Y方向に沿って印刷領域の端から端まで塗布液を終了した後、基板移動装置により基板11をX方向に移動させると、塗布液が塗布された部分が蒸気発生室26内に送られると同時に、塗布液が塗布されていない部分が印刷ヘッド55の下方に配置される。   When the substrate 11 is moved in the X direction by the substrate moving device after finishing the coating solution from end to end along the Y direction, the portion where the coating solution is applied is sent into the vapor generation chamber 26. At the same time, the portion where the coating liquid is not applied is disposed below the print head 55.

Y方向に沿って印刷領域の端から端まで印刷された塗布液の幅Cは、印刷領域のX方向の長さDよりも短いから、基板11の移動距離を、その幅Cの大きさと同じだけ、又はそれよりもわずかに短くし、上述した塗布液の印刷を行うと、すでに印刷された塗布液の上流側の位置に、同じ幅の塗布液が隙間なく印刷される。従って、上述した塗布液の印刷と、基板11の移動とを繰り返すと、印刷領域の全面に塗布液が印刷される。   Since the width C of the coating liquid printed from end to end in the print area along the Y direction is shorter than the length D in the X direction of the print area, the movement distance of the substrate 11 is the same as the size of the width C. When the above-described coating liquid is printed, the coating liquid having the same width is printed without a gap at a position upstream of the already printed coating liquid. Accordingly, when the above-described printing of the coating liquid and the movement of the substrate 11 are repeated, the coating liquid is printed on the entire surface of the printing area.

蒸気発生装置20は蒸気放出部21と、蒸気放出部21の一面であって、印刷台3上を移動する基板11と平行な面である蒸気放出面22とを有している。
図3は印刷装置1の蒸気発生装置20が位置する部分をY方向に切断した場合の断面図である。
The steam generator 20 includes a steam discharge portion 21 and a steam discharge surface 22 which is a surface of the steam discharge portion 21 and is parallel to the substrate 11 moving on the printing table 3.
FIG. 3 is a cross-sectional view of a portion of the printing apparatus 1 where the steam generator 20 is located, cut in the Y direction.

蒸気放出部21は加湿液供給系29に接続されている。加湿液供給系29の加湿液は、加湿液供給系29内で霧状にされ、その小滴(ミスト)が蒸気放出部21の内部空間に供給される。   The vapor discharge part 21 is connected to a humidifying liquid supply system 29. The humidifying liquid of the humidifying liquid supply system 29 is atomized in the humidifying liquid supply system 29, and the droplets (mist) are supplied to the internal space of the vapor discharge unit 21.

蒸気発生装置20は蒸気放出部21を加熱する加熱手段25を有している。ここでは、加熱手段25は蒸気放出部21の内部に配置されており、予め加熱手段25に通電し、蒸気放出部21を加熱しながら、その内部空間に加湿液の小滴を供給すると、小滴の加湿液はその内部空間で蒸発し、加湿液の蒸気が発生する。   The steam generator 20 has a heating means 25 for heating the steam discharge part 21. Here, the heating means 25 is disposed inside the vapor discharge section 21, and when a small droplet of the humidifying liquid is supplied to the internal space while the vapor discharge section 21 is energized in advance and the vapor discharge section 21 is heated, The humidifying liquid in the droplets evaporates in the internal space, and the vapor of the humidifying liquid is generated.

蒸気放出面22には複数の小孔が形成されており、蒸気放出部21の内部空間で発生した加湿液の蒸気は、各小孔から均一に放出される。蒸気放出面22の小孔が設けられた領域は、X方向の長さが印刷領域のX方向の長さよりも長く、Y方向の長さが印刷領域のY方向の長さよりも長くされており、図2()に示すように基板11が蒸気放出面22の真下に位置したときには、小孔が配置された領域の外周が、印刷領域よりも外側に位置し、印刷領域の各部分には均一に加湿液の蒸気に晒される。蒸気放出面22から発生した蒸気は、蒸気発生室26の内部空間に充満し、加湿雰囲気が形成される。
A plurality of small holes are formed in the vapor discharge surface 22, and the vapor of the humidifying liquid generated in the internal space of the vapor discharge portion 21 is uniformly discharged from each small hole. In the region where the small holes of the vapor discharge surface 22 are provided, the length in the X direction is longer than the length in the X direction of the printing region, and the length in the Y direction is longer than the length in the Y direction of the printing region. 2 ( b ), when the substrate 11 is positioned directly below the vapor discharge surface 22, the outer periphery of the area where the small holes are arranged is positioned outside the printing area, and is located in each part of the printing area. Is uniformly exposed to the vapor of the humidifying liquid. The steam generated from the steam discharge surface 22 fills the internal space of the steam generation chamber 26 and a humidified atmosphere is formed.

次に、この印刷装置1を用いて基板11上に樹脂膜を形成する工程について説明する。
予め蒸気発生室26内部に加湿雰囲気を形成しておき、上述した塗布液の印刷を行うと、印刷領域の残りの部分に印刷が行われている時に、先に印刷された塗布液が加湿雰囲気に置かれる。図3の符号14は加湿雰囲気に置かれた塗布液を示している。
Next, a process of forming a resin film on the substrate 11 using the printing apparatus 1 will be described.
When a humidified atmosphere is formed in the steam generation chamber 26 in advance and the above-described coating liquid is printed, the previously printed coating liquid is humidified when printing is performed on the remaining portion of the printing area. Placed in. Reference numeral 14 in FIG. 3 indicates a coating solution placed in a humidified atmosphere.

塗布液14はポリイミド樹脂のような不揮発性の樹脂材料が、該樹脂材料を溶解する塗布液用溶剤に溶解したもので構成されているのに対し、加湿液は塗布液用溶剤の低沸点成分、または沸点が塗布液用溶剤の沸点以下の溶剤で構成されており、加湿雰囲気は加湿液が蒸発しても塗布液用溶剤が蒸発しないようになっている。   The coating solution 14 is composed of a non-volatile resin material such as a polyimide resin dissolved in a coating solution solvent that dissolves the resin material, whereas the humidifying solution is a low-boiling component of the coating solution solvent. Alternatively, the solvent is composed of a solvent having a boiling point equal to or lower than that of the coating solution solvent, and the humidified atmosphere prevents the coating solution solvent from evaporating even if the humidifying solution evaporates.

従って、先に印刷された塗布液14は、印刷領域の残りの部分に塗布液が印刷されている間も乾燥せず、濡れた状態が維持されるので、例え塗布液14が重なり合って印刷されたとしても、塗布液14は自重で広がり、印刷領域に膜厚均一な塗布液14の塗布層が形成される。   Accordingly, the coating liquid 14 printed earlier is not dried while the coating liquid is printed on the remaining portion of the printing area, and remains wet. For example, the coating liquid 14 is printed in an overlapping manner. Even so, the coating liquid 14 spreads by its own weight, and a coating layer of the coating liquid 14 having a uniform film thickness is formed in the printing region.

塗布層が形成された状態の基板11を、不図示の印刷装置1から不図示の乾燥装置に搬入し、塗布層の温度が塗布液用溶剤の沸点よりも高温に加熱すると、不揮発性成分であるポリイミド樹脂は蒸発しないが、揮発性成分である塗布液用溶剤と加湿液は蒸発する。   When the substrate 11 on which the coating layer has been formed is carried into the drying device (not shown) from the printing device 1 (not shown) and heated to a temperature higher than the boiling point of the solvent for the coating solution, A certain polyimide resin does not evaporate, but the solvent for the coating liquid and the humidifying liquid, which are volatile components, evaporate.

加湿雰囲気で膨潤された後の塗布層は、塗布層中の蒸発成分の分布が均一なので、揮発性成分が蒸発するときには、塗布層の各部分で乾燥が均一に進行し、乾燥むらが生じない。乾燥むらが起こらないから、乾燥後の塗布層は膜厚が均一なだけではなく、その膜質も優れており、塗布層を更に熱処理すると膜質が良く、膜厚が均一なポリイミド樹脂の樹脂膜が得られる。   Since the coating layer after being swollen in a humidified atmosphere has a uniform distribution of the evaporation component in the coating layer, when the volatile component evaporates, the drying proceeds uniformly in each part of the coating layer, and uneven drying does not occur. . Since the drying unevenness does not occur, the coating layer after drying is not only uniform in film thickness, but also the film quality is excellent.If the coating layer is further heat-treated, the film quality is good and a polyimide resin film with a uniform film thickness is obtained. can get.

一般に熱処理後のポリイミド樹脂は常温で固体なので、塗布層用溶剤や加湿液が除去された後の樹脂膜は流動性を有しておらず、常温で固体になっている。
この樹脂膜に、ラビング処理のような配向処理を施せば、液晶パネルの配向膜として用いることができる。
In general, since the polyimide resin after heat treatment is solid at room temperature, the resin film after the solvent for the coating layer and the humidifying liquid are removed does not have fluidity and is solid at room temperature.
If this resin film is subjected to an alignment treatment such as a rubbing treatment, it can be used as an alignment film for a liquid crystal panel.

以上は、予め蒸気発生室26内に加湿雰囲気を形成しておき、印刷領域の他の部分に塗布液の印刷を行いながら、先に塗布液が印刷された部分を加湿雰囲気に置く場合について説明したが、本発明はこれに限定されるものではない。   The above describes the case where a humidified atmosphere is formed in the steam generation chamber 26 in advance, and the portion on which the coating liquid has been printed is placed in the humidified atmosphere while printing the coating liquid on the other portion of the printing area. However, the present invention is not limited to this.

印刷領域に順次印刷を終了した後、印刷領域を蒸気発生室26内に位置させ、印刷領域に印刷された塗布液を一斉に加湿液の蒸気に晒してもよい。
また、それとは別に、印刷領域に順番に塗布液を印刷した後、その印刷領域への印刷を行わない状態で、印刷が早い時期に行われた部分を早い時期に、その部分よりも遅く印刷が行われた部分を遅い時期に加湿雰囲気に置くこともできる。
After sequentially printing in the print area, the print area may be positioned in the steam generation chamber 26, and the coating liquid printed in the print area may be exposed to the vapor of the humidifying liquid all at once.
In addition, after printing the coating liquid in order on the print area, the part that was printed early is printed earlier than the part without printing on the print area. It is also possible to place the part where the is performed in a humidified atmosphere at a later time.

印刷された塗布液が一斉に加湿液の蒸気に晒される場合について具体的に説明すると、蒸気発生室26内部に加湿雰囲気を形成せずに、上記塗布液の印刷を行い、印刷領域の全てに塗布液が印刷され、印刷領域が全て蒸気発生室26内に配置されたところで、加湿液の蒸気を放出し、加湿雰囲気を形成する。   The case where the printed coating liquid is exposed all at once to the vapor of the humidifying liquid will be described in detail. The above-mentioned coating liquid is printed without forming a humidified atmosphere inside the steam generation chamber 26, and is applied to all the printing areas. When the coating liquid is printed and the entire print area is disposed in the steam generation chamber 26, the humidified liquid is discharged to form a humidified atmosphere.

この場合、先に印刷された部分の塗布液は、残りの部分が印刷されている間に乾燥するが、後から残りの部分の塗布液と一緒に加湿雰囲気に置かれることで膨潤して濡れた状態になり、自重によって広がって膜厚均一な塗布層が形成される。 全体が濡れた状態になることで、後の乾燥工程での乾燥むらが起こらないので、印刷領域全てを印刷終了後、加湿雰囲気に置いた場合であっても、膜質と膜厚が均一な樹脂膜が得られる。   In this case, the coating liquid of the previously printed part dries while the remaining part is printed, but later swells and wets by being placed in a humidified atmosphere together with the remaining part of the coating liquid. Thus, a coating layer having a uniform thickness is formed by spreading due to its own weight. Even if the entire printing area is placed in a humidified atmosphere after printing is completed, the film quality and film thickness are uniform even when the whole is in a wet state so that drying unevenness does not occur in the subsequent drying process. A membrane is obtained.

以上は、蒸気発生装置20が1つ設けられた場合について説明したが、蒸気発生装置の数は1つに限定されるものではなく、1つの印刷台3上に2つ以上の蒸気発生装置を設けることもできる。   The above is a case where one steam generator 20 is provided. However, the number of steam generators is not limited to one, and two or more steam generators are provided on one printing stand 3. It can also be provided.

例えば、蒸気発生装置を2つ以上有する印刷装置2について説明すると、図4に示すように、印刷台3の上方であって、インクジェット部50に隣接する第一の蒸気発生室26の基板搬送方向下流側に、第二の蒸気発生室46が配置されており、第二の蒸気発生装置40は第二の蒸気発生室46内に配置されている。   For example, the printing apparatus 2 having two or more vapor generation apparatuses will be described. As shown in FIG. 4, the substrate conveyance direction of the first vapor generation chamber 26 that is above the printing table 3 and adjacent to the inkjet unit 50 is illustrated. A second steam generation chamber 46 is disposed on the downstream side, and the second steam generation device 40 is disposed in the second steam generation chamber 46.

基板11は印刷台3と第一の蒸気発生装置20との間に挿入され、第一の蒸気発生室26内に収容された後、X方向に移動することで、印刷台3と第二の蒸気発生装置40との間に挿入され、第二の蒸気発生室46内に収容される。   The substrate 11 is inserted between the printing table 3 and the first steam generation device 20, accommodated in the first steam generation chamber 26, and then moved in the X direction. It is inserted between the steam generator 40 and accommodated in the second steam generation chamber 46.

基板11は第一の蒸気発生装置20で形成された第一の加湿雰囲気と、第二の蒸気発生装置40で形成された第二の加湿雰囲気に順番に置かれるので、第一、第二の加湿雰囲気の条件(例えば加湿液の種類、温度、蒸気圧)を変えておけば、異なる加湿雰囲気で順番に塗布液の処理を行うことができる。   Since the board | substrate 11 is put in order in the 1st humidification atmosphere formed with the 1st steam generation apparatus 20, and the 2nd humidification atmosphere formed with the 2nd steam generation apparatus 40, the 1st, 2nd If the conditions of the humidified atmosphere (for example, the type, temperature, and vapor pressure of the humidified liquid) are changed, the coating liquid can be processed sequentially in different humidified atmospheres.

蒸気発生装置20は、蒸気放出面22から均一に蒸気を放出可能なものであれば特に限定されるものではない。
具体的には、蒸気放出部21を多孔質性セラミックや、スポンジ状樹脂フィルムのような多孔質体で構成することが可能であり、この場合、加湿液供給系29から供給される加湿液、加湿液液のミスト、又は加湿液の蒸気は多孔質構造である内部空間に供給され、加湿液の蒸気は、多孔質体の一面を蒸気放出面とし、細孔の露出する領域から加湿液の蒸気が放出される。
The steam generator 20 is not particularly limited as long as it can discharge steam uniformly from the steam discharge surface 22.
Specifically, the vapor discharge part 21 can be composed of a porous ceramic or a porous material such as a sponge-like resin film. In this case, a humidifying liquid supplied from the humidifying liquid supply system 29, The mist of the humidified liquid or the vapor of the humidified liquid is supplied to the internal space having a porous structure. Vapor is released.

また、多孔質体以外にも、内部中空のシャワーヘッドで蒸気放出部を構成し、その一面であるノズルプレートを蒸気放出面とし、ノズルプレートの小孔が形成された領域から加湿液の蒸気が放出される。   In addition to the porous body, the vapor discharge part is constituted by an internal hollow shower head, the nozzle plate which is one side of the vapor discharge part is used as a vapor discharge surface, and the vapor of the humidifying liquid is generated from the region where the small holes of the nozzle plate are formed. Released.

以上は、蒸気放出部21に加湿液のミストを供給する場合について説明したが、本発明はこれに限定されるものではなく、加湿液をミスト状にせず、液状のまま蒸気放出部21に供給してもよい。   The above has described the case where the mist of the humidifying liquid is supplied to the vapor discharge unit 21, but the present invention is not limited to this, and the humidifying liquid is not supplied to the mist but supplied to the vapor discharge unit 21 in a liquid state. May be.

また、蒸気放出部21内部で加湿液の蒸気を発生させずに、例えば加湿液供給系29で加湿液の蒸気を発生させ、その蒸気を蒸気放出部21に供給して、蒸気放出面22から放出させる場合も本発明には含まれる。蒸気放出部21に蒸気を供給する場合には、加熱手段25によって予め蒸気放出部21を昇温させておけば、加湿液の蒸気が蒸気放出部21で冷却されないので、蒸気がその内部空間で液化させずに、蒸気のまま蒸気放出面22から放出される。   Further, without generating the vapor of the humidification liquid inside the vapor discharge unit 21, for example, the vapor of the humidification liquid is generated by the humidification liquid supply system 29, and the vapor is supplied to the vapor discharge unit 21, The case of releasing is also included in the present invention. When supplying steam to the steam discharge section 21, if the steam discharge section 21 is heated in advance by the heating means 25, the steam of the humidified liquid is not cooled by the steam discharge section 21, so that the steam is in its internal space. Without being liquefied, it is discharged from the vapor discharge surface 22 as vapor.

このように、蒸気放出部21に供給する加湿液の状態は特に限定されないが、液状のまま供給する場合や、蒸気にして供給する場合に比べ、ミスト状にして供給すると、特に蒸気放出部21を多孔質体で構成したときに、その内部空間に加湿液が行き渡りやすく、その結果、蒸気放出面22で蒸気放出量の分布が均一になる。   As described above, the state of the humidifying liquid supplied to the vapor discharge unit 21 is not particularly limited. However, when the liquid is supplied in a mist state as compared with the case where it is supplied in a liquid state or supplied as a vapor, the vapor discharge unit 21 is particularly provided. When the is made of a porous body, the humidified liquid easily spreads in the internal space, and as a result, the distribution of the vapor discharge amount becomes uniform on the vapor discharge surface 22.

蒸気発生室20、40に昇温ヒータのような温度制御手段を設けておき、蒸気発生室20、40を加熱することで、加湿雰囲気の温度を高くすれば、印刷時のすじむらを解消しやすくなる。   If temperature control means such as a temperature raising heater is provided in the steam generation chambers 20 and 40 and the steam generation chambers 20 and 40 are heated to increase the temperature of the humidified atmosphere, the streaks during printing are eliminated. It becomes easy.

加湿液の種類は塗布液用溶剤に応じて選定されるものであり、塗布液用溶剤が2種類以上の溶剤が混合された混合溶剤の場合は、その構成成分のうち、沸点が塗布液用溶剤の沸点以下の低沸点成分を用いることができる。   The type of the humidifying liquid is selected according to the solvent for the coating liquid. When the solvent for the coating liquid is a mixed solvent in which two or more kinds of solvents are mixed, the boiling point of the constituent components is for the coating liquid. Low boiling point components below the boiling point of the solvent can be used.

樹脂材料はポリイミド樹脂に限定されるものではなく、樹脂材料に例えばポリイミド前駆体(ポリアミック酸)を用いることもできる。ポリイミド前駆体を樹脂材料に用いる場合には、塗布層を乾燥する工程で、ポリイミド前駆体が重合する重合温度よりも高い温度に塗布層を加熱すれば、塗布層用溶剤や加湿液が塗布層から除去されるだけではなく、ポリイミド前駆体が重合し、その重合物であるポリイミド樹脂の樹脂膜が得られる。樹脂材料にはポリイミド樹脂とポリイミド前駆体の両方を含有させてもよく、また、他の種類の樹脂や、添加剤を添加することもできる。   The resin material is not limited to the polyimide resin, and for example, a polyimide precursor (polyamic acid) can be used as the resin material. When a polyimide precursor is used for the resin material, the coating layer solvent or humidifying liquid is applied to the coating layer by heating the coating layer to a temperature higher than the polymerization temperature at which the polyimide precursor is polymerized in the step of drying the coating layer. In addition to being removed from the polyimide, the polyimide precursor is polymerized, and a resin film of a polyimide resin as the polymer is obtained. The resin material may contain both a polyimide resin and a polyimide precursor, and other types of resins and additives may be added.

以上は、印刷ヘッド55を基板11の走行方向に対して移動させながら、塗布液の印刷を行う場合について説明したが、本発明はこれに限定されるものではなく、例えば大型の印刷ヘッド55や、印刷ヘッド55を複数台用いることで、塗布液を最大限塗布可能なY方向の大きさを、印刷領域のY方向の大きさよりも大きくすれば、印刷ヘッド55を固定して印刷を行ってもよい。   In the above, the case where the coating liquid is printed while moving the print head 55 with respect to the traveling direction of the substrate 11 has been described. However, the present invention is not limited to this. By using a plurality of print heads 55, if the size in the Y direction at which the coating liquid can be applied to the maximum is larger than the size in the Y direction of the print area, printing is performed with the print head 55 fixed. Also good.

以上は、基板上の1つの印刷領域に樹脂膜を形成する場合について説明したが、本発明はこれに限定されるものではなく、表面上に複数の印刷領域を有する基板を印刷対象物として用い、1又は2以上の印刷領域に塗布層を形成した後、該基板と印刷ヘッド55とを相対的に移動させ、印刷ヘッドを新たな印刷領域上に位置させれば、新たな印刷領域に塗布層が形成される。塗布層の印刷と、基板と印刷ヘッド55との相対的な移動を繰り返せば、基板上の全ての印刷領域に塗布層を形成することができる。   In the above, the case where the resin film is formed in one printing region on the substrate has been described, but the present invention is not limited to this, and a substrate having a plurality of printing regions on the surface is used as a printing object. After forming a coating layer in one or more printing areas, the substrate and the print head 55 are moved relative to each other so that the print head is positioned on the new printing area. A layer is formed. By repeating the printing of the coating layer and the relative movement between the substrate and the print head 55, the coating layer can be formed in all the print areas on the substrate.

この場合も、印刷が終了した印刷領域を直ちに加湿雰囲気に置くようにすれば、残りの印刷領域を印刷している間に、先に印刷された印刷領域の塗布液が乾燥せず、また、全ての印刷領域を印刷した後に各印刷領域を加湿雰囲気に置き、塗布液を膨潤させれば、各印刷領域の塗布層が濡れた状態になり、いずれの場合も、各印刷領域に、膜質が良く、膜厚が均一な塗布層が形成される。   Also in this case, if the printing area where printing has been completed is immediately placed in a humidified atmosphere, while the remaining printing area is being printed, the application liquid in the previously printed printing area will not dry, After printing all the print areas, if each print area is placed in a humidified atmosphere and the coating liquid is swollen, the coating layer of each print area becomes wet, and in each case, the film quality is in each print area. A coating layer having a uniform film thickness is formed.

例えば、複数の印刷領域(画素)が配置された基板の、カラーフィルターの各画素に2色以上のインク(例えば赤色、緑色、青色)を印刷する場合に、本発明の印刷装置及び印刷方法を用いれば、印刷時に乾燥ムラが生じず、膜質が良く、膜厚が均一なカラーフィルターが形成される。また、各印刷領域(画素)にトランジスタ(例えばTFT)が配置された基板の、各画素に有機材料(例えば、ホール注入材料や発光材料)を印刷する場合に、本発明の印刷装置及び印刷方法を用いれば、膜質が良く、膜厚が均一な有機層(例えば、ホール注入層や発光層)が形成される。   For example, when printing two or more colors of ink (for example, red, green, blue) on each pixel of a color filter on a substrate on which a plurality of printing regions (pixels) are arranged, the printing apparatus and printing method of the present invention are used. If used, a dry filter does not cause unevenness in printing, and a color filter with good film quality and uniform film thickness is formed. In addition, when an organic material (for example, a hole injection material or a light emitting material) is printed on each pixel of a substrate on which a transistor (for example, TFT) is arranged in each printing region (pixel), the printing apparatus and the printing method of the present invention. Is used, an organic layer having a good film quality and a uniform film thickness (for example, a hole injection layer or a light emitting layer) is formed.

本発明の一例の印刷装置の側面図Side view of an example printing apparatus of the present invention (a)、(b):本発明の印刷方法を説明する工程図(A), (b): Process drawing explaining the printing method of the present invention 蒸気発生装置の構成を説明する断面図Sectional drawing explaining the structure of a steam generator 本発明の他の例の印刷装置の上面図The top view of the printing apparatus of the other example of this invention

符号の説明Explanation of symbols

1……印刷装置 3……印刷台 11……印刷対象物(基板) 20、40……蒸気発生装置(第一、第二の蒸気発生装置) 22、42……蒸気放出面 26、46……蒸気発生室(第一、第二の蒸気発生室) 50……インクジェット部 55……印刷ヘッド   DESCRIPTION OF SYMBOLS 1 ... Printing apparatus 3 ... Printing stand 11 ... Print object (board | substrate) 20, 40 ... Steam generator (1st, 2nd steam generator) 22, 42 ... Steam discharge surface 26, 46 ... ... Steam generation chamber (first and second steam generation chambers) 50 ... Inkjet section 55 ... Print head

Claims (9)

印刷対象物が配置される印刷台と、
前記印刷対象物を前記印刷台上の搬送開始位置から搬送終了位置に向けて移動させる基板移動装置と、
前記印刷台上に配置され、前記印刷対象物の表面に塗布液を吐出する印刷ヘッドとを有する印刷装置であって、
前記印刷対象物の移動方向の前記印刷ヘッドよりも下流位置に加湿液の蒸気を放出する蒸気発生装置を有する印刷装置であって、
前記蒸気発生装置は前記印刷対象物の表面と対面する蒸気放出面を有し、
前記蒸気放出面には前記蒸気を放出可能な複数の小孔が設けられ、前記印刷対象物が前記蒸気放出面の真下に位置したときには、前記小孔が配置された領域の外周が、前記印刷対象物の印刷領域よりも外側に位置するように、前記小孔が配置された領域は前記印刷領域よりも広く構成され、前記印刷領域内は均一に加湿液の蒸気に晒される印刷装置。
A printing stand on which a print object is placed;
A substrate moving device for moving the print object from a transfer start position on the printing table toward a transfer end position;
A printing apparatus disposed on the printing table and having a print head for discharging a coating liquid onto the surface of the printing object;
A printing apparatus that have a steam generator which emits steam humidification liquid downstream position than the print head in the moving direction of the printing object,
The steam generator has a steam discharge surface facing the surface of the printing object,
The vapor discharge surface is provided with a plurality of small holes capable of discharging the vapor, and when the object to be printed is located directly below the vapor discharge surface, the outer periphery of the region where the small holes are arranged is the print The printing apparatus is configured such that the area where the small holes are arranged is wider than the printing area so as to be located outside the printing area of the object, and the inside of the printing area is uniformly exposed to the vapor of the humidifying liquid.
前記小孔が配置された領域は、前記移動方向の長さが前記印刷領域の前記移動方向の長さよりも長く、前記移動方向に対して直角な方向の長さが前記印刷領域の前記移動方向に対して直角な方向の長さよりも長くされた請求項1記載の印刷装置。The region in which the small holes are arranged has a length in the moving direction longer than a length in the moving direction of the printing region, and a length in a direction perpendicular to the moving direction in the moving direction of the printing region. The printing apparatus according to claim 1, wherein the printing apparatus is longer than a length in a direction perpendicular to the direction. 前記蒸気発生装置は、前記印刷対象物を搬入可能な蒸気発生室内に配置され、
前記蒸気発生室は前記加湿液の蒸気で充満できるように構成されたことを特徴とする請求項1又は請求項のいずれか1項記載の印刷装置。
The steam generation device is disposed in a steam generation chamber capable of carrying the print object,
The steam generating chamber is the moisturizing liquid printing apparatus according to any one of claims 1 or claim 2, characterized in that it is configured to be filled with steam.
前記印刷領域の先に前記塗布液が印刷された部分が前記加湿液の蒸気に晒された状態で、前記印刷ヘッドは前記印刷領域の他の部分に前記塗布液の印刷を行うことができるように構成された請求項1乃至請求項3のいずれか1項記載の印刷装置。The print head can print the coating liquid on the other part of the printing area in a state where the part where the coating liquid is printed on the tip of the printing area is exposed to the vapor of the humidifying liquid. The printing apparatus according to claim 1, wherein the printing apparatus is configured as described above. 前記印刷ヘッドを前記印刷対象物の移動方向とは略垂直方向に移動させるヘッド移動装置を有することを特徴とする請求項1乃至請求項のいずれか1項記載の印刷装置。 Printing apparatus according to any one of claims 1 to 4, characterized in that it has a head moving device for moving substantially in a vertical direction to the moving direction of the print head and the printing object. 前記蒸気発生室には該蒸気発生室内の気体を排出するポンプが接続されたことを特徴とする請求項記載の印刷装置。 The printing apparatus according to claim 3, wherein a pump for discharging the gas in the steam generation chamber is connected to the steam generation chamber. 前記蒸気発生装置は、前記蒸気放出面が一面に配置された蒸気放出部と、前記蒸気放出部を加熱する加熱手段とを有し、
前記蒸気放出部には前記加湿液の小滴が供給されるように構成されたことを特徴とする請求項1乃至請求項のいずれか1項記載の印刷装置。
The steam generation device includes a steam discharge section in which the steam discharge surface is disposed on one surface, and a heating unit that heats the steam discharge section,
Printing apparatus according to any one of claims 1 to 6 wherein the steam-emitting portion, characterized in that the droplets of the moisturizing liquid is configured to be supplied.
前記蒸気発生装置は、前記蒸気放出面が一面に配置された蒸気放出部を有し、前記蒸気放出部には前記加湿液の蒸気が供給されるように構成されたことを特徴とする請求項1乃至請求項のいずれか1項記載の印刷装置。 The steam generation device includes a steam discharge portion in which the vapor discharge surface is disposed on one surface, and the vapor discharge portion is configured to be supplied with steam of the humidifying liquid. The printing apparatus according to any one of claims 1 to 6 . 前記蒸気発生装置を一つ又は二つ以上有する請求項1乃至請求項8のいずれか1項記載の印刷装置。The printing apparatus according to claim 1, wherein the printing apparatus includes one or two or more steam generation apparatuses.
JP2004358124A 2004-12-10 2004-12-10 Printing device Expired - Fee Related JP4808395B2 (en)

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