JP4808451B2 - Abrasive supply container for high-pressure liquid jet cutting device and abrasive supply method - Google Patents

Description

  The present invention relates to an abrasive supply container for a high-pressure liquid injection type cutting device that cuts a workpiece by injection of high-pressure liquid containing an abrasive.

  A water jet is a jet of high-pressure water formed by applying energy to water by an ultra-high pressure pump or the like, and has a flow velocity of 1 to 3 times the speed of sound, for example. In recent years, methods and apparatuses for cutting various workpieces (workpieces) using this water jet have been developed. In particular, in order to improve cutting efficiency, attention has been focused on abrasive jets in which high-pressure water is mixed with a solid abrasive. This abrasive material is made of a material with high hardness such as garnet, alumina oxide, silicon carbide, etc., and is a granular material having a particle size of, for example, several tens to several hundreds μm. These abrasive materials are processed together with high-pressure water. Collides with an object at high speed, destroys a part of the workpiece and cuts it.

  Such water jet cutting has the advantage that it can be cut without affecting the workpiece, and the occurrence of burrs on the cut surface can be reduced by the abrasive. Furthermore, in addition to being able to cut without problems even if the cutting line is a curve, there is an advantage that it is suitable for cutting composite materials and difficult-to-work materials. For this reason, in recent years, in order to dice a semiconductor substrate, particularly a packaged substrate, a cutting process using a water jet instead of a conventional cutting blade has been studied.

  Conventionally, when replenishing abrasives in a water jet cutting apparatus using such an abrasive jet, the abrasive contained in the bag is directly applied to the abrasive replenishing port of the water jet cutting apparatus or a catch tank that receives the water jet. It was thrown in.

No. 7-46459

  However, in the conventional replenishment method in which the abrasive material is charged directly from the bag containing the abrasive material, the abrasive material, which is fine particles, is scattered in the air and around the water jet cutting device. There is a problem that it adheres to the operator and is contaminated. For this reason, after replenishing the abrasive, the surroundings of the water jet cutting device have to be cleaned, and the operator who has performed the replenishment operation has to clean dirty hands and the replenishment operation is very complicated.

Therefore, the present invention has been made in view of the above problems, and when replenishing abrasives in a high-pressure liquid injection type cutting apparatus such as the water jet cutting apparatus, surrounding contamination due to scattering of the abrasives is eliminated. An object of the present invention is to provide a new and improved abrasive replenishment container for a high-pressure liquid jetting cutting apparatus , and a method for replenishing an abrasive, which can prevent and easily replenish the abrasive.

In order to solve the above-mentioned problems, according to a first aspect of the present invention, a polishing for replenishing an abrasive to a high-pressure liquid-jet cutting device that cuts a workpiece by jetting a high-pressure liquid containing the abrasive. A material supply container is provided. The abrasive supply container includes: a container main body for storing the abrasive; a liquid inlet disposed on one side surface of the container main body; and an abrasive mixture liquid disposed on the side surface of the container main body facing the one side surface. A first lid member that can be attached to and detached from the liquid inlet; and a second lid member that can be attached to and detached from the abrasive mixed liquid outlet. The liquid inlet and the abrasive mixture outlet are arranged on the same straight line .
According to another aspect of the present invention, in the abrasive replenishing method for replenishing the high-pressure liquid jetting cutting device with the abrasive using the above-mentioned abrasive replenishing container, at least during the transport of the abrasive replenishing container, the liquid flow By attaching the first lid member and the second lid member to the inlet and the abrasive mixture liquid discharge port, the abrasive is enclosed in the container body. Further, when the abrasive is replenished to the high-pressure liquid injection type cutting device, the liquid that has flowed into the container body from the liquid inlet is removed in the container body with the first lid member and the second lid member removed. And the abrasive mixture is discharged from the abrasive mixture discharge port and supplied to the high-pressure liquid jetting cutting device.

  With this configuration, when replenishing the abrasive to the high-pressure liquid jet cutting device, the liquid is pressed into the abrasive replenishing container, the abrasive in the abrasive replenishing container is mixed with the liquid, and extruded. The liquid mixture can be supplied to a high-pressure liquid jet cutting device. Therefore, since the abrasive can be prevented from being scattered in the air, it is possible to prevent the surroundings of the high-pressure liquid jet cutting device and the operator from being contaminated by the abrasive, and the abrasive can be easily replenished. When the abrasive is not replenished (for example, when the abrasive replenishment container is transported), the abrasive can be sealed in the abrasive replenishment container so as not to spill.

  In addition, when the abrasive is replenished to the high-pressure liquid injection type cutting device, the first lid member and the second lid member are removed, a liquid supply pipe is attached to the liquid inlet, and an abrasive mixture liquid outlet is provided. An abrasive mixed liquid ejection pipe is attached, and the liquid supplied through the liquid supply pipe flows into the container body from the liquid inlet and is mixed with the abrasive, and the abrasive mixed liquid is mixed with the abrasive mixed liquid. It may be discharged from the discharge port and supplied to the high-pressure liquid injection cutting device via the abrasive mixed liquid discharge pipe. As a result, the abrasive supply container is used as an abrasive supply means by attaching the liquid supply pipe and the abrasive mixed liquid jet pipe abrasive to the abrasive supply container, which is a container that normally stores the abrasive. can do. As a result, the abrasive can be easily replenished to the high-pressure liquid injection cutting device without taking the abrasive out of the abrasive replenishment container.

  In addition, the liquid inlet and the abrasive mixed liquid outlet may be arranged on substantially the same straight line. Thereby, the flow of water in the container body can be made smooth, and the abrasive mixed with water can be efficiently discharged out of the container body.

  As described above, according to the present invention, when the abrasive is replenished in the high-pressure liquid jet cutting apparatus, the surrounding contamination due to the scattering of the abrasive can be prevented and the abrasive can be easily replenished.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
The high pressure liquid injection cutting device according to the first embodiment of the present invention will be described below. The high-pressure liquid injection type cutting device according to the present embodiment is, for example, as a water jet cutting device that cuts a workpiece by a high-pressure water jet (abrasive jet) mixed with an abrasive, as described below. Although configured, the present invention is not limited to such an example.

  First, based on FIG. 1, the whole structure of the water jet cutting device 1 concerning this embodiment is demonstrated. In addition, FIG. 1 is explanatory drawing which shows the whole structure of the water jet cutting device 1 concerning this embodiment.

  As shown in FIG. 1, the water jet cutting device 1 according to the present embodiment jets high pressure water containing an abrasive to the workpiece 5, thereby cutting the workpiece 5 into a relatively free cutting line. The cutting device is capable of cutting with high accuracy (that is, water jet processing). The workpiece 5 to be cut by the water jet cutting apparatus 1 is, for example, various semiconductor substrates such as a silicon wafer and a packaged semiconductor substrate (for example, a CSP substrate), but is not limited thereto.

  The water jet cutting apparatus 1 includes, for example, a high pressure liquid supply means 10 including a high pressure pump 15 and the like, an abrasive mixing means 20 including abrasive mixture storage tanks 22a and 22b, an injection nozzle 30, and a holding unit. A table 40, a table moving means (not shown), a catch tank 50, and an abrasive recovery means 60 are mainly provided.

  The high pressure liquid supply means 10 is constituted by, for example, a high pressure pump 15. The high-pressure pump 15 pressurizes water supplied from the outside to generate high-pressure water, and supplies the high-pressure water to the abrasive mixture storage tanks 22 a and 22 b via the pipe 12.

  The abrasive mixing means 20 includes, for example, two abrasive mixed liquid storage tanks 22a and 22b (hereinafter referred to as “abrasive mixed liquid storage tank 22” which store abrasive mixed water in which abrasive (abrasive grains) and water are mixed. The abrasive is mixed at a predetermined ratio with the high-pressure water supplied from the high-pressure liquid supply means 10, and the high-pressure water mixed with this abrasive is supplied to the pipe 21. To the injection nozzle 30. This abrasive is made of a material with high hardness such as garnet, alumina oxide, silicon carbide, diamond, etc., and is a granular material having a particle size of, for example, about several tens to several hundreds μm, and has a function of increasing the cutting efficiency of high-pressure water Have In this embodiment, for example, alumina oxide having a particle size of 40 to 100 μm is used as the abrasive.

  The abrasive mixing means 20 pushes out the abrasive mixture water stored in one of the abrasive mixture storage tanks 22 at a high pressure by the pressure of the high-pressure water supplied from the high-pressure pump 15, and the injection nozzle 30. Can be used for cutting. At this time, in the other abrasive mixed liquid storage tank 22, the abrasive recovered by the abrasive recovery means 60 is replenished via the pipe 61, and the abrasive can be stored.

  Then, when the amount of abrasive material stored in one abrasive material mixture storage tank 22 used for the cutting process decreases below a predetermined level, the abrasive material mixture water is sent out for the cutting process. By switching between the liquid storage tank 22 and the abrasive mixed liquid storage tank 22 replenished with the abrasive, the supply of the abrasive mixed water to the spray nozzle 30 and the polishing from the abrasive recovery means 60 are performed in the same manner as described above. The replenishment of materials is performed in parallel. Thereby, the high-pressure abrasive mixed water can be stably and continuously supplied to the spray nozzle 30. Note that three or more abrasive mixture liquid storage tanks 22 may be provided and used by switching them.

  The spray nozzle 30 sprays the high-pressure abrasive mixed water (water jet J) supplied from the abrasive mixing means 20 to the workpiece 5 held on the holding table 40 from above at a high speed. Thereby, the workpiece 5 can be cut by the energy of the high-pressure water. At this time, since the abrasive material collides with the workpiece 5 together with the high-pressure water and destroys and cuts a part of the workpiece 5, the cutting efficiency can be improved. Thus, the water jet J according to the present embodiment is configured as an abrasive jet.

  The table moving means can move the holding table 40 that is a workpiece holding means in the horizontal direction (X-axis and Y-axis directions) and the vertical direction (Z-axis direction). Thus, while the water jet J is ejected from the ejection nozzle 30, the holding table 40 is moved relative to the ejection nozzle 30 in the X-axis and Y-axis directions along the planned cutting line of the workpiece 5. The workpiece 5 can be cut by applying a water jet J containing an abrasive.

  The catch tank 50 is, for example, a vertically long water tank whose upper surface is open, and functions as a water tank for the water jet J. That is, the catch tank 50 can receive the weakened power of the water jet J penetrating through the workpiece 5 as described above using the stored water as a buffer material. At the bottom of the catch tank 50, the abrasive contained in the water jet J received as described above settles and accumulates. The abrasive mixed water containing the abrasive deposited on the bottom of the catch tank 50 is transferred to the abrasive collecting means 60 by the first positive pressure pump 59 through the pipe 51.

  The abrasive recovery means 60 includes an abrasive recovery container 64 that recovers the abrasive from the abrasive recovery filter 67, an abrasive storage container 66 that stores the recovered abrasive, and an abrasive in the abrasive storage container 66. And an ultrasonic sensor 68 which is a measurement sensor for measuring the amount of accumulation (reserved amount).

  The abrasive material recovery means 60 recovers the abrasive material having a predetermined reusable particle size (for example, in the range of 30 to 100 μm) from the abrasive material mixed water transferred from the catch tank 50 by the abrasive material recovery filter 67. Then, it is stored in the abrasive material storage container 66. The abrasive mixed water containing the abrasive deposited on the bottom of the abrasive storage container 66 is cut out of the two abrasive mixed liquid storage tanks 22a and 22b via the pipe 61 by the second positive pressure pump 69. It is transferred to the abrasive mixture storage tank that is not used for processing. Further, the abrasive mixed water containing the abrasive not recovered by the abrasive recovery filter 67 is discharged to the outside through the pipe 62 by the third positive pressure pump 79.

  The water jet cutting device 1 configured as described above sends the abrasive mixture water in the abrasive mixture storage tank 22a or 22b at a high pressure by the high pressure water supplied from the high pressure pump 15, and this high pressure abrasive is used. The mixed water (abrasive jet) is sprayed from the spray nozzle 30 onto the workpiece 5 to perform cutting. Further, after the abrasive mixed water sprayed from the spray nozzle 30 is received by the catch tank 50, the abrasive recovery means 60 removes the abrasive mixed water from the abrasive mixed water and uses a reusable particle size (for example, 30 to 100 μm) is collected and returned to one of the two abrasive mixture storage tanks 122a and 122b that is not used for cutting. With such a configuration, the abrasive can be automatically circulated in the apparatus for efficient reuse.

  Further, as described above, when it is determined in the abrasive material collecting means 60 that the abrasive material is sufficiently stored in the abrasive material storage container 66 based on the measurement result by the ultrasonic sensor 68, the timely timing is obtained. Thus, the abrasive mixture water is transferred from the abrasive reservoir 66 to the abrasive mixture storage tank 22.

  However, even when it is time to transfer the abrasive to the abrasive mixture storage tank 22, it may be determined that the abrasive is not sufficiently stored in the abrasive reservoir 66. In this case, since the abrasive in the circulation system of the water jet cutting apparatus 1 has been consumed by repeated cutting processes, a new abrasive must be replenished into the circulation system.

  For example, let us consider a case where it is necessary to replenish the abrasive when about 5 kg of abrasive is consumed, assuming that the amount of abrasive circulated in the entire circulation system of the water jet cutting apparatus 1 is about 90 kg. In this case, the storage amount (deposition amount) of the abrasive material in the abrasive material storage container 66 when about 5 kg of the abrasive material is consumed is stored in advance in a memory provided in the water jet cutting device 1 as a replenishment reference amount. deep. Then, when the storage amount of the abrasive measured by the ultrasonic sensor 68 is reduced to the replenishment reference amount, the control unit of the water jet cutting device 1 indicates that the abrasive needs to be replenished. (For example, lighting of a lamp indicating “supplement of abrasives”, monitor display, or sound output).

  Thus, it is possible to automatically detect that the abrasive circulating in the water jet cutting device 1 is insufficient and notify the operator. Therefore, the operator can immediately perform the abrasive replenishment work in response to the notification.

  By the way, when the abrasive is replenished, conventionally, the operator holds the bag containing the abrasive by hand and directly replenishes the abrasive in the bag into the opening of the catch tank 50. . However, in this replenishment method, as described above, there is a problem that the abrasive material which is fine particles is scattered in the air and adheres to the surroundings of the water jet cutting apparatus 1 and the operator.

  Therefore, in order to solve such a problem, the present embodiment employs a method of supplying abrasive to the water jet cutting apparatus 1 using a special abrasive supply container. Hereinafter, the configuration of the abrasive supply container and the supply method using this abrasive supply container, which are the characteristics according to the present embodiment, will be described in detail.

  First, the configuration of the abrasive supply container 100 according to the present embodiment will be described with reference to FIGS. FIG. 2 is a perspective view showing a normal configuration of the abrasive supply container 100 according to the present embodiment, and FIG. 3 shows a configuration of the abrasive supply container 100 according to the present embodiment during supply of the abrasive. It is a perspective view shown.

  As shown in FIG. 2, the abrasive supply container 100 is, for example, a cylindrical container having a size of about 2 liters of a PET bottle, and contains therein an abrasive 200 made of, for example, about 1 kg of alumina oxide. ing. The abrasive replenishing container 100 is preferably made of a synthetic resin such as plastic from the viewpoint of light weight and ease of molding, but is not limited to this example, and is made of metal or ceramic. May be.

  The abrasive supply container 100 is, for example, a cylindrical container main body 102 that contains the abrasive, a liquid inlet 103 disposed on one side surface 102b of the container main body 102, and the one side surface 102b of the container main body 102. Abrasive material mixture discharge port 104 disposed on the other side surface 102c, a first lid member 105 that is removably screwed to the liquid inlet 103, and a screw material that is removably screwed to the abrasive material mixture discharge port 104. And a second lid member 106. The axial direction of the container body 102 is the central axis direction of the cylindrical container body 102 (the left-right direction in FIG. 2).

  As shown in FIG. 2A, the container body 102 is, for example, a cylindrical container with both ends closed. That is, the container body 102 includes a cylindrical peripheral surface 102a, a circular side surface 102b positioned on one side of the peripheral surface 102a, and a circular other side surface 102c positioned on the other side so as to face the one side surface 102b. It consists of. As shown in FIG. 2A, the abrasive 200 is accommodated in the container main body 102. The abrasive 200 is preliminarily filled into the container body 102 from the liquid inlet 103 or the abrasive mixture discharge port 104.

  The liquid inflow port 103 has a tubular shape extending in the axial direction, and protrudes from an end surface 102b on one side of the container body 102. The liquid inflow port 103 is an opening for allowing a liquid supplied from the outside to flow into the container body 102.

  The abrasive mixed liquid discharge port 104 has a tubular shape extending in the axial direction of the container body 102 and protrudes from the other end face 102 c of the container body 102. The abrasive mixed liquid discharge port 104 is an opening for discharging the abrasive mixed water in the container main body 102 to the outside.

  The liquid inlet 103 and the abrasive mixture outlet 104 are configured to be opened and closed by a first lid member 105 and a second lid member 106, respectively. It is preferable that the liquid inlet 103 and the abrasive mixed liquid outlet 104 are disposed so as to be located on substantially the same straight line (for example, on the central axis of the cylindrical container body 102). Thereby, the flow of water in the container main body 102 can be made smooth, and the abrasive mixed with water can be efficiently discharged out of the container main body 102.

  In addition, as shown in FIG. 3, the abrasive supply container 100 is configured such that the first lid member (cap) 105 is removed from the liquid inlet 103 and a liquid supply pipe is connected to the liquid inlet 103 via a joint member 111. 110 can be attached. The liquid supply pipe 110 is composed of a flexible hose, for example, and communicates with liquid supply means (for example, a water supply mechanism of a factory facility, not shown) for supplying a liquid such as water. A first valve 112 that allows / blocks the flow of water in the liquid supply pipe 110 is provided in the middle of the liquid supply pipe 110. With such a configuration, by opening the first valve 112, the water supplied from the liquid supply means via the abrasive mixed liquid ejection pipe 110 can flow into the container body 102 from the liquid inlet 103. it can.

  Further, the second lid member (cap) 106 is removed from the abrasive mixture liquid discharge port 104, and the abrasive mixture liquid discharge pipe 120 is attached to the abrasive material mixture discharge port 104 via the joint member 121. it can. The abrasive mixed liquid ejection pipe 120 is composed of, for example, a hose having a shorter flexibility than the liquid supply pipe 110. In addition, a second valve 122 that allows / blocks the flow of water in the abrasive mixed liquid ejection pipe 120 is provided in the middle of the abrasive mixed liquid ejection pipe 120. With this configuration, the abrasive mixture liquid ejection pipe 120 and the second valve 122 are opened, whereby the abrasive mixture water 202 in the container body 102 is discharged from the abrasive mixture liquid discharge port 104, and the abrasive mixture is mixed. The liquid can be ejected from the ejection port 120a at the tip of the liquid ejection pipe 120.

  Next, based on FIGS. 2-4, the abrasive | polishing material replenishment method using the abrasive | polishing material supply container 100 of the above structures is demonstrated in detail. FIG. 4 is a perspective view showing a state in which the abrasive is supplied to the water jet cutting apparatus 1 using the abrasive supply container 100 according to the present embodiment.

  In the abrasive supply container 100, the liquid inlet 103 and the abrasive mixture discharge port 104 are closed by lids 105 and 106, as shown in FIG. The internal abrasive is sealed. Thus, the abrasive supply container 100 can be suitably transported to the periphery of the water jet cutting device 1 without spilling the abrasive inside.

  When the abrasive is replenished, the water jet cutting device 1 is in a state where the abrasive mixed water is not jetted from the jet nozzle 30, that is, in a stopped state. In this state, as shown in FIG. 2 (b), the first lid member 105 is removed from the liquid inlet 103 and the second lid member 106 is removed from the abrasive mixed liquid outlet 104. Next, as shown in FIG. 3A, one end of the liquid supply pipe 110 is joined to the liquid inlet 103, and one end of the abrasive mixed liquid ejection pipe 120 is joined to the abrasive mixed liquid discharge port 104.

  Further, the valve 112 of the liquid supply pipe 110 is opened and the valve 122 of the abrasive mixture liquid ejection pipe 120 is opened with the tip of the abrasive mixture liquid ejection pipe 120 inserted into the abrasive supply port of the water jet cutting device 1. Is released. As a result, as shown in FIG. 3B, the water supplied through the liquid supply pipe 110 flows into the container main body 102 from the liquid inlet 103 and is mixed with the abrasive 200 to be mixed with the abrasive. 202, the abrasive mixed water 202 is discharged from the abrasive mixed liquid discharge port 104, passes through the abrasive mixed liquid ejection pipe 120, and is supplied to the abrasive supply port of the water jet cutting apparatus 1.

  In this embodiment, as an abrasive supply port of the water jet cutting device 1, an opening at the top of the catch tank 50 that receives the water jet J is also used as shown in FIG. As a result, it is not necessary to newly install a polishing material supply port, so there is an advantage that the existing apparatus configuration can be used as it is.

  In this case, the operator replenishes the catch tank 50 with the abrasive while the abrasive replenishment container 100 is held by hand, with the abrasive mixture liquid ejection pipe 120 inserted into the opening above the catch tank 50. As described above, the abrasive material supply container 100 accommodates, for example, about 1 kg of the abrasive material 200. For example, in the case of supplying approximately 5 kg of abrasive material in total, the five abrasive material supply containers 100 are provided. Is used continuously to replenish the abrasive.

  However, since the timing of replenishing the abrasive can be arbitrarily adjusted, for example, in one replenishment operation, only the abrasive in one abrasive replenishment container 100 is replenished, that is, 1 kg of replenishment is consumed when 1 kg of abrasive is consumed. You can also replenish it.

  In addition, a method of replenishing the abrasive using an abrasive replenishment container that contains abrasive mixed water in which water and abrasive are mixed in advance is also conceivable. However, this replenishment method has a problem that when the abrasive replenishment container is exported overseas, if the abrasive replenishment container contains water, the regulation standard is strict, and therefore, it is likely to be subject to regulation. Furthermore, there is also a problem that the abrasive remains in the container when the abrasive is replenished. Therefore, the abrasive supply container 100 according to the present embodiment employs a configuration in which the dry abrasive is encapsulated and the abrasive is ejected together with the water flowing in from the outside at the time of supply.

  Further, when replenishing the abrasive to the catch tank 50 as described above, the cutting operation of the water jet cutting device 1 must be stopped from the viewpoint of operator safety. However, the present invention is not limited to this example, and the abrasive supply port of the water jet cutting device 1 may be separately installed at any location other than the catch tank 50 on the abrasive circulation path. As a result, the abrasive replenishment operation can be performed even during the cutting process of the water jet cutting device 1, so that the work efficiency and productivity can be improved.

  Heretofore, the abrasive supply container 100 for the water jet cutting device 1 according to the present embodiment and the abrasive supply method using the same have been described in detail. According to the present embodiment, when supplying the abrasive to the water jet cutting device 1, the abrasive in the abrasive replenishing container 100 is pushed out by the water pressure and supplied to the abrasive supply port as abrasive mixed water. As a result, the abrasive will not scatter in the air. Therefore, it is possible to prevent the surroundings of the water jet apparatus 1 and the operator itself from being contaminated by the scattering of the abrasive, and to easily supply the abrasive.

  The preferred embodiments and examples of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be obvious to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

  For example, the workpiece 5 may be a semiconductor substrate such as various semiconductor wafers, a CSP substrate, a GPS substrate, a package substrate such as a BGA substrate, or the like. Further, the workpiece may be a sapphire substrate, a glass material, a ceramic material, a metal material, a synthetic resin material such as plastic, or an electronic material substrate for forming a magnetic head, a laser diode head, or the like. . Further, the shape of the workpiece 5 may be an arbitrary shape such as a substantially rectangular plate shape or a substantially disk shape.

  Moreover, although the said embodiment demonstrated the example which employ | adopted the water jet cutting device 1 as a high pressure liquid injection type cutting device, this invention is not limited to this example. The high-pressure liquid injection type cutting device can be variously modified as long as it has high-pressure liquid injection means for injecting high-pressure liquid and can cut and process a workpiece by high-pressure liquid injection. For example, the liquid to be jetted and stored is not limited to the above water example, and may be any liquid such as alcohol or oil, or a liquid in which various chemical substances are dissolved in various solvents. There may be.

  Further, the container body 102 of the abrasive supply container 100 according to the above embodiment has a cylindrical shape, but the present invention is not limited to such an example, and for example, a polygonal column shape such as a triangular column, a quadrangular column,. Alternatively, an arbitrary column shape such as an elliptic column shape may be used.

  In the above embodiment, the abrasive replenishment container 100 is held by an operator and the abrasive is replenished. However, the present invention is not limited to such an example. For example, when a large and heavy abrasive supply container is used, a support mechanism for supporting the abrasive supply container in the vicinity of the abrasive supply port may be provided.

  INDUSTRIAL APPLICABILITY The present invention can be applied to an abrasive supply container for supplying an abrasive to a high-pressure liquid injection type cutting device that cuts a workpiece by jetting a high-pressure liquid mixed with an abrasive.

It is a mimetic diagram showing the whole water jet cutting device composition concerning a 1st embodiment of the present invention. It is a perspective view which shows the structure at the time of the normal of the abrasives supply container concerning the embodiment. It is a perspective view which shows the structure at the time of abrasive | polishing material supply of the abrasive | polishing material supply container concerning the embodiment. It is a perspective view which shows the state which supplies an abrasives to a water jet cutting device using the abrasives supply container concerning the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1: Water jet cutting device 5: Workpiece 10: High pressure liquid supply means 15: High pressure pump 20: Abrasive material mixing means 22: Abrasive material mixed liquid storage tank 30: Injection nozzle 40: Holding table 50: Catch tank 60: Polishing Material recovery means 100: Abrasive supply container 102: Container body 103: Liquid inlet 104: Abrasive mixed liquid outlet 105: First lid member 106: Second lid member 110: Liquid supply pipe 120: Abrasive material mixing Liquid jet pipe 200: Abrasive material 202: Abrasive mixed water J: Water jet

Claims (3)

An abrasive replenishing container for replenishing the abrasive to a high-pressure liquid-jet cutting device that cuts a workpiece by spraying a high-pressure liquid containing the abrasive:
A container body containing the abrasive;
A liquid inlet disposed on one side of the container body;
An abrasive mixed solution discharge port disposed on a side surface of the container body facing the one side surface;
A first lid member attachable to and detachable from the liquid inlet;
A second lid member attachable to and detachable from the abrasive mixture discharge port;
With
An abrasive replenishing container for a high-pressure liquid jet cutting apparatus, wherein the liquid inlet and the abrasive mixed liquid outlet are arranged on the same straight line .   An abrasive replenishing method for replenishing an abrasive to a high-pressure liquid jet cutting device using the abrasive replenishment container according to claim 1,
  At least when the abrasive supply container is transported, the first lid member and the second lid member are attached to the liquid inlet and the abrasive mixed liquid discharge port, so that the abrasive is put into the container body. Material is enclosed,
  When the abrasive is replenished to the high-pressure liquid injection type cutting device, the liquid that has flowed into the container body from the liquid inlet with the first lid member and the second lid member removed. A method of supplying a polishing material, comprising: mixing with the polishing material, and discharging the polishing material mixture from the polishing material discharge port to the high-pressure liquid jet cutting device. When supplying abrasives to the high-pressure liquid jet cutting device,
The first lid member and the second lid member are removed, a liquid supply pipe is attached to the liquid inlet, and an abrasive mixture liquid ejection pipe is attached to the abrasive mixture outlet.
The liquid supplied through the liquid supply pipe flows into the container body from the liquid inlet and is mixed with the abrasive, and the abrasive mixture is discharged from the abrasive mixture discharge port. The method for supplying a polishing material according to claim 2 , wherein the high-pressure liquid injection type cutting device is supplied to the high-pressure liquid injection type cutting device via the polishing material mixed liquid jet pipe.

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