JP4808484B2 - Supply chamber connection structure and clean booth - Google Patents

Description

The present invention according to the coupling structure and the clean booth supply chamber for clean booth for supplying clean air.

  Conventionally, when connecting a plurality of clean booths (Patent Document 1) formed by a duct chamber composed of a blower, a filter, a thin film, etc., notches are provided at the four corners of the top plate of the clean booth, A method has been proposed in which a connecting member is inserted into a rectangular gap formed by a notch, and fixed and coupled with screws (Patent Document 2). In addition, a method of connecting clean booths with channel steel has been proposed. Furthermore, a method has also been proposed in which the thickness of the central part of the support made of aluminum alloy is reduced, and assembly and connection can be made manually by using a screwdriver (Patent Document 3).

JP 2001-74286 A JP 2002-286265 A JP 2002-309698 A

  However, the clean booth is provided with notches at the four corners of the top of the clean booth, and a connecting member is inserted into a rectangular gap formed by each notch and fixed and connected with screws. When connecting with grooved steel, it takes time to connect and divide clean booths. In addition, in the method that enables assembly and connection by manual operation using a screwdriver, dust generated at the time of connection (generated when the screw is screwed) is scattered, or multiple connections and disconnections are made. Is impossible.

The present invention has been made in view of the above points. The connection structure of the supply chamber for the clean booth, which is easy to connect and separate without generating dust, and the connection and separation without generating dust. and its object is to provide an easy and possible clean booth.

In order to achieve the above object, the present invention comprises a blowout surface made of a breathable cloth, non-woven fabric, or sheet, and a portion other than the blowout surface is made of a non-breathable sheet that can be deformed to keep clean air constant. The supply chamber for clean booth used for supplying to the space is connected to each other, and the supply chamber has a blowing surface, a non-venting surface facing the blowing surface, and the blowing surface and non-venting air. The supply chamber has a peripheral surface that forms a side surface therebetween, and the supply chamber has clean air supplied to the periphery of the blowout surface when clean air is supplied into the chamber body. Convexally bulges in the direction of the air blow direction, and forms an air flow in an oblique direction directed outwards outside the unidirectional flow from the blow surface. Wherein the circumferential surface of the supply chamber, connected freely in and uncoupling is capable connecting member provided in close contact with the peripheral surface of the other of the supply chamber, by the connection member, between the circumferential surface in the supply chamber is connected It is characterized by that.

As the connection member, a hook-and-loop fastener, a fastener, a magnet, a button, or a detachable low adhesive tape can be used.

By using these connecting members, supply chambers or ducts can be easily connected or separated, and dust generation can be prevented.

According to the present invention, upon supplying clean air into the chamber, the peripheral portion of the balloon surface, bulges convexly curved in the blowing direction side of the clean air in the peripheral portion of the balloon surface, An oblique air stream directed outward is formed. Thereby, it is possible to suppress the atmosphere of the outer non-clean space from being caught in the clean space formed by the airflow from the blowout surface.

Further, according to the present invention, the connection structure of each supply chamber described above is adopted, and the clean air supply device that supplies clean air to the supply chamber and the clean air supply device are provided. A duct for supplying clean air to the supply chamber, the supply chamber being integrated with the clean air supply device by the duct or a support member and horizontally supported so that the blow-out surface faces the lower surface. A clean booth is provided.

  According to such a clean booth, clean air is supplied from the upper side to the lower side in a compact and specific space so that the space has a cleanliness atmosphere higher than the surroundings in the height direction. It is easy and the surrounding air with low cleanliness can be prevented from being caught in the space, and the cleanliness of the space can be increased efficiently. The term “clean booth” in the present invention is used simply to mean “a device that creates a clean space locally”, and as seen in JISZ8122, “the filter is built in the ceiling surface”, “the surrounding is vinyl. It is not used as a device having an element such as “compartment with curtains”. This is clear from the embodiments described later and the essence and effects of the present invention.

Further, according to the present invention, the supply chamber connecting structure is adopted, and a clean air supply device that supplies clean air to the supply chamber is provided, so that the blow-out surface of the supply chamber faces in the horizontal direction. A clean booth is provided, wherein a supply chamber is provided on the clean air supply device.

  According to the clean booth having such a configuration, it is easy to supply clean air in the horizontal direction to make the space have a cleanliness atmosphere higher than that of the surroundings, and air with low ambient cleanliness is involved in the space. And the cleanliness of the space can be increased efficiently. Therefore, this is particularly effective when the supply target of clean air is horizontal, for example, when an operating table in a hospital or an object requiring a cleaner atmosphere is on a belt conveyor.

The duct is made of a non-breathable deformable sheet-like material and integrated with the supply chamber, and the duct is attached to a blowout port of the clean air supply device, and from the blowout port of the clean air supply device A clean booth can also be proposed in which the duct is erected by clean air blowing and the supply chamber is horizontally supported by the duct so that the blowing surface faces the lower surface.
In such a clean booth, when the supply of clean air is stopped, both the supply chamber and the duct can be folded compactly, and the entire clean booth can be reduced in size and weight.

  In such a case, the duct may have a substantially rectangular tube shape, and at least one pair of opposing faces may be connected via a connecting member for suppressing swelling in the duct. As the connecting member, a wire, a string, a thread, or a flexible belt-like member as described above can be used.

  If a caster is provided on the lower surface of the clean air supply device, the entire clean booth can be easily moved and a clean space can be created in a desired place only when necessary.

A hook-and-loop fastener, a fastener, a magnet, a button, or a peelable low adhesive tape provided on the peripheral surface of the supply chamber may also be provided in the duct.

  According to the present invention, it is possible to easily connect and separate the supply chambers while preventing dust generation. Further, since the connecting portion between the supply chamber and the duct is in close contact, it is possible to prevent dust from entering the clean space from the connecting portion.

FIG. 1 shows a side view of a basic clean booth 1. The clean booth 1 is installed in, for example, a clean room R where a semiconductor manufacturing process is performed, and further creates a highly clean work space in the clean room R. Used when doing.

  The clean booth 1 has a clean air supply device 2 and a duct 4 for sending clean air from the clean air supply device 2 to the supply chamber 3. The clean air supply device 2 has a fan, a ULPA filter, and the like in the casing. The clean air supply device 2 sucks ambient air, filters it, and supplies clean air to the duct 4. A free caster 5 is provided on the lower surface of the clean air supply device 2.

  As shown in FIGS. 2, 3, and 4, the chamber body 10 of the supply chamber 3 includes a blowing surface 11, a non-venting surface 12 that faces the blowing surface, and a space between the blowing surface 11 and the non-venting surface 12. And a non-breathable side plate 13 that constitutes the peripheral surface, and has a substantially rectangular parallelepiped shape as a whole.

  The blowout surface 11 is formed of a breathable cloth, nonwoven fabric or sheet. Examples of the breathable cloth that forms the blowout surface include, for example, a 100% polyester long-fiber fabric that is breathable (generally used as a dust-free garment for clean rooms). Further, as the non-woven fabric having air permeability, a non-woven fabric of 100% polyester long fibers, a Teflon membrane (registered trademark of DuPont), or a laminate of cloth and non-woven fabric may be used. With such a composite material, there is no flaking or the like, and the durability as a cloth is improved while maintaining the filter performance of the nonwoven fabric. A Teflon membrane laminate structure product such as Gore-Tex (registered trademark of Gore-Tex) may be used. An example of the air-permeable sheet is a synthetic resin sheet in which many fine holes are formed.

A suitable panel material may be used for the non-ventilated surface 12, but in this example , a non-breathable cloth or sheet is used. Examples of the non-breathable fabric include a fabric made of 100% polyester long fiber and low breathability (for example, a fabric used in a negative pressure clean suit with a fan). As the non-breathable sheet, for example, a polyethylene film or a soft vinyl chloride sheet can be used. Moreover, even if it does not have complete non-air permeability, it can be suitably used as long as the air permeability according to JIS L 1096 is 2 (cc / cm ² / sec) or less.

  In any case, the breathable and non-breathable cloth, non-woven fabric, and sheet used in the supply chamber 3 are washable, have low dust generation, are resistant to repeated folding, and are lightweight and have high tear and tensile strength. Those satisfying the conditions such as low elongation are preferred.

As shown in FIG. 4, the blowout surface 11 and the non-venting surface 12 are connected by a string 21 in the chamber. In this example , as shown in FIG. 2 and FIG. 3, the blowing surface 11 and the non-venting surface 12 are equidistant at a plurality of locations so as to be dotted at the intersection (set position P) of the lattice. They are tied almost evenly. The length L of the string 21 in the chamber at that time is at least the blowing surface 11 except for the set position P connected with the string 21 when clean air is supplied into the chamber, as shown in FIG. The peripheral portion in FIG. 1, that is, the side close to the side plate 13 is set so as to bend and bulge convexly toward the clean air blowing direction side by the internal pressure at that time.

The main part of the clean booth 1 is configured as described above, and when clean air from the clean air supply device 2 is supplied into the chamber of the supply chamber 3 through the duct 4, as shown in FIG. , Clean air is blown downward from the blowing surface 11. As blowing conditions, the average surface wind speed is preferably about 0.1 to 0.5 m / s, and the internal pressure in the chamber (differential pressure with respect to ambient air) is preferably 50 to 200 Pa.

The blowout surface 11 when clean air is blown out in this way is curved convexly toward the blowout direction except for the set position P. Accordingly, a slanting airflow is formed toward the outside in the peripheral portion of the curved region. As a result, in the peripheral portion of the blowing surface 11, the surrounding atmosphere is prevented from being caught at the interface with the surrounding atmosphere, and the entry of dust and the like into the clean space formed by the blown clean air is suppressed. As a result, the clean area A is not reduced as in the prior art.
Furthermore, in the above-described example , the blow-out surface 11 and the non-venting surface 12 are connected at equal intervals at a plurality of set positions P via the string 21, and the length L of the string 21 is the same. When clean air is supplied into the supply chamber 3, the thickness of the entire supply chamber 3 becomes substantially uniform.

  In addition, since it is not necessary to use a dripping wall as in the prior art, as shown in FIG. 1, the clean area A below the supply chamber 3 is obstructed to hinder the work of the worker H who operates the equipment G. There is nothing, and the working environment is good. In the environment where the clean booth 1 is installed, for example, in a place where the airflow from the horizontal direction is strong (for example, a place where a device that blows out a horizontal airflow is installed in the vicinity), the clean area formed by the clean booth 1 is In order to ensure, a sheet-like banner or the like may be attached to the side surface (circumferential surface) of the supply chamber 3 by using a hook-and-loop fastener, a fastener, and other fastening buttons.

Next, in order to investigate the effect of the present invention, an experimental result actually performed using the apparatus of FIG. 10 is shown. Regarding the experimental conditions, first, the dust concentration (the number of particles having a diameter of 0.1 μm or more) in the ambient environment X where the clean booth 1 is installed is 34860 / m ³ (987 / ft ³ ). there were. And the said laminate raw material whose air permeability of the cloth which comprises the blowing face 11 is 49.8 (cc / cm < ² > / sec) was used. As shown in FIG. 5, the blown wind speed is 0.4 to 0.7 m / s below the set position P, and 0.27 on the other side (below the convexly curved surface) on average. It was -0.35 m / s. The area vertically below the blowout surface 11 was defined as the original clean area Y, and the area slightly outside thereof was defined as the measurement area Z. In the measurement region Z, measurement points M and N were set above and below a position 50 mm outside the clean region Y. The measurement location M is set to a position 500 mm below the blowout surface 11, and the measurement location N is set to a position further 500 mm below the measurement location M. That is, in FIG. 5, D1 = 50 mm, D2 = 500 mm, and D3 = 500 mm.

As a result of measuring the dust concentration (the number of particles having a diameter of 0.1 μm or more) at the measurement points N and M, both are 0 / m ³ (that is, the dust count is 0). there were. Accordingly, even in the original clean region Y, the dust concentration is naturally 0 / m ³ , and as a result, it can be confirmed that the clean region has spread outside the original clean region Y by at least 50 mm.

In the clean booth 1 , the supply chamber 3 is horizontally supported by the duct 4 so as to blow clean air vertically downward. However, it is not necessary to support the supply chamber 3 by the duct 4, and for example, the supply chamber 3 is horizontally supported by an appropriate support member. You may support.

  Furthermore, in an environment where desk work is performed, such as the clean booth 31 shown in FIG. 6, the supply chamber 3 is vertically supported on the clean air supply device 2 so that the blowing surface 11 is directed horizontally. Also good. In addition, the clean booth 31 having such a configuration is placed next to an examination table for examining a patient and an operation table for surgery, for example, so that the examination table and the operation table are placed without interfering with illumination from above. The space can be easily made into a high cleanliness space.

Further, in the above-described example , the blowing surface 11 and the non-venting surface 12 are connected to form a dotted shape by the string 21 when viewed from the blowing direction, but as shown in FIGS. 7, 8, and 9. , And may be linearly connected by a strip-shaped partition member 41 inside the chamber.

  In such a case, in the example of FIGS. 7 to 9, the air outlet surface 11 is linearly connected from the end portion 42 on the duct 4 side to the opposite end portion 43 side, and is further open near the end portion 43 side. . That is, the length W1 in the longitudinal direction of the partition wall member 41 is shorter than the length W2 between the end portions 42 and 43 on the blowing surface 11. The partition member 41 uses the same non-breathable sheet as the material used for the non-breathing surface 12. The length (height) L of the partition member 41 is at least except for the set position Q when clean air is supplied into the chamber, as shown in FIGS. The peripheral portion of the blowing surface 11 is set so as to bulge out convexly toward the clean air blowing direction side by the internal pressure at that time.

  If the blowing surface 11 and the non-venting surface 12 are connected in a linear manner in this manner, for example, when a large chamber is formed, it is necessary to increase the pressure in the chamber. It is possible to cope with this by increasing the bonding strength with 12, and it is possible to disperse this by receiving a linear force, and the strength of the chamber can be suitably increased. In production, for example, if a non-breathable cloth band equal to the chamber height is placed between the blowout surface 11 and the non-venting surface 12 and sewn with a sewing machine from the outside, this can be easily achieved. .

In the above example , since the vicinity of the end 43 side is open, the pressure in the chamber is uniform, and the blowing surface near the end 43 is also on the blowing direction side when clean air is supplied. It can be convexly curved and bulge out, and even under the end portion 43, an oblique air flow toward the outside can be formed to suppress the entrainment of dust from the surrounding atmosphere. Since the duct 4 is disposed on the end portion 42 side, the duct 4 functions as a “sag wall”, so that dust from the ambient atmosphere is hardly generated under the end portion 42.

In the above example , the non-breathable side plate 13 is used as a member constituting the peripheral surface, but a thin film material such as a non-breathable cloth or sheet may be used instead. Furthermore, if air-permeable cloth, non-woven fabric, or sheet is used in place of the non-air-permeable side plate 13, clean air can be easily supplied in the circumferential direction.

FIG. 10 shows still another clean booth 51. The blowout surface 53 of the supply chamber 52 used in the clean booth 51 is connected to the non-ventilated surface 54 via a string at the set position P, like the blowout surface 11 in the supply chamber 3 of the clean booth 1 described above. As for the non-venting surface 54, a non-breathable cloth or sheet is used as in the non-venting surface 12 of the supply chamber 3. A non-breathable cloth or sheet is also used for the four side surfaces 55 that form the peripheral surface of the supply chamber 52.

  The supply chamber 52 is integrated with the duct 61. The duct 61 has a rectangular tube shape as a whole, and a non-breathable cloth or sheet is used as the material of the duct 61 in the same manner as the non-breathing surface 54. A pair of faces 62 and 63 facing each other in the duct 61 are connected at equal intervals at substantially the same position at the intersections of the lattices via the strings 64 in the same manner as the supply chamber 52.

The clean air supply device employed in the clean booth 51 is a fan filter unit 71. The fan filter unit 71 is accommodated in the casing 72 as shown in FIGS. The fan filter unit 71 itself has a suction port 73 in the lower part, followed by a blower 74 in the upper part, and further a purification filter such as a HEPA filter having four sides surrounded by a panel material or the like on the blower side of the blower 74. 75 is provided. A blowout port 76 is formed on the downstream side of the purification filter 75.

  The casing 72 has an open bottom surface and four side surfaces constituted by a panel material 77. A lid 78 that can freely close the opening is provided at the edge of the upper opening of the casing 72 by a hinge or the like. The end opening 61 a of the duct 61 is airtightly provided at the blowout port 76 of the fan filter unit 71. In the present embodiment, the periphery of the opening of the duct 61 is sandwiched by the flange 80 and is fastened and fixed by a fastening fixing member 79 such as a wing nut.

The clean booth 51 has the above-described configuration, and when the fan filter unit 71 is operated, clean air blown from the blowout port 76 is supplied to the supply chamber 52 via the duct 61, and the blowout surface thereof. In this embodiment, not only the non-breathing surface 54 but also the peripheral surface 55 and the duct 61 are made of a non-breathable cloth or sheet, which is shown in FIG. Thus, the supply chamber 52 and the duct 61 swell with the internal pressure during the supply of clean air to form a substantially rectangular parallelepiped shape, and this shape is maintained. The duct 61 itself has a pair of opposing faces 62 and 63 constituting the duct 61 connected to each other at almost equal intervals via the string 64, so that the thickness of the duct 61 is uniform as a whole. . Moreover, since the pressure applied to the duct 61 is dispersed by the plurality of strings 64, sufficient strength is ensured.

  When the operation of the fan filter unit 71 is stopped, the internal pressures of the duct 61 and the supply chamber 52 become the same as the outside, and the shape of the substantially rectangular parallelepiped is lost as shown in FIG. 11, resulting in a substantially flat bag shape. . Therefore, by folding it, it can be stored in the casing 72 as shown in FIG. If the lid 78 is closed as shown in FIG. 12, it can be sealed with the same cleanliness as the environment used without special packaging. In order to further improve the sealing performance, a gasket may be inserted as appropriate, or the sealing performance between the lid 78 and the panel 77 may be improved by a buckle or the like.

Further, in the above-described example , the duct 61 and the supply chamber 52 are integrated into a single bag shape, and the opening of the duct 61 is fastened and fixed to the outlet 46 of the fan filter unit 71 by a wing nut 79. Therefore, it is easy to remove the duct 61 and the supply chamber 52 from the fan filter unit 71, and it is easy to replace them. When the duct 61 and the supply chamber 52 become dirty, they are washed and reused. It is also possible.

In the clean booth 51 according to this example , the supply chamber 52 and the duct 61 are all made of materials such as cloth, non-woven fabric, and sheet. By appropriately selecting these materials, the clean booth 51 when supplying clean air Dust generation from the supply chamber 52 itself can be suppressed.

In the clean booth 51 according to this example , in order to improve the self-sustainability and the shape maintenance degree when supplying air to the supply chamber 52 and the duct 61, for example, as shown in FIG. It may be attached to both sides inside or outside the supply chamber 52 and both inside or outside the duct 61.

In the clean booth 51 according to this example , the supply chamber 3 and the duct 4 of the clean booth 1 shown in FIG. 1 are all made of a deformable material such as cloth, non-woven fabric, sheet, and the supply chamber 52 when not in use. The duct 61 can be stored in the casing 72 (there can be stored in the casing 72 even when the telescopic poles 81 and 82 are provided). The horizontal blow-out type clean booth 31 shown is composed of a non-breathable material such as cloth, non-woven fabric, sheet, etc. not only on the blow-out surface 11 but also on the non-breathing surface opposite to the blow-off surface 11 and the peripheral surface. As a result, the supply chamber 3 supplied to the chamber rises as shown in FIG. 6 when in use, and as shown in FIG. Ichanba 3 may be configured to be housed in the casing.

  Next, the example which attached the connection member is demonstrated. As shown in FIG. 13, the connecting member, for example, the hook-and-loop fastener 101, may be attached to the surface of the side plate 13a, and, as shown in FIG. You may attach directly to the ventilation surface 12a.

  FIG. 15 shows a state where the hook-and-loop fastener 101 is attached to the surface of the side plate 13a. Since the hook-and-loop fastener 101 can be connected and separated by locking the hook of the hook surface and the loop of the loop surface, as shown in FIG. For example, one side plate 13 may be alternately attached to the loop surface 101b. Accordingly, in the other supply chamber 3 to be connected, the loop surface 101b and the hook surface 101a may be attached so as to join (lock) the hook surface 101a and the loop surface 101b shown in FIG.

  By attaching the hook-and-loop fastener 101 as the connecting member to the peripheral surface of the supply chamber 3 in this way, the peripheral surfaces of the supply chamber 3 can be easily connected as shown in FIG. Can be separated. In addition, due to such close contact, the gap between the connection portions of both supply chambers 3 becomes 0, and the entry of dust into the clean area A can be suppressed.

  In addition, since the supply chambers 3 are in close contact with each other, the chambers are shaken so that the chambers come into contact with each other, and dust generation and deterioration caused by rubbing caused thereby can be prevented or suppressed.

  This is extremely effective when using clean booths side by side. That is, as shown in FIG. 18, when the clean booths are used side by side, if there is a gap 110, the surrounding dust enters the clean area A, but the connecting member of the present invention, for example, the hook-and-loop fastener 101, is used. By using and connecting the supply chambers 3 of a plurality of clean booths, it is possible to form a wide range of highly clean spaces without gaps.

As a result of actual verification by the inventors, when the dust concentration in the surrounding environment is 7.0 × 10 ⁶ (the size of the dust is 0.1 μm or more), the gap is 50 mm as shown in FIG. In the lower part of the gap 110, dust as shown in FIG. 18 was detected, but in the example of FIG. 17, the dust concentration was almost the same as the original clean region.

  In place of the hook-and-loop fastener 101, a fastener, a magnet, a button, or a peelable low adhesive tape may be used. As described above, the hook and loop surfaces of the hook-and-loop fastener 101 are usually brought into close contact with each other to achieve a connected state. However, if a mixed type of both is used, there are no restrictions on the connection and the hook and loop surfaces are free. Flexible connection is possible. Even when magnets are used, the same free connection can be realized by using a type in which N poles and S poles are mixed.

  FIGS. 19 to 26 show examples of connecting clean booths provided with connection members as shown in FIGS. The state seen from these planes is shown. These modes are arranged in consideration of work processes and flow lines. FIG. 27 shows a state where two clean booths 51 are connected to face each other. In this way, it is possible to freely form clean spaces of various forms and sizes.

  Also in the clean booth 31 of the type shown in FIG. 6, various connecting members such as hook-and-loop fasteners may be used at locations other than the blowout surface. The example of a connection in the case concerning FIG. 28, FIG. 29 was shown.

  The connecting member of the present invention may be attached to the duct 4 shown in FIGS. However, in order not to entrain dust, it is important that the width of the side plate serving as the upper chamber and the width of the duct 4 are the same.

  Moreover, you may attach the connection member of this invention to the non-ventilation surface facing the blowing surface 12, for example. FIG. 30 shows such a state. For example, a hook surface 101 a of a hook-and-loop fastener is attached to the non-venting surface 120 facing the blowout surface 11, and the loop surface 101 b of the hook-and-loop fastener is attached to the support member 123 suspended from the ceiling 121 by the string 122. The supply chamber 3 is suspended and supported by this support member 123. By doing so, the supply chamber 3 can be stably maintained without using a self-supporting pole.

  The connecting operation of the chamber with the connecting member may be performed before or after the expansion by supplying clean air. However, the connecting operation is not performed after the supply chamber has been expanded due to the supply of clean air. Cheap.

It is a side view of the basic form of the clean booth the underlying. It is a bottom view of the supply chamber used for the clean booth of FIG. It is a perspective view of the supply chamber used for the clean booth of FIG. It is a longitudinal cross-sectional view of the supply chamber used for the clean booth of FIG. It is a longitudinal cross-sectional view which shows a mode that the effect of the supply chamber used for the clean booth of FIG. 1 is investigated. It is a side view of the clean booth concerning other examples . It is a perspective view of the supply chamber concerning other examples . FIG. 8 is a bottom view of the supply chamber of FIG. 7. It is a longitudinal cross-sectional view of the supply chamber of FIG. It is a perspective view of the clean booth concerning other examples . It is a side view which shows the mode in the casing at the time of the air supply stop of the clean booth of FIG. It is a side view which shows the mode in the casing at the time of non-use of the clean booth of FIG. It is a perspective view of the supply chamber used for the clean booth concerning an embodiment. It is a longitudinal cross-sectional view of the supply chamber used for the clean booth concerning embodiment. It is a perspective view of the clean booth concerning an embodiment. It is explanatory drawing of the plane of the supply chamber used for the clean booth concerning embodiment. It is a longitudinal cross-sectional view which shows a mode that the supply chamber used for the clean booth concerning embodiment was connected. It is a longitudinal cross-sectional view which shows a mode that the clearance gap produced between supply chambers when a clean booth is juxtaposed. It is explanatory drawing of the plane which shows a mode that two clean booths concerning embodiment were connected in parallel in the same direction. It is explanatory drawing of the plane which shows a mode that two clean booths concerning embodiment were connected in parallel by mutually reverse direction. It is explanatory drawing of the plane which shows a mode that two clean booths concerning embodiment were connected in parallel at right angle direction. It is explanatory drawing of the plane which shows a mode that the two clean booths concerning embodiment are faced | matched and connected facing each other. It is explanatory drawing of the plane which shows a mode that two pairs of the clean booths which opposedly connected were connected in parallel in the same direction. It is explanatory drawing of the plane which shows a mode that a pair of clean booth connected in the orthogonal | vertical direction and the pair of clean booth of the symmetrical connection were connected in parallel. It is explanatory drawing of the plane which shows a mode that two sets of 1 pair of clean booths which faced connection were shifted and connected in the same direction. It is explanatory drawing of the plane which shows a mode that the pair of facing clean booth and the thing which juxtaposed three clean booths in the same direction were connected in the orthogonal direction. It is explanatory drawing of the side surface which shows a mode that the clean booth concerning embodiment was faced | matched and connected facing each other. It is explanatory drawing of the side surface which shows a mode that three clean booths concerning other embodiment were connected. It is explanatory drawing which shows a mode that the connection state of FIG. 28 was seen from the plane. It is a perspective view which shows a mode that a supply chamber is supported from a ceiling.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,31,51 Clean booth 2 Clean air supply apparatus 3,52 Supply chamber 4 Duct 5 Caster 11 Outlet surface 12 Non-venting surface 21 String 41 Partition member 42,43 End part 101 Surface fastener A Clean area L Length P, Q Setting position

Claims (7)

A clean booth in which the blowing surface is made of breathable cloth, non-woven fabric or sheet, and the portion other than the blowing surface is made of a deformable non-breathable sheet, and is used when supplying clean air to a certain space a structure obtained by connecting the supply chamber with each other use,
The supply chamber has a blowing surface, a non-venting surface facing the blowing surface, and a peripheral surface perpendicular to the blowing surface and the non-venting surface and constituting a side surface therebetween.
Further, when the clean air is supplied into the chamber body, the peripheral portion of the blowout surface bulges in a convex manner toward the clean air blowing direction, and the supply chamber unidirectionally flows from the blowout surface. Is configured to form an airflow in an oblique direction directed to the outside,
On the peripheral surface of the supply chamber , there is provided a connecting member that is in close contact with the peripheral surface of the other supply chamber and can be connected and released.
By the connection member, characterized in that between the peripheral surface in the supply chamber is connected, the connection structure of the supply chamber. The connection structure of a supply chamber according to claim 1, wherein the peripheral surface is made of a non-breathable deformable sheet-like material. 3. The supply chamber connection structure according to claim 1, wherein the connecting member is a hook-and-loop fastener, a fastener, a magnet, a button, or a peelable low-adhesive tape. Supply chambers are connected to each other by the supply chamber connection structure according to claim 1,
A clean air supply device for supplying clean air to the supply chamber;
A duct that is provided in the clean air supply device and supplies clean air from the clean air supply device to the supply chamber;
The clean booth is characterized in that the supply chamber is integrated with the clean air supply device by the duct or a support member, and is supported horizontally such that the blowing surface faces the lower surface. Supply chambers are connected to each other by the supply chamber connection structure according to claim 1,
A clean air supply device for supplying clean air to the supply chamber;
A duct that is provided in the clean air supply device and supplies clean air from the clean air supply device to the supply chamber;
The duct is made of a non-breathable, deformable sheet material, integrated with the supply chamber,
The duct is attached to the outlet of the clean air supply device,
By blowing clean air from the blowing port of the clean air supply device,
A clean booth, characterized in that the duct stands up and the supply chamber is horizontally supported by the duct so that its blowout surface faces the lower surface. The clean booth according to claim 4, wherein the connecting member is also provided in the duct. Supply chambers are connected to each other by the supply chamber connection structure according to claim 1,
A clean air supply device for supplying clean air to the supply chamber;
A clean booth characterized in that the supply chamber is provided in the clean air supply device so that the blow-out surface of the supply chamber faces in a horizontal direction.

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