JP4808656B2 - SMIF opener position adjustment adapter and position adjustment method - Google Patents

Description

  The present invention relates to a SMIF opener position adjustment adapter and a position adjustment method capable of easily adjusting the attachment position of a SMIF opener to a processing apparatus in the front-rear direction.

Conventionally, in the semiconductor field, a bottom lid opening / closing type SMIF (Standard) is used as a container for carrying a wafer of 200 mm size.
There is a mechanical interface box, and a side opening type FOUP (front opening unified pod) is used as a container for transferring a 300 mm wafer. As devices for automatically opening and closing these containers, there are SMIF openers and FOUP openers, respectively.

  By the way, when a wafer is transferred by FOUP, the total weight exceeds 12 kg, and it is dangerous to transfer this manually. Therefore, automation of the transfer of the container is considerably advanced, but the wafer is transferred by the SMIF box. In some cases, since manual transportation is possible, automation of container transportation is not progressing as much as FOUP.

  For example, conventionally, a SMIF box is handed over to the SMIF opener by hand, and if this is to be done by a ceiling transport device (OHT), it is installed in the workpiece delivery opening of the processing device. The installed position of the SMIF opener is shifted by several millimeters and delivery is not successful. This is because the transport path on the OHT side is straight, but there are variations in the installation positions of the processing apparatuses.

  In order to solve this problem, there is one in which the stand-by position of the mounting table on which the FOUP of the FOUP opener is mounted can be adjusted back and forth (Patent Document 1). In the case of the FOUP opener, the standby position of the table (mounting table) on which the container is placed may be adjusted as described above. However, in the case of the SMIF opener, the position of the entire opener device must be adjusted. . The reason is that not only the table on which the container is placed but also the elevator that lifts the pod, which is the upper part of the container, needs to be adjusted in order to follow the placement position of the container.

  A relatively old document (reference document 2) relating to the SMIF opener discloses a method for adjusting the mounting position of the SMIF opener and the position where the SMIF box is placed. This is to cope with different containers, and the position of the elevator cannot be adjusted. Further, the connecting element provided between the SMIF opener and the processing apparatus is also intended to prevent transmission of vibrations on the processing apparatus side, and the gap generated by the connecting element becomes a workpiece delivery part. It is not disclosed how to adjust at the opening of the processing apparatus.

  Conventionally, as a mounting member for a FOUP opener, there is a standard size frame called a BOLTS plate, but SMIF does not have such a standard size connecting member. For this reason, the fixtures manufactured by each company are attached to the wall on the processing apparatus side, thereby attaching the SMIF opener. Since the BOLTS plate made for FOUP is a standard product, it can be easily attached even if the opener model to be used is changed. In the case of the SMIF opener, the attachment to the processing device is As described above, since each company manufactures its own products, it is necessary to replace all the fixtures when changing the model of the SMIF opener to be used.

  For this reason, the BOLTS plate originally manufactured as a standard product for the FOUP opener is also proposed for use in the SMIF opener, but the one described in Patent Document 3 is also proposed. In this case, the BOLTS plate is used. The advantage obtained in this way is generated only when the model is changed from the FOUP opener to the SMIF opener or from the currently used SMIF opener to another company's SMIF opener.

The invention of the present application solves the above-mentioned problems of a fixture for a conventional SMIF opener processing apparatus, and can easily adjust the mounting position of the SMIF opener in the front-rear direction. It is an object to provide a position adjustment method.
WO2005-122241 Japanese Patent No. 2674968 Japanese translation of PCT publication No. 2002-520831

  In order to solve the above-described problems, the position adjustment adapter provided by the invention of the present application performs position adjustment between the SMIF opener and the processing device. Such an adapter may be of an integral structure or may be constituted by being divided into two parts in the vertical direction. In addition, it is preferable to provide a plurality of positions for adjusting the position between the SMIF opener and the processing apparatus in the vertical and horizontal directions. In this way, not only the position adjustment of the SMIF opener in the horizontal plane, Even when the installation surface of the processing apparatus is inclined, the three-dimensional position adjustment for horizontally installing the SMIF opener is possible.

Specifically, the following inventions described in the claims of the present application solve the above-described problems.
First, according to the first aspect of the present invention, when the SMIF opener is attached to the processing apparatus, a position adjusting adapter that enables the attachment position of the SMIF opener to the processing apparatus to be adjusted in the front-rear direction is provided on the SMIF opener. An upper adjustment section and a lower adjustment section with a mounting table as a boundary, the upper adjustment section being interposed between the shutter on the SMIF opener side and the opening of the processing device, and the SMIF The first assembly structure is fixable to the opener side and is adjustable in the longitudinal direction. The lower adjustment portion is interposed between the lower part of the SMIF opener and the opening of the processing apparatus. Te, the SMIF opener-side and securable to the side of both the processor side, Ri consists second assembly structure of telescopic adjustment in the longitudinal direction, the first Standing structure comprises a rectangular sliding frame body,
The frame body is configured such that a nest and a receiver are slidably fitted in a double or multiple manner, and the second assembly structure is composed of a pair of plates, and the assembly is a positioning adapter SMIF opener spacing of said pair of plates is characterized that you have been adjustable.

  Since the invention described in claim 1 is configured as described above, the first assembly structure and the second assembly structure are respectively moved in the front-rear direction even if the installation position of the processing apparatus varies. By appropriately adjusting the expansion and contraction, the SMIF opener can be easily attached to the processing apparatus at an appropriate position. In addition, since it can be individually expanded and contracted in correspondence with the upper and lower rear structures with the SMIF opener mounting table as a boundary, a highly versatile position adjustment adapter can be obtained.

The first assembly structure of that is provided with a rectangular sliding frame, the frame body is nested a receiving terminal and is suited slidably fits in a double or multiple structure Therefore, the distance between these can be easily adjusted while maintaining the airtightness of the tunnel between the shutter on the SMIF opener side and the opening of the processing apparatus.

Furthermore, the second assembly structure of that is composed of an assembly of a pair of plates, the assembly is the spacing of the pair of plates is freely adjusted, easy easy, lightweight assembly structure Accordingly, the distance between the lower part of the SMIF opener and the lower part of the opening of the processing apparatus can be easily adjusted.

Further, the invention described in claim 2 is the SMIF opener position adjustment adapter according to claim 1 , wherein the frame body is a means for adjusting the slide amount at four corners of the top, bottom, left and right. It is characterized in that it comprises a.

According to the second aspect of the present invention, with this configuration, the distance between the two plates of the pair of horizontally-inclined H-shaped plates constituting the second assembly structure to be described later is up, down, left, and right of the two plates. Coupled with being adjustable at the four corners, the SMIF opener can be installed horizontally even when the installation surface of the processing equipment is tilted, as well as adjusting the position of the SMIF opener in the horizontal plane. It is possible to adjust the three-dimensional position for this purpose.

The invention described in claim 3 is the SMIF opener position adjustment adapter according to claim 1 or 2 , wherein the first assembly structure further includes a thin plate-shaped portion, and the thin plate-shaped portion is provided. The portion includes an opening corresponding to a region surrounded by the frame, and a protruding portion that protrudes upward and downward from the frame, and the receiver is configured to surround the opening, and And the protruding portion is fixedly attached to the back surface of the SMIF opener .

Further, the invention described in claim 4 is the SMIF opener position adjustment adapter according to any one of claims 1 to 3 , wherein the insert is a rectangular frame inserted into the receiver. And an extended frame plate portion that is bent outwardly at right angles from one end edge on the processing device side of the four circumferences of the frame body portion, and the extended frame plate portion is formed of the processing device. It has the contact surface contact | abutted to the wall surface of the opening periphery .

According to a fifth aspect of the present invention, in the SMIF opener position adjusting adapter according to the fourth aspect , the means for making the slide amount of the frame body adjustable is the upper and lower portions of the thin plate-shaped portion. It is characterized by comprising four adjusting means for adjusting the distance between the four opposite ends of the projecting portion and the upper and lower ends of the extension frame plate portion .

The invention described in claim 6 is the SMIF opener position adjusting adapter according to claim 5 , wherein the adjusting means is provided at each of both end portions of the upper and lower protruding portions of the thin plate-shaped portion. L-shaped frame having bolt holes fixed to each other, and a grooved tongue piece having a long groove that can be bent at each of the upper and lower ends of the extension frame plate portion and can change the bolt insertion position. And bolts inserted into the bolt holes and the long grooves, and the distance between the four is adjusted by changing the insertion position of the bolts into the long course .

Furthermore, the invention described in claim 7 is the SMIF opener position adjusting adapter according to any one of claims 1 to 6, wherein the inner peripheral surface of the receiver is packed over the entire periphery. It is characterized by being provided .

The invention described in claim 8 is the SMIF opener position adjustment adapter according to any one of claims 4 to 7, wherein the expansion frame plate portion has a wall surface around the opening of the processing device. The contact surface is provided with a sealing material .

Further, the invention described in the claim 9, in the position adjustment Adapter SMIF opener according to claim 1, wherein the second assembly structure is composed of an assembly of a pair of plates of Yoko倒H-shaped It is characterized by that.

Furthermore, the invention described in claim 10 is the SMIF opener position adjustment adapter according to claim 1 or claim 9, wherein the assembly is arranged between the pair of plates at four corners in the vertical and horizontal directions. It is characterized in that it comprises adjusting means for freely adjusting the spacing.

According to the tenth aspect of the present invention, the sliding amount of the slide type frame included in the first assembly structure described above can be adjusted at the four corners on the top, bottom, left and right of the frame by this configuration. In addition to adjusting the position of the SMIF opener in the horizontal plane, even when the installation surface of the processing device is tilted, it is possible to adjust the three-dimensional position for installing the SMIF opener horizontally. Become.

Further, the invention described in claim 11 is the SMIF opener position adjustment adapter according to claim 10, wherein the adjustment means passes through the hole formed in one plate of the pair of plates. A level adjustment bolt fastened to the other plate of the plate, and a lock nut that is screwed onto a bolt outer peripheral surface of the level adjustment bolt, and the lock nut is screwed toward the other plate to The distance is adjusted by adjusting the amount of the lock nut screwed into one plate .

The invention described in claim 12 is the SMIF opener position adjusting adapter according to claim 10 or 11, wherein the four corners of the upper, lower, left, and right sides of the assembly are separated from the main body of the SMIF opener. It is characterized by being arranged at a position protruding outward in the left-right direction.

The invention described in claim 12 can easily carry out the adjustment even after the SMIF opener is installed to adjust the distance between the pair of plates constituting the assembly. Further, not only when adjusting the distance between a pair of plates, the SMIF opener is attached to or removed from one or both of these plates, or the SMIF opener is attached to or removed from the processing apparatus. These operations can be easily performed after the opener is installed.

Further, the invention described in claim 13 is the SMIF opener position adjustment adapter according to any one of claims 1, 9 to 12 , wherein the pair of plates are surfaces of the plates facing each other. A locking member is provided at a substantially central portion of the locking member, and these locking members are engaged in the vertical direction.

According to the invention described in claim 13 , since the weight of one plate can be borne by the other plate by this configuration, when connecting these plates while adjusting the distance between both plates, Adjustment and connection work can be performed easily. Further, if the weight of one plate is supported only by adjusting means (such as a bolt fastening means including the level adjusting bolt described above) used to connect both plates, a load is applied to the adjusting means itself. By providing this locking member, the load can be reduced.

Further, in the invention described in claim 14 , when the SMIF opener is attached to the processing apparatus, the position adjusting method for adjusting the attachment position of the SMIF opener with respect to the processing apparatus in the front-rear direction is the SMIF opener. The upper adjustment method and the lower adjustment method with the load port as the boundary, the upper adjustment method being interposed between the shutter on the SMIF opener side and the opening of the processing device, The lower adjustment method is interposed between the lower part of the SMIF opener and the opening of the processing apparatus. The lower adjustment portion that can be detachably fixed to both the SMIF opener side and the processing apparatus side is extended in the front-rear direction. Ri consists adjusting, the upper adjustment part comprises a rectangular sliding frame body, the frame body is nested a receiving terminal and is suited slidably fits in the double or multiple is configured, the lower adjustment part is made from the assembly of a pair of plates of Yoko倒H-shaped, the assembly, the spacing of the pair of plates is characterized that you have been adjustable This is a method for adjusting the position of the SMIF opener.

Since the invention described in claim 14 is configured as described above, even if there is a variation in the installation position of the processing apparatus, the upper adjustment unit and the lower adjustment unit are appropriately expanded and contracted in the front-rear direction. By doing so, the SMIF opener can be easily attached to an appropriate position with respect to the processing apparatus. In addition, since it is possible to individually adjust the expansion and contraction in correspondence with the upper and lower rear structures with the SMIF opener mounting table as a boundary, a highly versatile position adjustment method can be obtained.

The upper adjustment part of its is provided with a rectangular sliding frame, the frame body is composed nested the receiving terminal and is suited slidably fits in the double or multiple , lower adjustment portion of its is made from the assembly of a pair of plates of Yoko倒H-shaped, the assembly, since the distance between the pair of plates is freely adjusted, and the shutter of the S MIF opener-side While maintaining the airtightness of the tunnel between the opening of the processing apparatus, the distance between them can be easily adjusted, and with a simple and lightweight assembly structure, The distance between the processing apparatus and the opening under the processing apparatus can be easily adjusted.

  As described above, according to the position adjustment adapter and the position adjustment method of the SMIF opener of the present invention, even if there is a variation in the installation position of the processing apparatus, the first assembly structure (upper adjustment section) and the second adjustment structure The SMIF opener can be easily attached to an appropriate position with respect to the processing apparatus by appropriately adjusting the expansion and contraction of the assembly structure (lower adjustment portion) in the front-rear direction. In addition, since it is possible to individually adjust the expansion and contraction in correspondence with the upper and lower rear structures with the SMIF opener mounting table as a boundary, a highly versatile position adjustment adapter and position adjustment method can be obtained.

The first assembly structure includes a rectangular sliding frame, and the frame is configured such that the insert and the receiver are slidably fitted in a double or multiple manner. Therefore, the distance between these can be easily adjusted while maintaining the airtightness of the tunnel portion between the shutter on the SMIF opener side and the opening of the processing device.

Further, the second assembly structure is composed of a pair of plates, and the assembly is adjustable in the interval between the pair of plates, so that a simple and lightweight assembly structure is provided. Thus, the distance between the lower part of the SMIF opener and the lower part of the opening of the processing apparatus can be easily adjusted.
In addition, various effects as described above can be achieved.

  When attaching the SMIF opener to the processing device, a position adjustment adapter that allows the attachment position of the SMIF opener to the processing device to be adjusted in the front-rear direction, an upper adjustment portion, a lower adjustment portion, with the load port of the SMIF opener as a boundary, It shall consist of Here, the upper adjustment portion is interposed between the shutter on the SMIF opener side and the opening of the processing device, and can be fixed to the SMIF opener side, and can be adjusted to expand and contract in the front-rear direction. The lower adjustment unit is interposed between the lower part of the SMIF opener and the lower part of the opening of the processing apparatus, and can be detachably fixed to both the SMIF opener side and the processing apparatus side. It is assumed that the second assembly structure is adjustable in the longitudinal direction.

  The first assembly structure includes a rectangular slide-type frame body, and the frame body is configured such that a nest and a receiver are slidably fitted into each other in a double or multiple manner. It is assumed that the slide amount is adjustable at the four corners on the left and right.

  The second assembly structure is composed of an assembly of a pair of laterally H-shaped plates, and the assembly is configured such that the interval between the pair of plates is adjustable, It is assumed that the distance between the pair of plates is adjustable at the four corners of the assembly. Further, the four corners of the assembly in the vertical and horizontal directions are arranged at positions protruding outward in the horizontal direction from the SMIF opener body.

Next, an embodiment of the present invention will be described.
Here, for convenience, in the boundary table of SMIF opener consists of an upper adjustment part and the lower adjustment part, by adjusting the respective position adjustment of the SMIF opener which is adapted to adjust the position of the SMIF opener The adapter and the position adjustment method will be described. The upper adjustment part is interposed between the shutter on the SMIF opener side and the opening of the processing device, and adjusts the gap between them, and consists of a slide type frame fixed to the SMIF opener side. It is. The lower adjustment section is interposed between the opening of the processing apparatus and the lower portion of the SMIF opener, and adjusts the gap between them. When the SMIF opener is attached to the processing apparatus, since the connecting member of the lower adjustment portion is used, the attachment / detachment thereof becomes very simple.

Hereinafter, this embodiment will be described in detail with reference to the drawings.
FIG. 1 is a perspective view of the SMIF opener main body with the position adjusting adapter attached thereto, FIG. 2 is an external perspective view of the adapter alone, and FIG. 3 is an exploded view of the upper adjusting portion of the adapter. (A) is a perspective view of only the thin plate-shaped portion which is an element constituting the upper adjustment portion, and (b) is another element constituting the upper adjustment portion on the thin plate-shaped portion. The perspective view which shows the state to which the receiver of a certain frame-type shape part was fixed, with the insert of the same frame-type shape part, (c) is these thin plate shape parts and frame-type shape parts (it consists of a insert and a receiver) 4 is a partially enlarged view of FIG. 1 showing the adjustment mechanism part of the upper adjustment part of the adapter in detail, and FIG. 5 is a view showing the adapter between the SMIF opener and the processing device. The SMIF opener attached to the processing unit with a gap in between FIG. 6 is a partially enlarged view of FIG. 5 showing the adjustment mechanism of the lower adjustment part of the adapter in detail, and FIG. 7 is an enlarged XX line of FIG. FIG. 8 is a sectional view of the adjusting means used in the adjusting mechanism portion of the lower adjusting portion of the adapter. 5 and 7, the frame base for lifting up the pod of the SMIF box, the enclosure integral with the frame base, the outer cover surrounding the enclosure, and the shutter, which constitute the SMIF opener, are not shown. In FIG. 7, the robot housed in the back box constituting the SMIF opener is also omitted.

As shown in FIGS. 1 and 2, the position adjustment adapter 100 of the SMIF opener 1 according to this embodiment includes an upper adjustment unit 200 and a lower adjustment unit 300.
The upper adjustment portion 200 includes a frame shape portion 201 and a thin plate shape portion 202. The frame-shaped portion 201 has a nested double structure so that the length of the tunnel formed therein can be adjusted by adjusting the depth of insertion of the nested 201b into the receiving child 201a. It has become.

  As shown in FIGS. 2 and 3, the receiver 201 a is a complete rectangular frame, and the frame material on each side is formed of an elongated plate-like member. Are attached to each other and welded to form a rectangular frame having the same depth as the width of the plate-like members. And the packing 203 is affixed on the inner peripheral surface over the perimeter. In addition, this receptacle 201a may be formed by bending one elongated plate-like member into a rectangular shape.

  Further, the insert 201b is folded at a right angle from a rectangular frame portion 204 inserted into the receiver 201a via the packing 203, and one end edge of the four rounds of the frame portion 204 on the processing device 400 side. It has an integral structure with an extended frame plate portion 205 that is bent and expanded into a rectangular shape. The extended frame plate portion 205 is provided with extension portions 205a and 205b that are extended above and below the frame portion 204 by a required length, respectively, and both ends of the extension portions 205a and 205b are described later. Grooved tongues 206a, 206b, 207a, and 207b (not shown) that form a component of the adjusting mechanism portion and have a long groove 208 that can change the bolt insertion position are L-shaped toward the thin plate-shaped portion 202, respectively. It is bent and formed. The “required length” of “extended by the required length” described above is a length necessary and sufficient to provide these grooved tongue pieces 206a, 206b, 207a, 207b. In the present embodiment, the frame shape portion 201 is doubled, but it may be doubled if necessary.

  The thin plate-shaped portion 202 forms a base on which the frame-shaped portion 201 is attached, and has a punched plate shape in which an area corresponding to the region S surrounded by the frame-shaped portion 201 is cut out. When the shape part 201 is attached, it is provided with projecting parts 209a and 209b that project upward and downward from the frame-shaped part 201, respectively, and at both ends of the projecting parts 209a and 209b, an adjustment mechanism part to be described later is provided. L-shaped frames 210a, 210b, 211a, 211b, which are constituent elements and have bolt holes 212, are fixed by screws. Further, the protruding portions 209a and 209b form attachment portions for fixing the upper adjustment portion 200 as a whole to the back surface portion of the SMIF opener 1 with bolts. For this purpose, both end portions of the protruding portions 209a and 209b are provided. Bolt insertion holes 213 are respectively formed at appropriate positions. The protruding portion 209b is stepped with respect to the remaining plate portion of the thin plate-shaped portion 202 so as to slightly recede and hang down toward the SMIF opener 1 according to the wall shape of the back surface portion of the SMIF opener 1. May be bent (see FIGS. 1 and 7).

  A portion (FIG. 3) that surrounds the hollowed opening of the thin plate-shaped portion 202 and overlaps with the receiver 201a of the frame-shaped portion 201 (the outermost member of the frame-shaped portion 201 having a nested double structure). (A) A hatched area (T) indicates an area to be welded to the receiver 201a.

  The bolts 214 inserted into the long grooves 208 formed in the grooved tongues 206a, 206b, 207a, 207b respectively bent at both ends of the upper and lower extension portions 205a, 205b of the nest 201b of the frame-shaped portion 201, After being inserted through the bolt holes 212 of the L-shaped frames 210a, 210b, 211a, 211b attached to the thin plate-shaped portion 202 corresponding to the position, and the distance between the nest 201b and the thin plate-shaped portion 202 is adjusted As a result, the frame-shaped portion 201 and the thin plate-shaped portion 202 assembled by inserting the insert 201b into the receiver 201a are connected. That is, the ends of the extension portions 205a and 205b (four corners of the insert 201b) are fixed to the thin plate-shaped portion 202 with the bolts 214 while adjusting the position with respect to the thin plate-shaped portion 202. It is possible to adjust the distance between 201b and the thin plate-shaped part 202, in other words, the length of the tunnel of the frame-shaped part 201.

  In this way, the length of the tunnel of the frame-shaped portion 201 is increased by using the grooved tongue pieces 206a, 206b, 207a, 207b, the L-shaped frames 210a, 210b, 211a, 211b, and the four bolts 214. Each of the four portions that can be adjusted is specifically referred to as an “adjustment mechanism unit” of the upper adjustment unit 200 in the present specification. In addition, in this specification, the structure that is assembled by connecting the frame-shaped portion 201 and the thin plate-shaped portion 202 as described above is particularly referred to as a “first assembly structure”.

A seal material 215 is affixed to a portion where the nest 201b of the frame-shaped portion 201 comes into contact with the wall surface around the opening 402 of the processing apparatus 400, and the upper adjustment portion 200 is strengthened from the SMIF opener 1 side. When it is brought into contact, a completely sealed space is formed.
In this embodiment, the frame-shaped portion 201 is configured as a nested double structure. However, the frame-shaped portion 201 may be configured so as to form a tunnel using an extendable member.

Next, the structure of the lower adjustment unit 300 will be described in detail with reference to FIGS. 1, 2, 5 to 7.
Lower adjusting section 300, Abstract, a plate A attached to processing equipment 4 00 side, a plate B which is attached to the SMIF opener 1 side, and a plurality of adjusting means 301 capable of adjusting the distance of the gap between them Comprising.

  In this embodiment, the plate A and the plate B are manufactured in the same shape for cost reduction. And one board is reversed and turned upside down with respect to the other board, and both are used facing each other. However, it is not always necessary to produce the same shape. When the plate A and the plate B are manufactured using a stainless steel plate having an H shape when viewed from the front, the plate A and the plate B are used in a state where the H-shape is rotated 90 degrees and turned sideways. In this orientation, in the present embodiment, the upper and lower end portions thereof, that is, the upper and lower horizontal one end portions rotated by 90 degrees are arranged on both sides of the SMIF opener 1 when the SMIF opener 1 is installed. The size of the SMIF opener 1 is such that the mounting portion 8 of the SMIF opener 1 used in this embodiment is the main body of the SMIF opener 1 as shown in FIGS. This is because the upper and lower end portions of the plate B protrude at the positions corresponding to the attachment site 8 of the SMIF opener 1 at least.

  Further, in the present embodiment, these plates A and B are protruded from the both sides of the SMIF opener 1 (left and right protruding regions indicated by E in FIG. 5; there are four locations in total). Adjustment means 301 for adjusting the gap between A and plate B is provided. The adjusting means 301 is provided in two upper and lower portions of each of the four portions E protruding from both sides of the SMIF opener 1 of the plate A and the plate B, and the total number of installation portions is eight. Then, by adjusting each of the eight adjusting means 301, the horizontal position adjustment of the SMIF opener 1 and the inclination angle of the SMIF opener 1 with respect to the wall 401 of the processing device 400 (without removing the SMIF opener 1) ( 3D position adjustment) is possible. In this specification, the structure in which the plate A and the plate B are connected and assembled through the adjusting means 301 is particularly referred to as a “second assembly structure”. Details of the adjusting unit 301 will be described later.

  Further, the plate A and the plate B are provided with two positioning holes 302 in the vertical direction. In general, the wall 401 of the processing apparatus 400 is provided with two holes 403 at the top and bottom just below the opening 402 of the processing apparatus 400 for use in positioning (see FIG. 7). This hole 403 is provided in many processing apparatuses 400 for alignment when the SMIF opener 1 is installed, and many SMIF openers are provided with convex portions 9 at positions corresponding to the holes 403. (See FIG. 7).

  Therefore, in the plate A, a positioning member 303 having the same shape as the convex portion 9 normally provided in the SMIF opener 1 is embedded in the positioning hole 302, and this is inserted into the positioning hole 403 of the processing apparatus 400, and the plate B The same positioning hole 302 provided in is used as a positioning hole for the positioning member 303. The positioning hole 302 provided in the plate B is further used as an alignment hole for the convex portion 9 provided in the SMIF opener 1. In this way, the SMIF opener 1 can be correctly attached to the processing device 400 via the lower adjustment unit 300.

  Further, in the central part of the plates A and B, the long axes (plate A and plate B) of these plates in a state before one of these plates is inverted with respect to the other plate and turned upside down. The upper surface of the rectangular parallelepiped small piece block material C and the block material D are aligned with the surface that is equally divided into two at right angles to the H-shaped central axis that connects two parallel sides of the H-shape. The block material C and the block material D are respectively attached. Therefore, when the block material C of the plate A and the block material D of the plate B are opposed to each other and the one plate B is brought close to the other plate A upside down, as shown in FIG. In addition, the block material D is placed on the block material C. At this time, in order to avoid the tips of the block material C and the block material D from colliding with the mating plate, small rectangular openings 304 are respectively formed in the mating plate (FIGS. 1 and 2). FIG. 7). Note that circular holes 307 are formed on the entire surfaces of the plate A and the plate B at six locations, which are for reducing the weight of these plates.

  These block material C and block material D are not indispensable, but when connecting the plate A and the plate B, by engaging the block material C and the block material D together, The operation | work at the time of fastening the volt | bolt used by the adjustment means 301 grade | etc., Can be performed easily. Further, if the weight of the plate B is supported only by the adjusting unit 301 that connects the plate A and the plate B, a load is applied to the adjusting unit 301 itself. However, the block material C and the block material D should be provided. Therefore, the load can be reduced. The block material C and the block material D form an engaging member for placing the plate A and the plate B in an engaging relationship in the vertical direction.

Next, a method for installing the plate A and the plate B between the processing apparatus 400 and the SMIF opener 1 will be described.
First, the plate A and the plate B are temporarily connected by the eight adjusting means 301. In addition, the distance between the board A and the board B at this time is free. Next, the positioning member (convex part) 303 of the plate A is aligned with the positioning hole 403 of the processing device 400, and passes through the plate B and the plate A from the side of the plate B, so that four mounting bolts 305 (FIG. 2). 5 and 6) are passed through bolt holes (not shown) of the wall 401 of the processing device 400 and fixed with nuts (not shown), and the plates A and B are attached to the processing device 400.

  After the plate A and the plate B are attached to the processing device 400 in this way, the SMIF opener 1 and the plate B are connected next. As shown in FIGS. 5 and 6, the bolt insertion notch 8 a in the attachment site 8 of the SMIF opener 1 and the bolt of the plate B provided at a position facing the bolt insertion notch 8 a are provided. A bolt 306 is passed through a hole (not shown) and fastened with a nut (not shown).

  In this way, the positions of the bolts for attaching the plates A and B to the processing device 400 and the bolt positions for connecting the plates B and the SMIF opener 1 are the portions where the plates A and B protrude from the SMIF opener 1 (the laterally protruding regions). E), when removing the SMIF opener 1 for maintenance, it becomes easy to unfasten the bolts, and the plate A and the plate B may be left in the processing apparatus 400. The plate A and the plate B can be easily removed while being attached to the SMIF opener 1, which is convenient when the SMIF opener 1 is reinstalled.

In this way, after the SMIF opener 1 is installed, the gap between the plate A and the plate B is adjusted using the adjusting means 301. Next, the structure and usage of the adjusting means 301 will be described in detail with reference to FIG.
As shown in FIG. 8, the adjusting means 301 includes a fixing bolt 310 located at the center, a level adjusting bolt 311 that is loosely fitted to the fixing bolt 310, and the fixing bolt 310 and the level adjusting bolt 311. It consists of a washer 312 interposed between them and a lock nut 313 screwed into a screw on the outer peripheral surface of the level adjusting bolt 311. The level adjusting bolt 311 has a cylindrical shape with a hook, and a screw is engraved on the outer peripheral surface of the cylindrical portion, and the lock nut 313 is screwed with the screw.

Therefore, now, the two plates are connected as follows while adjusting the gap between the plates A and B.
First, the level adjusting bolt 311 is passed through the circular hole 314 formed in the plate B in a state where the lock nut 313 is screwed to the screw on the outer peripheral surface thereof, and the tip thereof is brought into contact with the surface of the plate A. . At this time, the lock nut 313 is screwed into the screw of the level adjustment bolt 311 to a position where it does not collide with the plate B. Next, the fixing bolt 310 is passed through the level adjustment bolt 311 with the washer 312 attached to the head thereof, and the screw portion at the tip thereof is predetermined in the bolt screw hole 315 drilled in the surface of the plate A. Screw in long. In this state, the fixing bolt 310 presses the tip of the level adjustment bolt 311 tightly against the surface of the plate A via the washer 312. Next, in a state where the gap between the plate A and the plate B is temporarily set to a desired distance, the lock nut 313 is screwed back so that the lock nut 313 comes into tight contact with the surface of the plate B. In this way, the gap between the plate A and the plate B can be set and adjusted to a desired distance. As described above, in the present specification, each of the eight portions that are capable of setting and adjusting the gap between the plate A and the plate B to a desired distance by using the adjusting unit 301, In particular, it is called an “adjustment mechanism unit” of the lower adjustment unit 300. The adjusting means 301 having such a structure and usage is commercially available.

  The lower adjustment unit 300 of the present embodiment is configured as described above, and adjusts the interval between two identical plates A and B, attaches or removes the SMIF opener 1 to the plate B, As shown in FIG. 5, bolt screwing points for attaching and detaching the SMIF opener 1 to and from the processing device 400 are provided at positions away from the main body of the SMIF opener 1 (left-right protruding region E). Therefore, even after the SMIF opener 1 is installed, it is easy to adjust its position and to attach and remove it.

The structure of the SMIF opener 1 according to the present embodiment is conventionally known, but this will be briefly described below with reference to FIGS. 1, 5, and 7. FIG.
A SMIF box (not shown) transported by a ceiling transport device (OHT) or the like in a bay in a semiconductor manufacturing factory is mounted on a mounting table 2 of a SMIF opener 1 attached to the processing device 400. Then, the elevator 7 (the drive part is accommodated in the lower part of the mounting table 2) is operated, and the frame base 3 having a rectangular shape in plan view surrounding the mounting table 2 is placed on the pod of the SMIF box. A portion (covering portion) is placed, and is lifted together with an enclosure and shutter 5 which are provided below and are hidden below the outer cover 4 in an integral structure. Then, the opening 402 of the processing apparatus 400 is opened, and the cassette left on the mounting table 2 is surrounded by the enclosure, and the inside of the enclosure is in an airtight communication state with the inside of the processing apparatus 400 Become. At this time, the cassette is left on the mounting table 2 while being placed on the door portion of the SMIF box.

  Next, a robot (not shown) housed in the back box 6 of the SMIF opener 1 grips the cassette and transports it to a predetermined processing unit in the processing apparatus 400. A plurality of wafers stored in the cassette are subjected to predetermined processing in the processing unit.

  A cassette storing a plurality of wafers that have been subjected to predetermined processing is returned to the mounting table 2 again by cooperative transfer between the transfer device in the processing apparatus 400 and the robot stored in the back box 6. Next, the elevator 7 is actuated again, and the frame 3 having the pod portion placed thereon is lowered together with the enclosure and the shutter 5. As a result, the opening 402 of the processing apparatus 400 is closed, and the cassette previously returned onto the mounting table 2 is covered with the pod portion. The cassette covered with the pod part is hermetically sealed and stored in the SMIF box by integrating the SMIF door on which the cassette is mounted in an airtight manner with the pod part (SMIF pod). In this state, the ceiling transfer device (OHT) in the bay holds the SMIF box and transfers it to the next processing device. The shutter 5 is housed in the back box 6 when it is raised. Reference numeral 10 denotes an LM guide for vertical movement of the robot arm housed in the back box 6.

The invention of the present application is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention.
For example, in this embodiment, as the lower adjustment unit 300, two identical plates A and B are used, and means for adjusting the interval between them by bolt screwing is used. You may comprise using the telescopic assembly used in the upper side adjustment part 200, and one plate-shaped thing (plate-shaped block body) from which thickness can be varied.

  In addition, the first assembly structure of the upper adjustment unit 200 and the second assembly structure of the lower adjustment unit 300 may be integrally coupled in the vertical direction. In this case, initially, the first assembly structure and the second assembly structure which are separate bodies may be connected and integrally coupled, and from the beginning, the shutter 5 and the processing on the SMIF opener 1 side may be combined. It is manufactured integrally from the same material so as to straddle between the part of the opening 402 of the apparatus 400 and between the lower part of the SMIF opener 1 and the lower part of the opening 402 of the processing apparatus 400, and is integrally connected. But it ’s okay.

It is a perspective view of the state which attached the position adjustment adapter of a present Example to the SMIF opener main body. It is an external appearance perspective view of the adapter simple substance. It is an exploded view of the upper adjustment part of the adapter, (a) is a perspective view of only a thin plate-shaped part that is an element constituting the upper adjustment part, (b) is the same as the above thin plate-shaped part The perspective view which shows the state to which the receptacle of the frame type shape part which is another element which comprises a side adjustment part was fixed, with the nest | insert of the same frame type shape part, (c) is these thin plate shape parts and frame type | molds It is a perspective view which shows the state by which the shape part (it consists of a nest | insert and a receiver) was assembled. It is the elements on larger scale of FIG. 1 which shows the adjustment mechanism part of the upper side adjustment part of the adapter in detail. It is the front view which looked at the state which interposed the same adapter between the SMIF opener and the processing apparatus, and attached the SMIF opener to the processing apparatus from the SMIF opener side. It is the elements on larger scale of FIG. 5 which shows the adjustment mechanism part of the lower side adjustment part of the adapter in detail. FIG. 6 is an enlarged cross-sectional view taken along line X-X in FIG. 5. It is sectional drawing of the adjustment means used in the adjustment mechanism part of the lower side adjustment part of the adapter.

DESCRIPTION OF SYMBOLS 1 ... SMIF opener, 2 ... Mounting base, 3 ... Frame base, 4 ... Outer cover, 5 ... Shutter, 6 ... Back box, 7 ... Elevator, 8 ... Installation part, 8a ... Notch for bolt insertion, 9 ... Convex part DESCRIPTION OF SYMBOLS 10 ... LM guide, 100 ... Position adjustment adapter, 200 ... Upper adjustment part, 201 ... Frame shape part, 201a ... Receptor, 201b ... Nesting, 202 ... Thin plate shape part, 203 ... Packing, 204 ... Frame part 205 ... Expansion frame plate part, 205a, 205b ... Extension part, 206a, 206b ... Grooved tongue, 207a, 207b ... Grooved tongue, 208 ... Long groove, 209a, 209b ... Protruding part, 210a, 210b ... L-shaped frame 211a, 211b ... L-shaped frame, 212 ... bolt hole, 213 ... bolt insertion hole, 214 ... bolt, 215 ... seal material, 300 ... lower adjustment part, 301 ... adjustment Step 302: Positioning hole 303 ... Positioning member 304 ... Small opening 305 ... Mounting bolt 306 ... Bolt 307 ... Round hole 310 ... Fixing bolt 311 ... Level adjustment bolt 312 ... Washer 313 ... Lock Nuts, 314 ... circular holes, 315 ... bolt screw holes, 400 ... processing device, 401 ... wall, 402 ... opening, 403 ... positioning hole, A, B ... plate, C, D ... block material, E ... left-right protruding Region, S, T ... region.

Claims (14)

When the SMIF opener is attached to the processing apparatus, a position adjustment adapter that enables the attachment position of the SMIF opener to the processing apparatus to be adjusted in the front-rear direction is provided with an upper adjustment section and a lower It consists of the adjustment part,
The upper adjustment section is interposed between the shutter on the SMIF opener side and the opening of the processing apparatus, and can be fixed to the SMIF opener side, and can be adjusted to expand and contract in the front-rear direction. Consist of body,
The lower adjustment unit is interposed between the lower part of the SMIF opener and the lower part of the opening of the processing apparatus, and can be fixed to both the SMIF opener side and the processing apparatus side in the front-rear direction. Ri consists stretchable adjustable for a second assembly structure,
The first assembly structure includes a rectangular sliding frame,
The frame body is configured such that the insert and the receiver are slidably fitted in a double or multiple manner,
The second assembly structure includes an assembly of a pair of plates,
The assembly, alignment adapter SMIF opener spacing of said pair of plates is characterized that you have been adjustable. The SMIF opener position adjusting adapter according to claim 1 , wherein the frame body is provided with means for adjusting the sliding amount at four corners in the vertical and horizontal directions. The first assembly structure further includes a thin plate portion,
The thin plate-shaped portion has an opening corresponding to a region surrounded by the frame, and a protruding portion that protrudes upward and downward from the frame,
The receiver is attached to the thin plate-shaped portion so as to surround the opening,
The protruding portion is fixedly attached to the back surface of the SMIF opener.
The SMIF opener position adjustment adapter according to claim 1 or 2, The insert includes a rectangular frame portion inserted into the receiver, and an extended frame plate portion that is bent outward at a right angle from one end edge on the processing apparatus side of the four circumferences of the frame portion. Consisting of
The expansion frame plate portion has a contact surface that abuts against a wall surface around the opening of the processing apparatus.
The SMIF opener position adjusting adapter according to any one of claims 1 to 3. The means for making the slide amount of the frame adjustable is between the four opposite ends of the upper and lower protruding portions of the thin plate-shaped portion and the upper and lower ends of the extended frame plate portion. Consists of four adjustment means to adjust the distance each
The SMIF opener position adjusting adapter according to claim 4. The adjusting means includes an L-shaped frame having a bolt hole fixed to each of both end portions of the upper and lower protruding portions of the thin plate-shaped portion, and upper and lower end portions of the extension frame plate portion. Each of which is formed of a tongue with a groove having a long groove which can be changed in a bolt insertion position, and a bolt inserted into the bolt hole and the long groove.
Adjust the distance between the four by changing the insertion position of the bolt into the length course.
The SMIF opener position adjusting adapter according to claim 5. On the inner peripheral surface of the receptacle, which is a rectangular frame, packing is provided over the entire circumference.
The SMIF opener position adjusting adapter according to any one of claims 1 to 6. A sealing material is provided on a contact surface of the expansion frame plate portion with a wall surface around the opening of the processing apparatus.
The SMIF opener position adjusting adapter according to any one of claims 4 to 7. The second assembly structure includes an assembly of a pair of horizontally H-shaped plates.
The SMIF opener position adjusting adapter according to claim 1. The assembly, at the corner of the upper, lower, left and right four locations, the position of the SMIF opener according to claim 1 or claim 9, characterized in that it comprises adjusting means for freely adjusting the spacing of said pair of plates Adjustment adapter. The adjusting means is screwed into a level adjusting bolt fastened to the other plate of the pair of plates and a bolt outer peripheral surface of the level adjusting bolt through a hole formed in one plate of the pair of plates. A lock nut provided,
The lock nut is screwed toward the other plate and brought into contact with the one plate, and the distance is adjusted by adjusting an amount of screwing the lock nut.
The SMIF opener position adjusting adapter according to claim 10. 12. The SMIF opener according to claim 10 , wherein corners of the upper, lower, left, and right four portions of the assembly are disposed at positions protruding outward from the SMIF opener main body in the left-right direction. Position adjustment adapter. Claim 1 wherein the pair of plates, which comprises a locking member at a substantially central portion of the mutually facing surfaces of both plates, characterized in that these locking members are engaged in the vertical direction, according to claim 9 The SMIF opener position adjustment adapter according to claim 12 . When the SMIF opener is attached to the processing apparatus, a position adjustment method for adjusting the attachment position of the SMIF opener with respect to the processing apparatus in the front-rear direction includes an upper adjustment method and a lower side with the load port of the SMIF opener as a boundary. Adjustment method,
In the upper adjustment method, the upper adjustment portion that is interposed between the shutter on the SMIF opener side and the opening of the processing apparatus and that can be fixed to the SMIF opener side is adjusted to extend and contract in the front-rear direction. Consisting of
The lower adjustment method is interposed between the lower part of the SMIF opener and the opening of the processing apparatus, and can be detachably fixed to both the SMIF opener side and the processing apparatus side. and the lower adjustment part Ri consists of telescopic adjustment in the longitudinal direction,
The upper adjustment section includes a rectangular slide frame,
The frame body is configured such that the insert and the receiver are slidably fitted in a double or multiple manner,
The lower adjustment portion comprises an assembly of a pair of horizontally H-shaped plates,
The assembly method for adjusting position of SMIF opener spacing of said pair of plates is characterized that you have been adjustable.

Images